KR102173607B1 - Stocker conveyor - Google Patents

Stocker conveyor Download PDF

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Publication number
KR102173607B1
KR102173607B1 KR1020190054875A KR20190054875A KR102173607B1 KR 102173607 B1 KR102173607 B1 KR 102173607B1 KR 1020190054875 A KR1020190054875 A KR 1020190054875A KR 20190054875 A KR20190054875 A KR 20190054875A KR 102173607 B1 KR102173607 B1 KR 102173607B1
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South Korea
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driving
pair
rail
stocker
bogie
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KR1020190054875A
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Korean (ko)
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정광구
장용배
나경주
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시너스텍 주식회사
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Priority to KR1020190054875A priority Critical patent/KR102173607B1/en
Priority to CN202010393875.8A priority patent/CN111908123B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
    • B65G25/04—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having identical forward and return paths of movement, e.g. reciprocating conveyors
    • B65G25/06—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having identical forward and return paths of movement, e.g. reciprocating conveyors having carriers, e.g. belts
    • B65G25/065—Reciprocating floor conveyors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

According to the present invention, a stocker conveyor includes: a conveyance rail including a straight section and a curved section; and a bogie which moves along the straight section and the curved section of the conveyance rail and changes its driving direction. Such the stocker conveyor moves along the straight section and the curved section of a bogie rail, and includes a body part, a turntable, a pair of running parts, an elevator part, and a turn bearing. It is possible to run straight, curved, lift, and rotate without an additional buffer or equipment, and transfer to the buffer itself is possible. Therefore, there is no need for additional buffers or equipment for logistics transfer.

Description

스토커 컨베이어{STOCKER CONVEYOR}Stocker conveyor {STOCKER CONVEYOR}

본 발명은 스토커 컨베이어에 관한 것으로, 구체적으로는 직선 구간 및 곡선 구간을 포함하는 반송 레일 및 상기 반송 레일을 따라 이동하며 주행 방향이 변경되는 대차로 구성된 스토커 컨베이어에 관한 것이다.The present invention relates to a stocker conveyor, and more particularly, to a stocker conveyor comprising a conveying rail including a straight section and a curved section, and a bogie moving along the conveying rail and changing a driving direction.

일반적으로 정보화 사회의 발전에 부응하여 액정 표시장치(Liquid Crystal Display: LCD) 및 유기전계 발광소자(Organic Light Emitting Diodes: OLED) 등과 같은 평판 표시장치(Flat Panel Display: FPD)의 사용이 증가하고 있다.In general, in response to the development of the information society, the use of flat panel displays (FPDs) such as liquid crystal displays (LCDs) and organic light emitting diodes (OLEDs) is increasing. .

이러한 평판 표시장치를 제조하는 공정 시 기판은 낱장 또는 그룹 형태로 각 제조 장비에 반송된다. 이때, 다수의 기판을 낱장으로 적재하여 그룹 형태로 반송할 수 있는 카세트(cassette)가 사용될 수 있다. 즉, 기판은 카세트에 적재된 상태로 제조 장비로 반송된다.In the process of manufacturing such a flat panel display, the substrates are transferred to each manufacturing equipment in the form of a single sheet or a group. In this case, a cassette capable of loading a plurality of substrates in a single sheet and transporting them in a group form may be used. That is, the substrate is conveyed to the manufacturing equipment while being loaded on the cassette.

한편, 기판 제조 공정을 수행하는 제조 장비들은 각각 기판 처리 능력 및 처리 시간이 다르다. 이로 인해, 카세트를 임시로 보관하는 스토커(stocker)가 사용되며, 스토커는 선반(shelf), 포트(port) 및 랙 마스터(rack master)를 포함하고, 선반은 기판이 적재된 카세트를 실제적으로 보관하는 설비이다.On the other hand, manufacturing equipments that perform a substrate manufacturing process have different substrate processing capabilities and processing times. For this reason, a stocker for temporarily storing cassettes is used, the stocker includes a shelf, a port and a rack master, and the shelf actually stores a cassette loaded with a substrate. It is a facility to do.

또한, 평판 표시장치 제조 공정에서 작업 효율을 높이기 위하여 다수의 기판이 수납된 카세트를 스토커와 스토커 사이 또는 스토커와 각 공정이 수행되는 장비 사이에서 반송하는 컨베이어(CONVEYOR)가 더 구비된다.In addition, a conveyor (CONVEYOR) for transporting a cassette containing a plurality of substrates between a stocker and a stocker or between the stocker and equipment on which each process is performed is further provided in order to increase work efficiency in a manufacturing process of a flat panel display device.

따라서, 컨베이어는 카세트가 임시로 저장된 스토커와 스토커 사이 또는 스토커와 일련의 공정이 수행되는 장비 사이를 왕복하면서, 카세트를 스토커에서 스토커로 또는 스토커에서 각 장비들로 그리고 각 장비들에서 스토커로 각각 반송하게 된다.Thus, the conveyor transports the cassette from the stocker to the stocker or from the stocker to each equipment and from each equipment to the stocker, reciprocating between the stocker and the stocker in which the cassette is temporarily stored or between the stocker and equipment on which a series of processes is performed. Is done.

이와 같은 스토커 컨베이어에 관한 대표적인 예가 도 1(이하, '종래기술'이라 한다)에 개시되어 있다. A representative example of such a stocker conveyor is disclosed in FIG. 1 (hereinafter, referred to as “prior art”).

도 1에 도시한 바와 같이, 종래기술에 따른 스토커 컨베이어는, 정해진 경로를 따라 카세트(30)를 반송할 수 있도록 생산 라인에 설치된 반송 레일(10) 및 상기 반송 레일(10)을 따라 이동하며 카세트(30)가 수납되는 대차(20)로 구성된다.As shown in FIG. 1, a stocker conveyor according to the prior art moves along a conveying rail 10 installed on a production line and the conveying rail 10 so as to convey the cassette 30 along a predetermined path, and the cassette It consists of a cart 20 in which 30 is accommodated.

또한, 반송 레일(10)은 'ㄱ'자로 90° 절곡되어 X축에서 Y축으로 카세트(30)의 반송 경로가 변경된다. 그리고, 대차(20)는 X축을 주행하는 제1 대차(21)와, Y축을 주행하는 제2 대차(22)로 구성된다.In addition, the conveying rail 10 is bent by 90° in a'A' shape to change the conveying path of the cassette 30 from the X axis to the Y axis. And, the bogie 20 is composed of a first bogie 21 running along the X-axis and a second bogie 22 running along the Y axis.

이때, 제1 대차(21)는 X축 주행, Z축 승강 및 T축 회전이 이루어지는 3축 대차가 적용되며, 제2 대차(22)는 Y축 주행, Z축 승강이 이루어지는 2축 대차가 적용된다.At this time, the first bogie 21 is applied with a three-axis bogie in which X-axis travel, Z-axis elevation, and T-axis rotation are applied, and the second bogie 22 is a two-axis bogie with Y-axis driving and Z-axis elevation. .

이러한 제1 대차(21)의 T축 회전은 카세트(30)의 반송 시에도 방향성을 유지하기 위함이며, 이는 카세트(30)의 일측에 기판이 인출입되는 투입구가 형성되어 있어, 카세트(30)가 반송된 스토커 또는 제조 공정을 수행하는 제조 장비들에서 해당 투입구를 통해 기판을 인출입하도록 방향성을 유지해야 하기 때문이다.The rotation of the T-axis of the first bogie 21 is to maintain directionality even when the cassette 30 is transported, and this is an inlet port through which the substrate is withdrawn from one side of the cassette 30, so that the cassette 30 This is because the stocker or manufacturing equipment that performs the manufacturing process must maintain the orientation so that the substrate is drawn in and out through the corresponding inlet.

또한, 레일(10)의 입구, X축에서 Y축으로 반송 경로가 변경되는 부분 및 출구에는 카세트(30)의 대기 장소인 3곳의 버퍼(40)가 구비된다.In addition, three buffers 40, which are waiting places for the cassette 30, are provided at the entrance of the rail 10, the portion where the conveyance path is changed from the X axis to the Y axis, and the exit.

구체적으로, 버퍼(40)는 스토커의 랙 마스터(50)에서 제1 대차(21)로의 카세트 반송 전 대기 장소, 제1 대차(21)에서 제2 대차(22)로의 카세트 반송 전 대기 장소 및 제2 대차(22)에서 다른 스토커 또는 제조 공정을 수행하는 제조 장비로의 카세트 반송 전 대기 장소이다.Specifically, the buffer 40 is a waiting place before the cassette transfer from the rack master 50 of the stocker to the first cart 21, a waiting place before transferring the cassette from the first cart 21 to the second cart 22, and the second 2 This is a waiting place before the cassette is conveyed from the cart 22 to another stocker or manufacturing equipment that performs a manufacturing process.

그러나, 종래기술의 스토커 컨베이어는 카세트의 반송 방향(대차의 주행 방향)이 변경됨에 따라 대차의 수가 늘어나는 문제점이 있었다. 즉, X축에서 Y축으로 반송 방향이 2회 변경되면 대차의 수도 2대로 늘어나며, X축, Y축, X축으로 반송 방향이 3회 변경되면 대차의 수도 3대로 늘어나게 된다.However, the stocker conveyor of the prior art has a problem in that the number of bogies increases as the conveying direction of the cassette (the driving direction of the bogie) is changed. That is, when the conveying direction is changed from the X-axis to the Y-axis twice, the number of bogies increases to two, and when the transfer direction is changed three times in the X-axis, Y-axis, and X-axis, the number of bogies increases to three.

뿐만 아니라, 대차의 수가 늘어남에 따라 버퍼의 수도 늘어나게 된다. 즉, 종래기술의 스토커 컨베이어는 대차 및 버퍼의 수가 늘어남에 따라 스토커 컨베이어의 제조 원가가 높아지고, 수익성이 저하되는 문제점이 있다.In addition, as the number of bogies increases, the number of buffers increases. That is, the stocker conveyor of the prior art has a problem in that the manufacturing cost of the stocker conveyor increases and profitability decreases as the number of carts and buffers increases.

따라서, 카세트의 반송 방향(대차의 주행 방향)이 변경되어도 1대의 대차를 적용할 수 있는 개선된 형태의 스토커 컨베이어의 개발이 요구되고 있는 실정이다.Therefore, even if the conveying direction of the cassette (the traveling direction of the cart) is changed, the development of an improved stocker conveyor capable of applying a single cart is required.

공개특허공보 제10-2008-0056049호(2008.06.20.)Unexamined Patent Publication No. 10-2008-0056049 (2008.06.20.)

본 발명은 전술한 종래의 제반 문제점을 해결하기 위하여 안출된 것으로, 본 발명의 목적은 카세트의 반송 방향(대차의 주행 방향)이 변경되어도 1대의 대차를 적용할 수 있고, 추가적인 대차 및 버퍼가 필요하지 않은 스토커 컨베이어를 제공하는 데 있다.The present invention was conceived to solve the above-described problems in the related art, and an object of the present invention is that even when the conveying direction of the cassette (the driving direction of the vehicle) is changed, one bogie can be applied, and additional bogies and buffers are required. It is to provide a stocker conveyor that is not.

상기와 같은 목적을 달성하기 위한 본 발명은 직선 구간 및 곡선 구간을 포함하는 반송 레일; 및 상기 반송 레일의 직선 구간 및 곡선 구간을 따라 이동하며 주행 방향이 변경되는 대차를 포함하는 것을 특징으로 하는 스토커 컨베이어를 제공한다.The present invention for achieving the above object is a transport rail including a straight section and a curved section; And it provides a stocker conveyor, characterized in that it comprises a bogie moving along the straight section and the curved section of the conveying rail and the driving direction is changed.

여기서, 상기 대차는, 본체부; 상기 본체부의 일측에 설치되어 회전하는 턴테이블; 상기 본체부의 타측에 주행 방향을 따라 간격을 두고 설치되고, 상기 반송 레일의 일면에 접하는 주행 휠이 양측면에 구비된 한 쌍의 주행부; 상기 한 쌍의 주행부의 내측에 설치되고, 상기 본체부를 승강시키는 승강부; 및 상기 승강부 및 상기 본체부 사이에 설치되는 한 쌍의 턴베어링을 포함하는 것을 특징으로 한다.Here, the bogie, the body portion; A turntable installed on one side of the main body and rotating; A pair of driving units installed at intervals along the driving direction on the other side of the main body and having driving wheels in contact with one surface of the conveying rail provided on both side surfaces; A lifting part installed inside the pair of driving parts and lifting the main body part; And it characterized in that it comprises a pair of turn bearings installed between the lifting part and the body part.

이때, 상기 한 쌍의 주행부는, 상기 양측면 중 일측면에 구비된 주행 휠에 연결되고, 상기 주행 휠이 회전하도록 구동력을 제공하는 구동부를 포함하는 것을 특징으로 한다.In this case, the pair of driving units may include a driving unit connected to a driving wheel provided on one of the two side surfaces and providing a driving force to rotate the driving wheel.

또한, 상기 한 쌍의 주행부는, 상기 양측면 중 타측면에 설치되고, 상기 주행 휠을 사이에 두고 양측에 배치된 한 쌍의 가이드부를 더 포함하는 것을 특징으로 한다.In addition, the pair of driving units may further include a pair of guide units installed on the other side of the both side surfaces and disposed on both sides with the driving wheel interposed therebetween.

또한, 상기 한 쌍의 가이드부는, 상기 타측면에 일면이 고정되고, 상기 일면으로부터 상기 반송 레일을 향하여 연장 형성된 수평면이 구비된 블럭부; 및 상기 블럭부의 수평면을 관통하는 회전축에 설치되고, 상기 반송 레일의 측면에 접한 상태에서 회전 가능하도록 구비된 가이드 휠을 포함하는 것을 특징으로 한다.In addition, the pair of guide portions, one surface is fixed to the other side, and a block portion provided with a horizontal surface extending from the one surface toward the conveyance rail; And a guide wheel installed on a rotation shaft penetrating the horizontal plane of the block unit and rotatably provided in contact with a side surface of the transport rail.

본 발명에 따른 스토커 컨베이어는 대차가 반송 레일의 직선 구간 및 곡선 구간을 따라 이동하며 본체부, 턴테이블, 한 쌍의 주행부, 승강부 및 턴베어링을 포함하여 구성되기 때문에 추가 버퍼나 장비 없이 직선 주행, 곡선 주행, 승강, 회전이 가능하고, 자체적으로 버퍼로의 이송이 가능하다. 따라서, 물류 이송을 위한 추가적인 버퍼나 장비가 필요치 않은 효과가 있다.The stocker conveyor according to the present invention moves along a straight section and a curved section of a conveyance rail, and includes a body part, a turntable, a pair of running parts, an elevating part, and a turn bearing, so it runs straight without additional buffers or equipment. , Curved driving, lifting, and rotation are possible, and transfer to the buffer is possible by itself. Therefore, there is an effect that no additional buffer or equipment is required for logistics transfer.

또한, 본 발명에 따른 스토커 컨베이어는 가이드 휠이 반송 레일의 측면에 접한 상태로 곡선 구간을 이동함에 따라, 대차는 가이드 휠에 의해 가이드되어 반송 레일의 곡선 구간을 이동하며 주행 방향이 X축에서 Y축으로 원활하게 변경될 수 있다. 따라서, 카세트의 반송 방향을 변경하기 위한 대차 및 버퍼의 수가 증가하지 않으며, 이로 인해 제조 원가가 낮아지게 되어 수익성이 향상되고, 제품의 경쟁력이 향상되는 효과가 있다.In addition, in the stocker conveyor according to the present invention, as the guide wheel moves through the curved section in contact with the side of the transfer rail, the bogie is guided by the guide wheel to move the curved section of the transfer rail, and the driving direction is Y in the X axis. It can be smoothly changed to the axis. Therefore, the number of carts and buffers for changing the conveyance direction of the cassette does not increase, resulting in lower manufacturing cost, thereby improving profitability and improving product competitiveness.

또한, 본 발명에 따른 스토커 컨베이어는 카세트 반송량에 따른 누적시간이 종래기술에 비해 감소하기 때문에 전체적인 물류 이송 속도가 증가하여 수익성이 향상된다.In addition, in the stocker conveyor according to the present invention, since the cumulative time according to the cassette conveyance amount decreases compared to the prior art, the overall logistics transfer speed increases, thereby improving profitability.

도 1은 종래기술에 따른 스토커 컨베이어를 도시한 평면도이다.
도 2는 본 발명에 따른 스토커 컨베이어를 도시한 평면도이다.
도 3은 본 발명에 따른 스토커 컨베이어에서 대차를 분해 도시한 사시도이다.
도 4는 본 발명에 따른 스토커 컨베이어에서 대차의 한 쌍의 가이드부를 확대한 사시도이다.
도 5는 종래기술의 스토커 컨베이어와 본 발명의 스토커 컨베이어의 카세트 반송량에 따른 누적 시간을 나타낸 도면이다.1 is a plan view showing a stocker conveyor according to the prior art.
2 is a plan view showing a stocker conveyor according to the present invention.
3 is an exploded perspective view showing the bogie in the stocker conveyor according to the present invention.
4 is an enlarged perspective view of a pair of guide portions of a bogie in the stocker conveyor according to the present invention.
5 is a view showing the cumulative time according to the cassette conveyance amount of the stocker conveyor of the prior art and the stocker conveyor of the present invention.

이하, 본 발명의 실시예를 첨부된 도면들을 참조하여 상세하게 설명한다. 우선 각 도면의 구성 요소들에 참조 부호를 첨가함에 있어서, 동일한 구성 요소들에 대해서는 비록 다른 도면상에 표시되더라도 가능한 한 동일한 부호를 가지도록 하고 있음에 유의해야 한다. 또한, 본 발명의 요지를 흐릴 수 있다고 판단되는 경우에는 그 상세한 설명은 생략한다. 또한, 이하에서 본 발명의 실시예를 설명할 것이나, 본 발명의 기술적 사상은 이에 한정하거나 제한되지 않고 당업자에 의해 실시될 수 있음은 물론이다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First of all, in adding reference numerals to elements of each drawing, it should be noted that the same elements are assigned the same numerals as possible even if they are indicated on different drawings. In addition, if it is determined that the subject matter of the present invention may be unclear, detailed description thereof will be omitted. In addition, embodiments of the present invention will be described below, but the technical idea of the present invention is not limited thereto or is not limited thereto, and may be implemented by a person skilled in the art.

도 2는 본 발명에 따른 스토커 컨베이어를 도시한 평면도이고, 도 3은 본 발명에 따른 스토커 컨베이어에서 대차를 분해 도시한 사시도이며, 도 4는 본 발명에 따른 스토커 컨베이어에서 대차의 한 쌍의 가이드부를 확대한 사시도이다.Figure 2 is a plan view showing a stocker conveyor according to the present invention, Figure 3 is an exploded perspective view showing a bogie in the stocker conveyor according to the present invention, Figure 4 is a pair of guides of the bogie in the stocker conveyor according to the present invention It is an enlarged perspective view.

이하, 도 2 내지 도 4를 참조하여, 본 발명의 바람직한 실시예에 따른 스토커 컨베이어를 설명한다.Hereinafter, a stocker conveyor according to a preferred embodiment of the present invention will be described with reference to FIGS. 2 to 4.

도 2를 참조하면, 본 발명에 따른 스토커 컨베이어는 직선 구간 및 곡선 구간을 포함하는 반송 레일(100) 및 상기 반송 레일(100)의 직선 구간 및 곡선 구간을 따라 이동하며 주행 방향이 변경되는 대차(200)를 포함하여 구성될 수 있다.Referring to Figure 2, the stocker conveyor according to the present invention is a transport rail 100 including a straight section and a curved section, and a bogie that moves along the straight section and the curved section of the transfer rail 100 and changes the driving direction ( 200) may be included.

여기서, 반송 레일(100)은 정해진 경로를 따라 카세트를 반송할 수 있도록 생산 라인을 따라 설치되고, 대차(200)는 카세트를 수납한 상태로 반송 레일(100)의 직선 구간 및 곡선 구간을 따라 이동하도록 구성된다.Here, the conveyance rail 100 is installed along the production line so that the cassette can be conveyed along a predetermined path, and the bogie 200 moves along a straight section and a curved section of the conveying rail 100 in a state in which the cassette is stored. Is configured to

또한, 반송 레일(100)의 전체적인 형태는 곡선 형태의 'ㄱ'자로서, X축에서 Y축으로 카세트의 반송 경로가 변경된다. 여기서, 반송 레일(100)은 후술할 주행 휠(231)이 대면하는 평평한 일면(110)과, 후술할 가이드 휠(232b)이 대면하는 측면(120)이 형성될 수 있다.In addition, the overall shape of the transfer rail 100 is a curved'a' shape, and the transfer path of the cassette is changed from the X axis to the Y axis. Here, the transport rail 100 may have a flat surface 110 facing the traveling wheel 231 to be described later, and a side surface 120 facing the guide wheel 232b to be described later.

그리고, 대차(200)는 카세트를 수납한 상태로 X, Y축 주행, Z축 승강 및 T축 회전이 이루어지는 3축 대차(200)가 적용된다.And, the bogie 200 is a three-axis bogie 200 in which the X-axis and Y-axis travel, the Z-axis elevation, and the T-axis rotation are applied in a state in which the cassette is accommodated.

한편, 반송 레일(100)의 입구 및 출구에는 카세트의 대기 장소인 2곳의 버퍼(300)가 구비된다.On the other hand, at the entrance and exit of the transfer rail 100, two buffers 300, which are waiting places for the cassette, are provided.

구체적으로, 버퍼(300)는 스토커의 랙 마스터에서 대차(200)로의 카세트 반송 전 대기 장소, 대차(200)에서 다른 스토커 또는 제조 공정을 수행하는 제조 장비로의 카세트 반송 전 대기 장소이다.Specifically, the buffer 300 is a waiting place before cassette transfer from the rack master of the stocker to the cart 200, and a waiting place before transferring the cassette from the cart 200 to another stocker or manufacturing equipment that performs a manufacturing process.

본 발명은 도 1의 종래기술과 비교했을 때, X축에서 Y축으로의 반송 경로는 동일하지만 대차 및 버퍼의 수는 하나씩 감소된다.In the present invention, compared with the prior art of FIG. 1, the conveying path from the X-axis to the Y-axis is the same, but the number of bogies and buffers is reduced by one.

도 3을 참조하면, 본 발명의 대차(200)는 본체부(210), 턴테이블(220), 한 쌍의 주행부(230), 승강부(240) 및 한 쌍의 턴베어링(250)을 포함하여 구성될 수 있다. Referring to FIG. 3, the bogie 200 of the present invention includes a body part 210, a turntable 220, a pair of driving parts 230, an elevating part 240, and a pair of turn bearings 250. It can be configured.

여기서, 본체부(210)는 일측에 턴테이블(220)이 설치된다. 여기서, 턴테이블(220)은 본체부(210)와 턴테이블(220) 사이에 구비된 회전부(211)에 의해 본체부(210)에 대하여 회전 가능하게 설치될 수 있다. 이러한 턴테이블(220)은 상술한 카세트와 같은 적재물이 적재될 수 있다.Here, a turntable 220 is installed on one side of the main body 210. Here, the turntable 220 may be rotatably installed with respect to the main body 210 by a rotating part 211 provided between the main body 210 and the turntable 220. The turntable 220 may be loaded with a load such as the cassette described above.

대차(200)의 한 쌍의 주행부(230)는 본체부(210)의 타측에 주행 방향을 따라 간격을 두고 설치되고, 반송 레일(100)의 일면에 접하는 주행 휠(231)이 양측면에 구비된다.A pair of driving parts 230 of the bogie 200 are installed at intervals along the driving direction on the other side of the main body 210, and driving wheels 231 in contact with one surface of the conveying rail 100 are provided on both sides. do.

여기서, 한 쌍의 주행부(230)는 구동부(231a)를 포함하여 구성될 수 있다. 구동부(231a)는 한 쌍의 주행부(230)의 양측면 중 일측면에 구비된 주행 휠(231)에 연결되고, 주행 휠(231)이 회전하도록 구동력을 제공할 수 있다. 이때, 주행 휠(231)은 반송 레일(100)의 일면(110)에 접한 상태로 회전하면서 반송 레일(100)을 따라 이동할 수 있다.Here, the pair of driving units 230 may be configured to include a driving unit 231a. The driving unit 231a may be connected to a driving wheel 231 provided on one of both side surfaces of the pair of driving units 230 and may provide driving force to rotate the driving wheel 231. At this time, the traveling wheel 231 may move along the transport rail 100 while rotating in contact with the one surface 110 of the transport rail 100.

또한, 대차(200)의 승강부(240)는 한 쌍의 주행부(230)의 내측 공간에 설치되고, 본체부(210)를 승강시키도록 구성될 수 있다. 비록 자세히 도시되지는 않았으나, 승강부(240)는 일정 간격을 두고 설치된 한 쌍의 링크부(241)로 구성되고, 한 쌍의 링크부(241)는 리드스크류 등의 동력 전달 부재(미도시)와 연결될 수 있다. 즉, 동력 전달 부재가 모터 등의 구동수단(미도시)에 의해 회전하면, 한 쌍의 링크부(241)는 동력 전달 부재로부터 구동력을 전달받아 본체부(210)를 승강시킬 수 있다.In addition, the elevating part 240 of the bogie 200 may be installed in the inner space of the pair of driving parts 230 and configured to elevate the body part 210. Although not shown in detail, the elevating unit 240 is composed of a pair of link units 241 installed at regular intervals, and the pair of link units 241 is a power transmission member such as a lead screw (not shown) Can be connected with. That is, when the power transmission member is rotated by a driving means (not shown) such as a motor, the pair of link portions 241 may receive a driving force from the power transmission member to lift the main body 210.

또한, 한 쌍의 턴베어링(250)은 승강부(240) 및 본체부(210) 사이에 설치될 수 있다. 종래의 OHS(Over Head Shuttle)의 경우, 승강 및 회전이 불가하기 때문에 자체적으로 버퍼(300)에 안착하지 못하여 PNP라는 장비가 추가되어야만 물류 이송이 가능하다는 문제점이 있었다.In addition, a pair of turn bearings 250 may be installed between the elevating part 240 and the body part 210. In the case of the conventional OHS (Over Head Shuttle), there is a problem in that it is impossible to settle on the buffer 300 by itself, so that logistics transfer is possible only when an equipment called PNP is added.

반면에, 본 발명의 대차(200)는 턴테이블(220), 턴베어링(250)이 구비되기 때문에 추가 버퍼나 장비 없이 직선 주행, 곡선 주행, 승강, 회전이 가능하고, 자체적으로 버퍼로의 이송이 가능하다. 즉, 본 발명의 대차(200)는 물류 이송을 위한 추가적인 버퍼나 장비가 필요치 않으며, 카세트 이송 시간이 다른 장비에 비해 짧다는 효과가 있다.On the other hand, since the bogie 200 of the present invention is provided with a turntable 220 and a turn bearing 250, it is possible to run straight, curved, lift, and rotate without additional buffers or equipment, and can be transferred to the buffer by itself. It is possible. That is, the balance 200 of the present invention does not require an additional buffer or equipment for transporting logistics, and has an effect that the cassette transport time is shorter than that of other equipment.

한편, 한 쌍의 주행부(230)는 한 쌍의 가이드부(232)를 더 포함하여 구성될 수 있다. 한 쌍의 가이드부(232)는 양측면 중 타측면에 설치되고, 주행 휠(231)을 사이에 두고 양측에 배치될 수 있다.Meanwhile, the pair of driving parts 230 may be configured to further include a pair of guide parts 232. A pair of guide portions 232 may be installed on the other side of both side surfaces, and may be disposed on both sides with the driving wheel 231 interposed therebetween.

도 4를 참조하면, 한 쌍의 가이드부(232)는 블럭부(232a) 및 가이드 휠(232b)을 포함하여 구성될 수 있다. 여기서, 블럭부(232a)는 한 쌍의 주행부(230)의 타측면에 일면이 고정되고, 일면으로부터 반송 레일(100)을 향하여 연장 형성된 수평면이 구비된다.Referring to FIG. 4, a pair of guide portions 232 may include a block portion 232a and a guide wheel 232b. Here, the block portion (232a) is fixed to the other side of the pair of driving portions (230), one surface is provided with a horizontal surface extending from one surface toward the conveyance rail (100).

또한, 가이드 휠(232b)은 블럭부(232a)의 수평면을 관통하는 회전축(232c)의 일단부에 회전 가능하게 설치될 수 있다. 비록 자세히 도시되지는 않았으나, 가이드 휠(232b)과 회전축(232c) 사이에는 베어링(미도시)이 삽입되도록 구성될 수 있다. 즉, 가이드 휠(232b)은 반송 레일(100)의 측면(120)에 접한 상태로 회전하면서 반송 레일(100)을 따라 이동할 수 있다.In addition, the guide wheel 232b may be rotatably installed at one end of the rotation shaft 232c penetrating the horizontal surface of the block portion 232a. Although not shown in detail, a bearing (not shown) may be inserted between the guide wheel 232b and the rotation shaft 232c. That is, the guide wheel 232b may move along the transport rail 100 while rotating in contact with the side surface 120 of the transport rail 100.

이와 같이, 본 발명의 대차(200)는 반송 레일(100)의 측면(120)에 접한 상태로 회전하는 가이드 휠(232b)에 의해 안내되어 주행 방향이 변경될 수 있다. 즉, 가이드 휠(232b)이 반송 레일(100)의 측면(120)에 접한 상태로 곡선 구간을 이동함에 따라, 대차(200)는 가이드 휠(232b)에 의해 가이드되어 반송 레일(100)의 곡선 구간을 이동하며 주행 방향이 X축에서 Y축으로 원활하게 변경될 수 있다.In this way, the bogie 200 of the present invention is guided by the guide wheel 232b rotating in contact with the side surface 120 of the transfer rail 100 so that the driving direction can be changed. That is, as the guide wheel 232b moves through the curved section in contact with the side surface 120 of the conveyance rail 100, the bogie 200 is guided by the guide wheel 232b to form the curve of the conveyance rail 100. As you move the section, the driving direction can be smoothly changed from the X-axis to the Y-axis.

따라서, 카세트의 반송 방향을 변경하기 위한 대차 및 버퍼의 수가 증가하지 않으며, 이로 인해 제조 원가가 낮아지게 되어 수익성이 향상되고, 제품의 경쟁력이 향상된다.Accordingly, the number of carts and buffers for changing the conveying direction of the cassette does not increase, resulting in lower manufacturing cost, improving profitability, and enhancing product competitiveness.

한편, 도 5는 종래기술의 스토커 컨베이어(직선 Over Head Conveyor, OHCV)와 본 발명의 스토커 컨베이어(곡선 OHCV)의 카세트 반송량에 따른 누적 시간을 나타낸다. 도 5에 도시된 바와 같이, 종래기술의 스토커 컨베이어는 카세트(Cassette, CST)를 10번 반송하는데 걸리는 누적시간이 729.3초이고, 본 발명의 스토커 컨베이어는 누적시간이 597.5초로 나타났다.On the other hand, Figure 5 shows the cumulative time according to the cassette conveyance amount of the stocker conveyor (straight line Over Head Conveyor, OHCV) of the prior art and the stocker conveyor (curved OHCV) of the present invention. As shown in Fig. 5, the stocker conveyor of the prior art has a cumulative time of 729.3 seconds for transporting a cassette (CST) 10 times, and the stocker conveyor of the present invention has an accumulated time of 597.5 seconds.

즉, 본 발명의 스토커 컨베이어는 카세트 반송량에 따른 누적시간이 종래기술에 비해 감소하기 때문에 전체적인 물류 이송 속도가 증가하여 수익성이 향상된다. 또한, 곡선 주행이 가능하기 때문에 종래기술의 스토커 컨베이어와 비교하여 대차 및 버퍼의 수가 현저히 감소한다.That is, in the stocker conveyor of the present invention, since the cumulative time according to the cassette conveyance amount decreases compared to the prior art, the overall logistics transfer speed increases, thereby improving profitability. In addition, since curved travel is possible, the number of bogies and buffers is significantly reduced compared to the stocker conveyor of the prior art.

이상, 본 발명의 바람직한 실시예에 대하여 상세히 설명하였으나, 본 발명의 기술적 범위는 전술한 실시예에 한정되지 않고 특허청구범위에 의하여 해석되어야 할 것이다. 이때, 이 기술분야에서 통상의 지식을 습득한 자라면, 본 발명의 범위에서 벗어나지 않으면서도 많은 수정과 변형이 가능함을 고려해야 할 것이다.In the above, preferred embodiments of the present invention have been described in detail, but the technical scope of the present invention is not limited to the above-described embodiments and should be interpreted by the claims. At this time, those who have acquired ordinary knowledge in this technical field will have to consider that many modifications and variations are possible without departing from the scope of the present invention.

100 : 반송 레일 110 : 반송 레일의 일면
120 : 반송 레일의 측면 200 : 대차
210 : 본체부 211 : 회전부
220 : 턴테이블 230 : 한 쌍의 주행부
231 : 주행 휠 231a : 구동부
232 : 한 쌍의 가이드부 232a : 블럭부
232b : 가이드 휠 232c : 회전축
240 : 승강부 241 : 한 쌍의 링크부
250 : 한 쌍의 턴베어링 300 : 버퍼100: conveyance rail 110: one surface of conveyance rail
120: side surface of the conveyance rail 200: bogie
210: main body 211: rotating portion
220: turntable 230: a pair of driving units
231: traveling wheel 231a: driving unit
232: a pair of guide portions 232a: block portion
232b: guide wheel 232c: rotating shaft
240: lifting part 241: a pair of link parts
250: a pair of turn bearings 300: buffer

Claims (5)

직선 구간 및 곡선 구간을 포함하는 반송 레일; 및
상기 반송 레일의 직선 구간 및 곡선 구간을 따라 이동하며 주행 방향이 변경되는 대차를 포함하고,
상기 대차는,
본체부;
상기 본체부의 일측에 회전 가능하게 설치되고, 적재물이 적재되는 턴테이블;
상기 본체부의 타측에 주행 방향을 따라 간격을 두고 설치되고, 상기 반송 레일의 일면에 접하는 주행 휠이 양측면에 구비되며, 상기 양측면 중 일측면에 구비된 주행 휠에 회전 구동력을 제공하는 구동부가 연결되고, 상기 양측면 중 타측면에 구비된 주행 휠을 사이에 두고 양측에 배치된 한 쌍의 가이드부를 포함하는 한 쌍의 주행부;
상기 한 쌍의 주행부의 내측에 설치되고, 상기 본체부를 승강시키는 승강부; 및
상기 승강부 및 상기 본체부 사이에 설치되는 한 쌍의 턴베어링을 포함하며,
상기 한 쌍의 가이드부는,
상기 타측면에 일면이 고정되고, 상기 일면으로부터 상기 반송 레일을 향하여 연장 형성된 수평면이 구비된 블럭부; 및
상기 블럭부의 수평면을 관통하는 회전축에 설치되고, 상기 반송 레일의 측면에 접한 상태에서 회전 가능하도록 구비된 가이드 휠을 포함하며,
상기 대차는 직선 주행, 곡선 주행, 상기 본체부의 승강 및 상기 턴테이블의 회전이 가능한 것을 특징으로 하는 스토커 컨베이어.A conveyance rail including a straight section and a curved section; And
It includes a bogie moving along a straight section and a curved section of the conveying rail and changing a driving direction,
The above balance is,
Body part;
A turntable rotatably installed on one side of the main body and on which a load is loaded;
The other side of the main body is installed at intervals along the driving direction, and driving wheels in contact with one surface of the conveying rail are provided on both sides, and a driving unit that provides rotational driving force is connected to the driving wheel provided on one of the side surfaces. A pair of driving units including a pair of guide units disposed on both sides with a driving wheel provided on the other side of the both side surfaces therebetween;
A lifting part installed inside the pair of driving parts and lifting the main body part; And
It includes a pair of turn bearings installed between the lifting part and the body part,
The pair of guide portions,
A block portion having one surface fixed to the other side and having a horizontal surface extending from the one surface toward the conveyance rail; And
It is installed on a rotating shaft penetrating the horizontal plane of the block portion, and includes a guide wheel provided to be rotatable in a state in contact with the side of the transport rail,
The bogie is a stocker conveyor, characterized in that linear running, curved running, lifting of the main body, and rotation of the turntable. 삭제delete 삭제delete 삭제delete 삭제delete
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