TW201524717A - Transfer robot having variable hand of four robot arms - Google Patents

Abstract

The present invention relates to a transfer robot having four robot arms and, particularly, to a transfer robot having variable hands of four robot arms, which can individually drive the four robot arms and simultaneously perform loading and withdrawal of objects to be transferred (substrates or wafers) vertically stacked with a regular pitch unit. The transfer robot having the variable hands of the four robot arms according to the present invention includes a first to a fourth robot arm forming position variable blocks therein, horizontally and vertically arranged and formed to perform linear motion backwards and forwards; and a first to a fourth robot hand coupled to the position variable blocks respectively and varying a left and right width within a set range. The present invention is realized to withdraw, transfer or stack the objects to be transferred from one set position to another set position, simultaneously or individually, thereby simultaneously transferring a plurality of the objects to be transferred, making an action for each pitch of process equipment or cassettes, and enhancing process efficiency.

Description

Four-arm handling robot with variable manipulator

The present invention relates to a transfer robot having four robot arms, and more particularly to a variable manipulator capable of individually driving four robot arms capable of simultaneously loading and lifting goods (substrates or wafers, etc.) loaded up and down in a predetermined pitch unit. Four-arm handling robot.

In a manufacturing process such as a semiconductor device or a liquid crystal display device, a introducing and lifting process is performed on a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device.

The substrate processing apparatus (transport robot) is a development and use of a dual-arm robot, a transport robot including a multi-arm, and the like, and generally includes a carrier support portion that supports a plurality of carriers, a substrate processing unit, a processing substrate, and a rotation unit. The carrier support unit and the substrate processing unit are vertically stacked; the indexer robot transports the substrate between each of the rotating unit and the carrier support unit; and the main transport robot transports between the respective rotary unit and the substrate processing unit. Substrate.

The handling robot is used to fundamentally transport wafers, substrates or goods more efficiently, thereby reducing the process tick time and improving process efficiency.

A transfer robot having two arms has been developed from a transport robot having one arm for transporting one substrate, and a more efficient process for improving the structure of the arms has been disclosed. Korean Patent Publication No. 10-2008- No. 0047205 (transport substrate robot) and Korean Patent Publication No. 10-2012-0007449 (substrate processing apparatus and substrate transport method).

Japanese Laid-Open Patent Publication No. 10-2008-0047205 discloses a transport substrate robot capable of efficiently transporting a substrate by having a multi-arm that can be independently rotated and moved up and down.

Korean Patent Publication No. 10-2008-0047205 has advantages in that it can be transported in four directions from east to west and north, and can be independently operated in four directions: east, west, south, and north. Linear processes or processes in one direction have the disadvantage of being inconvenient to use.

Japanese Laid-Open Patent Publication No. 10-2012-0007449 provides a transfer robot for increasing the throughput of a substrate processing apparatus (throughput, the number of substrates per unit time) and shortening the standby time of the indexer robot and the main transport robot.

Korean Patent Publication No. 10-2012-0007449 has the advantage of shortening the process time, but has the following disadvantages, because the structure of a plurality of robots attached to a single arm is required to be driven at the same time, and through the structure of a plurality of robots, You can carry multiple shipments only when you are at a given distance.

SUMMARY OF THE INVENTION An object of the present invention is to provide a four-arm handling robot having a variable manipulator capable of transporting goods at the same time or individually in a linear motion in the same level.

Moreover, it is an object of the present invention to provide a rapid process flow, shorten the process time and improve the process by simultaneously transporting one to four loads in a straight-line (In-Line) process and in a continuous process in one direction. An efficient four-arm handling robot with a variable manipulator.

Further, an object of the present invention is to provide a four-arm transfer robot having a variable manipulator in which four robot arms are arranged one above the other, and that the robot can change the level position.

In order to solve the above problems, the four-arm carrying robot with a variable manipulator of the present invention includes: first to fourth robot arms, in which position variable blocks are formed inside, and are arranged up and down and left and right, and straight lines are arranged in the front-rear direction. Movement; the first to fourth robots are respectively engaged with the position variable block, change the left and right widths within a predetermined range, and lift, carry or load the goods from the predetermined position to another predetermined one or more simultaneously The position can carry a plurality of goods at the same time and can respectively correspond to the respective pitches of the process equipment or the box to improve the process efficiency.

Here, the position variable block has an opening at a front end surface of each of the first to fourth robot arms, and a position variable guide rail is formed inside each of the first to fourth robot arms. The front ends of the first to fourth robots are each formed with a variable slider that is engaged with the position variable rail by a guide rail.

Here, the first and third robot arms are arranged vertically, and the second and fourth robot arms are arranged vertically. Preferably, the variable sliders of the first and third robot arms are formed in a relative manner. At the position, the variable sliders of the second and fourth robot arms are formed at opposite positions, and the vertically symmetrical structure is realized.

Here, the outer side surfaces of the first to fourth robot arms are slidably coupled to the first to fourth level guide rails, and the inner side surfaces of the first and second level guide rails are respectively attached to the upper end vertical slider. The inner side surfaces of the third and fourth level guide rails are respectively attached to the lower end vertical sliders, and the upper and lower end vertical sliders are joined to the vertical vertical body by the rails in the up-down direction.

Here, the outer side surfaces of the first to fourth robot arms are slidably coupled to the first to fourth level guide rails, and the inner side surfaces of the first and second level guide rails are respectively attached to the upper end vertical slider. The inner side surfaces of the third and fourth level guide rails are respectively mounted on the lower end vertical sliders, and the upper and lower end vertical sliders are joined to the vertical shape vertical body through the rails in the up and down direction, and the lower ends of the vertical bodies are connected to perform circular motion. Rotating body.

Here, the outer side faces of the first to fourth robot arms are engaged with the first to fourth level sliders, and the first to fourth level sliders are slidably coupled to the first to fourth level guide rails, respectively. And, the outer side surfaces of the first to fourth level guide rails are formed with guide rails.

The above-described structure of the present invention has the advantage of being able to transport goods at the same time or in a straight line in the same level, and to transport the goods individually or simultaneously in a straight-line (In-Line) process and a continuous process in one direction. Four shipments guide the rapid process and reduce process time to increase process efficiency.

Next, the configuration and operational effects of the four-arm transfer robot having a variable manipulator according to the present invention will be described with reference to the drawings.

1 is a cross-sectional view of a four-arm handling robot with a variable manipulator of the present invention, FIG. 2 is a plan view of a four-arm handling robot with a variable manipulator of the present invention, and FIG. 3 is a view of a four-arm handling robot with a variable manipulator of the present invention. 4 is a front view of a four-arm transport robot having a variable manipulator according to the present invention.

As shown in FIG. 1 to FIG. 4, the four-arm handling robot (10) with a variable manipulator of the present invention comprises: a base frame (11), a slider base (12), a guide rail box (13), and a guide rail (14). , rotating body (15), vertical body (16), upper and lower vertical sliders (17a, 17b), first to fourth level guide rails (18a to 18d), first to fourth level sliders (19a to 19d) The first to fourth robot arms (20a to 20d) and the first to fourth robot arms (21a to 21d).

The base frame (11) supports the transport robot (10) and is formed in a quadrangular frame shape, and is provided with a pulley for easy movement as needed, and a plurality of fixing devices are mounted to prevent the robot from moving during operation.

Further, in order to confirm the right and left moving distance of the transport robot (10), the base frame (11) is mounted with a limiter.

A slider base (12) is formed on the inner side of the base frame (11), and guide rails (14) for leveling the slider base (12) are formed on both sides of the base frame (11).

The guide rail (14) is covered by a rail box (13), and a cable (not shown) for transmitting power and control signals is mounted in the rail box (13).

The slider base (12) is connected to the guide rails (14) on both sides to enable horizontal and horizontal movement, and the rotating body (15) is formed at the center upper end, and the vertical body (16) is attached to the front end of the rotating body (15).

The center of the rotating body (15) is formed with a central axis of rotation, and the rotating body (15) is rotated with reference to the central axis of rotation.

The rotating body (15) rotates the first to fourth robot arms (20a to 20d) by 360 degrees with respect to the rotation center axis, and the vertical body (16) can move the first to fourth robot arms (20a to 20d) up and down. Reciprocating linear motion.

The guide rail is formed on one side of the vertical body (15). The guide rail is vertically coupled with an upper vertical slider (17a) and a lower vertical slider (17b), and the upper and lower vertical sliders (17a, 17b) simultaneously perform up and down reciprocating linear motion.

The first and second level guide rails (18a, 18b) are attached to the outer side of the upper and lower vertical sliders (17a, 17b), and the third and fourth level guide rails (18c, 18d) are attached to the upper and lower end vertical sliders (17a). The other side of the outer side of 17b).

The first to fourth level guide rails (18a to 18d) are formed with guide rails on the outer side, and have an elongated shape so as to move the level of the robot arm.

The first and third level guide rails (18a, 18c) are arranged vertically, and the second and fourth level rails (18b, 18d) are also arranged in a vertical arrangement.

The first to fourth level sliders (19a to 19d) are slidably coupled to the guide rails of the respective first to fourth level rails (18a to 18d).

The first to fourth robot arms (20a to 20d) are respectively attached to the inner sides of the respective first to fourth level sliders (19a to 19d), and the mechanical sliders are slid back and forth by the front and rear sliding of the level sliders.

The first to fourth level sliders (19a to 19d) and the first to fourth robot arms (20a to 20d) can be physically separated or integrated into one body, and the first to fourth robot arms are integrally joined. (20a to 20d) has a slider and can be attached to the first to fourth level guide rails (18a to 18d).

The first to fourth robot arms (20a to 20d) are arranged in a square format, that is, the first and fourth robot arms (20a, 20d) and the second and third robot arms (20b, 20c) are arranged diagonally to each other. The first and second robot arms (20a, 20b) are arranged at the upper end level, and the third and fourth robot arms (20c, 20d) are arranged at the lower end level.

The first to fourth robot arms (21a to 21d) are attached to the front ends of the first to fourth robot arms (20a to 20d), and the first to fourth robot hands (21a to 21d) are placed with the object to be transported.

The first to fourth position variable blocks (22a to 22d) for attaching the first to fourth robots (21a to 21d) are formed at the front end portions of the first to fourth robot arms (20a to 20d).

The first to fourth robots (21a to 21d) are joined to the first to fourth position variable blocks (22a to 22d), and according to the variable regions of the first to fourth position variable blocks (22a to 22d), The 1st to 4th robots (21a to 21d) respectively change positions by left and right.

The first to fourth robot arms (20a to 20d) can be driven independently, and can also drive two or three, and can be driven simultaneously.

The first to fourth robot arms (20a to 20d) can be simultaneously or individually driven to perform a horizontal linear motion (x) in the x-axis direction, a vertical linear motion (y) in the y-axis direction, and a horizontal linear motion in the z-axis direction ( z) and rotational motion (θ).

The horizontal linear motion (x) in the x-axis direction enables the reciprocating motion in the x-axis direction of the slider base (12) and the vertical linear motion in the y-axis direction by the engagement of the slider base (12) and the guide rail (14) ( y) The vertical sliders (17a, 17b) are vertically moved vertically in the y-axis direction with respect to the vertical body (16), and the horizontal linear motion in the z-axis direction is the first to fourth level guide rails (18a). Up to 18d) and the first to fourth level sliders (19a to 19d) are referenced, the first to fourth robot arms (20a to 20d) are horizontally driven in the z-axis direction, and the rotational motion (θ) is a rotating body ( 15) The center axis of rotation is the reference, and the vertical body (16) is rotated 360 degrees.

The arrangement of the first to fourth robot arms (20a to 20d) is arranged in a square format, that is, a "mouth" character arrangement, so that goods can be handled and loaded at the same time.

According to the arrangement of the first to fourth robot arms (20a to 20d), it is possible to carry and load four cargos simultaneously or individually, but according to the process, three or two robots are driven without driving one or two robot arms. The arm can carry and load three or two goods at the same time.

Further, the three robot arms may be driven without driving the robot arm of any one of the first to fourth robot arms (20a to 20d).

Fig. 5 is a view showing a state in which the manipulator of the four-arm transfer robot having a variable manipulator according to the present invention changes the level position.

Fig. 5 is a view showing that the first to fourth robots (21a to 21d) are changed to the maximum width and the minimum width in the state where the four robot arms (20a to 20d) are advanced forward.

(A) is a state diagram when the first to fourth robots (21a to 21d) are advanced forward, and is expanded to the maximum width on both sides, and (B) is the first to fourth robots ( 21a to 21d) A state diagram when the state is advanced to the minimum width.

The variable range of the four robots (21a to 21d) can be performed within the variable range of the first to fourth position variable blocks (22a to 22d), and the robots (21a to 21d) respectively engage the guide rails at positions Sliding is performed within the variable blocks (22a to 22d).

The first to fourth position variable blocks (22a to 22d) are formed inside the first to fourth robot arms (20a to 20d), and the front end faces of the first to fourth robot arms (20a to 20d) have openings.

The opening side is a portion to be inserted for engaging the first to fourth robots (21a to 21d).

The first and third position variable guide rails (24a, 24c) are formed inside the position variable blocks (22a, 22c) for rail engagement of the position variable blocks (22a to 22d) and the robot hands (21a to 21d). The first and third variable sliders (23a, 23c) respectively joined to the respective first and third position variable guide rails (24a, 24c) by rails are attached to the front end portions of the manipulators (21a, 21c).

The second and fourth position variable guide rails and the second and fourth variable sliders are also the same as the first and third variable guide rails (24a, 24c) and the first and third variable sliders (23a, 23c). Ground formation.

Preferably, the first and third variable sliders (23a, 23c) are formed in opposite directions, and the second and fourth variable sliders are also formed in opposite directions to form a vertically symmetrical structure.

As shown in FIG. 1 to FIG. 5, the four robot arms of the transport robot (10) of the present invention linearly move in the horizontal direction, and can simultaneously transport four sheets of goods (represented by a display panel), and can simultaneously transmit four sheets as A predetermined upper and lower pitch process equipment or cargo inside the box, and capable of simultaneously transporting four pieces of process equipment or boxes of goods that are formed into a predetermined left and right pitch.

In the linear process, a large amount of cargo can be transported, and it can be matched according to the pitch of the process equipment or the box, and the process efficiency is greatly improved by shortening the set time of the robot.

6 is a level advance state diagram of a first arm of a four-arm transfer robot having a variable manipulator according to the present invention, and FIG. 7 is a first and second machine of a four-arm transfer robot having a variable manipulator according to the present invention; FIG. 8 is a diagram showing a state of advancement of the first to third robot arms of the four-arm transfer robot having a variable manipulator according to the present invention, and FIG. 9 is a fourth embodiment of the present invention having a variable manipulator. The level advance state diagram of the first to fourth robot arms of the arm transport robot.

Referring to Fig. 6, the first robot arm (20a) is horizontally moved (z-axis direction) in the forward direction with reference to the first level guide rail (18a), and the first robot arm (21a) is attached to the first robot arm (20a). At the same time, it moves in the z-axis direction, and the left and right positions are in a variable state in the range of the first position variable block (22a) formed at the tip end of the first arm (20a).

Referring to Fig. 7, the first robot arm (20a) and the second robot arm (20b) are moved in the forward direction (z-axis direction) based on the second level guide rail (18b), and the second robot (21b) is attached to The second arm (20b) moves in the z-axis direction at the same time, and the left and right positions are in a variable state in the range of the second position variable block (22b) formed at the tip end of the second arm (20b).

Referring to Figs. 8 and 9, the third and fourth robot arms (20c, 20d) are also based on the third and fourth level guide rails (18c, 18d), similarly to the first and second robot arms (20a, 20b). Moving in the forward direction (z-axis direction), the third and fourth robots (21c, 21d) are attached to the third and fourth robot arms (20c, 20d) while moving in the z-axis direction, and In the range of 3 and the fourth position variable block (22c, 22d), the left and right positions are in a variable state.

The preferred embodiments of the present invention have been described with reference to the accompanying drawings, but it should be understood that the technical structure of the present invention described above, in the technical field of the present invention, without departing from the technical idea or essential features of the present invention, It can be implemented in other specific forms. Therefore, the above embodiments are to be considered in all respects as illustrative and not restricting the scope of the invention, and the scope of the invention All changes or modifications made by the concept are included in the scope of the invention.

10‧‧‧Handling robot
11‧‧‧Base frame
12‧‧‧Slider base
13‧‧‧rail box
14‧‧‧ rails
15‧‧‧Rotating body
16‧‧‧Vertical body
17 a, 17b‧‧‧ vertical slider
18a, 18b, 18c, 18d‧‧‧ level rails
19a, 19b, 19c, 19d‧‧‧ horizontal sliders
20a, 20b, 20c, 20d‧‧‧ mechanical arm
21a, 21b, 21c, 21d‧‧‧ robot
22a, 22b, 22c, 22d‧‧‧ position variable block
23a, 23c‧‧‧variable slider
24a, 24c‧‧ variable rail

1 is a cross-sectional view of a four-arm handling robot with a variable manipulator of the present invention; FIG. 2 is a plan view of a four-arm handling robot with a variable manipulator of the present invention; FIG. 3 is a view of a four-arm handling robot with a variable manipulator of the present invention; 4 is a side view of a four-arm handling robot with a variable manipulator; FIG. 5 is a side view showing a manipulator of a four-arm handling robot with a variable manipulator of the present invention; FIG. 6 is a state diagram of a state of advancement of a first arm of a four-arm transfer robot having a variable manipulator according to the present invention; FIG. 7 is a four-arm transfer robot having a variable manipulator of the present invention; FIG. 8 is a level advance state diagram of the first to third robot arms of the four-arm transfer robot having a variable manipulator according to the present invention; FIG. 9 is a view showing a state of advance of the first to third robot arms of the four-arm transfer robot having a variable manipulator; A level advance state diagram of the first to fourth robot arms of the four-arm transfer robot having a variable manipulator.

16‧‧‧Vertical body

17a‧‧‧Vertical slider

18a, 18b, 18c, 18d‧‧‧ level rails

19a, 19b, 19c, 19d‧‧‧ horizontal sliders

20a, 20b, 20c, 20d‧‧‧ mechanical arm

21a, 21b, 21c, 21d‧‧‧ robot

22a, 22b, 22c, 22d‧‧‧ position variable block

23a, 23c‧‧‧variable slider

24a, 24c‧‧ variable rail

Claims (6)

A four-arm handling robot having a variable manipulator includes: first to fourth robot arms, wherein position variable blocks are formed inside, and are arranged up and down and left and right, and linear movement is performed from front to rear; first to fourth machines The hands are respectively engaged with the position variable block to change the left and right widths within a predetermined range, and the goods are lifted, carried or loaded from the predetermined position to another predetermined position simultaneously or individually. The four-arm transfer robot having a variable manipulator according to claim 1, wherein the position variable block has an opening portion on a front end surface of each of the first to fourth robot arms, and is respectively in the first A position variable guide rail is formed inside the fourth robot arm, and a variable slider that is engaged with the position variable rail by a guide rail is formed at a distal end of each of the first to fourth robots. A four-arm transfer robot having a variable manipulator according to claim 2, wherein the first and third robot arms are arranged vertically, and the second and fourth robot arms are arranged vertically, each of the first The variable slider of the third robot arm is formed at a relative position, and the variable sliders of the second and fourth robot arms are formed at opposite positions. The four-arm transfer robot having a variable manipulator according to claim 1, wherein the outer side surfaces of the first to fourth robot arms are slidably coupled to the first to fourth level guide rails, respectively. The inner side surfaces of the second level guide rails are respectively mounted on the upper end vertical sliders, and the inner side surfaces of the third and fourth level rails are respectively mounted on the lower end vertical sliders, and the upper and lower end vertical sliders are vertically joined to the vertical direction through the guide rails. The vertical body of the shape. The four-arm transfer robot having a variable manipulator according to claim 1, wherein the outer side surfaces of the first to fourth robot arms are slidably coupled to the first to fourth level guide rails, respectively. The inner side surfaces of the second level guide rails are respectively mounted on the upper end vertical sliders, and the inner side surfaces of the third and fourth level rails are respectively mounted on the lower end vertical sliders, and the upper and lower end vertical sliders are vertically joined to the vertical direction through the guide rails. A vertical body of a shape, the lower end of which is connected to a rotating body that performs a circular motion. The four-arm transfer robot having a variable manipulator according to claim 1, wherein an outer side surface of each of the first to fourth robot arms is engaged with the first to fourth level sliders, the first to fourth The level sliders are slidably coupled to the first to fourth level guide rails, respectively, and the outer side surfaces of the first to fourth level rails are formed with guide rails.