TWI579120B - Transfer robot having multiple arm - Google Patents

Description

Handling robot with multiple arms

The present invention relates to a transport robot having a multi-arm, and more particularly to a multi-arm transport robot capable of individually driving a plurality of arms and simultaneously loading and lifting goods (substrates, wafers, and the like) loaded up and down in a predetermined pitch unit.

In a manufacturing process such as a semiconductor device or a liquid crystal display device, a introducing and lifting process is performed on a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device.

The substrate processing apparatus (transport robot) is a development and use of a dual-arm robot, a transport robot including a multi-arm, and the like, and generally includes a carrier support portion that supports a plurality of carriers, a substrate processing unit, a processing substrate, and a rotation unit. The carrier support unit and the substrate processing unit are vertically stacked; the indexer robot transports the substrate between each of the rotating unit and the carrier support unit; and the main transport robot transports between the respective rotary unit and the substrate processing unit. Substrate.

The handling robot is used to fundamentally transport wafers, substrates or goods more efficiently, thereby reducing the process time (Tack Time) and improving process efficiency.

A handling robot having two arms has been developed from a handling robot having one arm for transporting one substrate, and a more efficient process for improving the structure of the arms has been disclosed. Korean Patent Publication No. 10-2008-0047205 (Transportation Substrate Robot) and Korean Laid-Open Patent Publication No. 10-2012-0007449 (Substrate Processing Apparatus and Substrate Transfer Method).

Japanese Laid-Open Patent Publication No. 10-2008-0047205 discloses a transport substrate robot capable of efficiently transporting a substrate, which has a multi-arm capable of independently rotating and moving up and down.

Korean Patent Publication No. 10-2008-0047205 has advantages in that it can be transported in all directions from four directions in the east, west, south and north directions, but it operates independently in four directions from east to west, north and south. In the linear process or the process in one direction, there are disadvantages that are inconvenient to use.

Japanese Laid-Open Patent Publication No. 10-2012-0007449 provides a transfer robot for increasing the throughput of a substrate processing apparatus (throughput, the number of substrates processed per unit time) and shortening the standby time of the indexer robot and the main transport robot.

Korean Patent Publication No. 10-2012-0007449 has the advantage of shortening the process time, but has the following disadvantages because it is a structure in which a plurality of robots are attached to a single arm, and must be driven at the same time and transmitted through the structure of a plurality of robots. Only when there is a certain distance, can you carry multiple goods.

Patent literature

(Patent Document 1) Korean Patent Publication No. 10-2008-0047205

(Patent Document 1) Korean Patent Publication No. 10-2012-0007449

It is an object of the present invention to provide a multi-arm handling robot that can transport goods at the same time or individually through linear motion in the same horizontal direction.

Moreover, it is an object of the present invention to provide a process in which a one-to-four shipment is simultaneously conveyed in an in-line process and a continuous process in one direction, thereby guiding a rapid process flow, shortening the process time, and improving the process. An efficient multi-arm handling robot.

In order to solve the above problems, the multi-arm transfer robot of the present invention includes first to fourth robot arms, and the first to fourth robot arms have first to fourth robots that respectively carry goods, and have The same motion path and According to the first to fourth robotic arms, the goods can be lifted, transported or loaded from one and the same position to another same position simultaneously or individually, and multiple goods can be transported at the same time, thereby shortening TACT TIME (production time).

Here, the outer side surfaces of the first to fourth robot arms are joined to each other through the guide rail. Glyph or The robotic base of the glyph.

Here, the inner side surfaces of the first to fourth robot arms are joined to the horizontal guide through the guide rail to realize horizontal linear motion.

Here, the upper end horizontal guide and the lower end horizontal guide of the horizontal guide are arranged up and down, and the first and second robot arms on the upper side are respectively joined to the both sides of the upper end horizontal guide through the rail, and are located on the lower side. The third and fourth robot arms are respectively coupled to both side faces of the lower end horizontal guide through a rail.

Here, the upper vertical slider and the lower vertical slider are respectively connected to the upper side of the upper horizontal guide and the lower side of the lower horizontal guide by a connecting member.

Here, the upper vertical slider and the lower vertical slider are connected to the vertical member and reciprocate in the vertical direction.

Here, the vertical member is connected to the rotating member at the lower end portion, and the mechanical arm is rotated by the rotating member.

Here, the rotating member is coupled to the slider base at a lower end portion, and the slider base is engaged with the guide rail at both ends to perform horizontal linear motion.

Here, the first to fourth robot arms are rotatable by the rotating member, and the first to fourth robot arms and the first to fourth robots are loaded at positions that are not horizontally linearly moved. In the state of the cargo, the center of the cargo and the central axis of rotation of the rotating member are located on the same line, and the radius of rotation of the transport robot can be shortened, thereby improving the efficiency of the working space.

Here, when the goods are lifted, transported, or loaded through the first to fourth robot arms, it is preferable that the centers of the goods are vertically aligned vertically on the same line.

Further, the multi-arm transport robot according to the present invention includes first to third robot arms having first to third robot arms for respectively transporting goods, having the same motion path, and Glyph or The glyphs are arranged, through which the goods are lifted, transported or loaded from one and the same position to another identical position simultaneously or individually.

The above-described structure of the present invention has the advantages of being able to carry three or four sheets simultaneously in a straight line (In-Line) process and a continuous process in one direction by linear motion in the same horizontal direction. Goods, guiding rapid process flow, thereby reducing process time and increasing process efficiency.

10‧‧‧Multi-arm handling robot

11‧‧‧Base frame

12‧‧‧Slider base

13‧‧‧rail box

14‧‧‧ rails

15a‧‧‧Rotating parts

15b‧‧‧Vertical parts

16‧‧‧Rotation center axis

17a, 17b‧‧‧ vertical slider

18a, 18b‧‧‧ connecting parts

19a, 19b‧‧‧ horizontal guide

20a, 20b, 20c, 20d‧‧‧ mechanical arm

21a, 21b, 21c, 21d‧‧‧ robot base

22a, 22b, 22c, 22d‧‧‧ robot

23‧‧‧ goods

24‧‧‧Fixed devices

25‧‧‧Restrictor

1(A) and 1(B) are cross-sectional views of a multi-arm transport robot according to the present invention; [Fig. 2] is a front view of a multi-arm transport robot of the present invention; [Fig. 3] FIG. 4 is a state diagram showing the horizontal advancement of the second robot arm of the multi-arm transport robot according to the present invention; FIG. 4 is a state diagram of the horizontal progress of the second robot arm of the multi-arm transport robot according to the present invention; 5] a state in which the third robot arm of the multi-arm transport robot of the present invention advances horizontally; FIG. 6 is a state in which the fourth robot arm of the multi-arm transport robot of the present invention advances horizontally; [Fig. 7(A)] and [Fig. 7(B)] are diagrams showing a state in which the multi-arms of the multi-armed transport robot are advanced horizontally according to the present invention; [Fig. 8] is a multi-application according to another embodiment of the present invention. The structural drawing of the arm handling robot.

Hereinafter, the configuration and operational effects of the multi-armed transport robot of the present invention will be described with reference to the drawings.

1 is a cross-sectional view of a transport robot having a multi-arm according to the present invention, and FIG. 2 is a front view of a transport robot having a multi-arm according to the present invention, and FIGS. 1(A) and (B) are cross-sectional views respectively showing from different angles.

As shown in FIGS. 1 and 2, the multi-arm carrying robot 10 of the present invention includes a base frame 11, a slider base 12, a rail box 13, a guide rail 14, a rotating member 15a, a vertical member 15b, and an upper and lower vertical slider. 17a, 17b, upper and lower end connecting members 18a, 18b, upper and lower end horizontal guides 19a, 19b, first to fourth robot arms (20a to 20d), upper and lower end robot bases 21a, 21b, and first to fourth robots (22a to 22d).

The base frame 11 supports a transport robot 10 having a multi-arm, and is formed of four frame shapes, and a pulley that is easy to move is mounted as needed, and a plurality of fixing devices 24 are mounted to prevent movement when the robot operates. Further, in order to confirm the right and left moving distance of the transport robot 10 having the multi-arm, the base frame 11 is mounted with the stopper 25.

The slider base 12 is formed to the inner side of the base frame 11, and guide rails 14 for horizontally moving the slider base 12 are formed on both sides of the base frame 11.

The guide rail 14 is covered by the rail box 13, and a cable (not shown) for transmitting power and control signals to the rail box 13 is mounted.

The slider base 12 is connected to the guide rails 14 on both sides, and is horizontally movable left and right. The rotating member 15a is formed at the center upper end, and the front end of the rotating member 15a is formed with the vertical member 15b. A center axis of rotation 16 is formed at the center of the rotating member 15a.

The rotating member 15a rotates the first to fourth robot arms (20a to 20d) by 360 degrees with respect to the rotation center axis 16, and the vertical member 15b can perform the up-and-down reciprocating linear motion of the first to fourth robot arms (20a to 20d). .

A side surface of the vertical member 15b is formed with a guide rail to which the upper end vertical slider 17a and the lower end vertical slider 17b are joined, and the upper and lower end vertical sliders 17a, 17b simultaneously perform up-and-down reciprocating linear motion.

At the front ends of the upper and lower end vertical sliders 17a, 17b, the upper end connecting member 18a and the lower end connecting member 18b are formed in opposite directions, respectively, and the upper end horizontal guide 19a is connected to the lower side of the upper end connecting member 18a, and the lower end horizontal guide 19b is connected to the upper side of the lower end connecting member 18b.

A guide rail is formed on both side surfaces of the upper end horizontal guide 19a, the first and second robot arms 20a and 20b are joined to the guide rail, and guide rails are formed on both side surfaces of the lower end horizontal guide 19b. The guide rails are joined to the third and fourth robot arms. 20c, 20d.

The first to fourth robot arms (20a to 20d) are arranged in a square format, that is, the first and fourth robot arms 20a and 20d and the second and third robot arms 20b and 20c are arranged in diagonal directions, respectively. The second robot arms 20a and 20b are horizontally arranged at the upper end, and the third and fourth robot arms 20c and 20d are horizontally arranged at the lower end, and the first to fourth robot arms (22a to 22d) and the cargo 23 are located at the center thereof.

The first to fourth robot bases (21a to 21d) are horizontally movably coupled to the outer sides of the first to fourth robot arms (20a to 20d), and the first and second robot bases 21a and 21b are configured as The zigzag, the third and fourth robot bases 21c, 21d are configured as Glyph.

The first to fourth robots (22a to 22d) are attached to the front end portions of the first to fourth robot bases (21a to 21d), and the cargo 23 is located on the first to fourth robots (22a to 22d).

The first to fourth robot arms (20a to 20d) are independently driven and can also be driven simultaneously.

The centers of the goods 23 placed on the first to fourth robots (22a to 22d) are located on the same line and are located on the same line as the central axis of rotation 16 of the rotating member 15a.

Here, the cargo 23, that is, the four cargoes are located at the same position, can load and transport the four cargos to the same position at the same time, so that the center of the cargo 23 and the center axis of rotation 16 are on the same line, so that the working space of the transport robot is the smallest radius of rotation. In order to improve the effectiveness of the work space.

The first to fourth robot arms (20a to 20d) simultaneously or individually perform horizontal linear motion (x) in the x-axis direction, vertical linear motion (y) in the y-axis direction, and two horizontal linear motions in the z-axis direction (z1) , z2) and rotational motion (θ).

The horizontal linear motion (x) in the x-axis direction is reciprocable in the x-axis direction of the slider base 12 by the engagement of the slider base 12 and the guide rail 14, and the vertical linear motion (y) in the y-axis direction is the vertical member 15b. For the reference, the upper and lower vertical sliders 17a, 17b are vertically moved vertically along the y-axis direction, and the two horizontal straight linear motions (z1, z2) in the z-axis direction are used as the reference for the lower horizontal guides 19a, 19b, so that the first To the second robot arm (20a to 20d), a horizontal linear motion (z1) is performed along the z-axis direction, and the first to fourth robot arms (20a to 20d) are referenced to make the first to fourth robot bases ( 21a to 21d) Two horizontal linear motions (z2) are performed along the z-axis direction, and the rotational motion (θ) is performed in accordance with a 360-degree rotational motion based on the central axis of rotation 16 of the rotating member 15a.

The arrangement of the first to fourth robot arms (20a to 20d) constitutes a square format arrangement, that is, The glyphs are arranged to carry and load the goods 23 at the same time.

According to the arrangement of the first to fourth robot arms (20a to 20d), it is possible to carry and load four cargos 23 at the same time or individually, according to the process, without one or two robot arms, through three robot arms or two The drive of the robot arm can carry and load three or two goods at the same time.

Further, three robot arms may be formed without forming one of the first to fourth robot arms (20a to 20d), and the robot arm arrangement may be arranged at this time. Glyph or Glyph.

3 is a state in which the first robot arm of the multi-arm transport robot of the present invention advances horizontally, and FIG. 4 is a horizontal advance of the second robot arm of the multi-arm transport robot according to the present invention. FIG. 5 is a state diagram of horizontal advancement of the third robot arm of the multi-arm transport robot of the present invention, and FIG. 6 is a state diagram of horizontal advancement of the fourth robot arm of the multi-arm transport robot of the present invention. .

Referring to Fig. 3, the first robot arm 20a is horizontally moved in the forward direction with reference to the first arm horizontal guide 19a (the first segment moves in the z-axis direction), and the first robot 22a is horizontally advanced in accordance with the first robot arm 20a. Move (moving in the z-axis direction of the second segment).

Referring to Fig. 4, the second robot arm 20b is horizontally moved in the forward direction (moving in the first z-axis direction) with respect to the upper end horizontal guide 19a, and the second robot 22b is horizontally moved in the forward direction with reference to the second robot arm 20b. (The second segment moves in the z-axis direction).

Referring to Fig. 5, the third robot arm 20c is horizontally moved in the forward direction with reference to the lower end horizontal guide 19b (moving in the first z-axis direction), and the third robot 22c is horizontally moved in the forward direction with reference to the third robot arm 20c. (The second segment moves in the z-axis direction).

Referring to Fig. 6, the fourth robot arm 20d is horizontally moved in the forward direction with reference to the lower end horizontal guide 19b (moving in the z-axis direction in the first stage), and the fourth robot 22d is horizontally moved in the forward direction with reference to the fourth robot arm 20d. (The second segment moves in the z-axis direction).

Fig. 7 is a view showing a state in which the multi-arms of the multi-arm carrying robot of the present invention are advanced horizontally, and (A) and (B) are cross-sectional views which are displayed from different angles.

3 to 6 are diagrams showing a case where the multi-arm is individually driven, and FIG. 7 is an illustration showing a case where the multi-arms (the first to fourth robot arms) are simultaneously driven in the same direction.

The first to fourth robot arms (20a to 20d) are horizontally reciprocated through the slider base 12 and the guide rail 14 ( ), the rotary motion can be performed through the rotating member 15a ( ), the vertical linear reciprocating motion can be performed through the vertical member 15b and the upper and lower end vertical sliders 17a, 17b ( ), by engaging with the guide rails of the upper and lower end horizontal guides 19a, 19b, the first horizontal back and forth reciprocation can be performed ( The first to fourth robots (22a to 22d) are joined by the side rails of the first to fourth robot arms (20a to 20d), and are capable of performing the second horizontal back and forth reciprocation ( ).

The to The movement can run four robot arms at the same time, and can be operated individually according to the needs, and the order of the movement direction can be changed according to the on-site process.

In the existing situation, the two-arm handling robot is used, but after lifting three or four cargoes from the instrument end, respectively, and storing them in the box or lifting them from the box, they can be simultaneously stored on the instrument side, which can significantly reduce TACT TIME ( Production time).

As described above, the multi-arm carrying robot of the present invention can also arrange four robot arms in a square lattice pattern, but can operate two or three robot arms at the same time as needed, and realize handling of mounting only three robot arms. The robot refers to the above description. Further, the four robot arms are realized in a structure detachable from the upper and lower end horizontal guides 19a, 19b.

Fig. 8 is a structural view showing a handling robot having a multi-arm according to another embodiment of the present invention.

Fig. 8 is an embodiment in which one of the four robot arms (20a to 20d) of the embodiment of Figs. 1 to 7 is removed and formed into three robot arms.

When the robot is realized by three robot arms without forming a robot arm, the arrangement is formed as Glyph or The arrangement of the glyphs, the center of the three arms is equipped with a robot and cargo.

The preferred embodiments of the present invention have been described with reference to the above drawings, but it should be understood that the technical structure of the present invention described above can also be modified by those skilled in the art without changing the technical idea or essential features of the present invention. Other specific implementation forms are implemented. Therefore, the embodiments described above are to be considered in all respects as illustrative and not restrict All changes and modifications of the meaning and range of the scope of the invention and the equivalents thereof are intended to be included within the scope of the invention.

10‧‧‧Multi-arm handling robot

11‧‧‧Base frame

12‧‧‧Slider base

13‧‧‧rail box

14‧‧‧ rails

15a‧‧‧Rotating parts

15b‧‧‧Vertical parts

16‧‧‧Rotation center axis

17a, 17b‧‧‧ vertical slider

18a, 18b‧‧‧ connecting parts

19a, 19b‧‧‧ horizontal guide

20a, 20b, 20c, 20d‧‧‧ mechanical arm

21a, 21b, 21c, 21d‧‧‧ robot base

22a‧‧‧Robot

23‧‧‧ goods

25‧‧‧Restrictor

Claims (9)

A multi-arm transfer robot comprising: first to fourth robot arms, wherein the first to fourth robot arms have first to fourth robots for respectively transporting goods, have the same motion path, and are arranged in a glyph through which the first to fourth robot arms can be lifted, transported or loaded from another same position simultaneously or individually to another identical position, wherein the first to fourth robot arms are each The inner side is engaged with the horizontal guide through the guide rail to realize horizontal linear motion, wherein the upper end horizontal guide and the lower end horizontal guide of the horizontal guide are arranged up and down, and two of the first to fourth robot arms are respectively transmitted through The rail is coupled to the left and right sides of the upper end horizontal guide, and the remaining two of the first to fourth robot arms are respectively coupled to the left and right sides of the lower end horizontal guide through the rail. The multi-arm transport robot according to claim 1, wherein the outer side of each of the first to fourth robot arms is coupled to the guide rail through Glyph or The robotic base of the glyph. The multi-arm handling robot according to claim 1, further comprising an upper vertical slider and a lower vertical slider respectively connected to the upper side of the upper horizontal guide and the lower horizontal guide by a connecting member. The underside. The multi-arm transfer robot according to claim 3, wherein the upper end vertical slider and the lower end vertical slider are connected to the vertical member to reciprocate in the vertical direction. A multi-arm transfer robot according to claim 4, wherein the vertical member is coupled to the rotating member at a lower end portion, and the mechanical arm is rotated by the rotating member. The multi-arm transfer robot according to claim 5, wherein the rotating member is coupled to the slider base at a lower end portion, and the slider base is engaged with the guide rail at both ends to perform horizontal movement in a horizontal direction. The multi-arm transfer robot according to claim 1, wherein the first to fourth robot arms are rotatable by the rotating member, and the first to fourth robot arms and the first to fourth robots 4 When the robot is in a state where the cargo is not moved in a horizontal straight line, the center of the cargo and the central axis of rotation of the rotating member are located on the same line. The multi-arm transport robot according to claim 1, wherein when the cargo is lifted, transported or loaded through the first to fourth robot arms, vertical alignment is performed on the same line at the center of the cargo. . A multi-arm transport robot includes: first to third robot arms having first to third robots for respectively transporting goods, having the same motion path, and Glyph or a glyph arrangement through which the cargo is lifted, transported or loaded from another identical position simultaneously or individually to another identical position, wherein each of the first to third robot arms is inside The side surface is engaged with the horizontal guide through the guide rail to realize horizontal linear motion, wherein the upper end horizontal guide and the lower end horizontal guide of the horizontal guide are arranged up and down, and two of the first to third robot arms are respectively transmitted through a guide rail is coupled to the left and right sides of one of the upper end horizontal guide and the lower end horizontal guide, and the other one of the first to third robot arms is coupled to the upper end horizontally through the guide rail A side of the guide and the remaining one of the lower horizontal guides.