200909322 九、發明說明： 【發明所屬之技術領域】 本發明係有種輪送裝置，尤指於輸送基板之裝置。 【先前技術】 由於平面顯不器之基板與半導體晶圓屬於 圓之儲藏櫃係以水平分隔 ^狀儲藏上述基板及曰曰 基板及該晶圓取出或置放#編板及δ亥曰曰®豐放於該儲藏櫃中，而將該 輸送基板裝置 利用一具端效器之輸送裝置，而下述為習知之 每一 置具有水平對稱之二機械手臂，並設置於一機身上， A板時，A板之靜1連接-端效器，以朗輸送基板之功效。但因輸送 =且為了 it =加’導致該儲藏櫃置放兩基板間之間隔必須增加， 率’增加簡放基板。因此輸送 ====，r "麵， 機;^述題’本發明係提供—種輸送基板裝置，解決二機械 機械臂上下移動之兩度問題，節省置放該輪送裝置之空間問題。 【發明内容】 本!X月之目的之在於提供一種輪送基板裝置，減少設置輸送基板 裝置之空間，儲存基板之儲藏櫃亦不必隨輪送基板裝置而改變。 本發明之目狀…在於提供—雜it基域置，具有良㈣平雛， 減少輸送基板裝置之重心軸偏斜，準確取得及置放其板。 本發明之目的之-，在於提供—種輪送基板裝置，二機械手臂呈水平 對稱設置’可作高箱_不_錢，有效提高輸縣板裝置之工作效 200909322 率。 為達到上述之目的，本發明係為一種輸送基板裝置，係包含一第一平 台、一設於第一平台之第二平台、一設於第二平台之一側之升降柱一設 於第二平台並嵌設於升降柱之支撐平台、二設於支撐平台之機械手臂及二 • =於二機械手臂之端效n ’第二平台旋轉於第-平台，讀平台之一側彼 設於升降柱，可使承載二機械手臂及二端㈣之支撐平台做上下運動，二 顧手臂水平對稱設置於支撐平台上，每—機械手臂具有—第—機械臂^ -第二機械臂，第二機械臂設於第—機械臂上，使二機械手臂 器作直線運動以輸送基板。 【實施方式】 茲為使貴審查委員對本發明之結構特徵及所達成之功效有更進一步 之瞭解與織’謹佐以紐之實糊舰合詳細之綱，說明如後： 請參閱第-圖，係本發明之一較佳實施例之結構示意圖。如圖所示， 本發明提供—種輸絲板裝置2，輸送基板裝置2係包含―第―平台μ、 -第，平台23、一升降柱25、一支撐平台訂、二機械手臂28及二:效器 29 ’第二平台23設置於第-平台21上’並可於第一平台21上旋轉，而第 一平台23之-側設置升降柱25，升降柱25設於與二機械手臂找運動方向 ’讀平台27設置於第二平台23上，支撐平台27之一舰設 於升降柱25 ’並於升降柱25上作上下軸，三機械手f 28相互對稱，並 平台27上，每-機械手臂28包含一第—機械臂28〇及一第二機 一 82 ’第-機械臂28Q之一端設於支樓平台27之一侧，第二機械臂娜 =-端設於第-機械臂測之另—端上，並於第二機械臂撕之另一端設 有=器29，端效器29係與第-機械臂相對。 月參閱第—A及—B圖’係本發明之另—較佳實施例之結構示意圖及 j之另較佳實施例之馬達結構示意圖。如圖所示，本實施例較第〆 圖之貫施财同在於’本實補之輸職板裝置2更包含—雜3，滑軌3 200909322 設於第一平台21下’第一平台21滑動於滑軌3上，而為了使第一平台21 滑動於滑軌3上，於第一平台21設置一馬達210，驅動第一平台21移動， 其驅動方式為滑執3内側設有一齒條座（圖中未示），馬達21〇之前端設有 一齒輪2101 ,使费輪2101與齒條座之齒條喃和，當馬達21〇運作時，齒輪 2101轉動’藉由齒輪2101與齒條間之嚙和，使第一平台21產生移動，為 了怕馬達210的轉速過快，所以於馬達210與齒輪21〇1間更設有一減速器 212，降低馬達21〇的轉速，而本實施例所使用之馬達21〇為一伺服馬達。 請參閱第三A及三B ®，係本發明之另—較佳實施例之結構示意圖及 本發明之另-較佳實關之旋轉模組結構示_。如圖所示，本實施例較 第二A圖之實施例不同在於，為了使第二平台23於第一平台21旋轉，更 包含一旋轉模組22，旋轉模組22設於第一平台21上，並與第二平台23連 接旋轉模組22包含一馬達220 ’其馬達220之心軸2201與第二平台23 連接、，以旋轉第二平台23。上述馬達220為-伺服馬達，為了降低馬達22〇 之轉速，於馬達220前端設有-減速器222，而減速器222之心軸2221與 第二平台23連接’當馬達220運作時，經減速器222降低馬達咖之轉速: 並帶動第二平台23旋轉。另為了第二平台23旋轉時之平衡問題，於第二 平口 23之-側设有-配重塊231，配重塊231位於相對於升降柱a之位置。 請參閱第四A及四B圖，係本發明之另—較佳實施例之升降柱結構示意 圖及本發明之另-較佳實_之升降柱剖躲賴。如圖所示，本實施例 較第三A圖不同在於’支撐平台27藉由升降柱25作上下運動， 27於本實施例制L型，如此可以續二機械手f，避免二機械手臂傾倒口， 並增加與升降柱25嵌接之_，避蚊撐平台27承載不了二機械 2於L型的支撐平台27之二轉角處分別設有—支撐賴〇，以增加支 台27之強度。而升降柱25具有二滑槽咖，使支撐平台^ ^中，並於升降柱25中間底端設有—馬細，且於升降柱25中^ -螺桿254 ’螺桿254螺、設於支撑平台27，以馬達2 254與支撐平台27㈣輸，糊平W珊， 200909322 馬達252之轉速於馬達252前端設有一減速器（圖中未㈤，^器自 ^254連接，減速器降低馬達脱之轉速，進而控制螺桿况之轉速。本 實施例所使用之馬達252為-飼服馬達，螺桿254為一滾珠螺桿。然後為 了防止灰塵進人升雜25内，造成輸送絲裝置2損壞，於二滑槽25〇上 分別設置-防塵帶256 ’二防塵帶256 一端分別與支撐平台27頂端連接， ,、另端繞過對應之—滑槽25〇之頂端及底端，並分別與支撐平台^底端 連接，使二防塵帶256隨支標平台27移動時而移動，為了使二防塵帶挪 移動順暢日夺並於一/月槽250頂端及底端分別設置一轉動輪奶8，使二防塵 帶256分別套設於對應之二轉動輪258上。 明參閱第五A圖’係為本發明之另一較佳實施例之支擇平台結構示意 圖。如圖所示’本實施例較上述實施例不同祕，二機械手㈣水平對稱 設於支撐平台27上，支撐平台27於對應二機械手臂28之位置分別設置一 馬達272 ’以驅動二機械手f 28作動，為了降低馬達272之轉速，於馬達 272月；|端。又置減速器274 ’減速器274再與對應之機械手臂28連接，如 此利用馬達272帶動減速器274，以減速器274帶動對應之機械手臂28， 本實施例為了減支樓平台27與第二平台間之空間，利用轉角減速器作為本 實施例之減速器274。 凊-併參閱第五B圖，係本發明之另—較佳實施例之第__機械臂與第 二機械臂之連接結構示意圖。如圖所示，本實補之輸送基板裝置具有對 稱之-機械手臂28,於此特舉其中—機械手臂28說明其第—麵臂28〇與 第二機械臂282之連接關係、，第一機械臂28〇之一端設有一第一轉動轴讓 及-第-轉動輪2803，第-轉動軸挪1之-端固設於第一機械臂28〇，第 -轉動轴2801之另一端設於對應之具有減速器274之馬達272，與減速器 274之心軸連接’第-轉動輪2803套設於第一轉動軸2801，第一轉動輪28〇3 更連接-承賴’固定於捕平台27,當馬達272運作時，帶動減速器 274，減速器274使馬達272之轉速降低，並帶動第一轉動軸28〇1轉動， 第一轉動輪2803藉由承載盤2804固定於支撐平台27且不會轉動，第一轉 200909322 動軸2801與第一轉動輪2803產生相對運動。 而第一機械臂280之另一側設有一第二轉動輪2805，第二轉動輪28〇5 與第一轉動輪2803間設有一傳動帶2806，因第一轉動軸2801與第一轉動 輪2803產生相對運動，進而使傳動帶28〇6帶動第一轉動輪狀⑽及第二轉 動輪2805，第二機械臂282相對於第二轉動輪280之位置設置—第二轉動 軸2821及一第二轉動輪2823’第二轉動軸2821之一端穿設第二轉動輪2805 並固定於第-機械臂280，第三轉動輪2823套設於帛二轉動軸2821，上述 第二轉動輪2805更包含-承載座謝，第二轉動輪施藉由承載座謂 固疋於第一機械臂282，當於第-機械臂28Q中之傳動帶腿帶動第一轉 動輪2803及第二轉動輪2805轉動時，帛二機械臂282產生同步轉動，使 第二機械臂282對第-機械臂28Q產生相對運動，所以第二轉動轴测及 第二轉動輪2823對於第一機械臂280不動。 第-機械臂282之另-端設有一第四轉動輪卿，第三轉動轴獅 與第四轉動輪2825間設有-傳動帶顧，因上述第二轉動抽测及 轉動輪2823相對於第-機械臂28〇不動，由第二機械臂脱觀之，第四轉 動輪2825與=二機械臂282產生相對運動，使傳動帶獅帶動該第四轉 動輪2825及第二轉動輪2823轉動。然而第二機械臂：之 29連接，端效器29包含-第三轉動軸观，第三轉動轴娜 動輪2825 ,因第二機械臂282之傳動帶2824册叙笛 又^ 轉 哲減认〇賴心 1辱動▼ 2824 π動第四轉動輪2825旋轉， ==4 ?之第三轉動軸292旋轉，端議隨二機 械手#的移動而削進。上述第-轉動輪應、第二轉動輪娜 輪2823及第四轉動輪2825分別為一齒輪，第一 腦、第三鶴輪2823及細轉動譲5之半/一轉動輪 請參閱第五C圖，係本發明之 白个1。 如圖所千，於;^^ j之機械手臂移動示意圖。 如圖所不财貫關可知母—機械手臂欲達到 280 282 -轉動輪、㈣動H轉输細_^謝同，第 200909322 陶：編之半議倍，細獅之半徑為第三轉 :广、兩倍，達到上述條件，即可使二端聽呈直線前進。 手臂達tn知’本發明提供—種輸送基板裝置，本發明之升降柱使二機械 二機械手臂上度’避f·機械手臂下方的支撐平台因增加 發明夕笛_、門儲存基板之儲藏櫃亦不必隨輸送基板裝置而改變。而本 袭置之#· 有配錄，#二麵手料至高麟，可減少輸送基板 h其^斜。隨著二機械手臂向前並與升降柱相反方向延伸時，使 板。i發明平使二端效器可準確從儲藏植中取得基 臂之番^ΐ 擇平台支撑，使旋轉模組不需支撐二機械手 動端效生誤差。然:而二機械手臂呈水平對稱設置，隨二機械手臂帶 斜，而=月=動時，每—端效器的二固定座不致於產生高低不同之傾 械手臂^固定座所承载之基_位於輸送基板裝置之中心軸上，當二機 而不Γ二r，基板所產生之離心效應小，所以二機械手臂可作高速旋轉 柯m #效提冑輸送紐裝置之工作效率。 符入述，、本發明係實為"'具有新賴性、進步性及可供產業利用者，應 析。私利法所規定之專利申請要件無疑，爰依法提出發明專利申請， 斤鈞局早日賜准專利，至感為禱。 明^以ΐ所述者，僅為本發明之—較佳實施例而6，並_來限定本發 神所^之减’舉凡依本發明巾料利範騎述之形狀、構造、特徵及精 所為之均錢化浦飾’均聽括於本發狀t鱗纖圍内。 【圖式簡單說明】 第·'圖：本發明之—較佳實施例之結構示意圖； 圖：本發明之另—錄實細之結構示意圖； m.本發明之另-触實_之馬達結構示意圖； A圖·本發明之另—較佳實施例之結構示意圖； 10 200909322 第二8圖.本發明之另—較佳實關之旋轉模組結構示意圖； 第四八圖·本發明之另—較佳實施例之升降柱結構示意圖； 第四BB1 :本發明之另—較佳實施例之升降柱剖面示意圖； 第五A圖：本發明之另—雛實施例之支撐平台結構示意圖； 第玉B圖：本發明之另—較佳實施例之第—機械臂與第二機械臂之連接結 構示意圖；以及 第五C圖：本發明之另一較佳實施例之機械手臂移動示音圖。 【主要元件符號說明】 2 輸送基板裝置 21 第一平台 210 馬達 2101 齒輪 212 減速器 22 旋轉模組 220 馬達 2201 心轴 222 減速器 2201 心軸 23 第二平台 231 配重塊 25 升降柱 250 滑槽 252 馬達 254 螺桿 256 防塵帶 258 轉動輪 200909322 27 支撐平台 270 支撐肋 272 馬達 274 減速器 28 機械手臂 280 第一機械臂 2801 第一轉動軸 2803 第一轉動輪 2804 承載盤 2805 第二轉動輪 2806 傳動帶 2807 承載座 282 第二機械臂 2821 第二轉動轴 2823 第三轉動輪 2824 傳動帶 2825 第四轉動輪 29 端效器 3 滑軌 12200909322 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a type of wheeling device, and more particularly to a device for transporting a substrate. [Prior Art] Since the substrate of the flat panel and the semiconductor wafer belong to a round storage cabinet, the substrate and the substrate are stored horizontally and the wafer is taken out or placed. #编板和δ曰曰曰曰® The delivery substrate device utilizes a delivery device of an end effector, and the following are two conventional robots having horizontal symmetry and are disposed on a body, the A plate. At the time, the static connection of the A board is connected to the end effector to transport the substrate. However, because of the transport = and for it = plus ', the interval between the two substrates placed in the storage cabinet must be increased, and the rate 'increased the substrate. Therefore, the conveyance ====, r " face, machine; ^ statement 'The present invention provides a kind of conveying substrate device, solving the problem of two degrees of movement of the two mechanical mechanical arms up and down, saving the space problem of placing the wheeling device . SUMMARY OF THE INVENTION The purpose of this!X month is to provide a wheeled substrate device that reduces the space for the device to be transported, and the storage cabinet for the substrate does not have to be changed with the substrate device. The object of the present invention is to provide a hetero-sub-domain, which has a good (four) flattening, reduces the deflection of the center of gravity of the transport substrate device, and accurately obtains and places the plate. The object of the present invention is to provide a wheeled substrate device, and the two robot arms are arranged in a horizontally symmetric manner, which can be used as a high box_no_money, effectively improving the working efficiency of the county board device. In order to achieve the above object, the present invention is a transport substrate device comprising a first platform, a second platform disposed on the first platform, and a lifting column disposed on one side of the second platform. The platform is embedded in the support platform of the lifting column, the mechanical arm disposed on the supporting platform, and the second end of the two mechanical arms. The second platform rotates on the first platform, and one side of the reading platform is set on the lifting platform. The column can make the support platform carrying the two mechanical arms and the two ends (four) to move up and down, and the two arms are horizontally symmetrically arranged on the support platform, and each of the mechanical arms has a - mechanical arm ^ - a second mechanical arm, a second mechanical The arm is disposed on the first arm to linearly move the two robot arms to transport the substrate. [Embodiment] In order to make your reviewer have a better understanding of the structural features and the effects achieved by the reviewer, and to elaborate on the detailed outline of the work of the company, please refer to the following: Is a schematic structural view of a preferred embodiment of the present invention. As shown in the figure, the present invention provides a wire feeder device 2, which comprises a "platform", a platform, a platform 23, a lifting column 25, a support platform, two robot arms 28 and two. The second platform 23 is disposed on the first platform 21 and is rotatable on the first platform 21, and the lifting platform 25 is disposed on the side of the first platform 23, and the lifting column 25 is located in the second robot arm. The movement direction 'reading platform 27 is disposed on the second platform 23, one of the support platforms 27 is disposed on the lifting column 25' and is placed on the lifting column 25 as a vertical axis, and the three robots f 28 are symmetric with each other, and on the platform 27, each - the mechanical arm 28 includes a first arm - 28 arm and a second machine - 82'. The first arm of the arm 28Q is disposed on one side of the branch platform 27, and the second arm is set at the first The other end of the arm is measured, and the other end of the second mechanical arm is provided with a = 29, and the end effector 29 is opposed to the first arm. Referring to Figures -A and -B, there is shown a schematic view of a preferred embodiment of the present invention and a schematic diagram of a motor structure of another preferred embodiment of j. As shown in the figure, the embodiment of the present invention is the same as that of the first figure. The input plate device 2 of the present embodiment is further included - the miscellaneous 3, the slide rail 3 200909322 is disposed under the first platform 21, the first platform 21 Sliding on the slide rail 3, and in order to slide the first platform 21 on the slide rail 3, a motor 210 is disposed on the first platform 21 to drive the first platform 21 to move, and the drive mode is a rack on the inner side of the slide 3 a seat (not shown), a gear 2101 is arranged at the front end of the motor 21〇, so that the roller 2101 and the rack of the rack seat are harmonized. When the motor 21〇 is operated, the gear 2101 rotates 'by the gear 2101 and the rack The first platform 21 is moved. In order to prevent the rotation speed of the motor 210 from being too fast, a speed reducer 212 is further disposed between the motor 210 and the gear 21〇1 to reduce the rotation speed of the motor 21〇. The motor 21 used is a servo motor. Please refer to the third and third B®, which are a schematic structural view of another preferred embodiment of the present invention and a further preferred embodiment of the rotary module structure of the present invention. As shown in the figure, the embodiment is different from the embodiment of the second embodiment in that, in order to rotate the second platform 23 on the first platform 21, a rotation module 22 is further included, and the rotation module 22 is disposed on the first platform 21 The rotary module 22 is connected to the second platform 23 and includes a motor 220'. The spindle 2201 of the motor 220 is coupled to the second platform 23 to rotate the second platform 23. The motor 220 is a servo motor. In order to reduce the rotation speed of the motor 22, a speed reducer 222 is provided at the front end of the motor 220, and the spindle 2221 of the speed reducer 222 is connected to the second platform 23. When the motor 220 operates, the motor is decelerated. The 222 reduces the rotational speed of the motor coffee: and drives the second platform 23 to rotate. In addition, for the balance problem when the second platform 23 is rotated, a weight 231 is provided on the side of the second flat opening 23, and the weight 231 is located at a position relative to the lifting column a. Please refer to Figures 4A and 4B, which are schematic diagrams of the structure of the lifting column of another preferred embodiment of the present invention and the lifting column of the other embodiment of the present invention. As shown in the figure, the present embodiment differs from the third embodiment in that the 'support platform 27 is moved up and down by the lifting column 25, 27 is L-shaped in this embodiment, so that the robot f can be continued to avoid the two mechanical arms falling. The mouth, and the incorporation of the lifting column 25, the mosquito-removing platform 27 can not carry the two machinery 2 at the two corners of the L-shaped support platform 27, respectively, to support the Lai, to increase the strength of the support 27. The lifting column 25 has two sliding grooves, so that the supporting platform is located in the middle of the lifting column 25, and the bottom portion of the lifting column 25 is provided with a horse thin, and in the lifting column 25, the screw 254 is screwed to the supporting platform. 27, with the motor 2 254 and the support platform 27 (four), paste flat W Shan, 200909322 motor 252 speed is provided at the front end of the motor 252 a reducer (not shown in the figure (5), ^ device from ^ 254 connection, the reducer reduces the speed of the motor off And controlling the rotation speed of the screw condition. The motor 252 used in the embodiment is a feeding motor, and the screw 254 is a ball screw. Then, in order to prevent dust from entering the lifting chamber 25, the conveying wire device 2 is damaged. The groove 25 is respectively provided with a dust-proof belt 256'. The two dust-proof belts 256 are respectively connected to the top end of the support platform 27, and the other ends are bypassed by the corresponding top and bottom ends of the sliding groove 25, respectively, and respectively support the platform The end connection causes the two dustproof belts 256 to move as the support platform 27 moves. In order to make the two dustproof belts move smoothly, a rotating wheel milk 8 is respectively disposed at the top end and the bottom end of the one/month tank 250, so that the second dustproof The belt 256 is respectively sleeved on the corresponding two rotating wheels 258 Referring to FIG. 5A, FIG. 4 is a schematic structural diagram of a selection platform according to another preferred embodiment of the present invention. As shown in the figure, the present embodiment is different from the above embodiment, and the two robots (four) are horizontally symmetrically supported on the support. On the platform 27, the support platform 27 is respectively provided with a motor 272' at the position corresponding to the two robot arms 28 to drive the two robots f28 to operate. In order to reduce the rotation speed of the motor 272, the motor is 272 months; the end is further set. The reducer 274 is further connected to the corresponding mechanical arm 28, so that the reducer 274 is driven by the motor 272, and the corresponding mechanical arm 28 is driven by the reducer 274. In this embodiment, in order to reduce the space between the platform 27 and the second platform, A corner reducer is used as the speed reducer 274 of the present embodiment. 凊-see also FIG. 5B, which is a schematic diagram of the connection structure of the __mechanical arm and the second arm of another preferred embodiment of the present invention. As shown, the present embodiment of the transport substrate device has a symmetrical mechanical arm 28, wherein the mechanical arm 28 illustrates the connection relationship between the first arm 28 〇 and the second robot arm 282, and the first arm 28〇之之The first rotating shaft is provided with a first-rotating wheel 2803, the end of the first rotating shaft is fixed to the first mechanical arm 28, and the other end of the first rotating shaft 2801 is provided with a reducer. The motor 272 of the 274 is connected to the spindle of the speed reducer 274. The first rotating wheel 2803 is sleeved on the first rotating shaft 2801, and the first rotating wheel 28〇3 is more connected-retained to the catching platform 27 when the motor 272 In operation, the speed reducer 274 is driven, the speed reducer 274 lowers the rotation speed of the motor 272, and drives the first rotating shaft 28〇1 to rotate. The first rotating wheel 2803 is fixed to the support platform 27 by the carrier plate 2804 and does not rotate. One turn 200909322 The moving shaft 2801 and the first rotating wheel 2803 produce relative motion. The second rotating wheel 2805 is disposed on the other side of the first mechanical arm 280, and a driving belt 2806 is disposed between the second rotating wheel 28〇5 and the first rotating wheel 2803, and the first rotating shaft 2801 and the first rotating wheel 2803 are generated. The relative movement causes the belt 28〇6 to drive the first rotating wheel (10) and the second rotating wheel 2805, and the second mechanical arm 282 is disposed relative to the second rotating wheel 280—the second rotating shaft 2821 and a second rotating wheel 2823' one end of the second rotating shaft 2821 is disposed through the second rotating wheel 2805 and fixed to the first arm 280, the third rotating wheel 2823 is sleeved on the second rotating shaft 2821, and the second rotating wheel 2805 further includes a carrier The second rotating wheel is applied to the first mechanical arm 282 by the carrier. When the driving belt leg of the first mechanical arm 28Q drives the first rotating wheel 2803 and the second rotating wheel 2805 to rotate, the second rotating machine The arm 282 produces a synchronous rotation that causes the second robot arm 282 to move relative to the first arm 28Q, so that the second axis of rotation and the second wheel 2823 are stationary for the first arm 280. The other end of the first arm 282 is provided with a fourth rotating wheel, and the third rotating shaft lion and the fourth rotating wheel 2825 are provided with a transmission belt, because the second rotating sampling and rotating wheel 2823 is opposite to the first mechanical The arm 28 is not moved, and is disengaged by the second mechanical arm. The fourth rotating wheel 2825 and the second mechanical arm 282 are in relative motion, so that the driving belt lion drives the fourth rotating wheel 2825 and the second rotating wheel 2823 to rotate. However, the second mechanical arm: 29 is connected, the end effector 29 includes a third rotating shaft view, the third rotating shaft is rotating the wheel 2825, because the second mechanical arm 282 is driven by the belt 2824 and the whistle is changed. The heart 1 is insulted ▼ 2824 π moves the fourth rotating wheel 2825 to rotate, and the third rotating shaft 292 of == 4 rotates, and the cutting is carried out with the movement of the two robots #. The first rotating wheel, the second rotating wheel 2823 and the fourth rotating wheel 2825 are respectively a gear, and the first brain, the third crane 2823 and the thin turning wheel 5/one rotating wheel are referred to the fifth C. The figure is a white one of the present invention. As shown in the figure, the movement of the mechanical arm of ^^^ j. As shown in the figure, the mother-machine arm wants to reach 280 282 - turning wheel, (four) moving H-transfer fine _^ Xie Tong, No. 200909322 Pottery: The half-length of the lion, the radius of the lion is the third turn: Wide and double, to achieve the above conditions, the two ends can be straight forward. The invention provides a transporting substrate device, and the lifting column of the present invention enables the two mechanical two mechanical arms to be 'avoided by the arm. The support platform under the mechanical arm is increased by the invention. It also does not have to be changed as the substrate device is transported. And the original set of ## has a record, #二面手料至高麟, can reduce the transport substrate h its ^ oblique. The plate is brought as the second robot arm moves forward and in the opposite direction of the lifting column. i Invented the two-terminal effector to accurately obtain the basic support of the base arm from the storage plant, so that the rotary module does not need to support the error of the two robots. However: the two mechanical arms are arranged horizontally symmetrically, with the two mechanical arms tilted, and = month = moving, the two fixed seats of each end effector will not produce different heights of the arm (the base of the fixed seat) _ is located on the central axis of the transport substrate device. When the two machines are not sturdy, the centrifugal effect generated by the substrate is small, so the two robot arms can be used for high-speed rotation of the work efficiency of the device. The description of the invention is based on the fact that the invention has the advantages of being new, progressive and available to the industry. The patent application requirements stipulated by the Private Interest Law are undoubtedly, and the application for invention patents is filed according to law, and the patents are granted as soon as possible. The above description is only the preferred embodiment of the present invention, and 6 is used to define the shape, structure, characteristics and fineness of the invention. All of them are all in the shape of the hair. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the structure of a preferred embodiment of the present invention; FIG. 3 is a schematic view showing the structure of another embodiment of the present invention; m. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the structure of a preferred embodiment of the present invention; 10 200909322. FIG. 8 is a schematic view showing the structure of a rotating module of another preferred embodiment of the present invention; - FIG. 4B is a schematic cross-sectional view of a lifting column of another preferred embodiment of the present invention; FIG. 5A is a schematic view showing a structure of a supporting platform of another embodiment of the present invention; J-B: a schematic diagram of the connection structure between the first arm and the second arm of the preferred embodiment of the present invention; and FIG. 5C: the moving arm diagram of the robot arm according to another preferred embodiment of the present invention . [Main component symbol description] 2 Transport substrate device 21 First platform 210 Motor 2101 Gear 212 Reducer 22 Rotary module 220 Motor 2201 Mandrel 222 Reducer 2201 Mandrel 23 Second platform 231 Counterweight 25 Lifting column 250 Chute 252 Motor 254 Screw 256 Dust belt 258 Rotating wheel 200909322 27 Support platform 270 Support rib 272 Motor 274 Reducer 28 Robot arm 280 First robot arm 2801 First rotating shaft 2803 First rotating wheel 2804 Carrier plate 2805 Second rotating wheel 2806 Belt 2807 carrier 282 second arm 2821 second axis 2823 third wheel 2824 belt 2825 fourth wheel 29 end effector 3 rail 12