TW201008726A - Transfer apparatus and transfer method of a plate-shaped work piece - Google Patents

Abstract

A transfer method of a plate-shaped work piece can decrease both the transfer time of a plate-shaped work piece and the space required in transfer. A transfer apparatus 10 of a plate-shaped work piece includes a multi-articulations robot 11, which has a row of movable arms 13 with multi-articulations and is provided, at the front end of the row of movable arms 13, with a holding portion 23 for holding and obtaining a surface of the plate-shaped work piece 3. The under surface 3a of the supply side of the plate-shaped work piece 3 supplied to an obtaining position 4 is held by the multi-articulations robot 11, and the upper surface 3b opposite to the under surface 3a is carried onto a carry-surface 26 of a carry position. The obtaining position 4 and the carry position are arranged oppositely, and the multi-articulations robot 11 is arranged on one side of an opposite space 9. The multi-articulations robot 11 performs a transfer action, which lets the plate-shaped work piece 3 transfer from the obtaining position 4 and pass through the opposite space 9 until the carry position by means of the rotation & bending movement of the row of the movable arms 13. Furthermore, a reverse action is also performed during a portion of the transfer action, so as to carry the upper surface 3b of the plate-shaped work piece 3 onto the carry-surface 26.

Description

201008726 jioyjpa VI. Description of the Invention: [Technical Field] The present invention relates to a transfer device for a plate-like workpiece and a transfer method, for example, relating to a method for transferring a liquid crystal display or a plasma display Or flat panel display (FPD), such as electroluminescence (EL), fleld emissi〇n display (FED), surface φ conduction electron-emitter display (SED) The equipment for the glass substrate used and the transfer method. [Prior Art] For such a transfer device, a general multi-degree-of-freedom robot arm such as a multi-axis vertical multi-joint robot or a multi-axis horizontal articulated robot has been previously applied. Since the glass plate is fragile, the handle is handled by the handle, and it is extremely difficult for the operator to carry it for the machine of greater than or equal to = glass. Further, there is a tendency that the glass sheet for the above application is required to have a high cleanness, so that it is necessary to prevent the organic matter from being dusted during the operation of the operator. In this regard, if the above-described multi-degree-of-freedom machine n-arm position has a high degree of freedom for the power posture, the motion trajectory desired by the user (operator) can be set. Further, since the possibility of dust generation of an organic substance or the like is also low, the multi-degree-of-freedom robot arm is preferably used for transfer of a glass plate as compared with an operator.久录 其:: In the above-mentioned glass plate (glass substrate), there are surfaces for mounting various kinds of visible parts, so for one side of the glass base 5 201008726 31693pif board to be the mounting surface, it must be better than the other Work more carefully. That is, it is preferable that the transfer of the glass substrate is carried out as far as possible without touching the mounting surface. Here, for example, in Patent Document 1 listed below, as a transfer device that constitutes a transfer device for a substrate having a thin film on one surface, a multi-joint robot is disclosed, and the multi-joint robot is mounted with a housing recess that is open to the substrate. At least one of the transport terminal or the side surface of the transport unit; and a swing table that is rotatable about a vertical axis on the fixed table; and an arm base (armbase) is attached to the swing base on the arm On the base base, a head for adsorbing the surface (lower surface) opposite to the film forming side of the substrate is attached to the multi-joint arm. And by rotating the turntable of the transfer machine, for example, about 90 about the vertical axis. And will be transferred from the storage recess to the transfer position. Further, at the distal end portion of the multi-joint arm, the head base of the adsorption head is rotatably coupled to the head, and the suction of the horizontal posture is reversed by 18 。. , money sucking _ holding the substrate upside down. ^ _ and 'in the next document, the towel 2' as a transfer on the punching machine = the transfer robot between the punches and the 'transporting robot' reveals a press-to-press transfer robot, which consists of the first arm, the second arm, and the financial section of the swing base. The above-mentioned thousand-shift base is arranged in parallel with the direction in which the I-parts are sent. The first arm is mounted on the swing base, and the first arm is mounted on the swing base to swing the surface around the swing axis at right angles to the transport direction. The second arm is opposite to the first! The arm is retractably attached to the front end, and the above-mentioned toggle is attached to the front end of the second arm. Further, it is disclosed that the transporting branch transporting robot is disposed face to face with a transport path of the workpiece, and the two inter-press transfer robots support the workpiece grip for holding and holding the workpiece at both ends. In the case of the squirrel-carrying squirrel, the squirrel-carrying squirrel is used to perform the smuggling of the smugglers. [Prior Art Document] [Patent Document] [Patent Document 丨] Japanese Patent Laid-Open No. 2001-180822 [Patent Document 2] Japanese Patent Application Open 2〇〇4_337918 bulletin-Cry, Γ 'Recently' In order to realize the further popularization of flatpanel display 'FpD) products represented by liquid crystal displays, strong tiles require cost reduction through mass production ( The coffee is down. Therefore, it is also required in the art to further shorten the transfer time of the glass substrate. Further, when the operating area of the robot arm becomes large, the installation area of the safety fence or the like must be set to (4) the increase in the footprint 鬌 (footprmt) (the area occupied by the device) cannot be avoided. Therefore, instead of expecting an improvement in operational efficiency, it is likely to result in a reduction in efficiency or productivity. Moreover, since most of the equipment is installed in a clean environment, it will reduce the cost of the cleaning environment. Therefore, in the transfer device of Patent Document 1, in the transfer device of Patent Document 1, the multi-joint arm that adsorbs and holds the substrate is swung around its vertical axis, Since the substrate is transferred from the storage position to the transfer position, the transfer path is changed to 201008726^iWpit and the high-speed movement of the arm is difficult to achieve in consideration of the stop operation at the transfer position. Therefore, as long as such a transfer path is adopted, it is shifted to achieve ° and 'because the transfer machine (machine arm) = move, it must be set to be wide, so that the occupied area is also not = ° and then the substrate reverse operation It is performed differently from the above-mentioned 瞒 transfer, and thus each requires a dedicated drive mechanism. Therefore, the overall weight reduction will be difficult to achieve. Further, in the transport apparatus of Patent Document 2, the two arms are disposed on the left and right sides of the workpiece, and the two arms support the workpiece holding handle for absorbing the lining workpiece to support the workpiece at both ends. . Therefore, it is necessary to synchronize the two arms, which may hinder the high speed of the transport operation: 匕. Further, since the centering is not loaded with a mechanism for performing the reverse operation in consideration of the back surface of the workpiece, it is difficult to apply it directly to the transfer device of the glass sheet. Needless to say, the above-mentioned problems are not limited to the glass plate, and are also applicable to other plate-shaped workpieces, particularly for plate-shaped workpieces having a large flat surface. SUMMARY OF THE INVENTION In view of the above circumstances, in the present specification, the transfer time of the plate-shaped workpiece and the m-suppression required for the transfer are realized as technical problems to be solved by the present invention. The solution to the above problems is achieved by the transfer apparatus of the glass sheet of the present invention. That is, the transfer device is a device for acquiring a plate-like workpiece at a take-up position of a plate-like workpiece and transferring the obtained plate-like workpiece to a mounting position thereof. The transfer device is provided with a multi-joint robot. The multi-joint robot is provided by the multi-201008726 JJoyjpir robot to hold the supply surface of the plate-shaped workpiece supplied to the acquisition position, and the upper surface opposite to the lower surface is placed on the mounting series. a take-up plate having a plurality of joints and a front end of the series of movable arms is provided with a portion for holding the face of the pick-up, and the transfer position of the remaining transfer device is a facing position, and The opposite direction ΐ ΐ 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 臂 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' Reverse ti乍 on.仃 used to place the upper surface of the plate-shaped guard on the spotplate = Department: f Γ The robot is placed at a position offset from the opposite direction of the position of the plate-shaped workpiece from the position of the placed position, and: By transferring the plate-shaped workpiece, it is possible to reduce the occupied area of the transfer device by reducing the area of the peripheral device (J:: the first month) by the fact that the workpiece can be wound around when the workpiece is transferred. It is helpful to reduce the efficiency of the current operation of the holding company. Moreover, the part of the above-mentioned transfer operation is::; the reversal action of the second one, so that it is no longer required to be used for placing the plate-shaped workpiece. The mechanism for reversing the action. Moreover, the party 2 sends the action separately and only performs (motor, etc.), and only needs to be transferred;; needs: to increase the weight of the 'can-series movable arm; move = 201008726 ilt> V3piI increases the moving speed of the movable arm. The horizontal work transfer operation can also be performed by the series of movable arm winding and flexing movements. The reason is that the transfer position of the acquisition position and the posture conversion (reverse rotation) are only utilized by the winding. In this way, the transfer equipment can be The actual occupied area (f00tprint) is suppressed to a minimum and further Φξ: south working efficiency. Moreover, if the above configuration is adopted, it is not necessary to use a general six-axis type liberation degree robot arm, for example, it is also possible to have a horizontal level. And a multi-joint robot with a joint (oil t) that is smaller than or equal to 5 axes. It has a multi-joint robot with three axes that are horizontal and parallel. And 'just reduce the number of links or _ (axes), Therefore, it is not restricted by the joints whose movement speed is slow, and the movement speed of the (4) movable arm as a whole is not limited. Moreover, the rigidity of the movable arm can be improved as compared with the previous one by reducing the number of joints. The plate-like workpiece can be transferred at a high speed while ensuring high positional accuracy. On the other hand, the transfer operation may include, for example, causing the holding portion to sneak into the lower surface of the plate-like workpiece that is supplied to the acquisition position to hold the lower surface of the plate-like workpiece. Then, the action of lifting the plate-shaped workpiece upwards. As long as a series of movable arms are operated as such, the self-transporting_the following table_ can be used to press the plate-shaped workpiece and start the plate shape. The transfer member. Thus, even after the feeding started immediately increase the transfer speed, nor from the plate-shaped member holding portion guard duty colonies (from off) possibilities.

201008726 310V3P1T Fees, the action may include, for example, moving the plate-shaped workpiece to the direction of the orientation, and then maintaining the correct posture to move the plate-shaped workpiece. Actions. This is effective for loading the plate-shaped workpiece and it is true that even if the plate-shaped workpiece is continuously stacked on the mounting surface, 0=5 is slightly deviated from the direction of the stowage thickness of the plate. The ground is placed on the stacked plate-shaped workpiece soil; two series of movable arms (multi-joint machines) with at least 3 axes are required to be placed or the acquisition operations described above can be implemented. The transfer path of the workpiece piece 'multi-joint robot transfer plate γ3:=ξ; ^, the next lion will transfer her the smallest lion will be different based on bribery' even if the length of the path has been minimized, but if If the path setting material actually considers the air resistance of the plate-shaped series to be considered, it will not be able to obtain the setting 2 and the speed due to the balance with the motor load capacity. For the above reasons, in the present invention, attention is paid to the output of each joint, and the operation in which the total sum of outputs is minimized is realized. Thereby, the plate-like workpiece can be transferred efficiently and in a short time. Further, if the material operation (path) is set based on the reference, it is not necessary to make the motor as large as possible. Therefore, it is possible to use a motor of a relatively small capacity, thereby realizing the weight reduction of the entire arm, whereby a high-scission action conforming to the slave can be realized. Specific examples of the transfer operation include, for example, the following operations: 201008726 31693pif == two operations to position the mounting surface, and i upper surface and φ ===: degree _:== :: :: The transfer speed of the piece is sent:: The action can be listed as including: ============================================================================================= In the case where the money transfer operation is performed by the state in which the money is placed on the surface of the carrier and the second slave, the transfer operation is performed in the case where the stop position of the plate-like field is slightly shifted. Next, 2 corrects the above deviation by moving the body of the multi-function machine in the horizontal direction, thereby placing the plate-like workpiece in an accurate position. The transfer device of the plate-like workpiece described above can be provided, for example, by the form shown below. That is, a package device capable of providing a type of plate includes: the above-mentioned transfer device; a transfer unit that transfers the plate shape to the acquisition position; and one or more trays for the bag, having a placement position and used for The plate-shaped workpiece is stacked under the laminar workpiece II, and the "acquisition position of the bag with the bag is set on the transport unit" at the respective acquisition position and the space between the tundish trays. The multi-joint robot is placed on the side of the multi-joint robot and the multi-joint robot transfers the sheet-shaped workpiece conveyed to the acquisition position by the transport unit to be selectively carried on each of the pallets. By using a plurality of transfer apparatuses as described above, the transfer efficiency (the package efficiency) can be improved. Further, when different types of plate-like workpieces are transported by the same transport unit, each workpiece can be accurately and efficiently stacked. On the other hand, the solution to the above problem can also be achieved by a method of transferring a plate-like workpiece obtained by acquiring a plate-like workpiece at a position where the plate-like workpiece is taken, and transferring the obtained plate-like workpiece to the load. The method of placing the position 'the multi-joint robot is used to hold the lower surface of the supply side of the plate-shaped workpiece supplied to the acquisition position, and the upper surface 13 201008726 31693pif surface opposite to the lower surface is placed on the placement position A series of movable arms with multiple joints on the surface and a joint robot with two faces for maintaining the acquisition of the plate-shaped workpiece: Bao: The front end of the boom is provided with a transfer method characterized by: acquiring position and carrying The plate-shaped workpiece is disposed on the side of the opposing space, and the plurality of joints are disposed on the side of the opposing space: the person is placed in the opposite direction, and the self-acquisition position is moved by the opposing space to make a part of the plate-shaped workpiece transfer operation: Reverse operation on the placement surface. The above table of the slab-shaped workpiece [Effect of the invention] = upper =, the transfer device of the plate-like workpiece according to the present invention, and the transfer time of the plate-shaped workpiece and the reduction of the space required for the transfer. The above described features and advantages of the present invention will become more apparent from the description of the appended claims. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a plan view showing a packaging apparatus 1 for a glass substrate according to an embodiment of the present invention. The bagging device 1 of the figure is for obtaining a glass substrate 3 for a liquid crystal display that is transported to the acquisition position 4 by the transfer unit 2 by using the transfer device 1 , and continuously accumulating the obtained glass substrate 3 to the transport unit The equipment on the stacking tray 5 provided on the side of the second side, the carrying pack 1 includes a plurality of transfer apparatuses 10, a transport unit 2, and one for wrapping the glass substrate 3 in a state in which the glass substrate 3 has been laminated. Or more 201008726

Ji&y^pu pallets for pallets 5. Specifically, the transport unit 2 has a transport path 6 capable of transporting the glass substrate 3 in a horizontal posture. The transport path 6 includes an appropriate drive unit such as a roller conveyer. On the transport path 6, there are one or a plurality of acquisition positions 4 for acquiring the glass substrate 3 by the transfer device 1A. At the acquisition position 4, a recessed portion 7 having a shape in which the workpiece holding portion 23 φ of the articulated robot 11 to be described later passes in the vertical direction is formed in a state in which the side of the transport unit 2 is opened, and the workpiece can be passed from below. The holding portion 23 holds the glass substrate 3 in a state where the stop at the acquisition position 4 is acquired. Further, the aiignity unit 8 is disposed on the transport path 6 at the acquisition position 4, and is arranged along the transport orthogonal direction of the glass substrate 3 stopped at the acquisition position 4. The stacking tray 5 of the glass substrate 3 is disposed at a position facing the acquisition position 4 in the transport unit 2. To be precise, the arrangement position (the opposing interval or the direction thereof) of the carrying tray 5 with respect to the conveying unit 2 (the acquisition position 4) is set such that the left and right end faces of the glass substrate 3 at the acquisition position 4 and the stacking tray 5 are provided. The left and right end faces of the glass substrate 3 (at the mounting position) placed on the mounting surface 26 are parallel. The multi-joint robot 移 of the transfer device 10 is disposed on the side of the opposing space 9 formed between the acquisition position 4 and the placement position (the pallet 5 for the bag). In the embodiment, the recesses 7 (the acquisition position 4) are provided at predetermined intervals of the transport path ,, and the same number of the pallets 5 and the multi-section robot 11 as the recesses 7 are disposed. Fig. 2 is a side view showing the transfer device 1A. As shown in the figure, the transfer device 15 201008726 31693pif: two multiple standbys 7: the robot U' is disposed on the grounded base 12. The multi-turn robot η has a series of movable arms 13 and a control panel 14 that controls the operation of the material 11=13 (see Fig. D. Both of them have a so-called multi-joint robot arm structure) The square of the joint axis is placed in the direction of the feed of the substrate 2, in other words, the configuration of the series of movable arms 13 or the disk 5) is adhered to the position of the person 11 relative to the acquisition position 4 or placed. Location

Ζ Ζ Ζ 5 丝 成 成 ' ' ' ' ' ' ' ' 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 卫 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 The arm 13 will be described in detail. The series 13 may have a 3-axis joint structure, and a link 15 positioned closest to the susceptor 12 side is erected with respect to the susceptor 12, and the second link is erected. One end is connected to the other end of the second link 15 via the first joint 16 . One end of the third link 19 is connected to the other end of the second link 17 via the second joint 18, and the other end of the third link 19 is connected to the workpiece holding portion 23 by the third joint 20. The elbow 21 . A corresponding drive motor (only the drive motor 22 for the first joint 16 is shown) is integrally disposed in the vicinity of each of the joints 16, 18, 20. The drive motors are also connected to the fish links 15, 17, 19 Together, a series of movable arms 13 are formed. Further, a reduction gear can be incorporated in each of the joints 16, 18, 20 or a motor with a speed machine can be used as the above-described drive motor. In addition, as a j-speed machine used at this time, in order to further improve the rigidity of the movable arm, it is preferable to reduce the occurrence of a backlash (for example, the Sankyo Co., Ltd. has a total of 16 201008726 3I〇yipit limited company manufacturing R〇llerDrive (registered trademark), etc. as a zero backlash precision reducer. Further, the respective links 15, 17, 19 are independently rotatable forward and backward around the respective joints 16, 18, 20, and do not cause interference between the flails or the surrounding objects due to the angle of rotation. The workpiece holding portion 23 has a shape that can pass through the concave portion 7 provided in the transport path 6 in the vertical direction. In the example of Fig. 2, a plurality of protrusions in a so-called fork shape are arranged in parallel. A plurality of suction pads 24 are disposed on one surface side of the workpiece holding portion φ 23, and the objects attached to the adsorption pad 24 can be adsorbed and held by the decompression unit 25 such as a vacuum pump connected to the series of movable arms 13. . The package tray 5 has a mounting surface 26 inclined at a predetermined angle (e.g., 72°) in the illustrated example, and a plurality of glass substrates 3 can be stacked on the mounting surface 26. Here, although not shown, a liner supply unit that supplies the liner 27 to the placement surface 26 at the time of stowage is disposed above the stacking tray 5. Further, each time the glass substrate 3 is placed on the placement surface 26 of the package tray 5 by the articulated robot 11, the liner 27 is supplied to the placement noodle 26 (when 1 or more is placed) In the case of the glass substrate 3, the backing paper 27 is supplied to the lower surface 3a of the uppermost glass substrate 3, whereby a plurality of glass substrates 3 can be stacked on the mounting surface 26 via the backing paper 27. Further, in order to ensure the placement position accuracy of the glass substrate 3, for example, as shown in FIG. 2, an axis along the joints 16, 18, 20 may be provided between the susceptor 12 and the body of the series of movable arms 13. A sliding mechanism 28 that slides in the direction. Hereinafter, an example of the transfer operation of the glass substrate 3 using the transfer device 10 having the above configuration will be mainly described based on @3 to Fig. 7. In addition, the following 17 201008726 31693pif = action wire is set to the side, that is, the transfer operation of the series of transferable glass substrates 3 is set such that a series of movable arms = each of the 16th, 18th, 20th The sum of the output of the drive motor is the highest, and β is transmitted to the transport path 6 by the position sensor (not shown) that minimizes the time product of the load to the motor. After the glass substrate 3 has reached the acquisition position 4 shown in FIG. 1, the drive unit of the roller conveyor or the like is stopped. Thereby, the glass substrate 3 is stopped and placed on the acquisition position 4: In addition, at this time, for example, the position of the glass substrate 3 in the left-right direction is adjusted by an appropriate alignment sheet 8 provided at the acquisition position 4. (Position on the virtual axis orthogonal to the transport direction). At this stage, a series of movable workpiece holding portions 23' are disposed directly under the glass substrate 3 placed on the acquisition position 4 as shown in Fig. 3 . Further, the second joint 18 is located below the joint 1 or the third joint 20. Next, at the position shown in FIG. 3, the lower surface of the glass substrate 3 is sucked and held by the plurality of adsorption pads 24 provided on the workpiece holding portion 23, and from the state, the second joint 18 is centered. The third link 19 is rotated counterclockwise in FIG. 3, whereby as shown in FIG. 4, the glass substrate 3 is lifted up from the transport path 6^, and the transfer of the glass substrate 3 is started. At this time, the toggle 21 is kept fixed to the third link 19, and the second link 17 is rotated clockwise in the clockwise direction with respect to the second link 15 in accordance with the turning operation of the third link 19. . Further, in the example of Fig. 4, the glass substrate 3 is adsorbed and held so as to be slightly lifted upward, and a series of movable arms 13 are bent, whereby the glass substrate 3 is moved in parallel to the front (near the bag 18 201008726 316V3pit upper plate) Two == upper center::; from the TM stowed position 'm ❿ when a series of movable arm shafts are rotated and held at the front end by the above (the workpiece is held horizontally and to her (4), In other words, the upper surface 3b of the substrate 3 and the mounting surface of the stacking tray 5 are changed as follows: the upper surface 3b of the glass substrate 3 on which the glass substrate 3 is placed and the mounting surface 2 are placed. Linear movement). Alternatively, _ 2^=::= can be set to 2: 2 column: at this time, 'the direction perpendicular to the direction of the transfer is slightly shifted by two placement positions for fine adjustment. In addition, the glass shown in Fig. 5 =3 is supplied to the previously stowed glass substrate 3 ^ paper 27 is loaded, and the SC member holding portion 23 _ is moved below the position 4. Here, Lai 6 = 19 201008726 31693pif blind first 1 more elbow 21 around 3, the workpiece holding portion 23 is rotated slightly in the clockwise direction, so that the joint 18 is centered. Direction = the third link 19 is brought close to the acquisition position 4 by the second break. The rotation of the third link 19 causes the workpiece holding portion 23 to be in time. As shown in Fig. 7, the guard member is brought to the vicinity of the acquisition position 4. The lower dive of the glass substrate 3 is placed at the acquisition position 4, that is, at the position shown in Fig. 3. Immediately below the plate 3, in the state where the boom is curved, the third link is made one = % The heart rotates clockwise, and the first joint 8 rotates counterclockwise for the middle edge, and the red piece is accompanied by the third joint 20 and gambles from the state to the next (four) tilt ', the boom 13 is continuously extended, thereby In the embodiment, the plurality of glass substrates 3 are stacked on the mounting surface 26 of the bag 5, and in the embodiment, the plurality of acquisition positions 4 are set to be transported. The road, the upper, and the same number of the acquisition pockets 4 are arranged in the same positional relationship with the shovel shovel 5 and the shovel joint robot 11. Therefore, ❹ can be placed in one acquisition using a multi-joint robot U During the transfer/stacking operation of the glass substrate 3 at the position 4, other multi-levels are utilized. The robot 11 transfers and stacks the glass substrate 3 that has been transported and placed in the corresponding other acquisition position 4, so that the transfer and stowage efficiency of the glass substrate 3 can be greatly improved. Of course, as long as the baggear device 1 is used, the same transfer is performed. In the case where the different types of glass substrates 3 are transported on the path, the transfer device 1 对应 corresponding to each of the glass substrates 3 can be configured, and 20 201008726 can realize the transfer/retraction operation of each of the glass substrates 3 . In the example of the transfer operation of the glass substrate 3 of the transfer device 1G of the transfer device (the third operation example), the transfer operation other than the above is performed. The following oaths + fields..., ', other examples of ut; ut; transfer device 1G transfer

3: The case where the mounting table 29 of the mounting surface 26 in the flat state of the glass substrate that has been transported to the acquisition position 4 is transferred is described as a ship. The _transfer device ig is made the same as the third operation example. Here, the transfer operation indicates an operation example in the following case, v, and the transfer operation of transferring the one-frame = boom 13 to the glass substrate 3 is set such that the movement energy of the glass substrate 3 due to the air resistance is lost. The sum is minimized. This shifting is to increase the maximum viewing speed when the air resistance to the glass substrate 3 is minimized, and to set the maximum based on the relationship between the air resistance and the path length of the substrate 3 during the delivery. Good transfer path. First, as in the first operation example, as shown in Fig. 8, the workpiece holding portion 23 is disposed directly below the glass substrate 3 placed at the acquisition position 4. At this time, the second joint 18 is located above the first joint 16 and the third joint 2A. Next, at this position, the lower surface 3a of the glass substrate 3 is suction-held by the plurality of adsorption pads 24 provided on the workpiece holding portion 23, and as shown in FIG. 9, the glass substrate 3 is lifted slightly upward. When the glass substrate 3 is moved in parallel to the side of the mounting table 29, a substantial movement operation is started. That is, as shown in FIG. 10, the second link 17 is wound around the first joint 16 along 21 201008726

JiOVJpn rotates counterclockwise (and the rotation of the example of Fig. 10 in the second link 17 is also reversed counterclockwise 19 as shown in Fig. ,, so that the toggle 21 is rotated around the third and rotates. The glass substrate 3 is tilted in a clockwise direction and its planting position is side up. The glass substrate 3 is tilted in the same manner as described above, so that the glass substrate is continuously moved to make the glass substrate 3 The third link 19 is arranged in the direction of the carrier 2, and the third link 19 is arranged in the position of the vertical extension as shown in Fig. 12; the same as the straight line 2: the second: and the series of movable arms 13 are vertically upward. When the stretched portion 21 is rotated and the position of the elbow is set in the state in which the glass base is applied, the end portion of the other end side of the glass substrate 3 is turned upside down, and the material 21 is rotated in the direction of the weighing direction and the second is made. Liancao 17 turns clockwise counterclockwise 19 counterclockwise (see the 2nd and 3rd series of movable arm 13 to bend open), so that the glass is slowly turned down on the one hand

Q 3 ^ 断 ' Μ Μ Μ Μ Μ Μ 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 破 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Inverted and placed 26 stitches I. Direction shout #― This transfers the glass substrate 3 to slide it into the load. In other words, the glass button 3 is brought close to the horizontal posture, and the glass substrate 3 is placed 4 through the opposing space 9 and continuously moved toward the mounting position by the action of lowering the end portion of the elbow 21 side. 20 201008726 jauyjpu Generally, the position shown by the circle, qing, takes the glass substrate from the glass substrate 3 = Γ face positive: Γ start φ ❹ f (straight line movement). Thereby, the glass substrate 3 is separated from the lower surface === face 26 in an accurately positioned state. Further, in the state shown in Fig. 14, the supply unit (the illustration is omitted here) is moved to the lower side of the acquisition position 4. Here, as shown in Fig. 2, the gripping portion 23 approaches the upright posture from the horizontal posture: starting from the time of the square, the (four) 21 is rotated in the lower direction of the third joint m. As a result, in the same manner as in the first operation example, the system of Fig. 8 to Fig. 16 is repeated from the figure = counterclockwise. In this way, the board 3 is positioned from the acquisition position 4 toward the mounting table - (planting surface is broken = 23 201008726 31693pif action. In addition, the 'long substrate 3 is not stacked on the mounting surface %. If the mounting table 29 constitutes an appropriate transport sheet _ part At the same time, the glass substrate 3 can be transported one by one to the next work step.

Although the transfer operation of the transfer device 10 for transferring the glass substrate 3 has been described above, the present invention is based on the above-described operation example. As long as the acquisition position 4 is disposed opposite to the placement position and on the side of the opposing space 9 between the two: the multi-joint robot u for the transfer, the multi-joint robot u, the movement of the multi-joint robot u (4) The glass substrate 3 is transferred from the acquisition position 4 to the placement position through the opposing space 9, and the upper surface 3b of the glass substrate 3 is placed on the mounting surface 26 by the riding surface-partial wire In the above reversing operation, the configuration of the transfer device 1 can be used arbitrarily. Further, in the above description, the glass substrate 3 is mainly loaded on the treads and the pallets on the tray 5 are paid, but The transfer operation between the work steps is performed by transferring the workpiece + the glass substrate 3 to the other transfer step, and the glass substrate 3 is subjected to any step from the manufacture to the shipment, or The present invention is also applicable to the unloading step after the shipment, etc. Further, in the above description, the glass-based turtle j for the liquid crystal display is exemplified as the workpiece to be transferred, but the present invention is not limited to the liquid crystal SE. ^器用' generally available A glass plate for various flat panel displays such as a plasma display, an organic EL display, an FED, a 0 D, etc. (for example, a glass plate having a plate thickness of 4 mm or more and a thickness of 12 mm or less), or used to form various kinds of sub-displays A glass plate of a functional element or a substrate of a film is used as a transfer target.

❹ 201008726 J i〇5〇pu is a workpiece with a plate shape. In the present invention, it is also possible to use a glass as a material M as a transfer target. The present invention has been disclosed in the above embodiments, but it is not intended to limit the scope of the invention. Anyone having ordinary knowledge in the art can make some changes and refinements in the spirit and scope of the unknown. The scope of protection of this y shall be subject to the definition of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a packaging apparatus for a glass substrate according to an embodiment of the present invention. Figure 2 is a side elevational view of the transfer apparatus of the present invention. Fig. 3A is a view for explaining a transfer operation of a first operation example of the glass substrate, which is a side view of the transfer device immediately before the transfer. Fig. 4A is a side view for explaining a transfer operation of a first operation example of the glass substrate. Fig. 4 is a side view of the transfer device during the transfer operation. Fig. 5 is a view for explaining a transfer operation of a first operation example of the glass substrate. Fig. 5 is a side view of the transfer device during the transfer operation. Fig. 6 is a side view for explaining a transfer operation of a first operation example of the glass substrate, which is a transfer device before the next transfer operation. Fig. 7 is a side view for explaining a transfer operation of a first operation example of the glass substrate, which is a transfer device before shifting to the next transfer operation. Fig. 8 is a side view for explaining a transfer operation of a second operation example of the glass substrate, which is a transfer device immediately before the transfer. Fig. 9 is a side view for explaining a transfer operation of a second operation example of the glass substrate, which is a transfer device immediately after the start of transfer. 25 201008726

3i〇y^piI Fig. w is a view for explaining a transfer operation of a second operation example of the glass substrate. Fig. 4 is a side view of the transfer device during the transfer operation. Fig. U is a view for explaining a transfer operation of a second operation example of the glass substrate. Fig. U is a side view of the transfer device during the transfer operation. Fig. 12 is a view for explaining a transfer operation of a second operation example of the glass substrate. Fig. 12 is a side view of the transfer device during the transfer operation. Fig. 13 is a view for explaining a transfer operation of a second operation example of the glass substrate. Fig. 13 is a side view showing the transfer device during the transfer operation. Fig. 14 is a view for explaining a transfer operation of a second operation example of the glass substrate, which is a side view of the transfer device during the transfer operation. Fig. 15 is a view for explaining a transfer operation of a second operation example of the glass substrate, and is a side view of the transfer device before the transfer to the next transfer operation. Fig. 16 is a view for explaining a transfer operation of a second operation example of the glass substrate, and is a side view of the transfer device before the transfer to the next transfer operation. [Description of main component symbols] 1: Baggear equipment 2 for glass substrate: Transport unit 3 = Glass substrate® 3a: Lower surface 3b (on the transport side): Upper surface 4 (on the mounting side): Acquisition position 5: Pallet for the bag 6: transport path 7: recess 26 201008726 8 : aligning unit 9 : facing space 10 : glass substrate transfer device 11 : multi-joint robot 12 : pedestal 13 : - series movable arm 14 : control panel 15 : first link 16 : first joint 17 : second link 18 : second joint 19 : third link 20 : third joint 21 : toggle 22 : drive motor 23 : workpiece holding portion © 24 : suction pad 25 : storage unit 26: mounting surface 27: backing paper 28: sliding mechanism 29: mounting table 27

Claims (1)

201008726 31693pit VII. Patent application scope: The transfer device of the acquisition piece is the device of the slab-shaped workpiece of the slab-shaped workpiece, and the obtained plate-shaped workpiece is transferred to the device. The transfer device has a multi-joint robot, The robot maintains the upper surface of the above-mentioned acquisition position ===lower surface 'and the opposite surface of the lower surface is provided on the side of the lower surface of the robot and has a plurality of positions on the mounting surface. The _ movable arm 'and in the - series movable part, this plate: workpiece::== piece of, keep the phase 'and in the extension = off:? The occupant of the above-described series of movable arms has a position in which the acquisition position is transmitted through the portion of the phase Q feeding operation, and the movement is carried by the moving surface. The above-mentioned upper part of the workpiece, and the second part of the workpiece are sent to the special force::=2: The transfer of the set wheel is rotated. The flexion and extension movement comes = the level of the above-mentioned series of movable arms is as good as the "special garden" item (4) The above-mentioned multi-joint robots are all horizontal and parallel to each other. 4. For example, the transfer device of the sacred guards of the 4th syllabus (4) 1 Supplying the lower surface of the plate-shaped workpiece to the lower side of the plate-shaped workpiece to the upper take-up position, and then lifting the plate-shaped workpiece upward. 5 Gan, applying for the bribe-shaped article described in the second item In the transfer operation, the transfer operation includes an operation of moving the plate-shaped workpiece to the position described above, and then maintaining the facing posture to move the plate member toward the mounting surface. ^month The transfer of the plate-shaped workpiece according to the first item of the range is set to the transfer of the plate-shaped workpiece provided at each joint of the joint robot. The transfer of the plate-shaped one piece as described in item 6 of the patent specification (4) is as follows: The series of movable arms are reversely moved toward the top workpiece: the surface: swirls in the direction to cause the panel ❹ to operate; and the operation of maintaining the linear motion of the plate-shaped workpiece on the mounting surface toward the mounting surface. The uppermost r workpiece is subjected to air preparation, and the eight-vehicle plate-like one-phase shifting transmission is provided. 29 201008726 31693pit % Upright state can be described by the above-mentioned one-step slab, and the bottom end side is centered == rotation The above-mentioned multi-joint robot is disposed on the pedestal, and the above-described multi-joint robot is disposed on the pedestal, as described in the above-mentioned patent application. Above, above The f person can move horizontally with respect to the susceptor_the direction of the transfer to the plate-like workpiece = the direction of the parent. - a packing device for a plate-shaped workpiece, including: · For example, the scope of patent application! The apparatus according to the item 1 to item (1), wherein the conveying unit transports the one plate-shaped member to the acquisition position, and one or more pallets for the bag, and the loading position for stacking the plate In the state of the workpiece, the plate-shaped workpiece is wrapped, and the transfer unit is provided with the same number of the above-mentioned acquisition positions as the side of the facing space between the respective acquisition positions and the bag for the package. Configure the above multi-joint robot and use it In the above-described transfer operation of the multi-joint robot, the plate-shaped I member conveyed to the upper position by the transport unit is selectively loaded on the package tray. 12. A method for transferring a plate-like workpiece, which is a method of acquiring a plate-like workpiece at a position where a plate-like workpiece is taken, and transferring the obtained plate-like workpiece to a mounting position thereof, which causes an ankle joint person The scale is supplied to the lower surface of the supply side of the plate-shaped workpiece at the acquisition position, and the lower surface is placed on the mounting position of the mounting position at the top surface 30 201008726 ^ιο^ρπ : 'The above-mentioned multi-joint robot has a multi-closed' and is in front of the -_ movable arm. (4) Leak-proof ten-column movable-piece--* retaining portion' transfer of the plate-shaped workpiece = opposite direction ==== a convolution of the above-mentioned series of movable arms. The space is transferred to the position through the above-mentioned opposite direction placed on the above "load 31