[發明所欲解決之問題] 於專利文獻1所記載之搬送裝置中，自動裝載機具備例如自托盤向定位用治具固持並搬送液晶面板之搬送用機器人。於該搬送用機器人，一般預先教示收納於托盤之複數個液晶面板各者之固持位置。於該情形時，若收納於托盤之液晶面板之大小或托盤內之液晶面板之收納位置等不發生變化，若將收納於托盤之複數個液晶面板各者之固持位置1次教示於機器人，則可自托盤向定位用治具固持並搬送液晶面板。 然而，若組裝線中組裝之液晶顯示裝置之種類變化，則收納於托盤之液晶面板之大小變化，或托盤內之液晶面板之收納位置變化，而會引起機器人之托盤內之液晶面板之固持位置變化。於該情形時，於組裝線中組裝之液晶顯示裝置之種類變化時，若不將托盤內之液晶面板之固持位置教示於機器人，則可能產生機器人無法於托盤內適當地固持液晶面板，而無法自托盤向定位用治具搬送液晶面板之事態。 因此，於組裝線中組裝之液晶顯示裝置之種類變化時必須將托盤內之液晶面板之固持位置教示於機器人，而於組裝線中組裝之液晶顯示裝置之種類變化時所產生之產線切換作業(產線切換)耗費時間。尤其於組裝線組入有多個搬送裝置之情形時，產線切換需大量時間。 因此，本發明之課題在於提供一種於進行供給至特定處理裝置之顯示面板之搬送或自特定處理裝置排出之顯示面板之搬送之搬送系統中，可縮短搬送之顯示面板之種類變化時之產線切換之時間的搬送系統。 [解決問題之技術手段] 為了解決上述課題，本發明之搬送系統之特徵在於，其係進行向特定處理裝置供給之顯示面板之搬送及自特定處理裝置排出之顯示面板之搬送之至少任一者的搬送系統；且具備：托盤載台，其載置可收納顯示面板之托盤；及機器人，其進行自載置於托盤載台之托盤搬出顯示面板及向載置於托盤載台之托盤搬入顯示面板之至少任一者；且基於根據顯示面板之種類而設定之製程配方進行顯示面板之搬送，於製程配方中含有顯示面板在托盤中之收納位置之資訊即面板位置資訊、及顯示面板之大小之資訊即面板尺寸資訊。 本發明之搬送系統基於根據顯示面板之種類而設定之製程配方進行顯示面板之搬送，且於製程配方中含有顯示面板在托盤中之收納位置之資訊即面板位置資訊、及顯示面板之大小之資訊即面板尺寸資訊。因此，於本發明中，例如於搬送系統啟動時，若進行用以進行托盤載台側之座標系與機器人側之座標系之對應的機器人之教示作業，則即便於隨後存在產線切換而機器人之托盤內之顯示面板之固持位置或固持放開位置變化時不進行機器人之教示作業，亦可基於包含於製程配方之面板位置資訊與面板尺寸資訊，使機器人適當地固持並搬出收納於托盤之顯示面板，或使由機器人固持並搬入之顯示面板於托盤內之適當位置放開而將其收納於托盤內之適當位置。 即，於本發明中，可省去以搬送系統搬送之顯示面板之種類變化時之機器人之教示作業。因此，於本發明中，可縮短以搬送系統搬送之顯示面板之種類變化時之產線切換的時間。 於本發明中，搬送系統具備例如讀取記錄於顯示面板之資料之資料讀取裝置，且於製程配方中含有資料於顯示面板中之記錄位置之資訊即資料位置資訊。於該情形時，即便資料之記錄位置根據以搬送系統搬送之顯示面板之種類變化，且例如機器人之托盤內之顯示面板之固持位置或固持放開位置根據資料之記錄位置變化，或固持托盤內之顯示面板時之機器人之姿勢或於托盤內放開固持之顯示面板時之機器人之姿勢根據資料之記錄位置變化，亦可不於產線切換時進行機器人之教示作業，而基於包含於製程配方之資料位置資訊，使機器人適當地固持並搬出收納於托盤之顯示面板，或使由機器人固持並搬入之顯示面板於托盤內之適當位置放開而將其收納於托盤內之適當位置。 於本發明中，較佳為托盤之大小無關收納於托盤之顯示面板之種類而為固定。若如此構成，則即便托盤之尺寸資訊不包含於製程配方，亦可基於包含於製程配方之面板位置資訊與面板尺寸資訊，使機器人適當地固持並搬出收納於托盤之顯示面板，或使由機器人固持並搬入之顯示面板於托盤內之適當位置放開而將其收納於托盤內之適當位置。因此，可簡化製程配方。 [發明之效果] 如以上般，於本發明中，於進行供給至特定處理裝置之顯示面板之搬送或自特定處理裝置排出之顯示面板之搬送之搬送系統中，可縮短搬送之顯示面板之種類變化時之產線切換的時間。[Problem to be Solved by the Invention] In the transport device described in Patent Document 1, the automatic loader includes, for example, a transport robot that holds and transports the liquid crystal panel from a tray to a positioning jig. In the transfer robot, the holding position of each of the plurality of liquid crystal panels stored in the tray is generally taught in advance. In this case, if the size of the liquid crystal panel stored in the tray or the storage position of the liquid crystal panel in the tray does not change, if the holding position of each of the plurality of liquid crystal panels stored in the tray is taught to the robot once, then The LCD panel can be held and transported from the tray to the positioning jig. However, if the type of liquid crystal display device assembled in the assembly line changes, the size of the liquid crystal panel stored in the tray changes, or the storage position of the liquid crystal panel in the tray changes, which will cause the holding position of the liquid crystal panel in the tray of the robot Variety. In this case, when the type of liquid crystal display device assembled in the assembly line changes, if the holding position of the liquid crystal panel in the tray is not taught to the robot, the robot may not be able to properly hold the liquid crystal panel in the tray. The situation in which the LCD panel is transported from the tray to the positioning jig. Therefore, when the type of liquid crystal display device assembled in the assembly line changes, the holding position of the liquid crystal panel in the tray must be taught to the robot, and the production line switching operation generated when the type of liquid crystal display device assembled in the assembly line changes (Production line switching) takes time. Especially when there are multiple conveying devices in the assembly line, it takes a lot of time to switch the production line. Therefore, the subject of the present invention is to provide a conveying system for conveying the display panel supplied to a specific processing device or conveying the display panel discharged from the specific processing device, which can shorten the production line when the type of the conveyed display panel changes. The transfer system of the switching time. [Technical Means to Solve the Problem] In order to solve the above-mentioned problems, the transport system of the present invention is characterized in that it performs at least any of the transport of the display panel supplied to the specific processing device and the transport of the display panel discharged from the specific processing device The conveying system; and equipped with: a pallet stage, which holds a tray that can store the display panel; and a robot, which carries out the display panel from the tray that is placed on the pallet stage and carries in the display to the pallet placed on the pallet stage At least any one of the panel; and the display panel is transported based on the process recipe set according to the type of the display panel. The process recipe contains the information of the storage position of the display panel in the tray, namely the panel position information, and the size of the display panel The information is the panel size information. The conveying system of the present invention conveys the display panel based on the process recipe set according to the type of the display panel, and the process recipe contains the information of the storage position of the display panel in the tray, that is, the panel position information, and the size of the display panel. Namely panel size information. Therefore, in the present invention, for example, when the conveying system is activated, if the robot is taught to perform the corresponding coordinate system on the pallet stage side and the coordinate system on the robot side, even if the production line is switched and the robot is subsequently switched When the holding position or holding release position of the display panel in the pallet is changed, the robot will not be taught. It can also be based on the panel position information and panel size information contained in the process recipe, so that the robot can be properly held and moved out of the tray. The display panel, or the display panel held by the robot and moved in, is released in the proper position in the tray and stored in the proper position in the tray. That is, in the present invention, the teaching operation of the robot when the type of the display panel conveyed by the conveying system changes is eliminated. Therefore, in the present invention, the production line switching time when the type of the display panel conveyed by the conveying system is changed can be shortened. In the present invention, the transport system is provided with a data reading device for reading data recorded on the display panel, and the process recipe contains information on the recording location of the data on the display panel, that is, data location information. In this case, even if the recording position of the data changes according to the type of display panel conveyed by the conveying system, and for example, the holding position or holding release position of the display panel in the robot tray changes according to the recording position of the data, or the holding tray The posture of the robot when the display panel is displayed or the posture of the robot when the fixed display panel is released in the tray changes according to the recorded position of the data. It is also possible not to perform the teaching operation of the robot when the production line is switched, but based on the included in the process recipe The data location information enables the robot to properly hold and remove the display panel stored in the tray, or the display panel held and carried in by the robot is released in the appropriate position in the tray and stored in the appropriate position in the tray. In the present invention, it is preferable that the size of the tray is fixed regardless of the type of display panel stored in the tray. If configured in this way, even if the size information of the tray is not included in the process recipe, the robot can appropriately hold and remove the display panel stored in the tray based on the panel position information and panel size information included in the process recipe, or the robot can The display panel that is held and carried in is released at an appropriate position in the tray and stored in an appropriate position in the tray. Therefore, the process recipe can be simplified. [Effects of the Invention] As described above, in the present invention, in the conveying system for conveying the display panel supplied to a specific processing device or conveying the display panel discharged from the specific processing device, the types of display panels to be conveyed can be shortened The time of production line switching at the time of change.
以下，一面參照圖式，一面說明本發明之實施形態。 (搬送系統之構成) 圖1係本發明實施形態之搬送系統1之側視圖。圖2係自圖1之E-E方向顯示搬送系統1之俯視圖。圖3係用以說明於圖2所示之托盤3收納有液晶面板2之狀態之俯視圖。圖4係圖1所示之機器人9之立體圖。 本形態之搬送系統1組入於可攜式機器等所使用之液晶顯示器之製造線而加以使用。該搬送系統1搬送顯示面板即液晶面板2，並將液晶面板2供給至對液晶面板2進行特定處理之處理裝置15(參照圖2)。即，該搬送系統1搬送供給至處理裝置15之液晶面板2。於搬送系統1中可實現複數種液晶面板2之搬送。例如，於搬送系統1中可實現4～15吋中之複數種小型或中型液晶面板2之搬送。 搬送系統1具備搬送可收納液晶面板2之托盤3之2個輸送機4、5。輸送機4、5將堆疊成複數層之托盤3(即，層疊之托盤3)向水平方向直線搬送。例如，輸送機4、5將層疊成20層之托盤3向水平方向直線搬送。又，搬送系統1具備：2個托盤載台6、7，其等載置托盤3；機器人8，其於輸送機4、5與托盤載台6、7之間搬送托盤3；機器人9，其自載置於托盤載台6、7之托盤3搬出液晶面板2；及供給單元10，其自機器人9接收液晶面板2並供給至處理裝置15。 於以下之說明中，將輸送機4、5之搬送托盤3之方向(圖1等之X方向)設為「前後方向」，將與上下方向(鉛直方向)及前後方向正交之方向(圖1等之Y方向)設為「左右方向」。又，將前後方向之一側(圖1等之X1方向側)設為「前」側，將其相反側(圖1等之X2方向側)設為「後(後方)側」，將左右方向之一側(圖2等之Y1方向側)設為「右」側，將其相反側(圖2等之Y2方向側)設為「左」側。於本形態中，於搬送系統1之後側配置有處理裝置15。又，托盤載台6、7配置於較輸送機4、5更後側，且供給單元10配置於較托盤載台6、7更後側。 又，搬送系統1具備設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10之本體框架11、及設置有機器人9之本體框架12。本體框架11之上表面形成為與上下方向正交之平面狀，且於本體框架11之上表面設置有輸送機4、5、托盤載台6、7、機器人8及供給單元10。本體框架12為形成為大致門型之門型框架，且以於左右方向跨越本體框架11之後端側部分之方式設置。機器人9設置於本體框架12之上表面部。 液晶面板2形成為長方形之平板狀。托盤3亦形成為長方形之平板狀。於托盤3，可收納液晶面板2，且於托盤3之上表面形成有收納液晶面板2之收納凹部。托盤3之大小係無關收納於托盤3之液晶面板2之大小而為固定。收納於托盤3之液晶面板2之片數會根據液晶面板2之種類而變化。例如，於托盤3根據液晶面板2之大小而如圖3(A)所示收納有2片液晶面板2，或如圖3(B)所示收納有4片液晶面板2，或如圖3(C)所示收納有8片液晶面板2。因此，收納於托盤3之液晶面板2之收納位置會根據液晶面板2之種類而變化。另，於圖2中，省略收納於托盤3之液晶面板2之圖示。 於液晶面板2之超出顯示區域之部位，記錄有液晶面板2之檢查資料等資料。具體而言，於液晶面板2之超出顯示區域之部位，將檢查資料等資料記錄為二維碼或一維碼等編碼2a(參照圖3(A))。即，於液晶面板2之超出顯示區域之部位，記錄有可光學讀取之資料。液晶面板2之資料之記錄位置(即編碼2a之位置)會根據液晶面板2之種類而變化。例如，編碼2a之位置根據液晶面板2之種類而位於圖3(A)之實線所示之位置，或位於圖3(A)之虛線所示之位置。另，於圖3(B)、(C)中省略編碼2a之圖示。 輸送機4、5為具備複數個滾筒之滾筒輸送機。輸送機4與輸送機5於左右方向相鄰配置。輸送機4將層疊之托盤3向後側搬送，輸送機5將層疊之托盤3向前側搬送。於以輸送機4搬送之托盤3收納有液晶面板2。另一方面，於以輸送機5搬送之托盤3未收納液晶面板2，故以輸送機5搬送之托盤3為空托盤。另，輸送機4、5亦可為帶式輸送機等。 於輸送機4之前端側，載置由作業者自臨時放置用之架子(省略圖示)搬運來之層疊狀態之托盤3。將載置於輸送機4之前端側之層疊狀態之托盤3朝後側搬送，搬送至輸送機4之後端側之層疊狀態之托盤3如後述般由機器人8予以拆疊。又，於輸送機5之後端側，如後述般由機器人8層疊空托盤3。若將托盤3層疊至特定層數，則將層疊狀態之托盤3朝前側搬送。搬送至輸送機5之前端側之層疊狀態之托盤3由作業者搬運至空托盤用之架子。 於托盤載台6、7載置1個托盤3。托盤載台6、7固定於本體框架11。托盤載台6與托盤載台7以於左右方向上隔出特定間隔之狀態配置。托盤載台6、7之上表面形成為與上下方向正交之平面狀。於托盤載台6、7，以形成為長方形之平板狀之托盤3之長邊之方向與前後方向一致之方式載置托盤3。 機器人8為所謂之3軸正交機器人。該機器人8具備：本體框架20，其形成為門型；可動框架21，其以可相對於本體框架20向左右方向滑動之方式被保持於本體框架20；可動框架22，其以可相對於可動框架21向前後方向滑動之方式被保持於可動框架21；可動框架23，其以可相對於可動框架22向上下方向滑動之方式被保持於可動框架22；及托盤固持部24，其安裝於可動框架23。又，機器人8具備使可動框架21向左右方向滑動之驅動機構、使可動框架22向前後方向滑動之驅動機構、及使可動框架23向上下方向滑動之驅動機構。 本體框架20以於左右方向跨越輸送機4、5之方式設置。可動框架21安裝於本體框架20之上表面側。可動框架22安裝於可動框架21之右側。可動框架23安裝於可動框架22之後端側。托盤固持部24安裝於可動框架23之下端。該托盤固持部24具備吸附托盤3之複數個吸附部。該吸附部於機器人8搬送托盤3時與托盤3之上表面接觸並真空吸附托盤3。 機器人8進行自輸送機4向托盤載台6、7之托盤3之搬送、及自托盤載台6、7向輸送機5之托盤3之搬送。具體而言，機器人8將搬送至輸送機4之後端側之層疊狀態之托盤3逐個搬送至托盤載台6或托盤載台7，並將輸送機4上之層疊狀態之托盤3拆疊。又，機器人8將變空之1個托盤3自托盤載台6或托盤載台7搬送至輸送機5之後端側，並將托盤3層疊於輸送機5。 機器人9係所謂之並聯機器人。該機器人9具備：本體部25；3條連桿26，其等連結於本體部25；3個臂部27，其等連結於3條連桿26各者；頭單元28，其連結於3個臂部27；及面板固持部29，其安裝於頭單元28。本體部25以懸垂於本體框架12之上表面部之方式設置。又，本體部25配置於托盤載台6、7之上方，且配置於較機器人8之本體框架20更後側。 3條連桿26以向本體部25之外周側以大致等角度間距大致放射狀地延伸之方式連結於本體部25。即，3條連桿26以向本體部25之外周側以大致120°間距大致放射狀地延伸之方式連結於本體部25。又，3條連桿26之基端側可旋動地連結於本體部25。於本體部25與連桿26之連結部，配置有使連桿26旋動之附減速機之馬達30。本形態之機器人9具備使3條連桿26各者旋動之3個馬達30。馬達30之輸出軸固定於連桿26之基端側。 臂部27之基端側可旋動地連結於連桿26之末端側。具體而言，臂部27具備相互平行之直線狀之2條臂32，且2條臂32各者之基端側可旋動地連結於連桿26之末端側。頭單元28可旋動地連結於3個臂部27之末端側。即，頭單元28可旋動地連結於6條臂32之末端側。於機器人9中，可藉由個別地驅動3個馬達30，而於特定之區域內使頭單元28朝上下方向、左右方向及前後方向之任意位置、且以頭單元28保持一定之姿勢之狀態(具體而言係以保持面板固持部29朝向下側之狀態)移動。 面板固持部29安裝於頭單元28之下端。該面板固持部29具備真空吸附液晶面板2之複數個吸附部，且藉由該吸附部吸附液晶面板2之上表面而固持液晶面板2。又，於頭單元28之上端安裝有馬達33。面板固持部29連結於馬達33，且可藉由馬達33之動力而進行以上下方向為旋動之軸向之旋動。 機器人9自載置於托盤載台6之托盤3或載置於托盤載台7之托盤3逐片搬出液晶面板2。具體而言，機器人9自托盤3逐片搬出液晶面板2直至載置於托盤載台6、7之托盤3變空為止。又，機器人9將自托盤3搬出之液晶面板2向後述之面板載台38搬送。 供給單元10具備讀取記錄於液晶面板2之資料之資料讀取裝置36。資料讀取裝置36具備讀取編碼2a之相機。又，供給單元10具備於以資料讀取裝置36讀取液晶面板2之資料之前進行液晶面板2之對位的對準裝置37。對準裝置37具備載置液晶面板2之面板載台38，於面板載台38載置由機器人9自托盤載台6、7上之托盤3搬出之液晶面板2。 又，供給單元10具備：機器人39，其將以資料讀取裝置36讀取資料後之液晶面板2向處理裝置15搬送；電離器(靜電去除裝置)40，其自向處理裝置15搬送之液晶面板2去除靜電；搬送裝置41，其將以對準裝置37對位後之液晶面板2向機器人39搬送；及機器人42，其將經對準裝置37對位之液晶面板2搬送至搬送裝置41。 於供給單元10中，若以對準裝置37將液晶面板2對位，則機器人42將液晶面板2搬送至搬送裝置41。搬送裝置41朝機器人39搬送液晶面板2。又，搬送裝置41於朝機器人39搬送液晶面板2時，為了藉由資料讀取裝置36讀取液晶面板2之資料而一次停止。電離器40配置於搬送裝置41之上方，且去除由搬送裝置41搬送之液晶面板2之靜電。 如以上般構成之搬送系統1經由網路連接於中繼電腦(CIM-PC：Computer Integrated Manufacturing-Personal Computer：電腦整合製造-個人電腦)，該中繼電腦經由網路連接於主機電腦。又，搬送系統1基於根據液晶面板2之種類設定之製程配方而進行液晶面板2之搬送。 於製程配方包含有托盤3中之液晶面板2之收納位置之資訊即面板位置資訊、液晶面板2之大小之資訊即面板尺寸資訊、及液晶面板2之資料之記錄位置(即編碼2a之位置)之資訊即資料位置資訊。於面板位置資訊包含有收納於托盤3之各液晶面板2之水平方向之座標(X座標及Y座標)。於面板尺寸資訊包含有液晶面板2之長邊方向之尺寸、短邊方向之尺寸及厚度。於資料位置資訊包含有編碼2a之水平方向之座標(X座標及Y座標)。又，於製程配方包含有托盤3之大小之資訊即托盤尺寸資訊。 另，於主機電腦連接有複數個搬送系統1，且當修正包含於製程配方之面板位置資訊、面板尺寸資訊及資料位置資訊等時，該等資訊之修正結果被反映至複數個搬送系統1。 (機器人之控制方法) 若將基於設定於托盤載台6、7側之基準點之座標系設為第1座標系，將基於設定於機器人9側之基準點之座標系(機器人座標系)設為第2座標系，則第1座標系與第2座標系藉由將托盤載台6、7側之特定部位教示於面板固持部29而預先建立對應。該機器人9之教示作業例如於搬送系統1啟動時進行。又，包含於面板位置資訊之托盤3內之各液晶面板2之X座標、Y座標、及包含於資料位置資訊之編碼2a之X座標、Y座標係使用第1座標系顯示之座標。另，於本形態中，個別地設定托盤載台6側之第1座標系與托盤載台7側之第1座標系，並將托盤載台6側之第1座標系與第2座標系預先建立對應，且將托盤載台7側之第1座標系與第2座標系預先建立對應。 又，若將面板固持部29固持收納於托盤載台6、7上之托盤3之液晶面板2之位置設為面板固持部29之目標到達位置，將使用第1座標系顯示之面板固持部29之目標到達位置之座標設為第1座標，將使用第2座標系顯示之面板固持部29之目標到達位置之座標設為第2座標，則於面板固持部29動作時，基於包含於製程配方之資訊，將第1座標輸入於控制機器人9之控制部45(參照圖4)。控制部45將輸入之第1座標轉換為第2座標，並基於第2座標使面板固持部29移動至面板固持部29之目標到達位置。移動至目標到達位置之面板固持部29固持液晶面板2並搬送至面板載台38。 (本形態之主要效果) 如以上說明般，於本形態中，搬送系統1基於根據液晶面板2之種類設定之製程配方進行液晶面板2之搬送，於製程配方包含有面板位置資訊與面板尺寸資訊。包含於面板位置資訊之托盤3內之各液晶面板2之X座標及Y座標係使用第1座標系顯示之座標，但於本形態中，藉由將托盤載台6、7側之特定部位教示於面板固持部29而將第1座標系與第2座標系預先建立對應，且於面板固持部29動作時，控制部45將基於包含於製程配方之資訊輸入之第1座標轉換為第2座標，並基於第2座標使面板固持部29移動至面板固持部29之目標到達位置。 因此，於本形態中，若進行用以進行第1座標系與第2座標系之對應的機器人9之教示作業，則即便隨後存在變更以搬送系統1搬送之液晶面板2之種類之產線切換而面板固持部29之托盤3內之液晶面板2之固持位置變化時不進行機器人9之教示作業，亦可基於包含於製程配方之面板位置資訊與面板尺寸資訊使面板固持部29適當地固持並搬出收納於托盤3之液晶面板2。即，於本形態中，可不需要以搬送系統1搬送之液晶面板2之種類變化時之機器人9之教示作業。因此，於本形態中，可縮短以搬送系統1搬送之液晶面板2之種類變化時之產線切換的時間。 又，於本形態中，由於製程配方包含有資料位置資訊，故即便面板固持部29之托盤3內之液晶面板2之固持位置根據資料之記錄位置變化、或固持托盤3內之液晶面板2時之機器人9之姿勢根據資料之記錄位置變化，亦可不於產線切換時進行機器人9之教示作業，而基於包含於製程配方之資料位置資訊使面板固持部29固持並搬出收納於托盤3之液晶面板2。 (其他實施形態) 上述形態係本發明之較佳形態之一例，但並非限定於此，於不變更本發明主旨之範圍內可實施各種變化。 於上述形態中，機器人9組入於搬送供給至處理裝置15之液晶面板2之搬送系統1，但機器人9亦可組入於搬送自處理裝置15排出之液晶面板2之搬送系統。於該情形時，機器人9進行向載置於托盤載台6、7之托盤3之液晶面板2之搬入。又，於該情形時，為了將面板固持部29所固持之液晶面板2收納於托盤載台6、7上之托盤3，面板固持部29放開液晶面板2之位置成為面板固持部29之目標到達位置。 於該情形時，亦可於存在產線切換而面板固持部29之托盤3內之液晶面板2之固持放開位置變化時不進行機器人9之教示作業，而基於製程配方使由面板固持部29固持並搬入之液晶面板2於托盤3內之適當位置放開而將其收納於托盤3內之適當位置。即，可不需要以搬送系統1搬送之液晶面板2之種類變化時之機器人9之教示作業，其結果，可縮短以搬送系統1搬送之液晶面板2之種類變化時之產線切換的時間。 又，機器人9亦可組入於搬送供給至處理裝置15之液晶面板2且搬送自處理裝置15排出之液晶面板2之搬送系統。於該情形時，機器人9進行自載置於托盤載台6、7之托盤3之液晶面板2之搬出、及向載置於托盤載台6、7之托盤3之液晶面板2之搬入。又，於該情形時，面板固持部29固持收納於托盤載台6、7上之托盤3之液晶面板2之位置、或為了將面板固持部29所固持之液晶面板2收納於托盤載台6、7上之托盤3而面板固持部29放開液晶面板2之位置成為面板固持部29之目標到達位置。 於上述形態中，於製程配方包含有托盤尺寸資訊，但由於托盤3之大小無關收納於托盤3之液晶面板2之種類而為固定，故托盤尺寸資訊亦可不包含於製程配方。於該情形時，亦可基於包含於製程配方之面板位置資訊與面板尺寸資訊使面板固持部29適當地固持並搬出收納於托盤3之液晶面板2。又，於該情形時，可簡化製程配方。 於上述形態中，於製程配方包含有資料位置資訊，但若面板固持部29之托盤3內之液晶面板2之固持位置未根據資料之記錄位置變化、或固持托盤3內之液晶面板2時之機器人9之姿勢未根據資料之記錄位置變化，則資料位置資訊亦可不包含於製程配方。又，於上述形態中，托盤3之大小無關收納於托盤3之液晶面板2之種類而為固定，但托盤3之大小亦可根據收納於托盤3之液晶面板2之種類而變化。於該情形時，為了能使面板固持部29適當地固持並搬出收納於托盤3之液晶面板2，可將載置於托盤載台6、7之托盤3之位置之資訊即托盤位置資訊包含於製程配方。 於上述形態中，於托盤載台6、7載置有1個托盤3，但亦可將複數個托盤3以相互不重疊之方式載置於托盤載台6、7。又，於上述形態中，機器人9係並聯機器人，但機器人9亦可為水平多關節機器人。又，於上述形態中，以搬送系統1搬送之顯示面板係液晶面板2，但以搬送系統1搬送之顯示面板亦可為液晶面板2以外之顯示面板。例如，以搬送系統1搬送之顯示面板亦可為有機EL(Electro Luminescence：電致發光)面板。Hereinafter, the embodiments of the present invention will be described with reference to the drawings. (Configuration of transport system) Fig. 1 is a side view of the transport system 1 according to the embodiment of the present invention. Fig. 2 is a top view showing the conveying system 1 from the E-E direction of Fig. 1. FIG. 3 is a plan view for explaining the state in which the liquid crystal panel 2 is stored in the tray 3 shown in FIG. 2. Fig. 4 is a perspective view of the robot 9 shown in Fig. 1. The conveying system 1 of this form is integrated and used in the manufacturing line of liquid crystal displays used in portable machines and the like. This conveyance system 1 conveys the liquid crystal panel 2 which is a display panel, and supplies the liquid crystal panel 2 to the processing apparatus 15 which performs a specific process on the liquid crystal panel 2 (refer FIG. 2). That is, the transport system 1 transports the liquid crystal panel 2 supplied to the processing device 15. The conveying system 1 can realize the conveying of a plurality of liquid crystal panels 2. For example, the transportation system 1 can realize the transportation of a plurality of small or medium-sized liquid crystal panels 2 in the range of 4 to 15 inches. The conveying system 1 is provided with two conveyors 4 and 5 for conveying a tray 3 capable of accommodating the liquid crystal panel 2. The conveyors 4 and 5 linearly convey the stacked trays 3 (ie, the stacked trays 3) in the horizontal direction. For example, the conveyors 4 and 5 linearly convey the tray 3 stacked in 20 layers in the horizontal direction. In addition, the conveying system 1 is provided with: two tray stages 6, 7 for placing the tray 3; a robot 8 for conveying the pallet 3 between the conveyors 4, 5 and the tray stage 6, 7; and a robot 9, which The liquid crystal panel 2 is carried out from the tray 3 placed on the tray stages 6 and 7; and the supply unit 10 that receives the liquid crystal panel 2 from the robot 9 and supplies it to the processing device 15. In the following description, the direction of the conveying tray 3 of the conveyors 4 and 5 (the X direction in Fig. 1 etc.) is set as the "front and rear direction", and the direction orthogonal to the vertical direction (vertical direction) and the front and rear direction (Fig. 1st grade Y direction) is set to "left and right direction". Also, let one side of the front-rear direction (X1 direction side in Fig. 1 etc.) be the "front" side, and set the opposite side (X2 direction side in Fig. 1, etc.) to the "rear (rear) side", and set the left and right direction One side (the side in the Y1 direction in Fig. 2 etc.) is referred to as the "right" side, and the opposite side (the side in the Y2 direction in Fig. 2 etc.) is referred to as the "left" side. In this aspect, the processing device 15 is arranged on the rear side of the conveying system 1. In addition, the tray stages 6 and 7 are arranged on the rear side of the conveyors 4 and 5, and the supply unit 10 is arranged on the rear side of the tray stages 6 and 7. In addition, the conveying system 1 includes a main body frame 11 provided with conveyors 4 and 5, tray stages 6, 7, a robot 8 and a supply unit 10, and a main body frame 12 provided with a robot 9. The upper surface of the main body frame 11 is formed in a plane shape orthogonal to the vertical direction, and the upper surface of the main body frame 11 is provided with conveyors 4, 5, tray stages 6, 7, robot 8 and supply unit 10. The main body frame 12 is a gate-shaped frame formed into a substantially gate-shaped frame, and is provided so as to straddle the rear end portion of the main body frame 11 in the left-right direction. The robot 9 is installed on the upper surface of the main body frame 12. The liquid crystal panel 2 is formed in a rectangular flat plate shape. The tray 3 is also formed in a rectangular flat plate shape. In the tray 3, the liquid crystal panel 2 can be stored, and a storage recess for storing the liquid crystal panel 2 is formed on the upper surface of the tray 3. The size of the tray 3 is fixed regardless of the size of the liquid crystal panel 2 stored in the tray 3. The number of liquid crystal panels 2 stored in the tray 3 varies according to the type of liquid crystal panel 2. For example, according to the size of the liquid crystal panel 2 in the tray 3, two liquid crystal panels 2 are stored as shown in FIG. 3(A), or four liquid crystal panels 2 are stored as shown in FIG. 3(B), or as shown in FIG. 3( As shown in C), 8 liquid crystal panels 2 are housed. Therefore, the storage position of the liquid crystal panel 2 stored in the tray 3 changes according to the type of the liquid crystal panel 2. In addition, in FIG. 2, the illustration of the liquid crystal panel 2 stored in the tray 3 is omitted. In the part of the liquid crystal panel 2 beyond the display area, data such as inspection data of the liquid crystal panel 2 are recorded. Specifically, at a portion of the liquid crystal panel 2 beyond the display area, data such as inspection data are recorded as a code 2a such as a two-dimensional code or a one-dimensional code (refer to FIG. 3(A)). That is, in the portion of the liquid crystal panel 2 beyond the display area, data that can be optically read is recorded. The recording position of the data of the liquid crystal panel 2 (ie, the position of the code 2a) will vary according to the type of the liquid crystal panel 2. For example, the position of the code 2a is located at the position shown by the solid line in FIG. 3(A) or at the position shown by the broken line in FIG. 3(A) according to the type of the liquid crystal panel 2. In addition, the illustration of the code 2a is omitted in FIGS. 3(B) and (C). The conveyors 4 and 5 are roller conveyors equipped with a plurality of rollers. The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. The conveyor 4 transports the stacked pallets 3 to the rear side, and the conveyor 5 transports the stacked pallets 3 to the front side. The liquid crystal panel 2 is stored in the tray 3 conveyed by the conveyor 4. On the other hand, the tray 3 conveyed by the conveyor 5 does not contain the liquid crystal panel 2, so the tray 3 conveyed by the conveyor 5 is an empty tray. In addition, the conveyors 4 and 5 may also be belt conveyors and the like. On the front end side of the conveyor 4, the pallet 3 in a stacked state transported by the operator from a shelf (not shown) for temporary placement is placed. The stacked tray 3 placed on the front end of the conveyor 4 is transported to the rear, and the stacked tray 3 transported to the rear of the conveyor 4 is unstacked by the robot 8 as described later. In addition, on the rear end side of the conveyor 5, the empty pallets 3 are stacked by the robot 8 as described later. If the tray 3 is stacked to a specific number of layers, the tray 3 in the stacked state is transported to the front side. The stacked pallets 3 conveyed to the front end of the conveyor 5 are conveyed by the operator to a shelf for empty pallets. One tray 3 is placed on the tray stages 6 and 7. The tray stages 6 and 7 are fixed to the main body frame 11. The tray stage 6 and the tray stage 7 are arranged with a certain interval in the left-right direction. The upper surfaces of the tray stages 6, 7 are formed in a planar shape orthogonal to the up-down direction. The tray 3 is placed on the tray platforms 6 and 7 such that the direction of the long side of the tray 3 formed into a rectangular flat plate is consistent with the front-to-rear direction. The robot 8 is a so-called 3-axis orthogonal robot. The robot 8 includes: a main body frame 20 formed in a door shape; a movable frame 21 that is held by the main body frame 20 so as to be slidable in the left-right direction relative to the main body frame 20; and a movable frame 22 that is movable relative to The frame 21 is held by the movable frame 21 so as to slide forward and backward; the movable frame 23 is held by the movable frame 22 so as to be slidable in the up and down directions relative to the movable frame 22; and the tray holding portion 24 is mounted on the movable frame Frame 23. In addition, the robot 8 includes a drive mechanism that slides the movable frame 21 in the left and right directions, a drive mechanism that slides the movable frame 22 in the forward and backward directions, and a drive mechanism that slides the movable frame 23 in the up and down directions. The main body frame 20 is installed so as to straddle the conveyors 4 and 5 in the left-right direction. The movable frame 21 is installed on the upper surface side of the main body frame 20. The movable frame 22 is installed on the right side of the movable frame 21. The movable frame 23 is attached to the rear end side of the movable frame 22. The tray holding portion 24 is installed at the lower end of the movable frame 23. The tray holding part 24 is provided with a plurality of suction parts for sucking the tray 3. When the robot 8 transports the tray 3, the suction part contacts the upper surface of the tray 3 and vacuum suctions the tray 3. The robot 8 transports the pallets 3 from the conveyor 4 to the pallet stages 6 and 7 and conveys the pallets 3 from the pallet stages 6 and 7 to the conveyor 5. Specifically, the robot 8 transports the stacked pallets 3 on the rear end side of the conveyor 4 to the pallet stage 6 or the pallet stage 7 one by one, and unstacks the stacked pallets 3 on the conveyor 4. In addition, the robot 8 transports the empty tray 3 from the tray stage 6 or the tray stage 7 to the rear end side of the conveyor 5, and stacks the tray 3 on the conveyor 5. The robot 9 is a so-called parallel robot. The robot 9 includes: a main body 25; three links 26 connected to the main body 25; three arm parts 27 connected to each of the three links 26; and a head unit 28 connected to three Arm 27; and panel holding portion 29, which is mounted on the head unit 28. The main body portion 25 is provided in a manner of hanging over the upper surface portion of the main body frame 12. In addition, the main body portion 25 is arranged above the tray stages 6 and 7 and is arranged on the rear side of the main body frame 20 of the robot 8. The three links 26 are connected to the main body portion 25 so as to extend substantially radially at substantially equal angular intervals to the outer peripheral side of the main body portion 25. That is, the three links 26 are connected to the main body portion 25 so as to extend substantially radially at a pitch of approximately 120° to the outer peripheral side of the main body portion 25. In addition, the base ends of the three links 26 are rotatably connected to the main body 25. A motor 30 with a speed reducer for rotating the connecting rod 26 is arranged at the connection part between the main body part 25 and the connecting rod 26. The robot 9 of this form includes three motors 30 that rotate each of the three links 26. The output shaft of the motor 30 is fixed to the base end side of the connecting rod 26. The base end side of the arm 27 is rotatably connected to the distal end side of the link 26. Specifically, the arm portion 27 includes two linear arms 32 parallel to each other, and the base end side of each of the two arms 32 is rotatably connected to the distal end side of the link 26. The head unit 28 is rotatably connected to the end sides of the three arm parts 27. That is, the head unit 28 is rotatably connected to the end side of the six arms 32. In the robot 9, by individually driving the three motors 30, the head unit 28 can be moved to any position in the up-down direction, the left-right direction and the front-rear direction in a specific area, and the head unit 28 can maintain a certain posture. (Specifically, it moves in a state where the panel holding portion 29 is kept facing the lower side). The panel holding portion 29 is installed at the lower end of the head unit 28. The panel holding portion 29 includes a plurality of suction portions for vacuum suction of the liquid crystal panel 2, and the upper surface of the liquid crystal panel 2 is sucked by the suction portion to hold the liquid crystal panel 2. In addition, a motor 33 is attached to the upper end of the head unit 28. The panel holding portion 29 is connected to the motor 33, and can be rotated in an axial direction in the upper and lower directions by the power of the motor 33. The robot 9 carries out the liquid crystal panel 2 piece by piece from the tray 3 placed on the tray stage 6 or the tray 3 placed on the tray stage 7. Specifically, the robot 9 carries out the liquid crystal panels 2 from the tray 3 one by one until the tray 3 placed on the tray stages 6 and 7 becomes empty. Moreover, the robot 9 conveys the liquid crystal panel 2 carried out from the tray 3 to the panel stage 38 mentioned later. The supply unit 10 includes a data reading device 36 that reads data recorded on the liquid crystal panel 2. The data reading device 36 includes a camera for reading the code 2a. In addition, the supply unit 10 is provided with an alignment device 37 that aligns the liquid crystal panel 2 before reading the data of the liquid crystal panel 2 by the data reading device 36. The alignment device 37 includes a panel stage 38 on which the liquid crystal panel 2 is placed. On the panel stage 38, the liquid crystal panel 2 carried out by the robot 9 from the tray 3 on the tray stages 6 and 7 is mounted. In addition, the supply unit 10 includes a robot 39 that transports the liquid crystal panel 2 after reading the data by the data reading device 36 to the processing device 15; and an ionizer (static electricity removal device) 40 that transports the liquid crystal from the processing device 15 The panel 2 removes static electricity; the transport device 41, which transports the liquid crystal panel 2 aligned by the alignment device 37 to the robot 39; and the robot 42, which transports the liquid crystal panel 2 aligned by the alignment device 37 to the transport device 41 . In the supply unit 10, when the liquid crystal panel 2 is aligned by the alignment device 37, the robot 42 conveys the liquid crystal panel 2 to the conveying device 41. The conveying device 41 conveys the liquid crystal panel 2 to the robot 39. In addition, when the conveying device 41 conveys the liquid crystal panel 2 to the robot 39, it stops once in order to read the data of the liquid crystal panel 2 by the data reading device 36. The ionizer 40 is disposed above the conveying device 41 and removes static electricity of the liquid crystal panel 2 conveyed by the conveying device 41. The transport system 1 configured as above is connected to a relay computer (CIM-PC: Computer Integrated Manufacturing-Personal Computer) via a network, and the relay computer is connected to a host computer via the network. In addition, the transport system 1 transports the liquid crystal panel 2 based on the process recipe set according to the type of the liquid crystal panel 2. The process recipe includes information on the storage position of the liquid crystal panel 2 in the tray 3, namely panel position information, information on the size of the liquid crystal panel 2, namely panel size information, and the recording position of the data on the liquid crystal panel 2 (i.e. the position of code 2a) The information is the data location information. The panel position information includes the horizontal coordinates (X-coordinate and Y-coordinate) of each liquid crystal panel 2 stored in the tray 3. The panel size information includes the size in the long-side direction, the size in the short-side direction, and the thickness of the liquid crystal panel 2. The data location information includes the horizontal coordinate (X coordinate and Y coordinate) of code 2a. In addition, the process recipe includes information about the size of the tray 3, that is, tray size information. In addition, a plurality of transport systems 1 are connected to the host computer, and when the panel position information, panel size information, and data position information included in the process recipe are corrected, the correction results of the information are reflected to the plurality of transport systems 1. (Robot control method) If the coordinate system based on the reference point set on the side of the pallet stage 6 and 7 is set as the first coordinate system, set the coordinate system (robot coordinate system) based on the reference point set on the side of the robot 9 If it is the second coordinate system, the first coordinate system and the second coordinate system are pre-established correspondence by teaching specific parts on the tray carrier 6 and 7 sides to the panel holding portion 29. The teaching operation of the robot 9 is performed, for example, when the conveying system 1 is activated. In addition, the X coordinate and Y coordinate of each liquid crystal panel 2 included in the tray 3 of the panel position information, and the X coordinate and Y coordinate of the code 2a included in the data position information are the coordinates displayed using the first coordinate system. In addition, in this form, the first coordinate system on the tray carrier 6 side and the first coordinate system on the tray carrier 7 side are individually set, and the first coordinate system and the second coordinate system on the tray carrier 6 side are preset Correspondence is established, and the first coordinate system and the second coordinate system on the side of the tray stage 7 are previously corresponded. In addition, if the position where the panel holding portion 29 holds the liquid crystal panel 2 of the tray 3 stored on the tray stages 6 and 7 is set as the target reaching position of the panel holding portion 29, the panel holding portion 29 of the first coordinate system display will be used. The coordinates of the target arrival position are set to the first coordinate, and the coordinates of the target arrival position of the panel holding portion 29 displayed using the second coordinate system are set to the second coordinate. When the panel holding portion 29 operates, it is based on the recipe included in the process The first coordinate is input to the control unit 45 of the control robot 9 (refer to FIG. 4). The control unit 45 converts the input first coordinates into second coordinates, and moves the panel holding portion 29 to the target arrival position of the panel holding portion 29 based on the second coordinates. The panel holding part 29 moved to the target arrival position holds the liquid crystal panel 2 and transports it to the panel stage 38. (Main effect of this form) As explained above, in this form, the conveying system 1 conveys the liquid crystal panel 2 based on the process recipe set according to the type of the liquid crystal panel 2. The process recipe includes panel position information and panel size information . The X and Y coordinates of each liquid crystal panel 2 contained in the tray 3 of the panel position information are the coordinates displayed using the first coordinate system, but in this form, by teaching the specific parts on the side of the tray 6 and 7 The first coordinate system and the second coordinate system are pre-established in the panel holding portion 29, and when the panel holding portion 29 operates, the control portion 45 converts the first coordinate input based on the information contained in the process recipe into the second coordinate , And move the panel holding portion 29 to the target reaching position of the panel holding portion 29 based on the second coordinate. Therefore, in this form, if the teaching operation for the robot 9 corresponding to the first coordinate system and the second coordinate system is performed, even if there is subsequently a change in the production line of the type of liquid crystal panel 2 transported by the transport system 1 When the holding position of the liquid crystal panel 2 in the tray 3 of the panel holding part 29 changes, the robot 9 will not be taught. The panel holding part 29 can also be properly held and held based on the panel position information and the panel size information included in the process recipe. The liquid crystal panel 2 stored in the tray 3 is taken out. That is, in this embodiment, the teaching operation of the robot 9 when the type of the liquid crystal panel 2 transported by the transport system 1 changes is not required. Therefore, in this embodiment, the time for production line switching when the type of the liquid crystal panel 2 transported by the transport system 1 is changed can be shortened. Moreover, in this form, since the process recipe contains data location information, even if the holding position of the liquid crystal panel 2 in the tray 3 of the panel holding portion 29 changes according to the recording position of the data, or when the liquid crystal panel 2 in the tray 3 is held The posture of the robot 9 changes according to the recorded position of the data. It is also possible not to perform the teaching operation of the robot 9 when the production line is switched. Based on the position information of the data contained in the process recipe, the panel holding portion 29 is fixed and moved out of the liquid crystal stored in the tray 3 Panel 2. (Other Embodiments) The above-mentioned embodiment is an example of a preferred embodiment of the present invention, but it is not limited to this, and various changes can be implemented without changing the gist of the present invention. In the above aspect, the robot 9 is incorporated in the transport system 1 that transports the liquid crystal panel 2 supplied to the processing device 15, but the robot 9 may also be incorporated in the transport system that transports the liquid crystal panel 2 discharged from the processing device 15. In this case, the robot 9 carries in the liquid crystal panel 2 on the tray 3 placed on the tray stages 6 and 7. Also, in this case, in order to store the liquid crystal panel 2 held by the panel holding portion 29 in the tray 3 on the tray stages 6, 7, the position where the panel holding portion 29 releases the liquid crystal panel 2 becomes the target of the panel holding portion 29 Arrived at the location. In this case, when there is a production line switch and the holding and releasing position of the liquid crystal panel 2 in the tray 3 of the panel holding portion 29 changes, the robot 9 may not be taught by the panel holding portion 29 based on the process recipe. The liquid crystal panel 2 that is held and carried in is released at a proper position in the tray 3 and stored in a proper position in the tray 3. That is, the teaching operation of the robot 9 when the type of the liquid crystal panel 2 transported by the transport system 1 changes is unnecessary. As a result, the time for the production line switching when the type of the liquid crystal panel 2 transported by the transport system 1 changes can be shortened. In addition, the robot 9 may also be incorporated in a conveying system that conveys the liquid crystal panel 2 supplied to the processing device 15 and conveys the liquid crystal panel 2 discharged from the processing device 15. In this case, the robot 9 carries out the unloading of the liquid crystal panel 2 from the tray 3 placed on the tray stages 6 and 7 and the transfer to the liquid crystal panel 2 of the tray 3 placed on the tray stages 6 and 7. Also, in this case, the panel holding portion 29 holds the position of the liquid crystal panel 2 of the tray 3 stored on the tray stages 6, 7 or in order to store the liquid crystal panel 2 held by the panel holding portion 29 on the tray stage 6. , 7 on the tray 3 and the position where the panel holding portion 29 releases the liquid crystal panel 2 becomes the target reaching position of the panel holding portion 29. In the above form, the process recipe includes tray size information, but since the size of the tray 3 is fixed regardless of the type of liquid crystal panel 2 stored in the tray 3, the tray size information may not be included in the process recipe. In this case, based on the panel position information and the panel size information included in the process recipe, the panel holding portion 29 may appropriately hold and carry out the liquid crystal panel 2 stored in the tray 3. Moreover, in this case, the process recipe can be simplified. In the above form, the process recipe contains data position information, but if the holding position of the liquid crystal panel 2 in the tray 3 of the panel holding portion 29 does not change according to the data recording position, or the liquid crystal panel 2 in the tray 3 is held If the posture of the robot 9 does not change according to the recorded position of the data, the data position information may not be included in the process recipe. Moreover, in the above-mentioned form, the size of the tray 3 is fixed regardless of the type of the liquid crystal panel 2 stored in the tray 3, but the size of the tray 3 can also be changed according to the type of the liquid crystal panel 2 stored in the tray 3. In this case, in order to allow the panel holding portion 29 to properly hold and carry out the liquid crystal panel 2 stored in the tray 3, the position information of the tray 3 placed on the tray stages 6, 7 can be included in the tray position information Process recipe. In the above form, one tray 3 is placed on the tray stages 6, 7, but a plurality of trays 3 may be placed on the tray stages 6, 7 so as not to overlap each other. In addition, in the above form, the robot 9 is a parallel robot, but the robot 9 may be a horizontal articulated robot. Furthermore, in the above-mentioned form, the display panel conveyed by the conveying system 1 is the liquid crystal panel 2, but the display panel conveyed by the conveying system 1 may be a display panel other than the liquid crystal panel 2. For example, the display panel transported by the transport system 1 may also be an organic EL (Electro Luminescence) panel.
1‧‧‧搬送系統
1‧‧‧Transportation system
3‧‧‧托盤
3‧‧‧Tray
5‧‧‧輸送機
5‧‧‧Conveyor
7‧‧‧托盤載台
7‧‧‧Tray carrier
8‧‧‧機器人
8‧‧‧Robot
9‧‧‧機器人
9‧‧‧Robot
10‧‧‧供給單元
10‧‧‧Supply unit
11‧‧‧本體框架
11‧‧‧Ontology frame
12‧‧‧本體框架
12‧‧‧Ontology frame
20‧‧‧本體框架
20‧‧‧Ontology frame
21‧‧‧可動框架
21‧‧‧Movable frame
22‧‧‧可動框架
22‧‧‧Movable frame
23‧‧‧可動框架
23‧‧‧Movable frame
24‧‧‧托盤固持部
24‧‧‧Tray holding part
25‧‧‧本體部
25‧‧‧Main body
26‧‧‧連桿
26‧‧‧Connecting rod
27‧‧‧臂部
27‧‧‧Arm
28‧‧‧頭單元
28‧‧‧Head unit
29‧‧‧面板固持部
29‧‧‧Panel holding part
30‧‧‧馬達
30‧‧‧Motor
32‧‧‧臂
32‧‧‧arm
36‧‧‧資料讀取裝置
36‧‧‧Data reading device
37‧‧‧對準裝置
37‧‧‧Alignment device
38‧‧‧面板載台
38‧‧‧Panel Stage
39‧‧‧機器人
39‧‧‧Robot
40‧‧‧電離器(靜電去除裝置)
40‧‧‧Ionizer (static removal device)
42‧‧‧機器人
42‧‧‧Robot
E-E‧‧‧方向
E-E‧‧‧ direction
X‧‧‧前後方向
X‧‧‧Front and back direction
X1‧‧‧前側
X1‧‧‧Front side
X2‧‧‧後側
X2‧‧‧Back
Y‧‧‧左右方向
Y‧‧‧Left and right direction
Y1‧‧‧右側
Y1‧‧‧right
