KR102299106B1 - Transfer robot with multi arm - Google Patents

Abstract

The present invention is a rail part installed on the ground and provided with a horizontal rail therein, a running part running horizontally on the rail of the rail part, a turning part installed on the upper side of the running part to rotate, and installed on one side of the turning part and vertical a lifting unit provided with a vertical rail disposed upward, and an arm unit in which a plurality of forks for vertically ascending and descending on the rail of the lifting unit and transporting a substrate are arranged in two vertical rows; It relates to a multi-arm conveying robot comprising a space adjusting mechanism for adjusting the spacing between the left forks disposed on the left side of the forks disposed in a row and the right forks disposed on the right side.

Description

Multi-arm transfer robot {Transfer robot with multi arm}

The present invention relates to a multi-arm transfer robot, and more particularly, to a multi-arm transfer robot capable of simultaneously transferring a plurality of substrates.

In general, robots are used for various purposes in various industrial fields, for example, the use of a transport robot to transport a substrate in a semiconductor manufacturing field.

These transfer robots include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, and photomasks. ) It is a robot system for efficiently transporting various types of substrates, such as container plates, to cassettes.

In this way, the transfer robot is installed between the process and transfers the substrate used for manufacturing the product from a specific cassette to the cassette, and transfers it so that it is stacked vertically and spaced apart to perform the operation of the next process.

1 is a perspective view of a conventional transport robot. As shown, the conventional transport robot is largely divided into a rail unit 10, a traveling unit 20, a turning unit 30, a lifting unit 40, and an arm unit ( 50) consists of

The arm unit 50 of the conventional transfer robot is moved up and down with respect to the elevating unit 40, and through the horizontal movement of the traveling unit 20, the substrate can be transferred to a cassette at a specific location. is composed

However, in the case of the conventional transfer robot, since only one fork 51 installed in the arm unit 50 to support the substrate is installed, there is a problem in that productivity is reduced because only one substrate is transported.

In addition, in the conventional transfer robot, since the distance between the left fork 511 and the right fork 512 supporting the substrate is constant, when the size of the substrate is smaller than the distance, it is not possible to transport the substrate as well as the size of the substrate is larger than the interval. If it is larger, there is a problem that the substrate cannot be stably transported.

The present invention has been devised to solve the problems of the prior art, and an object of the present invention is to provide a multi-arm transport robot capable of transporting a plurality of substrates at the same time.

An object of the present invention is to provide a multi-arm transport robot capable of adjusting the distance between left and right forks.

In order to solve the problems as described above, the present invention may include the following configuration.

The multi-arm transport robot according to the present invention includes a rail unit 100 installed on the ground and having a horizontal rail 110 therein, and a traveling unit that runs horizontally on the horizontal rail 110 of the rail unit 110 ( 200), the turning part 300 installed on the upper side of the traveling part 200 to rotate, the lifting part 400 installed on one side of the turning part 300 and having a vertical rail 410 installed vertically, the an arm base 510 that is vertically movably coupled to the lifting unit 400; a first arm body 521 coupled to a lower surface of the arm base 510 and a second arm body 522 coupled to an upper surface of the arm base 510; A pair of a first sliding arm 5301 and a second sliding arm 5302 coupled to the upper surface of the first arm body 521, and the first sliding arm 5301 and the second sliding arm 5302 are vertically mounted a first fork mechanism 5511 and a second fork mechanism 5512 which are installed to maintain a distance between the furnaces; A third sliding arm 5303 and a fourth sliding arm coupled to the upper surface of the first arm body 521 by maintaining a left and right spacing with the pair of the first sliding arm 5301 and the second sliding arm 5302 a pair of 5304, and a third fork mechanism 5513 and a fourth fork mechanism 5514 installed to the third sliding arm 5303 and the fourth sliding arm 5304 with a vertical distance therebetween; A pair of a fifth sliding arm 5305 and a sixth sliding arm 5306 coupled to the upper surface of the second arm body 522, and the fifth sliding arm 5305 and the sixth sliding arm 5306 vertically a fifth fork mechanism 5521 and a sixth fork mechanism 5522 installed to maintain an interval; A seventh sliding arm 5307 and an eighth sliding arm coupled to the upper surface of the second arm body 522 by maintaining the left and right intervals with the pair of the fifth and sixth sliding arms 5305 and 5306 a pair of 5308, and a seventh fork mechanism 5523 and an eighth fork mechanism 5524 which are installed to the seventh sliding arm 5307 and the eighth sliding arm 5308 with a vertical distance therebetween; On the first arm body 521, a pair of the third sliding arm 5303 and the fourth sliding arm 5304 with respect to the pair of the first sliding arm 5301 and the second sliding arm 5302 By moving it left and right, the distance in the left and right direction of the pair of the third fork mechanism 5513 and the fourth fork mechanism 5514 with respect to the pair of the first fork mechanism 5511 and the second fork mechanism 5512 is temporarily changed. a first interval adjusting mechanism 561 installed to adjust; On the second arm body 522, a pair of the seventh sliding arm 5307 and the eighth sliding arm 5308 with respect to the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 By moving it left and right, the left and right direction spacing of the pair of the seventh fork mechanism 5523 and the eighth fork mechanism 5524 with respect to the pair of the fifth fork mechanism 5521 and the sixth fork mechanism 5522 is temporarily changed. a second interval adjustment mechanism 562 installed to adjust; includes

In the multi-arm transport robot according to the present invention, the first gap adjusting mechanism 561 includes a pair of the first sliding arm 5301 and the second sliding arm 5302 and the third sliding arm 5303 and The first arm body 521 between the pair of fourth sliding arms 5304 is divided into a left first arm body and a right first arm body, and the left first arm body and the right first arm body a connecting member 5611 for connecting ; The second gap adjusting mechanism 562 is provided between the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 and the pair of the seventh sliding arm 5307 and the eighth sliding arm 5308 . The second arm body 522 is divided into a left second arm body and a right second arm body, and a connecting member 5621 for connecting the left second arm body and the right second arm body; A driving member 5622 installed on the connecting member 5621 to provide a driving force for expanding and contracting the left second arm body from the right second arm body may be included.

In the multi-arm transport robot according to the present invention, the first gap adjusting mechanism 561 includes a pair of the first sliding arm 5301 and the second sliding arm 5302 and the third sliding arm 5303 and a motor including a pinion gear 5631 installed on a pair of fourth sliding arms 5304, respectively, and a rack gear 5632 installed on the first arm body 521; The second gap adjusting mechanism 562 is provided to the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 and the pair of the seventh sliding arm 5307 and the eighth sliding arm 5308, respectively. It may include a motor including a pinion gear 5641 installed, and a rack gear 5642 installed on the second arm body 522 .

In the multi-arm transport robot according to the present invention, the first spacer (570) coupled between the arm base (510) and the first arm body (521); a second spacer 580 coupled between the arm base 510 and the second arm body 522, wherein the first spacer 570 and the second spacer 580 are the first arm body It may be installed to adjust the distance between the 510 and the second arm body 522 .

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According to the present invention, the following effects can be achieved.

According to the present invention, a plurality of arms are configured to be disposed at a predetermined interval and a plurality of forks are installed to transport a plurality of substrates by one transfer.

The present invention is implemented so that the distance between the left and right forks can be adjusted, so that it is possible to quickly respond according to the size of the substrate to shorten the substrate transport time.

1 is a perspective view of a conventional transport robot;
2 is a perspective view of a multi-arm transport robot according to the present invention;
3 is a plan view of a multi-arm transport robot according to the present invention;
Figure 4 is a side view of the arm unit for explaining the first arm body in the multi-arm transfer robot according to the present invention
5 is a side view of the arm unit for explaining the second arm body in the multi-arm transport robot according to the present invention;
6 is an enlarged view of part A of FIG. 2 for explaining that the fork mechanism is arranged in two vertical rows in the multi-arm transport robot according to the present invention to transport the substrate
7 is an enlarged view of part A of FIG. 2 for explaining that a left fork and a right fork transfer a substrate as a pair in the multi-arm transfer robot according to the present invention
8 and 9 are state diagrams illustrating expansion and contraction of the arm body in the multi-arm transport robot according to the first embodiment of the present invention.
10 and 11 are state diagrams for explaining the movement of the sliding arm in the arm body in the multi-arm transport robot according to the second embodiment of the present invention.
12 and 13 are state diagrams for explaining the movement of the fork in the hand frame in the multi-arm transport robot according to the third embodiment of the present invention.
14 is a conceptual diagram for explaining a first spacer and a second spacer in the multi-arm transfer robot according to the present invention.

The terms or words used in the present specification and claims should not be construed as being limited to their ordinary or dictionary meanings, and the inventor may properly define the concept of the term in order to best describe his invention. Based on the principle, it should be interpreted as meaning and concept consistent with the technical idea of the present invention.

Hereinafter, an embodiment of a multi-arm transport robot according to the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a perspective view of the multi-arm transfer robot according to the present invention, Figure 3 is a plan view of the multi-arm transfer robot according to the present invention.

2 and 3 , the multi-arm transport robot according to the present invention is largely a rail unit 100 , a traveling unit 200 , a turning unit 300 , a lifting unit 400 , and an arm unit 500 . ) is included.

In addition, the multi-arm transfer robot is provided with a plurality of arms to simultaneously transfer a plurality of substrates.

Referring to FIG. 2 , the rail unit 100 is installed on the ground, and includes a horizontal rail 110 that guides the traveling unit 200 to be described later to travel on a horizontal plane.

The horizontal rail 110 may be installed on a surface in contact with the traveling unit 200 , that is, inside the rail unit 100 .

In addition, the horizontal rail 110 serves to guide the horizontal movement of the traveling unit 200 , and may extend horizontally by the length of the rail unit 100 .

On the other hand, looking at the shape of the horizontal rail 110 formed to enable horizontal movement of the traveling unit 200, horizontal movement is possible with a rack gear in the form of a spur gear, a rail of an LM guide, a ball screw driving type screw, etc. If it is a structure, it is not limited to any one.

For reference, the drawing shows that it is formed in a rack and pinion structure.

Referring to FIG. 3 , the rail unit 100 is formed to provide a space therein, and may be formed in a 'C' shape or a 'ㅁ' shape.

The rail unit 100 may be installed directly on the ground, or a plurality of supports may be installed outside the rail unit 100 in order to be installed with a predetermined height floating from the ground according to the environment of the installation space. A vertically perforated long hole is formed on one side of the support, and a bolt is coupled to the long hole with respect to the rail part 100 to have a structure in which the support can be installed.

Next, the traveling unit 200 is a part for horizontal movement of the transport robot.

Referring to FIG. 3 , the traveling unit 200 travels horizontally on the horizontal rail 110 of the rail unit 100 .

To this end, the horizontal driving unit 210 may be formed to correspond to the structure of the horizontal rail 110 . For example, when the horizontal rail 110 is configured as a rack gear in the form of a spur gear, the horizontal driving unit 210 is A motor including a pinion gear may be installed.

Accordingly, the driving unit 200 can move horizontally by the horizontal driving unit 210 in which the pinion gear is installed on the horizontal rail 110 of the rack gear.

As described above, the horizontal rail 110 may be configured in various forms, and the horizontal driving unit 210 may be configured to correspond thereto.

Next, the turning part 300 is a part for rotating the transport robot.

The turning part 300 is installed on the upper side of the traveling part 200 and is configured to be rotatable by 360 degrees.

The turning unit 300 is installed to be connected to the lifting unit 400 and the arm unit 500 . Accordingly, the lifting unit 400 and the arm unit 500 may rotate together as the turning unit 300 rotates. Accordingly, the substrate supported and transported by the arm unit 500 may also be rotated.

Next, the lifting unit 400 serves as a guide for vertically lifting the arm unit 500 to be described later.

Referring to FIG. 3 , the lifting unit 400 is installed to be vertically disposed on an upper side or one side of the turning unit 300 .

In addition, a vertical rail 410 is installed vertically on one side of the lifting unit 400 .

The vertical rail 410 may be formed in various shapes like the horizontal rail 110, and is not limited to any one shape as long as it has a structure capable of guiding it to move vertically.

Meanwhile, a vertical cable bear (not shown) that protects a cable for operation of the arm unit 500 and moves according to the elevation of the arm unit 500 may be installed inside the lifting unit 400 .

Hereinafter, the arm unit 500 in the multi-arm transport robot according to the present invention will be described in detail with reference to the accompanying drawings.

4 is a side view of the arm unit for explaining the first arm body in the multi-arm transport robot according to the present invention, FIG. 5 is a side view of the arm unit for explaining the second arm body in the multi-arm transport robot according to the present invention; 6 is an enlarged view of part A of FIG. 2 for explaining that the fork mechanism is arranged in two vertical rows to transport the substrate in the multi-arm transfer robot according to the present invention, and FIG. 7 is a fork in the multi-arm transfer robot according to the present invention. An enlarged view of part A of FIG. 2 for explaining that the mechanism is arranged in two rows up and down to transport the substrates in pairs, FIGS. 8 and 9 are arms in the multi-arm transport robot according to the first embodiment of the present invention A state diagram for explaining that the body expands and contracts, FIGS. 10 and 11 are state diagrams for explaining that the sliding arm moves from the arm body in the multi-arm transport robot according to the second embodiment of the present invention, FIG. 12 and Figure 13 is a state diagram for explaining the movement of the fork in the hand frame in the multi-arm transfer robot according to the third embodiment of the present invention, and Figure 14 is a first spacer and a second spacer in the multi-arm transfer robot according to the present invention. It is a conceptual diagram for explaining a spacer.

4 to 7 , the arm unit 500 is installed to transport a plurality of substrates arranged in two vertical rows. In this case, the substrate may be a small-sized substrate (S).

The arm unit 500 may be installed to transport substrates arranged in one vertical row. In this case, the substrate may be a medium-sized substrate M.

The multi-arm transfer robot according to the present invention may transfer at least one of the small substrate (S) and the medium-sized substrate (M).

To this end, the arm unit 500 is provided with a plurality of forks 550 for supporting the substrate.

The arm unit 500 is largely configured to include an arm base 510 , an arm body 520 , a sliding arm 530 , a hand frame 540 , a fork 550 , and a spacing adjusting mechanism 560 .

The arm base 510 is vertically movably coupled to the lifting unit 400 and vertically elevates on the vertical rail 410 .

A vertical drive unit 511 is installed inside the arm base 510 to correspond to the structure of the vertical rail 410 .

The vertical driving unit 511 is configured to correspond to the structure of the vertical rail 410 like the horizontal driving unit 210 of the traveling unit 200 .

Meanwhile, an arm body 520 disposed to form a right angle with respect to the lifting unit 400 is installed on the arm base 510 .

In this case, the arm body 520 is preferably installed on at least one of the upper and lower sides of the arm base 510 . The arm body 520 may include at least one of a first arm body 521 coupled to a lower surface of the arm base 510 and a second arm body 522 coupled to an upper surface of the arm base 510 . can

The sliding arm 530 , the hand frame 540 , and the fork 550 may be connected to the first arm body 521 .

Accordingly, the first arm body 521 may be positioned below the arm base 510 to transport the substrates positioned at the lower side among the substrates disposed up and down.

Like the first arm body 521 , the sliding arm 530 , the hand frame 540 and the fork 550 may be connected to the second arm body 522 .

Accordingly, the second arm body 522 may be positioned above the arm base 510 to transport the upper substrates among the upper and lower substrates.

The multi-arm transport robot according to the present invention includes at least one of the first arm body 521 positioned below the arm base 510 and the second arm body 522 positioned above the arm base 510 . By including one, the substrate may be transported from at least one of the upper, lower, and upper and lower sides of the arm base 510 .

The sliding arm 530 is installed in a structure forming a right angle when viewed from the top with respect to the arm body 520 .

Here, the sliding arm 530 is configured in plurality, and may be coupled to the first arm body 521 and the second arm body 522 by four each.

The multi-arm transport robot according to the present invention only has eight sliding arms 530 for convenience of description, but is not necessarily limited to eight.

The sliding arm 530 includes a first sliding arm 5301 , a second sliding arm 5302 , a third sliding arm 5303 , and a fourth sliding arm 5304 coupled to the upper surface of the first arm body 521 . ) is included.

The second sliding arm 5302 is installed on one side of the first sliding arm 5301 .

The third sliding arm 5303 is installed on the opposite side of the second sliding arm 5302 with respect to the first sliding arm 5301 .

Rail grooves 531 may be formed in the longitudinal direction on upper surfaces of the plurality of sliding arms coupled to the first arm body 521 .

The hand frame 540 may be movably coupled to the rail groove 531 .

For example, since the hand frame 540 includes a driving motor (not shown), it can move on the rail groove 531 by the driving force of the driving motor.

When the hand frame 540 moves back and forth, the substrates transported through the hand frame 540 may also move back and forth together.

Therefore, the multi-arm transfer robot according to the present invention can transfer the substrate from the lower side of the arm base 510 .

In addition, the sliding arm 530 includes a fifth sliding arm 5305 , a sixth sliding arm 5306 , a seventh sliding arm 5307 , and an eighth sliding arm coupled to the lower surface of the second arm body 522 . (5308).

The sixth sliding arm 5306 is installed on one side of the fifth sliding arm 5305 .

The seventh sliding arm 5307 is installed on the opposite side of the sixth sliding arm 5306 with respect to the fifth sliding arm 5305 .

A rail groove 531 may be formed in a longitudinal direction on a lower surface of the plurality of sliding arms coupled to the second arm body 522 .

The hand frame 540 may be movably coupled to the rail groove 531 .

For example, since the hand frame 540 includes a driving motor (not shown), it can move on the rail groove 531 by the driving force of the driving motor.

When the hand frame 540 moves back and forth, the substrates transported through the hand frame 540 may also move back and forth together.

Accordingly, the multi-arm transfer robot according to the present invention can transfer the substrate from the upper side of the arm base 510 .

The multi-arm transfer robot according to the present invention includes both the first arm body 521 and the second arm body 522 , so that the substrate can be transferred from the lower side and the upper side of the arm base 510 .

The hand frame 540 is a part for installing a fork 550 to be described later.

That is, the hand frame 540 may be installed on the upper surface or the lower surface of the sliding arm 530 to correspond to the number of sliding arms 530 configured in plurality.

The hand frame 540 installed on the plurality of sliding arms 530 installed on the first arm body 521 is on the upper surface of the sliding arm 530, and the sliding arm installed on the second arm body 522 ( The hand frame 540 installed on the 530 may be installed on the lower surface of the sliding arm 530 .

The multi-arm transport robot according to the present invention couples the plurality of hand frames 540 to the upper surface of the first arm body 521 and the lower surface of the second arm body 522, thereby coupling to the side surface of the arm body. It is possible to reduce the width protruding to the side compared to the case of Therefore, the multi-arm transport robot according to the present invention can reduce the traveling width when driving, and can also reduce the turning radius when turning, thereby preventing interference with other equipment.

The hand frame 540 may be fastened to the rail groove 531 of the sliding arm 530 configured in plurality.

At this time, the hand frame 540 is formed in a structure bent at a right angle, and the length is different and is installed on the sliding arm 530 and the second arm body 522 installed on the first arm body 521 . It is configured to be arranged at regular intervals between the sliding arms (530).

To this end, the sliding arm 530 installed on the first arm body 521 has the hand frame 540 bent in a 'L' shape, and the sliding arm installed on the second arm body 522 . At 530, it is preferable to configure the hand frame 540 to be bent in a 'L' shape.

The hand frame 540 coupled to the upper surface of the sliding arms 5301 and 5303 located inside the first arm body 521 includes the sliding arms 5302 and 5304 located outside the first arm body 521 . ) is formed shorter in length than the hand frame 540 coupled to the upper surface.

Accordingly, the substrate supported through the inner hand frame of the first arm body 521 may be supported at a lower position than the substrate supported through the outer hand frame.

The hand frame 540 coupled to the lower surface of the sliding arms 5305 and 5307 positioned inside the second arm body 522 includes the sliding arms 5306 and 5308 positioned outside the second arm body 522 . ) is formed shorter than the hand frame 540 coupled to the lower surface.

Accordingly, the substrate supported through the inner hand frame of the second arm body 522 may be supported at a higher position than the substrate supported through the outer hand frame.

4 to 7 , the fork 550 serves to support the substrate.

A suction hole (not shown) may be formed in the fork 550 . Accordingly, the fork 550 may adsorb and support the substrate. A plurality of suction holes may be formed in the fork 550 .

A plurality of the forks 550 are installed, and are configured to correspond to the number of the hand frames 540 . The forks 550 may be arranged in two rows vertically.

For example, the fork 550 may be arranged in two vertical rows as the plurality of hand frames 540 are arranged in two vertical rows with different lengths.

Referring to FIG. 4 , the fork 550 may support the substrate at the lower side of the arm base 510 . In this case, the left fork L disposed on the left and the right fork R disposed on the right among the plurality of forks 550 may support one small substrate S, respectively. Although not shown, the left fork (L) and the right fork (R) may share and support the medium-sized substrate (M).

Referring to FIG. 5 , the fork 550 may support the substrate on the upper side of the arm base 510 . In this case, the left fork L disposed on the left and the right fork R disposed on the right among the plurality of forks 550 may support one small substrate S, respectively. Although not shown, the left fork (L) and the right fork (R) may share and support the medium-sized substrate (M).

Referring to FIG. 6 , the fork 550 may support a plurality of substrates arranged in two vertical rows. In this case, each of the left fork L disposed on the left and the right fork R disposed on the right among the plurality of forks 550 may support one substrate. The substrate may be a small substrate (S).

Referring to FIG. 7 , the plurality of forks 550 may support a plurality of substrates arranged in one vertical row. In this case, the left fork (L) and the right fork (R) of the fork 550 may support one substrate at the left and right sides as a pair. In this case, the substrate may be a medium-sized substrate (M).

The multi-arm transfer robot according to the present invention can transfer at least one of a plurality of small substrates (S) arranged in two vertical rows and a plurality of medium-sized substrates (M) arranged in one vertical column.

The multi-arm transfer robot according to the present invention may transfer the substrate from at least one of the lower side and the upper side of the arm base 510 .

In addition, the multi-arm transfer robot according to the present invention may transfer the substrates individually or simultaneously.

The fork 550 may be installed in the form of a rod at the end of the hand frame 540 .

The fork 550 may move in the front-rear direction together as the hand frame 540 moves in the front-rear direction.

For example, the fork 550 may adsorb the substrate after being advanced into the cassette by the hand frame 540 in order to transport the substrate accommodated in the cassette (not shown). The fork 550 adsorbs the substrate and then moves backward by the hand frame 540 to separate the adsorbed substrate from the cassette. In this case, if the multi-arm transfer robot according to the present invention includes both the first arm body 521 and the second arm body 522 , the adsorbed substrate is the first arm body 521 and the second arm body 521 . It may be accommodated in a space formed between the arm bodies 522 .

For example, the fork 550 is advanced into the cassette by the hand frame 540 to accommodate the adsorbed substrate in the cassette, and the adsorbed substrate is placed in the cassette and then the adsorbed substrate is released in the cassette to accommodate the adsorbed substrate. can do it The fork 550 may be spaced apart from the cassette by reversing after seating the substrate.

The fork 550 is preferably formed not to be longer than the length of the sliding arm 530 . This is because, when the fork 550 is longer than the sliding arm 530 , the fork 550 protrudes to the outside of the sliding arm 530 , thereby causing interference with other equipment between driving and turning. That is, this is to minimize the operation interference area.

The fork 550 includes a first fork 551 installed to be connected to the first arm body 521 through the hand frame 540 and a second fork installed to be connected to the second arm body 522 . (552) at least one fork.

4 to 7 , the first fork 551 is connected to a first fork mechanism 5511 installed to be connected to the first sliding arm 5301 and to the second sliding arm 5302 . The second fork mechanism 5512 is installed to be connected to the third sliding arm 5303, the third fork mechanism 5513 is installed to be connected to the third sliding arm 5303, and the fourth fork mechanism is installed to be connected to the fourth sliding arm 5304 ( 5514).

The fork mechanisms may be respectively coupled to the upper surface of the sliding arm through a plurality of hand frames 540 .

Here, the third fork mechanism 5513 is coupled to the third sliding arm 5303 to be positioned at a height corresponding to the first fork mechanism 5511 .

For example, in the multi-arm transport robot according to the present invention, a hand frame 540 connecting the third fork mechanism 5513 to the third sliding arm 5303, and the first fork mechanism 5511 are connected to the first By forming the hand frame 540 connected to the sliding arm 5301 at the same height, the third fork mechanism 5513 can be positioned at a height corresponding to the first fork mechanism 5511 .

In this case, the first fork mechanism 5511 and the third fork mechanism 5513 can support the small substrates S arranged in two vertical rows, respectively, and medium-sized substrates ( M) can also be shared and supported. Therefore, since the multi-arm transfer robot according to the present invention can respond quickly according to the size of the substrate, it is possible to shorten the substrate transfer time.

In addition, the fourth fork mechanism 5514 is coupled to the fourth sliding arm 5304 to be positioned at a height corresponding to the second fork mechanism 5512 .

Positioning the fourth fork mechanism 5514 at a height corresponding to the second fork mechanism 5512 is the same as the above-described method for making the third fork mechanism 5513 correspond to the first fork mechanism 5511 . and the function and effect are the same.

However, the substrate supported by the second fork mechanism 5512 and the fourth fork mechanism 5514 is supported at a higher position than the substrate supported by the first fork mechanism 5511 and the third fork mechanism 5513 . can be

4 to 7 , the second fork 552 is connected to a fifth fork mechanism 5521 installed to be connected to the fifth sliding arm 5305 and to the sixth sliding arm 5306 A sixth fork mechanism 5522 installed so as to be connected to the seventh sliding arm 5307, a seventh fork mechanism 5523 installed to be connected to the seventh sliding arm 5307, and an eighth fork mechanism installed to be connected to the eighth sliding arm 5308 ( 5524).

The fork mechanisms may be respectively coupled to the lower surface of the sliding arm through a plurality of hand frames 540 .

Here, the seventh fork mechanism 5523 is coupled to the lower surface of the seventh sliding arm 5307 to be positioned at a height corresponding to the fifth fork mechanism 5521 .

For example, in the multi-arm transport robot according to the present invention, a hand frame 540 connecting the seventh fork mechanism 5523 to the seventh sliding arm 5307, and the fifth fork mechanism 5521 are connected to the fifth By forming the hand frame 540 connected to the sliding arm 5305 at the same height, the seventh fork mechanism 5523 can be positioned at a height corresponding to the fifth fork mechanism 5521 .

In this case, the fifth fork mechanism 5521 and the seventh fork mechanism 5523 can support the small substrates S arranged in two vertical rows, respectively, and medium-sized substrates ( M) can also be shared and supported. Therefore, since the multi-arm transfer robot according to the present invention can respond quickly according to the size of the substrate, it is possible to shorten the substrate transfer time.

Also, the eighth fork mechanism 5524 is coupled to the eighth sliding arm 5308 to be positioned at a height corresponding to the sixth fork mechanism 5522 .

Positioning the eighth fork mechanism 5524 at a height corresponding to the sixth fork mechanism 5522 is the same as the above-described method for making the seventh fork mechanism 5523 correspond to the fifth fork mechanism 5521 . and the function and effect are the same.

However, the substrate supported by the sixth fork mechanism 5522 and the eighth fork mechanism 5524 is supported at a lower position than the substrate supported by the fifth fork mechanism 5521 and the seventh fork mechanism 5523. can be

Although not shown, the multi-arm transport robot according to the present invention can individually operate a plurality of the fork mechanisms one by one, and the fork mechanism coupled to the first arm body 521 and the second arm body 522 . They may be operated by dividing the upper and lower sides, and the fork mechanisms arranged in two rows may be operated by dividing the left and right sides, and the entire fork mechanism may be operated at the same time.

Accordingly, the multi-arm transfer robot according to the present invention can transfer a plurality of substrates quickly, thereby shortening the substrate transfer time, and individually or bundled the fork mechanism according to the position in which the substrate is accommodated. Therefore, it is possible to reduce power consumption compared to the case of operating the entire fork mechanism.

7, the multi-arm transfer robot according to the present invention arranges the fork mechanisms in two upper and lower rows, but the two fork mechanisms are arranged in each row such that one fork mechanism is arranged in the left and right columns to support the substrate as a pair. The fork mechanism was installed at the same height.

For convenience of explanation, in the multi-arm transport robot according to the present invention, the direction in which the fork mechanisms coupled to the first arm body 521 are located is the lower side, and the direction in which the fork mechanisms coupled to the second arm body 522 are located is set to the upper side.

First, describing the fork mechanisms located on the lower side, the multi-arm transport robot according to the present invention includes two inner fork mechanisms located at the same height among the four fork mechanisms coupled to the first arm body 521 . 5511 and 5513 share and support one medium-sized substrate M, and the two outer fork mechanisms 5512 and 5514 are positioned on the medium-sized substrate M supported by the inner fork mechanisms 5511 and 5513 It can share and support other medium-sized substrates (M).

Next, describing the fork mechanisms located on the upper side, the multi-arm transport robot according to the present invention includes two inner fork mechanisms located at the same height among the four fork mechanisms coupled to the second arm body 522 . 5521 and 5523 share and support one medium-sized substrate M, and two outer fork mechanisms 5522 and 5524 are provided under the medium-sized substrate M supported by the inner fork mechanisms 5521 and 5523. It can share and support the other medium-sized substrates M located there.

The multi-arm transport robot according to the present invention may operate the inner and outer fork mechanisms, respectively, may operate separately from the upper side and the lower side, and may operate the entire fork at the same time.

Accordingly, the multi-arm transfer robot according to the present invention can stably transport the medium-sized substrate M because two fork mechanisms share and support the medium-sized substrate M on the left and right sides. In addition, since the multi-arm transfer robot according to the present invention can transport a plurality of medium-sized substrates M at the same time, it is possible not only to shorten the substrate transportation time, but also to individually adjust the fork mechanism according to the position in which the medium-sized substrate M is accommodated. Since it can be operated with a fork, power consumption can be reduced compared to the case of operating the entire fork mechanism.

8 to 13 , the arm unit 500 adjusts the spacing between the left forks L disposed on the left side and the right forks R disposed on the right side among the forks disposed in two vertical rows. It includes a gap adjusting mechanism 560 to adjust.

For example, the gap adjusting mechanism 560 is installed on the arm body 520 to expand and contract the arm body 520, so that the left forks L coupled to the left arm body and the left forks L coupled to the right arm body. The spacing between the right forks (R) can be adjusted.

For example, the gap adjusting mechanism 560 may be installed on the plurality of sliding arms 530 to move the sliding arms 530 on the arm body 520 . Accordingly, the spacing adjusting mechanism 560 may adjust the spacing between the left forks (L) coupled to the left sliding arm and the right forks (R) coupled to the right sliding arm.

For example, the gap adjusting mechanism 560 may be installed on the plurality of forks 550 to move the forks on the hand frame 540 . Accordingly, the spacing adjusting mechanism 560 may adjust the spacing between the left forks (L) coupled to the left hand frame and the right forks (R) coupled to the right hand frame.

Referring to FIGS. 8 and 9 , in the multi-arm transport robot according to the first embodiment of the present invention, the spacing adjusting mechanism 560 is installed on the arm body 520 . Accordingly, the multi-arm transport robot according to the first embodiment of the present invention can adjust the distance between the left and right forks by expanding and contracting the arm body 520 .

The gap adjusting mechanism 560 is a first gap adjusting mechanism 561 for adjusting the distance between the left forks (L) and the right forks (R) installed to be connected to the first arm body 521, and the It may further include a second gap adjusting mechanism 562 for adjusting the distance between the left forks (L) and the right forks (R) installed to be connected to the second arm body (522).

For example, when the first gap adjusting mechanism 561 divides the first arm body 521 into two, the left first arm body to which the left forks are connected is extended from the right first arm body to which the right forks are connected. and shrinkage.

The first gap adjusting mechanism 561 is installed on a connecting member 5611 connecting the left first arm body and the right first arm body, and the connecting member 5611 to move the left first arm body to the first interval adjusting mechanism 561. It may include a driving member 5612 that provides a driving force for expanding and contracting from the right first arm body. The driving member 5612 may be a hydraulic cylinder.

The first gap adjusting mechanism 561 may separate the left first arm body from the right first arm body by a driving force provided by the driving member 5612 . In this case, the left forks (L) may move away from the right forks (R). In this case, the left first arm body may be supported by the right first arm body through the connecting member 5611 .

The first gap adjusting mechanism 561 may contract the left first arm body away by the driving force of the driving member 5612 in the direction of the right first arm body. In this case, the left forks L may be closer to the right forks R.

For example, when the second gap adjusting mechanism 562 divides the second arm body 522 into two, the left second arm body to which the left forks are connected is extended from the right second arm body to which the right forks are connected. and shrinkage.

The second gap adjusting mechanism 562 is installed on a connecting member 5621 connecting the left second arm body and the right second arm body, and the connecting member 5621 to expand the left second arm body. and a driving member 5622 that provides a driving force for contraction. The driving member 5622 may be a hydraulic cylinder.

The second gap adjusting mechanism 562 may separate the left second arm body from the right second arm body by the driving force provided by the driving member 5622 . In this case, the left forks (L) may be spaced apart from the right forks (R). In this case, the left second arm body may be supported by the right second arm body through the connecting member 5621 .

The second gap adjusting mechanism 562 may contract the left second arm body away by the driving force of the driving member 5622 in the direction of the right second arm body. In this case, the left forks L may be closer to the right forks R.

Accordingly, the multi-arm transport robot according to the first embodiment of the present invention expands and contracts at least one of the first arm body 521 and the second arm body 522 to increase the distance between the left and right forks. can be adjusted Therefore, the multi-arm transfer robot according to the first embodiment of the present invention can secure more space between the left fork (L) and the right fork (R), so that not only can a larger substrate be transferred, but also the substrate can be transferred between transfers. It is also possible to prevent damage or damage due to collision with the substrate.

10 and 11, in the multi-arm transport robot according to the second embodiment of the present invention, the left forks (L) and the right forks (R) are connected to the spacing adjusting mechanism 560 . It is installed on the plurality of sliding arms 530 to be installed. Accordingly, the multi-arm transport robot according to the second embodiment of the present invention moves the plurality of sliding arms 530 on the first arm body 521 and the second arm body 522, so that between left and right forks You can adjust the spacing.

For example, the gap adjusting mechanism 560 may be a motor including pinion gears 5631 and 5641 and rack gears 5632 and 5642 in the form of spur gears. Accordingly, the gap adjusting mechanism 560 may move the sliding arm 530 on the first arm body 521 and the second arm body 522 . In this case, the motor including the pinion gears 5631 and 5641 is installed on the sliding arm 530 , and the rack gears 5632 and 5642 are connected to the first arm body 521 and the second arm body ( 522) can be installed.

Among the four sliding arms connected to the first arm body 521 , the two sliding arms 5303 and 5304 installed to connect the left forks L have the right forks R according to the rotation direction of the motor. The two sliding arms 5301 and 5302 may be moved away from or closer to each other.

Among the four sliding arms connected to the second arm body 522 , the two sliding arms 5305 and 5306 installed to connect the left forks L have the right forks R according to the rotation direction of the motor. The two sliding arms 5307 and 5308 installed in connection can be moved away from or closer to each other.

Accordingly, the multi-arm transport robot according to the second embodiment of the present invention can adjust the distance between the left and right forks by moving the sliding arms installed to be connected to the left forks (L). Therefore, the multi-arm transfer robot according to the second embodiment of the present invention can secure more space between the left fork (L) and the right fork (R), so that not only can a larger substrate be transferred, but also the substrate can be transferred between transfers. It is also possible to prevent damage or damage due to collision with the substrate.

Although not shown, the multi-arm transport robot according to the second embodiment of the present invention can adjust the distance between the left and right forks by moving the right sliding arm, as well as adjust the distance between the left and right forks by moving the left and right sliding arms at the same time may be

12 and 13 , in the multi-arm transport robot according to the third embodiment of the present invention, the spacing adjusting mechanism 560 is installed on the forks 550 . Accordingly, the multi-arm transport robot according to the third embodiment of the present invention adjusts the distance between the left and right forks by moving the left forks (L) and the right forks (R) on the plurality of hand frames 540 . can

For example, the gap adjusting mechanism 560 may be a motor including a pinion gear and a rack gear in the form of a spur gear. In this case, the motor including the pinion gear may be installed on the left fork L and the right fork R, and the rack gear may be installed on the hand frame 540 . Accordingly, the spacing adjusting mechanism 560 may move the left forks L and the right forks R on the hand frame 540 .

Among the forks installed to be connected to the first arm body 521 , the left forks 5513 and 5514 may move away from or closer to the right forks 5511 and 5512 according to the rotation direction of the motor.

Among the forks installed to be connected to the second arm body 522 , the left forks 5521 and 5522 may move away from or closer to the right forks 5523 and 5524 according to the rotation direction of the motor.

Accordingly, the multi-arm transport robot according to the third embodiment of the present invention can adjust the distance between the left and right forks by moving the left forks L on the hand frame 540 . Therefore, the multi-arm transfer robot according to the third embodiment of the present invention can secure more space between the left fork (L) and the right fork (R), so that not only can a larger substrate be transferred, but also the substrate can be transferred between transfers. It is also possible to prevent damage or damage due to collision with the substrate.

In addition, the multi-arm transport robot according to the third embodiment of the present invention can adjust the distance between the left and right forks by moving the right forks (R) on the hand frame (540), as well as the left forks (L) And by moving the right forks (R) at the same time it is also possible to adjust the spacing between the left and right forks.

Referring to FIG. 14 , the multi-arm transport robot according to the present invention may further include a first spacer 570 and a second spacer 580 .

The first spacer 570 is coupled between the arm base 510 and the first arm body 521 .

For example, the first spacer 570 may be coupled to the upper surface of the first arm body 521 and the lower surface of the arm base 510 by a bolt or welding method.

In this case, the first spacer 570 may support the arm base 510 so that the second arm body 522 is positioned at a higher position.

Accordingly, the fifth fork mechanism 5521 , the sixth fork mechanism 5522 , the seventh fork mechanism 5523 , and the eighth fork mechanism 5524 are installed to be connected to the second arm body 522 . ) may be further spaced apart from the first fork mechanism 5511 , the second fork mechanism 5512 , the third fork mechanism 5513 , and the fourth fork mechanism 5514 .

Referring to FIG. 14 , the second spacer 580 is coupled between the arm base 510 and the second arm body 522 .

For example, the second spacer 580 may be coupled to the upper surface of the arm base 510 and the lower surface of the second arm body 522 by a bolt or welding method.

In this case, the second spacer 580 may support the second arm body 522 so that the second arm body 522 is positioned at a higher position.

Accordingly, the fifth fork mechanism 5521 , the sixth fork mechanism 5522 , the seventh fork mechanism 5523 , and the eighth fork mechanism 5524 are installed to be connected to the second arm body 522 . ) may be further spaced apart from the first fork mechanism 5511 , the second fork mechanism 5512 , the third fork mechanism 5513 , and the fourth fork mechanism 5514 .

Although not shown, the fork mechanisms coupled to the second arm body 522 are coupled to the first arm body 521 according to the thickness of the first spacer 570 and the second spacer 580 . The separation distance away from them can be adjusted. A plurality of the first spacer 570 and the second spacer 580 may be installed. The multi-arm transport robot according to the present invention may install at least one spacer among the first spacer 570 and the second spacer 580 .

Therefore, the multi-arm transport robot according to the present invention can achieve the following effects.

First, the multi-arm transport robot according to the present invention installs at least one of the first spacer 570 and the second spacer 580 between the first arm body 521 and the second arm body 522 . By increasing the separation distance of Four substrates can be accommodated in the cassette.

Second, the multi-arm transport robot according to the present invention increases the separation distance between the first arm body 521 and the second arm body 522 by installing the spacers, thereby increasing the length of the hand frame 540. Alternatively, the vertical spacing between the forks 550 may be increased, and the number of transported substrates may be further increased by additionally installing a plurality of sliding arms, hand frames, and forks.

Hereinafter, the operation of the multi-arm transport robot described above will be described with reference to FIGS. 2 to 14 .

First, the rail unit 100 is installed on the ground of the working space, and the traveling unit 200 is operated by the horizontal driving unit 210 of the traveling unit 200 on the horizontal rail 110 installed in the rail unit 100 . It will drive left and right on the horizontal plane.

Then, when a rotation operation of the transport robot is required, the rotation operation is implemented by the operation of the turning unit 300 .

Then, when a vertical movement operation is required, the arm base 510 of the arm unit 500 is vertically raised and lowered on the vertical rail 410 of the lifting unit 400 to implement the vertical operation.

Here, according to the operation of the vertical driving unit 511 of the arm base 510 , the arm unit 500 is able to travel vertically on the lifting unit 400 .

On the other hand, the substrate is placed on the fork 550 installed in the arm unit 500, the number of substrates is determined according to the characteristics and size of the substrate, and the arrangement of the handframe 540 is changed in relation to this between the forks 550. interval can be set.

The multi-arm transfer robot according to the present invention moves the plurality of forks 550 up and down so as to transport a plurality of small substrates (S) arranged in two vertical rows and a plurality of medium-sized substrates (M) arranged in one vertical row. placed in 2 rows. In addition, the multi-arm transport robot according to the present invention is implemented so that the substrates can be transported by installing the spacers even if the cassettes for accommodating the substrates are arranged in two or one row vertically and spaced apart from the upper and lower sides.

As described above, the multi-arm transfer robot according to the present invention can perform a transfer operation by implementing horizontal, vertical, and rotational operations while a plurality of substrates are mounted.

Therefore, the multi-arm transport robot according to the present invention can achieve the following effects.

First, the multi-arm transfer robot according to the present invention is configured to be disposed at a predetermined interval with a plurality of sliding arms 530 and a plurality of forks 550 are installed to transfer a plurality of substrates with one transfer. productivity can be improved.

Second, the multi-arm transport robot according to the present invention installs a spacing adjusting mechanism 560 on at least one of the arm body 520 , the sliding arm 530 and the fork 550 , so that the left fork L and The distance between the right forks (R) can be adjusted. Accordingly, the multi-arm transfer robot according to the present invention can respond quickly depending on the size of the substrate, shortening the substrate transfer time, and can prevent damage or damage due to collision between the substrate and the substrate between transfers.

On the other hand, the present invention is not limited to the above-described embodiment, but can be implemented with modifications and variations without departing from the gist of the present invention, and it should be considered that such modifications and variations are also included in the technical spirit of the present invention. .

100: rail unit 110: horizontal rail
200: driving unit 300: turning unit
400: lifting unit 500: arm unit
510: arm base 520: arm body
530: sliding arm 540: hand frame
550: fork 560: gap adjustment mechanism
570: first spacer 580: second spacer

Claims (5)

A rail part 100 installed on the ground and having a horizontal rail 110 therein, a running part 200 running horizontally on the horizontal rail 110 of the rail part 100, the upper side of the running part 200 The turning part 300 installed in and rotating, the lifting part 400 installed on one side of the turning part 300 and having a vertical rail 410 disposed vertically, the lifting part 400 can move up and down The arm base 510 is coupled to each other;
a first arm body 521 coupled to a lower surface of the arm base 510 and a second arm body 522 coupled to an upper surface of the arm base 510;
A pair of a first sliding arm 5301 and a second sliding arm 5302 coupled to the upper surface of the first arm body 521, and the first sliding arm 5301 and the second sliding arm 5302 are vertically mounted a first fork mechanism 5511 and a second fork mechanism 5512 that are installed to maintain a distance between the furnaces;
A third sliding arm 5303 and a fourth sliding arm coupled to the upper surface of the first arm body 521 by maintaining a left and right spacing with the pair of the first sliding arm 5301 and the second sliding arm 5302 a pair of 5304, and a third fork mechanism 5513 and a fourth fork mechanism 5514 installed to the third sliding arm 5303 and the fourth sliding arm 5304 with a vertical distance therebetween;
A pair of a fifth sliding arm 5305 and a sixth sliding arm 5306 coupled to the upper surface of the second arm body 522, and the fifth sliding arm 5305 and the sixth sliding arm 5306 vertically a fifth fork mechanism 5521 and a sixth fork mechanism 5522 installed to maintain an interval;
A seventh sliding arm 5307 and an eighth sliding arm coupled to the upper surface of the second arm body 522 by maintaining a left and right spacing with the pair of the fifth and sixth sliding arms 5305 and 5306 a pair of 5308 and a seventh fork mechanism 5523 and an eighth fork mechanism 5524 installed to the seventh sliding arm 5307 and the eighth sliding arm 5308 with a vertical distance therebetween;
On the first arm body 521, a pair of the third sliding arm 5303 and the fourth sliding arm 5304 with respect to the pair of the first sliding arm 5301 and the second sliding arm 5302 By moving it left and right, the distance in the left and right direction of the pair of the third fork mechanism 5513 and the fourth fork mechanism 5514 with respect to the pair of the first fork mechanism 5511 and the second fork mechanism 5512 is temporarily changed. a first interval adjusting mechanism 561 installed to adjust;
On the second arm body 522, a pair of the seventh sliding arm 5307 and the eighth sliding arm 5308 with respect to the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 By moving it left and right, the left and right direction spacing of the pair of the seventh fork mechanism 5523 and the eighth fork mechanism 5524 with respect to the pair of the fifth fork mechanism 5521 and the sixth fork mechanism 5522 is temporarily changed. a second interval adjustment mechanism 562 installed to adjust; A multi-arm transport robot comprising a. According to claim 1,
The first interval adjusting mechanism 561 is,
The first arm body 521 between the pair of the first sliding arm 5301 and the second sliding arm 5302 and the pair of the third sliding arm 5303 and the fourth sliding arm 5304 is moved to the left. A first arm body and a right first arm body are divided, and a connecting member 5611 for connecting the left first arm body and the right first arm body, is installed on the connecting member 5611 and the left first arm body a driving member 5612 that provides a driving force for expanding and contracting the first arm body from the right first arm body;
The second interval adjusting mechanism 562,
The second arm body 522 between the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 and the pair of the seventh sliding arm 5307 and the eighth sliding arm 5308 is moved to the left. It consists of two arm bodies and a right second arm body, and a connecting member 5621 connecting the left second arm body and the right second arm body, and installed on the connecting member 5621 to the left side and a driving member (5622) providing a driving force for expanding and contracting the second arm body from the right second arm body. According to claim 1,
The first interval adjusting mechanism 561 is,
A motor including a pinion gear 5631 installed in the pair of the first sliding arm 5301 and the second sliding arm 5302 and the pair of the third sliding arm 5303 and the fourth sliding arm 5304, respectively and a rack gear 5632 installed on the first arm body 521,
The second interval adjusting mechanism 562,
A motor including a pinion gear 5641 installed in the pair of the fifth sliding arm 5305 and the sixth sliding arm 5306 and the pair of the seventh sliding arm 5307 and the eighth sliding arm 5308, respectively and a rack gear (5642) installed on the second arm body (522). delete According to claim 1,
a first spacer 570 coupled between the arm base 510 and the first arm body 521; and
a second spacer (580) coupled between the arm base (510) and the second arm body (522);
The first spacer (570) and the second spacer (580) is a multi-arm transport robot, characterized in that it is installed to adjust the distance between the first arm body (521) and the second arm body (522).

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