TWI687361B - Magnetic levitation system, vacuum system, and method of transporting a carrier - Google Patents

Abstract

A magnetic levitation system for transporting a carrier (10) along a transport path in a transport direction (T) is provided. The magnetic levitation system includes one or more active magnetic bearings (121) configured to hold the carrier (10) in a carrier transportation space (15) in a contactless manner; a side stabilization device (130) with at least one passive magnet (131) configured to apply a restoring force (F) on the carrier (10) in a lateral direction (L) transverse to the transport direction (T); and an adjustment device (150) configured to adjust one or more of the group consisting of: a magnetic field strength of the at least one passive magnet (131), a position of the at least one passive magnet (131) with respect to the carrier transportation space, an orientation or angular position of the at least one passive magnet (131), and a position of a magnetic shielding component (650) with respect to the at least one passive magnet (131). Further, a method of transporting a carrier is provided.

Description

Maglev system, vacuum system and method of transporting carrier

Various embodiments of the present disclosure relate to a magnetic levitation system for transporting carriers. More specifically, a magnetic levitation system assembly is described for non-contact carrier transportation along a transportation path. Various other embodiments relate to a vacuum system including a magnetic levitation system and a method of transporting a carrier in the vacuum system. More specifically, a magnetic levitation system assembly is described to transport a carrier in a non-contact manner through a vacuum system, where the carrier can transport objects, especially in a substantially vertical orientation, such as substrates or shields.

A magnetic levitation system that can be used as a non-contact transport carrier along the transport track of a magnetic levitation system, for example, in a vacuum system with low atmospheric pressure (sub-atmospheric pressure). Objects (such as substrates or masks) transported by the carrier can be transported from a first position in the vacuum system to a second position in the vacuum system, such as a loading module and a second position such as a deposition module. The magnetic levitation system allows the carrier to be transported without contact and therefore without friction, and can reduce the generation of small particles in the vacuum system. Small particles in the vacuum system can have a negative effect on the quality of the layers deposited on the substrate in the vacuum system.

The magnetic levitation system typically includes one or more actively controlled magnetic bearings, the one or more actively controlled magnetic bearings are assembled so that the carrier is held in a non-contact manner on the base of the magnetic levitation system structure. The carrier can be held and/or transported in a non-contact manner in the carrier transport space, which can be defined by the base structure.

The magnetic levitation system can be a non-contact transportation carrier along the transportation path in the transportation direction. However, it may be difficult to move the carrier away from the transport path in a lateral direction perpendicular to the transport direction, for example, because the magnetic field of the magnetic levitation system holds the carrier on the transport path. However, in some applications, it may be beneficial for the carrier to move away from the transport path, for example, in order to move the carrier to the second transport path, the second transport path is laterally offset from the transport path. The carrier switches from the first transportation path to the second transportation path, which is also referred to herein as "track switching".

Therefore, it is beneficial to increase the transportation flexibility provided by the maglev system. In particular, it is beneficial to enable the carrier to move in a lateral direction perpendicular to the transport direction of the maglev system. Further, it is beneficial to provide a method of non-contact transportation of carriers in a vacuum system in a flexible and reliable manner.

In view of the above, a magnetic levitation system, a vacuum system, and a method of transporting a carrier are provided.

According to one aspect of the present disclosure, there is provided a magnetic levitation system for transporting a carrier along a transport path in a transport direction. The magnetic levitation system includes one or more active magnetic bearings and at least one passive magnet side stabilization device. The one or more active magnetic bearings are assembled to hold the carrier in a non-contact manner in the carrier transportation space provided by the magnetic levitation system, with at least one passive magnet The side stabilizers are assembled to exert a restoring force on the carrier in the lateral direction, which is transverse to the transport direction. The magnetic levitation system further includes an adjustment device to adjust the magnetic field strength of (i) at least one passive magnet, (ii) the position of at least one passive magnet relative to the carrier transportation space, (iii) one or more of the group consisting of the azimuth or angular position of at least one passive magnet, and (iv) the position of the magnetic shielding element relative to the at least one passive magnet.

The side stabilizing device can stabilize the carrier at a predetermined lateral position by applying a restoring force to the carrier, and apply a restoring force to the carrier to drive the carrier toward the predetermined lateral position in the lateral direction. In the case where the carrier is displaced from the carrier transport space in the lateral direction, the adjustment device can be equipped to adjust the restoring force applied to the carrier by the side stabilizer device.

In particular, the adjustment device can be fitted to reduce the restoring force, so that the carrier can be moved away from the side stabilizing device more easily in the lateral direction, for example for track switching.

According to another aspect of this disclosure, a vacuum system is provided. The vacuum system includes a magnetic levitation system for transporting carriers along a transport path in the transport direction according to any of the embodiments described herein. The vacuum system further includes a second magnetic levitation system and a track switching component. The second magnetic levitation system is assembled to transport the carrier along the second transport path, the second transport path is horizontally offset from the transport path, and the rail switching component is assembled to make the carrier in the lateral direction Move from the transport path to the second transport path.

According to another direction described here, a method of transporting a carrier is provided. The method includes transporting a carrier along a transport path in a transport direction with a magnetic suspension system including one or more active magnetic bearings, and stabilizing the carrier in a lateral direction transverse to the transport direction with a side stabilizing device, one or more active magnetic The bearing holds the carrier in a non-contact manner in the carrier transportation space, and the side stabilization device includes at least one passive magnet, and the at least one passive magnet is adapted to exert a restoring force on the carrier in the lateral direction. The method further includes reducing or closing the restoring force applied to the carrier when the carrier is displaced from the carrier transportation space in the lateral direction.

After reducing or closing the restoring force, the carrier can move away from the transport path in the lateral direction, for example, toward the second transport path of the second magnetic levitation system, which is positioned horizontally offset from the magnetic levitation system.

Other aspects, benefits, and features of this disclosure will be apparent through the description and drawings.

10: Carrier

11: substrate

13: Carrier magnet

15: Carrier transportation space

20: line

100, 200, 300, 400, 500, 600: Maglev system

110: base structure

112: Upper rail department

114: Lower Track Department

121: Active magnetic bearing

130: side stabilizer

131: Passive magnet

132: Second side stabilizer

150: adjusting device

250, 450, 550, 651: actuator

331: Electromagnet

350: Power supply

650: magnetic shielding element

700: Vacuum system

701: vacuum chamber

705: Processing tool

710: The second maglev system

750: track switching component

751: Carrier holding part

810, 820, 830: block

A: axis

F: Resilience

L: horizontal direction

N: Arctic

S: Antarctic

T: transportation direction

In order to make the above-mentioned features of the present disclosure comprehensible, the present disclosure briefly summarized above can be described more specifically with reference to various embodiments. The drawings are related to the embodiments of the present disclosure, and are described as follows. The drawings illustrate typical embodiments, and these embodiments will be described in detail below. .

FIG. 1 shows a schematic cross-sectional view of a magnetic levitation system 100 according to various embodiments described herein. The magnetic levitation system 100 is equipped to transport a carrier along a transport track; FIGS. 2A and 2B illustrate how much is described here. Cross-sectional schematic diagrams of the magnetic levitation system 200 in the transport state (Figure 2A) and the track switching state (Figure 2B); Figures 3A and 3B illustrate the magnetic levitation system according to various embodiments described herein A schematic diagram of 300, FIG. 3A is a cross-sectional view, and FIG. 3B is a perspective view; FIGS. 4A and 4B illustrate the maglev system 400 according to various embodiments described herein in a transport state (FIG. 4A) and track switching A schematic cross-sectional view of the state (Figure 4B); Figures 5A and 5B illustrate the maglev system 500 in the transport state (Figure 5A) and track switching state (Figure 5B) according to various embodiments described herein Figures 6A and 6B are schematic cross-sectional views of the maglev system 600 according to various embodiments described herein in a transport state (Figure 6A) and a track switching state (Figure 6B); FIG. 7 is a schematic cross-sectional view of a vacuum system 700 including a magnetic levitation system according to various embodiments described herein; and FIG. 8 shows a flowchart of a method of transporting a carrier according to various embodiments described herein.

Various embodiments of the present disclosure will now be described in detail, one or more examples of which are depicted in the drawings. Each example provided is intended to explain this disclosure and is not intended to be a limitation of this disclosure. For example, features depicted or described as part of an embodiment can be used in or combined with other embodiments. This disclosure is intended to include these adjustments and changes.

In the following description of the drawings, the same element symbols represent the same or similar elements. Generally, only the differences of the individual embodiments are described. Unless specifically stated otherwise, the description of one part or one aspect of an embodiment can also be applied to the corresponding part or aspect of other embodiments.

FIG. 1 shows a schematic cross-sectional view of a magnetic levitation system 100 for transporting the carrier 10 along the transport path in the transport direction T. The transport direction T is perpendicular to the paper surface in Figure 1.

The magnetic levitation system 100 may include a base structure 110, which may include a stationary transportation rail or transportation rail. The base structure 110 can hold the carrier 10 in the carrier transportation space 15 in a non-contact manner. The carrier transport space 15 can be understood as a region adjacent to the base structure 110, and the carrier is disposed in the base structure 110 during the transport of the carrier along the transport path. For example, the carrier transportation space 15 may be a space between the upper rail portion 112 and the lower rail portion 114 of the base structure 110, and this space is assembled to receive the carrier during the transportation of the carrier along the transportation path in the transportation direction.

The carrier 10 can move along the transportation path in a non-contact manner in the transportation direction T relative to the base structure 110.

The magnetic levitation system 100 includes one or more active magnetic bearings 121 that are assembled to hold the carrier in a non-contact manner relative to the base structure 110 in the carrier transportation space 15. As shown in FIG. 1, the carrier 10 is held in the carrier transportation space 15 without contact, and the carrier transportation space 15 is interposed between the upper rail portion 112 and the lower rail portion 114 of the base structure 110. In some embodiments, one or more active magnetic bearings 121 are provided on the track portion 112 above the base structure 110. A driving unit for moving the carrier in the transport direction T, such as a linear motor, may be provided on the lower rail portion 114.

In the embodiment shown in FIG. 1, the base structure 110 includes an upper rail portion 112 disposed above the carrier 10, wherein the carrier 10 can be held under the upper rail portion 112. Alternatively or additionally, the base structure may include a lower rail portion 114 disposed under the carrier, wherein the carrier may be held above the lower rail portion 114. The carrier transportation space 15 may be disposed between the upper rail portion 112 and the lower rail portion 114, and the carrier 10 is held and transported in the carrier transportation space in a non-contact manner.

The magnetic levitation system 100 includes one or more active magnetic bearings 121 assembled to hold the carrier 10 in a non-contact manner on the base structure in the carrier transportation space 15. Multiple active magnetic bearings are available. One or more active magnetic bearings 121 may be assembled to generate a magnetic force acting between the base structure 110 and the carrier 10 so that the carrier is held non-contact with the base structure 110 at a predetermined distance. In some embodiments, one or more active magnetic bearings 121 are assembled to generate a magnetic force acting in a substantially vertical direction, so that the vertical width of the gap between the upper rail portion 112 and the carrier 10 can be maintained substantially fixed.

In some embodiments, the one or more active magnetic bearings 121 include actuators, which are disposed on the base structure 110, especially on the upper rail portion 112. The actuator may contain a controllable magnet, such as an electromagnet. The actuator can be actively controlled to maintain a predetermined distance between the base structure 110 and the carrier 10. The magnetic counterpart can be configured on the carrier 10, especially on the head of the carrier. The magnetic counterpart of the carrier can magnetically interact with multiple actuators of multiple active magnetic bearings.

For example, the output parameters applied to the actuator can be controlled according to input parameters, such as current, and input parameters such as the distance between the carrier and the base structure 110. In particular, the distance between the upper rail portion 112 and the carrier can be measured by a distance sensor, and the magnetic field strength of the actuator can be set according to the measured distance. In particular, in the case where the distance is higher than the predetermined limit value, the magnetic field strength can be increased, and in the case where the distance is lower than the limit value, the magnetic field strength can be reduced. The actuator can be controlled by closed loop or feedback control.

The magnetic levitation system 100 further includes a side stabilizing device 130 having at least one passive magnet 131. The side stabilizing device 130 is equipped to exert a restoring force F on the carrier 10 in the lateral direction L, which is transverse to the transport direction T. In terms of the lateral displacement of the carrier, the side stabilizing device 130 can stabilize the carrier at a predetermined lateral position by applying a restoring force on the carrier 10. The restoring force F pushes or pulls the carrier 10 back to a predetermined lateral position.

The transport direction T may be a substantially horizontal direction, and the lateral direction L may be a substantially horizontal direction transverse to the transport direction T. In particular, the lateral direction L may be a direction substantially perpendicular to the extending direction of the transportation track of the maglev system 100.

The side stabilizer 130 may include a side guide rail that extends along the transportation path of the maglev system, for example, beside the upper rail portion 112 and/or beside the lower rail portion 114. At least one passive magnet 131 may be attached to the side guide rail, so that the carrier 10 transported along the transport path can be stabilized at a predetermined lateral position relative to the base structure 110. In particular, the side stabilizing device 130 can generate a stabilizing force to offset the displacement of the carrier away from one of the carrier transport spaces 15 in the lateral direction L.

In particular, when the carrier leaves the predetermined lateral position or the equilibrium position shown in FIG. 1 in the lateral direction L, the side stabilizer 130 can be fitted to generate a restoring force F that pushes the carrier back and/or pulls it back Transport space 15. When the carrier is configured in a balanced position, one or more active magnetic bearings 121 can interact with the carrier to hold the carrier non-contact with respect to the base structure 110.

The lateral displacement of the carrier facing the left side of Figure 1 and the right side of Figure 1 can cause a restoring force, which is applied to the carrier by the side stabilizer to drive the carrier back to the equilibrium position shown in Figure 1 . In other words, the side stabilizer can be a two-way actuation side stabilizer.

As shown in the enlarged part of FIG. 1, the side stabilizer 130 may include at least one passive magnet 131 having a north pole N and a south pole S. In some embodiments, a plurality of passive magnets 131 may be provided, and the plurality of passive magnets 131 may be arranged one by one in the transportation direction. The line 20 extending from the south pole S to the north pole N of the at least one passive magnet 131 may substantially extend in the lateral direction L. In other words, the direction of the magnetic field lines (from the south pole to the north pole inside the magnet) of at least one passive magnet can be substantially equivalent to the lateral direction.

At least one carrier magnet 13 may be attached to the carrier 10 so that the displacement of the carrier 10 away from the carrier transport space 15 in the lateral direction L causes a repulsive magnetic force between the at least one passive magnet 131 and the at least one carrier magnet 13 to offset the displacement . Therefore, during the period of holding and transporting the carrier along the transport path, the carrier is maintained at the equilibrium position shown in FIG. 1.

In some embodiments that can be combined with other embodiments described herein, the line 20 extending from the south pole S of the at least one passive magnet 131 to the north pole N (ie, the direction of the magnetic lines of force inside the magnet) substantially extends in the lateral direction L . Further, at least one carrier magnet 13 attached to the carrier 10 has a north pole N and a south pole S, wherein a line extending from the south pole S to the north pole N substantially extends in the lateral direction L. The at least one carrier magnet 13 is arranged in the opposite orientation compared to the at least one passive magnet 131, so that when the carrier is arranged at the equilibrium position, the north pole N of the at least one carrier magnet 13 is arranged close to the south pole of the at least one passive magnet 131 and is at least The south pole of a passive magnet 131 is attracted, and the south pole S of at least one carrier magnet 13 is configured to be close to the north pole N of the at least one passive magnet 131 and attracted by the north pole N of the at least one passive magnet 131. When the carrier leaves the equilibrium position in the first lateral direction (for example, toward the left side of FIG. 1), the north pole N of at least one carrier magnet 13 approaches the north pole N of at least one passive magnet 131, causing a restoring force that drives the carrier back to the equilibrium position. When the carrier leaves the equilibrium position in the second (opposite) lateral direction (for example, toward the right side of Figure 1), the south pole S of at least one carrier magnet 13 approaches the south pole S of at least one passive magnet 131, causing the carrier to return to the equilibrium position Resilience. Therefore, the side stabilizing device 130 stabilizes the carrier at a predetermined lateral position, so that the lateral movement of the carrier relative to the base structure can be reduced or avoided.

In some embodiments, at least one passive magnet 131 is disposed above and/or below the carrier transportation space 15. In other words, when the carrier 10 is disposed in the carrier transportation space 15 For example, in a balanced position, at least one passive magnet 131 is installed to be spaced apart from at least one carrier magnet 13 in the vertical direction. As exemplarily shown in FIG. 1, when the carrier 10 is disposed in the carrier transportation space 15, at least one passive magnet 131 of the side stabilizer 130 is disposed above at least one carrier magnet 13 of the carrier.

The side stabilizer 130 may be attached to the upper rail portion 112 and/or the lower rail portion 114 of the base structure 110 of the magnetic suspension system 100.

A passive magnet as used herein can be understood as a magnet that is not actively controlled via feedback control. For example, the output parameters without passive magnets are controlled depending on the input parameters, such as the magnetic field strength and the input parameters such as distance. Instead, passive magnets can provide carrier side stability without any feedback control. For example, at least one passive magnet may include one or more permanent magnets. Alternatively or in addition, at least one passive magnet may include one or more electromagnets, which may not be actively controlled.

The side stabilizing device 130 can stabilize the carrier 10 relative to the base structure 110 at a predetermined lateral position, and can avoid substantial displacement of the carrier in the lateral direction. However, in some applications, it may be beneficial to move the carrier away from the transport path in the lateral direction L. For example, it may be beneficial for the carrier 10 to switch from a track that is laterally offset from the transport path, leaving the transport path toward the second transport path. Alternatively or in addition, displacement of the carrier in the lateral direction to align the carrier may be beneficial. Alternatively or additionally, it may be beneficial to insert the carrier into or out of the transport path in the lateral direction, for example for maintenance reasons.

The various embodiments described herein allow the restoring force F exerted by the side stabilizer 130 on the carrier 10 to be adjusted to move the carrier away from the transport path in the lateral direction L, especially in a direction substantially perpendicular to the transport direction T.

The magnetic levitation system 100 according to various embodiments described herein includes an adjustment device 150 that is equipped to apply the adjustment-side stabilization device 130 to the carrier 10 in the event that the carrier is displaced from the carrier transportation space 15 in the lateral direction L Upper resilience F.

The adjusting device 150 can be equipped to adjust (i) the magnetic field strength of at least one passive magnet 131, (ii) the position of at least one passive magnet 131 relative to the carrier transport space 15, and (iii) the azimuth or angular position of at least one passive magnet 131 And (iv) one or more of the groups formed by the positions of the magnetic shielding elements relative to at least one passive magnet 131.

In other words, various embodiments of the magnetic levitation system described herein include an adjustment device 150 that can modify the state of the side stabilizer 130 to change the restoring force F applied by the side stabilizer 130 to the carrier 10, especially to reduce or Close completely. After the restoring force F exerted by the side stabilization device 130 on the carrier is reduced or deactivated, the carrier can be moved away from the side stabilization device 130 in the lateral direction, for example toward the second transport path or toward the processing device.

Similarly, when the carrier has been moved into the carrier transport space 15 of the magnetic levitation system 100 in the lateral direction, for example, from the second transport track, the restoring force F applied by the side stabilization device can be activated or increased by the adjusting device 150. The carrier 10 is then indeed stabilized in the lateral direction L relative to the base structure 110. Thereafter, the magnetic levitation system may transport the carrier 10 in a non-contact manner along the transport track while the side stabilizing device 130 laterally stabilizes the carrier 10.

Therefore, by adjusting the restoring force F with the adjustment device 150, the carrier can be securely held and guided along the transportation path in the transport state of the side stabilization device, and in the track switching state of the side stabilization device, the carrier can Move away from the transport road in the horizontal direction L path. Further, in the case where the carrier has a displacement in the lateral direction L, the restoring force F applied to the carrier can be adjusted, for example, to adapt the magnetic levitation system to the specific carrier properties.

According to multiple embodiments that can be combined with other multiple embodiments described herein, the magnetic levitation system 100 may further include a track switching assembly, configured to move the carrier away from the transport path in the lateral direction L. The track switching assembly can be arranged at the track switching position along the transportation path, and the adjustable portion of the side stabilizer device is also arranged in the transportation path. Therefore, the restoring force F applied by the side stabilizing device 130 to the carrier can be reduced by the adjusting device 150, and then the carrier can be moved in the lateral direction L by the track switching assembly, and the carrier can leave the transportation path in the lateral direction L. FIG. 7 exemplarily shows a vacuum system including the track switching assembly 750.

In some embodiments, the side stabilization device 130 is switchable between at least two states, including a transport state and a rail switching state, the transport state is equipped to contactlessly transport the carrier along the transport path by the magnetic levitation system, the rail switching state Assemble to move the carrier away from the side stabilizer in the lateral direction L. In the transport state, when the carrier is displaced, the restoring force F applied by the side stabilization device to the carrier can be set to the first value by the adjusting device. In the track switching state, when the carrier is displaced, the restoring force F applied to the carrier can be set to a second value by the adjusting device. The second value is lower than the first value. In particular, in the track switching state, the side stabilizer 130 can be completely deactivated, so that no restoring force is applied to the carrier. Therefore, the carrier can be easily transferred away from the transportation path in the lateral direction L.

In some embodiments, the carrier transportation space 15 is disposed between the upper rail portion 112 and the lower rail portion 114 of the base structure 110. The side stabilizer 130 may be attached to the upper rail portion 112. Alternatively, the side stabilizer device may be attached to the lower rail portion 114. In some embodiments, The side stabilizer 130 is attached to the upper rail portion 112, and the second side stabilizer 132 is attached to the lower rail portion 114, as exemplarily shown in FIG.

The side stabilizer 130 and the second side stabilizer 132 may be assembled in a similar or the same manner. In particular, by providing the side stabilizing device 130 and the second side stabilizing device 132, the upper and lower parts of the carrier can be stabilized in the lateral direction L, so that stable carrier transportation can be provided. The adjusting device 150 can be assembled to adjust the restoring force provided by the side stabilizing device 130, and the second adjusting device can be assembled to adjust the restoring force provided by the second side stabilizing device 132. In many embodiments described herein, the side stabilizer 130 is attached to the upper rail portion 112. However, it should be understood that the side stabilization device may be attached to the lower rail portion 114 instead or additionally to the lower rail portion 114, as exemplarily shown in FIG. 1.

In some embodiments, the carrier 10 may be a substrate carrier assembled to hold and transport the substrate in a substantially vertical orientation. Alternatively, the carrier 10 may be assembled to carry different objects, such as a mask.

In some embodiments, the carrier may be assembled to hold and carry objects, such as holding and carrying substrates in a substantially horizontal orientation. In particular, when the carrier is oriented at a substantially horizontal level, the magnetic levitation system can be equipped to transport the carrier.

The term "substrate carrier" as used herein relates to a carrier that is assembled to carry a substrate along a transportation path within a vacuum chamber. During the deposition of the coating material on the substrate, the substrate carrier may hold the substrate. In some embodiments, the substrate may be held on the substrate carrier in a non-horizontal orientation, especially in a substantially vertical orientation, such as during transportation and/or deposition.

During transportation through the vacuum system, during positioning of the substrate within the vacuum system, for example relative to the mask, and/or during deposition of the coating material on the substrate In the meantime, the substrate can be held on the holding surface of the carrier. In particular, the substrate can be held on the carrier via a mounting device, for example, the mounting device includes an electrostatic chuck or a magnetic chuck.

The term "mask carrier" used herein refers to a carrier that is assembled to carry the mask. The mask carrier may carry the mask during transportation, during alignment of the substrate, and/or during deposition on the substrate. In some embodiments, the mask may be held on the mask carrier in a non-horizontal orientation, especially during transportation and/or deposition in a substantially vertical orientation. The shield can be held on the carrier by a mounting device, such as a mechanical mounting member, such as a clamp, electrostatic chuck, or magnetic chuck. Various other types of mounting devices can be used, which can be connected to the carrier or can be integrated into the carrier.

The carrier may include a plate body having an opening, wherein the cover may be held on the ring-shaped edge of the opening so that the cover covers the opening. Therefore, the coating material can be directed toward the substrate through the mask. The mask may be an edge exclusion mask or a shadow mask. The edge exclusion mask is a mask assembled to cover the edge area of one or more substrates, so that no material is deposited on the one or more edge areas during coating of the substrate. A shadow mask is a mask assembled to cover a plurality of features to be deposited on a substrate. For example, the shadow mask may include a plurality of small openings, such as a grid of small openings.

The term "substantially vertical orientation" as used herein should be understood as the orientation of the carrier. In this orientation, the angle between the gravity vector and the holding surface of the carrier equipped to hold the object is 20° or less, especially 10° or less, more particularly 5° or less. Therefore, the substrate or another object can be held on the holding surface in a substantially vertical orientation.

The carrier 10 may be equipped to handle objects having a size of 1 square meter (m ² ) or larger, especially objects having a size of 2 square meters or larger. In particular, the carrier 10 may be assembled to handle a large-area substrate having a size of 1 square meter or more or 5 square meters or more.

2A and 2B are schematic cross-sectional views of the magnetic suspension system 200 according to various embodiments described herein. FIG. 2A shows the maglev system in the transport state, and the transport state is assembled to transport the carrier 10 in a non-contact manner in the transport direction T, and FIG. 2B shows the maglev system in the track switching state, and the track switching state is assembled so that the carrier is in the lateral direction L moves away from the carrier transportation space.

The upper part of the magnetic levitation system 200 holding the carrier 10 is shown in FIGS. 2A and 2B, respectively. In particular, the track portion 112 on the base structure 110 of the maglev system 200 is shown. As will be apparent soon, in some embodiments, the magnetic levitation system 200 may further include a lower rail portion 114, similar to the magnetic levitation system 100 of FIG. 1.

The magnetic levitation system 200 may include some or all of the features of the magnetic levitation system 100 of FIG. 1, so that the above description can be referred to, and will not be repeated here.

The magnetic levitation system 200 may include a side stabilizer 130 that includes at least one passive magnet 131 that is assembled to apply a restoring force F to the carrier 10 in a lateral direction L, which is perpendicular to the transport direction T . Therefore, the carrier 10 can be stabilized at a predetermined lateral position or a balanced position relative to the base structure 110.

The magnetic levitation system 200 further includes an adjustment device 150 that is equipped to adjust at least one passive magnet 131 of the side stabilizer 130 relative to the carrier transportation space 15 s position. In particular, the adjustment device 150 may include an actuator 250 that is assembled to adjust the position of at least one passive magnet 131 relative to the carrier transportation space 15.

In some embodiments, the actuator 250 may be equipped to move the side stabilization device 130 toward and/or away from the carrier transport space 15, particularly in a substantially vertical direction. By moving at least one passive magnet 131 away from the carrier transport space 15, the magnetic force exerted by the at least one passive magnet 131 on the carrier 10 can be reduced, and the carrier 10 is disposed in the carrier transport space 15. Therefore, in the case of lateral displacement, the restoring force F applied to the carrier 10 can be reduced. By moving the at least one passive magnet 131 toward the carrier transportation space, the magnetic force exerted by the at least one passive magnet 131 on the carrier 10 can be increased. The carrier 10 is disposed in the carrier transportation space 15. Therefore, in the case of lateral displacement, the restoring force F applied to the carrier 10 can be increased.

In some embodiments, the actuator may be equipped to move at least one passive magnet 131 in a substantially vertical direction toward and/or away from the carrier transportation space 15.

In some embodiments that can be combined with other embodiments described herein, the side stabilizer 130 includes a side guide rail, in which a plurality of passive magnets are attached to the side guide rail. With the actuator 250, the side guide can be movable in a substantially vertical direction. Therefore, the restoring force F applied to the carrier can be adjusted. The side guide rail may be attached to the upper rail portion 112 to be disposed above the carrier transportation space 15. Therefore, when the carrier as exemplarily shown in FIG. 2A is disposed in the carrier transport space 15, the plurality of passive magnets attached to the side guide rails can magnetically interact with at least one carrier magnet 13 and at least one carrier magnet 13 attached to the carrier 10.

In the embodiment shown in FIGS. 2A and 2B, the side stabilizing device 130 is provided on the rail portion 112 above the base structure 110. The actuator 250 is provided to move the side stabilizer 130 with respect to the upper rail portion 112 in a substantially vertical direction. For example, the actuator 250 may include a drive, particularly a motor, equipped to move the side stabilizer 130, for example, in an upward and downward direction relative to the upper rail portion 112, and the motor is, for example, an electric motor.

In FIG. 2A, the side stabilizing device 130 is provided in a transport state, which is equipped to allow the carrier 10 to be transported along the transport path in the transport direction T. In the transport state, the side stabilizing device 130 is configured to approach the carrier transport space 15 so that the restoring force F can be applied to the carrier by at least one passive magnet 131, and the strength of the restoring force F is sufficient to stabilize the carrier in the lateral direction . For example, when the carrier is arranged in the carrier transportation space and stabilized by the side stabilizing device, the distance between the at least one carrier magnet 13 and the at least one passive magnet 131 may be 10 millimeters (mm) or less, especially 5 millimeters (mm) or less.

In FIG. 2B, the side stabilization device 130 is provided in a track switching state which is equipped to move the carrier away from the transportation path in the lateral direction. In the track switching state, the side stabilizing device 130 is configured to have a larger distance from the carrier transportation space 15 so that the restoring force F exerted by the at least one passive magnet 131 on the carrier is small or negligible. For example, the side stabilizer 130 may have moved a distance of 2 centimeters (cm) or more, especially a distance of 3 centimeters or more, or a distance of 4 centimeters or more, compared to the transportation state. Therefore, the carrier can move away from the side stabilizing device 130 in the lateral direction L, for example, for track switching.

In some embodiments that can be combined with other embodiments described herein, at least one passive magnet includes one or more permanent magnets. Permanent magnets are suitable for There is indeed a high resilience when there is any external power supply. Compared with actively controlled magnetic bearings, the benefits of permanent magnets are small size, low price, high temperature stability, high airgap, easy implementation, and fail-safe operation. .

In various embodiments, a plurality of permanent magnets may be attached to the side guide rail of the side stabilizer 130, wherein the side guide rail is assembled to be movable relative to the carrier transportation space 15 by the actuator 250.

It should be noted that in some embodiments, the second side stabilization device may be attached to the track portion under the base structure 110, wherein the second side stabilization device may include at least one passive magnet, and the at least one passive magnet is assembled as a permanent magnet. A second adjustment device including an actuator for moving the side stabilizer device relative to the carrier transportation space 15 may be provided. In particular, the second side stabilization device may be movable toward the carrier transportation space (transport state) and/or away from the carrier transportation space (track switching state) in a substantially vertical direction.

3A and 3B are schematic diagrams of the magnetic levitation system 300 according to various embodiments described herein. FIG. 3A shows a cross-sectional view of the magnetic levitation system 300, and FIG. 3B shows a perspective view of the magnetic levitation system 300.

The upper part of the magnetic levitation system 300 holding the carrier 10 is shown in FIGS. 3A and 3B, respectively. In particular, the track portion 112 on the base structure 110 of the maglev system 300 is shown. As will be apparent soon, the magnetic levitation system 300 may further include a lower rail portion 110 and a second side stabilizing device provided on the lower rail portion, similar to the magnetic levitation system 100 of FIG. 1.

The magnetic levitation system 300 may include some or all of the characteristics of the magnetic levitation system 100 of FIG. 1, so that the above description can be referred to, and will not be repeated here.

The magnetic levitation system 300 includes a side stabilizer 130 including at least one passive magnet. The at least one passive magnet is configured to apply a restoring force F to the carrier 10 in a lateral direction L, which is transverse to the transport direction T. Therefore, the carrier 10 can be stabilized at a predetermined lateral position or a balanced position relative to the base structure 110.

In some embodiments that can be combined with other embodiments described herein, at least one passive magnet may include one or more electromagnets 331. The one or more electromagnets 331 may include one or more windings or coils, wherein the power supply 350 may provide electric current to supply one or more electromagnets 331.

In the embodiments shown in FIGS. 3A and 3B, the magnetic levitation system 300 includes an adjustment device 150 that is equipped to adjust the magnetic field strength of at least one passive magnet. In particular, at least one passive magnet includes one or more electromagnets 331, and the adjustment device 150 includes a controller that is equipped to adjust the current supplied to the one or more electromagnets 331.

The adjustment device 150 may include a power supply 350 connected to one or more electromagnets 331. The controller can be equipped to adjust the current supplied by the power supply 350 to one or more electromagnets 331. By reducing the current supplied to one or more electromagnets 331, the restoring force F applied by the side stabilization device to the carrier can be reduced, and by increasing the current supplied to one or more electromagnets 331, the side stabilization device can be increased The restoring force exerted on the carrier. After reducing the restoring force F, the carrier may move away from the side stabilizing device 130 in the lateral direction, for example, for track switching. In order to achieve the stability of the carrier in the lateral direction L, the current supplied to one or more electromagnets can be increased.

In some embodiments, one or more coils of one or more electromagnets 331 extend around a winding axis, and the winding axis extends in a lateral direction, as illustrated in the enlarged portion of FIG. 3A Sexual drawing. In particular, one or more electromagnets 331 may be configured so that the magnetic field generated by the side stabilizer has an orientation equivalent to the magnetic field generated by the side stabilizer 130 in FIG. 1. Therefore, the carrier having at least one carrier magnet 13 can be stabilized in the lateral direction, and the carrier magnet 13 is attached to the carrier.

In some embodiments, the side stabilizer 130 may include at least one permanent magnet and at least one electromagnet.

For example, at least one permanent magnet can generate a restoring force that is assembled to stabilize the carrier in the lateral direction L. The electric field strength provided by at least one electromagnet can be adjusted by the adjusting device 150. In particular, at least one electromagnet may be switchable between the transportation state and the rail switching state. In the transport state, the orientation of the magnetic field generated by at least one electromagnet may be substantially equal to the orientation of the magnetic field generated by at least one permanent magnet. Therefore, at least one electromagnet and at least one permanent magnet are both suitable for applying a restoring force on the carrier to stabilize the carrier in a balanced position. In the track switching state, the orientation of the magnetic field generated by at least one electromagnet may be substantially opposite to the orientation of the magnetic field generated by at least one permanent magnet. Therefore, in terms of lateral carrier displacement, the net restoring force acting on the carrier can be reduced or closed, or the net restoring force acting on the carrier can become a displacement force, which actively pushes or pulls the carrier, making the carrier in the lateral direction Leave the carrier transport space on.

In some embodiments that can be combined with other multiple embodiments described herein, the side stabilizer 130 may be switchable between the transportation state and the rail switching state. In the transport state, the current supplied to one or more electromagnets can be adjusted to produce a stable carrier Restoring force set in the lateral direction L. In the track switching state, the current supplied to the one or more electromagnets can be adjusted to generate a displacement force, which pushes or pulls the carrier so that the carrier leaves the carrier transportation space in the lateral direction. In particular, the track switching movement of the carrier in the lateral direction L can be initiated by the adjusting device.

In some embodiments that can be combined with other embodiments described herein, at least one passive magnet 131 may include at least one electromanent magnet (EPM). The adjusting device 150 may be equipped to adjust the magnetic field strength generated by at least one electro-permanent magnet in the carrier transportation space, especially by applying a current pulse to the electro-permanent magnet.

The electro-permanent magnet may include at least a permanent magnet and at least an electromagnet, wherein the external magnetic field of the permanent magnet can be switched between two states by a current pulse applied to at least one electromagnet. In particular, the direction of magnetization of at least a part of the permanent magnet can be changed by the current pulse applied to the electromagnet. For example, the permanent magnet may include a part made of a soft magnetic material with low coercivity, so that the magnetization of the part can be changed. The electric permanent magnet may be switchable between the transportation state and the track switching state.

4A and 4B are schematic cross-sectional views of a magnetic suspension system 400 according to various embodiments described herein. FIG. 4A shows the maglev system in the transport state, which is assembled to transport the carrier 10 in the transport direction T, and FIG. 4B shows the maglev system in the rail switching state, which is assembled to move the carrier in the lateral direction L Leave the carrier transportation space.

The upper part of the magnetic suspension system 400 holding the carrier 10 is shown in FIGS. 4A and 4B, respectively. In particular, the track portion 112 on the base structure 110 of the maglev system 400 is shown. As will be apparent soon, the magnetic levitation system 400 may further include a lower rail portion 114, similar to the magnetic levitation system 100 of FIG. 1.

The magnetic levitation system 400 may include some or all of the features of the magnetic levitation system 100 of FIG. 1, so that the above description can be referred to, and will not be repeated here.

The magnetic levitation system 400 includes a side stabilizer 130 that includes at least one passive magnet 131 that is assembled to apply a restoring force F to the carrier 10 in a lateral direction L that is transverse to the transport direction T . Therefore, the carrier 10 can be stabilized at a predetermined lateral position or a balanced position relative to the base structure 110.

In some embodiments, at least one passive magnet 131 includes one or more permanent magnets. In the transport state shown in FIG. 4A, the at least one passive magnet 131 may be oriented so that the line extending from the south pole S to the north pole N of the at least one passive magnet 131 extends in the lateral direction L. Therefore, the carrier can be stabilized in the carrier transport space 15 in the lateral direction L.

The magnetic levitation system 400 further includes an adjustment device, which is equipped to adjust the orientation of at least one passive magnet 131. In particular, the adjustment device may include an actuator 450 that is assembled to rotate or tilt at least one passive magnet 131.

The actuator 450 can be assembled to rotate or tilt at least one passive magnet 131 with respect to an axis, especially with respect to an axis A that substantially extends in the direction of transportation. At least one passive magnet can be rotated or tilted from the first orientation shown in Figure 4A to the second orientation shown in Figure 4B, for example, rotated or tilted at an angle of 45° or more and 135° or less, in particular substance An angle of 90°. The first orientation may correspond to the transportation state, and the second orientation may correspond to the track switching state of the side stabilizer.

In particular, the at least one passive magnet 131 may be rotatable or tiltable from the first orientation to the second orientation. In the first orientation, the north pole N and the south pole S of the at least one passive magnet 131 are horizontally arranged adjacent to each other (see 4A), in the second orientation, the north pole N and the south pole S of the at least one passive magnet 131 are vertically arranged adjacent to each other (see FIG. 4B). In the transport state, the at least one passive magnet 131 may be oriented so that the line 20 extending from the south pole S to the north pole N of the at least one passive magnet 131 extends in the lateral direction L. In the track switching state, at least one passive magnet 131 may be oriented so that the line extending from the south pole S to the north pole N of the at least one passive magnet extends in a substantially vertical direction.

As exemplarily shown in FIG. 4B, in the track switching state, the north pole N (or south pole) of at least one passive magnet may be directed to the carrier transportation space. When the side stabilizer 130 has been inclined to the orientation shown in FIG. 4B, no net force or only negligible net force is applied to the carrier by the side stabilizer 130 in the lateral direction L.

In some embodiments, at least one passive magnet 131 is assembled as a magnetic bar having a longitudinal axis extending in the direction of transportation. The actuator 450 may be assembled to rotate the magnet bar about its longitudinal axis.

In the embodiment shown in FIGS. 4A and 4B, the side stabilizing device 130 is provided on the rail portion 112 above the base structure 110. The actuator 450 is provided to rotate or tilt at least one passive magnet with respect to an axis A, which extends substantially in the transport direction T. For example, the actuator 450 may include a drive, especially a motor, assembled to make at least one passive magnet 131 From a ground orientation to a second orientation, such as an angle of about 90°, the motor is, for example, an electric motor.

In FIG. 4A, the side stabilizing device 130 is provided in a transport state, which is equipped to transport the carrier 10 along the transport path in the transport direction T. In the transport state, the side stabilizer 130 is disposed in the first orientation, so that the restoring force F in the lateral direction L can be applied to the carrier by at least one passive magnet 131, and the carrier is disposed in the carrier transport space 15. The strength of the restoring force may be sufficient to make the carrier truly stable in the lateral direction L.

In FIG. 4B, the side stabilization device 130 is provided in a track switching state, which is equipped to move the carrier away from the transport path in the lateral direction L. In the track switching state, the side stabilizing device 130 is disposed in the second orientation, so that in the lateral direction L, a small or negligible restoring force F is exerted on the carrier by at least one passive magnet 131. Therefore, the carrier can move away from the side stabilizing device 130 in the lateral direction L, for example, for track switching.

It should be noted that the word "rotation" used here for magnets includes the movement of the magnets. The movement of the magnets causes the orientation of the magnetic field generated by the magnets to change from the first orientation to the second orientation, which includes rotation, tilt, pivoting, pivoting, Swinging and/or turning movement.

It should be further noted that, in some embodiments, the second side stabilization device may be attached to the track portion under the base structure 110, wherein the second side stabilization device may include at least one passive magnet, and at least one passive magnet is assembled as a permanent magnet . A second adjustment device including an actuator may be provided, the actuator being used to change the orientation of at least one passive magnet of the second side stabilization device. The second adjustment device may provide an actuator assembly to rotate at least one passive magnet, in particular It is around the axis of rotation extending in the transport direction T. In particular, the second side stabilization device can be rotated substantially 90° from the first orientation to the second orientation, and/or vice versa.

5A and 5B are schematic top views of the magnetic suspension system 500 according to various embodiments described herein. FIG. 5A shows the maglev system in the transport state, which is assembled to transport the carrier 10 in the transport direction T, and FIG. 5B shows the maglev system in the rail switching state, which is assembled to move the carrier in the lateral direction L Leave the carrier transportation space.

The magnetic levitation system 500 is similar to the magnetic levitation system 400 shown in FIGS. 4A and 4B. In this way, the above description can be referred to, and will not be repeated here.

The adjusting device 150 includes an actuator 550 that is assembled to adjust the azimuth or angular position of at least one passive magnet 131. The actuator 550 may be assembled to rotate or tilt at least one passive magnet 131 relative to an axis, where the axis may extend substantially in the vertical direction.

In some embodiments that may be combined with other embodiments described herein, the actuator 550 may be equipped to rotate or tilt at least one passive magnet 131 relative to a substantially vertical axis of rotation, so that the first One part and the second part of the at least one passive magnet move in the opposite direction of the lateral direction L. For example, in the embodiment shown in FIG. 5B, the first ends of the plurality of passive magnets move in the first lateral direction, and the other ends of the plurality of passive magnets move in the second lateral direction, the second lateral direction Opposite the first lateral direction.

In an embodiment, when the side stabilization device is provided in a transport state, as shown in FIG. 5A, at least one passive magnet of the side stabilization device may be provided as a magnetic bar, the magnetic bar extends Stretching in the transport direction T. In other words, the longitudinal direction of the magnetic bar may correspond to the transport direction T. The north pole N and south pole S of the magnet bar may be adjacent to each other in the lateral direction L. By rotating the magnetic rod about the substantially vertical axis from the transportation state shown in FIG. 5A to the track switching state shown in FIG. 5B, the net stabilizing force applied to the carrier can be reduced, and the carrier is provided in the carrier transportation space. For example, by rotating the magnet bar by 30° or more and a rotation angle of 150° or less, especially about 90°, the net stabilizing force applied to the carrier can be reduced or turned off.

The side stabilizer 130 may include two, three, or more passive magnets, which are arranged next to each other in the transport direction T.

In some embodiments, the side stabilization device 130 includes two, three, or more magnetic rods that can each rotate between the transportation state and the track switching state. In particular, the two, three or more magnetic rods can simultaneously rotate about a rotation axis by 30° degrees or more and a rotation angle of 150° or less, especially a rotation angle of 90°.

In some embodiments that can be combined with other embodiments described herein, the side stabilizer 130 may include at least one support member, such as a support bar, in which a plurality of passive magnets are attached to the support bar. The actuator can be assembled to rotate or tilt the support rod, for example around a rotation axis extending in the direction of transport (see Figure 4B) or around a rotation axis extending in a substantially vertical direction (see Figure 5B) .

In the transport state, the longitudinal axis of the support rod may correspond to the transport direction T, and a plurality of passive magnets may be successively attached to the support rod in the transport direction T. In the track switching state, the longitudinal axis of the support rod may be transverse to the transport direction (see Figure 5B). In some embodiments, the support rod may have a length of 10 cm (cm) or more and 100 cm or less, especially from 30 cm to 50 cm.

Three, four, five or more permanent magnets can be attached to the support bar of the side stabilizer. In some embodiments, the two, three, or more support bars of the side stabilization device may be configured next to each other in the direction of transportation.

For example, at least one first passive magnet and at least one second passive magnet of the side stabilizer 130 may be attached to the support rod. By rotating the support rod about a vertical axis, the vertical axis is located between the at least one first passive magnet and the at least one second passive magnet, the at least one first passive magnet and the at least one second passive magnet move to the lateral direction L The reverse. It can reduce the net stabilizing force acting on the carrier.

6A and 6B are schematic cross-sectional views of a magnetic suspension system 600 according to various embodiments described herein. FIG. 6A shows the maglev system in the transport state, and the transport state is assembled to transport the carrier in a non-contact manner in the transport direction T, and FIG. 6B shows the maglev system in the track switching state, which is assembled in the transverse direction L The carrier moves away from the carrier transportation space.

In some embodiments, the magnetic floating system 600 may include a magnetic shielding element 650, which may be movable. In particular, the adjusting device 150 may include an actuator 651 that is fitted to move the magnetic shielding element 650 to the shielding position where the side stabilizing device 130 exerts a restoring force on the carrier 10 in the lateral direction L F decreases.

For example, the actuator 651 may be assembled to move the magnetic shielding element 650 between the transportation state and the track switching state. In the track switching state shown in FIG. 6B, the magnetic shielding element 650 may be at least partially disposed between the side stabilizer 130 and the carrier transportation space 15. As exemplarily shown in FIG. 6B, in order to reduce the magnetic force applied by the side stabilizer to the carrier In the field, the magnetic shielding element 650 may be disposed between at least one passive magnet 131 of the side stabilizer 130 and at least one carrier magnet 13 of the carrier 10.

In the transport state shown in FIG. 6A, the magnetic shielding element 650 can be moved out of a gap between the at least one passive magnet 131 and the carrier transport space 15, so that the magnetic field applied by the side stabilizer 130 to the carrier is not affected The magnetic shielding element 650 is substantially shielded.

The magnetic shielding element 650 may include a material with high magnetic permeability. In some embodiments, the magnetic shielding element may include a ferromagnetic material, which is assembled to shield at least one passive magnet 131 and at least one carrier magnet 13 from each other. In the track switching state, the magnetic shielding element 650 may be assembled as a flat element, such as a thin plate element, which is assembled to fit the gap between at least one carrier magnet 13 and at least one passive magnet 131.

The actuator 651 can be assembled to move the magnetic shielding element 650 into and out of the vertical gap between the side stabilization device and the carrier transportation space.

FIG. 7 illustrates a schematic cross-sectional view of a vacuum system 700 including a magnetic levitation system 100 according to various embodiments described herein. The magnetic levitation system 100 is used to transport the carrier 10 along the transport path in the transport direction. The carrier 10 can carry objects, such as a substrate 11 of a large-area substrate. The carrier 10 may be assembled to handle objects having a size of 1 square meter (m ² ) or larger.

The magnetic levitation system 100 can be assembled according to any of the magnetic levitation systems described herein. In particular, the magnetic levitation system includes a base structure 110 having one or more active magnetic bearings 121 that are assembled to hold the carrier relative to the base structure 110 in a non-contact manner in the carrier transportation space. The magnetic levitation system further includes at least one passive The side stabilizer 130 of the magnet 131 is equipped with at least one passive magnet 131 to apply a restoring force F to the carrier in the lateral direction L, which is perpendicular to the transport direction. An adjusting device 150 is provided and assembled to adjust the restoring force.

In some embodiments, the base structure 110 includes an upper rail portion 112 and a lower rail portion 114, the upper rail portion 112 is disposed above the carrier transportation space, and the lower rail portion 114 is disposed below the carrier transportation space. One or more active magnetic bearings 121 can provide the remaining upper rail portion, and one or more driving units for moving the carrier in the transport direction can be provided on the lower rail portion.

The side stabilizing device 130 may be provided on the upper rail portion 112 and/or the second side stabilizing device 132 may be provided on the lower rail portion 114. The adjusting device may be provided to adjust the restoring force applied to the carrier by the side stabilizing device 130 and/or the second side stabilizing device 132.

The vacuum system 700 further includes a second magnetic levitation system 710 that is equipped to transport the carrier along a second transportation path that is horizontally offset from the first transportation path. The second magnetic levitation system 710 can be assembled in a manner similar to or the same as that of the magnetic levitation system 100. In this way, the above description can be referred to and will not be repeated here.

The vacuum system 700 further includes a track switching assembly 750 that is assembled to move the carrier from the transport path to the second transport path in the lateral direction L. For example, the track switching assembly 750 includes a carrier holding portion 751 that is equipped to transport the carrier disposed in the carrier transportation space of the magnetic levitation system 100 in the lateral direction L so that the carrier is transported toward the second carrier of the second magnetic levitation system 710 space.

In the case of a displacement of the carrier, the restoring force F applied to the carrier in the lateral direction L can be lowered or closed by the adjusting device 150, and the carrier can then easily move away from the transport path in the lateral direction toward the second transport path.

In some embodiments, the vacuum system 700 includes a vacuum chamber 701 in which the transportation path and the second transportation path extend adjacent to each other in the vacuum chamber 701. Further, one or more processing tools 705 may be configured in the vacuum chamber 701, wherein one or more processing tools may be selected from a deposition source, an evaporation source and a sputtering source Group. In some embodiments, the track switching assembly 750 may be assembled to transfer the carrier between the track switching position of the transport path, the track switching position of the second transport path, and/or the processing position, where the carrier is transported by the carrier The substrate can be processed by the processing tool 705.

The carrier 10 carrying the substrate 11 can be transported in a non-contact manner along the transport path by a magnetic levitation system while being stabilized in the lateral direction. After the adjustment of the side stabilization device as described herein, the carrier can move away from the transport path in the lateral direction L, reach the second transport path or toward the processing position, and the substrate can be processed at the processing position.

FIG. 8 shows a flowchart of a method of transporting a carrier according to various embodiments described herein.

In block 810, the magnetic levitation system transports the carrier along the transport path in the transport direction T. The magnetic levitation system includes one or more active magnetic bearings 121, and the one or more active magnetic bearings 121 hold the carrier in the carrier transport space 15 in a non-contact manner . During transportation, the carrier can be stabilized in the lateral direction L by the side stabilizing device 130, which is transverse to the transportation direction T. The side stabilizer includes at least one passive magnet 131, and at least one passive magnet 131 It is suitable for applying restoring force F on the carrier in the lateral direction L. At least one passive magnet may include one or more permanent magnets and/or one or more electromagnets.

In some embodiments, the carrier carries an object, such as a substrate in a vacuum system. The object can be held on the carrier by the adsorption device, for example by electrostatic or magnetic chuck. The object can be held on the carrier in a substantially vertical orientation.

The carrier may stop at a position in the transport path where at least one passive magnet 131 of the side stabilizer device magnetically interacts with at least one carrier magnet 13 attached to the carrier. The magnetic interaction can stabilize the carrier at a predetermined lateral position. The minimum distance between at least one passive magnet 131 and at least one carrier magnet 13 may be 10 millimeters (mm) or less, especially 5 millimeters or less. The at least one passive magnet 131 may be arranged above or below the at least one carrier magnet 13 in the vertical direction.

At block 810, the side stabilization device 130 may be provided in a transport state, which is assembled to transport the carrier in a non-contact manner in the transport direction.

In block 820, in the case where the carrier is displaced in the lateral direction L, the restoring force F applied by the side stabilizer to the carrier is adjusted, in particular lowered or closed. In particular, the side stabilization device can be switched to the rail switching state, in which the restoring force F is reduced or deactivated.

More specifically, the restoring force F can be adjusted by (i) the magnetic field strength of at least one passive magnet, (ii) a position of the at least one passive magnet relative to the carrier transportation space, (iii) the orientation or rotation of the at least one passive magnet The state, and (iv) the magnetic shielding element is lowered or turned off relative to one or more of the group consisting of a position of at least one passive magnet. Refer to the above multiple embodiments.

In (optional) block 830, the carrier may then move away from the transport path in the lateral direction L. In particular, because the restoring force is reduced, the carrier can be quickly and easily transferred from the side stabilizer. Alternatively, the carriers can be aligned in the lateral direction L, for example, by moving the carriers relative to the second carrier or the deposition source in the lateral direction L.

In various embodiments, the carrier is transferred from the transport path in the lateral direction to the second transport path provided by the second maglev system. After being transferred to the second transport path, the second side stabilizer of the second magnetic levitation system can be switched from the track switching state to the transport state. In the transport state, the carrier can be transported along the second transport path in a non-contact manner while being Horizontally.

In summary, although the present invention has been disclosed as above with embodiments, it is not intended to define the present invention. Those with ordinary knowledge in the technical field to which the present invention belongs can make various modifications and retouching without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be deemed as defined by the scope of the attached patent application.

10: Carrier

13: Carrier magnet

15: Carrier transportation space

20: line

100: Maglev system

110: base structure

112: Upper rail department

114: Lower Track Department

121: Active magnetic bearing

130: side stabilizer

131: Passive magnet

132: Second side stabilizer

150: adjusting device

F: Resilience

L: horizontal direction

N: Arctic

S: Antarctic

T: transportation direction

Claims (20)

A magnetic levitation system (100) for transporting a carrier (10) along a transport path in a transport direction (T), including: one or more active magnetic bearings (121), assembled in a carrier transport space ( 15) The carrier (10) is held in a non-contact manner; a side stabilizing device (130) has at least one passive magnet (131), and the side stabilizing device (130) is assembled to apply a return in a lateral direction (L) Force (F) on the carrier (10), the lateral direction (L) is transverse to the transport direction (T); and an adjustment device (150), which is assembled to adjust one of the at least one passive magnet (131) One or more of the group consisting of magnetic field strength, an azimuth or an angular position of the at least one passive magnet (131), and a position of a magnetic shielding element (650) relative to the at least one passive magnet (131) . A magnetic levitation system (100) for transporting a carrier (10) along a transport path in a transport direction (T), including: one or more active magnetic bearings (121), assembled in a carrier transport space ( 15) The carrier (10) is held in a non-contact manner; a side stabilizing device (130) has at least one passive magnet (131), and the side stabilizing device (130) is assembled to apply a return in a lateral direction (L) Force (F) on the carrier (10), the lateral direction (L) is transverse to the transport direction (T); and an adjustment device (150), the adjustment device (150) has an actuator (250), The adjusting device (150) is assembled to adjust a position of the at least one passive magnet (131) relative to the carrier transport space (15) to leave the carrier in the lateral direction (L) of the carrier In the case of a displacement of the body transportation space (15), adjust the restoring force (F) applied to the carrier (10) by the side stabilizer (130). The magnetic levitation system as described in item 1 or item 2 of the patent application scope further includes a track switching assembly (750) assembled to move the carrier (10) away from the transport path in the lateral direction (L). The magnetic levitation system as described in item 1 of the patent application scope, wherein the adjustment device (150) is equipped to adjust by means of the displacement of the carrier in the lateral direction (L) from the carrier transportation space (15) by a displacement The restoring force (F) exerted by the side stabilization device on the carrier (10). The magnetic levitation system as described in item 1 of the patent scope, wherein the at least one passive magnet (131) includes one or more electromagnets (331), and the adjustment device (150) includes a controller assembly to adjust the supply to the one Or one of the multiple electromagnets (331). The magnetic levitation system as described in item 1 or 2 of the patent application scope, wherein the at least one passive magnet (131) includes one or more permanent magnets. The magnetic levitation system as described in item 1 of the patent application scope, wherein the adjustment device (150) includes an actuator (450, 550) fitted to adjust an azimuth or an angular position of the at least one passive magnet (131). The magnetic levitation system as described in item 2 of the patent application scope, wherein the actuator (250) is assembled to move the side stabilizer (130) in a vertical direction toward or away from the carrier transportation space (15). The magnetic levitation system as described in item 7 of the patent application scope, wherein the actuator (450, 550) is equipped to rotate or tilt the at least one passive magnet (131) relative to an axis. The magnetic levitation system as described in item 9 of the patent application scope, wherein the shaft extends in the transport direction (T). The magnetic levitation system as described in item 9 of the patent application scope, wherein the axis extends in a vertical direction. The magnetic levitation system as described in item 9 of the patent application scope, wherein the at least one passive magnet (131) has a south pole and a north pole, and the at least one passive magnet (131) is rotatable or tiltable from a first orientation to A second orientation, in the first orientation, a line (20) extending from the south pole to the north pole extends in the lateral direction (L), and in the second orientation, the line extending from the south pole to the north pole It extends in a vertical direction. The magnetic levitation system as described in item 9 of the patent application scope, wherein the actuator (550) is configured to rotate the at least one passive magnet (131) about a vertical axis, so that the first of the at least one passive magnet A part and a second part move in the opposite direction of the lateral direction (L). The magnetic levitation system as described in item 9 of the patent application scope, wherein the actuator (550) is assembled to rotate the at least one passive magnet (131) about a vertical axis, so that at least one first passive magnet and at least one A second passive magnet moves in the reverse direction of the lateral direction (L). The magnetic suspension system as described in item 1 of the patent application scope further includes the magnetic shielding element (650), wherein the adjustment device includes an actuator (651) assembly to move the magnetic shielding element (650) to a shielding position, The magnetic shielding element (650) is at least partially disposed between the side stabilizer (130) and the carrier transportation space (15) at the shielding position. The magnetic levitation system as described in item 1 or item 2 of the patent application scope, wherein the carrier transportation space (15) is arranged between an upper rail part (112) and a lower rail part (114), and the side stabilizer (130) ) Is attached to the upper rail portion. The magnetic levitation system as described in item 1 or item 2 of the patent application scope, wherein the side stabilizing device (130) is arranged above or below the carrier transportation space (15), and wherein from the at least one passive magnet (131) A line (20) extending from a south pole to a north pole of the at least one passive magnet (131) extends in the lateral direction (L). A vacuum system (700), comprising: a magnetic levitation system as described in any one of patent application items 1 to 17; a second magnetic levitation system (710), assembled to transport a carrier along a second transportation path , The second transportation path is horizontally offset from the transportation path of the maglev system; and a track switching assembly (750) is assembled to move the carrier (10) from the transportation path to the transverse direction (L) The second transportation path. A method of transporting a carrier (10) includes: transporting a carrier along a transport path in a transport direction (T) with a magnetic levitation system (100), the magnetic levitation system including one or more active magnetic bearings (121) , One or more active magnetic bearings hold the carrier in a carrier transportation space (15) in a non-contact manner; The side stabilizing device (130) stabilizes the carrier in a lateral direction (L) transverse to the transport direction (T). The side stabilizing device includes at least one passive magnet (131) for the lateral direction (L) ) Exerts a restoring force (F) on the carrier; in the case where the carrier is displaced from the carrier transport space (15) in the lateral direction (L), reducing or closing the restoring force acting on the carrier (F); and moving the carrier away from the transport path in the lateral direction (L). The method of claim 19, wherein the restoring force is adjusted by adjusting the magnetic field strength of the at least one passive magnet, the position of the at least one passive magnet relative to the carrier transportation space, and the at least one passive One or more of an orientation or a rotation state of the magnet, and a magnetic shield element relative to the position of the at least one passive magnet are lowered or turned off.

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