CN218069804U - Magnetic levitation system for transporting a carrier, base structure therefor and vacuum deposition system - Google Patents

Magnetic levitation system for transporting a carrier, base structure therefor and vacuum deposition system Download PDF

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CN218069804U
CN218069804U CN201990001368.6U CN201990001368U CN218069804U CN 218069804 U CN218069804 U CN 218069804U CN 201990001368 U CN201990001368 U CN 201990001368U CN 218069804 U CN218069804 U CN 218069804U
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carrier
lateral
magnet
base structure
magnetic levitation
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克里斯蒂安·沃尔夫冈·埃曼
亨宁·奥斯特
奥利弗·海默尔
拉尔夫·林登贝格
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

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Abstract

Embodiments of the present disclosure relate to a magnetic levitation system for transporting a carrier, a base structure of a magnetic levitation system for transporting a carrier and a vacuum deposition system. The magnetic levitation system (100) comprises: a base structure (20); a carrier (10) movable along the base structure (20) in a carrier transport space (55); and a levitation magnet arrangement (30) for generating a vehicle levitation force (F) acting on the vehicle in a vertical direction (V) V ). In addition, at least one mechanical contact element (40) is provided, which is configured to exert a lateral contact force (F) on the carrier in a lateral direction (L) C ) To counteract application by the levitating magnet arrangement (30)A first lateral force component (F) on the carrier L1 )。

Description

Magnetic levitation system for transporting a carrier, base structure therefor and vacuum deposition system
Technical Field
Embodiments of the present disclosure relate to an apparatus and method for transporting a carrier using a magnetic levitation system. More particularly, embodiments of the present disclosure relate to magnetic levitation systems for transporting carriers, particularly for carrying large area substrates. The carrier may be transported in a substantially vertical orientation in a vacuum processing system for depositing materials on large area substrates. In particular, embodiments of the present disclosure relate to a magnetic levitation system, a base structure and a carrier of a magnetic levitation system, and a method of transporting a carrier using a magnetic levitation system.
Background
Techniques for layer deposition on a substrate include, for example, sputter deposition, physical Vapor Deposition (PVD), chemical Vapor Deposition (CVD), and thermal evaporation. The coated substrate can be used in several applications and in several technical fields. For example, the coated substrate may be used in the field of display devices. Display devices may be used to manufacture television screens, computer monitors, mobile phones, other handheld devices, etc. to display information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.
Typically, substrates are coated in a vacuum deposition system having a plurality of deposition sources and other substrate processing equipment. Typically, the substrate is transported through the vacuum deposition system along a transport track, for example from a first deposition source to a second deposition source and to other substrate processing equipment. The substrate may be transported through the processing system in a substantially vertical orientation.
Typically, the substrate is carried by a carrier (i.e. a carrier means for carrying the substrate). Typically, the carriers are transported through a vacuum system using a carrier transport system (e.g., a magnetic levitation system in which the weight of the carriers is at least partially maintained by magnetic force). The magnetic levitation system may be configured for transporting a carrier carrying a substrate along a base structure defining a transport track for the carrier.
Accurately and smoothly transporting the carrier through the vacuum system is challenging. For example, particle generation due to friction between moving parts may lead to deterioration of the manufacturing process. The transport of the carrier by means of a magnetic levitation system reduces particle generation, since the mechanical contact between the moving parts is reduced. For example, a magnetic levitation system may include an arrangement of levitation magnets that generate a levitation force (i.e., a magnetic force acting on the carrier in a vertical direction to maintain the weight of the carrier) of the carrier.
A plurality of actively controlled magnet units may be used to generate the carrier levitation force. In other words, the levitation force generated by the levitation magnets can be actively controlled in a closed-loop control manner to continuously ensure a predetermined carrier position in the vertical direction. However, actively controlled magnet units are expensive and complex and risk malfunctioning and generating vibrations.
It would therefore be beneficial to provide an improved magnetic levitation system for suspending and transporting a carrier in a vacuum system and an improved method of transporting a carrier in a vacuum system that overcomes at least some of the problems of the prior art. In particular, it would be beneficial to provide a magnetic levitation system for transport carriers that is fail-safe and easy to maintain.
SUMMERY OF THE UTILITY MODEL
In view of the above, a magnetic levitation system for transporting a carrier, a base structure of a magnetic levitation system for transporting a carrier and a method of transporting a carrier in a vacuum chamber are provided. Additional aspects, advantages and features are apparent from the description and drawings.
According to an aspect of the present disclosure, a magnetic levitation system for transporting a carrier is provided. The magnetic levitation system includes: a base structure; a carrier movable along the base structure in a carrier transport space; and a levitation magnet arrangement for generating a vehicle levitation force. In addition, at least one mechanical contact element is provided, which is configured to exert a lateral contact force on the carrier to counteract a first lateral force component exerted on the carrier by the levitated magnet arrangement.
The carrier suspending force acts on the carrier in the vertical direction to suspend the carrier. The first lateral force component and the lateral contact force may act on the carrier in opposite lateral directions, such that a predetermined lateral position of the carrier may be maintained during carrier transport.
In some embodiments, the levitation magnet arrangement includes only passive magnets such that the carrier levitation force is purely passive. In particular, all magnets of the levitating magnet arrangement may be permanent magnets.
In some embodiments, a levitation magnet arrangement comprises: a central magnet disposed at one of the carrier and the base structure; and first and second lateral magnets disposed at the other of the carrier and the base structure, the central magnet being disposed between the first and second lateral magnets during transport of the carrier. The central magnet may be arranged in an eccentric position between the first and second lateral magnets during transport of the carrier.
In some embodiments, the central magnet, the first lateral magnet, and the second lateral magnet are permanent magnets having first and second poles of opposite polarity, respectively, and the central magnet has a first orientation in which the first pole of the central magnet is disposed above the second pole of the central magnet, and the first and second lateral magnets have a second orientation opposite the first orientation.
In some embodiments, the first and second lateral magnets are disposed at the base structure and define a space for the central magnet between the first and second lateral magnets, and the central magnet is disposed at the carrier. Optionally, a central magnet is provided at the bottom end of the carrier, the central magnet protruding into the space between the first and second lateral magnets.
In some embodiments, the at least one mechanical contact element comprises a plurality of rotatable rollers mounted at the base structure. Optionally, a plurality of rotatable rollers are mounted laterally with respect to the carrier transport space and configured to apply pressure on lateral faces of the carrier during transport of the carrier.
In some embodiments, the at least one mechanical contact element is mounted on only one side of the carrier transport space laterally with respect to the carrier transport space and exerts a pressure on only one lateral face of the carrier during transport of the carrier.
In some embodiments, the vehicle suspension force F V Only from passive magnets. In particular, at least one of the central magnet, the first lateral magnet and the second lateral magnet is a permanent magnet. In particular, the levitation magnet arrangement may comprise only permanent magnets.
In some embodiments, the magnetic levitation system further comprises a linear motor for moving the carrier along the base structure. The linear motor may be arranged laterally with respect to the carrier transport space and the at least one mechanical contact element is configured to exert a lateral contact force F on the carrier C To counteract a first lateral force component F exerted on the carrier by the levitating magnet arrangement L1 And a second lateral force component F exerted by the linear motor on the carrier L2 。
According to another aspect of the present disclosure, a base structure of a magnetic levitation system for transporting a carrier is provided. The base structure defines a transport track for the carrier and comprises first and second lateral magnets of a levitating magnet arrangement defining a space therebetween for a central magnet provided at the carrier. In addition, at least one mechanical contact element is provided, which is configured to exert a lateral contact force on the carrier to counteract a first lateral force component exerted on the carrier by the levitation magnet arrangement.
Alternatively, the base structure may comprise a central magnet of the magnetic levitation system, and the first and second lateral magnets defining a space therebetween for the central magnet may be arranged at the carrier.
According to another aspect of the present disclosure, another magnetic levitation system for transporting a carrier is provided. The magnetic levitation system includes: a base structure; a carrier movable along the base structure in a carrier transport space; and a levitation magnet arrangement for generating a vehicle levitation force. The levitation magnet arrangement includes: a central magnet disposed at one of the carrier and the base structure; and first and second lateral magnets provided at the other of the carrier and the base structure, the central magnet being arranged between the first and second lateral magnets in a lateral direction during transport of the carrier. The central magnet, the first lateral magnet and the second lateral magnet are permanent magnets having a first magnetic pole and a second magnetic pole, respectively. The central magnet has a first orientation in which a first pole of the central magnet is disposed above a second pole of the central magnet, and the first and second lateral magnets have a second orientation opposite the first orientation of the central magnet.
According to another aspect of the present disclosure, a vacuum deposition system is provided. The vacuum deposition system includes: a vacuum chamber; a magnetic levitation system according to any embodiment described herein for magnetically suspending and transporting a carrier in a vacuum deposition system; and a deposition source configured to deposit a material on a substrate carried by the carrier.
According to another aspect of the present disclosure, a method of transporting a carrier along a base structure is provided. The method comprises levitating a carrier with respect to a base structure with a levitation magnet arrangement; holding the carrier in a position in which the levitating magnet arrangement exerts a first lateral force component on the carrier; and counteracting the lateral force component with at least one mechanical contact element exerting a lateral contact force on the carrier.
Embodiments are also directed to apparatuses for performing the disclosed methods and include apparatus portions for performing each described method aspect. These method aspects may be performed by means of hardware components, a computer programmed by appropriate software, any combination of the two or in any other manner. Furthermore, embodiments according to the present disclosure also relate to a method for operating the described device. The method for operating the described apparatus includes method aspects for performing each function of the apparatus.
Drawings
So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The figures relate to embodiments of the present disclosure and are described as follows:
fig. 1 shows a schematic cross-sectional view of a magnetic levitation system and a base structure according to embodiments described herein;
fig. 2A and 2B are schematic diagrams for illustrating the operation of a magnetic levitation system according to embodiments described herein;
figure 3 shows a schematic cross-sectional view of a magnetic levitation system and a base structure according to embodiments described herein;
figure 4 shows a schematic cross-sectional view of a magnetic levitation system and a base structure according to embodiments described herein;
figure 5 shows a schematic cross-sectional view of a magnetic levitation system and a base structure according to embodiments described herein;
figure 6 shows a schematic front view of a carrier of a magnetic levitation system according to embodiments described herein; and is
Fig. 7 is a flow chart illustrating a method of transporting a carrier along a base structure according to embodiments described herein.
Detailed Description
Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. In the following description of the drawings, like reference numerals refer to like parts. Only the differences with respect to the individual embodiments are described. Each example is provided by way of explanation of the disclosure, and is not intended as a limitation of the disclosure. In addition, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the specification include such modifications and variations.
Fig. 1 is a schematic cross-sectional view of a magnetic levitation system 100 according to embodiments described herein. The magnetic levitation system 100 comprises a base structure 20 defining a transport track and a carrier 10 movable along the transport track in a transport direction T, typically a substantially horizontal direction. During transport, the carrier 10 is held in a carrier transport space 55, the carrier transport space 55 being at least partially shown as a shaded area in fig. 1. The carrier transport space 55 may be a space arranged at least partially above the base structure 20.
The base structure 20 extends in a transport direction T (typically a horizontal direction perpendicular to the plane of the cross-section depicted in fig. 1). As used herein, "lateral direction L" may refer to a horizontal direction transverse to the transport direction T (in particular perpendicular to the transport direction T). In fig. 1, the lateral direction L corresponds to the left-right direction. Typically, during transport of the carrier in the transport direction T along the base structure 20, the carrier is held and stabilized at a predetermined lateral position in the lateral direction L.
In some embodiments described herein, the carrier has a substantially vertical orientation during carrier transport. In other words, the carrier may be oriented such that the major surface of the carrier is substantially vertical (vertical +/-10 °) during carrier transport, as schematically depicted in fig. 1. Thus, the carrier may hold the substrate 11 in a substantially vertical orientation during carrier transport. However, embodiments described herein are not limited to a substantially vertical orientation of the carrier during transport, and the carrier may instead have a substantially horizontal orientation during carrier transport and be configured for horizontal substrate transport and processing.
The magnetic levitation system 100 described herein may be a carrier transport system configured for holding and transporting carriers in a vacuum environment, in particular in a vacuum chamber 101 or in a vacuum system comprising a plurality of vacuum chambers arranged adjacent to each other, e.g. in a linear or 2-dimensional array. In particular, the magnetic levitation system 100 may be part of a vacuum processing system, in particular a vacuum deposition system configured for depositing a material on a substrate carried by a carrier.
As used herein, a "carrier" may be understood as a transport device configured for transporting objects, in particular a substrate 11 to be coated, through a vacuum environment. The carrier may comprise a carrier body and a holding device, such as a mechanical, electrostatic or magnetic clamping device, configured for holding the substrate at a substrate supporting surface of the carrier body. The carrier 10 may be configured to carry a large area substrate, i.e. having 1m 2 Or more, in particular 5m 2 Or larger or even 8m 2 Or larger sized substrates. Transporting and holding large and heavy carriers with magnetic levitation systems is challenging.
As used herein, a "magnetic levitation system" may be understood as a carrier transport system configured to hold at least a portion of the weight of a carrier or the entire weight of a carrier by magnetic force. In particular, the levitation magnets of the magnetic levitation system generate a levitation force F of the carrier acting on the carrier in a vertical direction V V . For example, the carrier may be kept in a floating state relative to the base structure 20 during transport along the transport track.
The base structure 20 is typically a fixed structure along which the carrier 10 is movable. In some embodiments, the base structure 20 comprises a rail or track, wherein the levitated magnet arrangement may be provided at regular intervals at the rail or track. For example, the base structure may extend from a first vacuum chamber, in which the substrates may be loaded on the carrier, to one or more second vacuum chambers, in which deposition sources for coating the substrates are arranged. The carrier can typically be transported along the base structure with a drive unit, e.g. a linear motor.
The magnetic levitation system 100 described herein further comprises means for generating a vehicle levitation force F acting on the vehicle 10 in a vertical direction V V The levitation magnet arrangement 30. The carrier may be held in a levitated state by a levitating magnet arrangement 30, wherein the weight of the carrier is acted upon bySuspension force of carrier on carrier F V Is magnetically carried.
In the embodiments described herein, the levitation magnet arrangement 30 can generate not only a vehicle levitation force F acting on the vehicle in the vertical direction V V And may also generate a (first) lateral force component F L1 I.e. the net magnetic force generated by the levitating magnet arrangement and acting on the carrier in the lateral direction L. In some embodiments, a first lateral force component F exerted on the carrier by the levitation magnet arrangement 30 L1 May depend on the lateral carrier position, i.e. on the position of the carrier in the lateral direction L relative to the base structure 20.
There may be a risk that the carrier leaves a predetermined lateral position with respect to the base structure 20 in the lateral direction L, in particular at the carrier levitation force F V Without active control and/or without providing actively controlled magnetic lateral stabilization to the carrier. For example, the carrier 10 may drift laterally away from a predetermined lateral position, leading to undesired contact between the carrier and the base structure or even to suspension failure. In particular, the first lateral force component F L1 (i.e., the net magnetic force that may be exerted on the carrier in the lateral direction L by the levitating magnet arrangement 30) may urge the carrier in the lateral direction L away from the predetermined lateral position.
According to embodiments described herein, a predetermined lateral position of the carrier may be maintained as follows, and smooth and reliable carrier transport is provided. The magnetic levitation system 100 comprises at least one mechanical contact element 40, the at least one mechanical contact element 40 being configured to exert a lateral contact force F on the carrier C . Lateral contact force F exerted on the carrier by at least one mechanical contact element 40 C Counteracting a first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 . The carrier can be stably held at a predetermined lateral position when lateral forces exerted on the carrier by various sources, in particular by the suspension magnet arrangement and the mechanical contact element, counteract each other. In particular, the net magnetic force exerted on the carrier in the lateral direction L may be counteracted by the net mechanical force exerted on the carrier by the at least one mechanical contact element 40 such thatThe total force acting on the carrier in the lateral direction is made zero. Therefore, the lateral position of the carrier can be stably maintained during the transportation of the carrier.
The at least one mechanical contact element 40 may be laterally contacting the carrier during carrier transport to continuously apply a lateral contact force F on the carrier 10 in a lateral direction L (e.g., to the right in fig. 1) C The element of (1). For example, the at least one mechanical contact element 40 may be mounted laterally with respect to the carrier transport space 55, such that a pressure may be exerted on the lateral face 12 of the carrier with the at least one mechanical contact element 40, as schematically depicted in fig. 1.
According to embodiments described herein, the carrier suspension force F of the suspension carrier V Is the magnetic force generated by the levitating magnet arrangement 30. In addition, the lateral contact force F is a mechanical force C Is applied on the carrier in the lateral direction L by at least one mechanical contact element 40 for stabilizing and holding the carrier at a predetermined lateral position. A first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 May be counteracted by at least one mechanical contact element 40. Thus, no additional magnetic side stabilizing means may be needed to stabilize (actively and/or passively) the carrier at the predetermined lateral position in the lateral direction L. However, in some implementations, a magnetic lateral stabilization device may optionally be additionally provided.
According to some embodiments, which can be combined with other embodiments described herein, the carrier levitation force F V Generated solely by passive magnets, or carrier levitation forces F V May be purely passive. In other words, the levitation magnets of the levitation magnet arrangement 30 can be passive elements, in particular permanent magnets. In particular, the vehicle levitation force F can be generated without the use of actively controlled magnetic bearings V . Generating the vehicle levitation force F in a purely passive manner (i.e., without active control) V Has the advantage that no complex control mechanism for actively controlling the levitation force of the carrier is required. In addition, a power source for supplying current to the actuator of the active magnetic bearing may not be required. In addition, purely passive levitating magnets (particularly permanent magnets) are simple, reliable and easy to maintain. Quilt with quiltFirst lateral force component F exerted on the carrier by the arrangement of the dynamically levitated magnets L1 Can be counteracted by the at least one mechanical contact element 40 such that a reliable carrier transport can be ensured and a predetermined lateral position of the carrier can be maintained.
According to some embodiments, which can be combined with other embodiments described herein, the levitation magnet arrangement 30 comprises a central magnet 35 provided at one of the carrier and the base structure and a first and a second lateral magnet 31, 32 provided at the other of the carrier and the base structure. The central magnet 35 is arranged at a position between the first side magnet 31 and the second side magnet 32 in the lateral direction L during carrier transport.
In some implementations, the central magnet 35 may be disposed at an off-center position between the first and second lateral magnets 31, 32 in a lateral position during carrier transport, i.e., not at a midpoint position between the first and second lateral magnets 31, 32. For example, the central magnet 35 may be arranged at an eccentric position of 0.1mm or more, in particular 0.2mm or more or even 0.4mm or more from the central position between the first and second lateral magnets 31, 32. On the other hand, the off-axis position of the central magnet 35 is preferably not more than 2mm, in particular not more than 1mm, from the central position. Arranging the central magnet 35 in an off-center position during carrier transport may result in a net lateral magnetic force exerted on the central magnet 35 by the first and second lateral magnets, referred to herein as the first lateral force component F L1 . The first lateral force component may be counteracted by at least one mechanical contact element. A predetermined lateral carrier position can be maintained.
In the exemplary embodiment depicted in fig. 1, and in further embodiments described herein, the central magnet 35 is provided at the carrier 10, and the first and second lateral magnets 31, 32 are provided at the base structure 20. For example, a first lateral magnet 31 and a second lateral magnet 32 are provided at the base structure 20 and define a space therebetween for a central magnet 35 of the carrier, as schematically depicted in fig. 1.
However, it should be understood that the first and second lateral magnets may also be arranged at the carrier 10 and define a space there between for a central magnet, which is provided at the base structure. The latter arrangement of levitation magnets is similar to that depicted in the figures of the present application.
In fig. 1, the central magnet 35 is arranged at the bottom end of the carrier and projects downwards into the space between the first 31 and second 32 lateral magnets of the base during transport of the carrier. Instead, a central magnet may be arranged at the base structure and protrude upwards into the space between the first and second lateral magnets, which are then provided at the carrier. However, the central magnet 35 is not necessarily arranged at the bottom end of the carrier, and may be arranged at any height at the carrier, for example at a height of 10cm or more, in particular 30cm or more above the bottom end of the carrier. For example, two magnets of the central magnet may be arranged on opposite lateral faces of the carrier, and each of the central magnets may interact with one of the lateral magnets arranged at substantially the same height at the base structure.
In some implementations, the central magnet 35, the first lateral magnet 31, and the second lateral magnet 32 are permanent magnets having a first magnetic pole (north or south) and a second magnetic pole of opposite polarity (south or north), respectively. The central magnet 35 may have a first orientation in which a first pole (e.g., north pole) of the central magnet 35 is disposed above a second pole (e.g., south pole) of the central magnet. The first and second lateral magnets 31, 32 have a second orientation opposite the first orientation. In other words, the second magnetic poles (e.g., south poles) of the first and second side magnets may be disposed above the first magnetic poles (e.g., north poles) of the first and second side magnets. Thus, a vertically acting levitation force for levitating the carrier can be generated.
In the exemplary arrangement shown in fig. 1, the first poles of the first and second lateral magnets are each oriented downwardly, while the first pole of the central magnet is oriented upwardly (the first poles are each correspondingly shaded)Depicted). Thus, downward movement of the carrier 10 is accompanied by the first pole of the center magnet approaching the first poles of the first and second side magnets, resulting in an increased upwardly directed carrier levitation force F V 。
Fig. 2A and 2B are schematic diagrams for illustrating the operation of a magnetic levitation system according to embodiments described herein. As schematically depicted in fig. 2A and 2B, a central magnet 35 (provided at one of the carrier and the base) is arranged in the lateral direction L in the space between the first lateral magnet 31 and the second lateral magnet 32 (provided at the other of the carrier and the base).
As schematically depicted in fig. 2A and 2B, sagging of the carrier in the vertical direction V results in an increased carrier levitation force F exerted on the carrier in an upward direction by the levitation magnet arrangement 30 in the vertical direction V V . This is because the sagging of the carrier is accompanied by the fact that the poles of the same polarity of the central magnet 35 on the one hand and the first and second lateral magnets on the other hand are close to each other. Thus, the carrier passes the vertically acting carrier levitation force F generated by the central magnet 35 laterally arranged between the first and second lateral magnets V And (4) suspending. The downwardly pointing arrows in fig. 2A and 2B show the downwardly pointing vertical forces acting on the first and second lateral magnets of the base structure during levitation of the carrier, the sum of which and the carrier levitation force F acting on the carrier in the upward direction V With the same absolute value.
In fig. 2A, the center magnet 35 is arranged at a center position between the first side magnet 31 and the second side magnet 32. Thus, the lateral forces exerted on the central magnet 35 by the first and second lateral magnets 31, 32 cancel each other out (see the laterally directed arrows on both sides of the carrier 10 in fig. 2A) such that the levitation magnet arrangement 30 does not exert a first lateral force component F on the carrier L1 。
However, the carrier condition depicted in fig. 2A is unstable, and a slight displacement of the carrier in the lateral direction L will result in a net lateral magnetic force exerted on the carrier by the levitation magnet arrangement 30, resulting in a drifting movement of the lateral carrier due to the fact that the carrier has left the equilibrium position depicted in fig. 2A. Therefore, a side stabilizing device (not depicted in fig. 2A) is reasonable, which ensures that the center position of the center magnet 35 between the first side magnet 31 and the second side magnet 32 can be continuously maintained. The lateral stabilization device can be, for example, an actively controlled magnetic lateral stabilization device or a mechanical lateral stabilization device, which acts on the carrier from both sides. For example, displacement of the carrier toward the right and left sides of fig. 2A may be prevented by adding mechanical contact elements (e.g., rotatable rollers) on both sides of the carrier. Thus, the carrier position at the equilibrium position depicted in fig. 2A can be maintained. However, during transport of the carrier, the carrier will come into contact with the mechanical contact elements on both sides of the carrier, so that there is a risk of particles being generated due to friction on both sides of the carrier.
On the other hand, in fig. 2B, the center magnet 35 is arranged at an eccentric position between the first side magnet 31 and the second side magnet 32. That is, in the exemplary embodiment of fig. 2B, the carrier is held at a lateral position closer to the first lateral magnet 31 than the second lateral magnet 32. Thus, the lateral force exerted on the central magnet 35 by the first lateral magnet 31 is greater than the lateral force exerted on the central magnet 35 by the second lateral magnet 32 (see the sideways directed arrows on both sides of the carrier in fig. 2B)), so that the levitation magnet arrangement 30 positively exerts a first lateral force component F on the carrier L1 . In fig. 2B, a first lateral force component F attracting the carrier 10 to the left is exerted on the carrier by the suspension magnet arrangement 30 L1 。
A first lateral force component F exerted on the carrier 10 in the lateral direction L by the levitation magnet arrangement 30 L1 Is counteracted by at least one mechanical contact element 40, the at least one mechanical contact element 40 being in a lateral direction with a lateral contact force F C Presses against one lateral face 12 of the carrier, thereby counteracting the first lateral force component F exerted by the levitation magnet arrangement 30 L1 So that the total lateral force acting on the carrier in the lateral direction L is zero. Therefore, the central magnet 35 may be continuously maintained at an eccentric position between the first and second lateral magnets 31 and 32 shown in fig. 2B. Can ensure stable loadingThe body is transported and the carrier can be continuously maintained at a predetermined lateral position.
Since the central magnet 35 is continuously attracted towards only one of the first and second lateral magnets due to the eccentric position of the carrier, the carrier 10 maintains continuous contact with the at least one mechanical contact element 40 only at one side of the carrier during carrier transport. At the eccentric position of the central magnet 35, the lateral forces acting on the carrier from the different sources cancel each other out, so that the eccentric position corresponds to the equilibrium position of the carrier.
According to the embodiments described herein, during carrier transport, the carrier 10 is in mechanical contact only on one side thereof, i.e. with at least one mechanical contact element 40 which may be arranged on only one side of the carrier transport space. Mechanical contact on both sides of the carrier may be reduced or avoided such that increased particle generation due to alternating mechanical contact of the carrier on both sides thereof (e.g. mechanical contact caused by mechanical contact elements on both sides of the carrier) may be prevented.
In addition, it can be ensured that the at least one mechanical contact element 40 acts on the carrier from one side with a substantially constant and predetermined pressure during transport of the carrier. This is different from the embodiment depicted in fig. 2A, in which the central magnet 35 is arranged at an unstable central position between the first and second lateral magnets, thereby causing a varying stabilizing force from both sides of the carrier, resulting in undefined particle generation due to varying frictional forces.
Returning to fig. 1, according to some embodiments described herein, the at least one mechanical contact element 40 may comprise a plurality of rotatable rollers 41 mounted at the base structure. A plurality of rotatable rollers 41 may be distributed along the transport track defined by the base structure. For example, a plurality of rotatable rollers 41 may be arranged at regular intervals at the base structure 20 in the transport direction T, such that at least two rotatable rollers, in particular three or more rotatable rollers, are simultaneously in contact with the lateral faces 12 of the carrier during transport of the carrier. For example, the distance in the transport direction between two adjacent rotatable rollers of the plurality of rotatable rollers 41 may be 15cm or more, in particular 30cm or more and/or 2m or less, respectively.
According to an embodiment, the carrier 10 is typically in continuous contact with at least two rotatable rollers that can be continuously pressed against one lateral face 12 of the carrier during transport of the carrier in the transport direction T. The rolling friction between the rotatable roller and the carrier is typically smaller than the sliding friction, so that a mechanical contact element comprising a plurality of rollers is beneficial in reducing particles compared to other mechanical contact elements.
The plurality of rotatable rollers 41 may be mounted laterally with respect to the carrier transport space 55. In particular, the plurality of rotatable rollers 41 may be configured to exert pressure on the lateral faces 12 of the carrier during carrier transport, as schematically depicted in fig. 1. The pressure exerted by a rotatable roller of the plurality of rotatable rollers 41 on the lateral face 12 of the carrier may correspond to a lateral contact force F exerted by the at least one mechanical contact element 40 on the carrier C 。
In some embodiments, the plurality of rotatable rollers are mounted on only one side of the carrier transport space laterally with respect to the carrier transport space and are configured to apply pressure on only one lateral face 12 of the carrier. In particular, during transport of the carrier in the transport direction T, the carrier may be in continuous mechanical contact with the mechanical contact elements mounted at the base structure on only one lateral face 12 of the carrier. For example, in embodiments where the carrier is held at an off-center lateral position relative to the base, the first lateral force component F applied by the levitating magnet arrangement L1 It is sufficient to act continuously towards one side surface such that a mechanical counter pressure is exerted on only one lateral surface 12 of the carrier. In another embodiment where the carrier is held in a central lateral position relative to the base, it may be reasonable to add mechanical contact elements on both sides of the carrier in order to counteract the magnetic lateral forces exerted to the right and to the left by the levitating magnet arrangement.
Thus, according to some embodiments, which can be combined with other embodiments described herein, the at least one mechanical contact element 40 is mounted on only one side of the carrier transportation space 55 laterally with respect to the carrier transportation space 55 and is configured to exert a continuous pressure on only one lateral face 12 of the carrier during carrier transportation.
In this respect, it should be noted that a mechanical stop (such as the mechanical stop 45 depicted in fig. 4) may still be provided on the other side of the carrier transport space 55 opposite the at least one mechanical contact element 40. However, such mechanical stops 45 are only used in special cases to prevent the carrier from drifting in the opposite lateral direction and are therefore not considered herein as mechanical contact elements. That is, the carrier is not in contact with the mechanical stop 45 during normal operation of the magnetic levitation system, whereas the carrier 10 is intended to be in substantially continuous mechanical contact with the at least one mechanical contact element 40 during normal operation of the magnetic levitation system.
Fig. 3 shows a schematic cross-sectional view of a magnetic levitation system 200 and a base structure 20 according to embodiments described herein. The magnetic levitation system 200 and the base structure 20 of fig. 3 comprise substantially the same features as the previous embodiments, so that reference can be made to the above description, which is not repeated here. Only the differences are described below.
The magnetic levitation system 200 comprises a base structure 20 and a carrier 10 movable in a floating state along the base structure 20 in a transport direction. In addition, a suspension force F for generating a carrier acting on the carrier in the vertical direction V is provided V In a levitating magnet arrangement 30 that levitates the carrier 10.
The levitation magnet arrangement 30 is shown in fig. 3 to be in one cross-sectional plane. It is to be understood that the arrangement of the levitation magnet arrangement 30 is similar in other cross-sectional planes extending perpendicular to the transport direction T. For example, the levitation magnet arrangement 30 may comprise a plurality of first and second lateral magnets 31, 32 arranged spaced apart from each other at the base in the transport direction. Instead, the first and second lateral magnets 31, 32 may extend continuously along the base structure 20 in the transport direction.
The magnetic levitation system 200 further comprises at least one mechanical contact element 40, the at least one mechanical contact element 40 being configured to exert a lateral contact force F on the carrier C To counteract a first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 . In this connection, reference is made toThe above description is not repeated herein.
During carrier transport, lateral contact force F C May be applied on only one lateral face of the carrier to counteract the first lateral force component F applied by the levitating magnet arrangement 30 L1 。
In some embodiments, the magnetic levitation system may further comprise a drive unit, in particular a linear motor 50, for moving the carrier along the base structure 20 in the transport direction. The linear motor 50 may be arranged laterally with respect to the carrier transport space 55. For example, as schematically depicted in fig. 3, the linear motor 50 may comprise an actuator arranged at the base structure 20, in particular laterally with respect to the carrier transport space 55. The actuator may be configured to magnetically interact with a counterpart magnet 52 arranged at the lateral face 12 of the carrier. In some embodiments, the linear motor 50 may not only exert a driving force on the carrier acting in the transport direction T to move the carrier, but may also exert a lateral force component, referred to herein as "second lateral force component F L2 ”。
In some embodiments, which can be combined with other embodiments described herein, the at least one mechanical contact element 40 is configured to exert a lateral contact force F on the carrier C To counteract a first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 And a second lateral force component F exerted by the linear motor 50 on the carrier L2 。
In other words, both the linear motor 50 and the levitating magnet arrangement 30 may exert a lateral magnetic force on the carrier in the lateral direction L. In fig. 3, a first lateral force component F applied by the levitation magnet arrangement 30 L1 And a second lateral force component F exerted by the linear motor 50 L2 Acting in the same lateral direction, pushing the carrier to the right in fig. 3, as schematically indicated by the respective arrows. The two magnetic lateral forces can be counteracted by at least one mechanical contact element 40 exerting a lateral contact force F on the carrier in opposite lateral directions by the at least one mechanical contact element 40 C . Thus, the carrier can be held and stabilized in a predetermined lateral position, which is the off-center position of fig. 3Location. An "off-center position" of a carrier as used herein relates to a lateral position of the carrier, wherein the central magnet 35 of the levitating magnet arrangement 30 is intentionally not arranged in an intermediate position between the first lateral magnet 31 and the second lateral magnet 32, thereby ensuring a first lateral force component F L1 Always acting in the same lateral direction.
In some embodiments, the linear motor 50 may be a synchronous linear motor or an asynchronous linear motor having a magnetic actuator coil disposed at the base structure 20. In some embodiments, the mating magnet 52 may comprise a permanent magnet arranged at the lateral face 12 of the carrier, for example an array of permanent magnets of alternating polarity facing the actuator. The magnetic interaction between the actuator of the linear motor and the counter magnet 52 may cause a lateral attractive force between the carrier and the base structure, as schematically illustrated by the respective arrows of fig. 3.
Thus, a smooth and reliable transport of the carrier in the transport direction can be ensured, so that the carrier 10 is continuously maintained in a predetermined lateral position and is continuously held in a floating state at a predetermined vertical position above the bottom rail of the base structure 20.
Fig. 4 shows a schematic cross-sectional view of a magnetic levitation system 300 and a base structure 20 according to embodiments described herein. The magnetic levitation system 300 and the base structure 20 of fig. 4 comprise substantially the same features as the previous embodiments, so that reference can be made to the above description, which is not repeated here. Only the differences are described below.
The magnetic levitation system 300 comprises a base structure 20 and a carrier 10 movable in a floating state along the base structure 20 in a transport direction. In addition, a suspension force F for generating a suspension force F for suspending the carrier 10 is provided V The levitation magnet arrangement 30. In addition, at least one mechanical contact element 40 is provided, which at least one mechanical contact element 40 is configured to exert a lateral contact force F on the lateral face 12 of the carrier C 。
Lateral contact force F exerted by at least one mechanical contact element 40 C And other lateral forces acting on the carrier (e.g., a first lateral force component F applied by the levitating magnet arrangement 30 L1 And/or the second lateral force component F exerted by the linear motor 50 L2 ) Cancel each other out. Thus, the carrier 10 may be kept at a predetermined lateral position of the equilibrium position during transport along the base structure 20, which may be an off-center position.
During carrier transport, lateral contact force F C May be applied on only one lateral face 12 of the carrier, i.e. on the left side surface of the carrier of fig. 4.
As shown in fig. 4, the at least one mechanical contact element 40 may comprise two or more contact elements, in particular a plurality of rotatable rollers 41, wherein at least two rollers may be arranged on top of each other in the vertical direction V. For example, a first roller of the plurality of rotatable rollers 41 may be arranged at a first height to roll on a first roller track provided on the lateral face 12 of the carrier, and a second roller of the plurality of rotatable rollers 41 may be arranged at a second height to roll on a second roller track provided at a different height on the lateral face 12 of the carrier. The first and second rollers need not be arranged in the same cross-sectional plane, but may be offset in the transport direction.
In some embodiments, which may be combined with other embodiments described herein, at least one roller may be arranged at the base structure at a first height below the linear motor 50 and at least one roller may be arranged at the base structure at a second height above the linear motor 50. Arranging two or more of the plurality of rotatable rollers 41 at different heights is beneficial because the torque exerted on the carrier by at least one of the linear motor 50 and the levitation magnet arrangement 30 can be absorbed by two rollers that can contact the carrier at different heights on the same plane. In particular, by providing at least two of the rotatable rollers at different heights, carrier tilting may be reduced or prevented and an upright carrier position during carrier transport may be ensured.
Depending on the carrier position along the base structure 20 in the transport direction, the present magnetic force exerted on the carrier by the linear motor 50 and/or by the levitation magnet arrangement 30 may be counteracted by several of the plurality of rotatable rollers 41 being in lateral contact with the carrier at the same time. In other words, the lateral magnetic force exerted on the carrier may be counteracted by several rollers, which may optionally be in contact with the carrier at different heights.
The plurality of rotatable rollers 41 may be provided on only one side of the carrier. Optionally, a mechanical stop 45 can be provided on the other side of the carrier, which mechanical stop 45 acts as a limit stop in the special case of a carrier leaving a predetermined lateral position to the right. However, the mechanical stop does not contact the carrier during normal operation of the system, and is therefore not considered a mechanical contact element as described herein.
Fig. 5 shows a schematic cross-sectional view of a magnetic levitation system 400 and a base structure 20 according to embodiments described herein. The magnetic levitation system 400 and the base structure 20 of fig. 5 comprise substantially the same features as the previous embodiments, so that reference can be made to the above description, which is not repeated here.
As schematically depicted in fig. 5, the upper portion of the carrier may be stabilized in the lateral direction L via a side stabilizing device 61 (e.g., a magnetic side stabilizing device configured to interact with the upper portion of the carrier during carrier transport). In some embodiments, the side stabilizer 61 is provided at the top rail 60 of the base structure 20 and is configured to face the upper portion of the carrier. The lateral stabilizing means 61 prevents the carrier from tilting to the left and/or to the right. In some implementations, the lateral stabilization device 61 is a magnetic lateral stabilization device configured to interact with a lateral stabilization counterpart magnet 62 disposed at an upper portion of the carrier.
In some embodiments, which can be combined with other embodiments described herein, the base structure 20 comprises a top rail 60 formed into a U-shaped profile into which an upper portion of the carrier 10 extends at least partially. The U-shaped profile may provide an empty space above the upper end of the carrier so that the upper end of the carrier does not contact the U-shaped profile in case of thermal expansion of the carrier. In particular, the height of the support may vary slightly depending on the temperature of the support. While the height of the levitating magnet arrangement 30, which acts as a magnetic spring, may set the vertical position of the lower portion of the carrier, the U-shaped profile may allow the top end of the carrier to expand upward. Contact of the upper end of the carrier with the base structure is avoided and there is no need to adjust the gap between the base and the carrier precisely. Instead, the base structure may simply be configured to provide a space above and below the carrier when the carrier is in a predetermined vertical position. Therefore, thermal deformation of the carrier does not cause a problem, unlike other magnetic levitation systems.
When the side stabilising means 61 are arranged at the top rail 60, the upper part of the carrier can be guided reliably along the base structure 20 while it is stabilised in the lateral direction L.
Thus, according to one aspect described herein, which may be the subject of the independent claims, a magnetic levitation system is provided. The magnetic levitation system comprises a base structure having a top rail formed into a substantially U-shaped profile, such that an upper portion of the carrier being substantially vertically oriented may at least partially protrude into the U-shaped profile during transport of the carrier along the base structure. The magnetic levitation system further comprises a plurality of levitation magnets, in particular a plurality of permanent magnets, for generating a levitation force for levitating the carrier. The levitation magnets are typically not arranged at the top rail, but at the bottom rail of the base structure, which is arranged below the top rail. The U-shaped profile of the top rail allows the carrier to thermally expand in the vertical direction without the risk of the carrier contacting the top rail. The magnetic levitation system can include additional features of any of the magnetic levitation systems described herein.
In some embodiments, which can be combined with other embodiments described herein, the base structure 20 includes a bottom rail into which a lower portion of the carrier extends and/or a top rail 60 into which an upper portion of the carrier extends. The levitation magnet arrangement 30, the linear motor 50 and/or the at least one mechanical contact element 40 may be provided at the bottom rail. Optionally, a side stabilizer 61 may be provided at the top rail 60. The bottom and top rails 60 may be spaced 1m or more apart so that carriers 10 having a vertical dimension of 1m or more may be transported in the carrier transport space 55 between the bottom and top rails.
According to one aspect described herein, there is provided a base structure 20 of a magnetic levitation system for transporting a vehicle, for example, as depicted in fig. 5. The base structure 20 may include some or all of the features of the base structure previously described.
In one embodiment, the base structure 20 defines a transport track for the carrier 10 and comprises first 31 and second 32 lateral magnets of the levitating magnet arrangement 30 defining a space there between for a central magnet 35 provided at the carrier 10. In addition, at least one mechanical contact element 40, in particular a plurality of rotatable rollers 41, is provided at the base structure 20, in particular only on one side of the carrier transport space. The at least one mechanical contact element 40 is configured to exert a lateral contact force F on the carrier C To counteract a first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 And/or to counteract a second lateral force component F exerted by the linear motor 50 on the carrier L2 。
According to one aspect described herein, there is provided a base structure of a magnetic levitation system for transporting a vehicle. The base structure 20 defines a transport track for the carrier 10 and comprises a first 31 and a second 32 lateral magnet of the levitating magnet arrangement 30, which between them define a space for a central magnet 35 provided at the carrier 10 in the lateral direction. Optionally, the at least one mechanical contact element 40 is mounted at the base such that the carrier suspended by the suspending magnet arrangement 30 and laterally contacting the at least one mechanical contact element 40 is arranged at an eccentric position in the space between the first lateral magnet 31 and the second lateral magnet 32. Optionally, the linear motor 50 is arranged at the base, in particular laterally with respect to the carrier transport space.
At least one mechanical contact element 40, in particular a plurality of rotatable rollers 41, may be provided at the base structure 20. The at least one mechanical contact element 40 is configured to exert a lateral contact force F on the carrier C To counteract a first lateral force component F exerted on the carrier by the levitating magnet arrangement 30 L1 And/or to counteract a second lateral force component F exerted by the linear motor 50 on the carrier L2 。
According to one aspect described herein, there is provided a magnetic levitation system for transporting a vehicle. The magnetic levitation system comprises a base structure 20 and a carrier 10 movable along the base structure in a carrier transport space 55. The levitation magnet arrangement 30 comprises a central magnet 35 provided at one of the carrier and base structure and a first and a second lateral magnet 31, 32 provided at the other of the carrier and base structure, the central magnet 35 being arranged between the first and second lateral magnets in the lateral direction L during carrier transport, in particular in an off-center position. The center magnet 35, the first side magnet 31, and the second side magnet 32 are permanent magnets having a first magnetic pole and a second magnetic pole, respectively. The central magnet 35 has a first orientation in which a first pole of the central magnet 35 is disposed above a second pole of the central magnet, and the first and second lateral magnets 31, 32 have a second orientation opposite the first orientation. Further embodiments relate to a base structure and a carrier of the magnetic levitation system.
Fig. 6 shows a schematic front view of a carrier 10 according to embodiments described herein. The carrier is configured to transport an object, such as a substrate 11, through a vacuum environment. The carrier 10 may comprise holding means, such as electrostatic, magnetic or mechanical clamping means, configured to hold the substrate 11 at a holding surface of the carrier.
The central magnet 35 of the levitation magnet arrangement 30 can be provided at the carrier, in particular at the bottom end of the carrier. The central magnet 35 may be configured to protrude into the space between the first and second lateral magnets 31, 32 of the levitation magnet arrangement arranged at the base structure 20.
The carrier 10 may comprise a counterpart magnet 52 at its lateral face 12, the counterpart magnet 52 being configured to magnetically interact with an actuator of the linear motor 50 to move the carrier in the transport direction T. The mating magnet 52 may comprise a magnetic material, for example a track made of ferromagnetic material or an array of permanent magnets disposed at the lateral face 12 of the carrier.
The carrier 10 may comprise one or more roller tracks 42, on which roller tracks 42 a plurality of rotatable rollers 41 of at least one mechanical contact element 40 may roll toExerting a lateral contact force F on the carrier during transport of the carrier C . In some embodiments, the carrier 10 may include a single roller track extending in the transport direction T from a front end of the carrier to a rear end of the carrier. In some embodiments, the carrier 10 may comprise at least two roller tracks extending from a front end of the carrier to a rear end of the carrier, respectively, in the transport direction. In particular, the first roller track may be disposed above the mating magnet 52 in the vertical direction V, and the second roller track may be disposed below the mating magnet 52 in the vertical direction V. The one or more roller tracks may extend substantially along the lateral faces 12 of the carrier in the transport direction.
Fig. 7 is a flow chart illustrating a method of transporting a vehicle 10 along a base structure, in particular a method of transporting a vehicle 10 along a base structure using the magnetic levitation system of any of the embodiments described herein.
In block 710, the carrier is levitated relative to the base structure using the levitating magnet arrangement 30. During levitation, the carrier is held at a predetermined lateral position, wherein the levitating magnet arrangement 30 exerts a first lateral force component F on the carrier L1 . First lateral force component F L1 Is used to exert a lateral contact force F on the carrier C Is offset by the at least one mechanical contact element 40. Optionally, during carrier transport, the first lateral force component F L1 Continuously in the same lateral direction.
Lateral contact force F C May be applied on only one lateral face 12 of the carrier. In particular, during transport of the carrier, no lateral contact force may be applied on the lateral face of the carrier opposite to only one lateral face 12. In particular, lateral forces may be exerted on only one lateral face 12 of the carrier via a plurality of rotatable rollers 41 exerting pressure during carrier transport.
In some embodiments, the carrier may be suspended solely by the passive magnet. In particular, the levitation magnet arrangement 30 may include only permanent magnets. More specifically, in some embodiments, the magnetic levitation system may not include any actively controlled magnetic bearings. The complexity of the system can be reduced and a magnetic levitation system which is easy to maintain is provided.
In some embodiments, which can be combined with other embodiments described herein, the levitation magnet arrangement 30 includes a central magnet 35 disposed at one of the carrier and the base structure and first and second lateral magnets 31, 32 disposed at the other of the carrier and the base structure.
In block 710, the central magnet 35 may be held (particularly throughout carrier transport) at an off-center position between the first and second lateral magnets 31, 32 in the lateral direction L such that the first lateral force component F L1 The center magnet 35 is continuously pushed in the lateral direction L toward one of the first lateral magnet 31 and the second lateral magnet 32.
In optional block 720, the carrier is transported in a vacuum environment along a transport track defined by the base structure into a vacuum deposition chamber while the carrier is maintained in a floating state.
In optional block 730, a material is deposited on a substrate carried by a carrier disposed at a processing location in a vacuum deposition chamber. During deposition, the carrier may or may not be held in a floating state by a magnetic levitation system.
The material may be deposited on the substrate in a vacuum deposition chamber. In particular, the magnetic levitation system according to embodiments described herein may be part of a vacuum deposition system for depositing one or more materials (in particular at least one or more of an oxide layer, a metal layer and an organic material layer) on a substrate, for example with a sputtering source, a chemical vapor deposition source or an evaporation source.
Embodiments described herein further relate to vacuum deposition systems. The vacuum deposition system includes: a vacuum chamber; a magnetic levitation system according to any embodiment described herein for magnetically levitating a carrier and transporting the carrier in a vacuum deposition system; and a deposition source configured for depositing a material, for example, an OLED material or a metal, on a substrate carried by the carrier.
Embodiments described herein may be used in transporting substrates bearing large area, glass, wafers, semiconductor substrates, masks, shields, and other objectsAt least one carrier. The carrier being able to carry a single object, e.g. of 1m 2 Or more, in particular 5m 2 Or 10m 2 Or a large area substrate of a larger size or a plurality of objects (e.g., a plurality of semiconductor wafers) of a smaller size. The carrier may comprise a holding device, such as a magnetic gripper, an electrostatic gripper or a mechanical gripping device, configured to hold the object at the carrier.
The carrier may have a substantially vertical orientation (e.g., vertical +/-10 °) during transport, or the carrier may have a substantially horizontal orientation (e.g., horizontal +/-10 °) during transport. In particular, the vacuum deposition system may be configured for vertical substrate processing or for horizontal substrate processing.
In some embodiments described herein, the lateral contact force F exerted on the carrier by the at least one mechanical contact element 40 C Is only a fraction of the absolute value of the weight force of the carrier, for example half or less of the weight force, in particular a quarter or less of the weight force, more in particular 1/5 or less of the weight force of the carrier. Thus, the frictional force exerted laterally on the carrier by the at least one mechanical contact element 40 is significantly less compared to the frictional force exerted on the carrier transported on the roller (i.e. wherein the weight of the carrier is fully mechanically supported on the roller). Thus, according to embodiments described herein, particle generation may be reduced compared to a fully mechanical transport system, while complexity and error-susceptibility may be reduced compared to a magnetic levitation system, e.g. where the carrier is held in a fully non-contact manner via a plurality of actively controlled magnetic bearings.
According to some embodiments described herein, at least two of the plurality of rotatable rollers may be in continuous contact with the carrier, thereby ensuring smooth and reliable carrier transport.
Further, the following methods are described herein:
embodiment 1: a method of transporting a carrier 10 along a base structure 20, comprising: suspending the carrier 10 with respect to the base structure 20 using a suspension magnet arrangement 30; holding the carrier at a predetermined lateral position with the levitating magnet arrangement 30 imposing a first side on the carrierComponent of force F L1 (ii) a And by applying a lateral contact force F on the carrier C At least one mechanical contact element 40 to counteract the first lateral force component F L1 。
Embodiment 2: the method of embodiment 1, wherein the lateral contact force F C Is applied on only one lateral face 12 of the carrier, in particular via a plurality of rollers which exert pressure on only one lateral face 12 of the carrier during transport of the carrier.
Embodiment 3: the method of embodiment 1 or 2, wherein the carrier is suspended only by passive magnets, in particular wherein the suspension magnet arrangement 30 comprises only permanent magnets.
Embodiment 4: the method of any of embodiments 1-3, wherein the levitation magnet arrangement 30 comprises: a central magnet 35 disposed at one of the carrier and the base structure; and a first lateral magnet 31 and a second lateral magnet 32, which are arranged at the other of the carrier and the base structure, wherein the central magnet 35 is held at an eccentric position between the first lateral magnet 31 and the second lateral magnet 32 in the lateral direction L throughout the transport of the carrier, such that a first lateral force component F L1 The central magnet 35 is continuously pushed in the lateral direction L towards the same one of the first and second lateral magnets 31, 32.
While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims (20)

1. A magnetic levitation system (100) for transporting a vehicle, comprising:
a base structure (20);
a carrier (10) which is movable along the base structure (20) in a carrier transport space (55);
a levitation magnet arrangement (30) for generating a vehicle levitation force (F) V ) (ii) a And
at least one mechanical contact element (40), the at least oneThe mechanical contact elements are configured to exert a lateral contact force (F) on the carrier C ) To counteract a first lateral force component (F) exerted on the carrier by the suspension magnet arrangement (30) L1 )。
2. Magnetic levitation system as recited in claim 1, wherein the levitation magnet arrangement (30) comprises:
a central magnet (35) disposed at one of the carrier and the base structure; and
a first lateral magnet (31) and a second lateral magnet (32) provided at the other of the carrier and the base structure, the central magnet (35) being arranged between the first lateral magnet (31) and the second lateral magnet (32) during transport of the carrier.
3. Magnetic levitation system as claimed in claim 2, wherein the central magnet (35) is arranged in an eccentric position between the first lateral magnet (31) and the second lateral magnet (32) during transport of the carrier.
4. Magnetic levitation system as claimed in claim 2, wherein the central magnet (35), the first lateral magnet (31) and the second lateral magnet (32) are permanent magnets having a first and a second magnetic pole of opposite polarity, respectively, and
the central magnet (35) has a first orientation in which the first pole of the central magnet (35) is disposed above the second pole of the central magnet, and the first and second lateral magnets (31, 32) have a second orientation opposite the first orientation.
5. Magnetic levitation system as claimed in claim 2, wherein the first and second lateral magnets (31, 32) are arranged at the base structure (20) and define a space for the central magnet (35) between them, and the central magnet (35) is arranged at the carrier (10).
6. Magnetic levitation system as recited in claim 5, wherein the central magnet (35) is arranged at the bottom end of the carrier, the central magnet protruding into the space between the first lateral magnet (31) and the second lateral magnet (32).
7. Magnetic levitation system as claimed in any one of claims 1 to 6, wherein the at least one mechanical contact element (40) comprises a plurality of rotatable rollers (41) mounted at the base structure (20).
8. Magnetic levitation system as claimed in claim 7, wherein the plurality of rotatable rollers are mounted laterally with respect to the carrier transport space (50) and are configured to exert a pressure on a lateral face (12) of the carrier (10) during transport of the carrier.
9. Magnetic levitation system as claimed in any of claims 1 to 6, wherein the at least one mechanical contact element (40) is mounted laterally on only one side of the carrier transport space with respect to the carrier transport space (50) and exerts a pressure on only one lateral face (12) of the carrier during transport of the carrier.
10. Magnetic levitation system as claimed in claim 7, wherein the at least one mechanical contact element (40) is mounted on only one side of the carrier transport space laterally with respect to the carrier transport space (50) and exerts a pressure on only one lateral face (12) of the carrier during transport of the carrier.
11. Magnetic levitation system as claimed in any one of claims 1 to 6, wherein the vehicle levitation force (F) V ) Only from passive magnets.
12. As claimed in claim 7The magnetic levitation system as described, wherein the levitation force (F) of the carrier V ) Only from passive magnets.
13. Magnetic levitation system as claimed in claim 11, wherein the central magnet (35), the first lateral magnet (31) and the second lateral magnet (32) are permanent magnets having a first magnetic pole and a second magnetic pole of opposite polarity, respectively.
14. Magnetic levitation system as claimed in claim 11, wherein the levitation magnet arrangement (30) comprises only permanent magnets.
15. Magnetic levitation system as claimed in any of claims 1-6, further comprising a linear motor (50) for moving the carrier along the base structure (20).
16. Magnetic levitation system as claimed in claim 15, wherein the linear motor (50) is arranged laterally with respect to the carrier transport space (50) and the at least one mechanical contact element (40) is configured to exert the lateral contact force (F) on the carrier C ) To counteract a first lateral force component (F) exerted on the carrier by the suspension magnet arrangement (30) L1 ) And a second lateral force component (F) exerted by the linear motor (50) on the carrier L2 )。
17. A base structure (20) of a magnetic levitation system (100) for transporting a carrier (10), characterized in that the base structure (20) defines a transport track for the carrier and comprises:
a first lateral magnet (31) and a second lateral magnet (32) of a suspension magnet arrangement (30) defining a space therebetween for a central magnet (35) provided at the carrier (10); and
at least one mechanical contact element (40) configured to exert a lateral contact force (F) on the carrier C ) To counteract byA first lateral force component (F) exerted by the levitating magnet arrangement (30) on the carrier L1 )。
18. A magnetic levitation system for transporting a vehicle, comprising:
a base structure (20);
a carrier (10) movable along the base structure in a carrier transport space (55);
a levitation magnet arrangement (30) comprising:
a central magnet (35) disposed at one of the carrier and the base structure; and
a first lateral magnet (31) and a second lateral magnet (32) provided at the other of the carrier and the base structure, the central magnet (35) being arranged between the first and second lateral magnets in a lateral direction (L) during transport of the carrier,
the central magnet (35), the first lateral magnet (31) and the second lateral magnet (32) are permanent magnets having a first magnetic pole and a second magnetic pole, respectively,
the central magnet (35) has a first orientation in which the first pole of the central magnet (35) is arranged above the second pole of the central magnet, and the first and second lateral magnets (31, 32) have a second orientation opposite to the first orientation.
19. Magnetic levitation system as claimed in claim 18, further comprising at least one mechanical contact element (40) configured to exert a lateral contact force (F) on the carrier C ) To counteract a first lateral force component (F) exerted on the carrier by the suspension magnet arrangement (30) L1 )。
20. A vacuum deposition system, comprising:
a vacuum chamber;
magnetic levitation system as claimed in any of claims 1-6 for levitation and transport of a vehicle; and
a deposition source configured to deposit a material on a substrate carried by the carrier.
CN201990001368.6U 2019-05-13 2019-05-13 Magnetic levitation system for transporting a carrier, base structure therefor and vacuum deposition system Active CN218069804U (en)

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