JP2019531590A - Apparatus for transporting a carrier, system for vacuum processing a substrate, and method for transporting a carrier in a vacuum chamber - Google Patents

Abstract

An apparatus (100) is provided for transporting a carrier (10) within a vacuum chamber (102). The apparatus (100) is provided in the transport direction (T) along the first transport path (T1), and includes a first transport system (112) including a lower track section (121) and an upper track section (122). And a path switching assembly (150) configured to move the carrier in the path switching direction (S) away from the first transport path (T1). The apparatus includes a transport position (I) having a first distance between a lower track section (121) and an upper track section (122), and a lower track section (121) and an upper track section (122). It further includes an actuator (125) for switching between a path switching position (II) having a second distance therebetween. The first distance is smaller than the second distance. Further described is a system including a path switching assembly, as well as a method for transporting a carrier in a vacuum chamber. [Selection] Figure 1A

Description

  Embodiments of the present disclosure relate to an apparatus for transporting a carrier in a vacuum chamber, a system for vacuum processing a substrate, and a method for transporting a carrier in a vacuum chamber. Embodiments of the present disclosure relate specifically to a vacuum system having a deposition apparatus and a path switching assembly configured to move a carrier between a first transport path and a second transport path. Specifically, a method for changing the carrier track in a vacuum chamber is described.

  Techniques for layer deposition on the substrate include, for example, sputter deposition, evaporation, and chemical vapor deposition (CVD). A sputter deposition process can be used to deposit a material layer, such as a layer of insulating or conductive material, on a substrate.

  An in-line configuration of processing modules can be used to deposit the multilayer stack. The in-line processing system includes a plurality of subsequent processing modules, such as deposition modules, and optionally further processing modules, such as a cleaning module and / or an etching module. Multiple processing aspects are performed in the processing module from one to the next. Thereby, multiple substrates can be processed continuously or quasi-continuously in an in-line processing system.

  The substrate can be carried by a carrier, i.e. a carrying device for carrying the substrate. The carrier is typically transported through the vacuum system using a transport system. The transport system may be configured to carry a carrier having a substrate positioned on the carrier along one or more transport paths. Within the vacuum system, at least two transport paths can be provided next to each other. For example, there are a first transport path for transporting the carrier in the forward direction and a second transport path for transporting the carrier in the return direction opposite to the forward direction.

  The transport system is configured to support and carry a carrier along a transport path and / or from one transport path (also referred to as “path switch” or “track switch”) to another transport path. It may have a roller or other support. Friction between the carrier and carrier support during carrier transport can generate particles that can adversely affect the vacuum conditions inside the vacuum system. The particles can contaminate the deposited layer on the substrate and the quality of the deposited layer can be reduced.

  In view of the above, a new apparatus for transporting a carrier in a vacuum chamber, a new system for vacuum processing a substrate, and for transporting a carrier in a vacuum chamber that reduces the generation of particles in the vacuum chamber. New methods are needed. There is also a need for new devices, systems, and methods that reduce particle production in a vacuum chamber while providing easy path switching between at least two transport paths in the vacuum chamber.

  In light of the foregoing, an apparatus for transporting a carrier in a vacuum chamber, a system for vacuum processing a substrate, and a method for transporting a carrier in a vacuum chamber are provided. Further aspects, advantages, and features of the disclosure will become apparent from the claims, the description, and the accompanying drawings.

  According to one aspect of the present disclosure, an apparatus for transporting a carrier in a vacuum chamber is provided. The apparatus includes a first transfer system provided in the transfer direction along the first transfer path. The first transport system includes a lower track section and an upper track section. The apparatus further includes a path switching assembly configured to move the carrier in a path switching direction away from the first transport path, and a lower track section and an upper track section of the first transport system. Includes an actuator for changing the distance between.

  The actuator includes: a transport position having a first distance between the lower track section and the upper track section; and a path switching position having a second distance between the lower track section and the upper track section. Can be configured to switch between. The first distance is smaller than the second distance.

  In some embodiments, the first transport system can be configured to transport the carrier in a transport direction along the first transport path in a contactless manner. The carrier may be held in a vertical orientation during transport, particularly in the carrier transport space between the upper track section and the lower track section. In particular, the first transport system can be a magnetic levitation system.

  According to another aspect of the present disclosure, a system for vacuum processing a substrate is provided. The system is disposed within a vacuum chamber and a vacuum chamber selected from the group consisting of a deposition source, a sputter source, an evaporation source, a surface treatment tool, a heating device, a cleaning device, an etching tool, and combinations thereof. Includes one or more processing tools. The system further includes an apparatus according to any of the embodiments described herein.

  According to yet another aspect of the present disclosure, a method for transporting a carrier in a vacuum chamber is provided. The method includes transporting a carrier in a transport direction along a first transport path between a lower track section and an upper track section of a first transport system, between the lower track section and the upper track section. And moving the carrier in a path switching direction that crosses the transport direction so as to leave the first transport path.

  According to yet another aspect of the present disclosure, a method for transporting a carrier in a vacuum chamber is provided. The method includes transporting a carrier in a transport direction along a first transport path, and moving the carrier to a second transport path that is offset from the first transport path in a horizontal direction. Moving the carrier includes lowering the carrier, moving the carrier in the path switching direction, and lifting the carrier.

  Embodiments are also directed to an apparatus for performing the method of the present disclosure, including an apparatus portion for performing each described method aspect. These method aspects may be performed using hardware components, using a computer programmed with appropriate software, by any combination of the two, or in any other manner. Furthermore, embodiments according to the present disclosure are also directed to methods for operating the described apparatus. The method for operating the described apparatus includes a method aspect for performing any function of the apparatus.

  In order that the above features of the present disclosure may be understood in detail, a more specific description of the present disclosure, briefly outlined above, may be obtained by reference to embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described in the following description.

FIG. 2 shows a schematic diagram of an apparatus for transporting a carrier according to embodiments described herein. FIG. 2 shows a schematic diagram of the apparatus of FIG. 1 in a path switching position. FIG. 3 shows a schematic top view of a system including an apparatus for transporting a carrier according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 6 illustrates one of the subsequent steps of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 6 illustrates one of the subsequent steps of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 4 illustrates one of various stages of a method for transporting a carrier using an apparatus according to embodiments described herein. FIG. 6 is a flow diagram for illustrating a method for transporting a carrier according to an embodiment described herein. FIG. 6 is a flow diagram for illustrating a method for transporting a carrier according to an embodiment described herein.

  Reference will now be made in detail to various embodiments of the disclosure, one or more examples of which are illustrated. Within the following description of the drawings, the same reference numbers refer to the same components. Generally, only the differences with respect to the individual embodiments are described. Each example is provided by way of explanation of the disclosure, which is not intended to limit the disclosure. Further, features illustrated and described as part of one embodiment may be used in other embodiments or used in combination with other embodiments. Thereby, yet another embodiment is created. This description is intended to include such modifications and variations.

  An apparatus for transporting a carrier within a vacuum chamber can be provided with one, two, or more transport paths. The carrier can be moved or carried along the transport path. The first transport path T1 may extend, for example, next to the second transport path T2 that is essentially parallel to the first transport path T1. The first transport path T1 and / or the second transport path T2 may extend in a transport direction T that may be essentially horizontal.

  The first transport path T1 and the second transport path T2 can be offset in the horizontal direction from each other in the path switching direction S. The distance between the first transport path T1 and the second transport path T2 in the path switching direction S can be 10 cm or more, in particular 20 cm or more and / or 100 cm or less, in particular 50 cm or less.

  The apparatus for transporting a carrier described herein can be part of a vacuum processing system, such as an inline processing system. Thereby, the substrate can be processed continuously or semi-continuously. The apparatus can be configured to move or move the carrier away from the first transport path T1 to at least one of the second transport path T2 and the processing position T3 where the substrate can be processed. Specifically, the apparatus can move the carrier laterally in the path switching direction S from the first position on the first transport path T1 to the second position away from the first track. The path switching direction S may cross the transport direction T and in particular be essentially perpendicular to the transport direction T. When a carrier is moved from one transport path to another transport path in the path switching direction S, the movement may also be referred to as “path switching” or “track switching”.

  In an embodiment, the carrier is transported in the transport direction T along the first transport path T1, and is moved to the processing position T3 in the path switching direction S so as to be away from the first transport path T1. At the processing position T3, the substrate is processed, moved to the second transport path T2 in the path switching direction S, and transported along the second transport path T2.

  The apparatus can include a transport system. The transport system may be configured to transport the carrier in a non-contact manner along the first and / or second transport path using, for example, magnetic force. In other words, the transport system cannot use mechanical force to transport the carrier. Instead, the transport system can magnetically push or attract the carrier towards a new position. As used throughout this disclosure, the terms “contactlessly” and “moving in a contactless manner” refer to the carrier moving using mechanical contact between the carrier and the transport system. Although not, it can be understood in the sense of magnetically repelling and / or magnetically attracting. In certain embodiments, there is no mechanical contact between the device and the carrier during transport along the first and / or second transport path.

  In certain embodiments, the transport system can be a magnetic levitation system. The magnetic levitation system may include an upper track and a lower track. The carrier can be transported in an essentially vertical orientation between the upper and lower tracks. The upper track may be located above the lower track. The magnet and / or drive unit of the magnetic levitation system can be placed on the upper track and / or the lower track. For example, an active magnetic unit configured to hold the carrier in a non-contact manner below the upper track may be disposed on the upper track. A drive unit configured to move the carrier along the track can then be disposed on the lower track.

  It is beneficial to transport the carrier in a non-contact manner. This is because during carrier transport, the mechanical contact between the carrier and a section of the transport system such as a roller produces a reduced number of particles. Therefore, the vacuum state in the vacuum chamber is not adversely affected by the carrier transport. The purity of the layer deposited on the substrate can be improved. This is because, inter alia, when using a transport system configured to transport in a non-contact manner, the generation of particles is minimized or even completely avoided.

  FIG. 1A is a schematic diagram of an apparatus 100 for transporting a carrier 10 in a vacuum chamber 101 in a transport position (I), according to embodiments described herein. At the transport position (I), the carrier 10 can be transported in the transport direction T along the first transport path T1. During transport in a non-contact manner, (small) gaps can be provided between the carrier and the upper track section and between the carrier and the lower track section.

  FIG. 1B is a schematic diagram of the apparatus of FIG. 1A in the path switching position (II). At the path switching position (II), the carrier 10 can be moved in the path switching direction S so as to leave the first transport path T1, for example, toward the second transport path T2. According to certain embodiments, the apparatus 100 can be part of a vacuum processing system, such as a sputter deposition system or an evaporation deposition system.

  The carrier 10 can be a substrate carrier configured to carry the substrate 11. For example, the carrier 10 may include a chucking device, such as a magnetic chuck or an electrostatic chuck for chucking the substrate 11 toward the holding surface of the carrier 10. In other embodiments, the carrier may be configured to carry different objects, such as masks or shields. The carrier 10 can be configured to hold the substrate 11 in an essentially vertical orientation. In other words, the angle between the major surface of the substrate 11 and the gravity vector is typically less than 20 degrees during the carrier 10 transport. For example, the angle between the main surface of the substrate and the gravity vector can be -10 to +10 degrees, in particular -1 to -5 degrees. A negative angle means indicating a substrate facing downward.

The carrier may be configured to carry large area substrates, particularly large area substrates for display manufacturing. In embodiments, the substrate may have a surface area to be treated that is 1 m ² or more, in particular 5 m ² or more, or even 10 m ² or more. Thus, the carrier may have a substrate holding surface having a size that is 1 m ² or more, in particular 5 m ² or more, or even 10 m ² or more. For example, the height of the carrier 10 may be 1 m or more, particularly 2 m or more, and / or the width of the carrier may be 1 m or more, particularly 2 m or more. The carrier 10 may be configured to carry the substrate in an essentially vertical orientation.

  The apparatus 100 is a first transport system 112 configured to transport the carrier 10 in the transport direction T along the first transport path T1, and in particular, transport configured to transport the carrier in a non-contact manner. Includes system. The first transport system 112 may be a first magnetic levitation system configured to transport a carrier in a non-contact manner along the first transport path T1. The first transport system 112 includes a lower track section 121 and an upper track section 122. The carrier may be transported within a carrier transport space between the lower track section 121 and the upper track section 122. The magnetic units of the first transport system 112 may be arranged in the lower track section 121 and / or the upper track section 122. For example, a plurality of dynamically controlled magnetic units can be disposed in the upper track section 122 to hold the carrier 10 in a non-contact manner below the upper track section 122.

  The apparatus 100 further includes a path switching assembly 150. The path switching assembly 150 may be configured to move the carrier in the path switching direction S away from the first transport path T1. In particular, the path switching assembly 150 may be configured to move the carrier from the first transport path T1 to the second transport path T2 in a path switching direction S that is essentially perpendicular to the transport path T. Alternatively or additionally, the path switching assembly 150 may be configured to move the carrier to a processing position T3 where the carrier is processed, eg, coated. The processing position T3 can be offset in the horizontal direction from the first and second transport paths.

  As schematically depicted in FIGS. 1A and 1B, a processing tool 105 is placed in the vacuum chamber to process the substrate 11 held by the carrier 10 when the carrier is placed in the processing position T3. Can be arranged. The processing tool 105 may be configured to deposit a coating material on the substrate.

  The apparatus 100 further includes an actuator 125 for switching between the transport position (I) depicted in FIG. 1A and the path switching position (II) depicted in FIG. 1B. At the transfer position (I), the lower track section 121 and the upper track section 122 are arranged at a first distance from each other, and at the path switching position (II), the lower track section 121 and the upper track section 122 are mutually connected. To a second distance. The first distance is smaller than the second distance.

  In other words, according to the embodiments described herein, the distance between the lower track section 121 and the upper track section 122 of the first transport system 112 is adjusted, in particular increased and / or decreased. Can be done. The first distance (small distance) may be appropriate for transporting the carrier in a non-contact manner in the transport direction between the lower track section 121 and the upper track section 122. When the lower and upper track sections are provided with a small relative distance, it may be difficult to move the carrier in the path switching direction away from the first transport path T1. The second distance (large distance) between the lower track section 121 and the upper track section 122 is in the path switching direction away from the first transport path, that is, the second transport path T2 and / or processing. It may be appropriate to move the carrier to position T3.

  In an embodiment, the first distance between the lower track section 121 and the upper track section 122 may be 1 m or more, in particular 2 m or more. For example, the first distance can be slightly larger than the vertical dimension of the carrier. Thereby, the carrier can be transported in a non-contact manner between the lower track section and the upper track section. The second distance can be as much as several millimeters or centimeters greater than the first distance. In particular, the difference between the first distance and the second distance may be 5 mm or more, 20 mm or more, 40 mm or more, or even 100 mm or more. In other words, the actuator 125 may be configured to change the distance between the lower track section and the upper track section by 5 mm or more, 20 mm or more, 40 mm or more, or even 100 mm or more.

  In other words, the actuator 125 may be provided to increase the distance between the lower track section 121 and the upper track section 122 along a portion of the first transport path T1 in which the path switching assembly 150 is disposed. . The actuator may include a drive device for increasing the distance between the lower track section 121 and the upper track section 122, such as a motor, hydraulic device, or pneumatic device. In an embodiment, to increase the distance between the upper track section 122 and the lower track section 121, the actuator 125 moves away from the upper track section 122, for example, in the vertical direction, particularly in the downward direction. It may be configured to move the lower track section 121 to the bottom. In an embodiment, to increase the distance between the upper track section 122 and the lower track section 121, the actuator 125 is moved away from the lower track section 121, e.g. in the vertical direction, in particular in the upward direction. It may be configured to move the upper track section 122 in a direction.

  The switching of the carrier away from the first transport path T1 is performed along the first transport path while the first transport system 112 is provided at the transport position (I) depicted in FIG. 1A. Conveying the carrier in direction T may be included. The carrier can stop. The first transport system 112 can then be moved to the path switching position (II) depicted in FIG. 1B, which has a greater distance between the upper track section and the lower track section. Thereafter, the carrier can be moved in the path switching direction S so as to leave the first transport path T1.

  Moving the carrier in the path switching direction S away from the first transport path T1 may be easier at the path switching position for several reasons. For example, the effects of permanent magnet magnetic forces that can act on the carrier from the upper track section and the lower track section can be reduced by moving the upper track section and the lower track section away from each other. Furthermore, in the path switching position (II), the side guide rails connected to the upper and / or lower track sections cannot interfere with the carrier. Furthermore, in the path switching position, a larger space is provided between the upper track section and the lower track section, so that the carrier can be easily moved laterally by the path switching assembly, and a more compact path switching assembly. Can be provided. Contact between the carrier and the track may be avoided during path switching.

  In one embodiment, switching between the transport position (I) depicted in FIG. 1A and the path switching position (II) depicted in FIG. 1B causes the lower track section 121 to face downward using an actuator. Moving in the direction of. For example, the lower track section 121 can be moved downward by a distance of 20 mm or more, in particular 40 mm or more, more particularly 80 mm or more. The vertical space between the lower track section 121 and the upper track section 122 can be increased to facilitate the path switching operation.

  According to certain embodiments, which may be combined with other embodiments described herein, the path switching assembly 150 is configured to move the carrier 10 held by the carrier holding portion 152 in the path switching direction S. The carrier holding part 152 movable in the path switching direction S is included. For example, the carrier 10 can be mechanically supported on the carrier holding portion 152. In the embodiment depicted in FIG. 1B, the carrier 10 is supported from below by a carrier holding portion 152. That is, the carrier 10 can be disposed on the upper end of the carrier holding portion 152. In other embodiments, the carrier holding portion may hold the carrier from the side or from above. For example, the carrier holding portion 152 may include a magnetic chuck for chucking the carrier to the carrier holding portion 152.

  In order to move the carrier holding portion 152 in the path switching direction S in order to move the carrier from the first transport path T1 to at least one of the second transport path T2 and the processing position T3 (this specification) A drive device (also referred to as “cross drive”) may be provided. A drive device (not depicted in the drawing) may be located outside the vacuum chamber 101. The carrier holding portion 152 can then extend through the wall of the vacuum chamber 101. Alternatively, the drive device can be placed inside the vacuum chamber 101.

  The drive device may be configured to move the carrier holding portion 152 in the path switching direction S by a distance of 10 cm or more, in particular 20 cm or more, from the first transport path T1 to the second transport path T2. For example, the distance between the first transport path T1 and the second transport path T2 can be 25 cm or more and 100 cm or less.

  The carrier retaining portion 152 of the embodiment depicted in FIG. 1B includes a carrier support surface for positioning the carrier on the carrier support surface. For example, the carrier 10 can be moved in a downward direction by the lower track section 121 and positioned on the support surface of the carrier holding portion 152. Thereafter, the path switching assembly 150 may move the carrier holding portion 152 in the path switching direction S in order to move the carrier away from the first transport path T1.

  In certain embodiments that may be combined with other embodiments described herein, a second transport system 114 may be provided to transport the carrier 10 along the second transport path T2. The second transfer system 114 may be a second magnetic levitation system provided along the second transfer path T2. The second transport path T2 can be offset in the horizontal direction from the first transport path T1. The path switching assembly 150 may be movable in the path switching direction S from the first transport path T1 to at least one of the second transport path T2 and the processing position T3.

  In particular, the path for moving the carrier 10 from the first transport path T1 to the second transport path T2 and / or the processing position T3 offset horizontally from both the first and second transport paths. The carrier holding portion 152 of the switching assembly 150 may be movable in the path switching direction S.

  Similar to the first transport system 112, the second transport system 114 may include a second lower track section 123 and a second upper track section 124. The carrier may be transported along the second transport path T2 between the second lower track section 123 and the second upper track section 124.

  In certain embodiments, an actuator may be provided to increase and / or decrease the distance between the second lower track section 123 and the second upper track section 124. In some embodiments, the distance between the lower track section 121 and the upper track section 122 of the first transport system 112, and the second lower track section 123 and the second upper track of the second transport system 114. One single actuator (eg, actuator 125) may be provided to increase and / or decrease both the distance to the track section 124. In some embodiments, a first actuator is provided to increase and / or decrease the distance between the lower track section 121 and the upper track section 122 of the first transfer system 112 and the second transfer A second actuator may be provided to increase and / or decrease the distance between the second lower track section 123 and the second upper track section 124 of the system 114.

  In particular, in an embodiment, the second lower track section 123 of the second transport system 114 is directed upward in the vertical direction V, in particular in the downward direction to the path switching position (II) and to the transport position (I). It can be movable in the direction of.

  In certain embodiments, which may be combined with other embodiments described herein, the lower track section 121 of the first transport system 112 is the second lower track section of the second transport system 114. Independent of 123, it is movable in the vertical direction V. FIG. 1A shows a lower track section 121 and a second lower track section 123 in an upper position corresponding to the transport position (I) capable of transporting carriers along the first and second transport paths. Yes. FIG. 1B shows the lower track section 121 and the second lower track section 123 in the lower position corresponding to the transfer position (II) where the path can be switched between the transfer paths.

  As schematically depicted in FIG. 1A, in the transfer position (I), the upper guide 141 and / or the lower guide 142 of the second magnetic levitation system is moved from the first transfer path T1 to the second transfer. This may prevent the carrier route from being switched toward the route T2. After the switch to the path switching position (II) depicted in FIG. 1B, the carrier has moved from the upper guide 141 and the lower side thanks to the increased distance between the upper track section and the lower track section. It can be moved in the path switching direction S through the guide 142.

  FIG. 2 shows a schematic top view of a system 200 that includes an apparatus for transporting a carrier, according to embodiments described herein. The device may correspond to the device 100 depicted in FIGS. 1A and 1B. Accordingly, reference is made to the above description, which is not repeated here.

  A system 200 for vacuum processing a substrate according to embodiments described herein is disposed within a vacuum chamber 101, an apparatus 100 according to any of the embodiments described herein, and the vacuum chamber 101. One or more processing tools 105 are included. The one or more processing tools may be selected from the group consisting of a deposition source, a sputter source, an evaporation source, a surface treatment tool, a heating device, a cleaning device, an etching tool, and any combination thereof.

  A first transfer path T1 and a second transfer path T2 offset in the horizontal direction from the first transfer path T1 extend through the vacuum chamber 101. Optionally, a processing position T3 is provided that can be processed in a horizontal direction offset from the first transport path T1 and the second transport path T2. In an embodiment, a mask 12 is provided between the processing position T3 of the carrier 10 and the processing tool 105. The mask 12 can be, for example, an end exclusion mask or a fine metal mask. For example, the mask 12 prevents a portion of the substrate from being coated and / or the mask may have an opening pattern that corresponds to the material pattern to be deposited on the substrate.

  The apparatus 100 is configured to convey the carrier 10 along the first conveyance path T1 in a non-contact manner, and to convey the carrier 10 along the second conveyance path T2 in a non-contact manner. The second transport system 114 and the path switching assembly 150 configured to move the carrier 10 in the path switching direction S from the first transport path T1 to the second transport path T2 and / or the processing position T3. including. The path switching assembly 150 may include a carrier holding portion 152 configured to hold and / or support the carrier 10 that is movable in the path switching direction S.

  The first transport system 112 may include a lower track section 121 (shown schematically as a dashed line in FIG. 2) and an actuator configured to move the lower track section 121 in a vertical direction. The length of the lower track section 121 in the transport direction T can be greater than or equal to the length of the carrier 10 in the transport direction T. The lower track section 121 may be provided along the section of the first transport path where the path switching assembly 150 is located. Accordingly, the lower track section 121 can be moved in a downward direction to allow the path switching assembly to move the carrier 10 in the path switching direction S away from the first transport path T1. .

  In some embodiments, the second transport system 114 moves the second lower track section 123 (shown schematically as a dashed line in FIG. 2) and the second lower track section 123 in the vertical direction. And an actuator configured to be configured. The length of the second lower track section 123 in the transport direction T can be greater than or equal to the length of the carrier 10 in the transport direction T. The second lower track section 123 may extend along the section of the second transport path where the path switching assembly 150 is located. Thus, the second lower side to allow the path switching assembly to move the carrier 10 on the second transport path T2 or across the second transport path T2 in the path switching direction S. The track section 123 can be moved in a downward direction.

  3A-3H illustrate various stages of a method for transporting a carrier using an apparatus 300 according to embodiments described herein. Device 300 may be similar to device 100 depicted in FIGS. 1A and 1B. Accordingly, reference is made to the above description, which is not repeated here.

  The apparatus 300 includes a first transport system 112 for transporting the carrier 10 in a non-contact manner along the first transport path T1, and a second transport path offset in the horizontal direction from the first transport path T1. A second transport system 114 is included for transporting the carrier 10 in a non-contact manner along T2.

  Further, a path switching assembly 150 for moving the carrier 10 from the first transport path T1 to the second transport path T2 and / or the processing position T3 is provided. The processing position T3 is depicted only in FIG. 3E and is optional. In other words, instead of moving the carrier from the first transport path T1 to the processing position T3 and then to the second transport path T2, the path switching direction from the first transport path directly to the second transport path. It seems possible to move the carrier. Alternatively, instead of moving the carrier to the second transport path T2, the carrier can be moved from the processing position T3 depicted in FIG. 3E back to the first transport path T1.

  The path switching assembly 150 may include a carrier holding portion 152 configured to hold and / or support the carrier. The carrier holding portion 152 may be movable in the path switching direction S together with the carrier. The path switching assembly is configured to move the carrier in the path switching direction S.

  The first transport system 112 includes a lower track section 121 that may be movable in the vertical direction V and / or the second transport system 114 may be a second lower track that may be movable in the vertical direction V. Section 123 may be included. The lower track section 121 and the second lower track section 123 may be arranged next to and parallel to each other. Thereby, the carrier can be moved in the path switching direction S between the lower track section 121 and the second lower track section 123, in particular without changing the orientation of the carrier 10. In other words, during path switching, the carrier can maintain an essentially vertical orientation aligned along the transport direction T.

  In FIG. 3A, the carrier is transported in the transport direction T along the first transport path T1 by the first transport system 112. The conveyance can be a non-contact type conveyance. In other words, the carrier 10 is held at a distance (eg, a distance of about 2 mm) above the lower track section 121 by a magnetic force, eg, a repelling magnetic force acting from below and / or an attracting magnetic force acting from above. Can be done. FIG. 3A shows a transfer position (I) configured to transfer in a non-contact manner along the first transfer path T1. A first distance is provided between the lower track section 121 and the upper track section 122 of the first transport system 112.

  The carrier 10 is transported to a position along the first transport path T1 depicted in FIG. 3A where the path switching assembly 150 is disposed.

  In certain embodiments, which may be combined with other embodiments, the path switching assembly 150 includes an upper retaining device 154 configured to retain and / or stabilize the upper portion of the carrier 10. The upper holding device 154 may be movable in the path switching direction S. The upper holding device 154 may optionally be movable also in the vertical direction V. The upper holding device 154 can be configured to prevent the carrier from tilting when the magnetic levitation is switched off.

  In certain embodiments, the upper retaining device 154 may be configured to contact the upper end portion of the carrier 10 and / or move vertically in contact with the upper end portion of the carrier 10. For example, the upper holding device 154 may include a finger or other holding device configured to contact and grasp the carrier from above. In particular, the upper holding device 154 includes a spring-loaded finger configured to hold and / or stabilize the carrier when the magnetic levitation provided by the first transport system 112 is switched off. May be included. For example, lateral stabilization in the path switching direction S can be provided by the upper holding device 154. As schematically shown in FIG. 3B, the upper holding device 154 provides lateral stabilization of the carrier in the path switching direction and prevents tilting motion.

  In certain embodiments, the magnetic levitation force of the first transport system 112 can be reduced or switched off. Thereby, the carrier 10 comes into mechanical contact with the lower track section 121 and is supported on the lower track section 121. For example, the carrier can be smoothly placed on the lower track section 121 by gradually reducing the magnetic levitation force of the first magnetic levitation system.

  Reducing the magnetic levitation provided by the first transport system 112 to position the carrier on the lower track section 121 is depicted in more detail in FIGS. 4A and 4B. In FIG. 4A, the carrier is held in a non-contact manner at a distance above the lower track section 121 by the first transport system 112. For example, a dynamic magnetic unit 301 located in the upper track section 122 can hold the carrier 10 in a non-contact manner at a distance above the lower track section 121. In FIG. 4B, the upper part of the carrier is stabilized by the upper holding device 154. In order to place the carrier on the substrate support surface of the lower track section 121, the magnetic levitation force is reduced or switched off. Thereafter, the lower track section 121 can be lowered.

  According to a further aspect of the present disclosure, which may form the subject of an independent claim, the carrier 10 supported on the lower track section 121 for placing the carrier on the carrier holding portion 152 of the path switching assembly. The actuator 125 is configured to lower the lower track section 121 having

  Referring back to FIG. 3B, the actuator may be configured to move the lower track section 121 in a downward direction away from the upper track section 122. Thereby, the distance between the lower track section 121 and the upper track section 122 is increased. The carrier 10 supported on the lower track section 121 is lowered toward the carrier holding portion 152 until the carrier is placed on the carrier holding portion 152. For example, the lower track section 121 can be lowered from the first height L1 down to the height of the carrier holding portion 152 by a distance of 20 mm or more, in particular 40 mm or more.

  As schematically depicted in FIGS. 3B and 3C, the lower track section 121 and the carrier retaining portion 152 of the path switching assembly 150 may be configured to support the carrier 10 from below. In other words, the bottom surface of the carrier 10 may first be placed on the lower track section 121 (FIG. 3B) and then placed on the carrier holding portion 152 (FIG. 3C).

  As further depicted in FIG. 3B, the lower track section 121 having a carrier supported on the lower track section 121 moves away from the upper track section 122 until the carrier 10 is positioned on the carrier retaining portion 152. Can be moved in the downward direction. As schematically depicted in FIG. 3C, the lower track section faces downward until the lower track section 121 is positioned at the second height L2, eg, below the height of the carrier retaining portion 152. Can continue to move. The distance between the first height L1 and the second height L2 can be 40 mm or more, in particular 80 mm or more. Accordingly, the first distance (ie, the distance between the lower track section 121 and the upper track section 122 at the transfer position (I)) and the second distance (ie, the lower position at the path switching position (II)). The distance between the side track section 121 and the upper track section 122) can be 40 mm or more, in particular 80 mm or more.

  According to certain embodiments, which may be combined with other embodiments described herein, the first transport system 112 is in the transport position (I), particularly via a magnetic force acting on the carrier. A magnetic levitation system configured to hold the carrier in a non-contact manner above the lower track section 121. Further, the lower track section 121 may include a carrier support for mechanically supporting the carrier from below. In particular, during non-contact transport, the carrier floats in a non-contact manner above the lower track section, and during path switching, the carrier contacts the lower track section and is supported on the lower track section. obtain.

  Thanks to the downward movement of the carrier 10 supported on the lower track 121, the distance between the carrier 10 and the upper track section 122 can be increased. Thanks to the downward movement of the lower track section 121 relative to the carrier 10 supported by the carrier holding portion 152, the distance between the carrier and the lower track section 121 can be increased. Accordingly, the free space above and below the carrier 10 during path switching can be increased, so that the carrier moving operation in the path switching direction S can be facilitated.

  As schematically illustrated in FIGS. 3D and 3E, the carrier holding portion 152 having the carrier 10 supported on the carrier holding portion 152 is transferred from the first transfer path T1 to the second transfer path T2 (FIG. 3D) and / or the processing position (FIG. 3E) can be moved in the path switching direction. In the processing position, the substrate can be processed by the processing tool 105.

  According to certain embodiments, which may be combined with other embodiments described herein, the carrier 10 is moved to the second transport path T2. In some embodiments, the second transport system 114 provided along the second transport path T2 may include a second lower track section 123 that is vertically movable.

  As schematically depicted in FIG. 3F, the second lower track section 123 is such that the carrier contacts the second lower track section 123 and the second lower track section 123 causes the carrier holding portion to It can be moved upward from the path switching position until it is lifted from 153. For example, the second lower track section 123 may face upward from a second height L2 below the carrier holding portion 152 height to a first height L1 above the carrier holding portion 152 height. Can be moved in the direction.

  By moving the second lower track section 123 in the upward direction, the second transport system 114 of the second transport system 114 is moved to the transport position (I), as schematically depicted by FIG. 3G. The distance between the lower track section 123 and the second upper track section 124 is reduced. The transport position (I) is depicted in FIG. 3H.

  In the transport position (I) depicted in FIG. 3H, the magnetic levitation of the second transport system 114 is switched on and the carrier between the second lower track section 123 and the second upper track section 124. Can be held in a non-contact manner. Thereafter, the carrier can be transported in a non-contact manner in the transport direction T, for example, along the second transport path T2.

  The carrier holding portion 152 of the path switching assembly 150 can be moved in the path switching direction S so as to return toward the first transport path T1, and then the path switching can be performed on the second carrier.

  5A-5D illustrate various stages of a method for transporting a carrier using an apparatus 400 according to embodiments described herein. Device 400 may be similar to device 300 depicted in FIGS. 3A-3H. Accordingly, reference is made to the above description, which is not repeated here.

  The apparatus 400 of FIG. 5A moves the carrier 10 from the first transport path T1 to the second transport path T2 and / or the processing position T3 while maintaining an essentially constant orientation of the carrier 10. A path switching assembly 150 configured as described above.

  The path switching assembly 150 may include a carrier holding portion 152 movable in the path switching direction S and an upper holding device 154 movable in the path switching direction S.

  In certain embodiments, which may be combined with other embodiments described herein, the upper retention device 154 may be used to generate a carrier 10 particularly when the magnetic levitation force of the magnetic levitation system is reduced or switched off. Configured to hold and / or stabilize the upper portion of the. “Upper part of the carrier” can be understood as the upper part of the vertically oriented carrier comprising the upper 50%, in particular as the upper 20% of the vertically oriented carrier. In particular, the upper holding device can stabilize the upper edge of the carrier.

  The upper holding device 154 may stabilize the carrier in the switching direction S, for example, by applying a stabilizing force directed to the opposite side on both sides of the carrier.

  The upper holding device 154 may include at least one magnet unit for applying a repelling magnetic force to the upper part of the carrier in the path switching direction S. In one embodiment, which may be combined with other embodiments described herein, a first magnet unit 302 and a first magnet for applying a repulsive magnetic force from the first side to the upper portion of the carrier 10. The upper holding device 154 includes a second magnet unit 304 for applying a magnetic force repelling from the second side opposite the side to the upper portion of the carrier 10.

  A magnetic counter unit (corresponding magnetic unit) may be fixed to the upper portion of the carrier 10 to magnetically interact with the first magnet unit 302 and the second magnet unit 304, respectively. In particular, the first magnet unit 302 of the upper holding device 154 may apply a magnetic force that repels a first magnetic counter unit secured to the first side of the carrier. And / or the second magnet unit 304 of the upper holding device 154 may apply a repulsive magnetic force to a second magnetic counter unit fixed to the second side of the carrier opposite the first side. The carrier can be stabilized in a non-contact manner in the central area between the first magnet unit 302 and the second magnet unit 304.

  The upper holding device 154 can be movable in the path switching direction S with, for example, and in synchronization with the carrier holding portion 152 to move the carrier between tracks.

  In certain embodiments, the upper holding device 154 can include a first arm 311 and a second arm 312. The first arm 311 may be movable in the path switching direction S independently of the second arm 312. For example, a first side stabilization unit, such as the first magnet unit 302, can be secured to the first arm 311. A second side stabilization unit, such as the second magnet unit 304, can then be secured to the second arm 312. Prior to switching off the magnetic levitation of the carrier, the first arm 311 is moved from the first side toward the carrier to stabilize the carrier between the first arm and the second arm. The second arm 312 can be moved from the second side toward the carrier.

  In particular, the upper holding device 154 may be movable in the path switching direction S. Thereby, the upper part of the carrier can be stabilized in a contactless manner during carrier path switching.

  In an embodiment, the upper holding device 154 is movable in the path switching direction S but not in the vertical direction V. In another embodiment, the upper holding device 154 is movable in the direction V perpendicular to the path switching direction S.

  According to certain embodiments, which may be combined with other embodiments described herein, the upper holding device 154 is capable of lateral stability of the carrier during the vertical movement of the carrier relative to the upper holding device 154. It may be configured to provide For example, the upper holding device 154 may provide lateral stabilization of a carrier located at a first vertical position relative to the upper holding device 154 and a second vertical position relative to the upper holding device 154. The first vertical position and the second vertical position may be offset vertically from each other by a distance of, for example, 30 mm or more, in particular 50 mm or more. In particular, the upper holding device may provide lateral stabilization for carriers provided at the first vertical height and the second vertical height without moving the upper holding device in the vertical direction.

  In an embodiment, at least one magnet unit of the upper holding device 154 and / or at least one magnetic counter unit of the carrier 10 has a vertical dimension of 30 mm or more, in particular 40 mm or more, more particularly 50 mm or more. obtain. Thus, at least one magnet unit can interact magnetically with at least one magnetic counter unit when the magnet counter unit is shifted vertically relative to the magnet unit, for example by a distance of 30 mm or more. .

  In FIG. 5A, the carrier 10 is arranged on the first transport path T1 at the first vertical height. A first transport system 112 configured as a first magnetic levitation system stabilizes the carrier in the vertical direction and in the track switching direction.

  In FIG. 5B, the upper holding device 154 is moved toward the carrier in the path switching direction S from the two opposite sides. Between the first magnet unit 302 and the second magnet unit 304 of the upper holding device 154, the carrier can be stabilized in a non-contact manner.

  Thereafter, the magnetic levitation of the first transport system 112 can be switched off.

  In FIG. 5C, the carrier 10 may be moved to a second vertical height in a downward direction relative to the upper holding device, for example by a distance of 20 mm, 40 mm, or more. For example, the lower track section 121 having a carrier supported on the lower track section 121 can be moved in a downward direction. The upper holding device 154 is configured such that the carrier is stabilized during the vertical movement of the carrier relative to the upper holding device. For example, the first magnet unit 302 and the second magnet unit 304 can extend in the vertical direction V over a distance of 30 mm or more, in particular 40 mm or more.

  Thereafter, the carrier 10 can be moved in the path switching direction S, for example, by moving the carrier holding portion 152 in the path switching direction with and in synchronization with the upper holding device 154.

  For example, the upper holding device 154 when the carrier is held and stabilized by the first or second transfer system after path switching towards the second transfer path T2 and activation of the second magnetic levitation system. Can be moved away from the carrier.

  According to a further aspect described herein, a method is provided for transporting a carrier within a vacuum chamber.

  FIG. 6 is a flow diagram illustrating a first method according to an embodiment described in the present invention.

  In the box 610, the carrier 10 is transported in the transport direction T along the first transport path T1. During transport, the carrier 10 is disposed in a carrier transport space between the lower track section 121 and the upper track section 122 of the first transport system 112. The carrier may be transported in a non-contact manner, for example by a magnetic levitation system, in a carrier transport space between the lower track section and the upper track section.

  In box 620, the distance between the lower track section 121 and the upper track section 122 is increased. For example, the lower track section is moved downward, for example in the vertical direction, away from the upper track section. Alternatively or additionally, the upper track section is moved upward away from the lower track section, for example in the vertical direction. An actuator can be provided to lower the track section.

  In box 630, the carrier is moved away from the first transport path T1 in the path switching direction S across the transport direction T, in particular to the second transport path T2 and / or the processing position T3. In particular, the carrier may be moved in the path switching direction S while being mechanically supported on and / or mechanically supported by the carrier holding part of the path switching assembly. The carrier holding part having a carrier supported on the carrier holding part may be movable in the path switching direction.

  When the carrier is moving in the path switching direction S, the distance between the second lower track section 123 and the second upper track section 124 of the second transport system 114 can be set to a large distance. . This may allow the carrier to enter the second transport path T2.

  When the carrier is positioned in the second transport path T2, the distance between the second lower track section 123 and the second upper track section 124 of the second transport system 114 is reduced, and the second It may be possible to transport the carrier along the second transport path via the two magnetic levitation systems.

  One or more additional transport stages may be provided between boxes 610 and 620 and / or between boxes 620 and 630. For example, reference is made to the transport method described with reference to FIGS. 3A to 3H. The above description will not be repeated here.

  FIG. 7 is a flow diagram illustrating a second method for transporting a carrier within a vacuum chamber, according to embodiments described herein.

  In the box 710, the carrier 10 is transported in a non-contact manner in the transport direction T along the first transport path T1 by the first magnetic levitation system.

  Thereafter, the carrier moves to the second transport path T2 that is offset in the horizontal direction from the first transport path T1.

  Moving the carrier to the second transport path includes lowering the carrier on the first transport path T1 in box 720, and moving the carrier in the path switching direction S to the second transport path T2 in box 730. Moving, and in box 740, lifting the carrier on the second transport path T2.

  In box 720, the carrier may be placed on the lower track section 121 of the first transport system 112, particularly by reducing or switching off the magnetic levitation force provided by the first transport system.

  The lower track section 121 having a carrier supported on the lower track section 121 can be moved in a downward direction. In particular, an actuator may be provided for moving the lower track section 121 vertically away from the upper track section 122 of the first transport system. Thus, the distance between the lower track section 121 and the upper track section 122 can be increased via the actuator.

  In box 720, the carrier may be lowered onto the carrier retaining portion 152 of the path switching assembly 150. The path switching assembly 150 moves the carrier supported on the carrier holding portion 152 in the path switching direction S. A drive device for moving the carrier holding part 152 in the path switching direction S, in particular a cross drive, may be provided.

  In box 740, the second lower track section 123 of the second transport system 114 provided along the second transport path T2 can be moved in an upward direction. The second lower track section 123 can be moved in an upward direction until the carrier is lifted from the carrier holding portion 152 and positioned at a predetermined height above the carrier holding portion 152. In particular, the second lower track section 123 can be moved towards the second upper track section of the second transport system. The distance between the second lower track section and the second upper track section can thus be reduced.

  Thereafter, the carrier can be transported in a non-contact manner along the second transport path T2.

Although the above description is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure can be devised without departing from the basic scope of the present disclosure. Defined by the following claims.

Claims (16)

An apparatus (100) for transporting a carrier (10) in a vacuum chamber (101),
A first transport system (112) provided in the transport direction (T) along the first transport path (T1) and comprising a lower track section (121) and an upper track section (122);
A path switching assembly (150) for moving the carrier in a path switching direction (S) away from the first transport path (T1), and the lower track section (121) and the upper track section (122) ) Comprising an actuator (125) for changing the distance between   The path switching assembly (150) is a carrier holding part (152), the path for moving the carrier (10) held by the carrier holding part (152) in the path switching direction (S). The device according to claim 1, comprising a carrier holding part (152) movable in the switching direction (S).   The lower track section (10), wherein the actuator (125) has the carrier (10) supported on the lower track section (121) for positioning the carrier on the carrier holding portion (152). 121. The apparatus of claim 2, wherein the apparatus is configured to lower 121).   A second transfer system (114) provided along a second transfer path (T2) that is horizontally offset from the first transfer path (T1); The carrier holding portion (152) has a processing position (T3) offset in the horizontal direction from the first transport path (T1) to the second transport path (T2) and from the first and second transport paths. The device according to claim 1, which is movable in at least one of them in the path switching direction (S).   The apparatus of claim 4, wherein the second transport system (114) comprises a second lower track section (123) movable in a vertical direction (V).   The actuator (125) is configured to move the lower track section (121) in a downward direction away from the upper track section (122) and / or the actuator (125) includes: The apparatus according to any one of the preceding claims, configured to move the upper track section (122) in an upward direction away from the lower track section (121).   The first transport system (112) is a first magnetic levitation system configured to hold the carrier in a non-contact manner at a distance above the lower track section (121); The lower track section (121) is a carrier support, further comprising a carrier support for mechanically supporting the carrier on the carrier support. The device described in 1.   The path switching assembly (150) is an upper holding device (154) configured to hold and / or stabilize the upper part of the carrier (10), movable at least in the path switching direction (S) The apparatus according to claim 1, comprising an upper holding device (154).   A first magnet unit (302) for applying a magnetic force repelling the upper holding device (154) from the first side to the upper part of the carrier (10), and opposite the first side; The apparatus according to claim 8, comprising a second magnet unit (304) for applying a repelling magnetic force from the second side of the carrier to the upper part of the carrier (10).   10. The lower track section (121) and the carrier holding portion (152) of the path switching assembly (150) are configured to support the carrier (10) from below. The apparatus according to one item. A system for vacuum processing a substrate,
Vacuum chamber (101),
The apparatus (100) according to any one of claims 1 to 10, and selected from the group consisting of a deposition source, a sputter source, an evaporation source, a surface treatment tool, a heating device, a cleaning device, an etching tool, and combinations thereof. And one or more processing tools (105) disposed within the vacuum chamber (101). A method for transporting a carrier in a vacuum chamber, comprising:
The carrier (10) is transported in the transport direction (T) along the first transport path (T1) between the lower track section (121) and the upper track section (122) of the first transport system (112). To do,
Increasing the distance between the lower track section (121) and the upper track section (122) and switching the path across the transport direction (T) away from the first transport path (T1) Moving the carrier in a direction (S). A method for transporting a carrier in a vacuum chamber, comprising:
Transporting the carrier (10) in the transport direction (T) along the first transport path (T1), lowering the carrier, moving the carrier in the path switching direction (S), and the carrier Moving the carrier to a second transport path (T2) offset in a horizontal direction from the first transport path (T1). Lowering the carrier (10),
Disposing the carrier on a lower track section (121) of a first transport system (112) provided along the first transport path (T1), and disposing the lower track section (121) 14. The method of claim 13, comprising moving in a downward direction.   The carrier is lowered onto a carrier holding part (152) of a path switching assembly (150), and the path switching assembly (150) moves the carrier supported on the carrier holding part (152) into the path switching direction. The method according to claim 13 or 14, wherein the method is moved to (S). Lifting the carrier,
The carrier is provided along the second transport path (T2) until it is lifted from the carrier holding portion (152) and disposed at a predetermined height above the carrier holding portion (152). 16. The method of claim 15, comprising moving the second lower track section (123) of the second transport system (114) in an upward direction.

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