KR102430391B1 - A magnetic levitation system for transporting a carrier, a carrier for a magnetic levitation system, a processing system for vertically processing a substrate, and a method of transporting the carrier - Google Patents

Abstract

A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T is described. The magnetic levitation system comprises one or more magnetic bearings 120 having one or more first actuators 121 for non-contact holding of the carrier 10 in the carrier transport space 15 . Additionally, the magnetic levitation system includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T. One or more first actuators 121 and one or more second actuators 132 are arranged above the carrier transport space 15 .

Description

A magnetic levitation system for transporting a carrier, a carrier for a magnetic levitation system, a processing system for vertically processing a substrate, and a method of transporting the carrier

Embodiments of the present disclosure relate to apparatus and methods for transport of carriers, particularly carriers used during processing of large area substrates. More particularly, embodiments of the present disclosure relate to apparatus and methods for contactless transfer of carriers usable in processing systems for vertical substrate processing, such as material deposition on large area substrates for display production. . In particular, embodiments of the present disclosure relate to magnetic levitation systems and methods for carrier transport in vacuum processing systems.

Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates may be used in some applications and in some fields of technology. For example, coated substrates can be used in the field of display devices. Display devices may be used in the manufacture of television screens for displaying information, computer monitors, mobile phones, other hand-held devices, and the like. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] To deposit a layer stack, an in-line arrangement of processing modules may be used. The in-line processing system comprises a plurality of subsequent processing modules, such as deposition modules and optionally further processing modules, such as cleaning modules and/or etching modules, wherein the plurality of substrates are disposed in the in-line processing system. processing aspects are subsequently performed in the processing modules, such that it can be processed continuously or quasi-continuously in the .

[0004] The substrate may be carried by a carrier, ie, a transport device for carrying the substrate. The carrier is typically transported through a vacuum system using a transport system. The transport system may be configured to transport a carrier positioned thereon along one or more transport paths. At least two transport paths, for example a first transport path for transporting the carrier in a forward direction and a second transport path for transporting the carrier in a return direction opposite the forward direction, are mutually in a vacuum system. They may be provided next to each other.

[0005] The functionality of the display device typically depends on the coating thickness of the material, which must be within a predetermined range. In order to obtain high resolution display devices, the technical challenges associated with the deposition of materials need to be mastered. In particular, accurate and smooth transport of substrate carriers and/or mask carriers through a vacuum system is a challenge. For example, particle generation due to wear of moving parts can aggravate the manufacturing process. Accordingly, there is a need for transporting carriers in processing systems while reducing or minimizing particle generation. Also, it is a challenge to provide robust carrier transport systems for high temperature vacuum environments, eg at low costs.

[0006] Accordingly, there is a continuing need for improved apparatus and methods for the transport of carriers as well as providing improved vacuum processing systems that overcome at least some of the problems of the prior art.

[0007] In view of the above, there is provided a magnetic levitation system for transporting a carrier, a carrier for the magnetic levitation system, a processing system for vertically processing a substrate, and a method of transporting the carrier according to the independent claims. Additional aspects, advantages, and features are apparent from the dependent claims, the detailed description, and the accompanying drawings.

According to one aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system includes one or more magnetic bearings having one or more first actuators for contactlessly holding a carrier within a carrier transport space. Additionally, the magnetic levitation system includes a drive unit having one or more second actuators for moving the carrier in the transport direction. One or more first actuators and one or more second actuators are arranged above the carrier transport space.

According to another aspect of the present disclosure, a carrier for a magnetic levitation system is provided. The carrier comprises a main body for carrying an object. The main body includes a first end and a second end opposite the first end. The first end includes one or more first magnetic counterparts for cooperating with one or more first actuators of one or more magnetic bearings of the magnetic levitation system. Additionally, the first end includes one or more second magnetic counterparts for cooperating with one or more second actuators of a drive unit of the magnetic levitation system. The second end of the main body includes a third magnetic counterpart for cooperating with one or more passive magnetic bearings of the non-contact guiding arrangement of the magnetic levitation system.

According to a further aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum processing chamber containing a processing device. Additionally, the processing system includes one or more magnetic levitation systems for transporting one or more carriers in a transport direction. The one or more magnetic levitation systems include one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier within the carrier transport space. The one or more magnetic levitation systems also include a drive unit having one or more second actuators for moving the carrier in the transport direction. One or more first actuators and one or more second actuators are arranged above the carrier transport space.

According to another aspect of the present disclosure, a method of transporting a carrier is provided. The method includes contactlessly holding a carrier in the carrier transport space using one or more magnetic bearings having one or more first actuators arranged above the carrier transport space. The method also comprises transporting the carrier in the transport direction using a drive unit having one or more second actuators arranged above the carrier transport space.

Embodiments also relate to apparatus for performing the disclosed methods, including apparatus portions for performing each described method aspect. These method aspects may be performed by hardware components, by a computer programmed by suitable software, by any combination of the two, or in any other manner. Furthermore, embodiments according to the present disclosure also relate to methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for performing every respective function of the apparatus.

[0013] In such a way that the above-listed features of the disclosure may be understood in detail, a more specific description of the disclosure briefly summarized above may be made with reference to embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below:
1 shows a schematic diagram of a magnetic levitation system according to embodiments described herein;
2-5 show schematic diagrams of magnetic levitation systems according to further embodiments described herein;
6 shows a schematic diagram of an arrangement of two magnetic levitation systems for asymmetric carriers, in accordance with some embodiments described herein;
7 shows a schematic diagram of an arrangement of two magnetic levitation systems for symmetric carriers, in accordance with some embodiments described herein;
8 shows a schematic diagram of a processing system for vertically processing a substrate in accordance with embodiments described herein; and
9 shows a flow diagram to illustrate a method of transporting a carrier in accordance with embodiments described herein.

[0014] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the drawings. Within the following description of the drawings, like reference numbers refer to like components. Only differences for individual embodiments are described. Each example is provided as a description of the disclosure and is not intended as a limitation of the disclosure. Also, features illustrated or described as part of one embodiment may be used with or with other embodiments to yield still a further embodiment. The description is intended to cover such modifications and variations.

1 , a magnetically levitated system 100 for transporting a carrier 10 in a transport direction T in accordance with the present disclosure is described. The transport direction T is perpendicular to the paper plane of FIG. 1 .

According to embodiments that may be combined with any other embodiments described herein, the magnetic levitation system 100 is one for non-contact holding the carrier 10 within the carrier transport space 15 . and one or more magnetic bearings 120 having the first actuators 121 or more. The carrier transport space 15 can be understood as a region in which carriers are arranged during transport of the carrier in the transport direction along the transport path. In particular, as exemplarily shown in FIG. 1 , the carrier transport space may be a vertical carrier transport space having a height H extending in a vertical direction and a width W extending in a horizontal direction. For example, the aspect ratio of H/W may be H/W≧5, in particular H/W≧10. The magnetic levitation system 100 also includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in a transport direction. One or more first actuators 121 and one or more second actuators 132 are arranged above the carrier transport space 15 .

[0017] Accordingly, embodiments of a magnetic levitation system as described herein are an improvement over conventional carrier transport apparatuses, particularly with regard to accurate and smooth transport of carriers in high temperature vacuum environments. Further, embodiments as described herein advantageously provide more robust contactless carrier transport at lower production costs compared to conventional carrier transport devices. In particular, embodiments of a magnetic levitation system as described herein are more insensitive to manufacturing tolerances, deformation, and thermal expansion. Also advantageously, a simpler integration of the magnetic levitation system into the chamber is provided.

[0018] Before various additional embodiments of the present disclosure are described in greater detail, some aspects of some terms used herein are described.

[0019] A “magnetic levitation system” in the present disclosure may be understood as a system configured to hold an object, such as a carrier, in a non-contact manner by using a magnetic force. In the present disclosure, the term "floating" or "floating" refers to the state of a carrier carrying an object, such as a substrate or mask, wherein the object floats without mechanical contact or support. Also, moving or transporting an object means providing a force in a different direction than a driving force, such as a levitation force, wherein the object is moved from one position to another different position, such as a different position along the transport direction. . For example, a carrier carrying a substrate or mask may be levitated, that is, levitated by a force counteracting gravity and moved in a direction different from a direction parallel to gravity while levitated.

[0020] In the present disclosure, the term "contactless" means that a weight, such as the weight of a carrier, in particular the weight of a carrier carrying a substrate or mask, is not held by mechanical contact or mechanical forces, but by magnetic force. can be understood to mean that In other words, the term "contactless" as used throughout the description herein may be understood in that the carrier is held in a floating or floating state using magnetic forces instead of mechanical forces, ie, contact forces.

As schematically shown in FIG. 1 , the carrier 10 is held contactlessly in the carrier transport space 15 between the upper chamber wall 212 and the lowermost chamber wall 211 . In particular, the upper chamber wall 212 may be the ceiling of the vacuum chamber. Accordingly, the lowermost chamber wall 211 may be the lowermost wall of the vacuum chamber.

[0022] In this disclosure, a “carrier” may be understood as a carrier configured to hold a substrate, also referred to as a substrate carrier. For example, the carrier may be a substrate carrier for carrying a large area substrate. It should be understood that embodiments of the magnetic levitation system may also be used for other carrier types, such as mask carriers. Accordingly, additionally or alternatively, the carrier may be a carrier configured to carry a mask.

In the present disclosure, the term “substrate” may particularly encompass substantially inflexible substrates, such as a wafer, slices of a transparent crystal such as sapphire, or a glass plate. However, the present disclosure is not limited thereto, and the term “substrate” may also encompass flexible substrates such as webs or foils. The term "substantially inflexible" is understood to distinguish it from "flexible". Specifically, a substantially inflexible substrate, such as a glass plate having a thickness of 0.5 mm or less, may have some degree of flexibility, wherein the flexibility of the substantially inflexible substrate is small compared to flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be a glass (eg, soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any that can be coated by a deposition process. may be made of a material selected from the group consisting of other materials or combinations of materials.

[0024] In the present disclosure, the term “large area substrate” refers to a substrate having a main surface having an area of at least 0.5 m 2 , in particular at least 1 m 2 . In some embodiments, the large area substrate is GEN 4.5 corresponding to a substrate of about 0.67 m 2 (0.73 x 0.92 m), GEN 5 corresponding to a substrate of about 1.4 m 2 (1.1 m x 1.3 m), of about 4.29 m. GEN 7.5 corresponding to a substrate (1.95 m × 2.2 m), GEN 8.5 corresponding to a substrate of about 5.7 m 2 (2.2 m × 2.5 m), or even GEN corresponding to a substrate of about 8.7 m 2 (2.85 m × 3.05 m) It can be 10. Much larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can be implemented similarly. Further, the substrate thickness may be between 0.1 and 1.8 mm, in particular up to about 0.9 mm, such as 0.7 mm or 0.5.

In the present disclosure, the term “transport direction” may be understood as a direction in which a carrier is transported along a transport path. Typically, the direction of transport may be an essentially horizontal direction.

[0026] In the present disclosure, a “magnetic bearing” may be understood as a bearing configured to hold or support an object, such as a carrier as described herein, in a non-contact manner, ie without physical contact. Accordingly, one or more magnetic bearings as described herein generate a magnetic force acting on the carrier such that the carrier is held contactlessly at a predetermined distance from a base structure, such as upper chamber wall 212 as shown in FIG. 1 . can be configured to In particular, the one or more magnetic bearings 120 are arranged in an essentially vertical direction V such that the vertical width of the gap 122 between the upper chamber wall 212 and the carrier 10 can be kept essentially constant. and may be configured to create an acting magnetic force.

[0027] Some embodiments described herein involve the concept of "vertical direction". The vertical direction is considered to be a direction substantially parallel to the direction in which gravity extends. The vertical direction may deviate from the correct vertical, for example by an angle of up to 15° (exact vertical is defined by gravity). Also, some embodiments described herein may involve the concept of “lateral direction”. A lateral direction is to be understood as distinct from a vertical direction. The lateral direction may be perpendicular or substantially perpendicular to the exact vertical direction defined by gravity.

In the present disclosure, a “first actuator” of one or more magnetic bearings may be understood as an active and controllable element of the magnetic bearings. In particular, the one or more first actuators may comprise a controllable magnet, such as an electromagnet. The magnetic field of the one or more first actuators may be actively controllable to maintain and/or adjust the distance between the upper chamber wall 212 and the carrier 10 . In other words, the “first actuator” of one or more magnetic bearings may be understood as an element having a controllable and adjustable magnetic field for providing a magnetic levitation force acting on the carrier.

Accordingly, the one or more first actuators 121 are configured to hold the carrier in a contactless manner. 1 , one or more first magnetic counterparts 181 can be arranged on the carrier 10 , in particular on the uppermost part of the carrier. The one or more first magnetic counterparts 181 of the carrier may magnetically interact with the one or more first actuators 121 of the one or more magnetic bearings 120 . In particular, the one or more first magnetic counterparts 181 may be passive magnetic elements. For example, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

For example, an output parameter, such as a current applied to the one or more first actuators, may be controlled according to an input parameter, such as a distance between the upper chamber wall 212 and the carrier 10 . For example, the distance between the upper chamber wall 212 and the carrier 10 (eg, the gap 122 shown in FIG. 1 ) can be measured by a distance sensor, and the magnetic field strength of the one or more first actuators is the measured distance. can be set according to In particular, the magnetic field strength may be increased in case of a distance exceeding a predetermined threshold, and the magnetic field strength may be decreased in the case of a distance below the threshold. The one or more first actuators may be controlled in closed loop or feedback control.

[0031] In the present disclosure, a “drive unit” may be understood as a unit configured to move an object, such as a carrier, as described herein in a non-contact manner in a transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Accordingly, the drive unit may be a linear motor. For example, the linear motor may be an iron-core linear motor. Alternatively, the linear motor may be an ironless linear motor. An ironless linear motor may be beneficial in preventing torsional moments on the carrier caused by normal forces due to possible interaction of the iron core of the linear motor with the passive magnetic elements of the carrier.

[0032] More particularly, as illustratively shown in FIG. 1 , the drive unit typically includes one or more second actuators configured to non-contactly move the carrier in the transport direction. The one or more second actuators may be one or more controllable magnets, such as electromagnets. Accordingly, the one or more second actuators may be actively controllable to apply a moving force to the carrier in the direction of transport. 1 , one or more second magnetic counterparts 182 may be arranged on the carrier 10 , in particular on the uppermost part of the carrier. The one or more second magnetic counterparts 182 of the carrier may magnetically interact with the one or more second actuators 132 of the drive unit 130 . In particular, the one or more second magnetic counterparts 182 may be passive magnetic elements. For example, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

According to some embodiments that may be combined with other embodiments described herein, one or more first actuators 121 and one or more second actuators, as illustratively shown in FIG. 1 , 132 is arranged in atmospheric space 110 . The expression “atmospheric space” can be understood as a space having atmospheric pressure conditions, ie approximately 1.0 bar. For example, the atmospheric space may be a space provided outside the vacuum chamber. Alternatively, the atmospheric space may be provided by an atmospheric box or atmospheric container (not explicitly shown) provided inside the vacuum chamber.

1 , one or more first actuators 121 and one or more second actuators 132 , according to some embodiments that may be combined with other embodiments described herein ) may be attached to the outer surface of the upper chamber wall 212 of a vacuum chamber, such as a vacuum processing chamber 210 , in particular. Thus, advantageously, the active elements of the one or more magnetic bearings are arranged in an easily accessible location for mounting and/or maintenance, thereby reducing costs. According to one example, as illustratively shown in FIG. 1 , the outer surface of the upper chamber wall 212 is a receiving for receiving one or more first actuators 121 and one or more second actuators 132 . It may include receptions.

As illustratively shown in FIG. 1 , the magnetic levitation system guides the carrier 10 in the transport direction T, according to some embodiments that may be combined with other embodiments described herein. It further includes a non-contact guide arrangement 140 for doing. Typically, the non-contact guide arrangement 140 is arranged in the lower part 15L of the carrier transport space 15 . For example, the non-contact guide arrangement 140 may include one or more passive magnetic bearings 125 . In particular, as exemplarily shown in FIG. 1 , one or more passive magnetic bearings 125 may be arranged vertically. Accordingly, the one or more passive magnetic bearings 125 are configured to provide a magnetic force acting on the carrier in the horizontal direction, in particular the lateral direction L, as exemplarily indicated in FIG. 1 .

For example, as illustratively shown in FIG. 1 , one or more passive magnetic bearings 125 may be provided by passive magnetic elements arranged vertically parallel. Typically, at least two passive magnetic elements are arranged to provide a receptacle for a third magnetic counterpart 183 of the carrier. Thus, in the presence of the carrier, the third magnetic counterpart 183 is arranged between the oppositely arranged passive magnetic elements of the one or more passive magnetic bearings 125 . Typically, the third magnetic counterpart 183 comprises a passive magnetic element. In FIG. 1 , the north pole portion of the passive magnetic elements is schematically indicated by a hatching pattern. The south pole portion of the passive magnetic elements is represented by a blank element adjacent to the north pole portion.

As illustratively shown in FIG. 1 , typically one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 are The S pole portion of the passive magnetic element is arranged to face the S pole portion of the passive magnetic element (the right side of the non-contact guide arrangement 140 shown in FIG. 1 ) of the one or more passive magnetic bearings 125 . Accordingly, the N pole portion of the passive magnetic element of the third magnetic counterpart 183 is the N pole of the passive magnetic element of the one or more passive magnetic bearings 125 (the left side of the non-contact guide arrangement 140 shown in FIG. 1 ). part can be opposed. Accordingly, the one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 are, the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125 . Repulsive magnetic forces may be arranged to act between the magnetic elements. Although not explicitly shown, alternatively the one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 may be combined with the passive magnetic element of the third magnetic counterpart 183 and the one or more passive magnetic elements. It should be understood that attractive magnetic forces may be arranged to act between the passive magnetic elements of the magnetic bearings 125 .

Thus, advantageously, a non-contact lateral guidance of the carrier can be provided. It should also be noted that providing a passive guiding arrangement is particularly well suited for providing robust carrier transport in high temperature vacuum environments at low costs.

In the present disclosure, a “passive magnetic bearing” may be understood as a bearing having passive magnetic elements that are not actively controlled or adjusted, at least during operation of the device. In particular, the passive magnetic bearing may be configured to generate a magnetic field, such as a static magnetic field. In other words, the passive magnetic bearing may not be configured to generate an adjustable magnetic field. For example, the magnetic elements of one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, may be made of a permanent magnet, or may have permanent magnetic properties.

Accordingly, a “passive magnetic element” or “passive magnet” as used herein may be understood as a magnet that is not actively controlled, such as through feedback control. For example, no output parameter, such as the magnetic field strength of a passive magnet, is controlled according to an input parameter such as distance. A “passive magnetic element” or “passive magnet” may rather provide lateral stabilization of the carrier without any feedback control. For example, a “passive magnetic element” or “passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a “passive magnetic element” or “passive magnet” may include one or more electromagnets that may not be actively controlled.

Referring illustratively to FIG. 2 , in accordance with some embodiments that may be combined with other embodiments described herein, the magnetic levitation system moves in a lateral direction L transverse to a transport direction T. It further comprises at least one lateral stabilization device (160) having at least one stabilizing magnet (161) configured to apply a restoring force (F) to the carrier (10). For example, the at least one stabilizing magnet 161 can be arranged above the carrier transport space 15 , in particular in the atmospheric space. In particular, the at least one stabilizing magnet 161 may be attached to the outer surface of the upper chamber wall 212 . Typically, the at least one stabilizing magnet 161 may be arranged at a lateral distance relative to the one or more first actuators 121 . Additionally or alternatively, the at least one stabilizing magnet 161 may be arranged at a lateral distance relative to the one or more second actuators 132 .

Thus, advantageously, the lateral stabilization device 160 can stabilize the carrier in a predetermined lateral position by applying a restoring force to the carrier 10 in the case of a lateral displacement of the carrier. The restoring force F pushes or pulls the carrier 10 back to a predetermined lateral position. Thus, advantageously, the lateral stabilization device 160 can generate a stabilization force configured to counteract displacement of the carrier from the carrier transport space 15 in the lateral direction L. In other words, the lateral stabilization device 160 transports the carrier back to the carrier when it is displaced in the lateral direction L from a predetermined lateral position or equilibrium position (exemplarily shown in FIG. 2 ). It may be configured to create a restoring force F that pushes and/or pulls into space 15 .

As exemplarily shown in FIG. 2 , the at least one stabilizing magnet 161 may be a passive magnet having a north pole and a south pole. In some embodiments, the at least one stabilizing magnet may comprise a plurality of passive magnets that may be arranged in such a way that one lies behind the other in the direction of transport. Typically, the direction of the magnetic field lines inside the at least one stabilizing magnet (running from the S pole to the N pole inside the magnet) may correspond essentially to the lateral direction (L).

Displacement of the carrier 10 from the carrier transport space 15 in the lateral direction L results in at least one stabilizing magnet 161 and at least one carrier stabilizing magnet 162 of the lateral stabilizing device 160 . At least one carrier stabilizing magnet 162 may be attached to the carrier 10 in such a way as to induce a magnetic repulsive force therebetween to cancel the displacement. Thus, advantageously, the carrier is maintained in the equilibrium position shown in FIG. 2 during holding and during transport of the carrier along the transport path.

As illustratively shown in FIG. 2 , the at least one carrier stabilizing magnet 162 is configured such that the direction of the magnetic field lines within the at least one carrier stabilizing magnet 162 corresponds essentially to the lateral direction (L). It may be a passive magnet having a north pole and a south pole arranged to do so.

In particular, the at least one carrier stabilizing magnet 162 may be arranged in a reverse direction compared to the at least one stabilizing magnet 161 of the side stabilizing device 160 so that when the carrier is arranged in the equilibrium position, at least A north pole of the one carrier stabilizing magnet 162 is arranged close to and attracted by the south pole of the at least one stabilizing magnet 161, the at least one carrier stabilizing magnet The south pole of 162 is arranged close to and attracted by the north pole of the at least one stabilizing magnet 161 of the lateral stabilizing device 160 . When the carrier is displaced in a first lateral direction (eg, towards the left side of FIG. 2 ) from the equilibrium position, the north pole of the at least one carrier stabilizing magnet 162 is at least one of the lateral stabilizing device 160 . approaches the north pole of the stabilizing magnet 161 of When the carrier is displaced in a second (opposite) lateral direction (eg, toward the right side of FIG. 2 ) from the equilibrium position, the south pole of the at least one carrier stabilizing magnet 162 becomes lateral stabilizing device 160 . approaches the south pole of at least one stabilizing magnet 161 of Thus, the lateral stabilization device 160 stabilizes the carrier in a predetermined lateral position such that lateral movements of the carrier can be reduced or prevented.

Referring illustratively to FIG. 3 , in accordance with some embodiments that may be combined with other embodiments described herein, the magnetic levitation system further includes a safety arrangement 170 . Typically, the safety arrangement 170 comprises a lateral guard guiding element 171 provided on at least one side of the carrier transport space 15 . For example, the lateral guard guide element 171 may be attached to the inner surface of the upper chamber wall. In particular, the lateral guard guiding element 171 can be laterally spaced from the at least one stabilizing magnet 161 such that the at least one carrier stabilizing magnet 162 attached to the carrier 10 is lateral guard guiding. It may be arranged between the element 171 and the at least one stabilizing magnet 161 . As illustratively shown in FIG. 3 , in the presence of a carrier, a gap is provided between the at least one carrier stabilizing magnet 162 and the lateral guard guiding element 171 . The lateral guard guiding element 171 may be implemented as a guiding rail or a plurality of guiding pins in a row.

As illustratively shown in FIG. 3 , additionally or alternatively, the safety arrangement 170 provides a vertical safety for the carrier 10 , for example when one or more first actuators 121 are deactivated. It may include safety rollers 172 to provide support. Typically, the safety roller 172 is connected to a holder 173 attached to the inner surface of the upper chamber wall 212 . The holder holding the safety roller can also function as a lateral guard guide element.

As shown in FIG. 3 , according to some embodiments that may be combined with other embodiments described herein, two lateral stabilization devices as exemplarily described with reference to FIG. 2 are provided can be For example, a first lateral stabilization device 160A may be provided at a lateral distance relative to one or more first actuators 121 , and a second stabilization device 160B may be provided with one or more second actuators 132 . may be provided at a lateral distance from

Referring illustratively to FIG. 3 , in accordance with some embodiments that may be combined with other embodiments described herein, a protective element 163 , eg, a protective strip, is provided on at least one carrier. It may be attached to the stabilization magnet 162 . In particular, the protective element 163 is configured such that the side of the at least one carrier stabilizing magnet 162 facing the lateral guard guide element 171 and/or the side of the at least one carrier stabilizing magnet 162 facing the holder 173 . can be attached to

Referring illustratively to FIG. 4 , an embodiment of a magnetic levitation system having an asymmetric arrangement of one or more first actuators and one or more second actuators is described. According to some embodiments that may be combined with other embodiments described herein, as exemplarily shown in FIG. 4 , the one or more first actuators 121 are the center of gravity of the carrier 10 to be transported. (G) can be arranged centered on top. In particular, with reference to the embodiment of FIG. 4 , the expression “arranged centrally above the center of gravity G of the carrier” means that a vertical plane 111 extending through the center of gravity G of the carrier also includes one or more thirds. 1 It can be understood that it extends through the actuators 121 . In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect the one or more first actuators 121 . In particular, the vertical plane 111 may approximately intersect the center of the one or more first actuators 121 , for example, with a deviation of ±10% from the center of the one or more first actuators 121 . According to an example, the vertical plane 111 may represent a plane of symmetry with respect to the one or more first actuators 121 . As illustratively shown in FIG. 4 , the one or more second actuators 132 may be arranged laterally with respect to the one or more first actuators 121 . In particular, all of the one or more second actuators 132 may be arranged adjacent to the same side (eg, the left side of FIG. 4 ) of the one or more first actuators 121 . It should be understood that aspects and features as described with reference to FIGS. 1-3 may also be applied to the embodiment shown in FIG. 4 .

Referring illustratively to FIG. 5 , an embodiment of a magnetic levitation system having a symmetrical arrangement of one or more first actuators and one or more second actuators is described. According to some embodiments that may be combined with other embodiments described herein, as exemplarily shown in FIG. 5 , the one or more second actuators 132 are positioned at the center of gravity of the carrier 10 to be transported. It can be arranged centrally above.

[0053] In particular, with reference to the embodiment of FIG. 5 , the expression “centrely arranged above the center of gravity G of the carrier” means that a vertical plane 111 extending through the center of gravity G of the carrier is also , may be understood in that it extends through one or more second actuators 132 . In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect the one or more second actuators 132 . In particular, the vertical plane 111 may generally intersect the center of the one or more second actuators 132 , for example, with a deviation of ±10% from the center of the one or more second actuators 132 . According to an example, the vertical plane 111 may represent a plane of symmetry with respect to the one or more second actuators 132 .

As illustratively shown in FIG. 5 , the one or more first actuators 121 connect a first group 121A of one or more first actuators and a second group 121B of one or more first actuators. may include The first group of one or more first actuators 121A and the second group of one or more first actuators 121B may be arranged laterally with respect to the one or more second actuators 132 . In particular, as illustratively shown in FIG. 5 , a first group 121A of one or more first actuators may be arranged adjacent a first side of one or more second actuators 132 , and one or more second actuators 132 may be arranged adjacent to one another. The second group 121B of one actuator may be arranged adjacent to a second side of the one or more second actuators 132 , the second side opposite the first side. For example, the first group of one or more first actuators 121A and the second group of one or more first actuators 121B may be arranged symmetrically with respect to the one or more second actuators 132 . It should be understood that aspects and features as described with reference to FIGS. 1-3 may also be applied to the embodiment shown in FIG. 5 .

4 and 5 , a carrier 10 according to the present disclosure comprises a main body 13 for carrying an object, such as a substrate or a mask. For example, the main body 13 may be implemented as a carrier plate configured to hold a substrate or mask. Alternatively, the main body 13 may be implemented as a carrier frame configured to hold a substrate or mask. 4 and 5 , the main body has a first end 11 and a second end 12 . The second end 12 is opposite the first end 11 . The first end 11 of the main body 13 has one or more first magnetic counterparts 181 for cooperating with one or more first actuators 121 of the one or more magnetic bearings 120 of the magnetic levitation system. includes The first end 11 further comprises one or more second magnetic counterparts 182 for cooperating with one or more second actuators 132 of the drive unit 130 of the magnetic levitation system. Additionally, the second end 12 of the main body 13 includes a third magnetic counterpart 183 for cooperating with one or more passive magnetic bearings 125 of the non-contact guiding arrangement 140 of the magnetic levitation system. do.

According to some embodiments that may be combined with any other embodiments described herein, the top surface 181S of the one or more first magnetic counterparts 181 and the one or more second magnetic counterparts 181 The top surface 182S of 182 has the same orientation. More specifically, as illustratively shown in FIGS. 4 and 5 , the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 are substantially horizontal. . For example, the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 may be coplanar. Alternatively, there is a small step between the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 , for example ST ≤ 2 mm, in particular ST ≤ 1 mm. A phosphorus step ST may be provided.

4 and 5 , according to some embodiments that may be combined with any other embodiments described herein, the third magnetic counterpart 183 may be a surface 183A and a second surface 183B. The second surface 183B is opposite the first surface 183A. Typically, the orientation of the first surface 183A and the orientation of the second surface 183B are perpendicular to the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 . to be.

According to some embodiments, as illustratively shown in FIG. 4 , the carrier 10 may be an asymmetric carrier, ie, extending through the center of gravity G when the carrier is in a vertical orientation. may not be symmetrical with respect to the vertical plane 111 being Alternatively, as illustratively shown in FIG. 5 , the carrier 10 may be a symmetric carrier, ie, a vertical plane 111 extending through the center of gravity G when the carrier is in a vertical orientation. may be symmetric with respect to

From FIGS. 4 and 5 , it should be understood that the dimensions of the carrier typically correspond to the dimensions of the carrier transport space 15 . Accordingly, the carrier may have a height H _C corresponding to the height H of the carrier transport space 15 . In addition, the carrier may have a width (W _C ) corresponding to the width (W) of the carrier transport space (15). Thus, the aspect ratio of H _C /W _C may be H _C /W _C > 5, in particular H _C /W _C > 10.

According to some embodiments, which may be combined with any other embodiments described herein, at least one carrier stabilizing magnet 162 , as illustratively described with reference to FIGS. 2 and 3 , It can be attached to the first end 11 of the carrier 10 . 6 and 7 , at least one carrier stabilizing magnet 162 may be provided for an asymmetric carrier (see FIG. 6 ) as well as a symmetric carrier (see FIG. 7 ). Also, as illustratively described with reference to FIG. 3 , a protective element 163 , such as a protective strip, may be attached to the at least one carrier stabilizing magnet 162 .

Referring illustratively to FIG. 6 , an arrangement of two asymmetric maglev systems for transporting individual asymmetric carriers is described. In particular, the first asymmetric maglev system 101 providing the first transport path T1 may be provided next to the second asymmetric maglev system 102 providing the second transport path T2 . In particular, the second asymmetric maglev system 102 is horizontally offset from the first asymmetric maglev system 101 . Thus, typically, the second transport path T2 is horizontally offset from the first transport path T1 . As can be seen from FIG. 6 , the components of the first asymmetric magnetic levitation system 101 may substantially correspond to the components of the second asymmetric magnetic levitation system 102 . Accordingly, it should be understood that features as described with reference to FIGS. 1-3 may also be applied to the exemplary embodiment shown in FIG. 6 . As shown in FIG. 6 , the non-contact guiding arrangement 140 of the first asymmetric maglev system 101 and the second asymmetric maglev system 102 may be connected to a common support structure 145 . As illustratively shown in FIG. 6 , a common support structure 145 may be coupled to the lowermost chamber wall 211 .

Referring illustratively to FIG. 7 , an arrangement of two symmetrical maglev systems for transporting individual symmetrical carriers is described. In particular, the first symmetrical maglev system 103 providing the first transport path T1 may be provided next to the second symmetrical maglev system 104 providing the second transport path T2 . In particular, the second symmetrical maglev system 104 is horizontally offset from the first symmetrical maglev system 103 . Accordingly, the second transport path T2 is horizontally offset from the first transport path T1 . As can be seen from FIG. 7 , the components of the first symmetrical magnetic levitation system 103 may substantially correspond to the components of the second symmetrical magnetically levitated system 104 . In addition, it should be understood that features as described with reference to FIGS. 1 to 4 may also be applied to the exemplary embodiment shown in FIG. 7 . As shown in FIG. 7 , the non-contact guiding arrangement 140 of the first symmetrical maglev system 103 and the second symmetrical maglev system 104 may be connected to a common support structure 145 . 7 , a common support structure 145 may be coupled to the lowermost chamber wall 211 .

[0063] Also, as illustratively shown in FIG. 7 , the upper chamber wall 212 comprises a separate plate element, according to some embodiments that may be combined with any other embodiments described herein; In particular, it can be implemented as a tub-like plate element. Thus, advantageously, the one or more first actuators of the one or more magnetic bearings and the one or more second actuators of the drive unit can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing an upper chamber wall having one or more first actuators pre-mounted and one or more second actuators pre-mounted may facilitate the assembly procedure and reduce costs. Thus, compared to the prior art, advantageously, a simpler interface to the chamber is provided.

Referring illustratively to FIG. 8 , a processing system 200 for vertically processing a substrate in accordance with the present disclosure is described. According to embodiments that may be combined with any other embodiments described herein, the processing system 200 includes at least one vacuum processing chamber 210 that includes a processing device 205 . In particular, typically, the processing device 205 is arranged within the vacuum processing chamber 210 , and the processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source. The term "vacuum" can be understood in the sense of a technical vacuum, for example having a vacuum pressure of less than 10 mbar. Typically, the pressure in a vacuum chamber as described herein is from 10 ^-5 mbar to about 10 ^-8 mbar, more typically from 10 ^-5 mbar to 10 ^-7 mbar, even more typically from about 10 ^-6 mbar to about 10 ^-7 mbar. According to some embodiments, the pressure in the vacuum chamber is considered to be the partial pressure or the total pressure of the evaporated material in the vacuum chamber, which may be approximately the same when only the evaporated material is present as a component to be deposited in the vacuum chamber. can be In some embodiments, the total pressure in the vacuum chamber can range from about 10 ^-4 mbar to about 10 ^-7 mbar, particularly when a second component (eg, gas, etc.) is present in addition to the material evaporated in the vacuum chamber. have. Accordingly, the vacuum chamber may be a “vacuum deposition chamber,” ie, a vacuum chamber configured for vacuum deposition.

Also, as illustratively shown in FIG. 8 , the processing system 200 includes one or more magnetic levitation systems for transporting one or more carriers in a transport direction T. For example, the processing system 200 may include a first maglev system 100A and a second maglev system 100B. The first maglev system 100A and the second maglev system 100B may be configured according to any of the embodiments described herein, particularly as described with reference to FIGS. 1-7 . As shown in FIG. 8 , the first maglev system 100A providing the first transport path T1 may be provided next to the second maglev system 100B providing the second transport path T2 . have. In particular, the second maglev system 100B is horizontally offset from the first maglev system 100A. Accordingly, the second transport path T2 is horizontally offset from the first transport path T1 .

The one or more magnetic levitation systems of the processing system 200 may include: one or more magnetic bearings having one or more first actuators 121 for contactlessly holding the carrier 10 within the carrier transport space 15 ( 120). Additionally, the one or more magnetic levitation systems include a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T. One or more first actuators 121 and one or more second actuators 132 are arranged above the carrier transport space 15 .

According to some embodiments, which may be combined with any other embodiments described herein, the processing system 200 directs the carrier in the path switch direction S as illustratively indicated in FIG. 8 . , a track switch assembly 190 configured to move from the first transport path T1 to the second transport path T2 may be further included. Typically, the path switch direction S corresponds to the lateral direction L. Further, the track switch assembly 190 may be configured to move the carrier to a processing position T3 that is horizontally offset from the first and second transport paths. In addition, as exemplarily indicated by double-headed arrows 144 in FIG. 8 , the non-contact guiding arrangement 140 of the first maglev system 100A and the second maglev system 100B is, in the path switch direction S ) may be movable in a vertical direction to enable movement of the carrier in Also, as illustratively shown in FIG. 8 , a mask 206 (eg, an edge exclusion mask) may be provided between the processing position T3 and the processing device 205 .

[0068] A method 300 of transporting a carrier according to the present disclosure is described with illustrative reference to the flowchart shown in FIG. 9 . According to embodiments that may be combined with any other embodiments described herein, the method 300 uses one or more magnetic bearings 120 to non-contact the carrier 10 into the carrier transport space 15 . holding (represented by block 310 in FIG. 9). The one or more magnetic bearings 120 have one or more first actuators 121 arranged above the carrier transport space 15 . The method 300 also comprises transporting the carrier 10 in the transport direction T using the drive unit 130 (represented by block 320 in FIG. 9 ). The drive unit 130 has one or more second actuators 132 arranged above the carrier transport space 15 .

[0069] In view of the above, compared to the prior art, embodiments of the present disclosure advantageously improve a magnetic levitation system, particularly with respect to accurate and smooth transport of carriers in high temperature vacuum environments for high quality display manufacturing. , a processing system, and a method of transporting a carrier. Further, the embodiments described herein advantageously provide more robust contactless carrier transport at lower production costs compared to conventional carrier transport devices.

[0070] While the foregoing relates to embodiments, other and additional embodiments may be envisioned without departing from the basic scope, the scope being determined by the following claims.

Claims (19)

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T), comprising:
one or more magnetic bearings (120) having one or more first actuators (121) for non-contact holding the carrier (10) in a carrier transport space (15);
a driving unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T; and
a contactless guiding arrangement (140) for guiding the carrier (10) in the transport direction (T), arranged in the lower part (15L) of the carrier transport space (15) ( 140);
The one or more first actuators 121 and the one or more second actuators 132 are arranged above the carrier transport space 15 , the one or more first actuators 121 and the one or more second actuators s (132) are arranged in atmospheric space, and the one or more second actuators (132) are arranged laterally with respect to the one or more first actuators (121),
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method of claim 1,
wherein the one or more first actuators (121) and the one or more second actuators (132) are attached to an outer surface of the upper chamber wall (212).
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method of claim 1,
The non-contact guide arrangement (140) comprises one or more passive magnetic bearings (125).
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
at least one lateral stabilization device having at least one stabilization magnet 161 configured to apply a restoring force F to the carrier 10 in a lateral direction L transverse to the transport direction T; 160) further comprising,
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 5. The method of claim 4,
the at least one stabilizing magnet (161) is arranged above the carrier transport space (15),
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
Further comprising a safety arrangement (170),
The safety arrangement 170 comprises a lateral guard guiding element provided on at least one side of the carrier transport space 15 , and a safety for providing vertical safety support for the carrier 10 . at least one element of the group consisting of rollers,
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
The carrier transport space 15 is a vertical carrier transport space having a height (H) extending in a vertical direction and a width (W) extending in a horizontal direction,
where the aspect ratio of H/W is H/W ≥ 5,
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
the one or more first actuators (121) are arranged centrally above the center of gravity of the carrier (10) to be transported,
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
the one or more second actuators (132) are arranged centrally above the center of gravity of the carrier (10) to be transported,
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. 3. The method according to claim 1 or 2,
The one or more first actuators 121 include a first group 121A of one or more first actuators and a second group 121B of one or more first actuators, the first group 121A and the first actuator 121B two groups (121B) are arranged symmetrically with respect to the one or more second actuators (132),
A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. A carrier (10) for a magnetic levitation system according to claim 1 or 2, comprising:
a main body 13 for carrying an object;
the main body has a first end (11) and a second end (12) opposite the first end (11),
the first end (11) comprises one or more first magnetic counterparts (181) for cooperating with one or more first actuators (121) of one or more magnetic bearings (120) of the magnetic levitation system; The first end 11 further comprises one or more second magnetic counterparts 182 for cooperating with one or more second actuators 132 of the drive unit 130 of the magnetic levitation system, and
the second end (12) comprises a third magnetic counterpart (183) for cooperating with one or more passive magnetic bearings (125) of the non-contact guiding arrangement (140) of the magnetic levitation system;
A carrier (10) for a magnetic levitation system. 12. The method of claim 11,
at least one carrier stabilizing magnet (162) attached to the first end (11) of the carrier (10);
A carrier (10) for a magnetic levitation system. A processing system (200) for vertically processing a substrate, comprising:
at least one vacuum processing chamber 210 containing a processing device 205 ; and
one or more magnetic levitation systems (100) for transporting one or more carriers (10) in a transport direction (T);
The one or more magnetic levitation systems include:
one or more magnetic bearings (120) with one or more first actuators (121) for non-contact holding the carrier (10) in a carrier transport space (15), and
a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T);
The one or more first actuators 121 and the one or more second actuators 132 are arranged above the carrier transport space 15 , the one or more first actuators 121 and the one or more second actuators s (132) are arranged in the atmospheric space, and the one or more second actuators (132) are arranged laterally with respect to the one or more first actuators (121),
A processing system 200 for vertically processing a substrate. A method (300) for transporting a carrier (10), comprising:
Non-contact holding of the carrier (10) in the carrier transport space (15) using one or more magnetic bearings (120) having one or more first actuators (121) arranged above the carrier transport space (15) (310);
transporting (320) the carrier (10) in a transport direction (T) using a drive unit (130) having one or more second actuators (132) arranged above the carrier transport space (15); and
guiding the carrier (10) in the transport direction (T) using a contactless guiding arrangement (140) arranged in the lower part (15L) of the carrier transport space (15); ,
The one or more first actuators 121 and the one or more second actuators 132 are arranged in an atmospheric space, and the one or more second actuators 132 are connected to the one or more first actuators 121 arranged laterally with respect to
A method (300) of transporting the carrier (10). delete delete delete delete delete

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