KR101208372B1 - Non-contact transfer system using magnet in different region - Google Patents

Abstract

' 형상을 이루는 측면프레임과; 상기 측면프레임의 단면 중 'ㄷ'자 부분을 감싸는 형태로 상하에 설치되는 LM 가이드와; 상기 이송 스테이지의 편측 상하면에 접착된 상태로 형성되는 제1 및 제2 피동 마그네트와; 상기 LM 가이드 상하 내측에 접착된 상태로 형성되며, 상기 측면프레임을 매개로 하여 상기 제1 및 제2 피동 마그네트와 각각 대응되는 위치에 형성되는 제1 및 제2 구동 마그네트;를 포함하여 이루어진다.The present invention relates to a transfer system using a magnet, and more particularly, a non-contact transfer system using a magnet in a heterogeneous region that can externally control a transfer stage in a vacuum chamber between a vacuum region and an air region by magnetic force of the magnet. It is about.
A non-contact transfer system using a magnet in a heterogeneous region according to the present invention includes a transfer stage for reciprocating through a rail in a vacuum chamber; It forms one side of the chamber, the cross section '

A side frame forming a shape; An LM guide installed above and below to form a 'c' part of the cross section of the side frame; First and second driven magnets formed in a state where they are bonded to one side of the upper and lower surfaces of the transfer stage; And first and second driving magnets formed on upper and lower sides of the LM guide and formed at positions corresponding to the first and second driven magnets, respectively, via the side frames.

Description

Non-contact transfer system using magnet in heterogeneous area {NON-CONTACT TRANSFER SYSTEM USING MAGNET IN DIFFERENT REGION}

The present invention relates to a transfer system using a magnet, and more particularly, a non-contact transfer system using a magnet in a heterogeneous region that can externally control the transfer stage in the vacuum chamber between the vacuum region and the air region by magnetic force of the magnet. It is about.

Recently, with the rapid development of information and communication technology and the expansion of the market, the development of flat panel display devices as display devices has been activated, and the development of semiconductor wafers and semiconductor substrates has been further developed.

The manufacturing of such devices or wafers is carried out in a chamber in which an optimal environment is formed. The chambers may be arranged in a process order, and the plurality of chambers may be arranged in a cluster form in which a plurality of chambers are coupled around the transfer chamber.

In addition, these chambers are often processed in a vacuum chamber due to the characteristics of devices and semiconductors.

In the case of the vacuum processing apparatus, the transfer stage is transferred by the rail in the vacuum chamber, and as the transfer medium, parts such as gears, LM guides and ball screws are mainly used.

However, the use of a plurality of parts as a transport medium in the vacuum chamber in a vacuum state may generate fine particles, particles, etc., depending on the use of the parts, which causes defects in the original product during the vacuum treatment. There are many cases.

SUMMARY OF THE INVENTION An object of the present invention for solving the above-mentioned problems is a conveying system in which a non-contact conveying system uses a magnet to transmit a conveying force in a closed space of vacuum and atmosphere in a system in which a process and a conveying are made in a vacuum chamber. To provide.

In addition, it is to form a conveying parts according to the transfer in the standby region rather than the vacuum region to completely remove the defective products caused by the particles generated from the conveying components.

' 형상을 이루는 측면프레임과; 상기 측면프레임의 단면 중 'ㄷ'자 부분을 감싸는 형태로 상하에 설치되는 LM 가이드와; 상기 이송 스테이지의 편측 상하면에 접착된 상태로 형성되는 제1 및 제2 피동 마그네트와; 상기 LM 가이드 상하 내측에 접착된 상태로 형성되며, 상기 측면프레임을 매개로 하여 상기 제1 및 제2 피동 마그네트와 각각 대응되는 위치에 형성되는 제1 및 제2 구동 마그네트;를 포함하여 이루어진다. In order to solve the above problems, a non-contact transfer system using a magnet in a heterogeneous region includes: a transfer stage reciprocating through a rail in a vacuum chamber; It forms one side of the chamber, the cross section '

A side frame forming a shape; An LM guide installed above and below to form a 'c' part of the cross section of the side frame; First and second driven magnets formed in a state where they are bonded to one side of the upper and lower surfaces of the transfer stage; And first and second driving magnets formed on upper and lower sides of the LM guide and formed at positions corresponding to the first and second driven magnets, respectively, via the side frames.

Here, the first driven magnet and the first driving magnet has a magnetic force in the direction in which the suction force is generated, and the second driven magnet and the second driving magnet is preferably implemented to have a magnetic force in the direction in which the suction force is generated.

Here, the LM guide is preferably formed in the shape of the letter 'c' cross section through the rail on the vertical surface of the side frame.

Here, the positions of the first and second driven magnets are on the same center line, and the center positions of the first driving magnets are formed to be lateral to the left side from the center line of the first driven magnets. The center position is preferably formed to be unilaterally rightward from the center line of the second driven magnet so as to minimize the backlash of the transfer stage.

According to the above-described configuration of the present invention, it is possible to provide a conveying system which is conveyed in a non-contact manner by using a magnet to transmit a conveying force in a closed space of vacuum and atmosphere in a system where processing and conveying are performed in a vacuum chamber. do.

In addition, it is possible to completely remove the product defects caused by the particles generated from the conveying parts by forming the conveying parts according to the conveying system in the standby region rather than the vacuum region.

In addition, by forming the corresponding positions of the driving magnets and the driven magnets asymmetrically, it is possible to reduce the backlash phenomenon that may occur between the driving magnets.

1 is a schematic cross-sectional view of a non-contact transfer system using a magnet in a heterogeneous region according to the present invention.
FIG. 2 is a sectional view taken along line AA of FIG. 1, showing an embodiment of an arrangement position of a magnet.
3 is a sectional view taken along line AA of FIG. 1, showing another embodiment of the arrangement position of the magnet.

Hereinafter, with reference to the accompanying drawings looks at the structure, operation and effect of the non-contact transfer system using a magnet in a heterogeneous region according to the present invention.

1 is a schematic cross-sectional view of a non-contact transfer system using a magnet in a heterogeneous region according to the present invention.

The non-contact conveying system according to the present invention is constructed under conditions having a heterogeneous region which is a vacuum chamber region in a vacuum state and an atmospheric region outside the vacuum chamber.

The vacuum chamber 110 is provided in a vacuum state, and a transfer stage 111 is provided in the z-direction so that a product such as a semiconductor or a substrate is horizontally moved.

The transfer stage 111 has guide slots 112a formed at both lower ends thereof, and the guide slots 112a are configured to move on the rails 113a, and a support 114 for supporting them is formed at the lower ends of the rails 113a. .

' 형상을 갖으며, 이송 스테이지(111) 편측이 '

' 내부로 삽입되도록 구성된다.The vacuum chamber 110 has a cross section of one side '

'Has a shape, one side of the transfer stage 111 is'

It is configured to be inserted into it.

On one side of the transfer stage 111, first and second driven magnets 117 and 118 are formed in a state where the upper and lower portions are bonded to each other.

' 형상의 진공챔버(110) 상하부에는 LM 가이드(115)가 'ㄷ'자 형태의 진공챔버(110) 플랜지를 감싸는 형태로 설치되고, LM가이드 슬롯(112b)과 LM가이드 레일(113b)을 매개로 장착되어 볼스크류(116)에 의해 z축 방향으로 수평이동된다.'

LM guide 115 is installed to surround the flange of the vacuum chamber 110 of the '-' shape in the upper and lower portions of the vacuum chamber 110 of the 'shape, and mediates the LM guide slot 112b and the LM guide rail 113b. It is mounted to be moved horizontally in the z-axis direction by the ball screw 116.

The first driving magnet 119 is installed at a position corresponding to the first driven magnet 117 in the upper and lower portions of the LM guide 115, and the first driving magnet 119 is disposed at the position corresponding to the second driven magnet 118. Two driving magnets 120 are installed.

The first driven magnet 117 is interlocked and transferred by a suction force generated by a magnetic force between the first driven magnet 117 and the first driving magnet 119 according to the driving of the first driving magnet 119. The driven magnet 118 is interlocked and transferred by the suction force generated by the magnetic force between the second driven magnet 118 and the second driving magnet 120 according to the driving of the second driving magnet 120.

The material of the vacuum chamber 110 may be made of a nonmagnetic material so that magnetic force may be generated between the first and second driven magnets 117 and 118 and the first and second driving magnets 119 and 120.

In addition, when constructing a conveying system by configuring driven and driving magnets only on either the upper or lower side with respect to the conveying stage 111, an eccentricity occurs in the upward or downward direction, thereby causing a mechanical load and a conveying defect of the conveying stage 111. It is preferable to construct a transfer system by configuring a pair of upper and lower pairs of the first and second driven magnets 117 and 118 and the first and second driving magnets 119 and 120, respectively.

FIG. 2 is a sectional view taken along the line A-A of FIG. 1, showing an embodiment of the arrangement position of the magnet.

1 is a front cross-sectional view and FIG. 2 is a side cross-sectional view, in which first and second driven magnets 117 and 118 are mounted on the upper and lower surfaces of the transfer stage 111, and the flange surface of the vacuum chamber 110 is interposed between them. First and second driving magnets 119 and 120 are formed inside and below the LM guide 115, respectively.

The first and second driving magnets 119 and 120 are formed at positions where the first and second driven magnets 117 and 118 correspond to each other, and the first and second driving magnets 119 and 120 and the first and second driving magnets 119 and 120 are formed. The polarities of the two driven magnets 117 and 118 are configured to have different polarities so that a suction force between the first driving magnet 119 and the first driven magnet 117 is generated, and the second driving magnet 120 and the second driven The suction force between the magnets 118 is generated, and the first and second driving magnets 119 and 120 interlock with each other when the LM guide 115 is transferred, and the first and second driven magnets are caused by suction magnetic force generated between the magnets. 117 and 118 are also conveyed in conjunction. The transfer stage 111 is configured to be transferred according to the horizontal movement of the first and second driven magnets 117 and 118.

Such a configuration is such that when particles are formed in the vacuum chamber 110 in order to construct various conveying parts for the construction of the conveying system, particles generated from the conveying parts may cause product defects in the vacuum state, so that the vacuum chamber 110 is possible. We propose a system that can build a transport system from the outside but use a magnet for contactless transport.

FIG. 3 is a sectional view taken along the line A-A of FIG. 1, showing another embodiment of the arrangement position of the magnet.

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 1 and shows a structure in which the positions of the first and second driving magnets 119 and 120 are eccentrically installed to the left or the right.

The reason for this is to minimize backlash occurring between the driving magnet and the driven magnet when the transfer stage 111 is moved horizontally back and forth in the stopped state, and the first driving magnet 119 is moved in the left direction on the drawing. By positioning eccentrically or by positioning the second driving magnet 120 in the right direction on the drawing, it is possible to adjust the amount of backlash of the transfer stage 111 and to minimize the sliding phenomenon in the driving direction.
In the magnet gear of the present invention, an external magnet (driving magnet) moves first and a torque is generated by an external magnet moving a certain distance, so that an internal magnet (driven magnet) follows the external magnet. At the time of stop, after the external magnet (drive magnet) stops, the internal magnet (driven magnet) must stop and follow a certain distance and time difference. It is called.
Therefore, when the initial magnet arrangement is not arranged in a line and assembled in a eccentric position in a stationary state as shown in FIG. 3, an effect of reducing backlash occurring between the internal and external magnets described above is generated.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, As will be understood by those skilled in the art. Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

110: vacuum chamber 111: transfer stage
112a: guide slot 112b: LM guide slot
113a: Rail 113b: LM Guide Rail
114: support 115: LM guide
116: ball screw 117: first driven magnet
118: second driven magnet 119: first driving magnet
120: second driving magnet

Claims (4)

A transfer stage reciprocated through the rail in the vacuum chamber;
It forms one side of the chamber, the cross section '

A side frame forming a shape;
An LM guide installed above and below to form a 'c' part of the cross section of the side frame;
First and second driven magnets formed in a state where they are bonded to one side of the upper and lower surfaces of the transfer stage;
And first and second driving magnets formed in a state in which the LM guides are attached to upper and lower sides and formed at positions corresponding to the first and second driven magnets, respectively, via the side frames. Non-contact transfer system using magnet in the area. The method of claim 1,
The first driven magnet and the first driving magnet has a magnetic force in the direction in which suction force is generated,
And the second driven magnet and the second driving magnet have magnetic force in a direction in which suction force is generated. The method of claim 1,
The LM guide is a non-contact conveying system using a magnet in a heterogeneous region, the cross-section is formed in the 'c' shape on the upper and lower vertical surfaces of the side frame via a rail. The method of claim 1,
The positions of the first and second driven magnets lie on the same center line,
The heterogeneous region is formed so that the center position of the first driving magnet is one side to the left from the center line of the first driven magnet, and the center position of the second driving magnet is one side to the right from the center line of the second driven magnet. Contactless transfer system using magnets

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