KR102244820B1 - transfer robot adopting linear motor - Google Patents

Abstract

The present invention relates to a transport robot having excellent stability and durability which does not sag and does not generate particles during high-load transport. In the transport robot transporting an object between a plurality of semiconductors and display process chambers, the transport robot comprises: a robot body capable of elevation and rotation; a base plate provided in the robot body; and first and second hands connected to an upper surface or a side surface of the base plate.

Description

Transfer robot adopting linear motor {transfer robot adopting linear motor}

The present invention relates to a transfer robot that transfers an object between a plurality of semiconductor and display process chambers, and more particularly, a linear motor having excellent stability and durability that does not cause sagging and particles during high load transfer is applied. It relates to a transfer robot.

In semiconductor and display lines, a vacuum robot having a link arm structure is generally used, and a linear method using a linear guide and a timing belt is used in a high-load transport system such as a large substrate or a mask. The link arm structure has advantages in terms of particles and space, but has a disadvantage of relatively low stability, such as sagging when carrying a high load. The linear method is capable of stably transporting, but has problems such as generation of particles and poor durability due to the use of a long and complicated timing belt.

Accordingly, the present invention was completed after repeated research in order to solve the problem of sag generation during high-load transportation and the generation of particles and decrease in durability due to the use of a timing belt.

1. Registered Patent Publication No. 10-1286977 (2013.07.10.) 2. Unexamined Patent Publication No. 10-2020-0056809 (2020.05.25.)

An object of the present invention is to provide a transfer robot having excellent stability and durability in which sagging does not occur and particles do not occur during high load transportation.

One aspect of the present invention for solving the above problem is in a transfer robot for transferring an object between a plurality of semiconductor and display process chambers, a robot body capable of lifting and rotating, and a base plate provided in the robot body It may be a transfer robot including a first hand and a second hand connected to the top or side of the base plate.

The first guide part and the first driving part may be interposed between the base plate and the first hand to be connected, and the second guide part and the second driving part may be interposed and connected between the base plate and the second hand.

The first driving unit and the second driving unit may include a linear motor.

The first driving unit may include a first coil unit having a coil and a first moving unit including a permanent magnet, and the first coil unit may be formed on the base plate and the first moving unit may be formed on the first hand.

It may include a first separation membrane capable of sealing the first coil unit to separate the atmosphere inside the chamber from the atmosphere of the first coil unit.

The second driving unit may include a second coil unit including a coil and a second moving unit including a permanent magnet, and the second coil unit may be formed on the base plate and the second moving unit may be formed on the second hand.

It may include a second separation membrane capable of separating the atmosphere inside the chamber from the atmosphere of the second coil unit by sealing the second coil unit.

The first guide portion may include a first guide rail and a first slider that moves on the first guide rail, and the first guide rail may be formed on the base plate and the first slider may be formed on the first hand.

The second guide portion may include a second guide rail and a second slider that moves on the second guide rail, and the second guide rail may be formed on the base plate and the second slider may be formed on the second hand.

According to the present invention, it is possible to provide a transfer robot having excellent stability and durability in which sagging does not occur and particles are not generated during high load transportation.

1 is a cross-sectional view schematically showing a cross section of a transfer robot according to an aspect of the present invention.
2 is a cross-sectional view of a first modified example of a transfer robot according to an aspect of the present invention.
3 is a cross-sectional view of a second modified example of a transfer robot according to an aspect of the present invention.
4 is a cross-sectional view of a third modified example of a transfer robot according to an aspect of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Embodiments of the present invention may be modified into various other forms, and the scope of the present invention is not limited to the embodiments described below. Embodiments of the present invention are provided to more completely explain the present invention to those with average knowledge in the art. Accordingly, the shapes and sizes of elements in the drawings may be exaggerated for clearer explanation, and elements indicated by the same reference numerals in the drawings are the same elements. In the present invention, the expression “first” or “second” does not mean order or importance, but is merely for classifying components.

The present invention relates to a transfer robot for transferring an object between a plurality of semiconductor and display process chambers, and to a transfer robot having excellent stability and durability in which sagging does not occur and particles are not generated during high load transfer.

1 schematically shows a cross section of a transfer robot according to an aspect of the present invention. 2 schematically shows a cross-section of a first modified example of a transfer robot according to an aspect of the present invention. 3 schematically shows a cross-section of a second modified example of a transfer robot according to an aspect of the present invention. 4 schematically shows a cross-section of a third modified example of a transfer robot according to an aspect of the present invention.

1 to 4, one aspect of the present invention is a transfer robot that transfers an object between a plurality of semiconductor and display process chambers, the robot body 150, 250, 350, which can lift and rotate, 450) and the base plate 130, 230, 330, 430 provided in the robot body 150, 250, 350, 450 and the first hand connected to the top or side of the base plate 130, 230, 330, 430 It may be a transfer robot including 110, 210, 310, 410 and second hand (120, 220, 320, 420).

A semiconductor process or a display process is performed in a chamber in a vacuum state, and various processes such as exposure or time may be sequentially performed on an object such as a wafer or a glass substrate. A transfer robot, which is used to transfer an object such as a wafer or a glass substrate, into or out of each process chamber, or to a next process chamber may also be installed and operated in the transfer chamber in a vacuum state.

The transfer robot may include a robot body (150, 250, 350, 450). The robot body 150, 250, 350, 450 may perform lifting and rotating movements. When an object such as a wafer or a glass substrate is brought into or withdrawn from the process chamber by the lifting motion of the robot body 150, 250, 350, 450, the height of the object can be appropriately adjusted. When multiple process chambers are arranged around the transfer robot, the transfer robot removes an object such as a substrate from the first process chamber, rotates it in the direction of the second process chamber of the next process, and puts the object, such as a substrate, into the second process chamber. I can. The lifting motion and the rotational motion of the transfer robot can be controlled simultaneously and precisely according to the arrangement or position of the process chamber.

Base plates 130, 230, 330, and 430 may be provided on the robot body 150, 250, 350, 450. A large load may be applied on the base plate 130, 230, 330, 430, such as the first hand 110, 210, 310, 410 and the second hand 120, 220, 320, 420 mounted. It may be in the form of a plate made of a metal material that has a large strength that does not deform even under a large load.

However, the present invention is not limited thereto, and the base plates 130, 230, 330, and 430 may be made of ceramic or plastic as long as they have strength enough to withstand a large load. In addition, the base plates 130, 230, 330, and 430 do not necessarily have a plate shape, and may have various shapes or may be formed in plural according to the structural design of the device. The plurality of base plates 130, 230, 330, and 430 must be able to function as a whole. That is, a plurality of base plate components must be combined to form a unity. Through this, stability and reliability can be secured in the movement of the first hand and the second hand. This is because the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) move based on one criterion of the base plate (130, 230, 330, 430). If the base plate (130, 230, 330, 430) is not integrated, stability and reliability in the movement of the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) decrease. Can be.

For example, base plates 130, 230, 330, and 430 may be stacked for height adjustment, but even in this case, the stacked body must be able to function as an integral piece (see FIG. 4). That is, the stacked base plates 130, 230, 330, 430 may be integrally coupled through bolts or the like. The base plates 130, 230, 330, and 430 must be integrated because the first hand 110, 210, 310, 410 and the second hand 120, 220, 320, 420 are moving standards. The first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) can all move on the base plate (130, 230, 330, 430). That is, since the first hand 110, 210, 310, and 410 and the second hand 120, 220, 320, and 420 are driven and moved on the same reference plane, they can exhibit stable behavior. In general, the base plate (130, 230, 330, 430) may be formed on the upper surface of the robot body (150, 250, 350, 450), but is not necessarily limited thereto, depending on the situation, the robot body (150, 250, 250). 350, 450) may also be formed by changing their shape.

The transfer robot is equipped with a hand, and an object such as a wafer or a glass substrate can be introduced or taken out of the process chamber by using the hand. The hand may include a first hand (110, 210, 310, 410) and a second hand (120, 220, 320, 420). The first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) may be arranged vertically. The first hand 110, 210, 310, 410 and the second hand 120, 220, 320, 420 may be referred to as an upper hand and a lower hand, respectively. For example, by using the first hand (110, 210, 310, 410) to insert an object such as a wafer or glass substrate into the process chamber and at the same time using the second hand (120, 220, 320, 420) The object on which the treatment process has been completed may be withdrawn from the process chamber. That is, the first hand (110, 210, 310, 410) is moved forward and the second hand (120, 220, 320, 420) is reversed at the same time, so it is possible to perform the withdrawal and withdrawal at the same time.

The hand consists of a hand body (first hand body 111, 211, 311, 411 and second hand body 121, 221, 321, 421) and a hand finger (first finger 112, 212, 312, 412) and It may include a second finger (122, 222, 322, 422). There may be a plurality of hand fingers, and the plurality of hand fingers may be coupled to and disposed in the hand body in parallel with the moving direction of the hand. Specifically, the first hand (110, 210, 310, 410) has a plurality of first fingers (112, 212, 312, 412) in parallel with the moving direction of the first hand (110, 210, 310, 410). Arranged, and in the second hand (120, 220, 320, 420), a plurality of second fingers (122, 222, 322, 422) are parallel to the traveling direction of the second hand (120, 220, 320, 420). Can be arranged.

The hand may be connected to the base plates 130, 230, 330, and 430. The hand may be connected to the top or side surfaces of the base plates 130, 230, 330, and 430. Specifically, the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) may be connected to the top or side of the base plate (130, 230, 330, 430). Referring to FIG. 1, both the first hand 110 and the second hand 120 may be connected to the upper surface of the base plate 130. Referring to FIG. 2, a first hand 210 may be connected to an upper surface and a side surface of the base plate 230, and a second hand 220 may be connected to an upper surface of the base plate 230. Here, the first driving part of the first hand 210 may be connected to the upper surface of the base plate 230, and the first guide part may be connected to the side surface of the base plate 230. Referring to FIG. 3, a first hand 310 may be connected to a side surface of the base plate 330, and a second hand 320 may be connected to an upper surface of the base plate 330.

A guide portion and a driving portion may be interposed between the base plates 130, 230, 330, and 430 and the hand to be connected. The guide unit may be able to accurately and consistently maintain the movement path of the hand. The driving unit may provide a driving force when the hand advances and retreats.

The guide portion may include a guide rail and a slider. The slider can be moved by sliding it on the guide rail. Here, the guide rails (first guide rails 113, 213, 313, 413 and second guide rails 123, 223, 323, 423) are formed on the base plates 130, 230, 330, 430, and the slider is Can be formed on the hand.

The first guide portion (the first guide rails 113, 213, 313, 413 and the first sliders 114, 214, 314, 414) of the first hand 110, 210, 310, 410) and the second hand ( The second guide portions 120, 220, 320, 420 (the second guide rails 123, 223, 323, 423 and the second sliders 124, 224, 324, 424) are all the same base plate (130, 230). , 330, 430 may be formed by being connected to each other, through which the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) can show a relatively stable behavior with each other. have. This is because both the first hand 110, 210, 310, and 410 and the second hand 120, 220, 320, and 420 move based on the same reference (base plate).

If the criteria of the first hand (110, 210, 310, 410) and the criteria of the second hand (120, 220, 320, 420) are different, the first hand (110, 210, 310, 410) and the second hand ( 120, 220, 320, 420) may require more components to meet the standard of movement, and additional precision control may be required accordingly. In addition, when the standards of the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) are arranged vertically, the height of the product may increase, which is disadvantageous to downsizing the product. can do. In other words, the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420) is more stable and reliable by using the same base plate (130, 230, 330, 430) It can exhibit the behavior of having and contribute to the miniaturization and weight reduction of the product.

However, when assembling each element (slider, guide rail, coil, permanent magnet, separator, etc.) to the standard (base plate), the reference (base plate) and each element are interposed for the purpose of height compensation and additional functions. Artifacts can be added.

The driving unit may include a linear motor. The linear motor is a moving part including a coil part (first coil part 116, 216, 316, 416 and second coil part 126, 226, 326, 426) and a permanent magnet that generates a magnetic field by having a coil (The first moving parts 115, 215, 315, 415 and the second moving parts 125, 225, 325, 425) may be included. The coil portions (the first coil portions 116, 216, 316, 416 and the second coil portions 126, 226, 326, 426) may be formed on the base plates 130, 230, 330, and 430. The moving parts (the first moving parts 115, 215, 315, 415 and the second moving parts 125, 225, 325, 425) may be formed on the hand. The coil unit (the first coil units 116, 216, 316, 416 and the second coil units 126, 226, 326, 426) must be supplied with power from the outside, but a moving unit having a permanent magnet (the first moving unit (115, 215, 315, 415) and the second moving unit (125, 225, 325, 425) do not need to supply power from the outside, so the coil unit (the first coil unit (116, 216, 316, 416) and A second coil part (126, 226, 326, 426) is formed on the base plate (130, 230, 330, 430), and a moving part (the first moving part (115, 215, 315, 415) and the second moving part It is preferable to form (125, 225, 325, 425)) on the moving part. The coil part (the first coil part 116, 216, 316, 416) and the first coil part (the first coil part 116, 216, 316, 416) and the first coil part (the first coil part 116, 216, 316, 416) and 2 This is because power can be supplied to the coil units 126, 226, 326, 426). On the other hand, a coil part (first coil part 116, 216, 316, 416 and second coil part 126, 226, 326, 426) disposed inside the transfer chamber 160, 260, 360, 460 in a vacuum state) In order to provide a power supply cable to the transport chamber (160, 260, 360, 460), an expensive part (feed through) that connects the external atmosphere of the atmospheric pressure transfer chamber (160, 260, 360, 460) and the internal atmosphere of the vacuum transfer chamber (160, 260, 360, 460). ) May be required, and a coil unit (first coil units 116, 216, 316, 416) and second coil units 126, 226, 326 inside the vacuum transfer chambers 160, 260, 360, 460 , 426)) is installed, since heat transfer is hardly performed in the internal space of the transfer chambers 160, 260, 360, 460, a separate heat dissipation structure may be required to dissipate heat generated from the coil to the outside. Because there is.

Looking specifically at the case of the first hand (110, 210, 310, 410), the first guide portion between the base plate (130, 230, 330, 430) and the first hand (110, 210, 310, 410) And the first driving unit may be interposed to be connected. The first driving unit may include a linear motor. Specifically, the first driving unit may include first coil units 116, 216, 316, and 416 including coils and first moving units 115, 215, 315, and 415 including permanent magnets. Here, the first coil parts 116, 216, 316, 416 are formed on the base plates 130, 230, 330, 430, and the first moving parts 115, 215, 315, 415 are the first hands 110, 210 , 310, 410). The first guide part may include first guide rails 113, 213, 313, 413 and first sliders 114, 214, 314, 414 moving on the first guide rail. Here, the first guide rails 113, 213, 313, 413 are formed on the base plates 130, 230, 330, 430, and the first sliders 114, 214, 314, 414 are the first hands 110, 210, 310, 410).

Looking specifically at the case of the second hand (120, 220, 320, 420), a second guide portion between the base plate (130, 230, 330, 430) and the second hand (120, 220, 320, 420) and The second driving unit may be interposed and connected. The second driving unit may include a linear motor. Specifically, the second driving unit may include a second coil unit 126, 226, 326, 426 including a coil and a second moving unit 125, 225, 325, 425 including a permanent magnet. Here, the second coil parts 126, 226, 326, 426 are formed on the base plates 130, 230, 330, 430, and the second moving parts 125, 225, 325, 425 are the second hands 120, 220 , 320, 420). The second guide part may include second guide rails 123, 223, 323, and 423 and second sliders 124, 224, 324, and 424 that move on the second guide rail. Here, the second guide rails 123, 223, 323, 423 are formed on the base plates 130, 230, 330, 430, and the second sliders 124, 224, 324, 424 are the second hands 120, 220, 320, 420).

Referring to FIG. 1, two first guide portions (the first guide rail 113 and the first slider 114) of the first hand 110 are symmetrical on the lower surfaces of both ends of the first hand body 111, respectively. And two first driving units (the first coil unit 116 and the first moving unit 115) may be formed symmetrically as well. Two second guide portions (the second guide rail 123 and the second slider 124) of the second hand 120 may be symmetrically formed on the lower surface of the second hand body 121, and the second One driving unit (the second coil unit 126 and the second moving unit 125) may be formed at the center of the lower surface of the second hand body 121. However, the present invention is not limited thereto, and a plurality of second driving units may be formed symmetrically. As shown, stability and reliability in the movement of the first hand 110 and the second hand 120 may be improved by symmetrically arranging the first guide, the first driving part, the second guide, and the second driving part. .

2, except that the first guide portion (the first guide rail 213 and the first slider 214) of the first hand 210 is formed on the side of the base plate 230 , The same as in the case of FIG. In FIG. 2, the first driving part (the first coil part 216 and the first moving part 215) is formed on the upper surface of the base plate 230, but considering the conditions, the first guide part (the first guide rail ( 213) and the first slider 214) are formed on the upper surface of the base plate 230, and the first driving unit (the first coil unit 216 and the first moving unit 215) is attached to the side of the base plate 230. It can also be formed in.

Referring to FIG. 3, a first guide part (a first guide rail 313 and a first slider 314) and a first driving part (a first coil part 316 and a first moving part) of the first hand 310 Except for the fact that all 315) are formed on the side surfaces of the base plate 330, they may have the same configuration as in the case of FIG. 1. In this case, the thickness of the base plate 330 may be increased.

Referring to FIG. 4, in order to adjust the height difference between the first hand 410 and the second hand 420, an additional base plate 431 to which the second hand 420 is connected may be stacked. The additional base plate 431 must be integrally coupled with the original base plate 430 through bolting or the like to perform the same function as a reference surface. In addition, two first guide portions (the first guide rail 413 and the first slider 414) are formed symmetrically on the lower surfaces of both ends of the first hand body 411, but the first driving unit (the first coil unit ( 416 and the first moving part 415 may be formed on one lower surface of the first hand body 411. Since the two first guides are formed symmetrically, there will be no problem in the movement stability and reliability of the first hand 410, but the first driving unit (the first coil unit 416 and the first moving unit 415) is Since only one is formed on one side, the first driving unit (the first coil unit 416 and the first moving unit 415) needs to have sufficient driving force so that an obstacle does not occur in the movement of the first hand 410.

Both ends of the first hand body (111, 211, 311, 411) are the product design conditions (the relative positions of the first hand (110, 210, 310, 410) and the second hand (120, 220, 320, 420), 1 guide part (first guide rails 113, 213, 313, 413 and first sliders 114, 214, 314, 414) and a first driving part (first coil parts 116, 216, 316, 416) and The first moving parts 115, 215, 315, and 415 may have various shapes depending on whether the position at which the base plates 130, 230, 330, and 430 are connected to the top surface or the side surface). In FIG. 4, after both ends of the first hand body 410 extend downward, one end of the first hand body 410 has a shape that extends inward again, but is not limited thereto.

Cables for supplying power are provided in the coil part of the liner motor. When used for a long time, the cable is deteriorated due to heat generation and mechanical wear, and dust particles (particles) may be generated from the cable's sheath. These dust particles may cause fatal defects in semiconductor processes, etc., and thus it is necessary to prevent the generation of dust particles. For this purpose, only the coil part can be spatially separated and blocked from the transfer chamber in which the wafer or glass substrate is transferred. That is, the coil part (the first coil part 116, 216, 316, 416 and the second coil part 126, 226, 326, 426) formed on the base plate 130, 230, 330, 430 is transferred to the transfer chamber 160 Separation membranes 140, 240, 340, and 440 that can be spatially separated and blocked from the atmosphere of the, 260, 360, and 460 may be formed. That is, by sealing the first coil part and the second coil part formed on the base plates 130, 230, 330, 430, the atmosphere inside the chamber and the first coil part 116, 216, 316, 416 and the second coil part Separation membranes 140, 240, 340, and 440 capable of separating the atmosphere of (126, 226, 326, 426) may be formed. In addition, since the separation membranes 140, 240, 340, and 440 spatially block the space between the coil unit and the moving unit, but not magnetically, the separation membrane may be made of a material through which a magnetic field can pass.

Specifically, the separation membranes 140, 240, 340, and 440 may have a cap (hat) shape. A coil part (first coil part 116, 216, 316, 416 and second coil part 126, 226, 326, 426) is placed in the inside of the cap, and the periphery of the cap is placed on the base plate 130, 230, 330, 430) can be fixed. The base plate 130, 230, 330, 430 and the cap-shaped separation membranes 140, 240, 340, 440 are completely sealed with an O-ring (not shown), etc., so that the coil part (the first coil part 116, 216, 316, 416 and the second coil unit 126, 226, 326, 426) may be completely blocked from the atmosphere inside the transfer chambers 160, 260, 360, and 460. Accordingly, it is possible to prevent dust particles (particles) that may be generated in the coil unit from contaminating an object such as a wafer in the transfer chamber.

In addition, the atmosphere of the coil part (the first coil part 116, 216, 316, 416 and the second coil part 126, 226, 326, 426) formed by the separators 140, 240, 340, 440 May form a vacuum atmosphere or an atmospheric atmosphere. In the case of an atmospheric atmosphere, a feed through required to supply power to the coil unit (the first coil units 116, 216, 316, 416 and the second coil units 126, 226, 326, 426) in a vacuum atmosphere The advantage is that you do not need to use ). However, it is necessary to properly adjust the thickness so that deformation does not occur according to the difference in atmospheric pressure. On the contrary, in the case of a vacuum atmosphere, there is no difference in atmospheric pressure and the problem that the separator is deformed has a disadvantage that a feed through must be used.

The terms used in the present invention are for describing specific embodiments and are not intended to limit the present invention. Singular expressions should be viewed as including plural meanings, unless the context is clear. Terms such as "comprise" or "have" are meant to mean the presence of features, numbers, steps, actions, elements, or combinations thereof described in the specification, and are not intended to exclude them.

The present invention is not limited by the above-described embodiments and the accompanying drawings, but is intended to be limited by the appended claims. Therefore, various types of substitutions, modifications and changes will be possible by those of ordinary skill in the art within the scope not departing from the technical spirit of the present invention described in the claims, and this should also be considered to be within the scope of the present invention. something to do.

110, 210, 310, 410: first hand
111, 211, 311, 411: first hand body
112, 212, 312, 412: first finger
113, 213, 313, 413: first guide rail
114, 214, 314, 414: first slider
115, 215, 315, 415: first moving part
116, 216, 316, 416: first coil unit
120, 220, 320, 420: second hand
121, 221, 321, 421: the second hand body
122, 222, 322, 422: second finger
123, 223, 323, 423: second guide rail
124, 224, 324, 424: second slider
125, 225, 325, 425: second moving part
126, 226, 326, 426: second coil unit
130, 230, 330, 430: base plate
140, 240, 340, 440: first and second separators
150, 250, 350, 450: robot body
160, 260, 360, 460: transfer chamber
161, 261, 361, 461: vacuum atmosphere
431: additional base plate

Claims (9)

In the transfer robot for transferring an object between a plurality of semiconductor and display process chambers,
A robot body capable of lifting and rotating, a base plate provided in the robot body, and a first hand and a second hand connected to an upper surface or a side surface of the base plate,
A first guide part and a first driving part are interposed and connected between the base plate and the first hand, and a second guide part and a second driving part are interposed and connected between the base plate and the second hand,
The first driving unit and the second driving unit include a linear motor,
The first driving unit includes a first coil unit having a coil and a first moving unit including a permanent magnet, wherein the first coil unit is formed on the base plate, and the first moving unit is formed on the first hand. ,
And a first separation membrane capable of separating the atmosphere inside the transfer chamber and the atmosphere of the first coil unit by sealing the first coil unit,
The second driving unit includes a second coil unit including a coil and a second moving unit including a permanent magnet, wherein the second coil unit is formed on the base plate, and the second moving unit is formed on the second hand. ,
And a second separation membrane capable of separating the atmosphere in the transfer chamber and the atmosphere of the second coil unit by sealing the second coil unit,
The atmosphere of the transfer chamber forms a vacuum atmosphere, and the atmosphere of the first coil unit and the atmosphere of the second coil unit are connected to the outside of the transfer chamber to form an atmospheric pressure atmosphere.
delete delete delete delete delete delete The method of claim 1,
The first guide portion includes a first guide rail and a first slider that moves on the first guide rail, wherein the first guide rail is formed on the base plate, and the first slider is formed on the first hand. , Transfer robot.
The method of claim 1,
The second guide portion includes a second guide rail and a second slider that moves on the second guide rail, wherein the second guide rail is formed on the base plate, and the second slider is formed on the second hand. , Transfer robot.

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