CN111994584A - Article conveying body - Google Patents
Article conveying body Download PDFInfo
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- CN111994584A CN111994584A CN202010461150.8A CN202010461150A CN111994584A CN 111994584 A CN111994584 A CN 111994584A CN 202010461150 A CN202010461150 A CN 202010461150A CN 111994584 A CN111994584 A CN 111994584A
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- Prior art keywords
- facing
- conductor
- opposing
- magnet unit
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- 239000004020 conductor Substances 0.000 claims abstract description 95
- 230000033001 locomotion Effects 0.000 claims abstract description 51
- 230000007246 mechanism Effects 0.000 claims description 31
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 29
- 238000012423 maintenance Methods 0.000 description 8
- 230000003993 interaction Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
The invention provides an article conveying body. The article carrier includes: a 1 st member coupled to a traveling body; a 2 nd member coupled to the holding portion; a guide device, which takes a surface crossed with the opposite direction of the 1 st component and the 2 nd component as a crossed surface and guides the relative movement of the 1 st component and the 2 nd component along the direction of the crossed surface; and a returning device for returning the relative positions of the 1 st member and the 2 nd member to the reference position. The magnet unit and the conductor are provided so that the magnet unit and the conductor face each other in a region where the 1 st facing portion and the 2 nd facing portion face each other, and the article transport body is configured so that the magnet unit and the conductor move relative to each other in accordance with the relative movement of the 1 st member and the 2 nd member.
Description
Technical Field
The present invention relates to an article carrier including a traveling body and a holding portion for holding an article.
Background
An example of the article carrier as described above is disclosed in japanese patent application laid-open No. 2016 and 94263 (patent document 1). In the description of the background art, the reference numerals shown in parentheses are those of patent document 1. Patent document 1 discloses a ceiling transport vehicle (1) including a traveling section (16), a transport object support section (32) for supporting a transport object (6), and a support mechanism (23) for supporting the transport object support section (32) with respect to the traveling section (16). The support mechanism (23) is provided with a lifting body (31) supported by the traveling movement unit (16) via a lifting operation mechanism (24), and a guide support unit (35) that supports the conveyed object support unit (32). In the ceiling transport vehicle (1), the transmission of vibration of the transported object (6) supported by the transported object support section (32) from the traveling section (16) side is suppressed by providing the buffer body (36) that is elastically deformable between the elevating body (31) and the guide support section (35).
Disclosure of Invention
As described above, in the configuration described in patent document 1, the buffer body is provided between the 1 st member (the vertically movable body in patent document 1) coupled to the traveling body and the 2 nd member (the guide support portion in patent document 1) coupled to the holding portion, whereby the transmission of vibration between these two members is suppressed, and the transmission of vibration of the article held by the holding portion from the traveling body side is suppressed. In such a configuration, since the cushion body deforms in accordance with the relative movement of the 1 st member and the 2 nd member, maintenance work for the cushion body such as exchange of the cushion body is required as described in paragraph 0013 of patent document 1. From the viewpoint of reducing the running cost of equipment using the article carrier, it is desirable to suppress the frequency of maintenance work to a small extent.
Therefore, it is desirable to realize the following techniques: the structure for suppressing the transmission of vibration from the traveling body side to the article held by the holding portion can be a structure with low maintenance necessity.
An article carrier according to the present disclosure includes: a traveling body; a holding section for holding an article; a 1 st member coupled to the traveling body; a 2 nd member coupled to the holding portion and disposed to face the 1 st member; a guide device which guides relative movement of the 1 st member and the 2 nd member along a direction of a cross plane, the cross plane being a plane crossing a facing direction of the 1 st member and the 2 nd member; and a returning device for returning the relative position of the 1 st member and the 2 nd member to a reference position; the magnet unit and the conductor are provided so that the magnet unit and the conductor face each other in a region where the 1 st facing portion and the 2 nd facing portion face each other, and the magnet unit and the conductor are configured to move relatively with the relative movement of the 1 st member and the 2 nd member.
According to this configuration, since the article carrier is configured such that the magnet unit and the conductor move relative to each other in accordance with the relative movement of the 1 st member and the 2 nd member, when the 1 st member and the 2 nd member move relative to each other, a braking force that hinders the relative movement of the 1 st member and the 2 nd member can be generated by the interaction between the eddy current generated in the conductor and the magnetic field generated by the magnet unit. That is, the magnetic damper can be configured using the magnet unit and the conductor. Thus, the transmission of vibration between the 1 st member and the 2 nd member can be suppressed by the magnetic damper while the relative positions of the 1 st member and the 2 nd member are returned to the reference position by the action of the returning device, and the transmission of vibration of the article held by the holding portion from the traveling body side can be suppressed. Further, since the braking force can be generated without bringing the magnet unit into contact with the conductor, the necessity of maintenance of the magnet unit and the conductor can be suppressed to a low level.
As described above, according to the above configuration, the structure for suppressing the transmission of the vibration of the article held by the holding portion from the traveling body side can be made a structure with low maintenance necessity.
Further features and advantages of the article carrier will become apparent from the following description of the embodiment described with reference to the drawings.
Drawings
Fig. 1 is a side view of an article carrier according to embodiment 1.
Fig. 2 is a vertical sectional front view of the support portion according to embodiment 1.
Fig. 3 is a cross-sectional plan view of the support portion according to embodiment 1.
Fig. 4 is a longitudinal sectional front view of the article carrier according to embodiment 2.
Fig. 5 is a cross-sectional plan view of the support portion according to embodiment 2.
Fig. 6 is a vertical sectional front view of the support portion according to another embodiment.
Detailed Description
[ 1 st embodiment ]
Embodiment 1 of an article carrier will be described with reference to the drawings (fig. 1 to 3).
As shown in fig. 1, the article carrier 1 includes a traveling body 4 and a holding portion 5 for holding an article 9. The holding portion 5 is supported by the traveling body 4 via the support portion 3. Here, the traveling body 4 is configured to travel along the traveling rails 2 (here, the pair of traveling rails 2). Specifically, the running mechanism 41 provided in the running body 4 includes running wheels 43 that roll on the running rail 2, and a running motor 42 (an example of a driving force source) that drives the running wheels 43. The travel wheels 43 are driven by the travel motor 42, and the traveling body 4 travels along the travel rail 2. The travel mechanism 41 is provided with guide wheels 44 that guide the travel of the traveling body 4 along the travel rail 2, and the traveling body 4 travels along the travel rail 2 while the guide wheels 44 are guided in contact with the side surfaces of the travel rail 2.
The running rail 2 is provided to extend in the horizontal direction H along which the running body 4 runs. Here, the running rail 2 is fixed to the ceiling in a state suspended and supported from the ceiling. That is, the article carrier 1 is a ceiling transport vehicle that travels along a travel rail 2 provided on the ceiling side. The support portion 3 supports the holding portion 5 with respect to the traveling body 4 in a state where the holding portion 5 is disposed on the lower side (lower side in the vertical direction V, the same applies hereinafter) with respect to the traveling body 4. Here, the support portion 3 supports the holding portion 5 in a state of being suspended and supported by the elevating mechanism 45 provided in the traveling body 4. That is, the holding portion 5 is suspended and supported by the traveling body 4.
The lifting mechanism 45 includes a transmission member 48 such as a belt or a wire, a winding body 47 around which the transmission member 48 is wound, and a lifting motor 46 (an example of a driving force source) for rotating the winding body 47. The support portion 3 (specifically, the 1 st member 10 described later) (see fig. 2) is connected to the distal end portion of the transmission member 48, and the winding body 47 is rotated in the forward direction or the reverse direction by the lifting motor 46 to wind or pull out the transmission member 48, whereby the support portion 3 is lifted or lowered while being suspended and supported by the transmission member 48. The lifting mechanism 45 lifts and lowers the support portion 3 between a 1 st height (height shown in fig. 1) and a 2 nd height, the 1 st height being a height at which the traveling body 4 travels, and the 2 nd height being a height lower than the 1 st height and being a height at which the article 9 is transferred to a transfer target portion (for example, a loading port of the processing apparatus) of the article 9. The traveling body 4 includes a cover portion 40, and in a state where the support portion 3 is located at the 1 st height, the cover portion 40 covers an upper side (an upper side in the vertical direction V, the same applies hereinafter) of the article 9 held by the holding portion 5 and both sides in the traveling direction (here, the horizontal direction H). As will be described in detail later, the holding portion 5 is coupled to the support portion 3 (specifically, the 2 nd member 20 described later) that is suspended and supported by the traveling body 4. Thus, the holding portion 5 is suspended and supported by the traveling body 4 via the support portion 3.
The holding portion 5 is configured to hold the article 9 from above. Here, the article 9 transported by the article transport body 1 is a container for storing a semiconductor wafer, specifically, a Front Opening Unified Pod (FOUP). The holding portion 5 includes a gripping portion 50 (here, a pair of gripping portions 50) that grips a flange portion 9a formed on an upper portion of the article 9. That is, the holding portion 5 holds the article 9 by gripping the article 9. A recess recessed downward is formed in the upper surface of the flange portion 9a, and the engagement portion 52 provided in the holding portion 5 is configured to be fitted into the recess from above in a state where the article 9 is held by the holding portion 50. This improves the stability of holding the article 9 by the holding portion 5. The article 9 is not limited to a container for housing semiconductor wafers, and for example, the article 9 may be a container for housing a housing (such as a reticle or a glass substrate) other than semiconductor wafers or an article other than the container.
The holding portion 5 includes a gripping motor 51 (an example of a driving force source, see fig. 2) that switches the state of the gripping portion 50, and the state of the gripping portion 50 is switched between a support state (a state shown in fig. 1) in which the flange portion 9a is supported and a release state in which the support of the flange portion 9a is released by the driving of the gripping motor 51. Specifically, the state of the gripping portion 50 is switched from the support state to the release state by changing at least one of the position and the posture of each of the pair of gripping portions 50 and moving the pair of gripping portions 50 closer to each other, and the state of the gripping portion 50 is switched from the support state to the release state by changing at least one of the position and the posture of each of the pair of gripping portions 50 and moving the pair of gripping portions 50 away from each other. When the article 9 is transferred from the article transport body 1 to the transfer target site, the state of the grip 50 is switched from the supported state to the released state in the state where the support portion 3 is located at the above-described level 2, and when the article 9 is transferred from the transfer target site to the article transport body 1, the state of the grip 50 is switched from the released state to the supported state in the state where the support portion 3 is located at the level 2.
Hereinafter, a structure of the article carrier 1 according to the present embodiment for suppressing transmission of vibration of the article 9 held by the holding portion 5 from the traveling body 4 side will be described. As shown in fig. 2, the article carrier 1 includes a 1 st member 10 coupled to the traveling body 4 and a 2 nd member 20 coupled to the holding portion 5. The 1 st member 10 is coupled to the traveling structure 4 to be supported by the traveling structure 4, and the 2 nd member 20 is coupled to the holding portion 5 to support the holding portion 5. The 1 st member 10 is not coupled to the traveling body 4 via the 2 nd member 20, and the 2 nd member 20 is not coupled to the holding portion 5 via the 1 st member 10. In the present embodiment, the 1 st member 10 is coupled to the traveling body 4 (specifically, a main body portion including the traveling mechanism 41) via the lifting mechanism 45. In the present embodiment, the 2 nd member 20 is coupled to the holding portion 5 via the support mechanism 80. The support mechanism 80 is a mechanism capable of supporting the grip 50 with respect to the No. 2 member 20 by switching the state of the grip 50 between a support state and a release state. Although details are omitted, in the example shown in fig. 2, the support mechanism 80 is a linear motion mechanism similar to the linear motion mechanism 60 described later.
The 2 nd member 20 is disposed to face the 1 st member 10. Specifically, the 2 nd member 20 is disposed to face the 1 st member 10 with a gap therebetween. The 2 nd member 20 is supported by the traveling body 4 via the 1 st member 10. In the present embodiment, the 2 nd member 20 is supported by the 1 st member 10 in a state of being disposed on the lower side with respect to the 1 st member 10. Here, the 1 st facing portion 11 is defined as a facing portion of the 1 st member 10 facing the 2 nd member 20, and the 2 nd facing portion 21 is defined as a facing portion of the 2 nd member 20 facing the 1 st member 10. As shown in fig. 2, in the present embodiment, a part of the 1 st member 10 constitutes the 1 st facing portion 11, and the entire 2 nd member 20 constitutes the 2 nd facing portion 21. The 1 st opposing portion 11 and the 2 nd opposing portion 21 are formed in a flat plate shape, and the 1 st opposing portion 11 and the 2 nd opposing portion 21 are arranged in parallel to each other. In the present embodiment, the 1 st member 10 and the 2 nd member 20 are arranged such that the facing direction Z of the 1 st member 10 and the 2 nd member 20 (specifically, the facing direction of the 1 st facing portion 11 and the 2 nd facing portion 21) is along the vertical direction V. In other words, the 1 st component 10 is disposed in an orientation in which the 1 st opposing portion 11 is along the horizontal plane, and the 2 nd component 20 is disposed in an orientation in which the 2 nd opposing portion 21 is along the horizontal plane.
In the present embodiment, the 1 st member 10 and the 2 nd member 20 are provided on the support portion 3. Specifically, the support portion 3 includes a case 3a formed in a box shape, and a housing space for a magnet unit 30 and the like described later is formed inside the case 3 a. The 1 st member 10 constitutes an upper wall portion (a portion covering the housing space from above) of the housing 3 a. In the example shown in fig. 2, the entirety of the 1 st member 10 constitutes an upper wall portion of the housing 3 a. Further, the front end portion of the power transmission member 48 is coupled to the 1 st member 10, whereby the 1 st member 10 is suspended and supported by the traveling body 4. On the other hand, the 2 nd member 20 is accommodated in the accommodating space of the housing 3 a.
As shown in fig. 2 and 3, the article carrier 1 includes a guide device 6 that guides the relative movement of the 1 st member 10 and the 2 nd member 20 in the direction along the intersecting surface, and a return device 7 that returns the relative position of the 1 st member 10 and the 2 nd member 20 to the reference position. Here, the intersecting surface is a surface intersecting the opposing direction Z. In the present embodiment, the intersecting surface is a surface orthogonal to the facing direction Z. As described above, in the present embodiment, the opposing direction Z is a direction along the vertical direction V, and therefore the intersecting surface is a surface along a horizontal plane. Here, two directions orthogonal to each other along the intersecting surface are referred to as a 1 st direction X and a 2 nd direction Y. In the present embodiment, the 1 st direction X and the 2 nd direction Y are both horizontal directions along a horizontal plane. In the present embodiment, the 2 nd direction Y is a direction along the traveling direction of the traveling body 4 (horizontal direction H in fig. 1).
In the present embodiment, the guide device 6 is configured to guide the relative movement of the 1 st member 10 and the 2 nd member 20 in a specific direction (here, the 2 nd direction Y) along the intersecting surface. Specifically, as shown in fig. 2 and 3, the guide device 6 includes a pair of linear motion mechanisms 60 disposed apart from each other in the 1 st direction X. Each of the pair of linear motion mechanisms 60 includes a guide portion 61 and a guided portion 62. The guide portion 61 is provided on one of the 1 st opposing portion 11 and the 2 nd opposing portion 21 so as to extend in the 2 nd direction Y, and the guided portion 62 is provided on the other of the 1 st opposing portion 11 and the 2 nd opposing portion 21. The guided portion 62 is configured to be movable in the 2 nd direction Y while being guided by the guide portion 61. In this example, the guide portion 61 is provided in the 2 nd opposing portion 21, and the guided portion 62 is provided in the 1 st opposing portion 11. Specifically, the guide portion 61 is provided on the 2 nd opposing surface 21a of the 2 nd opposing portion 21, which is the surface on the 1 st opposing portion 11 side, and the guided portion 62 is provided on the 1 st opposing surface 11a of the 1 st opposing portion 11, which is the surface on the 2 nd opposing portion 21 side. The 1 st facing surface 11a and the 2 nd facing surface 21a are formed in a planar shape along the intersecting surface, and the 1 st facing surface 11a and the 2 nd facing surface 21a are arranged in parallel with each other with a gap therebetween. In addition, unlike this configuration, the guide portion 61 may be provided in the 1 st opposing portion 11 and the guided portion 62 may be provided in the 2 nd opposing portion 21.
In the present embodiment, the guide portion 61 is a guide rail provided to extend in the 2 nd direction Y, and the guided portion 62 is a guide block engaged with the guide rail. Here, the guide rail constituting the guide portion 61 is fixed to the 2 nd opposing portion 21 (specifically, the 2 nd opposing surface 21 a), and the guide block constituting the guided portion 62 is fixed to the 1 st opposing portion 11 (specifically, the 1 st opposing surface 11 a). In this example, each of the pair of linear motion mechanisms 60 includes a pair of guided portions 62 that engage with the guide portion 61 at mutually different positions in the 2 nd direction Y. The guided portion 62 engages with the guide portion 61 in a state where relative movement in the 2 nd direction Y with respect to the guide portion 61 is permitted and relative movement in each direction orthogonal to the 2 nd direction Y with respect to the guide portion 61 is restricted. Thus, the 2 nd member 20 is supported by the 1 st member 10 in a state in which relative movement in the 2 nd direction Y with respect to the 1 st member 10 is permitted and movement in the 1 st direction X and the opposing direction Z with respect to the 1 st member 10 is restricted. As a result, the facing distance between the 1 st facing portion 11 and the 2 nd facing portion 21 (in other words, the facing distance between the 1 st facing surface 11a and the 2 nd facing surface 21 a) is maintained at a constant interval. That is, the guide device 6 is configured to guide the relative movement of the 1 st member 10 and the 2 nd member 20 along the direction of the intersecting surface while maintaining the interval between the 1 st opposing portion 11 and the 2 nd opposing portion 21.
The returning device 7 is configured to return the relative position in the guiding direction of the 1 st member 10 and the 2 nd member 20 to the reference position, with the guiding direction of the 1 st member 10 and the 2 nd member 20 being the guiding direction of the guiding device 6. In the present embodiment, the guide direction is the 2 nd direction Y, and the returning device 7 is configured to return the relative positions of the 1 st member 10 and the 2 nd member 20 in the 2 nd direction Y to the reference position. As shown in fig. 2 and 3, the returning device 7 includes a biasing member 70 (here, a coil spring) for returning the relative positions of the 1 st member 10 and the 2 nd member 20 to the reference position. The urging member 70 is configured to expand and contract in the 2 nd direction Y.
In the present embodiment, the returning device 7 includes two kinds of biasing members 70, i.e., a biasing member 70 for biasing the 2 nd member 20 to one side in the 2 nd direction Y with respect to the 1 st member 10 and a biasing member 70 for biasing the 2 nd member 20 to the other side in the 2 nd direction Y with respect to the 1 st member 10, and a position where the biasing forces of the two kinds of biasing members 70 are balanced (a position shown in fig. 3) is set as a reference position. Here, the two kinds of urging members 70 are arranged in the 2 nd direction Y. The two types of biasing members 70 arranged in the 2 nd direction Y are arranged on both sides in the 1 st direction X with respect to the center position in the 1 st direction X between the pair of linear motion mechanisms 60. The two types of biasing members 70 disposed on one side in the 1 st direction X and the two types of biasing members 70 disposed on the other side in the 1 st direction X are disposed at positions separated from the center position by equal distances in the 1 st direction X.
As shown in fig. 2, the article carrier 1 includes a magnet unit 30 and a conductor 35. As described below, the magnet units 30 and the conductors 35 constitute a magnetic damper for suppressing transmission of vibration between the 1 st member 10 and the 2 nd member 20 (here, transmission of vibration in the 2 nd direction Y). As shown in fig. 2, the magnet unit 30 and the conductor 35 are provided so that the magnet unit 30 and the conductor 35 face each other in the facing region a. Here, the facing region a is a region where the 1 st facing portion 11 faces the 2 nd facing portion 21. The magnet unit 30 is disposed to face the conductor 35 with a gap therebetween. The 1 st facing surface 11a is disposed at an end of the facing region a on the 1 st facing portion 11 side, and the 2 nd facing surface 21a is disposed at an end of the facing region a on the 2 nd facing portion 21 side.
The article carrier 1 is configured such that the magnet unit 30 and the conductor 35 move relative to each other in accordance with the relative movement of the 1 st member 10 and the 2 nd member 20. In the present embodiment, the magnet unit 30 and the conductor 35 are arranged to face each other in the facing direction Z. The magnet unit 30 and the conductor 35 are configured to move relative to each other while maintaining the gap between the magnet unit 30 and the conductor 35 (the facing distance between the magnet unit 30 and the conductor 35) in accordance with the relative movement of the 1 st member 10 and the 2 nd member 20. Here, the magnet unit 30 and the conductor 35 are configured to move relatively in the 2 nd direction Y in accordance with the relative movement in the 2 nd direction Y of the 1 st member 10 and the 2 nd member 20. Accordingly, when the 1 st member 10 and the 2 nd member 20 move relative to each other, a braking force that hinders the relative movement of the 1 st member 10 and the 2 nd member 20 can be generated by the interaction between the eddy current generated in the conductor 35 and the magnetic field by the magnet unit 30, and thereby the transmission of vibration between the 1 st member 10 and the 2 nd member 20 can be suppressed, and the transmission of vibration of the article 9 held by the holding portion 5 from the traveling body 4 side can be suppressed.
The braking force can be generated without bringing the magnet unit 30 into contact with the conductor 35. This can reduce the necessity of maintenance of the magnet unit 30 and the conductor 35, and can also suppress the generation of dust. Further, although relatively large vibration in the traveling direction may be generated in the traveling structure 4 due to acceleration and deceleration, etc., in the present embodiment, transmission of vibration in the 2 nd direction Y along the traveling direction of the traveling structure 4 from the traveling structure 4 side to the article 9 held by the holding portion 5 can be suppressed. This can appropriately suppress transmission of large vibration from the traveling body 4 side to the article 9 held by the holding portion 5.
In order to appropriately generate the braking force that impedes the relative movement of the 1 st member 10 and the 2 nd member 20, it is preferable that the conductive material constituting the conductor 35 be a good conductive material. For example, the conductive material constituting the conductor 35 may be a good conductive material and a non-magnetic material. Specifically, the conductive material constituting the conductor 35 is preferably aluminum, an aluminum alloy, copper, or a copper alloy. The conductive material constituting the conductor 35 may be a non-metallic conductive material, instead of a metallic conductive material.
In the present embodiment, at least one of the 1 st opposing portion 11 and the 2 nd opposing portion 21 constitutes the conductor 35. Specifically, the 1 st opposing part 11 constitutes the conductor 35. That is, at least the portion of the 1 st member 10 constituting the 1 st facing portion 11 (the 1 st member 10 as a whole in the present embodiment) is formed using a conductive material. On the other hand, the magnet unit 30 is formed of a member other than the 1 st member 10 and the 2 nd member 20. Specifically, the magnet unit 30 includes a permanent magnet 31 fixed to the 2 nd opposed surface 21 a. In the present embodiment, permanent magnet 31 is formed in a plate shape having a thickness direction in facing direction Z (here, a rectangular plate shape as viewed in the facing direction along facing direction Z). Thus, the magnet unit 30 and the conductor 35 can be provided to function appropriately as a magnetic damper while the facing distance between the 1 st facing portion 11 and the 2 nd facing portion 21 is kept short.
A surface of permanent magnet 31 facing conductor 35 (i.e., a surface on the conductor 35 side) and a surface of conductor 35 facing permanent magnet 31 (i.e., a surface on the permanent magnet 31 side) are formed in a planar shape along the intersecting surface. The surface of permanent magnet 31 facing conductor 35 and the surface of conductor 35 facing permanent magnet 31 are arranged in parallel with each other with a gap therebetween. As the permanent magnet 31, either a permanent magnet having the same polarity on the surface facing the conductor 35 over the entire surface thereof or a permanent magnet having a polarity on the surface facing the conductor 35 that varies depending on the location may be used. In the latter case, as an example, permanent magnets 31 having N poles and S poles alternately formed along the 2 nd direction Y on the surface facing the conductor 35 may be used. Such a permanent magnet 31 may be constituted by, for example, 1 magnet magnetized in multiple poles or a plurality of magnet pieces arranged in the 2 nd direction Y.
As shown in fig. 2 and 3, in the present embodiment, the magnet unit 30 and the conductor 35 are disposed so as to face each other in the target region B. Specifically, the permanent magnet 31 of the magnet unit 30 is disposed in the target region B. Here, the target region B is a region sandwiched by the pair of linear motion mechanisms 60. Here, the magnet unit 30 and the conductor 35 are disposed so as to face each other in regions on both sides in the 2 nd direction Y with respect to the target region B, in addition to the target region B. That is, permanent magnet 31 includes a portion disposed in target region B and a portion disposed in a region adjacent to target region B in direction 2Y. In the present embodiment, the magnet unit 30 (specifically, the permanent magnet 31) is disposed between the two types of biasing members 70 disposed on one side in the 1 st direction X and the two types of biasing members 70 disposed on the other side in the 1 st direction X.
As described above, in the present embodiment, the holding portion 5 includes the engaging portion 52. Although not shown in detail, the engaging portion 52 is configured to be movable upward against the biasing force of the biasing member from a position where the article 9 is not held by the holding portion 5. The shaft member 53 that moves in the vertical direction V integrally with the engaging portion 52 is disposed so as to penetrate the 1 st member 10 and the 2 nd member 20 in the vertical direction V in the target region B. The magnet unit 30 is provided so as to avoid interference with the shaft member 53. Specifically, the magnet unit 30 includes the permanent magnet 31 disposed on one side in the 2 nd direction Y with respect to the shaft member 53, and the permanent magnet 31 disposed on the other side in the 2 nd direction Y with respect to the shaft member 53. That is, the permanent magnets 31 constituting the magnet unit 30 are discontinuously provided in the 2 nd direction Y. Even in the case where the magnet unit 30 is provided so as to avoid interference with other members, since eddy currents are generated in the regions of the conductor 35 facing the permanent magnets 31 to obtain the above-described braking force, the technique of the present disclosure can effectively suppress transmission of vibration between the 1 st member 10 and the 2 nd member 20 even in the case where the magnet unit 30 is disposed so as to avoid interference with other members.
[ 2 nd embodiment ]
Embodiment 2 of the article carrier will be described with reference to the drawings (fig. 4 and 5). Hereinafter, the article carrier of the present embodiment will be described mainly with respect to differences from embodiment 1. The points not described in particular are the same as those in embodiment 1, and the same reference numerals are given thereto, and detailed description thereof is omitted.
As shown in fig. 4, in the present embodiment, the article carrier 1 is a ground-traveling article carrier. Specifically, the traveling body 4 includes traveling wheels 43 that roll on the ground. Here, the traveling body 4 is configured to travel without following the travel track (i.e., without being guided by the travel track). That is, the article transport body 1 is configured to travel autonomously while recognizing its current position.
In fig. 4, the traveling body 4 and the holding portion 5 are shown in a simplified manner, but in the present embodiment, the support portion 3 supports the holding portion 5 with respect to the traveling body 4 in a state where the holding portion 5 is disposed above the traveling body 4. That is, in the present embodiment, the holding portion 5 is not suspended and supported by the traveling body 4. In the present embodiment, the 2 nd member 20 is supported by the 1 st member 10 in a state of being disposed on the upper side with respect to the 1 st member 10. The holding portion 5 is configured to hold an article by supporting the article from below.
As shown in fig. 4 and 5, the guide device 6 includes a plurality of guide bodies 63 between the 1 st facing portion 11 and the 2 nd facing portion 21. The plurality of guide members 63 are disposed so as to contact both the 1 st facing portion 11 and the 2 nd facing portion 21. That is, the plurality of guide bodies 63 are configured to support a load (here, a vertical load) between the 1 st member 10 and the 2 nd member 20, and the support portion 3 that supports the holding portion 5 with respect to the traveling body 4 is configured using the plurality of guide bodies 63. The plurality of guide bodies 63 are arranged in a dispersed manner in the intersecting plane. As described above, the intersecting surface is a surface intersecting the facing direction Z, and here, is a surface orthogonal to the facing direction Z. As shown in fig. 5, the plurality of guide bodies 63 are arranged in a lattice shape (square lattice shape in this example) as viewed in the opposing direction along the opposing direction Z.
The plurality of guide bodies 63 are arranged so as to be rollable in a direction along the intersecting surface. The relative positional relationship of the plurality of guide bodies 63 is maintained by a holder 64 that rollably holds the plurality of guide bodies 63. In the present embodiment, each of the plurality of guide bodies 63 is formed in a spherical shape having the same diameter, and is arranged in a state of being rollable in an arbitrary direction along the intersecting surface. Thus, the guide device 6 is configured to guide the relative movement of the 1 st member 10 and the 2 nd member 20 in any direction along the intersecting surface. Further, since the guide body 63 rotates in accordance with the relative movement of the 1 st member 10 and the 2 nd member 20, when the 1 st member 10 and the 2 nd member 20 move relatively, the plurality of guide bodies 63 and the holder 64 move relatively with respect to the 1 st facing portion 11 and the 2 nd facing portion 21 by a distance half of the relative movement distance of the 1 st member 10 and the 2 nd member 20. In the present embodiment, the guide direction of the relative movement of the 1 st member 10 and the 2 nd member 20 by the guide device 6 is set to any direction along the intersecting surface, and therefore, although details are omitted, the returning device 7 is configured to return the relative positions of the 1 st member 10 and the 2 nd member 20 in all directions along the intersecting surface to the reference position.
As shown in fig. 4, in the present embodiment, both of the 1 st opposing portion 11 and the 2 nd opposing portion 21 constitute the conductor 35. That is, at least the portion of the 1 st member 10 constituting the 1 st opposed portion 11 and at least the portion of the 2 nd member 20 constituting the 2 nd opposed portion 21 are formed using a conductive material. In the present embodiment, the magnet unit 30 is disposed between the 1 st facing portion 11 and the 2 nd facing portion 21 with a gap from both the 1 st facing portion 11 and the 2 nd facing portion 21. The magnet unit 30 is configured to move in a direction along the intersecting surface integrally with the plurality of guide bodies 63 by being held by the holder 64. Thus, when the 1 st member 10 and the 2 nd member 20 move relatively, the magnet unit 30 moves relatively by a distance half of the relative movement distance of the 1 st member 10 and the 2 nd member 20 with respect to each of the conductor 35 of the 1 st opposing portion 11 and the conductor 35 of the 2 nd opposing portion 21. This can generate eddy currents in the conductor 35 of the 1 st opposed portion 11 and the conductor 35 of the 2 nd opposed portion 21, respectively, and generate a braking force that interferes with the relative movement of the 1 st member 10 and the 2 nd member 20.
As shown in fig. 5, in the present embodiment, the magnet unit 30 includes a plurality of permanent magnets 31 arranged in a dispersed manner in the intersecting plane. As described above, in the present embodiment, the plurality of guide bodies 63 are arranged in a lattice shape in the intersecting plane, and the plurality of permanent magnets 31 are arranged instead of a part of the guide bodies 63. Thus, the magnet unit 30 is arranged in the arrangement region C of the group of the plurality of guide bodies 63 as viewed in the facing direction along the facing direction Z. Specifically, the entire magnet unit 30 (i.e., all of the permanent magnets 31 included in the magnet unit 30) is arranged in the arrangement region C of the group of the plurality of guide members 63 when viewed in the facing direction. The arrangement region C may be defined as a region surrounded by a figure circumscribing the group of the plurality of guide bodies 63 when viewed in the facing direction, and in fig. 5, a region surrounded by a rectangle circumscribing the group of the plurality of guide bodies 63 (specifically, a rectangle having an arc-shaped corner) when viewed in the facing direction is defined as the arrangement region C.
Here, the description has been given taking as an example a configuration in which the plurality of guide bodies 63 are each formed into a spherical shape having the same diameter as each other and are arranged in a state of being rollable in an arbitrary direction along the intersecting surface, but for example, a configuration may be adopted in which the plurality of guide bodies 63 are each formed into a cylindrical shape having the same diameter as each other and are arranged in a state of being rollable in a specific direction along the intersecting surface. In this case, the guide device 6 is configured to guide the relative movement of the 1 st member 10 and the 2 nd member 20 in a specific direction along the intersecting surface, as in the above-described embodiment 1.
[ other embodiments ]
Next, another embodiment of the article carrier will be described.
(1) In the above embodiment 1, the configuration in which the conductor 35 is formed by the 1 st facing portion 11 and the magnet unit 30 (specifically, the permanent magnet 31) is fixed to the 2 nd facing surface 21a has been described as an example. However, the configuration is not limited to this, and the conductor 35 may be formed by the 2 nd opposing portion 21, and the magnet unit 30 (specifically, the permanent magnet 31) may be fixed to the 1 st opposing surface 11 a.
(2) In the above embodiments, the case where at least one of the 1 st opposing portion 11 and the 2 nd opposing portion 21 constitutes the conductor 35 has been described as an example. Specifically, in the above-described embodiment 1, a case where the conductor 35 is constituted by the 1 st opposing portion 11 is described as an example, and in the above-described embodiment 2, a case where the conductor 35 is constituted by both of the 1 st opposing portion 11 and the 2 nd opposing portion 21 is described as an example. However, the structure is not limited to this, and the conductor 35 may be formed of a member other than the 1 st member 10 and the 2 nd member 20. Fig. 6 shows an example in which the conductor 35 is formed of a member other than the member 10 of the 1 st embodiment. In the example shown in fig. 6, the conductor 35 is formed of a conductor plate 36 fixed to the 1 st facing surface 11 a.
(3) In embodiment 1, a configuration in which the magnet unit 30 and the conductor 35 are disposed so as to face each other in regions on both sides in the 2 nd direction Y with respect to the target region B, in addition to the target region B, has been described as an example. However, the configuration is not limited to this, and the magnet unit 30 and the conductor 35 may be arranged to face each other only in the target region B. Further, the magnet unit 30 and the conductor 35 may be arranged so as not to face each other within the target region B (in other words, so as to face each other only outside the target region B).
(4) In embodiment 2 described above, a configuration in which the entire magnet unit 30 is arranged in the arrangement region C of the group of the plurality of guide bodies 63 as viewed in the facing direction along the facing direction Z is described as an example. However, the configuration is not limited to this, and at least a part of the magnet unit 30 may be disposed outside the disposition region C of the group of the plurality of guide bodies 63 when viewed in the opposing direction along the opposing direction Z.
(5) In the above embodiments, the description has been given taking as an example a configuration in which the magnet unit 30 includes the permanent magnet 31. However, the present invention is not limited to such a configuration, and the magnet unit 30 may be configured to include an electromagnet or the like instead of the permanent magnet 31.
(6) In the above-described embodiment 1, the configuration in which the article carrier 1 is a ceiling transport vehicle has been described as an example, and in the above-described embodiment 2, the configuration in which the article carrier 1 is an article transport vehicle that autonomously travels on the floor has been described as an example. However, the configuration is not limited to this, and the article carrier 1 may be an article carrier that travels along a travel path provided in the horizontal direction corresponding to each stage of the storage shelf or an article carrier that travels along a travel track provided on a floor portion, for example. As the latter article carrier, for example, a stacker crane including a traveling carriage traveling along a traveling rail provided on a floor portion and a lifting body lifting and lowering along a mast erected on the traveling carriage can be exemplified.
(7) Note that the configurations disclosed in the above embodiments may be applied in combination with configurations disclosed in other embodiments (including combinations of embodiments described as other embodiments) as long as no contradiction occurs. The embodiments disclosed in the present specification are simply illustrative in all respects as to other configurations. Thus, various changes can be made as appropriate within a scope not departing from the gist of the present disclosure.
[ brief summary of the embodiments ] described above
The outline of the article carrier described above will be described below.
The article carrier includes: a traveling body; a holding section for holding an article; a 1 st member coupled to the traveling body; a 2 nd member coupled to the holding portion and disposed to face the 1 st member; a guide device which guides relative movement of the 1 st member and the 2 nd member along a direction of a cross plane, the cross plane being a plane crossing a facing direction of the 1 st member and the 2 nd member; and a returning device for returning the relative position of the 1 st member and the 2 nd member to a reference position; the magnet unit and the conductor are provided so that the magnet unit and the conductor face each other in a region where the 1 st facing portion and the 2 nd facing portion face each other, and the magnet unit and the conductor are configured to move relatively with the relative movement of the 1 st member and the 2 nd member.
According to this configuration, since the article carrier is configured such that the magnet unit and the conductor move relative to each other in accordance with the relative movement of the 1 st member and the 2 nd member, when the 1 st member and the 2 nd member move relative to each other, a braking force that hinders the relative movement of the 1 st member and the 2 nd member can be generated by the interaction between the eddy current generated in the conductor and the magnetic field generated by the magnet unit. That is, the magnetic damper can be configured using the magnet unit and the conductor. Thus, the transmission of vibration between the 1 st member and the 2 nd member can be suppressed by the magnetic damper while the relative positions of the 1 st member and the 2 nd member are returned to the reference position by the action of the returning device, and the transmission of vibration of the article held by the holding portion from the traveling body side can be suppressed. Further, since the braking force can be generated without bringing the magnet unit into contact with the conductor, the necessity of maintenance of the magnet unit and the conductor can be suppressed to a low level.
As described above, according to the above configuration, the structure for suppressing the transmission of the vibration of the article held by the holding portion from the traveling body side can be made a structure with low maintenance necessity.
Here, it is preferable that the two directions orthogonal to each other along the intersecting surface are a 1 st direction and a 2 nd direction, the guide device includes a pair of linear motion mechanisms disposed apart from each other in the 1 st direction, each of the pair of linear motion mechanisms includes a guide portion provided on one of the 1 st opposing portion and the 2 nd opposing portion so as to extend in the 2 nd direction, and a guided portion provided on the other of the 1 st opposing portion and the 2 nd opposing portion, the guided portion being guided by the guide portion so as to be movable in the 2 nd direction, and the magnet unit and the conductor are disposed so as to face each other in a region sandwiched between the pair of linear motion mechanisms.
According to this configuration, it is possible to suppress the transmission of the vibration in the 2 nd direction between the 1 st member and the 2 nd member, and to suppress the transmission of the vibration in the 2 nd direction from the traveling body side to the article held by the holding portion. Further, according to the above configuration, since the magnet unit and the conductor are disposed so as to face each other in the region sandwiched between the pair of linear motion mechanisms, the space sandwiched between the pair of linear motion mechanisms can be effectively utilized, and the magnet unit and the conductor can be provided while suppressing an increase in size of the article carrier in the 1 st direction and the 2 nd direction.
Alternatively, it is preferable that the guide device includes a plurality of guide bodies between the 1 st facing portion and the 2 nd facing portion, the plurality of guide bodies are arranged so as to be capable of rolling in a direction along the intersecting surface and to be in contact with both the 1 st facing portion and the 2 nd facing portion, and the magnet unit is arranged in an arrangement region of a group of the plurality of guide bodies when viewed in a facing direction along the facing direction.
According to this configuration, it is possible to suppress the transmission of vibration in the direction in which the guide body between the 1 st member and the 2 nd member can roll, and to suppress the transmission of vibration in the direction from the traveling body side to the article held by the holding portion. Further, according to the above configuration, since the magnet unit is disposed in the arrangement region of the group of the plurality of guide bodies when viewed in the facing direction, the magnet unit can be provided while suppressing an increase in size of the article carrier in the direction intersecting with the facing direction.
In the article transport body having each of the above configurations, it is preferable that at least one of the 1 st opposing portion and the 2 nd opposing portion constitutes the conductor.
According to this configuration, compared to the case where the conductor is formed of a member other than the 1 st member and the 2 nd member, the 1 st opposing portion and the 2 nd opposing portion can be disposed close to each other in the opposing direction, and the article carrier in the opposing direction can be downsized.
Preferably, the conductive material constituting the conductor is aluminum, an aluminum alloy, copper, or a copper alloy.
According to this configuration, since eddy current is easily generated in the conductor, a braking force that hinders relative movement between the 1 st member and the 2 nd member is easily generated appropriately.
Preferably, the holding portion is suspended and supported by the traveling body.
In the structure in which the holding portion is suspended and supported by the traveling body, the holding portion tends to largely shake due to vibration caused by acceleration and deceleration of the traveling body. In the article transport body according to the present disclosure, since the magnetic damper can be configured using the magnet unit and the electric conductor as described above, even in such a configuration, transmission of vibration of the article held by the holding portion from the traveling body side can be effectively suppressed.
The article carrier according to the present disclosure may be one that can achieve at least 1 of the above-described effects.
Description of the reference numerals
1: article conveying body
4: traveling body
5: holding part
6: guiding device
7: return device
9: article with a cover
10: item 1
11: 1 st opposed part
20: 2 nd part
21: 2 nd opposing part
30: magnet unit
35: electrical conductor
60: linear motion mechanism
61: guide part
62: guided part
63: guiding body
A: opposing region (region where the 1 st opposing portion and the 2 nd opposing portion oppose each other)
B: target region (region sandwiched by a pair of linear motion mechanisms)
C: configuration area
X: the 1 st direction
Y: the 2 nd direction
Z: and an opposing direction.
Claims (6)
1. An article carrier comprising a traveling body and a holding portion for holding an article, characterized in that,
the disclosed device is provided with:
a 1 st member coupled to the traveling body;
a 2 nd member coupled to the holding portion and disposed to face the 1 st member;
a guide device which guides relative movement of the 1 st member and the 2 nd member along a direction of a cross plane, the cross plane being a plane crossing a facing direction of the 1 st member and the 2 nd member; and
a returning device for returning the relative position of the 1 st member and the 2 nd member to a reference position;
wherein a facing portion of the 1 st member facing the 2 nd member is a 1 st facing portion, a facing portion of the 2 nd member facing the 1 st member is a 2 nd facing portion, and a magnet unit and a conductor are provided so that the magnet unit faces the conductor in a region where the 1 st facing portion faces the 2 nd facing portion,
the magnet unit and the conductor are configured to move relatively with the relative movement of the 1 st member and the 2 nd member.
2. The article transporting body according to claim 1,
the two directions orthogonal to each other along the intersecting surface are set as a 1 st direction and a 2 nd direction,
the guide device comprises a pair of linear motion mechanisms arranged apart in the 1 st direction,
the pair of linear motion mechanisms each include a guide portion provided on one of the 1 st opposing portion and the 2 nd opposing portion so as to extend in the 2 nd direction, and a guided portion provided on the other of the 1 st opposing portion and the 2 nd opposing portion and guided by the guide portion so as to be movable in the 2 nd direction,
the magnet unit and the conductor are disposed so as to face each other in a region sandwiched between the pair of linear motion mechanisms.
3. The article transporting body according to claim 1,
the guide device comprises a plurality of guide bodies between the 1 st facing portion and the 2 nd facing portion,
the plurality of guide bodies are arranged so as to be capable of rolling in a direction along the intersecting surface and to contact both the 1 st opposing portion and the 2 nd opposing portion,
the magnet unit is arranged in an arrangement region of the group of the plurality of guiding bodies when viewed in an opposing direction along the opposing direction.
4. The article transporting body according to any one of claims 1 to 3,
at least one of the 1 st and 2 nd opposing portions constitutes the conductor.
5. The article transporting body according to any one of claims 1 to 4,
the conductive material constituting the conductor is aluminum, an aluminum alloy, copper, or a copper alloy.
6. The article transporting body according to any one of claims 1 to 5,
the holding portion is suspended and supported by the traveling body.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019098469A JP2020193058A (en) | 2019-05-27 | 2019-05-27 | Article conveyance body |
| JP2019-098469 | 2019-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111994584A true CN111994584A (en) | 2020-11-27 |
Family
ID=73466384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010461150.8A Pending CN111994584A (en) | 2019-05-27 | 2020-05-27 | Article conveying body |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2020193058A (en) |
| KR (1) | KR20200136323A (en) |
| CN (1) | CN111994584A (en) |
| TW (1) | TW202100431A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102228145B1 (en) * | 2019-08-07 | 2021-03-17 | 세메스 주식회사 | Apparatus for transporting carrier and system for controlling the apparatus |
| KR102534409B1 (en) * | 2020-11-23 | 2023-05-18 | 세메스 주식회사 | Transport apparatus |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1136650A (en) * | 1995-01-19 | 1996-11-27 | 石川岛播磨重工业株式会社 | Vibration damper |
| CN101181956A (en) * | 2006-11-14 | 2008-05-21 | 株式会社大福 | Article transport facility |
| JP2009040563A (en) * | 2007-08-09 | 2009-02-26 | Asyst Technologies Japan Inc | Pressing mechanism and conveyance device |
| JP2012112400A (en) * | 2010-11-19 | 2012-06-14 | Toshiba Corp | Dynamic vibration absorber |
| CN105584768A (en) * | 2014-11-12 | 2016-05-18 | 株式会社大福 | Article Transport Vehicle |
| KR20160099189A (en) * | 2015-02-11 | 2016-08-22 | 계명대학교 산학협력단 | Active type vibration isolation device |
| CN107923476A (en) * | 2015-12-07 | 2018-04-17 | 三菱重工机械系统株式会社 | Damping device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101878176B (en) * | 2007-11-30 | 2014-02-05 | 奥蒂斯电梯公司 | Passive magnetic elevator car steadier |
-
2019
- 2019-05-27 JP JP2019098469A patent/JP2020193058A/en active Pending
-
2020
- 2020-05-19 TW TW109116557A patent/TW202100431A/en unknown
- 2020-05-26 KR KR1020200062910A patent/KR20200136323A/en unknown
- 2020-05-27 CN CN202010461150.8A patent/CN111994584A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1136650A (en) * | 1995-01-19 | 1996-11-27 | 石川岛播磨重工业株式会社 | Vibration damper |
| CN101181956A (en) * | 2006-11-14 | 2008-05-21 | 株式会社大福 | Article transport facility |
| JP2009040563A (en) * | 2007-08-09 | 2009-02-26 | Asyst Technologies Japan Inc | Pressing mechanism and conveyance device |
| JP2012112400A (en) * | 2010-11-19 | 2012-06-14 | Toshiba Corp | Dynamic vibration absorber |
| CN105584768A (en) * | 2014-11-12 | 2016-05-18 | 株式会社大福 | Article Transport Vehicle |
| KR20160099189A (en) * | 2015-02-11 | 2016-08-22 | 계명대학교 산학협력단 | Active type vibration isolation device |
| CN107923476A (en) * | 2015-12-07 | 2018-04-17 | 三菱重工机械系统株式会社 | Damping device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202100431A (en) | 2021-01-01 |
| JP2020193058A (en) | 2020-12-03 |
| KR20200136323A (en) | 2020-12-07 |
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