KR20220099611A - Substrate transfer device - Google Patents

Abstract

Provided is a substrate transfer device, which includes: a body on which a substrate is seated; a carrier including an upper module coupled to the upper end of the body and a lower module coupled to the lower end of the body; an upper levitation unit disposed facing the upper module and magnetically levitating the carrier; an upper guide unit adjacent to the upper module and guiding the position of the carrier by magnetic force with the upper module; a lower guide unit adjacent to the lower module and guiding the carrier by magnetic force with the lower module; and a transport unit which transports the carrier.

Description

SUBSTRATE TRANSFER DEVICE

The present invention relates to a substrate transfer apparatus, and more particularly, to a transfer apparatus for transferring a substrate.

In general, a display device including a display element such as an organic light emitting diode is manufactured through a complicated process.

In this case, in order to perform the process performed in each chamber, the substrate constituting the display device must be loaded or unloaded. When the substrate is loaded, it is transferred to each process chamber using a carrier that vertically transports the substrate, or in the chamber. A transfer device for transferring a substrate has been developed.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport apparatus capable of transporting a substrate while maintaining a stable levitation of the carrier by guiding the carrier when the substrate is transported after magnetic levitation of the fixed carrier.

A substrate transport apparatus according to an embodiment of the present invention includes a carrier including a body on which a substrate is mounted, an upper module coupled to an upper end of the body, and a lower module coupled to a lower end of the body. The substrate transport apparatus is disposed to face the upper module, and further includes an upper levitation unit for magnetically levitating the carrier. The substrate transfer device is adjacent to the upper module, adjacent to an upper guide unit guiding the position of the carrier by magnetic force with the upper module, and adjacent to the lower module, and guides the carrier by magnetic force with the lower module It further includes a lower guide unit. The substrate transport apparatus may further include a transport unit transporting the carrier.

In one embodiment of the present invention, the upper module includes an upper body on which the first floating magnet is disposed. The upper floating unit includes a second floating magnet opposite to the first floating magnet and having the same polarity as the first floating magnet. The carrier is magnetically levitated through the repulsive force between the first floating magnet and the second floating magnet.

In one embodiment of the present invention, the width of the first floating magnet may be greater than the width of the second floating magnet.

In an embodiment of the present invention, the width of the first floating magnet may be smaller than the width of the second floating magnet.

In an embodiment of the present invention, the upper module further includes a first buffer disposed between the first floating magnet and the upper body. The upper floating unit further includes a second buffer disposed under the second floating magnet.

In an embodiment of the present invention, the first buffer and the second buffer include aluminum.

In an embodiment of the present invention, the upper module further includes an upper protrusion extending from the upper body and on which the first upper guide magnet is disposed. The upper guide unit includes a second upper guide magnet opposite to the first upper guide magnet and having a polarity different from that of the first upper guide magnet. The position of the carrier may be guided by an attractive force between the first upper guide magnet and the second upper guide magnet.

In an embodiment of the present invention, when an upward direction is referred to as a first direction and a direction crossing the first direction is referred to as a second direction, the upper protrusion is a first protrusion extending from the upper module in the first direction. and a second protrusion extending in the second direction from the first protrusion. The first upper guide magnet is disposed on the second protrusion.

In an embodiment of the present invention, the first upper guide magnet may be disposed below the second protrusion.

In an embodiment of the present invention, the second direction may be a direction orthogonal to the first direction.

In an embodiment of the present invention, the first upper guide magnet includes a first N-pole magnet and a first S-pole magnet arranged in the second direction. The second upper guide magnet is arranged in the second direction and includes a second S-pole magnet disposed to face the first N-pole magnet and a second N-pole magnet disposed to face the first S-pole magnet do.

In an embodiment of the present invention, the first N-pole magnet and the first S-pole magnet may be disposed to be spaced apart from each other, and the second S-pole magnet and the second N-pole magnet may also be disposed to be spaced apart from each other.

In an embodiment of the present invention, the upper module may further include a third buffer disposed between the first upper guide magnet and the upper protrusion. The upper guide unit may further include a fourth buffer disposed below the second upper guide magnet.

In an embodiment of the present invention, the third buffer and the fourth buffer may include aluminum.

In one embodiment of the present invention, the lower module includes a lower body in which the first lower guide magnet is disposed. The lower guide unit may include a second lower guide magnet opposite to the first lower guide magnet and having the same polarity as the first lower guide magnet. The position of the carrier may be guided by a repulsive force between the first lower guide magnet and the second lower guide magnet.

In an embodiment of the present invention, the lower module includes a first lower end disposed adjacent to a first side of the lower body and a second lower end disposed adjacent to a second side of the lower body. The first lower guide magnet includes a first sub guide magnet disposed on the first lower end portion and a second sub guide magnet disposed on the second lower end portion. The second lower guiding magnet includes a third sub guiding magnet facing the first sub guiding magnet and a fourth sub guiding magnet facing the second sub guiding magnet.

In an embodiment of the present invention, the width of the first lower guide magnet may be greater than the width of the second lower guide magnet.

In an embodiment of the present invention, the width of the first lower guide magnet may be smaller than the width of the second lower guide magnet.

According to the present invention, it is possible to maintain the center of the upper and lower portions of the carrier by guiding the carrier to be transported in a magnetically levitated state. Specifically, by guiding the upper end and lower end of the carrier by magnetic force, it is possible to stably transport the carrier so that the substrate seated on the carrier is not damaged. Therefore, even if the size and weight of the carrier increase in order to transport the large area substrate, it is possible to prevent the substrate from being damaged.

1 is a cross-sectional view of a substrate transfer apparatus according to an embodiment of the present invention.
2 is a perspective view of a substrate transfer apparatus according to an embodiment of the present invention.
FIG. 3 is an enlarged cross-sectional view illustrating a part of the substrate transfer apparatus corresponding to AA′ shown in FIG. 1 .
4A and 4B are enlarged cross-sectional views illustrating a part of a substrate transfer apparatus corresponding to BB′ illustrated in FIG. 1 .
5 is a graph for explaining the force applied to the substrate transport apparatus according to the height of the carrier according to an embodiment of the present invention.
6 is a graph for explaining the force received from the upper guide unit of the substrate transport apparatus according to the position of the carrier according to an embodiment of the present invention.
7 is an enlarged cross-sectional view illustrating a part of a substrate transfer apparatus according to an exemplary embodiment of the present invention.
FIG. 8 is an enlarged cross-sectional view illustrating a part of the substrate transport apparatus corresponding to CC′ shown in FIG. 1 .
9 is an enlarged cross-sectional view illustrating a part of a substrate transfer apparatus according to an exemplary embodiment of the present invention.

In this specification, when an element (or region, layer, portion, etc.) is referred to as being “on,” “connected to,” or “coupled to” another element, it is placed/directly placed on the other element. It means that it can be connected/coupled or a third component can be placed between them.

Like reference numerals refer to like elements. In addition, in the drawings, thicknesses, ratios, and dimensions of components are exaggerated for effective description of technical content.

“and/or” includes any combination of one or more that the associated configurations may define.

Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, a second component may also be referred to as a first component. The singular expression includes the plural expression unless the context clearly dictates otherwise.

In addition, terms such as "below", "below", "above", "upper" and the like are used to describe the relationship of the components shown in the drawings. The above terms are relative concepts, and are described with reference to directions indicated in the drawings.

Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Also, terms such as terms defined in commonly used dictionaries should be construed as having a meaning consistent with their meaning in the context of the relevant art, and unless they are interpreted in an ideal or overly formal sense, they are explicitly defined herein can be

Terms such as “comprise” or “have” are intended to designate that a feature, number, step, action, component, part, or combination thereof described in the specification is present, and includes one or more other features, numbers, or steps. , it should be understood that it does not preclude the possibility of the existence or addition of , operation, components, parts or combinations thereof.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a cross-sectional view of a substrate transfer apparatus according to an embodiment of the present invention, Figure 2 is a perspective view of the substrate transfer apparatus according to an embodiment of the present invention.

1 and 2 , the substrate transfer apparatus STD includes a carrier CR, an upper floating unit UFU, an upper guide unit UGU, a lower guide unit LGU, and a transfer unit TU. .

The carrier CR includes a body BD on which the substrate SS is mounted, an upper module UM coupled to an upper end of the body BD, and a lower module LM coupled to a lower end of the body BD.

The body BD may have a rectangular parallelepiped shape. As an example of the present invention, the body BD may have two long sides extending in the first direction DR1 and two short sides extending in the second direction DR2 . The second direction DR2 indicates a direction crossing the first direction DR1 . As an example of the present invention, the second direction DR2 may be a direction orthogonal to the first direction DR1 .

The body BD may have a flat plate shape extending in the third direction DR3 . The third direction DR3 indicates a direction substantially perpendicular to a plane defined by the first direction DR1 and the second direction DR2 . However, the shape of the body BD is not limited thereto, and may vary depending on the shape of the substrate SS seated on the body BD.

Hereinafter, for convenience of description, upper and lower sides refer to directions defined with respect to the first direction DR1 .

As an example of the present invention, an upper end of the body BD may mean an upper portion of the body BD, and a lower end of the body BD may mean a lower portion of the body BD.

The upper module UM extends from the upper body UB and the upper body UB on which the first floating magnet FM1 is disposed, and includes an upper protrusion UPT on which the first upper guide magnet UGM1 is disposed. can

The lower module LM includes a lower body LB in which the first lower guide magnet LGM1 is disposed. The lower module LM may include a first lower end LPT1 disposed adjacent to a first side of the lower body LB and a second lower end LPT2 disposed adjacent to a second side of the lower body LM. can The first lower end portion LPT1 and the second lower end portion LPT2 may be disposed to face each other in the second direction DR2 .

The upper floating unit (UFU) is disposed to face the upper module (UM) of the carrier (CR). The upper floating unit (UFU) may be disposed to face the upper body (UB) of the carrier (CR). The upper floating unit (UFU) is opposed to each other with the first floating magnet (FM1), and includes a second floating magnet (FM2) having the same polarity as the first floating magnet (FM1). The upper floating unit UFU may magnetically levitate the carrier CR through a magnetic force between the first floating magnet FM1 and the second floating magnet FM2.

The upper guide unit UGU may be disposed adjacent to the upper module UM. The upper guide unit UGU may be disposed adjacent to the upper protrusion UPT. The upper guide unit UGU may include a second upper guide magnet UGM2 opposite to the first upper guide magnet UGM1 and having a polarity different from that of the first upper guide magnet UGM1 . The upper guide unit UGU may guide the position of the carrier CR when the carrier CR is transported through a magnetic force between the first upper guide magnet UGM1 and the second upper guide magnet UGM2 . As an example of the present invention, the upper guide unit UGU may guide the upper end of the carrier CR so as not to lose its center.

The lower guide unit LGU may be disposed adjacent to the lower module LM. The lower guide unit LGU may be disposed adjacent to the first and second lower ends LPT1 and LPT2. The lower guide unit LGU may include a second lower guide magnet LGM2 opposite to the first lower guide magnet LGM1 and having the same polarity as the first lower guide magnet LGM1 . The lower guide unit LGU may guide the position of the carrier when the carrier CR is transported through a magnetic force between the first lower guide magnet LGM1 and the second lower guide magnet LGM2 . As an example of the present invention, the lower guide unit LGU may guide the lower end of the carrier CR so as not to lose its center.

The transport unit TU may transport the carrier CR. The transfer unit TU may generate a thrust to the carrier CR to transfer the carrier CR in the third direction DR3 . As an example of the present invention, the transfer unit TU may include a linear motor to transfer the carrier CR in a non-contact manner. 1 and 2, the transfer unit TU is shown to be disposed on the upper side of the upper module UM, but the position of the transfer unit TU is not limited thereto, and the side or lower module LM of the upper module UM ) may be disposed on the lower side of the

FIG. 3 is an enlarged cross-sectional view illustrating a part of the substrate transfer apparatus corresponding to AA′ shown in FIG. 1 .

Referring to FIG. 3 , the upper body UB includes a first inclined portion SP1 . The first inclined portion SP1 may be inclined so that the diameter of the upper body UB increases in the first direction DR1 .

A first yoke plate (YK1) coupled to the first floating magnet (FM1) to support the first floating magnet (FM1) may be disposed on the upper body (UB). As an example of the present invention, the first floating magnet FM1 may include a permanent magnet. As an example of the present invention, the first yoke plate YK1 may include a magnetic material having high permeability. As an example of the present invention, the first yoke plate YK1 may include steel.

The upper module (UM, see FIG. 1) may further include a first buffer (BF1) disposed between the first floating magnet (FM1) and the upper body (UB). As an example of the present invention, the first buffer BF1 may be disposed between the upper body UB and the first yoke plate YK1. The first buffer BF1 may include a nonmagnetic material that is not magnetized by the first floating magnet FM1. As an example of the present invention, the first buffer BF1 may include aluminum.

The upper floating unit (UFU) includes a second inclined portion (SP2). The second inclined portion SP2 may be formed to have the same inclination as the first inclined portion SP1 with respect to an axis parallel to the first direction DR1 .

A second yoke plate (YK2) coupled to the second floating magnet (FM2) to support the second floating magnet (FM2) may be disposed on the upper floating unit (UFU). As an example of the present invention, the second floating magnet FM2 may include a permanent magnet or an electromagnet. As an example of the present invention, the upper floating unit (UFU) may further include a second buffer (BF2) disposed on the lower side of the second floating magnet (FM2). The second buffer BF2 may be disposed below the second yoke plate YK2 . The second yoke plate YK2 may include the same material as the first yoke plate YK1 , and the second buffer BF2 may include the same material as the first buffer BF1 .

The carrier CR receives a repulsive force by the magnetic force between the first floating magnet FM1 and the second floating magnet FM2. Hereinafter, for convenience of description, a repulsive force between the first and second floating magnets FM1 and FM2 is referred to as a first force F1.

The first and second floating magnets FM1 and FM2 are included in the upper floating unit UFU including the upper body UB and the second inclined portion SP2 including the first inclined portion SP1, respectively. Accordingly, the first force F1 includes a first vertical force VF1 that is a force in the first direction DR1 and a first horizontal force HF1 that is a force in the second direction DR2 . The carrier CR is magnetically levitated in the first direction DR1 by the first vertical force VF1 . In addition, the carrier CR may be guided by the first horizontal force HF1 and may not be shaken in the second direction DR2 during transport. A ratio of the first vertical force VF1 and the first horizontal force HF1 among the first force F1 may vary according to shapes of the first and second inclined portions SP1 and SP2 . As an example of the present invention, as the first and second inclined portions SP1 and SP2 are directed toward the second direction DR2, the ratio of the first vertical force VF1 among the first forces F1 increases, and the first The proportion of the horizontal force HF1 becomes small.

As an example of the present invention, when the second floating magnet FM2 includes an electromagnet, the magnitude of the first force F1 increases as the magnetic force of the second floating magnet FM2 increases. In addition, the thickness of at least one of the first buffer (BF1) and the second buffer (BF2) is reduced, and at least one of the first floating magnet (FM1) and the second floating magnet (FM2) in response to the reduced thickness of the buffer When the thickness of is increased, the magnitude of the first force F1 can be increased without changing the distance between the first and second floating magnets FM1 and FM2.

Accordingly, in order to adjust the magnitudes of the first vertical force VF1 and the first horizontal force HF1, the shapes of the first and second inclined portions SP1 and SP2 are modified or the magnitude of the first force F1 is increased. can be adjusted

As an example of the present invention, when the width of the first floating magnet FM1 is the first width W1 and the width of the second floating magnet FM2 is the second width W2, the first width W1 is It may be different from the second width W2. As an example of the present invention, the first width W1 may be greater than the second width W2. Also, the first width W1 may be smaller than the second width W2 . When the first width (W1) and the second width (W2) are different, even if the carrier (CR) is shaken during transport, the carrier (CR) receives a stable supply of the first force (F1) from the upper floating unit (UFU) can The difference between the first width W1 and the second width W2 may be calculated considering that the carrier CR may be unintentionally shaken during transport.

In addition, the carrier CR receives gravity in a direction opposite to the first direction DR1 by the weight of the carrier CR and the weight of the substrate SS seated on the carrier CR. Hereinafter, gravity is referred to as a third force F3 for convenience of description.

When the carrier (CR) is magnetically levitated by the upper floating unit (UFU) and the distance spaced apart from the upper floating unit (UFU) in the first direction (DR1) is called the first separation distance (HT1), the first and third The relationship between the forces F1 and F3 and the first separation distance HT1 will be described with reference to FIG. 5 to be described later.

4A and 4B are enlarged cross-sectional views illustrating a part of a substrate transfer apparatus corresponding to BB′ illustrated in FIG. 1 .

Referring to FIG. 4A , the upper protrusion UPT includes a first protrusion UPT1 extending from the upper body UB in a first direction DR1 and a second protrusion UPT1 extending from the first protrusion UPT1 in the second direction DR2. and a second protrusion UPT2.

The first upper guide magnet UGM1 may be disposed on the second protrusion UPT2 . As an example of the present invention, the first upper guide magnet UGM1 may be disposed below the second protrusion UPT2 . A third yoke plate YK3 coupled to the first upper guide magnet UGM1 to support the first upper guide magnet UGM1 may be disposed on the second protrusion UPT2 . As an example of the present invention, the first upper guide magnet UGM1 may include a permanent magnet.

The upper module UM (refer to FIG. 1 ) may further include a third buffer BF3 disposed between the first upper guide magnet UGM1 and the second protrusion UPT2 . As an example of the present invention, the third buffer BF3 may be disposed between the second protrusion UPT2 and the third yoke plate YK3 .

The first upper guide magnet UGM1 may include a first N-pole magnet NPM1 and a first S-pole magnet SPM1 arranged in the second direction DR2 . As an example of the present invention, the first N-pole magnet and the first S-pole magnet may be arranged in a direction opposite to that shown in FIG. 4A .

The upper guide unit UGU is opposite to the first upper guide magnet UGM1 and includes a second upper guide magnet UGM2 having a polarity different from that of the first upper guide magnet UGM1 . A fourth yoke plate YK4 coupled to the second upper guide magnet UGM2 to support the second upper guide magnet UGM2 may be disposed on the upper guide unit UGU. As an example of the present invention, the second upper guide magnet UGM2 may include a permanent magnet or an electromagnet.

The upper guide unit UGU may further include a fourth buffer BF4 disposed below the second upper guide magnet UGM1 . As an example of the present invention, the fourth buffer BF4 may be disposed below the fourth yoke plate YK4.

The third and fourth yoke plates YK3 and YK4 may include the same material as the first yoke plate YK1 , and the third and fourth buffers BF3 and BF4 may include the same material as the first buffer BF1 . may include

As an example of the present invention, when the first upper guide magnet UGM1 includes the first N-pole and S-pole magnets NPM1 and SPM1, the second upper guide magnet UGM2 is the second S-pole magnet SPM2. and a second N-pole magnet NPM2.

The second S-pole magnet SPM2 is disposed to face the first N-pole magnet NPM1 , and the second N-pole magnet NPM2 is disposed to face the first S-pole magnet SPM1 . The second S-pole and N-pole magnets SPM2 and NPM2 are arranged in the second direction DR2. As an example of the present invention, the arrangement of the second S and N poles SPM2 and NPM2 may vary according to the arrangement of the first N and S poles NPM1 and SPM1.

Referring to Figure 4b, the carrier (CR) is attracted by the magnetic force between the first N pole magnet (NPM1) and the second S pole magnet (SPM2), the first N pole magnet (NPM1) and the second N pole magnet Repulsive force is received by the magnetic force between (NPM2). In addition, the carrier CR receives a repulsive force by the magnetic force between the first S pole magnet SPM1 and the second S pole magnet SPM2, and the magnetic force between the first S pole magnet SPM1 and the second N pole magnet NPM2 are recruited by Hereinafter, for convenience of explanation, the force received by the carrier CR by the magnetic force between the first N-pole magnet NPM1 , the second S-pole magnet SPM2 and the second N-pole magnet NPM2 will be mainly described.

The attractive force between the first N-pole magnet (NPM1) and the second S-pole magnet (SPM2) is referred to as a second force (F2), and the repulsive force between the first N-pole magnet (NPM1) and the second N-pole magnet (NPM2) is first 4 It is called force (F4).

The second force F2 includes a first sub-vertical force VF2_a that is a force in the first direction DR1 and a first sub-horizontal force HF2_a that is a force in the second direction DR2. The fourth force F4 includes a second sub-vertical force VF2_b that is a force in the first direction DR1 and a second sub-horizontal force HF2_b that is a force in the second direction DR2.

When the force that the carrier CR2 receives from the upper guide unit UGU in the first direction DR1 is the second vertical force VF2, the second vertical force VF2 is the first sub-vertical force VF2_a and and a second sub-vertical force VF2_b. However, as an example of the present invention, the second vertical force VF2 is a repulsive force acting in the first direction DR1 by the magnetic force between the first S pole magnet SPM1 and the second S pole magnet SPM2 and the first S An attractive force acting in the first direction DR1 by the magnetic force between the pole magnet SPM1 and the second N pole magnet NPM2 may be further included.

When the force that the carrier CR2 receives from the upper guide unit UGU in the second direction DR2 is the second horizontal force HF2, the second horizontal force HF2 is the first sub-horizontal force HF2_a and and a second sub-horizontal force HF2_b. However, as an example of the present invention, the second horizontal force HF2 is a repulsive force acting in the second direction DR2 by the magnetic force between the first S-pole magnet SPM1 and the second S-pole magnet SPM2 and the first S An attractive force acting in the second direction DR2 by the magnetic force between the pole magnet SPM1 and the second N-pole magnet NPM2 may be further included.

The carrier CR2 is guided so that there is no shaking in the first direction DR1 during transport by the first vertical force (VF1, see FIG. 3), the second vertical force (VF2), and the third force (F3, see FIG. 3). do. The relationship between the first vertical force VF1 , the second vertical force VF2 , and the third force F3 and the first separation distance HT1 will be described later with reference to FIG. 5 .

In addition, the carrier CR2 is guided without shaking in the second direction DR2 during transport by the second and third horizontal forces HF2 and HF3 in addition to the first horizontal force HF1 (refer to FIG. 3 ). Specifically, when the distance at which the carrier CR is separated from the upper guide unit UGU in the second direction DR2 is referred to as the second separation distance HT2, the second vertical force VF2 and the second horizontal force ( HF2) and the second separation distance HT2 will be described later with reference to FIG. 6 .

5 is a graph for explaining the force applied to the substrate transport apparatus according to the height of the carrier according to an embodiment of the present invention. The x-axis of the graph shown in Figure 5 represents the distance the carrier (CR) is spaced apart from the upper floating unit (UFU) in the first direction (DR1). The y-axis of the graph represents the force that the carrier CR receives in the first direction DR1 as a positive value. A force received in a direction opposite to the first direction DR1 is expressed as a negative value.

Referring to FIGS. 3, 4B and 5 , as the height at which the carrier CR is magnetically levitated increases, the distance in the first direction DR1 between the first floating magnet FM1 and the second floating magnet FM2 increases. The first vertical force VF1, which is a repulsive force, becomes small. In addition, as the distance between the first N-pole magnet NPM1 and the second S-pole magnet SPM2 increases, the second vertical force VF2, which is an attractive force, also decreases. On the contrary, the magnitude of the third force F3 due to the weight of the carrier CR is constant.

When the sum of the first and second normal forces VF1 and VF2 and the third force F3 is the resultant force TF applied to the carrier CR in the first direction DR1, the carrier CR is the resultant force It is magnetically levitated at a height where the magnitude of (TF) becomes zero. When the magnitude of the resultant force (TF) is 0, the distance the carrier (CR) is spaced apart from the upper floating unit (UFU) in the first direction (DR1) is defined as the first separation distance (HT1). The carrier (CR) may be transferred in a magnetically levitated state by a first separation distance (HT1) from the upper levitation unit (UFU).

6 is a graph for explaining the force received from the upper guide unit of the substrate transport apparatus according to the position of the carrier according to an embodiment of the present invention. The x-axis of the graph shown in FIG. 6 represents the second separation distance HT2, which is the distance the carrier CR is spaced apart from the upper guide unit UFU in the second direction DR2. The y-axis of the graph represents the absolute magnitude of the force applied to the carrier CR in the first direction DR1 and the second direction DR2.

Referring to FIGS. 3, 4C and 6 , as the second separation distance HT2 increases as the carrier CR shakes during transport, the distance between the first N-pole magnet NPM1 and the second S-pole magnet SPM2 and the second As the distance between the first N-pole magnet NPM1 and the second N-pole magnet NPM2 increases, the second vertical force VF2 decreases.

On the other hand, as the second separation distance HT2 increases, the second horizontal force HF2 that is a force in the second direction DR2 increases. As a result, as the second separation distance HT2 increases, the second horizontal force HF2 by which the upper guide unit UGU guides the carrier CR in the second direction DR2 increases, and the upper guide unit UGU moves the carrier (CR) may be guided not to be shaken in the second direction (DR2).

Referring to FIG. 7 , the first upper guide magnet UGM1 is a first N pole magnet NPM1 , a first S pole magnet SPM1 and a second N pole magnet NPM2 arranged in the second direction DR2 . may include As an example of the present invention, a first N-pole magnet, a second S-pole magnet and a second N-pole magnet may be arranged differently from that shown in FIG. 4A .

The second upper guide magnet UGM2 is arranged in the second direction DR2, and the second S-pole magnet SPM2 and the first S-pole magnet SPM1 are arranged to face the first N-pole magnet NPM1 and A third N-pole magnet NPM3 disposed to face and a third S-pole magnet SPM3 disposed to face the second N-pole magnet NPM2 may be included. As an example of the present invention, the arrangement of the second S pole magnet SPM2, the third N pole magnet NPM3 and the third S pole magnets SPM3 is the first N pole magnet NPM1, the first S pole magnet It may vary depending on the arrangement of the SPM1 and the second N-pole magnets NPM2.

The present invention is not limited thereto, and the first upper guide magnet UGM1 may include k N-pole and S-pole magnets arranged in the second direction DR2, and the second upper guide magnet UGM2 may include the second upper guide magnet UGM2. It may include k S poles and N magnets arranged in two directions DR2 , opposite to the N pole and S pole magnets of the first upper guide magnet, respectively, and having opposite polarities. As the number of N-pole and S-pole magnets included in the first and second upper guide magnets UGM1 and UGM2 increases, the carrier CR by the magnetic force between the first and second upper guide magnets UGM1 and UGM2 increases. The magnitude of the guiding force can be large.

FIG. 8 is an enlarged cross-sectional view illustrating a part of a substrate transfer apparatus corresponding to CC′ shown in FIG. 1 .

Referring to FIG. 8 , the lower module LM includes a lower body LB, a first lower end LPT1 and a second lower end LPT2.

The first lower guide magnet LGM1 may include a first sub guide magnet SGM1 disposed on the first lower end LPT1 and a second sub guide magnet SGM2 disposed on the second lower end LPT2. have.

A fifth yoke plate YK5 coupled to the first sub guide magnet SGM1 to support the first sub guide magnet SGM1 may be disposed on the first lower end portion LPT1 . As an example of the present invention, the first sub-guide magnet SGM1 may include a permanent magnet. The lower module LM may further include a fifth buffer BF5 disposed between the first sub guide magnet SGM1 and the first lower end LPT1 .

A sixth yoke plate YK6 coupled to the second sub guide magnet SGM2 to support the second sub guide magnet SGM2 may be disposed on the second lower end portion LPT2 . As an example of the present invention, the second sub-guide magnet SGM2 may include a permanent magnet. The lower module LM may further include a sixth buffer BF6 disposed between the second sub guide magnet SGM2 and the second lower end LPT2 .

The lower guide unit LGU may include a second lower guide magnet LGM2 . The second lower guide magnet LGM2 faces the first sub guide magnet SGM1, and the third sub guide magnet SGM3 and the second sub guide magnet SGM1 have the same polarity as the first sub guide magnet SGM1 ( and a fourth sub-guiding magnet SGM4 opposite to the SGM2) and having the same polarity as that of the second sub-guiding magnet SGM2.

The lower guide unit (LGU) is coupled to the third sub guide magnet (SGM3) to support the third sub guide magnet (SGM3), the seventh yoke plate (YK7) and the fourth sub guide magnet (SGM4) coupled to the fourth An eighth yoke plate YK8 supporting the sub guide magnet SGM4 may be disposed. As an example of the present invention, the third sub-guide magnet SGM3 and the fourth sub-guide magnet SGM4 may include permanent magnets or electromagnets. The lower guide unit LGU is disposed between the seventh buffer BF7 and the fourth sub guide magnet SGM4 and the lower guide unit LGU disposed between the third sub guide magnet SGM3 and the lower guide unit LGU. It may further include an eighth buffer BF8 disposed.

The carrier CR is formed by a repulsive force between the first sub guide magnet SGM1 and the third sub guide magnet SGM3 and a magnetic force between the second sub guide magnet SGM2 and the fourth sub guide magnet SGM4. receive repulsion Hereinafter, for convenience of description, the repulsive force between the first sub-guiding magnet SGM1 and the third sub-guiding magnet SMG3 is determined by the fifth force F5, the second sub-guiding magnet SGM2, and the fourth sub-guiding magnet SGM4. ) is called the sixth force (F6).

The carrier CR may be guided by receiving the fifth and sixth forces F5 and F6 from both sides of the lower guide unit LGU, and may not be shaken in the second direction DR2 during transport.

As an example of the present invention, the width of the first and second sub guide magnets SGM1 and SGM2 is the third width W3, and the width of the third and fourth sub guide magnets SGM3 and SGM4 is the fourth width W4. ), the third width W3 and the fourth width W4 may be different from each other. As an example of the present invention, the third width W3 may be greater than the fourth width W4 . In addition, the third width W3 may be smaller than the fourth width W4. When the third width W3 and the fourth width W4 are different, the carrier CR moves in the first direction ( Even if shaken by DR1 , the carrier CR may be stably supplied with the fifth and sixth forces F5 and F6 from the lower guide unit LGU The third width W3 and the fourth width W4 ) can be calculated taking into account that the carrier CR may be unintentionally shaken during transport.

The carrier (CR) by the upper floating unit (UFU) of the present invention is transferred in a magnetically levitated state. In addition, the upper guide unit (UGU) and the lower guide unit (LGU) to prevent shaking during transport of the carrier (CR), as well as the transport unit (TU) for transporting the carrier (CR), maintain a non-contact state with the carrier (CR). Therefore, it is possible to prevent damage to the substrate SS seated on the carrier CR.

9 is an enlarged cross-sectional view illustrating a part of a substrate transfer apparatus according to an exemplary embodiment of the present invention.

Hereinafter, with reference to FIGS. 3 and 4A , a description of the same configuration as the described configuration will be omitted.

Referring to FIG. 9 , the upper protrusion UPT may extend from the upper body UB in the first direction DR1 . The first upper guide magnet UGM1 may be disposed on the upper protrusion UPT.

The upper guide unit UGU is opposite to the first upper guide magnet UGM1 and includes a second upper guide magnet UGM2 having a polarity different from that of the first upper guide magnet UGM1 . The carrier CR is attracted by the magnetic force between the first upper guide magnet UGM1 and the second upper guide magnet UGM2. Hereinafter, for convenience of description, the attractive force between the first and second upper guide magnets UGM1 and UGM2 is referred to as an eighth force F8.

The carrier CR may be guided so as not to be shaken by receiving the eighth force F8 from the upper guide unit UGU during transport.

However, unlike the case of FIG. 3 , the eighth force F8 and the first vertical force VF1 received by the carrier CR shown in FIG. 9 have the same direction as the first direction DR1 . When the carrier CR is shaken during transport and the magnetically levitated height increases, the magnitude of the first vertical force VF1 decreases, but the magnitude of the eighth force F8 increases. Accordingly, in order to prevent the carrier CR from colliding with the upper guide unit UGU, the buffer RL may be disposed on the surface of the upper guide unit UGU facing the upper protrusion UPT. As an example of the present invention, the buffer unit RL may include a roller or the like.

Although the above has been described with reference to the preferred embodiment of the present invention, those skilled in the art or those having ordinary knowledge in the technical field will not depart from the spirit and technical scope of the present invention described in the claims to be described later. It will be understood that various modifications and variations of the present invention can be made without departing from the scope of the present invention.

Accordingly, the technical scope of the present invention should not be limited to the contents described in the detailed description of the specification, but should be defined by the claims.

STD: substrate transfer unit CR: carrier
SS: Board BD: Body
UM: upper module LM: lower module
UGU: upper guide unit UFU: upper floating unit
LGU: lower guide unit TU: transfer unit
UB: Upper body LB: Lower body
FM1, 2: 1st, 2nd floating magnet UPT: Top protrusion
UGM1, 2: first and second upper guide magnets LGM1, 2: first and second lower guide magnets

Claims (18)

a carrier including a body on which a substrate is mounted, an upper module coupled to an upper end of the body, and a lower module coupled to a lower end of the body;
an upper levitation unit disposed to face the upper module and magnetically levitating the carrier;
an upper guide unit adjacent to the upper module and configured to guide the position of the carrier by magnetic force with the upper module;
A lower guide unit adjacent to the lower module and guiding the carrier by magnetic force with the lower module; and
A substrate transfer apparatus including a transfer unit for transferring the carrier. According to claim 1, wherein the upper module,
Including an upper body on which the first floating magnet is disposed,
The upper floating unit,
and a second floating magnet opposite to the first floating magnet and having the same polarity as that of the first floating magnet,
The carrier is a substrate transfer device that is magnetically levitated through a repulsive force between the first floating magnet and the second floating magnet. 3. The method of claim 2,
A width of the first floating magnet is larger than a width of the second floating magnet. 3. The method of claim 2,
A width of the first floating magnet is smaller than a width of the second floating magnet. According to claim 2, wherein the upper module,
Further comprising a first buffer disposed between the first floating magnet and the upper body,
The upper floating unit,
The substrate transfer apparatus further comprising a second buffer disposed below the second floating magnet. 6. The method of claim 5,
The first buffer and the second buffer include aluminum. According to claim 2, wherein the upper module,
Extending from the upper body, further comprising an upper protrusion on which the first upper guide magnet is disposed,
The upper guide unit,
a second upper guide magnet opposite to the first upper guide magnet and having a polarity different from that of the first upper guide magnet;
A substrate transport apparatus in which the position of the carrier is guided by the attractive force between the first upper guide magnet and the second upper guide magnet. 8. The method of claim 7,
When the upward direction is referred to as a first direction, and a direction intersecting the first direction is referred to as a second direction,
The upper protrusion,
a first protrusion extending from the upper body in the first direction and a second protrusion extending from the first protrusion in the second direction;
The first upper guide magnet is disposed on the second protrusion. 9. The method of claim 8,
The first upper guide magnet is a substrate transfer device disposed below the second protrusion. 9. The method of claim 8,
The second direction is a direction orthogonal to the first direction. 9. The method of claim 8,
The first upper guide magnet,
Comprising a first N-pole magnet and a first S-pole magnet arranged in the second direction,
The second upper guide magnet,
and a second N pole magnet arranged in the second direction and disposed to face the first N pole magnet and a second N pole magnet disposed to face the first S pole magnet. 12. The method of claim 11,
The first N-pole magnet and the first S-pole magnet are disposed to be spaced apart from each other,
The second S-pole magnet and the second N-pole magnet are also disposed to be spaced apart from each other. According to claim 7, wherein the upper module,
Further comprising a third buffer disposed between the first upper guide magnet and the upper protrusion,
The upper guide unit,
The substrate transport apparatus further comprising a fourth buffer disposed below the second upper guide magnet. 14. The method of claim 13,
The third buffer and the fourth buffer include aluminum. According to claim 1, wherein the lower module,
and a lower body on which the first lower guide magnet is disposed,
The lower guide unit,
and a second lower guide magnet opposite to the first lower guide magnet and having the same polarity as the first lower guide magnet,
A substrate transport apparatus in which the position of the carrier is guided by a repulsive force between the first lower guide magnet and the second lower guide magnet. The method of claim 15, wherein the lower module,
a first lower end disposed adjacent to a first side of the lower body; and
and a second lower end disposed adjacent to a second side of the lower body,
The first lower guide magnet,
a first sub-guiding magnet disposed on the first lower end, and a second sub-guiding magnet disposed on the second lower end,
The second lower guide magnet,
and a third sub-guiding magnet facing the first sub-guiding magnet and a fourth sub-guiding magnet facing the second sub-guiding magnet. 16. The method of claim 15,
A width of the first lower guide magnet is greater than a width of the second lower guide magnet. 16. The method of claim 15,
A width of the first lower guide magnet is smaller than a width of the second lower guide magnet.

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