KR101048056B1 - Linear conveying device using magnetic levitation and magnetic bearing - Google Patents

Abstract

The present invention relates to a linear transfer device using a magnetic levitation and magnetic bearing, and more particularly, a structure that eliminates heat generation of the mover, and a guide portion, a magnetic levitation portion, and a propulsion portion are independent of each other. The present invention relates to a linear transfer device using magnetic levitation and magnetic bearings, which can be usefully applied to deposition processes such as display panels.

To this end, the present invention is a stator provided in the form of a straight rail; A transporter for linearly conveying a suction type magnetic levitation to the stator while loading a display product for a deposition process; Suction magnetic maglev means for supporting three points between the stator and the transporter to generate suction maglev forces and to block heat generation in the transporter; A propulsion means installed at a corresponding position between the stator and the transporter to generate propulsion force for linear transport of the transporter; Guide means for generating suction guide force for holding both sides of the conveyor so that the conveyor for linearly conveying along the stator is present in the trajectory thereof; It provides a linear transfer device using a magnetic levitation and magnetic bearing, characterized in that configured to include.

Magnetic levitation, linear feeder, stator, transporter, propulsion means, suction type, magnetic levitation means, 3-point support, heat generation, blocking

Description

Magnetically levitated transportation system using magnetic levitation and magnetic bearings

The present invention relates to a linear transfer device using magnetic levitation and magnetic bearing, and more particularly, a structure that eliminates heat generation of the mover, and has a structure in which the guide portion, the magnetic levitation portion, and the propulsion portion are independent of each other. The present invention relates to a linear transfer apparatus using magnetic levitation and magnetic bearing, which can be usefully applied to a deposition process such as a display panel.

When a high-precision linear transfer system is applied to the production process of various industrial sites, various problems are caused by friction between the conveying body and the rail, so that the magnetic Levitation system is solved to solve such friction problems. , MAGLEV) is used.

The conveying system using magnetic levitation is a system that floats the conveying body by magnetic force, and there is no energy loss because there is no mechanical contact or friction between the conveying body and the rail, and it can realize noiseless, low vibration, ultra-clean conveying system. Can be.

Magnetic levitation conveying systems require magnetic levitation, guiding and propulsion, and are usually provided with a magnetic levitation and guiding force from a floating electromagnet, and a linear induction motor (LIM) or linear synchronous motor (LSM). The driving force is provided by the motor.

That is, the magnetic levitation force is obtained by controlling the current flowing in the winding of the electromagnet to adjust the suction force in the vertical direction (same direction as the floating force) between the floating electromagnet and the fixed body to maintain the floating electromagnet and the fixed portion at a predetermined interval from each other The guiding force is generated in the horizontal direction (vertical direction to the driving direction) between the floating electromagnet and the fixed body so that the moving body does not depart from the track.

Such a magnetic levitation transfer system is used as a system for moving parts, semi-finished products and products in various factory automation lines, such as electronic product manufacturing lines such as semiconductors and displays requiring ultra-clean environments.

In the conventional magnetic levitation transfer system, as the electromagnet core and the winding are included on the side of the carrier on which a display product such as an LCD is loaded, heat generation is generated in the electromagnet core and the winding of the transferr at the same time. The generated heat is transferred to the display product, which causes a problem of damaging the display product which is very sensitive to heat.

That is, since the deposition process for display products is a process that is performed in a very clean environment such as a vacuum room, it is necessary to prevent heat from being transferred to the display product. Will cause a product.

In addition, the conventional magnetic levitation transfer system used a two-point or four-point support method as a support method between the transporter to which the display product is loaded and transported, and the stator provided on the rail for transporting the transporter. There is a concern that the shaker may occur when the mover moves, and in the case of the four-point support method, the installation cost increases because many electromagnets and auxiliary parts for implementing the stator and the mover are included.

The present invention has been made in view of the above-mentioned, and only the floating electromagnet core is disposed on the transporter side on which the display product for the deposition process is loaded so that no heat is generated, and the guide part, the magnetic injury part, and the propulsion part are mutually different. It is composed of an independent structure, but the magnetic levitation portion is configured to exert suction magnetic levitation force, and the propulsion portion is composed of a linear synchronous motor installed on the stator side provided as a rail, and is very suitable for deposition processes such as display panels such as LCDs. It is an object of the present invention to provide a linear transfer apparatus using magnetic levitation and magnetic bearings that can be usefully applied.

The present invention for achieving the above object is a stator provided in the form of a straight rail; A transporter for linearly conveying a suction type magnetic levitation to the stator while loading a display product for a deposition process; Suction magnetic maglev means for supporting three points between the stator and the transporter to generate suction maglev forces and to block heat generation in the transporter; A propulsion means installed at a corresponding position between the stator and the transporter to generate propulsion force for linear transport of the transporter; Guide means for generating suction guide force for holding both sides of the conveyor so that the conveyor for linearly conveying along the stator is present in the trajectory thereof; It provides a linear transfer device using a magnetic levitation and magnetic bearing, characterized in that configured to include.

In a preferred embodiment of the present invention, the stator includes: a lower rail fixed to the installation site; First and second upper rails integrally formed at one end and the other end of the lower rail, respectively, and vertically erected, the upper end of which being vertically bent; A third upper rail integrated vertically with the upper surface of the lower rail between the first and second upper rails, the upper end being vertically bent in the same direction as the second upper rail; Characterized in that consisting of.

In another preferred embodiment of the present invention, the transporter includes: a transporting plate for transporting a product for a deposition process; A first support bar integral with a predetermined bottom surface of the transfer plate and extending between the first and third upper rails of the stator; First and third upper plate plates extending from both ends of the lower ends of the first support bars to face bottom surfaces of the upper ends of the first and third upper rails; A second support bar which is integral with a predetermined bottom surface of the transfer plate and extends between the second and third upper rails of the stator; A second upper plate extending outward from a lower end of the second support bar to face the bottom of the upper end of the second upper rail; .

In another preferred embodiment of the present invention, the suction type magnetic levitating means includes: an electromagnet core composed of an electromagnet core mounted on the bottom surface of the upper end of the first, second and third upper rails of the stator, and a stator winding wound around the electromagnet core; ; An electromagnet core or permanent magnet mounted on an upper surface of the first, second and third floaters of the transporter to exert magnetic levitation force by suction with the floating electromagnet; .

As another preferred embodiment of the present invention, the propulsion means includes: a concentric linear synchronous motor installed on the bottom surface of the lower rail of the stator; A permanent magnet attached to the concentric linear synchronous motor in a vertical direction and attached to the bottoms of the first and third floaters of the conveyor; .

In another preferred embodiment of the present invention, the guide means includes: a magnetic circuit path forming member attached to both sides of the transfer plate of the transferr; A guide electromagnet composed of an electromagnet core and a stator winding wound around the electromagnet core, the guide electromagnet being spaced apart from and fixed to the outside of the magnetic circuit path forming member; .

In particular, the magnetic circuit path forming members attached to the first, second and third floating plates of the transporter according to the present invention are arranged to form a triangular arrangement when viewed in plan view.

In addition, the floating electromagnets of the first, second and third upper rails of the stator according to the present invention are characterized in that they are mounted separately in a plurality along the entire rail length.

In another preferred embodiment of the present invention, in the stator structure of the present invention, the electromagnet cores of each floating electromagnet are bonded to each other, and the windings are wound independently for each electromagnet core to reduce the control current of each floating electromagnet. It is characterized by that it was possible to.

Therefore, it is possible to independently control the force generated in the floating electromagnets of the Nth section and N + 1th section of the multiple sections, by controlling the overall generated force constant (F _N + F _{N + 1} = constant), During the transition to each section, no disturbances occur.

According to the present invention, an electromagnet core mounted on an upper surface of the first, second, and third buoyancy plates of the transporter to exert magnetic levitation force by suction with the floating electromagnet is laminated to minimize heat generated. It is characterized by using a core.

In addition, a water cooling path is further formed at adjacent positions of the electromagnet cores and the stator windings of the stator, so that cooling of the water cooling method is achieved.

Through the above problem solving means, the present invention provides the following effects.

According to the present invention, while the self-injury to the stator using the magnetic levitation force to the stator and at the same time the propulsive force by the linear synchronous motor (LSM) to transfer the transporter linearly, the structure of the transporter does not occur at all By applying it, the transfer object (display panel such as LCD for deposition process) can be precisely and linearly transferred while protecting heat sensitive LCD panel and the like.

In addition, by improving the magnetic levitation support method between the stator and the conveyor of the present invention to a three-point form to form a plane, it is possible to transport the conveyor stably without shaking even in the mechanical vibration.

In addition, according to the present invention, it is possible to manufacture the suction-type magnetic levitation means for levitation of the conveyer, the guide means for guiding, and the propulsion means independent of each other, there is an advantage that the manufacturing and assembly is easy.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a cross-sectional view showing a linear transfer device using a magnetic levitation and magnetic bearing according to the present invention, Figure 2 is a perspective view showing a conveyor according to the present invention, Figures 3 and 4 is a stator and a conveyor according to the present invention It is a perspective view which shows the separation | bonding and bonding state of liver.

The present invention uses a suction-type magnetic levitation force, and by using a propulsion force by a linear synchronous motor (LSM), to transfer the transfer object (display panel, such as LCD for deposition process) ultra-precision linearly, the heat transfer to the transfer object The main focus is on the fact that it does not occur at all, and the stator and the carrier are improved by a stable three-point support method.

The configuration of the magnetic levitation linear transfer device of the present invention for this purpose, the stator 10, the carrier 20, the suction type magnetic levitation means 30, the propulsion means 40, the guide means ( 50) and the like.

First, the configuration of the suction type magnetic levitation means provided in the stator and the stator according to the present invention is as follows.

The stator 10 is provided in the form of a straight rail, and includes a lower rail 14 having a rectangular plate shape fixed to an installation site (line for deposition process of a display panel such as an LCD), and the lower rail 14 of the stator 10. The first and second upper rails 11 and 12 are integrally formed at one end and the other end, respectively, and are erected vertically, and the upper end thereof is vertically bent inwardly, that is, bent in a "-" shape. .

In particular, the third upper rail 13 is vertically erected vertically on the upper surface of the lower rail 14 while being disposed between the first and second upper rails 11 and 12 of the stator 10, and is integrally formed with the bar. The third upper rail 13 is also bent so that its upper end is vertically bent in the same direction as the second upper rail 12, i.

Accordingly, the first and third upper rails 11 and 13 maintain a predetermined distance and face each other, and the second upper rail 12 maintains a predetermined distance to the outside of the third upper rail 13. And placed.

At this time, the upper surface of the upper end of the first, second and third upper rails (11, 12, 13) of the stator 10 is equipped with a floating electromagnet 36, which is one component of the suction type magnetic injuries means 30, respectively. The floating electromagnet 36 is composed of an electromagnet core 32 attached to the bottom surface of the upper end of the first, second and third upper rails 11, 12, 13, and a stator winding 34 wound around the electromagnet core 32. do.

On the other hand, the stator 10 serving as a straight rail is installed about 8m to fit the line length for the deposition process of the display panel, such as LCD, etc., floating electromagnets of the first, second, third upper rails (11, 12, 13) Winding the stator winding 34 included in (36) over a length of about 8m is inefficient and also difficult to wind, so it is preferable to install it separately in five or more sections along the entire rail length of about 8m.

That is, by attaching five or more electromagnet cores 32 of the floating electromagnet 36 mounted on the first, second and third upper rails 11, 12 and 13 along the longitudinal direction of the rail, The stator winding 34 can be easily wound around each attached electromagnet core 32.

Of course, the floating electromagnets 36 of the first, second and third upper rails 11, 12 and 13 of the stator 10 are divided into several sections and mounted, and the lengths of the rails 11, 12 and 13, respectively. As the number increases, the number of sections increases.

As another embodiment of the present invention, as shown in the accompanying FIG. 6, a structure for connecting each floating electromagnet 36 to give a different control current to the floating electromagnet 36, which is divided into a plurality of sections, is mounted. It can be configured differently, by bonding the electromagnet core 32 of each floating electromagnet 36 to each other, and at the same time by winding the winding 32 independently for each of the electromagnet cores 32 that are bonded to each other, to each floating electromagnet 36 The control current can be applied differently.

In this way, the electromagnet cores 32 of the respective floating electromagnets 36 are bonded to each other, and at the same time, the winding 32 is independently wound on each of the opposing electromagnet cores 32, so that the floating electromagnets of the Nth section of the multiple sections are wound. It is possible to independently control the force generated in the floating electromagnets of the and N + 1th section, and also to control the force generated in the entire floating electromagnet uniformly (F _N + F _{N + 1} = constant), No disturbance is generated during the transition to the sectioned floating electromagnet 36.

For example, while controlling the sum of the control current flowing through the winding of the Nth floating electromagnet and the control current flowing through the winding of the N + 1 floating electromagnet, if a position error occurs, it is proportional and integral to the error. PI control compensates for the N + 1th control current.

On the other hand, by forming a separate water cooling path (not shown) in the adjacent position of each of the electromagnet core 32 and the stator winding 34 of the stator 10 according to the present invention, the cooling of the water-cooling method is achieved desirable.

Here, looking at the configuration of the suction type magnetic levitation means provided in the transporter and the transporter according to the present invention.

The transporter 20 is a portion for linearly transporting the magnetically-induced suction of the stator while loading the display product for the deposition process, and a transport plate 24 for loading and transporting the product for the deposition process is located at the top thereof. It is provided.

In this case, a payload plate 60 that substantially mounts an LCD for a deposition process is connected to the upper portion of the transfer plate 24 using a secondary damper 62.

A first support bar 25 extending downward through the first and third upper rails 11 and 13 of the stator 10 facing each other is positioned at one side of the bottom surface of the transfer plate 24. And a second support bar 26 extending downwardly between the second and third upper rails 12 and 13 of the stator 10 at the other side of the bottom of the transfer plate 24. Is formed.

In addition, first and third float plates 21 and 23 are integrally formed at the lower end of the first support bar 25, and the first float plate 21 is a lower end of the first support bar 25. Is formed in the form of a horizontal plate extending toward the bottom of the upper end of the first upper rail 11 of the stator 10, the third upper plate 23 is the stator 10 at the lower end of the first support bar (25) It is formed in the form of a horizontal plate extending toward the bottom of the upper end of the third upper rail (13).

In addition, at the lower end of the second support bar 26, a horizontal plate-shaped second upper plate 22 extending to face each other with the bottom surface of the upper end of the second upper rail 12 is integrally formed.

As another configuration of the suction-type magnetic levitation means 30 of the present invention, the floating electromagnet 36 of the stator 10 is provided on the upper surface of the first, second, and third floatation plates 21, 22, and 23 of the transporter 20. ) And a magnetic circuit path-forming member 38 which exerts magnetic levitation force by suction, that is, a member for forming a magnetic circuit path so that the magnetic force generated in the stator winding can be connected to the rotor. Magnetic circuit path forming members 38 are attached, respectively, in a triangular arrangement when viewed in plan for three-point support.
In this case, the magnetic circuit path forming member may be made of a ferromagnetic core or a permanent magnet.

More specifically, the magnetic circuit path forming members 38 of the first and second sub-plates 21 and 22 are arranged on the same line along the width direction, and the magnetic circuit path forming members of the third sub-plate 23 are disposed. 38 is disposed in front of and inward of the magnetic circuit path forming members 38 of the first and second subplates 21 and 22, so that the magnetic circuit paths of the first, second and third subplates 23 are provided. The forming members 38 form a triangular arrangement with each other.

At this time, the magnetic circuit path is formed to be mounted on the upper surface of the first, second, third floating plate (21, 22, 23) of the transporter 20 to exert the magnetic levitation force by the suction electromagnet 36 The member 38 preferably uses a lamination core to minimize its generated heat, and can also eliminate the eddy current loss caused by using the lamination core.

Accordingly, the upper surfaces of the first and third upper plate 21 and 23 and the bottom of the upper end of the first and third upper rails 11 and 13 are spaced apart from each other by the suction floating means 30 and face each other. In addition, the upper surface of the second upper plate 22 and the lower surface of the upper end of the second upper rail 12 are also spaced apart from each other by the suction-type floating means 30 to face each other.

More specifically, the magnetic circuit path forming member 38 attached to the upper surfaces of the first, second, third, and third floating plates 21, 22, and 23 of the transporter 20, and the first, The floating electromagnets 36 attached to the second and third upper rails 11, 12, and 13 are spaced apart from each other and face each other.

Accordingly, when a current is applied to the floating electromagnet 36 of the stator 10 and magnetized, the magnetic circuit path forming member 38 of the transporter 20 is pulled by magnetic force, but is pulled to a degree of being non-stick. The first, second and third float plates 21, 22 and 23 of the transporter 20 are lifted by suction with respect to the first, second and third upper rails 11, 12 and 13 of the stator 10. It becomes a state.

On the other hand, as a main feature of the present invention, the suction type magnetic levitation means 30 is supported by the three points between the stator 10 and the transporter 20 and generates heat at the same time to generate the suction magnetic levitation force Configured to block.

That is, the magnetic circuit path forming members 38 attached to the upper surfaces of the first, second, third, and third floating plates 21, 22, and 23 of the transporter 20, respectively, form a stable triangular arrangement when viewed in plan view. Corresponding to the floating electromagnet 36 of the first, second, third upper rails (11, 12, 13) of 10), respectively, and supported by three points, this three-point support method is mechanical vibration compared to the conventional two-point support method In addition, it is possible to provide the stability of the linear transfer by holding the carrier firmly without shaking.

In particular, the first, second, third floating plate (21, 22, 23) of the transporter 20 is a state in which only the magnetic circuit path forming member 38 without windings is provided, the stator 10 in a three-point support manner By being in a state of suction floating on the first, second, third upper rails (11, 12, 13) of the, there is no heat generation unlike the electromagnet including the winding that generates heat when the current is applied, such as LCD, Since heat transfer is not performed toward the transfer plate 24 of the carrier 20 on which the display panel is mounted, it is possible to easily protect a display panel such as a sensitive LCD from heat.

Here, looking at the configuration of the propulsion means according to the present invention.

The propulsion means 40 is installed at a corresponding position between the stator 10 and the transporter 20, as a means for generating a driving force for the linear transport of the transporter 20, the lower rail 14 of the stator 10 On the bottom surface of the first and third float plates 21 and 22 of the feeder 20 so as to correspond in the up and down direction with the concentric linear synchronous motor 42 installed on the bottom surface. It consists of a permanent magnet 44 having a magnetic arrangement of Halbach (Halbach) that is a permanent magnet attached over.

Accordingly, when a current is applied to the linear synchronous motor 42, the linear synchronous motor 42 generates a moving magnetic field toward the permanent magnet 44 of the transporter 20, thereby providing the linear synchronous motor 42 and the permanent magnet 44. By the suction and repulsion between the two, the carrier 20 is pushed in a linear direction.

On the other hand, the guide means 50 according to the present invention is a suction guide force on both sides of the transporter 20 so that the transporter 20 for linear transport along the stator 10 does not deviate from within the track for the linear transport As it serves to hold the, it is installed in the same manner as the suction-type floating means (30).

That is, the guide means 50 is a magnetic circuit path forming member 52 is attached to both sides of the transfer plate 24 of the carrier 20, the electromagnet in the outer position spaced apart from the magnetic circuit path forming member 52 A guide electromagnet 58 composed of a core 54 and a stator winding 56 wound around the electromagnet core 54 is fixedly installed by a predetermined support means.

Accordingly, when a current is applied to the guide electromagnet 58 of the guide means 50 and magnetized, the electromagnet core or permanent magnet 54 of the transporter 20 is pulled by magnetic force, but is pulled to such a degree that it does not stick, As a result, the transporter 20 is in a state in which both sides of the guide floating by suction.

Similarly, while only the magnetic circuit path forming member 38 having no winding is provided on the conveying plate 24 of the conveyer 20, the suction plate floats by suction with respect to the guide electromagnet 58 of the guide means 50. Thus, unlike the electromagnet including the winding to generate heat when the current is applied, there is no heat generation, the heat transfer is not made toward the transfer plate 24 of the carrier 20 mounted with a display panel, such as LCD.

On the other hand, although not shown in the drawings, in the magnetic levitation transfer system of the present invention the power supply for power supply to the floating electromagnet 36, the guide electromagnet 58, the linear synchronous motor 42 and the like, and the current position of the moving part Position detecting means for detecting is provided.

Preferably, the power supply device is a component for supplying power to the floating electromagnet 36, the linear synchronous motor 42, the guide electromagnet 58, and the like, and the friction loss and the power supply using a conventional cable bay. It is desirable to adopt a Contractless Power Supply (CPS) that can reduce noise.

Here, the operation of the magnetic levitation linear transfer device of the present invention having the above configuration will be briefly described.

5 is a plan view illustrating a state in which the conveyor linearly moves along the stator of the magnetic levitation linear transfer apparatus according to the present invention.

First, power is applied to the floating electromagnet 36 and the linear synchronous motor 42 on the stator 10 side and the guide electromagnets 58 disposed on both sides of the transporter 20 through the non-contact power supply device. .

Subsequently, when a current is applied to the floating electromagnet 36 of the stator 10 and magnetized, the magnetic circuit path forming member 38 of the transporter 20 is pulled by suction, thereby removing the stator 10. The first, second and third float plates 21, 22, and 23 of the transporter 20 are lifted with respect to the 1,2,3 upper rails 11, 12, and 13 by suction.

That is, the magnetic circuit path forming members 38 attached to the upper surfaces of the first, second and third sub-plates 21, 22, and 23 of the transporter 20 are respectively the first, second, and third upper parts of the stator 10. Corresponding to the floating electromagnets 36 of the rails 11, 12, and 13, respectively, three points are supported in a triangular arrangement and are in a floating state by suction.

In addition, when a current is applied to the guide electromagnet 58 of the guide means 50 and magnetized, the electromagnet core or permanent magnet 54 of the transporter 20 is pulled by magnetic force, and both sides of the transporter 20 are magnetized. The guide is lifted up by the suction suction method.

Accordingly, when a current is applied to the linear synchronous motor 42, the linear synchronous motor 42 generates a moving magnetic field toward the permanent magnet 44 of the transporter 20, thereby providing the linear synchronous motor 42 and the permanent magnet 44. Due to the suction and repulsion between the carriers 20, the carriers 20 transfer the object to be transferred (display panel such as an LCD for the deposition process) with high precision and linearly.

1 is a cross-sectional view showing a linear transfer device using a magnetic levitation and magnetic bearing according to the present invention,

Figure 2 is a perspective view showing the conveyor of the linear transfer device using a magnetic levitation magnetic bearing according to the present invention,

Figure 3 is a perspective view showing a separation state between the stator and the conveyor of the linear transfer device using a magnetic levitation magnetic bearing according to the present invention,

Figure 4 is a perspective view showing a coupling state between the stator and the feeder of the linear transfer device using a magnetic levitation magnetic bearing according to the present invention,

5 is a plan view showing a state in which the conveyer is linearly conveyed along the stator of the linear conveying apparatus using the magnetic levitation magnetic bearing according to the present invention;

6 is a view showing another embodiment of a stator of a linear transfer apparatus using a magnetic levitation magnetic bearing according to the present invention, in which a floating electromagnet of the stator is connected to each other.

<Explanation of symbols for the main parts of the drawings>

10: stator 11: first upper rail

12: second upper rail 13: third upper rail

14: lower rail 20: transporter

21: first float plate 22: second float plate

23: third floating plate 24: transfer plate

25: first support bar 26: second support bar

30: magnetic suction means 32: electromagnet core

34: stator winding 36: floating electromagnet

38: magnetic circuit path forming member 40: propulsion means

42: concentric linear synchronous motor 44: permanent magnet

50: guide means 52: magnetic circuit path forming member

54: electromagnet core 56: stator winding

58: guide electromagnet 60: payload (payload) version

62: secondary damper

Claims (12)

A stator 10 provided in the form of a straight rail; A transporter 20 which linearly transports the magnetic product by suction with respect to the stator while loading the display product for the deposition process; Suction-type magnetic levitation means (30) supported between the stator (10) and the transporter (20) to generate suction levitation force and to block heat generation at the transporter; A propulsion means (40) installed at a corresponding position between the stator (10) and the transporter (20) to generate a propulsion force for linear transport of the transporter (20); Guide means (50) for generating a suction guide force for holding both sides of the conveyor (20) so that the conveyor (20) for linear transport along the stator (10) is present in the transport trajectory; Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that configured to include. The method of claim 1, wherein the stator 10 is: A lower rail 14 fixed to the installation site; First and second upper rails 11 and 12 integrally formed at one end and the other end of the lower rail 14 and vertically erected, respectively, the upper end of which is vertically bent; The third upper part is integrally formed on the upper surface of the lower rail 14 between the first and second upper rails 11 and 12 and vertically erected, and the upper end is vertically bent in the same direction as the second upper rail 12. Rail 13; Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that consisting of. The method of claim 1, wherein the transporter 20 is: A transfer plate 24 for loading and transferring a product for a deposition process; A first support bar 25 integral with a predetermined bottom surface of the transfer plate 24 and extending between the first and third upper rails 11 and 13 of the stator; First and third upper plate plates 21 and 23 extending from both ends of the lower end of the first support bar 25 to face bottom surfaces of the upper end portions of the first and third upper rails 11 and 13; ; A second support bar (26) integral with a predetermined bottom surface of the transfer plate (24) and extending between the second and third upper rails (12, 13) of the stator (10); A second upper plate 22 extending outward from a lower end of the second support bar 26 so as to face the bottom surface of the upper end of the second upper rail 12; Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that consisting of. The method of claim 1, wherein the suction magnetic levitation means 30: Floating electromagnet consisting of an electromagnet core 32 mounted on the bottom of the upper end of the first, second and third upper rails 11, 12, 13 of the stator 10 and a stator winding 34 wound around the electromagnet core 32. 36; The magnetic circuit path forming member 38 mounted on the upper surfaces of the first, second and third float plates 21, 22, and 23 of the transporter 20 to exert magnetic levitation force with the floating electromagnet 36 by suction. ); Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that consisting of. The method of claim 1 wherein the propulsion means 40 is: An air core type linear synchronous motor (42) installed on the bottom surface of the lower rail (14) of the stator (10); A permanent magnet 44 corresponding to the concentric linear synchronous motor 42 in a vertical direction and attached to the bottoms of the first and third upper plate plates 21 and 22 of the transporter 20; Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that consisting of. The method according to claim 1, wherein the guide means 50 is: Magnetic circuit path forming members 52 attached to both sides of the conveying plate 24 of the conveyer 20; A guide electromagnet (58) composed of an electromagnet core (54) and a stator winding (56) wound around the electromagnet core (54), the guide electromagnet (58) being spaced apart and fixedly mounted to the outside of the magnetic circuit path forming member (52); Straight line transfer device using a magnetic levitation and magnetic bearing, characterized in that consisting of. The method according to claim 4, The magnetic circuit path forming members 38 attached to the first, second, and third floating plates 21, 22, and 23 of the transporter 20 are arranged in a triangular arrangement when viewed in plan view. Linear feeder using floating and magnetic bearing. The method according to claim 4, The floating electromagnets 36 of the first, second and third upper rails 11, 12 and 13 of the stator 10 are divided into several sections, and the number of sections increases as the length of each rail increases. A linear transfer device using magnetic levitation and magnetic bearings. The method according to claim 8, As a structure of connection between the floating electromagnets 36, which are divided into several sections, the electromagnet cores 32 of each of the floating electromagnets 36 are bonded to each other, and the windings 32 are independently for each of the electromagnet cores 32. It is wound, the linear transfer device using a magnetic levitation and magnetic bearing, characterized in that to give a different control current of each floating electromagnet (36). The method according to claim 9, It is possible to independently control the force generated in the Nth and N + 1th sections among several sections, but to control the generated force uniformly (F _N + F _{N + 1} = constant) to switch to each section. In the meantime, the linear transfer device using magnetic levitation and magnetic bearing, characterized in that the disturbance (Disturbance) is not generated. The method according to claim 4, Heat generated in the electromagnet core mounted on the upper surfaces of the first, second and third float plates 21, 22, and 23 of the transporter 20 to exert magnetic levitation force by the suction electromagnet 36. Linear transfer apparatus using a magnetic levitation and magnetic bearing, characterized in that the use of a laminated core to minimize the. The method according to claim 4, A linear water transfer using magnetic levitation and magnetic bearing is characterized in that the water cooling path is further formed at adjacent positions of each of the electromagnet cores 32 and the stator windings 34 of the stator 10 so as to achieve cooling of the water cooling method. Device.

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