KR101454302B1 - Magnetically levitated transportation system for display manufacturing equipment - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation conveying system that transfers a display product to a process in an inline type OLED manufacturing facility or the like.
The present invention realizes a new type of magnetic levitation transport system in which the upper magnetic levitation module and the lower linear propulsion module are arranged vertically and the electromagnet core and the permanent magnet are disposed in the tray, The new type of magnetic levitation transport system that combines the magnetic levitation module placed on the top and bottom and the rotating module connected to the linear propulsion module while protecting the product as well as protecting the product from being affected by heat, The present invention provides a magnetic levitation transport system for a display manufacturing facility capable of enhancing the efficiency with respect to transportation and process processing of a display product, such as allowing a tray transfer between processes to be performed in a continuously circulating automated manner.

Description

[0001] Magnetically levitated transportation system for display manufacturing equipment [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation transfer system for a display manufacturing facility, and more particularly, to a levitation transfer system for transferring a display product to a process in an in-line type OLED manufacturing facility or the like.

Generally, in the case of a transfer system, a substrate including an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel), and OLED (Organic Light Emitting Diodes), a semiconductor wafer, Such as a cassette or a carrier, which can solve the problem of particle generation, the problem of parts damage due to friction, abrasion, and the problem of noise generation, and it is also possible to provide a magnetic Magnetically levitated transportation system is mainly applied.

This magnetic levitation conveying system is a system that levitates the conveying body by magnetic levitation. Since there is no mechanical contact or friction between the conveying body and the rail, there is no energy loss, and no noise, low vibration, super clean conveying system can be realized have.

In the case of a magnetic levitation transfer system, a magnetic levitation force, a guide force, and a propulsion force are required. Normally, a levitation force and a guidance force are provided from a levitation electromagnet, and a propulsion force is provided from a linear induction motor or a linear synchronous motor.

For example, the magnetic levitation force controls the current flowing in the winding of the electromagnet while adjusting the attraction force between the levitation electromagnet and the fixture in the vertical direction (the same direction as the levitation force), so that the levitation electromagnet and the fixture are maintained at a constant interval And the guide force is generated in the horizontal direction between the levitation electromagnet and the fixture (direction perpendicular to the levitation force and the propulsive force), so that the conveyor does not deviate from the orbit.

Such a magnetic levitation transfer system is widely used as a system for transferring parts, semi-finished products, and products from various factory automation lines such as a manufacturing line of a semiconductor such as a display or the like requiring a super clean environment.

In the conventional magnetic levitation conveying system, an electromagnet core and a driving winding are provided on a conveying body side on which a display product such as an LCD or an LED is mounted, so that heat generation due to application of a current, And the heat generated at this time is transmitted to the display product, thereby damaging the display-sensitive display product.

For example, in the case of a deposition process for a display product, the process is performed in a very clean environment, such as a vacuum chamber, so that heat is not transferred to the display product, and if heat is transferred to the display product, Resulting in defective products.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a novel type of magnetic levitation conveying method in which an upper magnetic levitation module and a lower linear propulsion module are arranged vertically, It is an object of the present invention to provide a magnetic levitation conveying system for a display manufacturing facility capable of improving the efficiency of conveying as well as protecting a product such that a display product side in a tray is not affected by heat.

It is another object of the present invention to provide a magnetic levitation transfer system in which a magnetic levitation module disposed in the upper and lower parts and a rotary module connected to the linear propulsion module are combined, Which can increase the efficiency with respect to the transportation and processing of the display products.

To achieve the above object, the present invention provides a magnetic levitation transport system for a display manufacturing facility having the following features.

The magnetic levitation conveying system includes a magnetic levitation module installed at an upper portion thereof to float a tray and having a plurality of levitation electromagnets arranged at regular intervals, And a linear propelling module disposed between the magnetically levitated module and the linear propelling module. The electrostatic chuck and the magnetic levitation module for transferring the display product while being lifted and propelled, A floating electromagnetic coil on the upper side corresponding to the floating electromagnet and a tray having a lower permanent magnet for propulsion corresponding to the propulsion LSM winding of the linear propulsion module.

Therefore, the magnetic levitation conveying system is characterized in that the tray is transported through the propulsion operation of the linear propulsion module and the real-time floating section switching operation of each levitation electromagnet of the levitation module.

Here, the above-mentioned magnetic levitation conveying system includes a linear encoder installed on the side of the magnetic levitation module or on the side of the linear propulsion module for controlling the levitation section switching operation of the levitation module and for controlling the propulsion operation of the linear propulsion module, , Bar code positioning sensors, laser interferometers, and the like.

The magnetic levitation conveying system is a means for preventing deviation of the trajectory of the tray. The magnetic levitation conveying system uses a block for forming a magnetic path, which is provided on the tray side and the linear propulsion module, A plurality of guide electromagnets arranged at intervals and a corresponding electromagnet core for a tray-side guide can be employed.

In a preferred embodiment, the magnetic levitation conveying system includes a magnetic levitation module and a linear propulsion module as circulation lines, and a magnetic levitation type rotation module is disposed at a direction switching position of each module to unload the process- And a tray is returned to the start position.

At this time, in the case of the rotating module of the magnetic levitation type, the floating electromagnet disposed along the locus of the arc shape corresponding to the floating electromagnet core of the tray on the bottom surface of the fixed plate is disposed along the trajectory of the arc shape A rotating type plate using a variable reluctance type motor for rotating the tray or a rotating type plate having a plurality of levitation electromagnets arranged in parallel at regular intervals corresponding to the floating electromagnet cores of the tray on the bottom surface, And a type using a motor.

The magnetic levitation conveying system for a display manufacturing facility provided by the present invention has the following advantages.

First, since a tray is disposed between the upper magnetic levitation module and the lower linear propulsion module to transfer the display product, it is possible to easily construct the structure of the automated transfer line constructed in the inline type OLED manufacturing facility, And it is advantageous in terms of factory layout, and the efficiency of the process and the transfer can be improved.

Secondly, since only the electromagnet core and the permanent magnet are disposed on the tray side where the display product is mounted, the product defective rate can be lowered because the product can be protected from the influence of heat.

Third, the magnetic levitation module and the linear propulsion module in the upper and lower parts, and the rotation module disposed in the corner part of the line are combined, and the tray transfer method between the processes is continuously circulated, thereby transferring the display product, The related efficiency can be increased.

Fourth, there is an advantage that the position of the tray can be precisely measured and controlled by applying a linear encoder for position detection or the like.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front view of a magnetic levitation transport system in accordance with an embodiment of the present invention;
Figure 2 is a side view of a magnetic levitation transport system in accordance with an embodiment of the present invention.
3 is a front view showing a magnetic levitation transport system according to another embodiment of the present invention;
Figure 4 is a side view of a magnetic levitation transport system according to another embodiment of the present invention
5 is an enlarged side view showing an example of a noncontact position sensor in the magnetic levitation transfer system according to the present invention
6 is a schematic view showing an example of a rotation module in a magnetic levitation transport system according to the present invention
Figure 7 is a schematic diagram illustrating the operating principle for the rotating module of Figure 6;
8 is a schematic view showing another example of the rotation module in the magnetic levitation conveying system according to the present invention
9A to 9G are schematic views illustrating a process of transferring a display product and a tray using a magnetic levitation conveying system according to the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Figure 1 is a front view of a magnetic levitation transport system in accordance with one embodiment of the present invention and Figure 2 is a side view of a levitation transport system in accordance with an embodiment of the present invention.

As shown in Figs. 1 and 2, a tray having a fixed display product is mounted by using a magnetic levitation module having a plurality of float electromagnet arrays and a linear propulsion module composed of a propulsion LSM (Linear Synchronous Motor) And transferring them between processes.

To this end, a magnetic levitation module 12 is provided as a means for lifting the tray 10, and the magnetic levitation module 12 includes a plurality of floating electromagnets 11 arranged in parallel at regular intervals along the tray transport direction ).

Each of the floating electromagnets 11 may be installed in a structure that is fixed to an upper frame 27a disposed side by side along a tray transfer line leading to the process, do.

Since the plurality of floating electromagnets 11 are arranged at regular intervals in this manner, it is possible to transfer a long stroke of the tray 10, and at least three or more floating electromagnets 11 are arranged in a section So that the tray 10 can be lifted and supported.

This magnetic levitation module 12 can float the tray 10 with a real-time floating section switching operation.

For example, when the floating electromagnet 11 selected by the magnetic floating module controller (not shown) among the plurality of floating electromagnets 11 acts as a driving coil, that is, power is applied to the selected floating electromagnet 11, The tray 10 can float in such a manner that the switching is performed.

For example, by sequentially turning ON / OFF the floating electromagnets 11 arranged in a line along the moving direction of the tray 10 in accordance with the tray advancing direction, It is possible to raise the tray 10 while keeping up with the progress of the tray 10.

In the case of such a magnetic levitation module 12, by applying a multi-floating electromagnet which is arranged at regular intervals, current is applied only to the floating electromagnet 11 positioned in a section where the tray 10 passes among the plurality of floating electromagnets 11 The floating electromagnet 11 in the section in which the tray 10 is located is turned ON and the tray 10 is lifted in a real time floating section switching mode in which the floating electromagnets in the other sections are turned OFF And ultimately has the advantage of significantly reducing the power energy required to transport the tray.

The floating electromagnetic electromagnet 11 is disposed on the side of the magnetic levitation module 12 corresponding to the stator and the floating electromagnetic electromagnet core 16 corresponding to the floating electromagnet 11 is disposed on the tray 10 corresponding to the mover (100 kg to 1 ton) conveyance body (for example, a tray, etc.) can be secured by using the suction type magnetic levitation system using the shape of the moving magnet type, It is possible to perform precision floating control of less than or equal to 탆.

In addition, since the floating electromagnet driving coil is disposed in the stator, the cooling device can be easily installed, and the cooling device can be disposed outside the vacuum chamber.

That is, in a vacuum chamber, heat can not be transmitted by convection, and heat can be transferred only by conduction. Therefore, it is a very important feature that the cooling device can be disposed outside the vacuum chamber.

Then, a linear propulsion module 14 including a propulsion LSM winding 13 is provided as a means for propelling the tray 10.

The linear propulsion module 14 is installed as a means for generating a propelling force for linear transport of the tray 10 and is arranged in parallel to the bottom of the array of levitation electromagnets in the levitation module 12, 27a and 27b, respectively.

Thus, by applying current to the propulsion LSM winding 13 of the linear propulsion module 14, the propulsion of the tray 10 can be generated.

As one example of a means for substantially transferring the display product, a tray 10 having an electrostatic chuck 15 for fixing the display product is provided.

The tray 10 includes a tray main body 28 having a square frame and an electrostatic chuck 15 capable of fixing a display product is installed in an inner region of the tray main body 28.

A floating electromagnetic coil 16 is provided at an upper end of the tray main body 28 to correspond to the floating electromagnetic coil 11 of the magnetic floating module 12. The floating electromagnetic coil core 16 is arranged in a row The floating electromagnet 11 can be formed in a side-by-side manner.

A propelling permanent magnet 17 corresponding to the propelling LSM winding 13 of the linear propelling module 14 is installed at the lower end of the tray main body 28. The propelling permanent magnet 17 And can be placed side by side with the linear propulsion LSM windings 13 in a straight line.

This tray 10 is disposed between the maglev module 12 and the linear propulsion module 14 in the left and right width direction of the tray body 28 between the upper maglev module 12 and the lower linear propulsion module 14. [ And is positioned in a vertical posture.

The upper end floating electromagnet core 16 of the tray 10 positioned in this way is positioned close to and directly below the floating electromagnet 11 in the magnetic levitation module 12 and is positioned at the lower end of the lower permanent magnet 17 for propulsion of the tray 10. [ Lt; / RTI > of the propulsion LSM windings 13 in the linear propulsion module 14 as shown in FIG.

Accordingly, the tray 10 can be transported along the tray transfer line by receiving the driving force of the linear propulsion module 14 in a floating state by the magnetic levitation module 12.

That is, the tray 10 receives the thrust generated by the propulsion operation of the linear propulsion module 14 in the space constituted by the vacuum region 30, And can be transported while receiving the floating force by the real-time flotation section switching operation.

In the meantime, the present invention provides a tray guiding means for allowing the tray 10 to be accurately conveyed along the conveying line without leaving the trajectory.

The magnetic path forming blocks 29a and 29b are provided on the lower end side of the tray main body 29 and on the lower side of the tray main body 29. [ Are mounted on the side of the propulsion LSM winding (13) in the linear propulsion module (14) facing each other.

For example, a substantially "C" shaped magnetic path forming block 29b is provided side by side on a frame 27b on which the propelling LSM winding 13 of the linear propulsion module 14 is installed, A magnetic path forming block 29a having a substantially "C" shape and having a magnet is provided in the tray main body 28 of the tray 10, and the magnetic path forming blocks 29a, And a plurality of concave-convex portions 19a and 19b are formed at the leading end portions which are located close to each other.

At this time, the magnetic path forming blocks 29a and 29b can effectively prevent the trajectory deviation of the tray 10 in the front-rear direction by using the concave-convex portions 19a and 19b facing each other.

It is preferable that the magnetic path forming blocks 29a provided on the side of the tray 10 are provided on both sides of the tray main body 28 in the widthwise direction so as to stably hold the tray 10 .

Accordingly, the trays 10 are accurately positioned by the attraction force and the repulsive force exerted by the block 29a for forming the magnetic path for forming the tray-side path and the block 29b for forming the magnetic path for the linear propulsion module, It can be positioned on the trajectory and eventually an accurate linear transfer of the display or semi-finished product hanging from the tray becomes possible.

Of course, in the case of the inductive electromagnet using the "C" shape and the floating electromagnet core using the inductive electromagnet core, the guide force to be aligned to the center is generated when the electromagnets are misaligned, so that the tray can be accurately transferred while maintaining the center line of the orbit , And by applying the magnetic path forming blocks 29a and 29b to the magnetic path forming blocks 29a and 29b, more precise guide control can be obtained.

2, when the up-and-down concave portions 19a and 19b are aligned, the aligning force becomes "0 ", and when the concave and convex portions 19a and 19b are displaced, .

In addition, the magnetic path forming blocks 29a and 29b can increase the number of irregularities by increasing the irregularities, and if the irregularities are larger than one irregularities, the irregularities can be increased.

FIG. 3 is a front view showing a magnetic levitation transport system according to another embodiment of the present invention, and FIG. 4 is a side view showing a levitation transport system according to another embodiment of the present invention.

3 and 4, there is shown an example in which a combination of the guide electromagnet 20 and the guide electromagnet core 21 is used as a means for preventing trajectory deviation of the tray 10. As shown in Fig.

Of course, the above-mentioned magnetic levitation conveying system has a basic configuration with the levitation conveying system shown in the above embodiment.

For example, the magnetic levitation module 12 having a structure in which a plurality of levitation electromagnets 11 are arranged at regular intervals, the linear propulsion module 14 having the propulsion LSM windings 13, and the floating electromagnet 11 And a tray 10 having a lower trailing electromagnet core 16 corresponding to the propulsion LSM winding 13 and a lower propelling permanent magnet 17 corresponding to the propulsion LSM winding 13. The propulsion operation of the linear propulsion module 14, The manner in which the tray 10 is transported through the real-time floating section switching operation for each floating electromagnet 11 of the magnetic levitation module 12 can be applied.

A plurality of guiding electromagnets 20 are disposed on both sides of the conveying path of the tray 10 so as to be separated from the trajectory of the tray 10 at regular intervals along the tray conveying path, 20, a guide electromagnet core 21 is installed on the upper end side and the lower end side of the tray 10, respectively.

At this time, the arrangement of the guide electromagnets 20 is arranged at the same height on both sides with the path through which the trays 10 are conveyed, and this arrangement is the same as above and below the tray conveying path .

For example, as shown in FIG. 3, four rows of electromagnets 20 for guiding the front and back sides of the tray 10 can be provided. Rear, and three guide electromagnet cores 21 for both the upper and lower ends.

At this time, the guide electromagnet 20 may be fixed to the chamber side frame 27c.

Accordingly, the guide electromagnet 20 can prevent the trajectory departure of the tray 10 by the real-time floating section switching operation as in the case of the magnetic levitation module 12.

5 is an enlarged side view showing an example of a non-contact position sensor in the magnetic levitation transfer system according to the present invention.

As shown in Fig. 5, here, a linear encoder is used as an example of the non-contact position sensor.

For the tray transfer, the current position of the tray 10 must be detected in order to switch the real-time section of the magnetic levitation module 12 and propel the linear propulsion module 14. As a means for detecting the tray position at this time, Encoder, bar code positioning sensor, laser interferometer and so on.

That is, it is possible to know the position of the center of gravity of the tray from the current tray position, to calculate in real time how much the electromagnet actuator of each floating electromagnet is apart from the center of gravity of the tray, and determine the control current of the electromagnet actuator of each floating electromagnet The current position of the tray can be detected.

As an example of the noncontact position sensor 18 that detects the position of the tray 10 in order to control the floating section switching operation of the magnetic levitation module 12 and control the propelling operation of the linear propulsion module 14, Contact position sensor 18 is provided.

That is, a linear encoder head 19a is provided on the side of the magnetic levitation module 12, and a linear encoder scaler 19b is provided on the side of the tray 10 corresponding to the linear encoder head 19a. 19b are positioned close to each other in the up and down directions to be able to send and receive signals.

Precise positional information of the tray 10 detected by the linear encoder head 19a and the linear encoder scaler 19b is sent to a linear propulsion module side controller (not shown) and a magnetic levitation module side controller (not shown) And finally, by controlling the output of the controller, not only the propulsion control but also the driving coil among the plurality of floating electromagnets can be determined to perform the ssens switching.

6 is a schematic diagram showing an example of a rotation module in a magnetic levitation transport system according to the present invention.

As shown in Fig. 6, an example of using the variable reluctance motor 24 as an example of the rotation module 22 of the magnetic levitation type is shown here.

A floating electromagnet 11 corresponding to the floating electromagnetic coil core 11 of the tray 10 and arranged along a trajectory of an arc shape is provided on the bottom surface of the fixed plate 23 in the form of a disk, (11) can form a plurality of rows, and each of the floating electromagnet rows can be symmetrical with respect to the center of the disk.

At this time, the floating electromagnet 11 can take a form in which a coil is wound on a stator core having a "C" -shaped cross section.

The heat of the floating electromagnets 11 arranged in the trajectory of the arc can be installed over a sufficient length (over at least a 90 ° angle length section) to rotate the tray 10 by 90 °.

As a result, the floating electromagnet core 16 and the floating electromagnet 11 cross each other at a constant cross-sectional area, and the floating force generated even when the tray 10 is rotated It can be kept constant.

As a result, when the tray 10 is rotated by the driving force of the variable reluctance motor 24 while the tray 10 enters the bottom of the fixed plate 23, the floating electromagnet 11, which is the stator core in the fixed plate 23, And the floating electromagnet core 16, which is the mover core in the tray 10, can be lifted.

A variable-reluctance-type electric motor 24 is disposed on the bottom surface of the fixed plate 23 and is disposed along the trajectory of the fixed plate 23 along its edge to propel (rotate) the tray 10 .

In the case of the variable reluctance motor 24 disposed in the arc-shaped trajectory, the tray 10 can be installed over a length sufficient to rotate the tray 10 by 90 ° (over at least a 90 ° angle length section) So that they can be arranged symmetrically with respect to each other.

At this time, the variable reluctance motor 24 is driven by a reluctance motor so as to move at an open-loop angle when a current is applied to the stator (which is the same as the stepping motor driving method, and attracts and repulsows the electromagnetic force generated in the stator coil, The rotation of the magnetic pole in the tray 10).

That is, as shown in FIG. 7, if the current is sequentially applied to the variable reluctance motor 24 along the arrow direction, the tray 10 can be rotated.

For example, when current is applied to the current A and C coils and then current is applied to the next B and D coils, the tray 10 can be rotated by the angle "? & When the current is applied to the coil, it can be rotated by "2 &thetas; ", and the tray 10 can be rotated while repeating a process of applying current in this manner and repeating the process.

Therefore, the tray 10 that has entered the area of the rotation module 22 receives the levitation force by the levitation electromagnet 11 in the fixed plate 23 and the propulsive force (rotational force) by the variable reluctance motor 24 After changing the direction, it is possible to continue to receive the propulsion of the linear propulsion model 14.

8 is a schematic view showing another example of the rotation module in the magnetic levitation transfer system according to the present invention.

8, there is shown an example of a rotatable plate 25 operated by a motor 26 as an example of a rotation module 22 of a magnetic levitation type.

A plurality of levitation electromagnets 11 are provided on the bottom surface of the rotatable plate 25 so as to correspond to the levitation electromagnet core 16 of the tray 10 and are arranged at regular intervals. The center of the upper motor 26 is connected to the axis of the upper motor 26 and can be rotated.

Of course, the floating electromagnet 11 installed on the rotatable plate 25 at this time can operate in a real-time floating section switching mode like the magnetic levitation electromagnet 11 to float the tray 10.

The tray 10 which has entered the area of the rotation module 22 is rotated by the rotation of the rotating plate 22 in accordance with the operation of the motor 26 in a state of being lifted by the floating electromagnet 11 in the rotation plate 23. [ 25, so that the directionally changed tray 10 can continue to be transported under the driving force of the linear propulsion model 14.

When the non-contact position sensor detects the tray position and determines that the tray 10 has entered the area of the rotation module 22, the rotation module 22 is rotated The drive means (variable reluctance motor or motor) provided in the module 22 is operated, and consequently the tray 10 can be rotated.

The present invention provides a method of operating the system while continuously circulating the tray 10 using the magnetic levitation module 12, the linear propulsion module 14, and the plurality of rotation modules 22.

9A to 9G, the magnetic levitation module 12 and the linear propulsion module 14 form a circulation line arranged in parallel on the same line in the up and down directions while drawing a predetermined locus. The magnetic levitation type rotation module 22 is disposed at a position where the magnetic levitation module 12 and the linear propulsion module 14 are to be turned, that is, at any position where the direction of the tray 10 should be reversed.

That is, the magnetic levitation module 12 and the linear propulsion module 14 are arranged above and below the tray transfer line, and the rotation module 22 is disposed at a position where the direction of the tray 10 is required to be switched, 10 can be transported while drawing a predetermined circular trajectory.

Therefore, the tray 10 can be continuously circulated by the magnetic levitation module 12, the linear propulsion module 14, and the plurality of rotation modules 22 constituting the circulation line to convey the display product.

For example, the tray 10 may be loaded along with the magnetic levitation module 12 and the linear propulsion module 14 and the rotation module 22, which form a circulation line, to load the display product at the start position, So that the display product can be transported in a continuous circulation manner in which the processed display product is unloaded and returned to the start position.

As described above, in the present invention, a new system for transporting a tray by combining a tray using a multi-floating electromagnet consisting of a plurality of floating electromagnets, a tray propulsion using a propulsion LSM winding, and a rotation module for changing the direction of the tray is constructed , The entire structure of the system can be simplified, and the efficiency of the overall process related to the transfer of the display product through the tray can be enhanced.

10: Tray 11: Floating Electromagnet
12: magnetic levitation module 13: LSM winding for propulsion
14: linear propulsion module 15: electrostatic chuck
16: floating electromagnet core 17: propelling permanent magnet
18: Non-contact position sensor 19a, 19b:
20: guide electromagnet 21: guide electromagnet core
22: rotation module 23: fixed plate
24: Variable-reluctance type electric motor 25: Rotary type plate
26: motors 27a, 27b, 27c:
28: tray main body 29a, 29b: magnetic field path forming block
30: Vacuum area

Claims (10)

A tray (10) in which the display product is fixed and disposed within the vacuum region (30) to move along the transfer line;
A magnetic levitation module (12) disposed above the tray (10) to raise the tray (10) in a direction perpendicular to the conveyance line; And
And a linear propulsion module (14) disposed below the tray (10) to propel the tray (10) along the transport line,
A floating electromagnet core 16 for generating a levitation force is mounted on the upper end of the tray 10 and a propelling permanent magnet 17 for generating propulsion is mounted on a lower end of the tray 10,
The magnetic levitation module (12) includes a plurality of levitation electromagnets (11) that interact with the levitation electromagnet core (16) to generate a levitation force, the linear propulsion module (14) And a propulsion LSM winding (13) that interacts with the magnet (17) to generate thrust,
The magnetic levitation module 12 operates in a real-time floating section switching mode in which current is applied only to the electromagnets 11 located in the passage of the tray 10 among the plurality of electromagnets 11, Magnetic levitation transport system.
The method according to claim 1,
(12) or the linear propulsion module (14) side to control the levitation section switching operation of the levitation module (12) and to control the propulsion operation of the linear propulsion module (14) 10. The magnetic levitation transport system for a display manufacturing facility according to claim 1, further comprising a non-contact position sensor (18) for detecting the position of the contactless position sensor (10).
The method of claim 2,
Wherein the non-contact position sensor (18) comprises any one of a linear encoder, a bar code positioning sensor, and a laser interferometer.
delete The method according to claim 1,
As a means for preventing the trajectory deviation of the tray 10, the lower side propelling permanent magnet 17 side of the tray 10 and the propulsion LSM winding 13 of the linear propelling module 14 facing the lower side Further comprising: a magnetic path forming block (29a, 29b) for forming a magnetic field path.
The method according to claim 1,
A plurality of guide electromagnets 20 disposed at regular intervals on both sides of the tray along the conveying path of the tray 10 and a plurality of guide electromagnets 20 disposed on the side of the tray 10 corresponding thereto Further comprising a guide electromagnet core (21). ≪ RTI ID = 0.0 > 21. < / RTI >
The method according to claim 1,
The magnetic levitation module 12 and the linear propulsion module 14 are constituted by a circulation line, and a rotation module 22 of a magnetic floating system is disposed at a direction switching position of each module, Is operated in a continuous circulation manner to cause the tray (10) to return to its starting position.
The method of claim 7,
The rotating module 22 of the magnetic levitation type is mounted on the bottom surface of the fixed plate 23 with a floating electromagnet 11 (corresponding to the floating electromagnet core 16 of the tray 10) And a variable reluctance type electric motor (24) arranged along the trajectory of the arc shape to rotate the tray (10).
The method of claim 7,
The rotating module 22 of the magnetic levitation type is provided with a rotatable plate 25 having a plurality of levitation electromagnets 11 arranged at regular intervals corresponding to the levitation electromagnet core 16 of the tray 10 on the bottom surface thereof ) And a motor (26) for rotating the rotatable plate (25).
The method according to claim 1,
Characterized in that the levitation electromagnets (11) of the magnetic levitation module (12) and the propulsion LSM windings (13) of the linear propulsion module (14) are arranged outside the vacuum zone (30) Magnetic levitation transport system.

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