TW202100431A - Article transport body - Google Patents

Article transport body Download PDF

Info

Publication number
TW202100431A
TW202100431A TW109116557A TW109116557A TW202100431A TW 202100431 A TW202100431 A TW 202100431A TW 109116557 A TW109116557 A TW 109116557A TW 109116557 A TW109116557 A TW 109116557A TW 202100431 A TW202100431 A TW 202100431A
Authority
TW
Taiwan
Prior art keywords
facing
conductor
facing portion
magnet unit
guide
Prior art date
Application number
TW109116557A
Other languages
Chinese (zh)
Inventor
坂田博史
大塚洋
衣川知孝
朝倉弘明
中久保慶介
Original Assignee
日商大福股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大福股份有限公司 filed Critical 日商大福股份有限公司
Publication of TW202100431A publication Critical patent/TW202100431A/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

An article transport body is provided with: a first member connected to a traveling body; a second member connected to a holding part; a guide device for configuring a surface that intersects the direction of the first member and the second member face to each other as an intersecting plane, and guides the relative movement of the first member and the second member in the direction along the intersecting plane; and a return device for returning a relative position of the first member and the second member to a reference position. A magnet unit and a conductor are arranged in an area where a first facing part and a second facing part face each other, so that the magnet unit and the conductor face each other. The article transport body is configured such that the magnet unit and the conductor move relatively along with the relative movement of the first member and the second member.

Description

物品搬送體Item transport body

本發明是有關於一種物品搬送體，前述物品搬送體具備有行走體、及保持物品的保持部。The present invention relates to an article conveying body, the article conveying body is provided with a walking body and a holding part for holding articles.

如上述之物品搬送體的一例已揭示於日本專利特開2016-94263號公報(專利文獻1)中。以下，在先前技術的說明中於括弧內所附上的符號是專利文獻1的符號。在專利文獻1中揭示有天花板搬送車(1)，前述天花板搬送車(1)具備有行走移動部(16)、支撐搬送物(6)的搬送物支撐部(32)、及相對於行走移動部(16)來支撐搬送物支撐部(32)的支撐機構(23)。支撐機構(23)具備有透過升降操作機構(24)而受行走移動部(16)支撐的升降體(31)、及支撐搬送物支撐部(32)的引導支撐部(35)。並且，在此天花板搬送車(1)中，是在升降體(31)與引導支撐部(35)之間設置彈性變形自如的緩衝體(36)，藉此來抑制從行走移動部(16)側往搬送物支撐部(32)所支撐的搬送物(6)之振動的傳達。An example of the article transport body as described above is disclosed in Japanese Patent Laid-Open No. 2016-94263 (Patent Document 1). Hereinafter, the symbols enclosed in parentheses in the description of the prior art are the symbols of Patent Document 1. Patent Document 1 discloses a ceiling transport vehicle (1). The ceiling transport vehicle (1) is provided with a traveling moving part (16), a conveying object support part (32) that supports the conveyed object (6), and moving relative to travel The supporting mechanism (23) of the conveying object supporting part (32) is supported by the part (16). The support mechanism (23) is provided with an elevating body (31) supported by the traveling moving portion (16) through the elevating operation mechanism (24), and a guide support portion (35) that supports the conveyed object support portion (32). In addition, in this ceiling transport vehicle (1), an elastically deformable buffer body (36) is provided between the lifting body (31) and the guide support portion (35), thereby suppressing the movement from the walking portion (16) Transmission of the vibration of the conveyed object (6) supported by the side conveyed object support part (32).

如上述，在專利文獻1所記載的構成中，是在連結於行走體的第1構件(在專利文獻1中為升降體)、與連結於保持部的第2構件(在專利文獻1中為引導支撐部)之間，設置緩衝體，藉此抑制這2個構件之間的振動的傳達，以抑制從行走體側往保持部所保持的物品之振動的傳達。在像這樣的構成中，由於緩衝體會伴隨於第1構件與第2構件的相對移動而變形，因此如專利文獻1的段落0013所記載，變得必須進行緩衝體的交換等對於緩衝體的維護作業。從使用物品搬送體的設備的運轉費用之減少的觀點來看，所期望的是將維護作業的頻率抑制為較少。As described above, in the structure described in Patent Document 1, the first member (elevating body in Patent Document 1) connected to the traveling body and the second member (in Patent Document 1) connected to the holding portion Between the guide support portion), a buffer is provided to suppress the transmission of vibration between these two members, and to suppress the transmission of vibration from the side of the walking body to the article held by the holding portion. In such a configuration, since the cushion body is deformed due to the relative movement of the first member and the second member, as described in paragraph 0013 of Patent Document 1, maintenance of the cushion body such as replacement of the cushion body becomes necessary. operation. From the viewpoint of reducing the operating cost of the equipment using the article conveying body, it is desirable to suppress the frequency of maintenance work to a low level.

於是，所期望的是可以將用於抑制從行走體側往保持部所保持的物品之振動的傳達的構造，設為維護的必要性較低的構造之技術的實現。Therefore, it is desired to realize a technology that can suppress the transmission of vibration from the traveling body side to the article held by the holding portion as a structure that requires less maintenance.

本揭示之物品搬送體具備有：行走體；保持部，保持物品；第1構件，連結於前述行走體；第2構件，連結於前述保持部，並且配置成與前述第1構件相向；引導裝置，將和前述第1構件與前述第2構件的相向方向交叉的面設為交叉面，引導沿著前述交叉面的方向之前述第1構件與前述第2構件的相對移動；及返回裝置，使前述第1構件與前述第2構件的相對位置返回至基準位置，將前述第1構件中之和前述第2構件的相向部設為第1相向部，將前述第2構件中之和前述第1構件的相向部設為第2相向部，磁鐵單元及導電體是設置成在前述第1相向部與前述第2相向部所相向的區域中使前述磁鐵單元與前述導電體相向，前述磁鐵單元與前述導電體是構成為伴隨於前述第1構件與前述第2構件的相對移動而相對移動。The article transport body of the present disclosure is provided with: a walking body; a holding part to hold articles; a first member connected to the running body; a second member connected to the holding part and arranged to face the first member; a guide device , The surface that intersects the first member and the second member in the opposing direction is set as an intersecting plane, and the relative movement of the first member and the second member along the direction of the intersecting plane is guided; and the return device makes The relative position of the first member and the second member is returned to the reference position, the opposing portion of the first member and the second member is set as the first opposing portion, and the second member is the first opposing portion. The facing portion of the member is set as the second facing portion, and the magnet unit and the conductor are arranged so that the magnet unit and the conductor face each other in the area where the first facing portion and the second facing portion face each other. The conductor is configured to relatively move in accordance with the relative movement of the first member and the second member.

根據此構成，由於物品搬送體是構成為磁鐵單元與導電體會伴隨於第1構件與第2構件的相對移動而相對移動，因此在第1構件與第2構件已相對移動的情況下，藉由產生於導電體的渦電流與磁鐵單元所產生的磁場之相互作用，可以使阻礙第1構件與第2構件的相對移動之制動力產生。亦即，可以使用磁鐵單元與導電體來構成磁性阻尼。據此，一邊藉由返回裝置的作用使第1構件與第2構件的相對位置返回到基準位置，一邊藉由磁性阻尼的作用，來抑制第1構件與第2構件之間的振動的傳達，而可以抑制從行走體側往保持部所保持的物品之振動的傳達。另外，由於上述的制動力是不用使磁鐵單元與導電體接觸即可以產生，因此可以將磁鐵單元或導電體的維護的必要性抑制為較低。According to this configuration, since the article conveying body is configured such that the magnet unit and the conductor move relatively along with the relative movement of the first member and the second member, when the first member and the second member have moved relatively, The interaction between the eddy current generated in the conductor and the magnetic field generated by the magnet unit can generate a braking force that hinders the relative movement of the first member and the second member. In other words, a magnet unit and a conductor can be used to form magnetic damping. Accordingly, while the relative position of the first member and the second member is returned to the reference position by the action of the return device, the transmission of vibration between the first member and the second member is suppressed by the action of magnetic damping, It is possible to suppress the transmission of vibration from the side of the walking body to the article held by the holding portion. In addition, since the above-mentioned braking force can be generated without contacting the magnet unit with the conductor, the necessity of maintenance of the magnet unit or the conductor can be suppressed to a low level.

如以上，根據上述的構成，即變得能夠將用於抑制從行走體側往保持部所保持的物品之振動的傳達的構造，設為維護的必要性較低的構造。As described above, according to the above-mentioned configuration, it becomes possible to set the structure for suppressing the transmission of vibration from the traveling body side to the article held by the holding portion as a structure with low maintenance requirements.

物品搬送體之進一步的特徵與優點，透過以下之參照圖式來說明的實施形態之記載將變得明確。The further features and advantages of the article conveying body will become clear through the description of the embodiment described below with reference to the drawings.

[第1實施形態] 參照圖式(圖1~圖3)來說明物品搬送體的第1實施形態。[First Embodiment] The first embodiment of the article transport body will be described with reference to the drawings (FIGS. 1 to 3 ).

如圖1所示，物品搬送體1具備有行走體4、以及保持物品9的保持部5。保持部5是透過支撐部3而被行走體4所支撐。在此，行走體4是構成為沿著行走軌道2(在此為一對行走軌道2)行走。具體而言，行走體4所具備的行走機構41具備有在行走軌道2上滾動的行走輪43、及驅動行走輪43的行走用馬達42(驅動力源的一例)。藉由行走用馬達42來驅動行走輪43，藉此使行走體4沿著行走軌道2行走。在行走機構41上設置有引導行走體4之沿著行走軌道2的行走之引導輪44，且行走體4是在引導輪44受到行走軌道2的側面所接觸引導的狀態下沿著行走軌道2行走。As shown in FIG. 1, the article transport body 1 includes a traveling body 4 and a holding part 5 that holds articles 9. The holding portion 5 is supported by the traveling body 4 through the supporting portion 3. Here, the traveling body 4 is configured to walk along the traveling rail 2 (here, a pair of traveling rails 2). Specifically, the traveling mechanism 41 included in the traveling body 4 includes a traveling wheel 43 that rolls on the traveling rail 2 and a traveling motor 42 (an example of a driving force source) that drives the traveling wheel 43. The traveling wheel 43 is driven by the traveling motor 42 to cause the traveling body 4 to travel along the traveling rail 2. The running mechanism 41 is provided with a guide wheel 44 for guiding the walking body 4 to walk along the running track 2, and the running body 4 is guided along the running track 2 with the guide wheel 44 being contacted and guided by the side surface of the running track 2 walk.

行走軌道2是設置成沿著水平方向H延伸，行走體4是沿著水平方向H來行走。在此，行走軌道2是以從天花板懸吊支撐的狀態而固定於天花板。亦即，物品搬送體1是沿著設在天花板側的行走軌道2行走的天花板搬送車。並且，支撐部3是在保持部5相對於行走體4而配置在下側(鉛直方向V的下側，以下同樣)的狀態下，相對於行走體4來支撐保持部5。在此，支撐部3是在被行走體4所具備的升降機構45懸吊支撐的狀態下，支撐著保持部5。亦即，保持部5是被行走體4懸吊支撐。The traveling rail 2 is arranged to extend along the horizontal direction H, and the traveling body 4 travels along the horizontal direction H. Here, the running rail 2 is fixed to the ceiling in a state suspended and supported from the ceiling. That is, the article transport body 1 is a ceiling transport vehicle that travels along a traveling rail 2 provided on the ceiling side. In addition, the support part 3 supports the holding part 5 with respect to the running body 4 in a state where the holding part 5 is arranged on the lower side (the lower side in the vertical direction V, the same applies hereinafter) to the running body 4. Here, the support part 3 supports the holding part 5 in a state suspended and supported by the elevating mechanism 45 included in the traveling body 4. That is, the holding portion 5 is suspended and supported by the traveling body 4.

升降機構45具備有：皮帶或繩索等之傳動構件48、供傳動構件48捲繞的捲繞體47、及使捲繞體47旋轉的升降用馬達46(驅動力源的一例)。在傳動構件48的前端部上連結有支撐部3(具體而言為後述的第1構件10)(參照圖2)，捲繞體47是藉由升降用馬達46而往正方向或反方向旋轉，以捲繞或送出傳動構件48，藉此在藉由傳動構件48懸吊支撐的狀態下使支撐部3上升或下降。升降機構45是使支撐部3在第1高度與第2高度之間升降，前述第1高度是行走體4之行走時的高度(圖1所示的高度)，前述第2高度是比第1高度更低的高度，並且是在與物品9的移載對象地點(例如處理裝置的裝載口)之間移載物品9的高度。行走體4具備有蓋部40，在支撐部3位於第1高度的狀態下，保持部5所保持之物品9的上側(鉛直方向V的上側，以下同樣)及行走方向(在此為水平方向H)的兩側是被蓋部40所覆蓋。詳細內容將於後文描述，保持部5是連結於像這樣地被行走體4所懸吊支撐的支撐部3(具體而言為後述的第2構件20)。藉此，保持部5是透過支撐部3而被行走體4懸吊支撐。The lifting mechanism 45 includes a transmission member 48 such as a belt or a rope, a winding body 47 on which the transmission member 48 is wound, and a lifting motor 46 (an example of a driving force source) that rotates the winding body 47. A support portion 3 (specifically, the first member 10 described later) is connected to the front end of the transmission member 48 (refer to FIG. 2), and the winding body 47 is rotated in the forward or reverse direction by the lifting motor 46 , The transmission member 48 is wound or sent out, whereby the support portion 3 is raised or lowered while being suspended and supported by the transmission member 48. The raising and lowering mechanism 45 raises and lowers the support part 3 between the first height and the second height. The first height is the height of the traveling body 4 during walking (the height shown in FIG. 1), and the second height is higher than the first height. The lower height is the height at which the article 9 is transferred between the transfer target location of the article 9 (for example, the loading port of the processing device). The walking body 4 is provided with a cover 40. When the support 3 is at the first height, the upper side (the upper side of the vertical direction V, the same below) and the walking direction (here, the horizontal direction H) of the article 9 held by the holding part 5 ) Is covered by the cover 40. The details will be described later, and the holding portion 5 is connected to the supporting portion 3 (specifically, the second member 20 described later) suspended and supported by the traveling body 4 in this manner. Thereby, the holding portion 5 is suspended and supported by the traveling body 4 through the supporting portion 3.

保持部5是構成為從上側來保持物品9。在此，物品搬送體1所搬送的物品9為容置半導體晶圓的容器，具體而言為FOUP(前開式晶圓傳送盒，Front Opening Unified Pod)。並且，保持部5具備有把持部50(在此為一對把持部50)，前述把持部50是把持形成於物品9的上部之凸緣部9a。亦即，保持部5是藉由把持物品9來保持住該物品9。在凸緣部9a的上表面形成有朝下側凹陷的凹部，並且構成為在物品9被把持部50把持的狀態下，保持部5所具備的卡合部52會從上側對該凹部嵌合。藉此，即變得能夠提升保持部5所進行之物品9的保持的安定性。另外，物品9並不限定於容置半導體晶圓的容器，例如也可以將物品9設為容置半導體晶圓以外的容置物(倍縮光罩或玻璃基板等)的容器、或容器以外的物品。The holding part 5 is configured to hold the article 9 from the upper side. Here, the article 9 conveyed by the article conveying body 1 is a container accommodating semiconductor wafers, specifically, a FOUP (Front Opening Unified Pod). In addition, the holding portion 5 is provided with a gripping portion 50 (here, a pair of gripping portions 50), and the gripping portion 50 is a flange portion 9a formed on the upper part of the article 9 to be gripped. That is, the holding part 5 holds the article 9 by holding the article 9. A concave portion recessed downward is formed on the upper surface of the flange portion 9a, and is configured such that when the article 9 is gripped by the grip portion 50, the engaging portion 52 of the holding portion 5 fits into the concave portion from the upper side . Thereby, it becomes possible to improve the stability of the holding of the article 9 by the holding portion 5. In addition, the article 9 is not limited to a container for accommodating semiconductor wafers. For example, the article 9 may be a container for accommodating objects other than semiconductor wafers (reducing masks, glass substrates, etc.), or other containers article.

保持部5具備有切換把持部50的狀態之把持用馬達51(驅動力源的一例，參照圖2)，把持部50的狀態是藉由把持用馬達51的驅動而切換成支撐凸緣部9a的支撐狀態(圖1所示的狀態)、以及解除對凸緣部9a的支撐之解除狀態。具體而言，使一對把持部50的各自的位置及姿勢之至少一者變化而使一對把持部50互相接近，藉此將把持部50的狀態從解除狀態切換至支撐狀態，使一對把持部50的各自的位置及姿勢之至少一者變化而使一對把持部50互相分開，藉此將把持部50的狀態從支撐狀態切換至解除狀態。將物品9從物品搬送體1移載至移載對象地點的情況下，是在支撐部3位於上述第2高度的狀態下將把持部50的狀態從支撐狀態切換至解除狀態，將物品9從移載對象地點移載至物品搬送體1的情況下，是在支撐部3位於第2高度的狀態下將把持部50的狀態從解除狀態切換至支撐狀態。The holding portion 5 is provided with a gripping motor 51 (an example of a driving force source, refer to FIG. 2) that switches the state of the gripping portion 50, and the state of the gripping portion 50 is switched to the support flange portion 9a by the driving of the gripping motor 51 The supporting state (the state shown in FIG. 1) and the released state of releasing the support of the flange portion 9a. Specifically, by changing at least one of the respective positions and postures of the pair of holding parts 50 to bring the pair of holding parts 50 close to each other, the state of the holding parts 50 is switched from the released state to the supported state, and the pair At least one of the respective positions and postures of the grips 50 is changed to separate the pair of grips 50 from each other, thereby switching the state of the grips 50 from the supported state to the released state. When the article 9 is transferred from the article transport body 1 to the transfer target location, the state of the grip 50 is switched from the supported state to the released state with the support section 3 at the second height described above, and the article 9 is removed from When the transfer target point is transferred to the article transport body 1, the state of the gripping portion 50 is switched from the released state to the supported state with the support portion 3 at the second height.

以下，針對在本實施形態的物品搬送體1中，用於抑制從行走體4側往保持部5所保持的物品9之振動的傳達的構造進行說明。如圖2所示，物品搬送體1具備有連結於行走體4的第1構件10、以及連結於保持部5的第2構件20。第1構件10是藉由連結於行走體4而被行走體4支撐，第2構件20是藉由連結於保持部5而被保持部5支撐。第1構件10是在不透過第2構件20的情形下連結於行走體4，第2構件20是在不透過第1構件10的情形下連結於保持部5。在本實施形態中，第1構件10是透過升降機構45而連結於行走體4(具體而言為具備行走機構41的本體部)。又，在本實施形態中，第2構件20是透過支撐機構80而連結於保持部5。支撐機構80是可以將把持部50的狀態切換成支撐狀態與解除狀態，並且相對於第2構件20來支撐把持部50的機構。雖然省略詳細內容，但在圖2所示的例子中，支撐機構80是設為和後述的直線運動機構60同樣的直線運動機構。Hereinafter, in the article transport body 1 of the present embodiment, a structure for suppressing the transmission of vibration from the traveling body 4 side to the article 9 held by the holding portion 5 will be described. As shown in FIG. 2, the article transport body 1 includes a first member 10 connected to the traveling body 4 and a second member 20 connected to the holding portion 5. The first member 10 is supported by the traveling body 4 by being connected to the traveling body 4, and the second member 20 is supported by the holding portion 5 by being connected to the holding portion 5. The first member 10 is connected to the traveling body 4 without passing through the second member 20, and the second member 20 is connected to the holding portion 5 without passing through the first member 10. In this embodiment, the first member 10 is connected to the traveling body 4 (specifically, the main body portion including the traveling mechanism 41) through the elevating mechanism 45. In addition, in this embodiment, the second member 20 is connected to the holding portion 5 through the support mechanism 80. The support mechanism 80 is a mechanism that can switch the state of the grasping portion 50 to a supported state and a released state, and supports the grasping portion 50 with respect to the second member 20. Although the details are omitted, in the example shown in FIG. 2, the support mechanism 80 is a linear motion mechanism similar to the linear motion mechanism 60 described later.

第2構件20是配置成與第1構件10相向。具體而言，第2構件20是配置成和第1構件10隔著間隔而相向。並且，第2構件20是透過第1構件10而被行走體4所支撐。在本實施形態中，第2構件20是在相對於第1構件10而配置在下側的狀態下，被第1構件10所支撐。在此，將第1構件10中之和第2構件20的相向部設為第1相向部11，將第2構件20中之和第1構件10的相向部設為第2相向部21。如圖2所示，在本實施形態中，第1構件10的一部分是構成第1相向部11，第2構件20的整體是構成第2相向部21。第1相向部11及第2相向部21是形成為平板狀，且第1相向部11與第2相向部21是配置成互相平行。在本實施形態中，第1構件10及第2構件20是配置成使第1構件10與第2構件20的相向方向Z(具體而言為第1相向部11與第2相向部21的相向方向)沿著鉛直方向V。換言之，第1構件10是以第1相向部11沿著水平面的方向來配置，第2構件20是以第2相向部21沿著水平面的方向來配置。The second member 20 is arranged to face the first member 10. Specifically, the second member 20 is arranged to face the first member 10 with an interval therebetween. In addition, the second member 20 is supported by the traveling body 4 through the first member 10. In this embodiment, the second member 20 is supported by the first member 10 in a state of being arranged on the lower side with respect to the first member 10. Here, the opposed portion of the first member 10 and the second member 20 is referred to as the first opposed portion 11, and the opposed portion of the second member 20 and the first member 10 is referred to as the second opposed portion 21. As shown in FIG. 2, in this embodiment, a part of the first member 10 constitutes the first facing portion 11, and the entire second member 20 constitutes the second facing portion 21. The first facing portion 11 and the second facing portion 21 are formed in a flat plate shape, and the first facing portion 11 and the second facing portion 21 are arranged parallel to each other. In the present embodiment, the first member 10 and the second member 20 are arranged so that the facing direction Z of the first member 10 and the second member 20 (specifically, the facing direction Z of the first facing portion 11 and the second facing portion 21) Direction) along the vertical direction V. In other words, the first member 10 is arranged in the direction of the first facing portion 11 along the horizontal plane, and the second member 20 is arranged in the direction of the second facing portion 21 along the horizontal plane.

在本實施形態中，第1構件10及第2構件20是設置在支撐部3。具體而言，支撐部3具備有形成為箱狀的罩殼3a，在罩殼3a的內部中形成有後述的磁鐵單元30等之容置空間。並且，第1構件10是構成罩殼3a的上壁部(從上側來覆蓋上述容置空間的部分)。在圖2所示的例子中，第1構件10的整體是構成罩殼3a的上壁部。並且，傳動構件48的前端部是連結於第1構件10，藉此使第1構件10被行走體4懸吊支撐。另一方面，第2構件20是容置於罩殼3a的上述容置空間中。In this embodiment, the first member 10 and the second member 20 are provided in the support part 3. Specifically, the support part 3 is provided with the cover 3a formed in a box shape, and the housing space of the magnet unit 30 etc. mentioned later is formed in the inside of the cover 3a. In addition, the first member 10 is an upper wall portion (a portion that covers the accommodation space from the upper side) constituting the cover 3a. In the example shown in FIG. 2, the whole of the 1st member 10 is the upper wall part which comprises the cover 3a. In addition, the front end portion of the transmission member 48 is connected to the first member 10 so that the first member 10 is suspended and supported by the traveling body 4. On the other hand, the second member 20 is accommodated in the above-mentioned accommodation space of the cover 3a.

如圖2及圖3所示，物品搬送體1具備有：引導裝置6，引導沿著交叉面的方向之第1構件10與第2構件20的相對移動；及返回裝置7，使第1構件10與第2構件20的相對位置返回至基準位置。在此，交叉面是與相向方向Z交叉的面。在本實施形態中，交叉面是正交於相向方向Z的面。如上述，在本實施形態中，由於相向方向Z是設為沿著鉛直方向V的方向，因此交叉面是設為沿著水平面的面。在此，將沿著交叉面而互相正交的2個方向設為第1方向X及第2方向Y。在本實施形態中，第1方向X及第2方向Y都是沿著水平面的水平方向。並且，在本實施形態中，是將第2方向Y設為沿著行走體4的行走方向(圖1中的水平方向H)的方向。As shown in Figures 2 and 3, the article transport body 1 is provided with a guide device 6 that guides the relative movement of the first member 10 and the second member 20 along the direction of the intersection; and a return device 7 that makes the first member The relative position of 10 and the second member 20 returns to the reference position. Here, the intersection plane is a plane that intersects the facing direction Z. In the present embodiment, the intersection plane is a plane orthogonal to the facing direction Z. As described above, in this embodiment, since the facing direction Z is a direction along the vertical direction V, the intersection surface is a surface along a horizontal plane. Here, two directions orthogonal to each other along the intersecting plane are referred to as a first direction X and a second direction Y. In this embodiment, both the first direction X and the second direction Y are horizontal directions along the horizontal plane. In addition, in this embodiment, the second direction Y is a direction along the traveling direction of the traveling body 4 (horizontal direction H in FIG. 1).

在本實施形態中，引導裝置6是構成為引導沿著交叉面的特定方向(在此為第2方向Y)上之第1構件10與第2構件20的相對移動。具體而言，如圖2及圖3所示，引導裝置6具備有在第1方向X上分開地配置的一對直線運動機構60。一對直線運動機構60分別具備有引導部61與被引導部62。引導部61是以沿著第2方向Y延伸的方式而設置在第1相向部11及第2相向部21的一者，被引導部62是設置在第1相向部11及第2相向部21的另一者。被引導部62是構成為受引導部61所引導而可在第2方向Y上移動。在本例中，引導部61是設置在第2相向部21，被引導部62是設置在第1相向部11。具體而言，引導部61是設置在第2相向部21中之第1相向部11側的面即第2相向面21a，被引導部62是設置在第1相向部11中之第2相向部21側的面即第1相向面11a。第1相向面11a及第2相向面21a是形成為沿著交叉面的平面狀，且第1相向面11a及第2相向面21a是配置成隔著間隔而互相平行。另外，也可以和像這樣的構成不同，設為將引導部61設置在第1相向部11，且將被引導部62設置在第2相向部21的構成。In this embodiment, the guide device 6 is configured to guide the relative movement of the first member 10 and the second member 20 in a specific direction (here, the second direction Y) along the intersection. Specifically, as shown in FIGS. 2 and 3, the guide device 6 includes a pair of linear motion mechanisms 60 spaced apart in the first direction X. The pair of linear motion mechanisms 60 includes a guide portion 61 and a guided portion 62, respectively. The guide portion 61 is provided on one of the first facing portion 11 and the second facing portion 21 so as to extend along the second direction Y, and the guided portion 62 is provided on the first facing portion 11 and the second facing portion 21 The other one. The guided portion 62 is configured to be guided by the guiding portion 61 so as to be movable in the second direction Y. In this example, the guide portion 61 is provided in the second facing portion 21, and the guided portion 62 is provided in the first facing portion 11. Specifically, the guide portion 61 is the second facing surface 21a provided on the first facing portion 11 side of the second facing portion 21, and the guided portion 62 is the second facing portion provided on the first facing portion 11 The surface on the 21 side is the first facing surface 11a. The first facing surface 11a and the second facing surface 21a are formed in a flat shape along the intersection, and the first facing surface 11a and the second facing surface 21a are arranged to be parallel to each other with an interval therebetween. In addition, different from such a configuration, the guide portion 61 may be provided in the first facing portion 11 and the guided portion 62 may be provided in the second facing portion 21.

在本實施形態中，引導部61是設置成沿著第2方向Y延伸的引導軌道，被引導部62是卡合於引導軌道的引導塊體。在此，構成引導部61的引導軌道是固定於第2相向部21(具體而言為第2相向面21a)，構成被引導部62的引導塊體是固定於第1相向部11(具體而言為第1相向面11a)。在本例中，一對直線運動機構60的每一個是在第2方向Y之互相不同的位置上具備有卡合於引導部61的一對被引導部62。被引導部62是在相對於引導部61之第2方向Y的相對移動受到容許，且相對於引導部61之正交於第2方向Y的各方向的相對移動受到限制的狀態下，卡合於引導部61。據此，第2構件20是在相對於第1構件10之第2方向Y的相對移動受到容許，且相對於第1構件10之第1方向X及相向方向Z的移動受到限制的狀態下，被第1構件10所支撐。如此，第1構件10與第2構件20之相向方向Z的相對移動受到限制的結果，第1相向部11與第2相向部21的相向距離(換言之，第1相向面11a與第2相向面21a的相向距離)可維持為一定的間隔。亦即，引導裝置6是構成為一邊維持第1相向部11與第2相向部21的間隔，一邊引導沿著交叉面的方向之第1構件10與第2構件20的相對移動。In the present embodiment, the guide portion 61 is a guide rail provided to extend along the second direction Y, and the guided portion 62 is a guide block that is engaged with the guide rail. Here, the guide rail constituting the guide portion 61 is fixed to the second facing portion 21 (specifically, the second facing surface 21a), and the guide block constituting the guided portion 62 is fixed to the first facing portion 11 (specifically, It is called the first facing surface 11a). In this example, each of the pair of linear motion mechanisms 60 includes a pair of guided portions 62 that are engaged with the guide portion 61 at positions different from each other in the second direction Y. The guided portion 62 is engaged in a state where the relative movement with respect to the guide portion 61 in the second direction Y is allowed, and the relative movement with respect to the guide portion 61 in each direction orthogonal to the second direction Y is restricted.于导部61。 At the guide 61. Accordingly, the second member 20 is in a state where the relative movement with respect to the second direction Y of the first member 10 is allowed, and the movement in the first direction X and the opposing direction Z with respect to the first member 10 is restricted. It is supported by the first member 10. As a result, the relative movement of the first member 10 and the second member 20 in the opposing direction Z is restricted. As a result, the opposing distance between the first opposing portion 11 and the second opposing portion 21 (in other words, the first opposing surface 11a and the second opposing surface The facing distance of 21a) can be maintained at a certain interval. That is, the guide device 6 is configured to guide the relative movement of the first member 10 and the second member 20 in the direction along the intersection while maintaining the distance between the first facing portion 11 and the second facing portion 21.

將引導裝置6引導第1構件10與第2構件20的相對移動的方向設為引導方向，返回裝置7是構成為使第1構件10與第2構件20在引導方向上的相對位置返回至基準位置。在本實施形態中，引導方向為第2方向Y，返回裝置7是構成為使第1構件10與第2構件20在第2方向Y上的相對位置返回至基準位置。如圖2及圖3所示，返回裝置7具備有賦與勢能構件70(在此為線圈彈簧)，前述賦與勢能構件70是用於使第1構件10與第2構件20的相對位置返回至基準位置。賦與勢能構件70是配置成在第2方向Y上伸縮。The direction in which the guide device 6 guides the relative movement of the first member 10 and the second member 20 is set as the guide direction, and the return device 7 is configured to return the relative position of the first member 10 and the second member 20 in the guide direction to the reference position. In the present embodiment, the guiding direction is the second direction Y, and the returning device 7 is configured to return the relative position of the first member 10 and the second member 20 in the second direction Y to the reference position. As shown in Figures 2 and 3, the return device 7 is provided with a potential energy-imparting member 70 (here, a coil spring). The potential energy-imparting member 70 is used to return the relative position of the first member 10 and the second member 20 To the reference position. The potential energy imparting member 70 is arranged to expand and contract in the second direction Y.

在本實施形態中，返回裝置7具備有2個種類的賦與勢能構件70，一種賦與勢能構件70是將第2構件20相對於第1構件10而往第2方向Y的一側賦與勢能，另一種賦與勢能構件70是將第2構件20相對於第1構件10而往第2方向Y的另一側賦與勢能，且將這2個種類的賦與勢能構件70的賦與勢能力相平衡的位置(圖3所示的位置)設為基準位置。在此，2個種類的賦與勢能構件70是在第2方向Y上排列地配置。並且，在第2方向Y上排列地配置的2個種類的賦與勢能構件70之組合，是相對於一對直線運動機構60之間的第1方向X上的中心位置，而分別配置在第1方向X的兩側。配置在第1方向X的一側之2個種類的賦與勢能構件70的組合、與配置在第1方向X的另一側之2個種類的賦與勢能構件70的組合，是配置在從上述中心位置而在第1方向X上分開互相相等的距離之位置。In this embodiment, the return device 7 is provided with two types of potential energy-imparting members 70. One kind of potential energy-imparting member 70 is to impart the second member 20 to the side in the second direction Y with respect to the first member 10. Potential energy, another kind of imparting potential energy member 70 is to impart potential energy from the second member 20 to the other side of the second direction Y relative to the first member 10, and to impart these two types of potential energy member 70 The position where the potential capacity is balanced (the position shown in Fig. 3) is set as the reference position. Here, the two types of potential energy-imparting members 70 are arranged side by side in the second direction Y. In addition, the combination of two types of potential energy-generating members 70 arranged side by side in the second direction Y is arranged in the first direction X with respect to the center position between the pair of linear motion mechanisms 60 1 on both sides of direction X. The combination of two types of potential energy-generating members 70 arranged on one side of the first direction X and the combination of two types of potential energy-generating members 70 arranged on the other side of the first direction X are arranged from The above-mentioned center position is a position separated by an equal distance from each other in the first direction X.

如圖2所示，物品搬送體1具備有磁鐵單元30與導電體35。如以下所述，這些磁鐵單元30及導電體35是構成磁性阻尼，前述磁性阻尼是用於抑制第1構件10與第2構件20之間的振動的傳達(在此為第2方向Y上之振動的傳達)。如圖2所示，磁鐵單元30及導電體35是設置成在相向區域A中使磁鐵單元30與導電體35相向。在此，相向區域A是第1相向部11與第2相向部21相向的區域。磁鐵單元30是配置成和導電體35隔著間隔而相向。第1相向面11a是配置在相向區域A中之第1相向部11側的端部，第2相向面21a是配置在相向區域A中之第2相向部21側的端部。As shown in FIG. 2, the article transport body 1 includes a magnet unit 30 and a conductor 35. As described below, these magnet units 30 and conductors 35 constitute magnetic dampers, and the aforementioned magnetic dampers are used to suppress the transmission of vibration between the first member 10 and the second member 20 (here, in the second direction Y). Transmission of vibration). As shown in FIG. 2, the magnet unit 30 and the conductor 35 are arranged so that the magnet unit 30 and the conductor 35 face each other in the facing area A. Here, the facing area A is an area where the first facing portion 11 and the second facing portion 21 face each other. The magnet unit 30 is arranged to face the conductor 35 with an interval therebetween. The first facing surface 11a is an end portion arranged on the side of the first facing portion 11 in the facing area A, and the second facing surface 21a is an end portion arranged on the side of the second facing portion 21 in the facing area A.

物品搬送體1是構成為磁鐵單元30與導電體35會伴隨於第1構件10與第2構件20的相對移動而相對移動。在本實施形態中，磁鐵單元30與導電體35是配置成在相向方向Z上相向。並且，磁鐵單元30及導電體35是構成為：伴隨於第1構件10與第2構件20的相對移動，一邊維持磁鐵單元30與導電體35的間隔(磁鐵單元30與導電體35的相向距離)，一邊相對移動。在此是構成為：伴隨於第1構件10與第2構件20之第2方向Y上的相對移動，磁鐵單元30與導電體35會在第2方向Y上相對移動。據此，在第1構件10與第2構件20已相對移動的情況下，藉由產生於導電體35的渦電流與磁鐵單元30所產生的磁場之相互作用，可以使阻礙第1構件10與第2構件20的相對移動之制動力產生，藉此，即變得能夠抑制第1構件10與第2構件20之間的振動的傳達，而能夠抑制從行走體4側往保持部5所保持的物品9之振動的傳達。The article transport body 1 is configured such that the magnet unit 30 and the conductor 35 move relatively in accordance with the relative movement of the first member 10 and the second member 20. In this embodiment, the magnet unit 30 and the conductor 35 are arranged to face each other in the facing direction Z. In addition, the magnet unit 30 and the conductor 35 are configured to maintain the distance between the magnet unit 30 and the conductor 35 (the distance between the magnet unit 30 and the conductor 35 as opposed to the relative movement of the first member 10 and the second member 20). ), one side moves relatively. Here, the configuration is such that the magnet unit 30 and the conductor 35 relatively move in the second direction Y in accordance with the relative movement of the first member 10 and the second member 20 in the second direction Y. According to this, when the first member 10 and the second member 20 have moved relatively, the interaction between the eddy current generated in the conductor 35 and the magnetic field generated by the magnet unit 30 can hinder the first member 10 and The relative movement of the second member 20 is generated by the braking force, whereby the transmission of vibration between the first member 10 and the second member 20 can be suppressed, and the holding portion 5 from the side of the walking body 4 can be suppressed. Communication of the vibration of the article 9.

另外，上述制動力是不用使磁鐵單元30與導電體35接觸即可以產生。據此，可以將磁鐵單元30或導電體35的維護的必要性抑制為較低，並且也可以抑制塵埃的產生。又，雖然在行走體4上，可能因加減速等而產生比較大的行走方向的振動，但是在本實施形態中，可以抑制從行走體4側往保持部5所保持的物品9之第2方向Y上的振動的傳達，第2方向Y是沿著行走體4的行走方向之方向。藉此，即變得能夠適當地抑制較大的振動從行走體4傳達至保持部5所保持的物品9之情形。In addition, the aforementioned braking force can be generated without contacting the magnet unit 30 with the conductor 35. Accordingly, the necessity of maintenance of the magnet unit 30 or the conductor 35 can be suppressed to be low, and the generation of dust can also be suppressed. In addition, although the traveling body 4 may generate relatively large vibrations in the traveling direction due to acceleration and deceleration, in this embodiment, it is possible to suppress the second of the articles 9 held by the holding portion 5 from the traveling body 4 side. For the transmission of vibration in the direction Y, the second direction Y is a direction along the traveling direction of the traveling body 4. Thereby, it becomes possible to appropriately suppress the transmission of large vibrations from the traveling body 4 to the article 9 held by the holding portion 5.

為了適當地產生阻礙第1構件10與第2構件20的相對移動之上述制動力，較理想的是將構成導電體35的導電性材料設為良導體材料。例如，可以將構成導電體35的導電性材料，設為良導體材料且非磁性材料。具體而言，構成導電體35的導電性材料較理想的是鋁、鋁合金、銅、或銅合金。另外，也可以將構成導電體35的導電性材料，設為非金屬的導電性材料，而不是金屬的導電性材料。In order to appropriately generate the aforementioned braking force that hinders the relative movement of the first member 10 and the second member 20, it is preferable that the conductive material constituting the conductor 35 be a good conductor material. For example, the conductive material constituting the conductor 35 may be a good conductor material and a non-magnetic material. Specifically, the conductive material constituting the conductor 35 is preferably aluminum, aluminum alloy, copper, or copper alloy. In addition, the conductive material constituting the conductor 35 may be a non-metal conductive material instead of a metal conductive material.

在本實施形態中，第1相向部11及第2相向部21的至少一者是構成導電體35。具體而言，第1相向部11是構成導電體35。亦即，在第1構件10中至少構成第1相向部11的部分(在本實施形態中為第1構件10的整體)是使用導電性材料來形成。另一方面，磁鐵單元30是藉由有別於第1構件10及第2構件20的構件來構成。具體而言，磁鐵單元30具備有固定在第2相向面21a的永久磁鐵31。在本實施形態中，永久磁鐵31是形成為相向方向Z成為厚度方向的板狀(在此，在沿著相向方向Z的相向方向視角下為矩形的板狀)。藉此，即能夠一面將第1相向部11與第2相向部21的相向距離抑制為較短，一面將磁鐵單元30與導電體35設置成可作為磁性阻尼來適當地發揮功能。In this embodiment, at least one of the first facing portion 11 and the second facing portion 21 constitutes a conductor 35. Specifically, the first facing portion 11 constitutes a conductor 35. That is, in the first member 10, at least a portion (in this embodiment, the entire first member 10) constituting the first facing portion 11 is formed using a conductive material. On the other hand, the magnet unit 30 is constituted by a member different from the first member 10 and the second member 20. Specifically, the magnet unit 30 includes a permanent magnet 31 fixed to the second facing surface 21a. In the present embodiment, the permanent magnet 31 is formed in a plate shape in which the opposing direction Z becomes the thickness direction (here, a rectangular plate when viewed from the opposing direction along the opposing direction Z). Thereby, while keeping the facing distance between the first facing portion 11 and the second facing portion 21 short, the magnet unit 30 and the conductor 35 can be provided to appropriately function as magnetic damping.

永久磁鐵31上之相向於導電體35的面(亦即，導電體35側的面)、以及導電體35上之相向於永久磁鐵31的面(亦即，永久磁鐵31側的面)是形成為沿著交叉面的平面狀。並且，永久磁鐵31上之相向於導電體35的面、以及導電體35上之相向於永久磁鐵31的面是配置成隔著間隔而互相平行。另外，作為永久磁鐵31，使用以下任一者皆可：相向於導電體35的面的極性是涵蓋該面的整個區域為相同的永久磁鐵、以及相向於導電體35的面的極性是根據位置而變化的永久磁鐵。在後者的情況下，作為一例，可以使用在相向於導電體35的面上沿著第2方向Y而交互地形成有N極與S極的永久磁鐵31。像這樣的永久磁鐵31，可以藉由例如已多極磁化的1個磁鐵、或在第2方向Y上排列地配置的複數個磁鐵片來構成。The surface of the permanent magnet 31 facing the conductor 35 (that is, the surface on the conductor 35 side) and the surface of the conductor 35 facing the permanent magnet 31 (that is, the surface on the permanent magnet 31 side) are formed It is flat along the intersection. In addition, the surface of the permanent magnet 31 facing the conductor 35 and the surface of the conductor 35 facing the permanent magnet 31 are arranged so as to be parallel to each other at intervals. In addition, as the permanent magnet 31, any of the following may be used: the polarity of the surface facing the conductor 35 is the same permanent magnet covering the entire area of the surface, and the polarity of the surface facing the conductor 35 depends on the position And change the permanent magnet. In the latter case, as an example, a permanent magnet 31 in which N poles and S poles are alternately formed along the second direction Y on the surface facing the conductor 35 can be used. Such a permanent magnet 31 can be constituted by, for example, a single magnet magnetized in multiple poles or a plurality of magnet pieces arranged side by side in the second direction Y.

如圖2及圖3所示，在本實施形態中，磁鐵單元30與導電體35是配置成在對象區域B內相向。具體而言，磁鐵單元30所具備的永久磁鐵31是配置在對象區域B中。在此，對象區域B是一對直線運動機構60所包夾的區域。在此，磁鐵單元30與導電體35是配置成除了對象區域B之外，在相對於對象區域B往第2方向Y的兩側的區域中也相向。亦即，永久磁鐵31具備有：配置在對象區域B的部分、以及相對於對象區域B而配置在相鄰於第2方向Y的區域之部分。又，在本實施形態中，磁鐵單元30(具體而言為永久磁鐵31)是配置在第1方向X的一側所配置的2個種類的賦與勢能構件70的組合、與第1方向X的另一側所配置的2個種類的賦與勢能構件70的組合之間。As shown in FIGS. 2 and 3, in the present embodiment, the magnet unit 30 and the conductor 35 are arranged so as to face each other in the target area B. Specifically, the permanent magnet 31 included in the magnet unit 30 is arranged in the target area B. Here, the target area B is an area enclosed by the pair of linear motion mechanisms 60. Here, the magnet unit 30 and the conductor 35 are arranged so as to face the target region B on both sides of the target region B in the second direction Y. That is, the permanent magnet 31 includes a portion arranged in the target area B and a portion arranged in the area adjacent to the target area B in the second direction Y. Also, in this embodiment, the magnet unit 30 (specifically, the permanent magnet 31) is a combination of two types of potential energy-generating members 70 arranged on one side of the first direction X, and the first direction X The two types of potential energy-generating member 70 are arranged on the other side of the combination.

如上述，在本實施形態中，保持部5具備有卡合部52。雖然省略詳細內容，但卡合部52是構成為可以從保持部5未保持著物品9的狀態下的位置，抵抗賦與勢能構件的賦與勢能力而往上側移動。並且，和卡合部52一體地在鉛直方向V上移動的軸構件53是配置成在對象區域B中在鉛直方向V上貫穿第1構件10及第2構件20。磁鐵單元30是設置成避免與此軸構件53的干涉。具體而言，磁鐵單元30具備有：相對於軸構件53而配置在第2方向Y的一側之永久磁鐵31、以及相對於軸構件53而配置在第2方向Y的另一側之永久磁鐵31。亦即，構成磁鐵單元30的永久磁鐵31是在第2方向Y上不連續地設置。即使像這樣地避免與其他構件的干涉來設置磁鐵單元30的情況下，仍然可以在導電體35中之與永久磁鐵31相向的各個區域中產生渦電流，而得到上述制動力，因此本揭示的技術，在必須像這樣地避免與其他構件的干涉來配置磁鐵單元30的情況下，仍然能夠有效地抑制第1構件10與第2構件20之間的振動的傳達。As described above, in this embodiment, the holding portion 5 is provided with the engaging portion 52. Although the details are omitted, the engagement portion 52 is configured to be able to move upward from a position in a state where the holding portion 5 does not hold the article 9 against the potential energy imparting member. In addition, the shaft member 53 that moves in the vertical direction V integrally with the engaging portion 52 is arranged so as to penetrate the first member 10 and the second member 20 in the vertical direction V in the target area B. The magnet unit 30 is arranged to avoid interference with the shaft member 53. Specifically, the magnet unit 30 includes: a permanent magnet 31 arranged on one side of the second direction Y with respect to the shaft member 53 and a permanent magnet arranged on the other side of the second direction Y with respect to the shaft member 53 31. That is, the permanent magnets 31 constituting the magnet unit 30 are discontinuously provided in the second direction Y. Even if the magnet unit 30 is installed to avoid interference with other members in this way, eddy currents can still be generated in each area of the conductor 35 facing the permanent magnet 31 to obtain the aforementioned braking force. Therefore, the present disclosure In the technology, when the magnet unit 30 must be arranged to avoid interference with other members in this way, the transmission of vibration between the first member 10 and the second member 20 can still be effectively suppressed.

[第2實施形態] 參照圖式(圖4及圖5)來說明物品搬送體的第2實施形態。以下，針對本實施形態的物品搬送體，以和第1實施形態之不同點為中心來說明。針對未特別清楚記載之點，是與第1實施形態同樣，並附上相同的符號而省略詳細的說明。[Second Embodiment] The second embodiment of the article transport body will be described with reference to the drawings (FIG. 4 and FIG. 5). Hereinafter, the article conveying body of the present embodiment will be described centering on the differences from the first embodiment. Regarding the points that are not clearly described, they are the same as in the first embodiment, and the same symbols are attached, and detailed descriptions are omitted.

如圖4所示，在本實施形態中，物品搬送體1為地板面行走式的物品搬送車。具體而言，行走體4具備有在地板面上滾動的行走輪43。在此，行走體4是構成為不沿著行走軌道(亦即，不受行走軌道所引導)來行走。亦即，物品搬送體1是構成為可一邊辨識本身的現在位置一邊自主行走。As shown in FIG. 4, in this embodiment, the article conveyance body 1 is a floor-surface traveling type article conveyance vehicle. Specifically, the traveling body 4 is provided with traveling wheels 43 that roll on the floor surface. Here, the traveling body 4 is configured not to travel along the traveling rail (that is, not to be guided by the traveling rail). That is, the article transport body 1 is configured to be able to walk autonomously while recognizing its current position.

在圖4中雖然是簡化地顯示行走體4及保持部5，但是在本實施形態中，支撐部3是在保持部5相對於行走體4而配置在上側的狀態下，相對於行走體4來支撐保持部5。亦即，在本實施形態中，保持部5並未被行走體4懸吊支撐。在本實施形態中，第2構件20是在相對於第1構件10而配置在上側的狀態下，被第1構件10所支撐。並且，保持部5是構成為藉由從下側來支撐物品以保持該物品。Although FIG. 4 shows the walking body 4 and the holding portion 5 in a simplified manner, in the present embodiment, the support portion 3 is in a state where the holding portion 5 is arranged on the upper side with respect to the walking body 4, relative to the walking body 4 To support the holding part 5. That is, in this embodiment, the holding portion 5 is not suspended and supported by the traveling body 4. In this embodiment, the second member 20 is supported by the first member 10 in a state of being arranged on the upper side with respect to the first member 10. In addition, the holding portion 5 is configured to hold the article by supporting the article from the lower side.

如圖4及圖5所示，引導裝置6在第1相向部11與第2相向部21之間具備有複數個引導體63。複數個引導體63是分別配置成接觸第1相向部11與第2相向部21之雙方。亦即，複數個引導體63是構成為在第1構件10與第2構件20之間支撐荷重(在此為鉛直荷重)，使用該等複數個引導體63，構成相對於行走體4來支撐保持部5的支撐部3。複數個引導體63是在交叉面內分散地配置。如上述，交叉面是交叉於相向方向Z的面，在此是正交於相向方向Z的面。如圖5所示，複數個引導體63是在沿著相向方向Z的相向方向視角下配置成格子狀(在本例中為正方格子狀)。As shown in FIGS. 4 and 5, the guide device 6 includes a plurality of guide bodies 63 between the first facing portion 11 and the second facing portion 21. The plurality of guide bodies 63 are respectively arranged so as to contact both the first facing portion 11 and the second facing portion 21. That is, a plurality of guide bodies 63 are configured to support a load (here, a vertical load) between the first member 10 and the second member 20, and the plurality of guide bodies 63 are used to support the walking body 4 The supporting part 3 of the holding part 5. The plurality of guide bodies 63 are dispersedly arranged in the intersection. As described above, the intersection plane is a plane that crosses the facing direction Z, and here is a plane that is orthogonal to the facing direction Z. As shown in FIG. 5, the plurality of guides 63 are arranged in a lattice shape (in this example, a square lattice shape) in a viewing angle of the facing direction along the facing direction Z.

複數個引導體63是分別以可在沿著交叉面的方向上滾動的狀態來配置。另外，複數個引導體63的相對位置關係是構成為藉由保持器64來維持，前述保持器64是以可滾動的方式來保持複數個引導體63。在本實施形態中，複數個引導體63是分別形成為互相同徑的球狀，並且以可在沿著交叉面的任意方向上滾動的狀態來配置。藉此，引導裝置6是構成為引導沿著交叉面的任意方向上之第1構件10與第2構件20的相對移動。另外，由於引導體63會伴隨於第1構件10與第2構件20的相對移動而旋轉，因此在第1構件10與第2構件20已相對移動的情況下，複數個引導體63及保持器64會相對於第1相向部11及第2相向部21的每一個，以第1構件10與第2構件20的相對移動距離之一半的距離來相對移動。在本實施形態中，由於引導裝置6所進行之第1構件10與第2構件20的相對移動的引導方向是設為沿著交叉面的任意方向，因此雖然省略詳細內容，但返回裝置7是構成為使沿著交叉面的全部方向上之第1構件10與第2構件20的相對位置，返回至基準位置。The plurality of guide bodies 63 are respectively arranged in a state capable of rolling in the direction along the intersection. In addition, the relative positional relationship of the plurality of guide bodies 63 is configured to be maintained by the holder 64, and the aforementioned holder 64 holds the plurality of guide bodies 63 in a rollable manner. In the present embodiment, the plurality of guide bodies 63 are each formed into a spherical shape with the same diameter as each other, and are arranged in a state capable of rolling in any direction along the intersection. Thereby, the guide device 6 is configured to guide the relative movement of the first member 10 and the second member 20 in any direction along the intersection. In addition, since the guide body 63 rotates with the relative movement of the first member 10 and the second member 20, when the first member 10 and the second member 20 have moved relatively, the plurality of guide bodies 63 and the retainer 64 relatively moves with respect to each of the first facing portion 11 and the second facing portion 21 by a distance of half the relative movement distance of the first member 10 and the second member 20. In this embodiment, since the guiding direction of the relative movement of the first member 10 and the second member 20 by the guiding device 6 is set to an arbitrary direction along the intersection, although the details are omitted, the returning device 7 is It is configured to return the relative positions of the first member 10 and the second member 20 in all directions along the intersection to the reference position.

如圖4所示，在本實施形態中，第1相向部11及第2相向部21之雙方是構成導電體35。亦即，在第1構件10中至少構成第1相向部11的部分、以及在第2構件20中至少構成第2相向部21的部分是使用導電性材料來形成。而且，在本實施形態中，磁鐵單元30是在第1相向部11與第2相向部21之間，配置成和第1相向部11及第2相向部21之任一者都隔著間隔。磁鐵單元30是構成為藉由受保持器64所保持，而和複數個引導體63一體地在沿著交叉面的方向上移動。據此，在第1構件10與第2構件20已相對移動的情況下，磁鐵單元30是相對於第1相向部11所構成的導電體35及第2相向部21所構成的導電體35的每一個，僅相對移動第1構件10與第2構件20的相對移動距離之一半的距離。藉此，則能夠在第1相向部11所構成的導電體35及第2相向部21所構成的導電體35上分別產生渦電流，以產生阻礙第1構件10與第2構件20的相對移動之制動力。As shown in FIG. 4, in this embodiment, both of the first facing portion 11 and the second facing portion 21 constitute a conductor 35. That is, in the first member 10, at least the portion constituting the first facing portion 11, and the portion in the second member 20 constituting at least the second facing portion 21 are formed using a conductive material. Furthermore, in this embodiment, the magnet unit 30 is arranged between the first facing portion 11 and the second facing portion 21 so as to be spaced apart from any one of the first facing portion 11 and the second facing portion 21. The magnet unit 30 is configured to be held by the holder 64 and move integrally with the plurality of guide bodies 63 in the direction along the intersection. Accordingly, when the first member 10 and the second member 20 have moved relatively, the magnet unit 30 is relative to the conductor 35 formed by the first facing portion 11 and the conductor 35 formed by the second facing portion 21 In each case, the first member 10 and the second member 20 are relatively moved only by a distance of half of the relative movement distance. Thereby, it is possible to generate eddy currents on the conductor 35 formed by the first facing portion 11 and the conductor 35 formed by the second facing portion 21, respectively, so as to hinder the relative movement of the first member 10 and the second member 20. The braking force.

如圖5所示，在本實施形態中，磁鐵單元30具備有在交叉面內分散地配置的複數個永久磁鐵31。如上述，在本實施形態中複數個引導體63是在交叉面內配置成格子狀，複數個永久磁鐵31是配置來取代一部分的引導體63。藉此，磁鐵單元30是在沿著相向方向Z的相向方向視角下配置在複數個引導體63的群組的配置區域C內。具體而言，磁鐵單元30的整體(亦即，磁鐵單元30所具備的全部永久磁鐵31)是在相向方向視角下配置在複數個引導體63的群組的配置區域C內。另外，配置區域C可以定義為在相向方向視角下外接於複數個引導體63的群組之圖形所包圍的區域，在圖5中，是將在相向方向視角下外接於複數個引導體63的群組之矩形(具體而言，角部為圓弧狀的矩形)所包圍的區域，設為配置區域C。As shown in FIG. 5, in the present embodiment, the magnet unit 30 includes a plurality of permanent magnets 31 dispersedly arranged in the intersection. As described above, in the present embodiment, the plurality of guide bodies 63 are arranged in a lattice shape in the intersection plane, and the plurality of permanent magnets 31 are arranged to replace part of the guide bodies 63. Thereby, the magnet unit 30 is arranged in the arrangement area C of the group of the plurality of guide bodies 63 in the viewing angle of the facing direction along the facing direction Z. Specifically, the entire magnet unit 30 (that is, all the permanent magnets 31 included in the magnet unit 30) are arranged in the arrangement area C of the group of the plurality of guides 63 when viewed in the opposing direction. In addition, the arrangement area C can be defined as the area surrounded by the figure circumscribed by the group of the plurality of guide bodies 63 in the viewing angle of the opposite direction. In FIG. The area surrounded by the rectangle of the group (specifically, a rectangle with an arc-shaped corner) is referred to as an arrangement area C.

在此，雖然是以下述構成為例來說明：複數個引導體63是分別形成為互相同徑的球狀，並且以可在沿著交叉面的任意方向上滾動的狀態來配置，但是也可以設為例如以下構成：複數個引導體63是分別形成為互相同徑的圓柱狀，並且以可在沿著交叉面的特定方向上滾動的狀態來配置。在此情況下，引導裝置6是和上述第1實施形態同樣地，構成為引導沿著交叉面的特定方向上之第1構件10與第2構件20的相對移動。Here, although the following configuration is taken as an example for description: the plural guide bodies 63 are each formed into a spherical shape with the same diameter, and are arranged in a state that can roll in any direction along the intersection, but it may be For example, it is assumed that the plurality of guide bodies 63 are each formed in a cylindrical shape with the same diameter as each other, and are arranged in a state capable of rolling in a specific direction along the intersection. In this case, the guide device 6 is configured to guide the relative movement of the first member 10 and the second member 20 in a specific direction along the intersection, similarly to the above-mentioned first embodiment.

[其他實施形態] 接著，針對物品搬送體的其他實施形態進行說明。[Other embodiments] Next, another embodiment of the article transport body will be described.

(1)在上述第1實施形態中，是以第1相向部11構成導電體35，且磁鐵單元30(具體而言為永久磁鐵31)固定於第2相向面21a的構成為例來說明。但是，並不限定於那樣的構成，也可以設為第2相向部21構成導電體35，且磁鐵單元30(具體而言為永久磁鐵31)固定於第1相向面11a的構成。(1) In the first embodiment described above, the first facing portion 11 constitutes the conductor 35, and the magnet unit 30 (specifically, the permanent magnet 31) is fixed to the second facing surface 21a as an example. However, it is not limited to such a configuration, and the second facing portion 21 may constitute the conductor 35, and the magnet unit 30 (specifically, the permanent magnet 31) may be fixed to the first facing surface 11a.

(2)在上述各實施形態中，是以第1相向部11及第2相向部21的至少一者構成導電體35的情況為例來說明。具體而言，在上述第1實施形態中，是以第1相向部11構成導電體35的構成的情況為例來說明，在上述第2實施形態中，是以第1相向部11及第2相向部21之雙方構成導電體35的情況為例來說明。但是，並不限定於那樣的構成，亦可藉由有別於第1構件10及第2構件20的構件來構成導電體35。在上述第1實施形態的構成中，將藉由有別於第1構件10的構件來構成導電體35的例子顯示於圖6中。在圖6所示的例子中，導電體35是藉由固定在第1相向面11a的導體板36所構成。(2) In each of the above embodiments, a case where at least one of the first facing portion 11 and the second facing portion 21 constitutes the conductor 35 is described as an example. Specifically, in the above-mentioned first embodiment, the case where the first facing portion 11 constitutes the conductor 35 is taken as an example for description. In the above-mentioned second embodiment, the first facing portion 11 and the second The case where both of the facing portions 21 constitute the conductor 35 will be described as an example. However, it is not limited to such a configuration, and the conductor 35 may be configured by a member different from the first member 10 and the second member 20. In the configuration of the first embodiment described above, an example in which the conductor 35 is configured by a member different from the first member 10 is shown in FIG. 6. In the example shown in FIG. 6, the conductor 35 is constituted by a conductor plate 36 fixed to the first facing surface 11a.

(3)在上述第1實施形態中，是以磁鐵單元30與導電體35配置成除了對象區域B之外，在相對於對象區域B往第2方向Y的兩側的區域中也相向的構成為例來說明。但是，並不限定於那樣的構成，也可以設為將磁鐵單元30與導電體35配置成僅在對象區域B內相向。又，也可以設為將磁鐵單元30與導電體35配置成在對象區域B內不相向(換言之，僅在對象區域B外相向)。(3) In the first embodiment described above, the magnet unit 30 and the conductor 35 are arranged so as to face each other in areas on both sides of the target area B in the second direction Y in addition to the target area B Take an example to illustrate. However, it is not limited to such a configuration, and the magnet unit 30 and the conductor 35 may be arranged so as to face each other only in the target area B. In addition, the magnet unit 30 and the conductor 35 may be arranged so as not to face each other in the target area B (in other words, they only face outside the target area B).

(4)在上述第2實施形態中，是以下述構成為例來說明：磁鐵單元30的整體是在沿著相向方向Z的相向方向視角下配置在複數個引導體63的群組的配置區域C內。但是，並不限定於那樣的構成，也可以設為磁鐵單元30的至少一部分是在沿著相向方向Z的相向方向視角下配置在複數個引導體63的群組的配置區域C外之構成。(4) In the above-mentioned second embodiment, the following configuration is taken as an example for description: the entire magnet unit 30 is arranged in the arrangement area of the group of the plural guides 63 in the opposing direction viewing angle along the opposing direction Z C. However, it is not limited to such a structure, and at least a part of the magnet unit 30 may be arranged outside the arrangement area C of the group of the plurality of guides 63 in the viewing angle of the facing direction along the facing direction Z.

(5)在上述各實施形態中，是以磁鐵單元30具備有永久磁鐵31的構成為例來說明。但是，並不限定於那樣的構成，也可以設為磁鐵單元30具備有電磁鐵等來取代永久磁鐵31之構成。(5) In each of the above-mentioned embodiments, the structure in which the magnet unit 30 is provided with the permanent magnet 31 has been described as an example. However, it is not limited to such a configuration, and the magnet unit 30 may be provided with an electromagnet or the like instead of the permanent magnet 31.

(6)在上述第1實施形態中，是以物品搬送體1為天花板搬送車的構成為例來說明，在上述第2實施形態中，是以物品搬送體1為在地板面上自主行走的物品搬送車的構成為例來說明。但是，並不限定於那樣的構成，也可以將物品搬送體1設為：例如在對應於收納架的各層而沿著水平方向設置的移動路徑上行走的物品搬送體、或沿著設置在地板部的行走軌道來行走的物品搬送體。作為後者的物品搬送體，可以例示例如堆高式起重機，前述堆高式起重機具備有：行走台車，沿著設置在地板部的行走軌道來行走；及升降體，沿著豎立設置在行走台車的桅桿來升降。(6) In the above-mentioned first embodiment, the article transport body 1 is described as an example of a ceiling transport vehicle. In the above-mentioned second embodiment, the article transport body 1 is used to autonomously travel on the floor. The structure of the article transport vehicle is described as an example. However, it is not limited to such a configuration, and the article transport body 1 may be set as: for example, an article transport body that walks on a moving path installed in the horizontal direction corresponding to each layer of the storage rack, or is installed along the floor. The article conveying body that travels on the part of the walking track. As the latter article transport body, for example, a stacker crane can be exemplified. The foregoing stacker crane is provided with: a traveling trolley that travels along a traveling rail provided on the floor; and an elevating body that is erected along the traveling trolley The mast comes up and down.

(7)另外，在上述各實施形態中所揭示之構成，只要沒有發生矛盾，也可與其他實施形態所揭示之構成組合來適用(作為其他實施形態而包含已說明的實施形態彼此的組合)。關於其他的構成，在本說明書中所揭示的實施形態在全部的點上均只不過是例示。從而，在不脫離本揭示的主旨之範圍內，可適當地進行各種改變。(7) In addition, as long as there is no contradiction between the configurations disclosed in the above embodiments, they can be combined with the configurations disclosed in other embodiments (as other embodiments, combinations of the described embodiments are included) . Regarding other configurations, the embodiments disclosed in this specification are merely illustrative in all points. Therefore, various changes can be appropriately made without departing from the gist of the present disclosure.

[上述實施形態的概要] 以下，針對在上述所說明之物品搬送體的概要進行說明。[Outline of the above embodiment] Hereinafter, the outline of the article transport body described above will be described.

一種物品搬送體，具備有：行走體；保持部，保持物品；第1構件，連結於前述行走體；第2構件，連結於前述保持部，並且配置成與前述第1構件相向；引導裝置，將和前述第1構件與前述第2構件的相向方向交叉的面設為交叉面，引導沿著前述交叉面的方向之前述第1構件與前述第2構件的相對移動；及返回裝置，使前述第1構件與前述第2構件的相對位置返回至基準位置，將前述第1構件中之和前述第2構件的相向部設為第1相向部，將前述第2構件中之和前述第1構件的相向部設為第2相向部，磁鐵單元及導電體是設置成在前述第1相向部與前述第2相向部所相向的區域中使前述磁鐵單元與前述導電體相向，前述磁鐵單元與前述導電體是構成為伴隨於前述第1構件與前述第2構件的相對移動而相對移動。An article conveying body is provided with: a running body; a holding part holding articles; a first member connected to the running body; a second member connected to the holding part and arranged to face the first member; a guide device, The surface that intersects the opposing direction of the first member and the second member is set as an intersecting plane, and the relative movement of the first member and the second member along the direction of the intersecting plane is guided; and a return device to make the The relative position of the first member and the second member is returned to the reference position, the opposing portion of the first member and the second member is set as the first opposing portion, and the second member and the first member are set The opposing part is set as the second opposing part, and the magnet unit and the conductor are arranged so that the magnet unit and the conductor face each other in the area where the first opposing part and the second opposing part face each other, and the magnet unit and the conductor The conductor is configured to relatively move in accordance with the relative movement of the first member and the second member.

根據此構成，由於物品搬送體是構成為磁鐵單元與導電體會伴隨於第1構件與第2構件的相對移動而相對移動，因此在第1構件與第2構件已相對移動的情況下，藉由產生於導電體的渦電流與磁鐵單元所產生的磁場之相互作用，可以使阻礙第1構件與第2構件的相對移動之制動力產生。亦即，可以使用磁鐵單元與導電體來構成磁性阻尼。據此，一邊藉由返回裝置的作用使第1構件與第2構件的相對位置返回到基準位置，一邊藉由磁性阻尼的作用，來抑制第1構件與第2構件之間的振動的傳達，而可以抑制從行走體側往保持部所保持的物品之振動的傳達。另外，由於上述的制動力是不用使磁鐵單元與導電體接觸即可以產生，因此可以將磁鐵單元或導電體的維護的必要性抑制為較低。According to this configuration, since the article conveying body is configured such that the magnet unit and the conductor move relatively along with the relative movement of the first member and the second member, when the first member and the second member have moved relatively, The interaction between the eddy current generated in the conductor and the magnetic field generated by the magnet unit can generate a braking force that hinders the relative movement of the first member and the second member. In other words, a magnet unit and a conductor can be used to form magnetic damping. Accordingly, while the relative position of the first member and the second member is returned to the reference position by the action of the return device, the transmission of vibration between the first member and the second member is suppressed by the action of magnetic damping, It is possible to suppress the transmission of vibration from the side of the walking body to the article held by the holding portion. In addition, since the above-mentioned braking force can be generated without contacting the magnet unit with the conductor, the necessity of maintenance of the magnet unit or the conductor can be suppressed to a low level.

如以上，根據上述的構成，即變得能夠將用於抑制從行走體側往保持部所保持的物品之振動的傳達的構造，設為維護的必要性較低的構造。As described above, according to the above-mentioned configuration, it becomes possible to set the structure for suppressing the transmission of vibration from the traveling body side to the article held by the holding portion as a structure with low maintenance requirements.

在此，較理想的是，將沿著前述交叉面而互相正交的2個方向設為第1方向及第2方向，前述引導裝置具備有在前述第1方向上分開地配置的一對直線運動機構，一對前述直線運動機構分別具備有：引導部，以沿著前述第2方向延伸的方式而設置在前述第1相向部及前述第2相向部的一者；及被引導部，設置在前述第1相向部及前述第2相向部的另一者，且被前述引導部所引導而可在前述第2方向上移動，前述磁鐵單元與前述導電體是配置成在一對前述直線運動機構所包夾的區域內相向。Here, it is preferable that the two directions orthogonal to each other along the intersecting plane are set as the first direction and the second direction, and the guide device is provided with a pair of straight lines spaced apart in the first direction. The movement mechanism, each of the pair of linear movement mechanisms is provided with: a guide portion provided in one of the first facing portion and the second facing portion so as to extend along the second direction; and a guided portion provided The other of the first facing portion and the second facing portion is guided by the guide portion to be movable in the second direction, and the magnet unit and the conductor are arranged to move in a pair of the straight lines Facing each other in the area enclosed by the organization.

根據此構成，即可以抑制第1構件與第2構件之間之第2方向上的振動的傳達，而可以抑制從行走體側往保持部所保持的物品之第2方向上的振動的傳達。並且，根據上述構成，由於磁鐵單元與導電體是配置成在一對直線運動機構所包夾的區域內相向，因此變得能夠有效地利用一對直線運動機構所包夾的空間，一面抑制第1方向及第2方向上之物品搬送體的大型化，一面設置磁鐵單元及導電體。According to this configuration, the transmission of vibration in the second direction between the first member and the second member can be suppressed, and the transmission of vibration in the second direction from the traveling body side to the article held by the holding portion can be suppressed. Furthermore, according to the above configuration, since the magnet unit and the conductor are arranged to face each other in the area enclosed by the pair of linear motion mechanisms, it becomes possible to effectively use the space enclosed by the pair of linear motion mechanisms while suppressing the first To increase the size of the article transport body in the first direction and the second direction, a magnet unit and a conductor are installed on one side.

或者，較理想的是，前述引導裝置是在前述第1相向部與前述第2相向部之間具備有複數個引導體，前述複數個引導體是分別以可在沿著前述交叉面的方向上滾動的狀態，配置成接觸前述第1相向部與前述第2相向部之雙方，前述磁鐵單元是在沿著前述相向方向的相向方向視角下配置在前述複數個引導體的群組的配置區域內。Alternatively, it is more desirable that the guide device is provided with a plurality of guides between the first facing portion and the second facing portion, and the plurality of guides are respectively movable in a direction along the intersection. In a rolling state, the magnet unit is arranged in contact with both the first facing portion and the second facing portion, and the magnet unit is arranged in the arrangement area of the group of the plurality of guide bodies from the viewing angle of the facing direction along the facing direction .

根據此構成，即可以抑制第1構件與第2構件之間之引導體可滾動的方向上的振動的傳達，而可以抑制從行走體側往保持部所保持的物品之該方向上的振動的傳達。並且，根據上述構成，由於磁鐵單元是在相向方向視角下配置在複數個引導體的群組的配置區域內，因此變得能夠一面抑制交叉於相向方向的方向上之物品搬送體的大型化，一面設置磁鐵單元。According to this configuration, it is possible to suppress the transmission of vibration in the direction in which the guide body between the first member and the second member can roll, and to suppress the vibration in that direction from the side of the traveling body to the article held by the holding portion convey. In addition, according to the above configuration, since the magnet unit is arranged in the arrangement area of the group of the plurality of guide bodies from the viewing angle of the opposing direction, it becomes possible to suppress the enlargement of the article transport body in the direction crossing the opposing direction. A magnet unit is provided on one side.

在上述各構成的物品搬送體中，較理想的是，前述第1相向部及前述第2相向部的至少一者是構成前述導電體。In the article conveying body of each configuration described above, it is preferable that at least one of the first facing portion and the second facing portion constitutes the conductor.

根據此構成，和藉由有別於第1構件及第2構件的構件來構成導電體的情況相較之下，可以在相向方向上將第1相向部與第2相向部接近地配置，而可以謀求相向方向上之物品搬送體的小型化。According to this structure, compared with the case where the conductor is composed of a member different from the first member and the second member, the first facing portion and the second facing portion can be arranged close to each other in the facing direction, and It is possible to reduce the size of the article conveying body in the opposite direction.

又，構成前述導電體的導電性材料較理想的是鋁、鋁合金、銅、或銅合金。In addition, the conductive material constituting the aforementioned conductor is preferably aluminum, aluminum alloy, copper, or copper alloy.

根據此構成，由於較容易在導電體中產生渦電流，因此會變得較容易適當地使阻礙第1構件與第2構件的相對移動的制動力產生。According to this configuration, since the eddy current is more likely to be generated in the conductor, it becomes easier to appropriately generate a braking force that hinders the relative movement of the first member and the second member.

又，較理想的是，前述保持部是被前述行走體所懸吊支撐。Moreover, it is preferable that the holding part is suspended and supported by the walking body.

在像這樣地保持部被行走體所懸吊支撐的構成中，因行走體的加減速等所產生的振動，保持部會較容易大幅地搖動。在本揭示之物品搬送體中，由於可以如上述地使用磁鐵單元與導電體來構成磁性阻尼，因此即使在像這樣的構成中，仍然可以有效地抑制從行走體側往保持部所保持的物品之振動的傳達。In such a configuration in which the holding part is suspended and supported by the traveling body, the holding part is relatively easy to shake largely due to vibrations generated by acceleration and deceleration of the traveling body. In the article conveying body of the present disclosure, since the magnet unit and the conductor can be used to form the magnetic damping as described above, even in such a structure, it is still possible to effectively suppress articles held from the traveling body side to the holding part The transmission of the vibration.

本揭示之物品搬送體只要在上述的各效果當中，可以發揮至少1個效果即可。The article transport body of the present disclosure may exhibit at least one effect among the above-mentioned effects.

1:物品搬送體 2:行走軌道 3:支撐部 3a:罩殼 4:行走體 5:保持部 6:引導裝置 7:返回裝置 9:物品 9a:凸緣部 10:第1構件 11:第1相向部 11a:第1相向面 20:第2構件 21:第2相向部 21a:第2相向面 30:磁鐵單元 31:永久磁鐵 35:導電體 36:導體板 40:蓋部 41:行走機構 42:行走用馬達 43:行走輪 44:引導輪 45:升降機構 46:升降用馬達 47:捲繞體 48:傳動構件 50:把持部 51:把持用馬達 52:卡合部 53:軸構件 60:直線運動機構 61:引導部 62:被引導部 63:引導體 64:保持器 70:賦與勢能構件 80:支撐機構 A:相向區域(第1相向部與第2相向部所相向的區域) B:對象區域(一對直線運動機構所包夾的區域) C:配置區域 H:水平方向 V:鉛直方向 X:第1方向 Y:第2方向 Z:相向方向1: Item transport body 2: walking track 3: Support part 3a: housing 4: walking body 5: Holding part 6: Guiding device 7: Return device 9: Items 9a: Flange 10: The first member 11: The first facing part 11a: The first facing surface 20: The second member 21: The second facing part 21a: The second facing surface 30: Magnet unit 31: permanent magnet 35: Conductor 36: Conductor plate 40: Lid 41: walking mechanism 42: Walking motor 43: walking wheel 44: Guide wheel 45: Lifting mechanism 46: Lifting motor 47: winding body 48: Transmission components 50: Control Department 51: Control Motor 52: Snap part 53: Shaft member 60: Linear motion mechanism 61: Guidance 62: Guided Department 63: guide body 64: retainer 70: Grant Potential Energy Component 80: support mechanism A: Opposing area (the area where the first facing part and the second facing part face each other) B: Object area (area enclosed by a pair of linear motion mechanisms) C: Configuration area H: horizontal direction V: Vertical direction X: 1st direction Y: 2nd direction Z: Opposite direction

圖1是第1實施形態之物品搬送體的側面圖。 圖2是第1實施形態之支撐部的縱剖正面圖。 圖3是第1實施形態之支撐部的橫剖平面圖。 圖4是第2實施形態之物品搬送體的縱剖正面圖。 圖5是第2實施形態之支撐部的橫剖平面圖。 圖6是其他實施形態之支撐部的縱剖正面圖。Fig. 1 is a side view of the article transport body of the first embodiment. Fig. 2 is a longitudinal sectional front view of a supporting part of the first embodiment. Fig. 3 is a horizontal cross-sectional plan view of the supporting portion of the first embodiment. Fig. 4 is a longitudinal sectional front view of the article transport body of the second embodiment. Fig. 5 is a horizontal cross-sectional plan view of a supporting portion of the second embodiment. Fig. 6 is a longitudinal sectional front view of a support part of another embodiment.

3:支撐部 3: Support part

3a:罩殼 3a: housing

5:保持部 5: Holding part

6:引導裝置 6: Guiding device

7:返回裝置 7: Return device

10:第1構件 10: The first member

11:第1相向部 11: The first facing part

11a:第1相向面 11a: The first facing surface

20:第2構件 20: The second member

21:第2相向部 21: The second facing part

21a:第2相向面 21a: The second facing surface

30:磁鐵單元 30: Magnet unit

31:永久磁鐵 31: permanent magnet

35:導電體 35: Conductor

48:傳動構件 48: Transmission components

50:把持部 50: Control Department

51:把持用馬達 51: Control Motor

52:卡合部 52: Snap part

53:軸構件 53: Shaft member

60:直線運動機構 60: Linear motion mechanism

61:引導部 61: Guidance

62:被引導部 62: Guided Department

70:賦與勢能構件 70: Grant Potential Energy Component

80:支撐機構 80: support mechanism

A:相向區域(第1相向部與第2相向部所相向的區域) A: Opposing area (the area where the first facing part and the second facing part face each other)

B:對象區域(一對直線運動機構所包夾的區域) B: Object area (area enclosed by a pair of linear motion mechanisms)

X:第1方向 X: 1st direction

Z:相向方向 Z: Opposite direction

Claims (6)

一種物品搬送體，是具備有行走體與保持物品的保持部之物品搬送體，其具有以下特徵： 具備有： 第1構件，連結於前述行走體； 第2構件，連結於前述保持部，並且配置成與前述第1構件相向； 引導裝置，將和前述第1構件與前述第2構件的相向方向交叉的面設為交叉面，引導沿著前述交叉面的方向之前述第1構件與前述第2構件的相對移動；及 返回裝置，使前述第1構件與前述第2構件的相對位置返回至基準位置， 將前述第1構件中之和前述第2構件的相向部設為第1相向部，將前述第2構件中之和前述第1構件的相向部設為第2相向部，磁鐵單元及導電體是設置成在前述第1相向部與前述第2相向部所相向的區域中使前述磁鐵單元與前述導電體相向， 前述磁鐵單元與前述導電體是構成為伴隨於前述第1構件與前述第2構件的相對移動而相對移動。An article conveying body is an article conveying body provided with a walking body and a holding part for holding articles, and has the following characteristics: Have: The first member is connected to the aforementioned walking body; The second member is connected to the holding portion and is arranged to face the first member; A guide device sets a surface that intersects the opposing direction of the first member and the second member as an intersection surface, and guides the relative movement of the first member and the second member along the direction of the intersection surface; and The return device returns the relative position of the first member and the second member to a reference position, The opposing portion of the first member and the second member is the first opposing portion, and the opposing portion of the second member and the first member is the second opposing portion. The magnet unit and the conductor are Is provided so that the magnet unit and the conductor face each other in a region where the first facing portion and the second facing portion face each other, The magnet unit and the conductor are configured to relatively move in accordance with the relative movement of the first member and the second member. 如請求項1之物品搬送體，其中將沿著前述交叉面而互相正交的2個方向設為第1方向及第2方向， 前述引導裝置具備有在前述第1方向上分開地配置的一對直線運動機構， 一對前述直線運動機構分別具備有：引導部，以沿著前述第2方向延伸的方式而設置在前述第1相向部及前述第2相向部的一者；及被引導部，設置在前述第1相向部及前述第2相向部的另一者，且被前述引導部所引導而可在前述第2方向上移動， 前述磁鐵單元與前述導電體是配置成在一對前述直線運動機構所包夾的區域內相向。Such as the article conveying body of claim 1, wherein two directions orthogonal to each other along the aforementioned intersection are set as the first direction and the second direction, The guide device is provided with a pair of linear motion mechanisms spaced apart in the first direction, Each of the pair of linear motion mechanisms is provided with a guide portion provided on one of the first facing portion and the second facing portion so as to extend along the second direction; and a guided portion provided on the first facing portion 1 The other of the facing portion and the second facing portion is guided by the guide portion so as to be movable in the second direction, The magnet unit and the conductor are arranged to face each other in an area enclosed by the pair of linear motion mechanisms. 如請求項1之物品搬送體，其中前述引導裝置是在前述第1相向部與前述第2相向部之間具備有複數個引導體， 前述複數個引導體是分別以可在沿著前述交叉面的方向上滾動的狀態，配置成接觸前述第1相向部與前述第2相向部之雙方， 前述磁鐵單元是在沿著前述相向方向的相向方向視角下配置在前述複數個引導體的群組的配置區域內。The article conveying body of claim 1, wherein the guide device is provided with a plurality of guide bodies between the first facing portion and the second facing portion, The plurality of guide bodies are respectively arranged in a state capable of rolling in the direction along the intersection surface so as to contact both the first facing portion and the second facing portion, The magnet unit is arranged in the arrangement area of the group of the plurality of guide bodies in a viewing angle of the facing direction along the facing direction. 如請求項1至3中任一項之物品搬送體，其中前述第1相向部及前述第2相向部的至少一者是構成前述導電體。The article transport body according to any one of claims 1 to 3, wherein at least one of the first facing portion and the second facing portion constitutes the conductor. 如請求項1至3中任一項之物品搬送體，其中構成前述導電體的導電性材料為鋁、鋁合金、銅、或銅合金。The article transport body according to any one of claims 1 to 3, wherein the conductive material constituting the aforementioned conductor is aluminum, aluminum alloy, copper, or copper alloy. 如請求項1至3中任一項之物品搬送體，其中前述保持部是被前述行走體所懸吊支撐。The article transport body according to any one of claims 1 to 3, wherein the holding portion is suspended and supported by the walking body.
TW109116557A 2019-05-27 2020-05-19 Article transport body TW202100431A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019098469A JP2020193058A (en) 2019-05-27 2019-05-27 Article conveyance body
JP2019-098469 2019-05-27

Publications (1)

Publication Number Publication Date
TW202100431A true TW202100431A (en) 2021-01-01

Family

ID=73466384

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109116557A TW202100431A (en) 2019-05-27 2020-05-19 Article transport body

Country Status (4)

Country Link
JP (1) JP2020193058A (en)
KR (1) KR20200136323A (en)
CN (1) CN111994584A (en)
TW (1) TW202100431A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102228145B1 (en) * 2019-08-07 2021-03-17 세메스 주식회사 Apparatus for transporting carrier and system for controlling the apparatus
KR102534409B1 (en) * 2020-11-23 2023-05-18 세메스 주식회사 Transport apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5713163A (en) * 1995-01-19 1998-02-03 Ishikawajima-Harima Heavy Industries Co. Ltd. Vibration damping apparatus
JP4849331B2 (en) * 2006-11-14 2012-01-11 株式会社ダイフク Goods transport equipment
JP5169065B2 (en) * 2007-08-09 2013-03-27 村田機械株式会社 Holding mechanism and transport device
CN101878176B (en) * 2007-11-30 2014-02-05 奥蒂斯电梯公司 Passive magnetic elevator car steadier
JP5567991B2 (en) * 2010-11-19 2014-08-06 株式会社東芝 Dynamic vibration absorber
JP6327124B2 (en) * 2014-11-12 2018-05-23 株式会社ダイフク Goods transport vehicle
KR101665118B1 (en) * 2015-02-11 2016-10-25 계명대학교 산학협력단 Active type vibration isolation device
JP6632355B2 (en) * 2015-12-07 2020-01-22 三菱重工機械システム株式会社 Damping device

Also Published As

Publication number Publication date
CN111994584A (en) 2020-11-27
JP2020193058A (en) 2020-12-03
KR20200136323A (en) 2020-12-07

Similar Documents

Publication Publication Date Title
KR101854034B1 (en) Contactless driving module and transfer apparatus having the same
KR102041391B1 (en) Temporary storage system
US11377309B2 (en) Transporting device, storage system and method of relocating a transporting device
CN108698757B (en) Conveying system
JP6168476B2 (en) Transport cart and transport cart system
JP4848862B2 (en) Conveyor truck trajectory
US20110024377A1 (en) Overhead travelling vehicle
JP2019081639A (en) Transport system
TW202100431A (en) Article transport body
JP2020065015A (en) Article carrier
TWI432370B (en) Transferring system for magnetic levitation
KR101957960B1 (en) Magnetic levitation transfer apparatus
TW201812961A (en) Container storage facility having an opening part allowing a content to be put in or pulled out freely
JP7323059B2 (en) carrier system
KR20190087985A (en) Apparatus for transferring a carrier in a vacuum chamber, and method for transferring a carrier in a vacuum chamber
JP7306364B2 (en) carrier
JP2022074479A (en) Transport vehicle
KR20230035953A (en) Overhead Hoist transport device
JPS6293120A (en) Load transport device using linear motor
KR20230100551A (en) Article transport facility
KR20220006317A (en) Magnetic levitation transportation apparatus
KR20230103869A (en) Article transport vehicle, rail assembly, and article transport system including the same
CN113979037A (en) Mobile device liquid level stabilization tray structure
JP2009029228A (en) Conveying device
KR20210008681A (en) Overhead Hoist transport device