KR20210011437A - Magnetic levitation system for transporting carriers, carrier for magnetic levitation system, processing system for vertically processing substrates, and method of transporting carriers - Google Patents

Abstract

A magnetic levitation system 100 for transporting the carrier 10 in the transport direction T is described. The magnetic levitation system includes one or more magnetic bearings 120 with one or more first actuators 121 for contactlessly holding the carrier 10 in the carrier transport space 15. Additionally, the magnetic levitation system includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T. One or more first actuators 121 and one or more second actuators 132 are arranged over the carrier transport space 15.

Description

Magnetic levitation system for transporting carriers, carrier for magnetic levitation system, processing system for vertically processing substrates, and method of transporting carriers

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transporting carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for vertical substrate processing, such as non-contact transfer of carriers available in processing systems for material deposition on large area substrates for display production. . In particular, embodiments of the present disclosure relate to magnetic levitation systems and methods for carrier transport in vacuum processing systems.

[0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in some applications and in some fields of technology. For example, coated substrates can be used in the field of display devices. Display devices can be used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, etc. for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] To deposit the layer stack, an in-line arrangement of processing modules can be used. The in-line processing system comprises a plurality of subsequent processing modules, such as deposition modules and optionally additional processing modules, such as cleaning modules and/or etch modules, the plurality of substrates being in the in-line processing system. Processing aspects are subsequently performed in the processing modules so that they can be processed continuously or semi-continuously in the.

[0004] The substrate can be carried by a carrier, ie a transport device for carrying the substrate. Carriers are typically transported through a vacuum system using a transport system. The transfer system may be configured to transfer a carrier with a substrate positioned thereon along one or more transfer paths. At least two conveying paths, e.g., a first conveying path for conveying the carrier in a forward direction and a second conveying path for conveying the carrier in a return direction opposite to the forward direction, are each other in the vacuum system. It can be provided next to each other.

[0005] The functionality of the display device typically depends on the coating thickness of the material, which should be within a predetermined range. In order to obtain high-resolution display devices, the technical challenges associated with the deposition of materials need to be mastered. In particular, accurate and smooth transfer of substrate carriers and/or mask carriers through a vacuum system is a challenge. For example, particle generation due to wear of moving parts can worsen the manufacturing process. Thus, there is a need for transporting carriers in processing systems while reducing or minimizing particle generation. In addition, it is a challenge to provide robust carrier transport systems for high temperature vacuum environments, for example at low cost.

[0006] Thus, there is a continuing need for improved apparatuses and methods for transporting carriers as well as providing improved vacuum processing systems that overcome at least some of the problems of the prior art.

[0007] In view of the above, a magnetic levitation system for transporting a carrier, a carrier for a magnetic levitation system, a processing system for vertically processing a substrate, and a method of transporting a carrier according to the independent claims are provided. Additional aspects, advantages, and features are apparent from the dependent claims, the detailed description, and the accompanying drawings.

[0008] According to one aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system includes one or more magnetic bearings with one or more first actuators for contactlessly holding a carrier in a carrier transport space. Additionally, the magnetic levitation system includes a drive unit having one or more second actuators for moving the carrier in the transport direction. One or more first actuators and one or more second actuators are arranged over the carrier transport space.

[0009] According to another aspect of the present disclosure, a carrier for a magnetic levitation system is provided. The carrier includes a main body for carrying an object. The main body includes a first end and a second end opposite the first end. The first end includes one or more first magnetic counterparts for interacting with one or more first actuators of one or more magnetic bearings of the magnetic levitation system. Additionally, the first end includes one or more second magnetic counterparts for interacting with one or more second actuators of the drive unit of the magnetic levitation system. The second end of the main body includes a third magnetic counterpart for interacting with one or more passive magnetic bearings of the non-contact guide arrangement of the magnetic levitation system.

[0010] According to a further aspect of the disclosure, a processing system for vertical processing a substrate is provided. The processing system includes at least one vacuum processing chamber containing a processing device. Additionally, the processing system includes one or more magnetic levitation systems for transporting one or more carriers in a transport direction. One or more magnetic levitation systems include one or more magnetic bearings with one or more first actuators for contactlessly holding a carrier within a carrier transport space. In addition, the one or more magnetic levitation systems comprise a drive unit having one or more second actuators for moving the carrier in the direction of transport. One or more first actuators and one or more second actuators are arranged over the carrier transport space.

[0011] According to another aspect of the present disclosure, a method of transporting a carrier is provided. The method includes contactlessly holding a carrier in the carrier transport space using one or more magnetic bearings having one or more first actuators arranged over the carrier transport space. The method also includes transferring the carrier in the transfer direction using a drive unit having one or more second actuators arranged over the carrier transfer space.

[0012] Embodiments also relate to apparatuses for performing the disclosed methods, including apparatus portions for performing each described method aspect. These method aspects may be performed by hardware components, by a computer programmed by suitable software, by any combination of the two, or in any other way. In addition, embodiments according to the present disclosure also relate to methods for operating the described apparatus. Methods for operating the described apparatus include method aspects for performing all respective functions of the apparatus.

[0013] In such a way that the above-listed features of the present disclosure may be understood in detail, a more specific description of the present disclosure briefly summarized above may be made with reference to embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below:
1 shows a schematic diagram of a magnetic levitation system according to embodiments described herein;
2-5 show schematic diagrams of magnetic levitation systems according to further embodiments described herein;
6 shows a schematic diagram of an arrangement of two magnetic levitation systems for asymmetric carriers, according to some embodiments described herein;
7 shows a schematic diagram of an arrangement of two magnetic levitation systems for symmetric carriers, according to some embodiments described herein;
8 shows a schematic diagram of a processing system for vertically processing a substrate in accordance with embodiments described herein; And
9 shows a flow chart to illustrate a method of transporting a carrier according to embodiments described herein.

[0014] Reference will now be made in detail to various embodiments of the present disclosure, and one or more examples of various embodiments are illustrated in the drawings. Within the following description of the drawings, like reference numbers refer to like components. Only the differences for the individual embodiments are described. Each example is provided as a description of the disclosure and is not intended as a limitation of the disclosure. In addition, features illustrated or described as part of an embodiment may be used with respect to or in conjunction with other embodiments, to yield another additional embodiment. The description is intended to include such modifications and variations.

[0015] Referring to FIG. 1 by way of example, a magnetic levitation system 100 for transferring a carrier 10 in a transfer direction T according to the present disclosure is described. The conveying direction T is perpendicular to the paper plane of FIG. 1.

[0016] According to embodiments that can be combined with any of the other embodiments described herein, the magnetic levitation system 100 comprises at least one first for non-contact holding the carrier 10 within the carrier transport space 15. And one or more magnetic bearings 120 with actuators 121. The carrier transport space 15 can be understood as a region in which carriers are arranged during transport of the carrier in the transport direction along the transport path. In particular, as illustrated by way of example in FIG. 1, the carrier transport space may be a vertical carrier transport space having a height H extending in a vertical direction and a width W extending in the horizontal direction. For example, the aspect ratio of H/W may be H/W ≥ 5, especially H/W ≥ 10. Further, the magnetic levitation system 100 includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction. One or more first actuators 121 and one or more second actuators 132 are arranged over the carrier transport space 15.

[0017] Accordingly, embodiments of the magnetic levitation system as described herein are improved over conventional carrier transfer devices, particularly with respect to accurate and smooth transfer of carriers in high temperature vacuum environments. Further, embodiments as described herein advantageously provide a more robust contactless carrier transport with lower production costs compared to conventional carrier transport devices. In particular, embodiments of the magnetic levitation system as described herein are more insensitive to manufacturing tolerances, deformation, and thermal expansion. It is also advantageously provided to more simply integrate the magnetic levitation system into the chamber.

[0018] Before various additional embodiments of the present disclosure are described in more detail, some aspects of some terms used herein are described.

[0019] A "magnetic levitation system" in the present disclosure may be understood as a system configured to hold an object, such as a carrier, in a non-contact manner by using magnetic force. In the present disclosure, the term "floating" or "floating" refers to the state of a carrier carrying an object, such as a substrate or mask, wherein the object floats without mechanical contact or support. In addition, moving or conveying an object means providing a force in a direction different from a driving force, e.g. a levitation force, where the object is moved from one position to another, e.g., a different position along the transport direction. . For example, a carrier carrying a substrate or mask can be floated, ie, can be floated by a force that counteracts gravity, and can be moved in a direction different from a direction parallel to gravity while being floated.

[0020] In the present disclosure, the term "contactless" means that the weight, such as the weight of the carrier, in particular the weight of the carrier carrying the substrate or mask, is not held by mechanical contact or by mechanical forces, but by magnetic force. Can be understood. In other words, the term "contactless" as used throughout the description herein can be understood in that the carrier is held in a floating or floating state using mechanical forces, ie magnetic forces instead of contact forces.

[0021] As schematically shown in FIG. 1, the carrier 10 is held in a contactless manner in a carrier transfer space 15 between the upper chamber wall 212 and the lower chamber wall 211. In particular, the upper chamber wall 212 may be the ceiling of the vacuum chamber. Thus, the lowermost chamber wall 211 may be the lowermost wall of the vacuum chamber.

[0022] In the present disclosure, a “carrier” can be understood as a carrier configured to hold a substrate, also referred to as a substrate carrier. For example, the carrier may be a substrate carrier for carrying a large area substrate. It should be understood that embodiments of the magnetic levitation system may also be used for other carrier types, such as mask carriers. Thus, additionally or alternatively, the carrier may be a carrier configured to carry a mask.

[0023] In the present disclosure, the term “substrate” may in particular encompass substantially non-flexible substrates, such as slices of a transparent crystal such as a wafer, sapphire, or the like, or a glass plate. However, the present disclosure is not limited to these, and the term “substrate” may also encompass flexible substrates such as a web or foil. The term “substantially inflexible” is understood to be distinct from “flexible”. Specifically, the substantially non-flexible substrate may have a certain degree of flexibility (eg, a glass plate having a thickness of 0.5 mm or less), and the flexibility of the substantially non-flexible substrate is less than that of flexible substrates. In accordance with the embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be glass (e.g., soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any It may be made of a material selected from the group consisting of different materials or combinations of materials.

[0024] In the present disclosure, the term “large area substrate” refers to a substrate having a main surface having an area of at least 0.5 m 2, in particular at least 1 m 2. In some embodiments, the large area substrate is GEN 4.5 corresponding to a substrate of about 0.67 m 2 (0.73 × 0.92 m), GEN 5 corresponding to a substrate of about 1.4 m 2 (1.1 m × 1.3 m), of about 4.29 m 2 GEN 7.5 corresponding to a substrate (1.95 m × 2.2 m), GEN 8.5 corresponding to a substrate of about 5.7 m2 (2.2 m × 2.5 m), or even a GEN corresponding to a substrate of about 8.7 m (2.85 m × 3.05 m) May be 10. Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. In addition, the substrate thickness may be 0.1 to 1.8 mm, in particular about 0.9 mm or less, such as 0.7 mm or 0.5.

[0025] In the present disclosure, the term "transfer direction" can be understood as the direction in which the carrier is conveyed along the conveying path. Typically, the transport direction can be an essentially horizontal direction.

[0026] In the present disclosure, a “magnetic bearing” can be understood as a bearing configured to hold or support an object, such as a carrier as described herein, in a contactless manner, ie without physical contact. Thus, one or more magnetic bearings as described herein create a magnetic force acting on the carrier such that the carrier is non-contactly held at a predetermined distance from the base structure, e.g., upper chamber wall 212 as shown in FIG. Can be configured to In particular, the one or more magnetic bearings 120 are essentially in a vertical direction (V) so that the vertical width of the gap 122 between the upper chamber wall 212 and the carrier 10 can be kept essentially constant. It can be configured to generate an acting magnetic force.

[0027] Some embodiments described herein involve the concept of “vertical orientation”. The vertical direction is considered to be a direction substantially parallel to the direction in which gravity extends. The vertical direction can deviate from the correct vertical, eg by an angle of up to 15° (exact vertical is defined by gravity). Further, some embodiments described herein may involve the concept of "lateral direction". It should be understood that the lateral direction is distinct from the vertical direction. The lateral direction may be perpendicular to the exact vertical direction defined by gravity or may be substantially perpendicular.

[0028] In the present disclosure, the “first actuator” of one or more magnetic bearings may be understood as an active and controllable element of magnetic bearings. In particular, the one or more first actuators may comprise a controllable magnet, such as an electromagnet. The magnetic field of one or more first actuators may be actively controllable to maintain and/or adjust the distance between the upper chamber wall 212 and the carrier 10. In other words, the "first actuator" of one or more magnetic bearings can be understood as an element with a controllable and adjustable magnetic field for providing a magnetic levitation force acting on the carrier.

[0029] Thus, the one or more first actuators 121 are configured to hold the carrier contactlessly. As illustratively shown in FIG. 1, one or more first magnetic counterparts 181 may be arranged on the carrier 10, in particular in the uppermost portion of the carrier. One or more first magnetic counterparts 181 of the carrier may magnetically interact with one or more first actuators 121 of one or more magnetic bearings 120. In particular, the one or more first magnetic counterparts 181 may be passive magnetic elements. For example, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

[0030] For example, an output parameter, such as a current applied to one or more first actuators, may be controlled according to an input parameter, such as a distance between the upper chamber wall 212 and the carrier 10. For example, the distance between the upper chamber wall 212 and the carrier 10 (e.g., the gap 122 shown in FIG. 1) may be measured by a distance sensor, and the magnetic field strength of one or more first actuators is the measured distance. It can be set according to. In particular, in the case of a distance exceeding a predetermined threshold value, the magnetic field strength may be increased, and in the case of a distance less than the threshold value, the magnetic field strength may be decreased. One or more of the first actuators may be controlled with closed loop or feedback control.

[0031] In the present disclosure, a “drive unit” may be understood as a unit configured to move an object, such as a carrier, as described herein in a non-contact manner in the transport direction. In particular, the drive unit as described herein can be configured to generate a magnetic force acting on the carrier in the direction of transport. Thus, the drive unit may be a linear motor. For example, the linear motor may be an iron-core linear motor. Alternatively, the linear motor may be an ironless linear motor. Due to the possibility that the passive magnetic elements of the carrier and the iron core of the linear motor will interact, the ironless linear motor can be beneficial in preventing a torsional moment about the carrier caused by normal forces.

[0032] More specifically, as illustratively shown in FIG. 1, the drive unit typically includes one or more second actuators configured to non-contactly move the carrier in the transport direction. The one or more second actuators may be one or more controllable magnets, such as electromagnets. Thus, the one or more second actuators may be actively controllable to apply a moving force to the carrier in the transport direction. As illustratively shown in FIG. 1, one or more second magnetic counterparts 182 may be arranged on the carrier 10, in particular in the uppermost portion of the carrier. One or more second magnetic counterparts 182 of the carrier may magnetically interact with one or more second actuators 132 of the drive unit 130. In particular, the one or more second magnetic counterparts 182 may be passive magnetic elements. For example, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

[0033] According to some embodiments that may be combined with other embodiments described herein, one or more first actuators 121 and one or more second actuators 132, as illustratively shown in FIG. 1. Are arranged in an atmospheric space 110. The expression "atmospheric space" can be understood as a space with atmospheric conditions, ie approximately 1.0 bar. For example, the atmosphere space may be a space provided outside the vacuum chamber. Alternatively, the atmosphere space may be provided by an atmosphere box or an atmosphere container (not clearly shown) provided inside the vacuum chamber.

[0034] Referring illustratively to FIG. 1, according to some embodiments that may be combined with other embodiments described herein, one or more first actuators 121 and one or more second actuators 132, In particular, it may be attached to the outer surface of the vacuum chamber, for example the upper chamber wall 212 of the vacuum processing chamber 210. Thus, advantageously, the active elements of the one or more magnetic bearings are arranged in an easily accessible location for mounting and/or maintenance to reduce costs. According to one example, as exemplarily shown in FIG. 1, the outer surface of the upper chamber wall 212 is a receiving for receiving one or more first actuators 121 and one or more second actuators 132 May contain receptions.

[0035] As illustratively shown in FIG. 1, according to some embodiments that may be combined with other embodiments described herein, the magnetic levitation system is a non-contact type for guiding the carrier 10 in the transport direction T. It further includes a guide arrangement (140). Typically, the non-contact guide arrangement 140 is arranged in the lower part 15L of the carrier conveying space 15. For example, the contactless guide arrangement 140 may include one or more passive magnetic bearings 125. In particular, as exemplarily shown in FIG. 1, one or more passive magnetic bearings 125 may be arranged vertically. Thus, one or more passive magnetic bearings 125 are configured to provide a magnetic force acting on the carrier in a horizontal direction, in particular a lateral direction (L), as exemplarily indicated in FIG. 1.

[0036] For example, as illustratively shown in FIG. 1, one or more passive magnetic bearings 125 may be provided by passive magnetic elements arranged vertically and in parallel. Typically, at least two passive magnetic elements are arranged to provide a receiving portion for the third magnetic counterpart 183 of the carrier. Thus, in the presence of the carrier, the third magnetic counterpart 183 is arranged between opposingly arranged passive magnetic elements of one or more passive magnetic bearings 125. Typically, the third magnetic counterpart 183 comprises a passive magnetic element. In FIG. 1, the north pole portion of passive magnetic elements is schematically indicated by a hatching pattern. The south pole portion of the passive magnetic elements is represented by a blank element adjacent to the north pole portion.

[0037] As illustratively shown in FIG. 1, typically, the passive magnetic elements of the third magnetic counterpart 183 and one or more passive magnetic bearings 125 are the passive magnetic elements of the third magnetic counterpart 183. The south pole portion of is arranged to face the south pole portion of the passive magnetic element (right side of the non-contact guide arrangement 140 shown in FIG. 1) of one or more passive magnetic bearings 125. Accordingly, the N-pole portion of the passive magnetic element of the third magnetic counterpart 183 is the N-pole of the passive magnetic element (left side of the non-contact guide arrangement 140 shown in FIG. 1) of one or more passive magnetic bearings 125. You can face the part. Accordingly, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 are passive magnetic elements of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125. It may be arranged such that repulsive magnetic forces act between the magnetic elements. Although not clearly shown, alternatively, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 are, respectively, the passive magnetic elements of the third magnetic counterpart 183 and the one or more passive magnetic elements. It should be appreciated that attractive magnetic forces may be arranged to act between passive magnetic elements of magnetic bearings 125.

[0038] Thus, advantageously, a non-contact lateral guidance of the carrier can be provided. In addition, it should be noted that providing a passive guiding arrangement is particularly well suited to providing robust carrier transport in high temperature vacuum environments at low costs.

[0039] In the present disclosure, a “passive magnetic bearing” may be understood as a bearing having passive magnetic elements that are not subject to active control or adjustment, at least while the device is not in operation. In particular, passive magnetic bearings can be configured to generate a magnetic field, such as a static magnetic field. In other words, passive magnetic bearings may not be configured to generate an adjustable magnetic field. For example, the magnetic elements of one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

[0040] Thus, a “passive magnetic element” or “passive magnet” as used herein can be understood as a magnet that is not actively controlled, eg through feedback control. For example, no output parameters, such as the magnetic field strength of a passive magnet, are controlled according to input parameters such as distance. A "passive magnetic element" or "passive magnet" may rather provide lateral stabilization of the carrier without any feedback control. For example, a “passive magnetic element” or “passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a “passive magnetic element” or “passive magnet” may include one or more electromagnets that may not be actively controlled.

[0041] Referring illustratively to FIG. 2, according to some embodiments that may be combined with other embodiments described herein, the magnetic levitation system is configured to carry the carrier 10 in a lateral direction L transverse to the transport direction T. It further comprises at least one side stabilizing device 160 having at least one stabilizing magnet 161 configured to apply a restoring force F to ). For example, at least one stabilizing magnet 161 can be arranged above the carrier transport space 15, in particular in an atmospheric space. In particular, at least one stabilizing magnet 161 may be attached to the outer surface of the upper chamber wall 212. Typically, at least one stabilizing magnet 161 may be arranged at a lateral distance with respect to one or more first actuators 121. Additionally or alternatively, the at least one stabilizing magnet 161 may be arranged at a laterally distanced relative to the one or more second actuators 132.

[0042] Thus, advantageously, the lateral stabilization device 160 can stabilize the carrier in a predetermined lateral position by applying a restoring force to the carrier 10 in case of lateral displacement of the carrier. The restoring force F pushes or pulls the carrier 10 back to a predetermined lateral position. Thus, advantageously, the lateral stabilization device 160 can generate a stabilization force configured to counteract the displacement of the carrier from the carrier transport space 15 in the lateral direction L. In other words, the side stabilization device 160 transfers the carrier back to the carrier when the carrier is displaced laterally (L) from a predetermined lateral position or equilibrium position (illustratively shown in FIG. 2). It may be configured to create a restoring force (F) pushing and/or pulling into space (15).

[0043] As exemplarily shown in FIG. 2, the at least one stabilizing magnet 161 may be a passive magnet having a north pole and a south pole. In some embodiments, the at least one stabilizing magnet may comprise a plurality of passive magnets that may be arranged such that one lies behind the other in the transport direction. Typically, the direction of the magnetic field lines inside the at least one stabilizing magnet (running from S pole to N pole inside the magnet) may essentially correspond to the lateral direction L.

[0044] The displacement of the carrier 10 in the lateral direction L from the carrier transport space 15 is magnetic between at least one stabilizing magnet 161 and at least one carrier stabilizing magnet 162 of the side stabilizing device 160 At least one carrier stabilizing magnet 162 may be attached to the carrier 10 in a manner that induces a repulsive force to cancel its displacement. Thus, advantageously, the carrier is held in the equilibrium position shown in Fig. 2 during holding and during the transport of the carrier along the transport path.

[0045] As exemplarily shown in FIG. 2, the at least one carrier stabilizing magnet 162 is arranged such that the direction of the magnetic field lines inside the at least one carrier stabilizing magnet 162 essentially corresponds to the lateral direction (L). It may be a passive magnet having a north pole and a south pole.

[0046] In particular, the at least one carrier stabilizing magnet 162 may be arranged in a reverse direction compared to the at least one stabilizing magnet 161 of the side stabilizing device 160, so that when the carrier is arranged in an equilibrium position, at least one carrier The north pole of the stabilizing magnet 162 is arranged close to the south pole of the at least one stabilizing magnet 161 and is attracted by the S pole, and at least one carrier stabilizing magnet 162 The south pole of the lateral stabilization device 160 is arranged close to the north pole of at least one stabilizing magnet 161 of the side stabilization device 160 and is attracted by the N pole. When the carrier is displaced from the equilibrium position in a first lateral direction (e.g., towards the left in FIG. 2), the north pole of the at least one carrier stabilizing magnet 162 is at least one of the side stabilizing device 160 Approaching the north pole of the stabilizing magnet 161 of, this causes a restoring force to force the carrier back into the equilibrium position. When the carrier is displaced from the equilibrium position in a second (opposite) lateral direction (e.g., towards the right in FIG. 2), the south pole of the at least one carrier stabilizing magnet 162 is the side stabilizing device 160 Approaching the south pole of the at least one stabilizing magnet 161 of, this causes a restoring force to force the carrier back towards the equilibrium position. Thus, the lateral stabilization device 160 stabilizes the carrier in a predetermined lateral position so that lateral movements of the carrier can be reduced or prevented.

[0047] Referring illustratively to FIG. 3, according to some embodiments that may be combined with other embodiments described herein, the magnetic levitation system further includes a safety arrangement 170. Typically, the safety arrangement 170 comprises a lateral guard guiding element 171 provided on at least one side of the carrier transport space 15. For example, the lateral guard guide element 171 can be attached to the inner surface of the upper chamber wall. In particular, the lateral guard guiding element 171 may be laterally spaced apart from the at least one stabilizing magnet 161, so that the at least one carrier stabilizing magnet 162 attached to the carrier 10 is guided by the lateral guard. It may be arranged between the element 171 and at least one stabilizing magnet 161. As illustratively shown in FIG. 3, in the presence of a carrier, a gap is provided between the at least one carrier stabilizing magnet 162 and the lateral guard guiding element 171. The lateral guard guide element 171 can be implemented as a guide rail or a plurality of guide pins in a row.

[0048] As illustratively shown in FIG. 3, additionally or alternatively, the safety arrangement 170 provides vertical safety support for the carrier 10, for example when one or more of the first actuators 121 are deactivated. It may include a safety roller 172 for. Typically, the safety roller 172 is connected to a holder 173 attached to the inner surface of the upper chamber wall 212. The holder holding the safety roller can also function as a lateral guard guiding element.

[0049] As shown in FIG. 3, according to some embodiments that may be combined with other embodiments described herein, two side stabilization devices as illustratively described with reference to FIG. 2 may be provided. . For example, a first side stabilization device 160A may be provided at a laterally distanced distance relative to one or more first actuators 121, and the second stabilization device 160B may be provided with one or more second actuators 132. May be provided laterally at a distance to

[0050] Referring illustratively to FIG. 3, according to some embodiments that may be combined with other embodiments described herein, a protective element 163, such as a protective strip, is formed by at least one carrier stabilizing magnet ( 162). In particular, the protection element 163 is a side of the at least one carrier stabilizing magnet 162 facing the lateral guard guide element 171 and/or the side of the at least one carrier stabilizing magnet 162 facing the holder 173 Can be attached to

[0051] Referring illustratively to FIG. 4, an embodiment of a magnetic levitation system having an asymmetric arrangement of one or more first actuators and one or more second actuators is described. According to some embodiments that may be combined with other embodiments described herein, as illustratively shown in FIG. 4, one or more of the first actuators 121 is the center of gravity of the carrier 10 to be transported. (G) can be arranged in the center above. In particular, referring to the embodiment of FIG. 4, the expression “arranged in the center above the center of gravity G of the carrier” means that the vertical plane 111 extending through the center of gravity G of the carrier is also One can be understood in that it extends through the actuators 121. In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect one or more first actuators 121. In particular, the vertical plane 111 may approximately intersect the center of the one or more first actuators 121, for example with a deviation of ± 10% from the center of the one or more first actuators 121. According to an example, the vertical plane 111 may represent a plane of symmetry with respect to one or more first actuators 121. As illustratively shown in FIG. 4, one or more second actuators 132 may be arranged laterally with respect to one or more first actuators 121. In particular, all of the one or more second actuators 132 may be arranged adjacent to the same side of the one or more first actuators 121 (eg, the left side of FIG. 4 ). It is to be understood that aspects and features as described with reference to FIGS. 1 to 3 may also be applied to the embodiment shown in FIG. 4.

[0052] Referring illustratively to FIG. 5, an embodiment of a magnetic levitation system having a symmetrical arrangement of one or more first actuators and one or more second actuators is described. According to some embodiments that may be combined with other embodiments described herein, as illustratively shown in FIG. 5, one or more of the second actuators 132 is the center of gravity of the carrier 10 to be transported. Can be arranged in the center on top.

[0053] In particular, referring to the embodiment of FIG. 5, the expression "arranged in the center above the center of gravity G of the carrier" means that the vertical plane 111 extending through the center of gravity G of the carrier is also It can be understood in that it extends through the second actuators 132. In other words, the vertical plane 111 extending through the center of gravity G of the carrier may cross one or more second actuators 132. In particular, the vertical plane 111 may generally intersect the center of the one or more second actuators 132, for example with a deviation of ± 10% from the center of the one or more second actuators 132. According to an example, the vertical plane 111 may represent a plane of symmetry with respect to one or more second actuators 132.

[0054] As illustratively shown in FIG. 5, the one or more first actuators 121 may include a first group 121A of one or more first actuators and a second group 121B of one or more first actuators. have. A first group 121A of one or more first actuators and a second group 121B of one or more first actuators may be arranged laterally with respect to one or more second actuators 132. In particular, as exemplarily shown in FIG. 5, the first group 121A of one or more first actuators may be arranged adjacent to the first side of the one or more second actuators 132, and One second group of actuators 121B may be arranged adjacent to the second side of one or more second actuators 132, the second side being opposite to the first side. For example, a first group 121A of one or more first actuators and a second group 121B of one or more first actuators may be arranged symmetrically with respect to one or more second actuators 132. It is to be understood that aspects and features as described with reference to FIGS. 1 to 3 may also be applied to the embodiment shown in FIG. 5.

[0055] Referring illustratively to FIGS. 4 and 5, a carrier 10 according to the present disclosure comprises a main body 13 for carrying an object, such as a substrate or a mask. For example, the main body 13 may be implemented as a carrier plate configured to hold a substrate or a mask. Alternatively, the main body 13 can be implemented as a carrier frame configured to hold a substrate or mask. As illustratively shown in FIGS. 4 and 5, the main body has a first end 11 and a second end 12. The second end 12 is opposite to the first end 11. The first end 11 of the main body 13 has one or more first magnetic counterparts 181 for interacting with one or more first actuators 121 of one or more magnetic bearings 120 of the magnetic levitation system. Includes. The first end 11 further comprises one or more second magnetic counterparts 182 for interacting with one or more second actuators 132 of the drive unit 130 of the magnetic levitation system. Additionally, the second end 12 of the main body 13 comprises a third magnetic counterpart 183 for interacting with one or more passive magnetic bearings 125 of the non-contact guide arrangement 140 of the magnetic levitation system. do.

[0056] According to some embodiments, which may be combined with any other embodiments described herein, the top surface 181S of one or more first magnetic counterparts 181 and of one or more second magnetic counterparts 182. The top surface 182S has the same orientation. More specifically, as illustratively shown in FIGS. 4 and 5, the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 are substantially horizontal. . For example, a top surface of the one or more first magnetic counterparts 181 and a top surface of the one or more second magnetic counterparts 182 may be coplanar. Alternatively, a small step between the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182, such as ST ≤ 2 mm, in particular ST ≤ 1 mm A phosphorus step ST may be provided.

[0057] As illustratively shown in FIGS. 4 and 5, according to some embodiments, which may be combined with any of the other embodiments described herein, the third magnetic counterpart 183 has a first surface 183A. ) And a second surface 183B. The second surface 183B is opposite to the first surface 183A. Typically, the orientation of the first surface 183A and the orientation of the second surface 183B are perpendicular to the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182. to be.

[0058] According to some embodiments, as exemplarily shown in FIG. 4, the carrier 10 may be an asymmetric carrier, that is, a vertical plane extending through the center of gravity G when the carrier is in a vertical orientation. It may not be symmetric about (111). Alternatively, as exemplarily shown in FIG. 5, the carrier 10 may be a symmetric carrier, that is, a vertical plane 111 extending through the center of gravity G when the carrier is in a vertical orientation. It can be symmetric about

It should be understood from FIGS. 4 and 5 that the dimensions of the carrier typically correspond to the dimensions of the carrier transport space 15. Accordingly, the carrier may have a height H _C corresponding to the height H of the carrier transport space 15. In addition, the carrier may have a width W _C corresponding to the width W of the carrier transport space 15. Thus, the aspect ratio of the H _C / W _C may be a H _C / W _C ≥ 5, especially H _C / W _C ≥ 10.

[0060] According to some embodiments, which may be combined with any other embodiments described herein, as illustratively described with reference to FIGS. 2 and 3, at least one carrier stabilizing magnet 162 is a carrier ( 10) can be attached to the first end (11). As exemplarily shown in FIGS. 6 and 7, at least one carrier stabilizing magnet 162 may be provided for an asymmetric carrier (see FIG. 6) as well as a symmetric carrier (see FIG. 7 ). Further, as exemplarily described with reference to FIG. 3, a protective element 163, such as a protective strip, may be attached to at least one carrier stabilizing magnet 162.

[0061] Referring illustratively to FIG. 6, an arrangement of two asymmetric magnetic levitation systems for transporting individual asymmetric carriers is described. In particular, a first asymmetric magnetic levitation system 101 providing a first transport path T1 may be provided next to a second asymmetric magnetic levitation system 102 providing a second transport path T2. In particular, the second asymmetric magnetic levitation system 102 is horizontally offset from the first asymmetric magnetic levitation system 101. Thus, typically, the second conveying path T2 is horizontally offset from the first conveying path T1. As can be seen from FIG. 6, the components of the first asymmetric magnetic levitation system 101 may substantially correspond to the components of the second asymmetric magnetic levitation system 102. Accordingly, it should be understood that features as described with reference to FIGS. 1 to 3 may also be applied to the exemplary embodiment shown in FIG. 6. As shown in FIG. 6, the contactless guide arrangement 140 of the first asymmetric magnetic levitation system 101 and the second asymmetric magnetic levitation system 102 may be connected to a common support structure 145. As exemplarily shown in FIG. 6, the common support structure 145 may be coupled to the lowermost chamber wall 211.

[0062] Referring illustratively to FIG. 7, an arrangement of two symmetrical magnetic levitation systems for transporting individual symmetrical carriers is described. In particular, a first symmetrical magnetic levitation system 103 providing a first conveying path T1 may be provided next to a second symmetrical magnetic levitation system 104 providing a second conveying path T2. In particular, the second symmetrical magnetic levitation system 104 is horizontally offset from the first symmetrical magnetic levitation system 103. Accordingly, the second transport path T2 is horizontally offset from the first transport path T1. As can be seen from FIG. 7, the components of the first symmetrical magnetic levitation system 103 can substantially correspond to the components of the second symmetrical magnetic levitation system 104. In addition, it should be understood that features as described with reference to FIGS. 1 to 4 may also be applied to the exemplary embodiment shown in FIG. 7. As shown in FIG. 7, the contactless guide arrangement 140 of the first symmetrical magnetic levitation system 103 and the second symmetrical magnetic levitation system 104 may be connected to a common support structure 145. As exemplarily shown in FIG. 7, the common support structure 145 may be coupled to the lowermost chamber wall 211.

[0063] In addition, as exemplarily shown in FIG. 7, according to some embodiments, which may be combined with any other embodiments described herein, the upper chamber wall 212 is a separate plate element, in particular a tub-shaped It can be implemented as a (tub-like) plate element. Thus, advantageously, one or more first actuators of the one or more magnetic bearings and one or more second actuators of the drive unit can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing an upper chamber wall with pre-mounted one or more first actuators and pre-mounted one or more second actuators can facilitate the assembly procedure and reduce costs. Thus, compared to the prior art, advantageously, a simpler interface to the chamber is provided.

Referring illustratively to FIG. 8, a processing system 200 for vertically processing a substrate in accordance with the present disclosure is described. According to embodiments that may be combined with any of the other embodiments described herein, processing system 200 includes at least one vacuum processing chamber 210 containing processing device 205. In particular, typically, the processing device 205 is arranged within the vacuum processing chamber 210, and the processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source. The term "vacuum" can be understood in the sense of a technical vacuum, for example with a vacuum pressure of less than 10 mbar. Typically, the pressure in the vacuum chamber as described herein is from 10 ^-5 mbar to about 10 ^-8 mbar, more typically from 10 ^-5 mbar to 10 ^-7 mbar, even more typically from about 10 ^-6 mbar May be about 10 ^-7 mbar. According to some embodiments, the pressure in the vacuum chamber is considered to be the partial pressure or the total pressure of the evaporated material in the vacuum chamber (which can be approximately the same when only the evaporated material is present as a component to be deposited in the vacuum chamber). Can be. In some embodiments, the total pressure in the vacuum chamber may range from about 10 ^-4 mbar to about 10 ^-7 mbar, particularly when a second component (such as gas, etc.) is present in addition to the evaporated material in the vacuum chamber. have. Thus, the vacuum chamber may be a “vacuum deposition chamber”, ie, a vacuum chamber configured for vacuum deposition.

[0065] Further, as exemplarily shown in FIG. 8, the processing system 200 includes one or more magnetic levitation systems for transporting one or more carriers in the transport direction T. For example, the processing system 200 may include a first magnetic levitation system 100A and a second magnetic levitation system 100B. The first magnetic levitation system 100A and the second magnetic levitation system 100B may be configured according to any of the embodiments described herein, particularly as described with reference to FIGS. 1 to 7. As shown in FIG. 8, a first magnetic levitation system 100A providing a first transport path T1 may be provided next to a second magnetic levitation system 100B providing a second transport path T2. have. In particular, the second magnetic levitation system 100B is horizontally offset from the first magnetic levitation system 100A. Accordingly, the second transport path T2 is horizontally offset from the first transport path T1.

[0066] One or more magnetic levitation systems of the processing system 200 include: one or more magnetic bearings 120 with one or more first actuators 121 for non-contact holding the carrier 10 within the carrier transport space 15. Include. Additionally, one or more magnetic levitation systems comprise a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T. One or more first actuators 121 and one or more second actuators 132 are arranged over the carrier transport space 15.

[0067] According to some embodiments, which may be combined with any of the other embodiments described herein, the processing system 200 transfers the carrier in the path switch direction S, as illustratively indicated in FIG. A track switch assembly 190 configured to move from the transfer path T1 to the second transfer path T2 may be further included. Typically, the path switch direction S corresponds to the lateral direction L. Further, the track switch assembly 190 may be configured to move the carrier to the processing position T3 horizontally offset from the first and second transport paths. In addition, as exemplarily indicated by double-sided arrows 144 in FIG. 8, the non-contact guide arrangement 140 of the first magnetic levitation system 100A and the second magnetic levitation system 100B is in the path switch direction S It may be movable in a vertical direction to enable movement of the carrier to ). Further, as illustratively shown in FIG. 8, a mask 206 (eg, an edge exclusion mask) may be provided between the processing position T3 and the processing device 205.

[0068] With illustrative reference to the flow chart shown in FIG. 9, a method 300 of transporting a carrier in accordance with the present disclosure is described. According to embodiments that can be combined with any of the other embodiments described herein, the method 300 uses one or more magnetic bearings 120 to transfer the carrier 10 into the carrier transport space 15 in a non-contact manner. And holding (represented by block 310 in FIG. 9). One or more magnetic bearings 120 have one or more first actuators 121 arranged above the carrier transport space 15. The method 300 also includes the step of transporting the carrier 10 in the transport direction T using the drive unit 130 (represented by block 320 in FIG. 9 ). The drive unit 130 has one or more second actuators 132 arranged over the carrier transport space 15.

[0069] In view of the above, compared to the prior art, embodiments of the present disclosure are advantageously improved, particularly with respect to the accurate and smooth transport of carriers in high temperature vacuum environments for high-quality display manufacturing. , And it should be understood that a method of transporting a carrier is provided. Further, the embodiments described herein advantageously provide a more robust contactless carrier transport with lower production costs compared to conventional carrier transport devices.

[0070] While the foregoing relates to embodiments, other and further embodiments may be envisioned without departing from the basic scope, the scope being determined by the following claims.

Claims (19)

As a magnetic levitation system 100 for transporting the carrier 10 in the transport direction T,
One or more magnetic bearings 120 having one or more first actuators 121 for non-contact holding the carrier 10 in the carrier transport space 15; And
And a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T,
The one or more first actuators 121 and the one or more second actuators 132 are arranged above the carrier transport space 15,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method of claim 1,
The one or more first actuators 131 and the one or more second actuators 132 are arranged in an atmospheric space,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to claim 1 or 2,
The one or more first actuators 131 and the one or more second actuators 132 are attached, in particular, to the outer surface of the upper chamber wall 212 of the vacuum chamber 210.
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 3,
Further comprising a contactless guiding arrangement (140) for guiding the carrier (10) in the transport direction (T),
The non-contact guide arrangement 140 is arranged in the lower portion 15L of the carrier transfer space 15,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method of claim 4,
The non-contact guide arrangement 140 comprises one or more passive magnetic bearings 125,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 5,
At least one side stabilization device having at least one stabilization magnet 161 configured to apply a restoring force F to the carrier 10 in a lateral direction L transverse to the conveying direction T ( 160),
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method of claim 6,
The at least one stabilizing magnet 161 is arranged above the carrier transport space 15, in particular in an atmospheric space,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 7,
It further comprises a safety arrangement (170),
The safety arrangement 170 is a lateral guard guiding element provided on at least one side of the carrier transport space 15, and a safety for providing vertical safety support for the carrier 10 Comprising at least one element of the group consisting of rollers,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 8,
The carrier transport space 15 is a vertical carrier transport space having a height H extending in a vertical direction and a width W extending in the horizontal direction,
Here, the aspect ratio of H/W is H/W ≥ 5,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 9,
The one or more first actuators 121 are arranged centrally on the center of gravity of the carrier 10 to be transported,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 10,
The one or more second actuators 132 are arranged laterally with respect to the one or more first actuators 121,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 9,
The one or more second actuators 132 are arranged centrally on the center of gravity of the carrier 10 to be transported,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. The method according to any one of claims 1 to 9 or 12,
The one or more first actuators 121 include a first group 121A of one or more first actuators and a second group 121B of one or more first actuators, and the first group 121A and the first Two groups 121B are arranged symmetrically with respect to the one or more second actuators 132,
Magnetic levitation system 100 for transporting the carrier 10 in the transport direction T. As a carrier 10 for a magnetic levitation system,
It includes a main body 13 for carrying an object,
The main body has a first end (11) and a second end (12) opposite the first end (11),
The first end 11 comprises one or more first magnetic counterparts 181 for interacting with one or more first actuators 121 of one or more magnetic bearings 120 of the magnetic levitation system, The first end 11 further comprises one or more second magnetic counterparts 182 for interacting with one or more second actuators 132 of the drive unit 130 of the magnetic levitation system, and
The second end 12 comprises a third magnetic counterpart 183 for interacting with one or more passive magnetic bearings 125 of the non-contact guidance arrangement 140 of the magnetic levitation system,
Carrier (10) for magnetic levitation system. The method of claim 14,
The top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 are coplanar,
Carrier (10) for magnetic levitation system. The method of claim 14 or 15,
The third magnetic counterpart 183 has a first surface 183A and a second surface 183B, the second surface 183B is opposite to the first surface 183A, and the first surface The orientation of (183A) and the orientation of the second surface (183B) are perpendicular to the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182,
Carrier (10) for magnetic levitation system. The method according to any one of claims 14 to 16,
Further comprising at least one carrier stabilizing magnet (162) attached to the first end (11) of the carrier (10),
Carrier (10) for magnetic levitation system. A processing system 200 for vertically processing a substrate, comprising:
At least one vacuum processing chamber 210 containing a processing device 205; And
One or more magnetic levitation systems 100 for transporting one or more carriers 10 in a transport direction T,
The one or more magnetic levitation systems,
One or more magnetic bearings 120 having one or more first actuators 121 for non-contact holding the carrier 10 in the carrier transport space 15, and
And a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T,
The one or more first actuators 131 and the one or more second actuators 132 are arranged above the carrier transport space 15,
A processing system 200 for vertically processing a substrate. As a method 300 of transporting the carrier 10,
Non-contact holding of the carrier 10 in the carrier transfer space 15 using one or more magnetic bearings 120 with one or more first actuators 121 arranged over the carrier transfer space 15 (310); And
A step (320) of transferring the carrier (10) in the transfer direction (T) using a drive unit (130) having one or more second actuators (132) arranged over the carrier transfer space (15). ,
Method 300 of transporting the carrier 10.

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