WO2022194341A1

WO2022194341A1 - Carrier for transporting an object in a vacuum chamber, method of manufacturing a carrier, carrier transport system, and vacuum processing apparatus

Info

Publication number: WO2022194341A1
Application number: PCT/EP2021/056515
Authority: WO
Inventors: Christian Wolfgang Ehmann
Original assignee: Applied Materials, Inc.
Priority date: 2021-03-15
Filing date: 2021-03-15
Publication date: 2022-09-22
Also published as: KR20230154081A; CN117099193A

Abstract

A carrier (100) for transporting an object (10) in a vacuum chamber is described. The carrier includes a first passive magnetic unit (110) provided at a top (101) of the carrier (100) and a second passive magnetic unit (120) provided at a bottom (102) or a lateral side of the carrier (100). At least one of the first passive magnetic unit (110) and the second passive magnetic unit (120) includes a magnet holder (121) having a plurality of recesses (122) being arranged in a cross direction with respect to a transport direction (T) of the carrier (10). Additionally, the magnet holder (121) includes a plurality of permanent magnets (123) arranged in the plurality of recesses (122). Further, the magnet holder (121) includes a holding sheet (124) covering the plurality of permanent magnets (123). Further, a carrier transport system, an apparatus for vacuum processing of a substrate, a method of manufacturing a carrier for transporting an object, and a method of manufacturing a coated substrate are described.

Description

CARRIER FOR TRANSPORTING AN OBJECT IN A VACUUM CHAMBER, METHOD OF MANUFACTURING A CARRIER, CARRIER TRANSPORT SYSTEM, AND VACUUM PROCESSING APPARATUS

TECHNICAL FIELD [0001] Embodiments of the present disclosure relate to apparatuses and methods for transportation of carriers, particularly carriers used for carrying large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for transportation of carriers employable in processing apparatuses for vertical substrate processing, e.g. material deposition on large area substrates for display production. In particular, embodiments of the present disclosure relate to carrier transport systems, vacuum processing apparatuses, and methods of transporting a carrier in a vacuum chamber.

BACKGROUND

[0002] In order to process a substrate, an in-line arrangement of processing modules can be used. An in-line processing system includes a plurality of subsequent processing modules, such as deposition modules and optionally further processing modules, e.g., cleaning modules and/or etching modules, wherein processing aspects are subsequently conducted in the processing modules, such that a plurality of substrates can continuously or quasi-continuously be processed in the in-line processing system.

[0003] The substrate is typically carried by a carrier, i.e. a carrying device for carrying the substrate. The carrier is typically transported through a vacuum system using a carrier transport system. The carrier transport system may be configured for conveying the carrier carrying the substrate along one or more transport paths. [0004] For obtaining high quality devices, technical challenges with respect to the processing of substrates need to be mastered. In particular, an accurate and smooth transportation of the carriers through the vacuum system is challenging. For instance, particle generation due to wear of moving parts can cause a deterioration in the manufacturing process. Accordingly, there is a demand for the transportation of carriers in vacuum deposition systems with reduced or minimized particle generation. Further challenges are, for example, to provide robust, simple and compact carrier transport systems for high temperature vacuum environments at low costs. [0005] Typically, the carriers may be guided by rollers and the stronger the load on the rollers, the larger the risk of particle generation, and the shorter the lifetime of the rollers. Fully contactless floating carrier transportation systems are complicated and expensive. Magnetic levitation systems with permanent magnets are difficult to realize. At least one degree of freedom has to be stabilized mechanically or with guide elements to overcome Earnshaw’ s theorem.

[0006] Accordingly, a simple and compact arrangement to guide a carrier, particularly a vertically oriented carrier, to compensate gravity to minimize forces on mechanical elements as much as possible would be beneficial. Minimizing forces on mechanical elements can reduce generation of particles during carrier transportation, and the lifetime of the mechanical elements can be increased.

[0007] However, it has been found that carriers and transportation systems including contactless magnetic transport devices can still be improved with respect to durability and costs.

SUMMARY [0008] In light of the above, a carrier for transporting an object in a vacuum chamber, a carrier transport system for transporting a carrier within a vacuum chamber, an apparatus for vacuum processing of a substrate, a method of manufacturing a carrier for transporting an object, and a method of manufacturing a coated substrate according to the independent claims are provided. Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings.

[0009] According to an aspect of the present disclosure, a carrier for transporting an object in a vacuum chamber is provided. The carrier includes a first passive magnetic unit provided at a top of the carrier. Additionally, the carrier includes a second passive magnetic unit provided at a bottom or a lateral side of the carrier. At least one of the first passive magnetic unit and the second passive magnetic unit includes a magnet holder having a plurality of recesses being arranged in a cross direction with respect to a longitudinal extension of the magnet holder. Additionally, the second passive magnetic unit includes a plurality of permanent magnets arranged in the plurality of recesses. Further, the second passive magnetic unit includes a holding sheet covering the plurality of permanent magnets.

[0010] According to another aspect of the present disclosure, a carrier transport system for transporting a carrier within a vacuum chamber is provided. The carrier transport system includes a magnetic levitation unit extending in a transport direction. The magnetic levitation unit is configured for exerting a levitation force on the carrier. Additionally, the carrier transport system includes a magnetic drive unit having a plurality of active magnets for exerting a driving force on the carrier in the transport direction. Further, the carrier transport system includes the carrier according to any of any embodiments described herein.

[0011] According to a further aspect of the present disclosure, an apparatus for vacuum processing of a substrate is provided. The apparatus includes a vacuum chamber, a processing device provided in the vacuum chamber, and a carrier transport system according to any embodiments described herein.

[0012] According to another aspect of the present disclosure, a method of manufacturing a carrier for transporting an object is provided. The method includes fixing a first passive magnetic unit to a top of a main body of the carrier. The main body has a holding section configured for vertically holding the flat object. Further, the method includes fixing a second passive magnetic unit to a bottom or a lateral side of the main body of the carrier. At least one of the first passive magnetic unit and the second passive magnetic unit includes a magnet holder having a plurality of recesses being arranged in a cross direction with respect to a longitudinal extension of the magnet holder. Additionally, at least one of the first passive magnetic unit and the second passive magnetic unit includes a plurality of permanent magnets arranged in the plurality of recesses. Further, at least one of the first passive magnetic unit and the second passive magnetic unit includes a holding sheet covering the plurality of permanent magnets. [0013] According to a yet further aspect of the present disclosure, a method of coating a substrate, particularly for manufacturing an electronic device, is provided. The electronic device may be an opto-electronical device, e.g. a display. The method of coating the substrate includes using at least one of a carrier according to any embodiments described herein, a substrate processing system according to any embodiments described herein, a carrier transport system according to any embodiments described herein, and an apparatus for vacuum processing of a substrate according to any embodiments described herein.

[0014] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1A shows a schematic front view of a carrier for transporting an object according to embodiments described herein;

FIG. IB shows a schematic side view of a carrier for transporting an object according to embodiments described herein;

FIG. 2 shows a schematic view of a magnet holder of a carrier according to embodiments described herein; FIG. 3 shows a bottom portion of a carrier with the second passive magnetic unit according to embodiments described herein;

FIG. 4 shows a schematic view of a carrier transport system according to embodiments described herein;

FIG. 5 shows a schematic view of an apparatus for vacuum processing according to embodiments described herein; and

FIGS. 6 A and 6B show block diagrams for illustrating embodiments of a method of manufacturing a carrier for transporting an object according the present disclosure.

DETAILED DESCRIPTION OF EMBODIMENTS [0016] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0017] With exemplary reference to FIGS. 1A and IB, a carrier 100 for transporting an object 10 in a vacuum chamber according to the present disclosure is described. According to embodiments, which can be combined with any other embodiments described herein, the carrier 100 includes a first passive magnetic unit 110 provided at a top 101 of the carrier 100. Additionally, the carrier 100 includes a second passive magnetic unit 120 provided at a bottom 102 or a lateral side of the carrier 100. At least one of the first passive magnetic unit 110 and the second passive magnetic unit 120 includes a magnet holder 121 having a plurality of recesses 122. The plurality of recesses 122 are arranged in a cross direction with respect to a longitudinal extension L of the magnet holder 10. Additionally, the second passive magnetic unit 120 includes a plurality of permanent magnets 123 arranged in the plurality of recesses 122. Further, the second passive magnetic unit 120 includes a holding sheet 124 covering the plurality of permanent magnets 123. It is to be understood that the holding sheet 124 may also protect the plurality of permanent magnets 123.

[0018] Accordingly, embodiments of the carrier as described herein are beneficially improved with respect to the prior art, particularly with respect to durability. Further, the carrier as described herein beneficially provides for a reduction in manufacturing and maintenance costs. Yet further, manufacturing and mounting of the carrier is facilitated.

[0019] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms and expressions used herein are explained.

[0020] In the present disclosure, a “carrier” can be understood as a carrying device configured for carrying an object, e.g. a substrate or a mask, through a vacuum environment. In particular, the carrier can be a substrate carrier or a mask carrier used in a processing system, e.g. for vertically processing a substrate. The carrier may include a carrier body and a holding section. The holding section may include a holding device, e.g. a mechanical, electrostatic, or magnetic chucking device, configured for holding the object, e.g. the substrate or the mask, at an object support surface of the carrier body. The carrier may be configured to carry a large- area substrate, i.e. a substrate having a size of 1 m² or more, particularly 5 m² or more, or even 8 m² or more.

[0021] In the present disclosure, the term “substrate” may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto, and the term “substrate” may also embrace flexible substrates such as a web or a foil. The term “substantially inflexible” is understood to distinguish over “flexible”. Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.

[0022] As mentioned above, the carrier 10 can be a substrate carrier or a mask carrier. In particular, the carrier can be a substrate carrier for large area substrates or a mask carrier for masks employed for masking large area substrates. In the present disclosure, the term “large area substrate” refers to a substrate having a main surface with an area of 0.5 m² or larger, particularly of 1 m² or larger. In some embodiments, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m² of substrate (0.73 mx0.92 m), GEN 5, which corresponds to about 1.4 m² of substrate (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m² of substrate (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7 m² of substrate (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m² of substrate (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented.

[0023] With exemplary reference to FIGS. 1A and IB, according to embodiments which can be combined with any other embodiments described herein, the plurality of recesses 122 provide for a plurality of protrusions 125. The protrusions 125 prevent shifting of the plurality of permanent magnets 123 in the longitudinal direction of the longitudinal extension L of the magnet holder 10. In other words, the plurality of recesses 122 beneficially provide for securing a position of the plurality of permanent magnets 123, such that the plurality of permanent magnets 123 are fixed in the longitudinal direction of the magnet holder 121. Typically, the longitudinal direction of the longitudinal extension L of the magnet holder 10 corresponds to a transport direction T of the carrier. The transport direction T is exemplarily indicated in FIGS. 1A and IB. Typically, the transport direction T is a horizontal direction.

[0024] With exemplary reference to FIGS. 1A and IB, it is to be understood that according to embodiments, which can be combined with any other embodiments described herein the holding sheet 124 secures the vertical position of the plurality of permanent magnets 123. The vertical direction V is exemplarily indicated in FIGS. 1A and IB. Typically, the holding sheet 124 is fixed to the magnet holder 121. For instance, the holding sheet 124 can be fixed to the magnet holder 121 via a plurality of flaps 127 of the holding sheet 124 which are arranged in a plurality of receptions 126, as exemplarily shown in FIGS. 2 and 3. In particular, the plurality of flaps 127 may be clamped between the second side 121B of the magnet holder 121 and the bottom 103B of the main body 103, e.g. via an intermediate element 130, particularly an intermediate element of elastic material, such as an O-Ring. Additionally or alternatively, the holding sheet 124 can be fixed to the magnet holder 121 by employing other fixation techniques, e.g. bolts. For instance, the bolts can be applied from the sides, i.e. laterally mounted. [0025] As exemplarily indicated in FIG. IB, typically, the carrier 100 includes a holding section 104 configured for vertically holding the flat object 10. In particular, the flat object 10 can be a substrate to be processed or a mask for masking a substrate to be processed.

[0026] FIG. 2 shows a schematic view of a magnet holder 121 of a carrier 100 according to embodiments described herein. For better illustration, only three magnets of the plurality of permanent magnets 123 are shown. According to embodiments, which can be combined with any other embodiments described herein, the magnet holder 121 is made of ferromagnetic material. In particular, the magnet holder 121 can be made of ferromagnetic stainless steel. Accordingly, beneficially the plurality of permanent magnets 123 can be attached to the magnet holder 121 by magnetic forces, such that usage of adhesives as typically employed in the state of the art can be avoided. Typically, the magnet holder 121 is a single piece structure. Further, the plurality of protrusions 125 may be machined, particularly milled, into the single piece structure. Accordingly, it is to be understood that typically the magnet holder 121 with the plurality of recesses 122 and the plurality of protrusions 125 is an integral single piece.

[0027] With exemplary reference to FIG. 2, according to embodiments which can be combined with any other embodiments described herein, the plurality of protrusions 125 have a protrusion height Hp, the protrusion height Hp being Hp< 0.2 x HM, wherein HM is the height of the permanent magnets 123. In particular, the protrusion height Hp can beHp < 0.15 x HM, more particularly Hp < 0.10 x HM. More specifically, the protrusion height Hp may be selected from an interval between a lower protrusion height limit HPL and an upper protrusion height limit Hpu, i.e. HPL < Hp < Hpu. For example, the lower protrusion height limit HPL can be HPL=0.05 X HM, particularly HPL=0.06 X HM_, more particularly HPL=0.07 X HM. The upper protrusion height limit Hpu can be Hpu = 0.2 x HM, particularly Hpu = 0.15 x HM, more particularly Hpu = 0.10 x HM.

[0028] With exemplary reference to FIG.2, according to embodiments which can be combined with any other embodiments described herein, the plurality of recesses 122 are provided on a first side 121 A of the magnet holder 121. In particular, the first side 121 A of the magnet holder 121 is a bottom side of the magnet holder 121, as exemplarily shown in FIG.2. Further, the second side 121B of the magnet holder 121 opposite the first side 121 A may include a plurality of receptions 126. Typically, the plurality of receptions 126 are configured for receiving a plurality of flaps 127 of the holding sheet 124, as exemplarily shown in FIG. 3. From FIG. 3 it is to be understood, that a plurality of flaps 127 of the holding sheet 124 can be used for fixing the holding sheet 124 to the magnet holder 121. Further from Figs. 1 A, IB and 3, it is to be understood that the magnet holder 121 is attached to a bottom 103B of a main body 103 of the carrier 10. Additionally or alternatively, the magnet holder 121 can be attached to a top 103T of the main body 103 of the carrier 10. Additionally or alternatively, the magnet holder 121 may be attached to a lateral side of the main body 103 of the carrier 10, particularly a lower lateral side of the main body 103 of the carrier 10.

[0029] According to embodiments, which can be combined with any other embodiments described herein, the holding sheet 124 is made of non- ferromagnetic material. In particular, the holding sheet 124 can be made of non-ferromagnetic stainless steel. Typically, the holding sheet 124 is a metal sheet having a thickness of less than or equal to 0.5 mm, particularly less than or equal to 0.3 mm, for example 0.2 mm ± 0.05 mm, more particularly 0.1 mm ± 0.25 mm. Typically, the holding sheet 124 is an integral single piece structure, which may be bent or formed into shape.

[0030] With exemplarily reference to FIG. 4, according to embodiments, which can be combined with other embodiments described herein, the first passive magnetic unit 110 is configured to interact with a magnetic levitation unit 210 of a carrier transport system 200. The magnetic levitation unit 210 is configured for generating a carrier levitation force FL counteracting a weight force of the carrier 100. Further, the second passive magnetic unit 120 is configured to interact with a magnetic drive unit 220 of the carrier transport system 200. The drive unit 220 is configured to move the carrier in a transport direction T. [0031] Accordingly, as exemplary shown in FIG. 4, according to another aspect of the present disclosure a carrier transport system 200 for transporting a carrier 100 within a vacuum chamber is provided.

[0032] In the present disclosure, a “transport system for transporting a carrier” can be understood as a system or apparatus configured for moving a carrier along a transport path in a transport direction T. In particular, the transport system may be configured for transporting an essentially vertically oriented carrier. “Essentially vertically” as used herein may encompass a deviation of 10° or less from an exactly vertical orientation.

[0033] According to embodiments, which can be combined with any other embodiments described herein, the carrier transport system 200 includes a magnetic levitation unit 210 extending in a transport direction T. The magnetic levitation unit 210 is configured for exerting a levitation force on the carrier 100. As exemplarily shown in FIG. 4, typically the magnetic levitation unit 210 is arranged above the carrier 10 to be transported, particularly opposite the first passive magnetic unit 110. More specifically, the magnetic levitation unit 210 is arranged to interact with the first passive magnetic unit 110 provided at a top 101 of the carrier 100.

[0034] According to embodiments, which can be combined with any other embodiments described herein, the first passive magnetic unit 110 includes one or more passive magnetic elements made of a ferromagnetic material and may have permanent magnetic properties.

[0035] The term “passive magnetic unit” as used herein may be understood as a magnet which is not actively controlled, e.g. via a feedback control. For example, a “passive magnetic unit” may include one or more permanent magnets. Alternatively, a “passive magnetic element” or “passive magnet” may include one or more electromagnets which may not be actively controlled.

[0036] In the present disclosure, a “magnetic levitation unit” can be understood as a unit configured for holding an object, e.g. a carrier as described herein, in a contactless manner by using magnetic force. In the present disclosure, the term “levitating” or “levitation” refers to a state of an object, e.g. a carrier carrying a substrate or a mask, wherein the object floats without mechanical contact or support. Accordingly, in other words, typically the magnetic levitation unit is configured for contactlessly levitating a carrier as described herein.

[0037] In the present disclosure, “contactlessly levitating” can be understood in the sense that a weight, e.g. the weight of a carrier, particularly the weight of a carrier carrying a substrate or a mask, is not held by a mechanical contact or mechanical forces, but is held by a magnetic force. In other words, the term “contactless” can be understood in that a carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces, i.e. contact forces.

[0038] According to embodiments, which can be combined with any other embodiments described herein, the magnetic levitation unit 210 includes one or more electromagnetic actuators. Typically, the one or more electromagnetic actuators are controllable electromagnets. The magnetic field of the one or more electromagnetic actuators may be actively controllable for maintaining and / or adjusting the distance between the magnetic levitation unit and the carrier.

[0039] Additionally, the carrier transport system 200 includes a magnetic drive unit 220 having a plurality of active magnets for exerting a driving force on the carrier 100 in the transport direction T. Typically, the magnetic drive unit 220 is arranged below the carrier 10 to be transported, particularly opposite the second passive magnetic unit 120, as exemplarily shown in FIG. 4. It is to be understood that typically the second passive magnetic unit 120 is configured as the first passive magnetic unit 110. According to embodiments, which can be combined with any other embodiments described herein, the magnetic drive unit 220 includes one or more electromagnets which may represent a stator part of an electromagnetic linear motor. Typically, the one or more electromagnets of the drive unit 220 are arranged to interact with one or more passive magnetic elements of the second passive magnetic unit 120. The one or more passive magnetic elements of the second passive magnetic unit 120 can be made of a ferromagnetic material and may have permanent magnetic properties. It is to be understood, that although not explicitly shown, the drive unit can be arranged above and/or lateral of a correspondingly adapted carrier.

[0040] In the present disclosure, a “magnetic drive unit” can be understood as a unit configured for moving a carrier as described herein in the transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction T. Accordingly, the drive unit can be a linear motor. More specifically, a drive unit for moving or transporting the carrier can be understood as a unit configured for providing a driving force, e.g. a force in a direction different from the levitation force, wherein the carrier is moved from one position to another, different position, for example a different position along the transport direction. As described herein, the carrier may carry a substrate or a mask and can be levitated by the magnetic levitation unit, i.e. by a force counteracting gravity. The device can be moved by the drive unit in the transport direction T (different from a direction parallel to gravity) while being levitated.

[0041] Further, as exemplarily shown in Fig. 4, the carrier transport system 200 typically includes the carrier 100 according to any embodiments described herein.

[0042] With exemplary reference to FIG. 5, an apparatus 300 for vacuum processing of a substrate according to the present disclosure is described. According to embodiments, which can be combined with any other embodiments described herein, the apparatus 300 for vacuum processing includes a vacuum chamber 301, a processing device 310 provided in the vacuum chamber 301, and a carrier transport system 200 according to any embodiments described herein.

[0043] In the present disclosure, the term “vacuum” can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10³ mbar and about 10 ¹¹ mbar, more typically between 10⁸ mbar and 10 ¹¹ mbar, or even less than 10 ¹¹ mbar.

[0044] In particular, as schematically shown in FIG. 5, the carrier transport system 200 includes a magnetic levitation unit 210 extending in a transport direction T. The magnetic levitation unit 210 is configured for exerting a levitation force on the carrier 100. Additionally, the carrier transport system 200 includes a magnetic drive unit 220 having a plurality of active magnets for exerting a driving force on the carrier 100 in the transport direction T. Further, the carrier transport system 200 includes the carrier 100 according to any embodiments described herein.

[0045] The processing device 310 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source, or other processing devices used for the processing of large area substrates employed for display manufacturing. In FIG. 5, the processing device 310 is a deposition source, wherein a material to be deposited is indicated by dotted arrows 311.

[0046] With exemplary reference to the block diagrams shown in FIG. 6A and 6B, embodiments of a method 400 of manufacturing a carrier 100 according to the present disclosure are described. According to embodiments, which can be combined with any other embodiments described herein, the method 400 includes fixing (represented by block 410 in FIGS. 6A and 6B) a first passive magnetic unit 110 to a top 103T of a main body 103 of the carrier 10. As exemplarily shown in FIG. IB, the main body has a holding section 104 configured for vertically holding the flat object 10. Further, the method 400 includes fixing (represented by block 420 in FIGS. 6A and 6B) a second passive magnetic unit 120 to a bottom 103B of the main body 103 of the carrier 10. As described herein, the second passive magnetic unit 120 includes a magnet holder 121, a plurality of permanent magnets 123, and a holding sheet 124. In particular, the magnet holder 121 includes a plurality of recesses 122 which are arranged in a cross direction with respect to a longitudinal extension L of the magnet holder 121. Further, the plurality of permanent magnets 123 are arranged in the plurality of recesses 122. The holding sheet 124 covers the plurality of permanent magnets 123.

[0047] With exemplary reference to FIG. 6B, according to embodiments, which can be combined with any other embodiments described herein, the method 400 further includes manufacturing (represented by block 401 in Fig. 6B) the second passive magnetic unit 120. In particular, manufacturing 401 the second passive magnetic unit 120 typically includes producing (represented by block 402 in Fig. 6B) a magnet holder 121 according to embodiments described herein. Typically, producing 402 the magnet holder includes machining (represented by block 403 in Fig. 6B), particularly milling, a plurality of recesses 122 in a magnet holder body such that the plurality of recesses 122 are arranged in a cross direction with respect to a longitudinal extension L of the magnet holder 121. Accordingly, it is to be understood that typically the magnet holder body is an elongated block of material, particularly ferromagnetic material (e.g. ferromagnetic stainless steel). By providing plurality of recesses 122, a plurality of protrusions 125 are provided which extend in a cross direction with respect to the longitudinal extension of the magnet holder 121. According to embodiments which can be combined with any other embodiments described herein, the plurality of recesses 122 can be arranged perpendicular with respect to the longitudinal direction of the longitudinal extension L. In other words, the plurality of recesses 122 may have an orientation which is perpendicular, i.e. 90°, with respect to the longitudinal direction. Alternatively, the plurality of recesses 122 can have an orientation which deviates from perpendicularity with respect to the longitudinal direction, for example by 2° or less, 5° or less, or 10° or less. In particular, the plurality of recesses 122 can have an orientation which deviates from perpendicularity with respect to the longitudinal direction by a deviation angel a which may be selected from an interval between a lower deviation angel limit OIL and an upper deviation angel limit au, i.e. OIL £ a < au. The lower deviation angel limit OIL can be (XL =1°, particularly (XL =2°, more particularly au =3°. The upper deviation angel limit aucan be au =3°, particularly au =5°, more particularly au =10°. [0048] Further, manufacturing 401 the second passive magnetic unit 120 typically includes arranging (represented by block 404 in Fig. 6B) a plurality of permanent magnets 123 in the plurality of recesses 122. Moreover, manufacturing 401 the second passive magnetic unit 120 includes securing (represented by block 405) in Fig. 6B) the vertical position of the plurality of permanent magnets 123 by a holding sheet 124 covering the plurality of permanent magnets 123. As exemplarily described with reference to FIG. 3, the holding sheet 124 may be fixed to the magnet holder 121 by arranging a plurality of flaps 127 of the holding sheet 124 in a corresponding plurality of receptions 126 as exemplarily described with reference to FIGS 2 and 3.

[0049] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide a carrier for transporting an object in a vacuum chamber, a carrier transport system for transporting a carrier within a vacuum chamber, as well as an apparatus for vacuum processing of a substrate which are improved compared to the state of the art. Further, an improved method of manufacturing a carrier for transporting an object and a method of manufacturing a coated substrate are provided.

[0050] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.

Claims

1. A carrier (100) for transporting an object (10) in a vacuum chamber, comprising:

- a first passive magnetic unit (110) provided at atop (101) of the carrier (100); and

- a second passive magnetic unit (120) provided at a bottom (102) or a lateral side of the carrier (100), at least one of the first passive magnetic unit (110) and the second passive magnetic unit (120) comprising:

- a magnet holder (121) having a plurality of recesses (122) being arranged in a cross direction with respect to a longitudinal extension (L) of the magnet holder (10),

- a plurality of permanent magnets (123) arranged in the plurality of recesses (122), and

- a holding sheet (124) covering the plurality of permanent magnets (123).

2. The carrier (100) according to claim 1, wherein the plurality of recesses (122) provide for a plurality of protrusions (125) preventing shifting of the plurality of permanent magnets (123) in and opposite to a transport direction (T) of the carrier.

3. The carrier (100) according to claim 1 or 2, wherein the holding sheet (124) secures the vertical position of the plurality of permanent magnets (123).

4. The carrier (100) according to any of claims 1 to 3, wherein the holding sheet (124) is fixed to the magnet holder (121).

5. The carrier (100) according to any of claims 1 to 4, wherein the magnet holder (121) is made of ferromagnetic material, particularly ferromagnetic stainless steel.

6 The carrier (100) according to any of claims 1 to 5, wherein the magnet holder (121) is a single piece structure, and particularly wherein the plurality of protrusions (125) are machined into the single piece structure.

7. The carrier (100) according to any of claims 1 to 6, wherein the plurality of recesses (122) provide for a plurality of protrusions (125) having a protrusion height Hp, wherein the protrusion height Hp is Hp < 0.2 x HM, wherein HM is the height of the permanent magnets (123), particularly Hp < 0.15 x HM, more particularly Hp < 0.10 x HM.

8. The carrier (100) according to any of claims 1 to 7, wherein the plurality of recesses (122) are provided on a first side (121 A) of the magnet holder (121), particularly the bottom side of the magnet holder, and wherein a second side (121B) of the magnet holder (121) opposite the first side (121 A) comprises a plurality of receptions (126) for receiving flaps of the holding sheet (124) for fixing the holding sheet (124) to the magnet holder.

9. The carrier (100) according to any of claims 1 to 8, wherein the holding sheet (124) is made of non-ferromagnetic material, particularly non ferromagnetic stainless steel.

10. The carrier (100) according to any of claims 1 to 9, wherein the magnet holder (121) is attached to a bottom (103B) of a main body (103) of the carrier (10).

11. The carrier (100) according to any of claims 1 to 10, wherein the carrier (100) comprises a holding section (104) configured for vertically holding the flat object (10), particularly the flat object (10) being a substrate to be processed or a mask for masking a substrate to be processed.

12. The carrier (100) according to any of claims 1 to 11, wherein the first passive magnetic unit (110) is configured to interact with a magnetic levitation unit (210) of a carrier transport system (200) generating a carrier levitation force (FL) counteracting a weight force of the carrier (100), and wherein the second passive magnetic unit (120) is configured to interact with a magnetic drive unit (220) of the carrier transport system (200), the drive unit (220) being configured to move the carrier in a transport direction (T).

13. A carrier transport system (200) for transporting a carrier (100) within a vacuum chamber, comprising: - a magnetic levitation unit (210) extending in a transport direction (T), the magnetic levitation unit (210) being configured for exerting a levitation force on the carrier (100);

- a magnetic drive unit (220) having a plurality of active magnets for exerting a driving force on the carrier (100) in the transport direction (T); and - the carrier (100) according to any of claims 1 to 12.

14. An apparatus (300) for vacuum processing of a substrate comprising:

- a vacuum chamber (301);

- a processing device (310) provided in the vacuum chamber (301); and

- a carrier transport system (200) according to claim 13.

15. A method (400) of manufacturing a carrier (100) for transporting an object

(10), comprising:

- fixing (410) a first passive magnetic unit (110) to a top (103T) of a main body (103) of the carrier (10), the main body having a holding section (104) configured for vertically holding the flat object (10); and - fixing (420) a second passive magnetic unit (120) to a bottom (103B) or a lateral side of the main body (103) of the carrier (10), at least one of the first passive magnetic unit (110) and the second passive magnetic unit (120) comprising: - a magnet holder (121) having a plurality of recesses (122) being arranged in a cross direction with respect to a longitudinal extension (L) of the magnet holder (121),

- a holding sheet (124) covering the plurality of permanent magnets (123).

16. A method of manufacturing a coated substrate, particularly for manufacturing an electronic device, comprising using at least one of a carrier (100) according to any of claims 1 to 12, a carrier transport system (200) according to claim 13, and an apparatus (300) for vacuum processing of a substrate according to claim 14.