WO2020001751A1

WO2020001751A1 - Magnetic levitation system for transporting a carrier, carrier for a magnetic levitation system, apparatus for transportation of a carrier, processing system for vertically processing a substrate, and method of switching a transport path of a carrier

Info

Publication number: WO2020001751A1
Application number: PCT/EP2018/067110
Authority: WO
Inventors: Oliver Heimel; Christian Wolfgang Ehmann; Ralph Lindenberg
Original assignee: Applied Materials, Inc.
Priority date: 2018-06-26
Filing date: 2018-06-26
Publication date: 2020-01-02

Abstract

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). The one or more first actuators (121) are arranged above the carrier transportation space (15). Additionally, the magnetic levitation system includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more second actuators (132) are laterally arranged on a lower portion (15L) of the carrier transportation space (15).

Description

MAGNETIC LEVITATION SYSTEM FOR TRANSPORTING A CARRIER, CARRIER FOR A MAGNETIC LEVITATION SYSTEM, APPARATUS FOR TRANSPORTATION OF A CARRIER, PROCESSING SYSTEM FOR VERTICALLY PROCESSING A SUBSTRATE, AND METHOD OF

SWITCHING A TRANSPORT PATH OF A CARRIER

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transportation of carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for contactless transportation of carriers employable in processing systems for vertical substrate processing, e.g. material deposition on large area substrates for display production. In particular, embodiments of the present disclosure relate to magnetic levitation systems, carriers and methods for carrier transportation in vacuum processing systems.

BACKGROUND

[0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD) and thermal evaporation. Coated substrates may be used in several applications and in several technical fields. For instance, coated substrates may be used in the field of display devices. Display devices can be used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] In order to deposit a layer stack, an in-line arrangement of processing modules can be used. An in-line processing system includes a plurality of subsequent processing modules, such as deposition modules and optionally further processing modules, e.g., cleaning modules and/or etching modules, wherein processing aspects are subsequently conducted in the processing modules such that a plurality of substrates can continuously or quasi-continuously be processed in the in-line processing system.

[0004] The substrate may be carried by a carrier, i.e. a carrying device for carrying the substrate. The carrier is typically transported through a vacuum system using a transport system. The transport system may be configured for conveying the carrier having the substrate positioned thereon along one or more transport paths. At least two transport paths can be provided next to each other in the vacuum system, e.g. a first transport path for transporting the carrier in a forward direction and a second transport path for transporting the carrier in a return direction opposite to the forward direction.

[0005] The functionality of a display device typically depends on the coating thickness of the material, which has to be within a predetermined range. For obtaining high resolution display devices, technical challenges with respect to the deposition of materials need to be mastered. In particular, an accurate and smooth transportation of the substrate carriers and/or mask carriers through a vacuum system is challenging. For instance, particle generation due to wear of moving parts can cause a deterioration in the manufacturing process. Accordingly, there is a demand for transportation of carriers in processing systems with reduced or minimized particle generation. Further, challenges are, for example, to provide robust carrier transport systems for high temperature vacuum environments at low costs.

[0006] Accordingly, there is a continuing demand for improved apparatuses and methods for transportation of carriers as well as for providing improved vacuum processing systems which overcome at least some problems of the state of the art.

SUMMARY

[0007] In light of the above, a magnetic levitation system for transporting a carrier, a carrier for a magnetic levitation system, an apparatus for transportation of a carrier, a processing system for vertically processing a substrate, and a method of switching a transport path of a carrier according to the independent claims are provided. Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings.

[0008] According to an aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system includes one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier in a carrier transportation space. The one or more first actuators are arranged above the carrier transportation space. Additionally, the magnetic levitation includes a drive unit having one or more second actuators for moving the carrier in the transport direction. The one or more second actuators are laterally arranged on a lower portion of the carrier transportation space.

[0009] According to another aspect of the present disclosure, a carrier for a magnetic levitation system is provided. The carrier includes a main body for carrying an object. The main body has a first end portion and a second end portion opposite the first end portion. The first end portion includes one or more first magnetic counterparts for interacting with one or more first actuators of one or more magnetic bearings of the magnetic levitation system. The second end portion includes one or more laterally arranged second magnetic counterparts for interacting with one or more second actuators of a laterally arranged drive unit of the magnetic levitation system. Further, the second end portion includes a third magnetic counterpart for interacting with a first passive magnetic bearing of a contactless guiding arrangement of the magnetic levitation system.

[0010] According to a further aspect of the present disclosure, an apparatus for transportation of a carrier in a vacuum chamber is provided. The apparatus includes a first magnetic levitation system provided along a first transport path. The first magnetic levitation system includes a first lower track section and a first upper track section. The first upper track section includes one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier in a first carrier transportation space. The first lower track section includes a drive unit having one or more second actuators for moving the carrier along the first transport path. The one or more second actuators are laterally arranged on a first lower portion of the first carrier transportation space. Additionally, the apparatus includes a second magnetic levitation system provided along a second transport path. The second magnetic levitation system includes a second lower track section and a second upper track section. The second upper track section includes one or more further magnetic bearings having one or more further first actuators for contactlessly holding the carrier in a second carrier transportation space. The one or more further first actuators are arranged above the second carrier transportation space. The second lower track section includes a further drive unit having one or more further second actuators for moving the carrier along the second transport path. The one or more further second actuators are laterally arranged on a second lower portion of the second carrier transportation space. Further, the apparatus includes a path switch assembly for moving the carrier away from the first transport path in a path switch direction to at least one of the second transport path and a processing position horizontally offset from the first transport path and the second transport path.

[0011] According to another aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum processing chamber including a processing device. Further, the processing system includes at least one magnetic levitation system according to any embodiments of the present disclosure. Additionally or alternatively, the processing system includes at least one apparatus for transportation of a carrier according to any embodiments of the present disclosure.

[0012] According to a further aspect of the present disclosure, a method of switching a transport path of a carrier is provided. The method includes levitating the carrier by using one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier in a first carrier transportation space of a first transport path. Additionally, the method includes attracting the carrier by using the one or more first actuators to reduce a distance between the one or more first actuators and the carrier. Further, the method includes moving one or more carrier transfer elements of a path switch assembly towards the carrier up to a holding position. Yet further, the method includes lowering the carrier by using the one or more first actuators to establish a contact between the one or more carrier transfer elements and the carrier. Moreover, the method includes moving at least one of a laterally arranged drive unit and a laterally arranged contactless guiding arrangement away from a first lower portion of the first carrier transportation space. Furthermore, the method includes moving the carrier from the first transport path to a second transport path horizontally offset from the first transport path.

[0013] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0014] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic view of a magnetic levitation system according to embodiments described herein;

FIG. 2A shows a lower portion of a magnetic levitation system according to some embodiments described herein;

FIG. 2B shows a lower portion of a magnetic levitation system according to some other embodiments described herein;

FIG. 3A shows a lower portion of a magnetic levitation system including a contactless guiding arrangement according to some embodiments described herein; FIG. 3B shows a lower portion of a magnetic levitation system including a contactless guiding arrangement according to some other embodiments described herein;

FIG. 4 shows a schematic view of a magnetic levitation system according to further embodiments described herein;

FIG. 5 shows an upper portion of a magnetic levitation system according to some embodiments described herein including a side stabilization device and a safety arrangement;

FIG. 6 shows a schematic view of an apparatus for transportation of a carrier according to embodiments described herein;

FIG. 7 shows a schematic view of a processing system for vertically processing a substrate according to embodiments described herein; and

FIGS. 8 A and 8B show flowcharts for illustrating methods of switching a transport path of a carrier according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0015] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0016] With exemplary reference to FIG. 1, a magnetic levitation system 100 for transporting a carrier 10 in a transport direction T according to the present disclosure is described. The transport direction T is perpendicular to the paper plane of FIG. 1. [0017] According to embodiments which can be combined with any other embodiments described herein, the magnetic levitation system 100 includes one or more magnetic bearings 120 having one or more first actuators 121 for contactlessly holding the carrier 10 in a carrier transportation space 15. The carrier transportation space 15 may be understood as a zone where the carrier is arranged during the transport of the carrier in the transportation direction along a transport path. In particular, as exemplarily shown in FIG. 1, the carrier transportation space can be a vertical carrier transportation space having a height H extending in a vertical direction and a width W extending in a horizontal direction. For instance, the aspect ratio of H/W can be H/W > 5, particularly H/W > 10. As exemplarily shown in FIG. 1, the one or more first actuators 121 can be arranged above the carrier transportation space 15, particularly the one or more first actuators 121 may be attached to an outside surface of an upper chamber wall 212, e.g. of a vacuum chamber. Further, the magnetic levitation system 100 includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction. The one or more second actuators 132 are laterally arranged on a lower portion 15L of the carrier transportation space 15.

[0018] Accordingly, embodiments of the magnetic levitation system as described herein are improved compared to conventional carrier transportation apparatuses, particularly with respect to accurate and smooth transportation of the carriers in high temperature vacuum environments. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. In particular, embodiments of the magnetic levitation system as described herein are more insensitive against manufacturing tolerances, deformation, and thermal expansion. Further, beneficially a simpler integration of the magnetic levitation system into the chamber is provided.

[0019] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms used herein are explained.

[0020] In the present disclosure, a “magnetic levitation system” can be understood as a system configured for holding an object, e.g. a carrier, in a contactless manner by using magnetic force. In the present disclosure, the term “levitating” or“levitation” refers to a state of an object, e.g. a carrier carrying a substrate or a mask, wherein the object floats without mechanical contact or support. Further, moving or transporting an object refers to providing a driving force, e.g. a force in a direction different from the levitation force, wherein the object is moved from one position to another, different position, for example a different position along the transport direction. For example, a carrier carrying a substrate or a mask can be levitated, i.e. by a force counteracting gravity, and can be moved in a direction different from a direction parallel to gravity while being levitated.

[0021] In the present disclosure, the term“contactless” can be understood in the sense that a weight, e.g. the weight of a carrier, particularly the weight of a carrier carrying a substrate or a mask, is not held by a mechanical contact or mechanical forces, but is held by a magnetic force. In other words, the term“contactless” as used throughout the description can be understood in that a carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces, i.e. contact forces. As schematically shown in FIG. 4, the carrier 10 is contactlessly held in the carrier transportation space 15 between an upper chamber wall 212 and a bottom chamber wall 211. In particular, the upper chamber wall 212 can be a ceiling of a vacuum chamber. Accordingly, the bottom chamber wall 211 can be the bottom wall of a vacuum chamber.

[0022] In the present disclosure, a“carrier” can be understood as a carrier configured for holding a substrate, also referred to as substrate carrier. For instance, the carrier can be a substrate carrier for carrying a large area substrate. It is to be understood that the embodiments of the magnetic levitation system may also be used for other carrier types, e.g. mask carriers. Accordingly, additionally or alternatively, the carrier may be a carrier configured for carrying a mask.

[0023] In the present disclosure, the term“substrate” may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto, and the term“substrate” may also embrace flexible substrates such as a web or a foil. The term“substantially inflexible” is understood to distinguish over “flexible”. Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda- lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.

[0024] In the present disclosure, the term“large area substrate” refers to a substrate having a main surface with an area of 0.5 m² or larger, particularly of 1 m² or larger. In some embodiments, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m² of substrate (0.73x0.92m), GEN 5, which corresponds to about 1.4 m² of substrate (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m² of substrate (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7 m² of substrate (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m² of substrate (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. Further, the substrate thickness can be from 0.1 to 1.8 mm, particularly about 0.9 mm or below, such as 0.7 mm or 0.5.

[0025] In the present disclosure, the term“transport direction” can be understood as the direction in which the carrier is transported along a transport path. Typically, the transport direction can be an essentially horizontal direction.

[0026] In the present disclosure, a“magnetic bearing” can be understood as a bearing configured for holding or supporting an object, e.g. a carrier as described herein, in a contactless manner, i.e. without physical contact. Accordingly, the one or more magnetic bearings as described herein may be configured to generate a magnetic force acting on the carrier, such that the carrier is contactlessly held at a predetermined distance from a base structure, e.g. the upper chamber wall 212 as shown in FIG. 1. In particular, the one or more magnetic bearings 120 can be configured to generate a magnetic force acting in an essentially vertical direction V such that the vertical width of a gap 122 between the upper chamber wall 212 and the carrier 10 can be maintained essentially constant.

[0027] Some embodiments described herein involve the notion of a“vertical direction”. A vertical direction is considered a direction substantially parallel to the direction along which the force of gravity extends. A vertical direction may deviate from exact verticality (the latter being defined by the gravitational force) by an angle of, e.g., up to 15 degrees. Further, some embodiments described herein may involve the notion of a “lateral direction”. A lateral direction is to be understood to distinguish over a vertical direction. A lateral direction may be perpendicular or substantially perpendicular to the exact vertical direction defined by gravity.

[0028] In the present disclosure, a“first actuator” of the one or more magnetic bearings can be understood as an active and controllable element of the magnetic bearings. In particular, the one or more first actuators may include a controllable magnet such as an electromagnet. The magnetic field of the one or more first actuators may be actively controllable for maintaining and / or adjusting the distance between the upper chamber wall 212 and the carrier 10. In other words, a“first actuator” of the one or more magnetic bearings can be understood as an element with a controllable and adjustable magnetic field to provide a magnetic levitation force acting on the carrier.

[0029] Accordingly, the one or more first actuators 121 are configured for contactlessly holding the carrier. As exemplarily shown in FIG. 1, one or more first magnetic counterparts 181 may be arranged at the carrier 10, particularly at a top part of the carrier. The one or more first magnetic counterparts 181 of the carrier may magnetically interact with the one or more first actuators 121 of the one or more magnetic bearings 120. In particular, the one or more first magnetic counterparts 181 can be passive magnetic elements. For instance, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties. [0030] For example, an output parameter such as an electric current which is applied to the one or more first actuators may be controlled depending on an input parameter such as a distance between the upper chamber wall 212 and the carrier 10. For instance, a distance (e.g. the gap 122 indicated in FIG. 1) between the upper chamber wall 212 and the carrier 10 may be measured by a distance sensor, and the magnetic field strength of the one or more first actuators may be set depending on the measured distance. In particular, the magnetic field strength may be increased in the case of a distance above a predetermined threshold value, and the magnetic field strength may be decreased in the case of a distance below the threshold value. The one or more first actuators may be controlled in a closed loop or feedback control.

[0031] In the present disclosure, a“drive unit” can be understood as a unit configured for moving an object, e.g. a carrier as described herein, in a contactless manner in the transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Accordingly, the drive unit can be a linear motor. For example, the linear motor can be an iron-core linear motor. Alternatively, the linear motor can be an ironless linear motor. An ironless linear motor can be beneficial for avoiding a torsional moment on the carrier caused by vertical forces due to possible interaction of the passive magnetic elements of the carrier and the iron-core of the linear motor. According to some embodiments, which can be combined with other embodiments described herein, the drive unit may include a sequence of motors and iron elements. For instance, the drive unit may include an alternating sequence of motors and iron elements. In particular, the alternating sequence of motors and iron elements may be provided by alternating individual motors with individual iron elements. Alternatively, the alternating sequence of motors and iron elements may be provided by groups of motors and alternating groups of iron elements. More specifically, the groups of motors may include two, three, four, or more motors. The alternating groups of iron elements may include two, three, four, or more iron elements. Providing a drive unit with an alternating sequence of motors and iron elements can be beneficial for improving the balance of the attraction of the carrier magnets (e.g. the second magnetic counterparts 182 and/or the third magnetic counterpart 183 and/or the fourth magnetic counterpart 184 as described herein) to the motors, particularly the iron cores of the motors. In particular, the drive unit can be configured to provide for a stable balance of forces between the attracting motors and carrier magnets (e.g. the second magnetic counterparts 182 and/or the third magnetic counterpart 183 and/or the fourth magnetic counterpart 184 as described herein).

[0032] More specifically, as exemplarily shown in FIG. 1, the drive unit typically includes one or more second actuators configured for contactlessly moving the carrier in the transport direction. The one or more second actuators can be one or more controllable magnets, e.g. electromagnets. Accordingly, the one or more second actuators may be actively controllable for exerting a moving force on the carrier in the transport direction. As exemplarily shown in FIG. 1, one or more second magnetic counterparts 182 may be arranged at the carrier 10, particularly at a lower lateral portion of the carrier. More specifically, the one or more second magnetic counterparts 182 can be arranged at or attached to a lateral surface 10L of the lower portion of the carrier. Typically, the lateral surface 10L on which the one or more second magnetic counterparts 182 are provided faces an inner side of a chamber side wall 213, as exemplarily shown in FIGS. 2A, 3 A and 3B. The one or more second magnetic counterparts 182 of the carrier may magnetically interact with the one or more second actuators 132 of the drive unit 130. In particular, the one or more second magnetic counterparts 182 can be passive magnetic elements. For instance, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0033] According to some embodiments, which can be combined with other embodiments described herein, the one or more first actuators 121 and the one or more second actuators 132 are arranged in an atmospheric space 110, as exemplarily shown in FIG. 4. The expression“atmospheric space” can be understood as a space having atmospheric pressure conditions, i.e. approximately 1.0 bar. For example, the atmospheric space may be a space provided outside the vacuum chamber. Alternatively, the atmospheric space can be provided by an atmospheric box or atmospheric container provided inside the vacuum chamber. [0034] In particular, the one or more first actuators 121 can be arranged in an atmospheric space 110 by being attached to an outside surface of an upper chamber wall 212, as exemplarily shown FIGS. 1 and 4. Accordingly, beneficially the active elements of the one or more magnetic bearings are arranged at a location which is well accessible for mounting or maintenance, resulting in a reduction of costs. According to an example, the outside surface of the upper chamber wall 212 may include receptions for receiving the one or more first actuators 121, as exemplarily shown in FIG. 1.

[0035] Alternatively, the one or more first actuators can be arranged in an atmospheric space by being arranged in an atmospheric box or atmospheric container (not explicitly shown).

[0036] With exemplary reference to FIGS. 2A and 4, the one or more second actuators 132 can be arranged in an atmospheric space 110 by being attached to an outside surface of a chamber side wall 213. Accordingly, beneficially the drive unit is arranged at a location which is well accessible for mounting or maintenance, resulting in a reduction of costs.

[0037] Alternatively, as exemplarily shown in FIG. 2B, the one or more second actuators 132 can be arranged in an atmospheric space 110 by being arranged in an atmospheric box 50 or atmospheric container.

[0038] As exemplarily shown in FIGS. 3A, 3B and 4, according to some embodiments, which can be combined with other embodiments described herein, the magnetic levitation system further includes a contactless guiding arrangement 140 for guiding the carrier 10 in the transport direction T. Typically, the contactless guiding arrangement 140 is laterally arranged on a lower portion 15L of the carrier transportation space 15.

[0039] For instance, the contactless guiding arrangement 140 can include one or more passive magnetic bearings 125. In particular, as exemplarily shown in FIGS. 3A and 4, the one or more passive magnetic bearings 125 can be vertically arranged. More specifically, the one or more passive magnetic bearings 125 can be attached to an outside surface of the chamber side wall 213 at a position suitable for magnetic interaction with a third magnetic counterpart 183 of the carrier. Accordingly, the one or more passive magnetic bearings 125 are configured for providing a magnetic force acting on the carrier in a horizontal direction, particularly a lateral direction L, as exemplarily indicated in FIG. 4.

[0040] With exemplary reference to FIG. 3B, according to some embodiments which can be combined with other embodiments described herein, the contactless guiding arrangement 140 may include a first passive magnetic bearing 125A arranged above the drive unit 130 and/or a second passive magnetic bearing 125B arranged below the drive unit 130. In particular, the first passive magnetic bearing 125A and/or a second passive magnetic bearing 125B can be attached to an outside surface of the chamber side wall 213. More specifically, the first passive magnetic bearing 125A can be provided at a position suitable for magnetic interaction with the third magnetic counterpart 183. The second passive magnetic bearing 125B can be provided at a position suitable for magnetic interaction with a fourth magnetic counterpart 184 of the carrier.

[0041] Typically, the third magnetic counterpart 183 and/or the fourth magnetic counterpart 184 include a passive magnetic element. In FIGS. 3 A, 3B and 4, a north pole N portion of the passive magnetic elements is schematically indicted by the hatching pattern. A south pole portion of the passive magnetic elements is represented by the blank element adjacent to the north pole N portion.

[0042] As exemplarily shown in FIGS. 3 A, typically the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 are arranged such that a north pole portion of the passive magnetic element of the third magnetic counterpart 183 faces a north pole portion of the passive magnetic element of the one or more passive magnetic bearings 125. Alternatively, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that a south pole portion of the passive magnetic element of the third magnetic counterpart 183 faces a south pole portion of the passive magnetic element of the one or more passive magnetic bearings 125. Accordingly, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that repulsive magnetic forces act between the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125.

[0043] With exemplary reference to FIG. 3A, according to embodiments which can be combined with other embodiments described herein, the vertical extension of the one or more passive magnetic bearings 125 may be larger than the vertical extension of the third magnetic counterpart 183. For instance, compared to the vertical extension of the third magnetic counterpart 183, the vertical extension of the one or more passive magnetic bearings 125 may be larger by a factor X selected from the range of 1,5 < X < 10, particularly 2 < X < 6. For example, the one or more passive magnetic bearings 125 may include three magnetic elements arranged in the vertical direction providing a vertical interaction length of approximately 100 mm. In particular, the vertical extension and position of the one or more passive magnetic bearings 125 can be selected such that the third magnetic counterpart 183 of the carrier can interact with the one or more passive magnetic bearings 125 over a vertical range R of 10 mm < R < 30 mm, particularly 15 mm < R < 25 mm, for example R ~ 20 mm. In other words, the position and dimension of the one or more passive magnetic bearings 125 in relation to the position and dimension of the third magnetic counterpart 183 may be selected to allow for magnetic interaction upon carrier displacement in a vertical range R of 10 mm < R < 30 mm, particularly 15 mm < R < 25 mm, for example R ~ 20 mm.

[0044] According to an example, the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 may be configured for providing a rejection force of 117 N at a lateral distance of approximately 5 mm. According to an exemplary configuration, the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 may be configured for providing a maximal rejection force of 550 N at a lateral distance of approximately 5 mm, and/or minimal force of 50 N at a lateral distance of approximately 8 mm.

[0045] The configuration as described for the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 may be applied to the configuration of the first passive magnetic bearing 125 A, the second passive magnetic bearing 125B, and the fourth magnetic counterpart 184 of the carrier.

[0046] Accordingly, beneficially a contactless lateral guiding of the carrier can be provided. Further, it is to be noted that providing a passive guiding arrangement is particularly well suited for providing a robust carrier transport in high temperature vacuum environments at low costs.

[0047] In the present disclosure, a“passive magnetic bearing” can be understood as a bearing having passive magnetic elements, which are not subject to active control or adjustment, at least not during operation of the apparatus. In particular, a passive magnetic bearing may be adapted for generating a magnetic field, e.g. a static magnetic field. In other words, a passive magnetic bearing may not be configured for generating an adjustable magnetic field. For instance, the magnetic elements of the one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0048] Accordingly, a“passive magnetic element” or“passive magnet” as used herein may be understood as a magnet which is not actively controlled, e.g. via a feedback control. For example, no output parameter such as a magnetic field strength of the passive magnet is controlled depending on an input parameter such as a distance. The“passive magnetic element” or“passive magnet” may rather provide a side stabilization of the carrier without any feedback control. For example, a“passive magnetic element” or“passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a“passive magnetic element” or “passive magnet” may include one or more electromagnets which may not be actively controlled.

[0049] With exemplary reference to FIG. 4, according to some embodiments which can be combined with other embodiments described herein, the magnetic levitation system further includes at least one side stabilization device 160 with at least one stabilization magnet 161 configured to apply a restoring force F on the carrier 10 in a lateral direction L transverse to the transport direction T. For example, the at least one stabilization magnet 161 can be arranged above the carrier transportation space 15, particularly in an atmospheric space. In particular, the at least one stabilization magnet 161 can be attached to an outside surface of the upper chamber wall 212. Typically, the at least one stabilization magnet 161 can be arranged at a lateral distance with respect to the one or more first actuators 121.

[0050] Accordingly, beneficially the side stabilization device 160 may stabilize the carrier at a predetermined lateral position by applying a restoring force on the carrier 10 in the case of a lateral displacement of the carrier. The restoring force F pushes or pulls the carrier 10 back to the predetermined lateral position. Accordingly, beneficially the side stabilization device 160 may generate a stabilization force configured to counteract a displacement of the carrier from the carrier transportation space 15 in the lateral direction L. In other words, the side stabilization device 160 may be configured to generate a restoring force F which pushes and/or pulls the carrier back into the carrier transportation space 15, when the carrier is displaced in the lateral direction L from a predetermined lateral position or equilibrium position that is exemplarily depicted in FIG. 4.

[0051] As exemplarily shown in FIG. 4, the at least one stabilization magnet 161 may be a passive magnet having a north pole N and a south pole S. In some embodiments, the at least one stabilization magnet may include a plurality of passive magnets which can be arranged one after the other in the transport direction. Typically, the direction of the magnetic field lines inside the at least one stabilization magnet (which run from the south pole to the north pole inside the magnet) may essentially correspond to the lateral direction L.

[0052] With exemplary reference to FIG. 4, at least one carrier stabilization magnet 162 may be attached to the carrier 10 in such a way that a displacement of the carrier 10 from the carrier transportation space 15 in the lateral direction L leads to repulsive magnetic force between the at least one stabilization magnet 161 of the side stabilization device 160 and the at least one carrier stabilization magnet 162 counteracting the displacement. Accordingly, beneficially the carrier remains in the equilibrium position that is shown in FIG. 4 during the holding and during the transport of the carrier along the transport path. [0053] As exemplarily shown in FIG. 4, the at least one carrier stabilization magnet 162 can be a passive magnet having a north pole N and a south pole S, which are arranged such that the direction of the magnetic field lines inside the at least one carrier stabilization magnet 162 essentially correspond to the lateral direction L.

[0054] In particular, the least one carrier stabilization magnet 162 can be arranged in an inverse orientation as compared to the at least one stabilization magnet 161 of the side stabilization device 160, such that the north pole N of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the south pole S of the at least one stabilization magnet 161, and the south pole S of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the north pole N of the at least one stabilization magnet 161 of the side stabilization device 160, when the carrier is arranged in the equilibrium position. When the carrier is displaced from the equilibrium position in a first lateral direction (e.g. toward the right side of FIG. 4), the north pole N of the at least one carrier stabilization magnet 162 approaches the north pole N of the at least one stabilization magnet 161 of the side stabilization device 160 which leads to a restoring force, urging the carrier back toward the equilibrium position. When the carrier is displaced from the equilibrium position in a second (opposite) lateral direction (e.g. toward the left side of FIG. 4), the south pole S of the at least one carrier stabilization magnet 162 approaches the south pole S of the at least one stabilization magnet 161 of the side stabilization device 160 which leads to a restoring force, urging the carrier back toward the equilibrium position. Accordingly, the side stabilization device 160 stabilizes the carrier at a predetermined lateral position such that lateral movements of the carrier can be reduced or prevented.

[0055] Further, with exemplary reference to FIG. 4, according to some embodiments which can be combined with other embodiments described herein, the magnetic levitation system further includes a safety arrangement 170. Typically, the safety arrangement 170 includes a lateral guard guiding element 171 provided at at least one side of the carrier transportation space 15.

[0056] For instance, the lateral guard guiding element 171 may extend from an inside surface of the upper chamber wall. In particular, as exemplarily shown in FIGS. 4 and 5, the lateral guard guiding element 171 may be spaced apart from the one or more first actuators 121 and from the one or more first magnetic counterparts 181. For example, the lateral guard guiding element 171 can be implemented as a guiding rail or as a plurality of guiding pins in a row.

[0057] As exemplarily shown in FIG. 5, additionally or alternatively the safety arrangement 170 may include a safety roller 172 for providing a vertical safety support for the carrier 10, e.g. in the case that the one or more first actuators 121 are deactivated. Typically, the safety roller 172 is connected to a holder 173 attached to an inside surface of the upper chamber wall 212. The holder holding the safety roller may also function as a lateral guard guiding element.

[0058] With exemplary reference to FIG. 5, according to some embodiments which can be combined with other embodiments described herein, a protective element 163, e.g. a protective strip, may be attached to the least one carrier stabilization magnet 162. In particular, the protective element 163 can be attached to a side of the least one carrier stabilization magnet 162 facing the holder 173. As exemplarily shown in FIG. 5, according to some embodiments, which can be combined with other embodiments described herein, the magnetic levitation system may include an adjustment device 155 configured to adjust one or more of the group consisting of a position of at least one stabilization magnet 161 of a side stabilization device 160 with respect to the carrier transportation space 15, an orientation or angular position of the at least one stabilization magnet 161, a position of a lateral guard guiding element 171, and an orientation or angular position of the lateral guard guiding element 171. In particular, the adjustment device 155 can be configured to move the at least one stabilization magnet 161 and/or configured to move the lateral guard guiding element 171 in a vertical direction, as exemplarily indicated by the arrows depicted in FIG. 5.

[0059] Accordingly, the adjustment device 155 can alter the state of the at least one stabilization magnet 161 in such a way that the restoring force F exerted by the side stabilization device on the carrier 10 is changed, particularly reduced or switched off completely. After a reduction or deactivation of the restoring force F exerted on the carrier by the side stabilization device, the carrier can be moved away from the side stabilization device in the lateral direction, e.g. toward a second transport path or toward a processing device. Similarly, when a carrier has moved into a carrier transportation space 15, e.g. of a second transport track in the lateral direction, the restoring force F exerted by a corresponding side stabilization device can be activated or increased via the adjustment device 155. The carrier 10 is then reliably stabilized in the lateral direction L. Thereafter, the carrier 10 can be contactlessly transported along a further transport track, e.g. a second transport track as described herein, by a further transport system, e.g. a second transport system as described herein, while being laterally stabilized by the side stabilization device.

[0060] Accordingly, by enabling an adjustment of the restoring force F via the adjustment device 155, the carrier can be reliably held and guided along the transport path in a transport state of the side stabilization device, and the carrier can be moved away from the transport path in the lateral direction L in a track switch state of the side stabilization device. Further, the restoring force F exerted on a carrier in the case of a displacement of the carrier in the lateral direction L can be adjusted.

[0061] Further, with exemplary reference to FIGS. 5 and 6, it is to be understood that the adjustment device 155 can be configured to move the lateral guard guiding element 171 such that the carrier can be moved in a lateral direction, e.g. from a first transport path Tl to a second transport path T2. For instance, the lateral guard guiding element 171 may be vertically moved upwards to allow for a lateral movement of the carrier. Further, as shown in FIGS. 5 and 6, a protective bellow 174 for ensuring a vacuum sealing between the movable lateral guard guiding element 171 and the vacuum chamber may be provided. Alternatively, the lateral guard guiding element 171 may be rotated (not explicitly shown), e.g. around an axis extending in the lateral direction or around an axis extending in the transport direction, to allow for a lateral movement of the carrier.

[0062] With exemplary reference to FIG. 4, it is to be understood that typically the one or more first actuators 121 are centrally arranged above a center of gravity G of the carrier 10 to be transported. In particular, with reference to the embodiment of FIG. 4, the expression“centrally arranged above the center of gravity G of the carrier” can be understood in that a vertical plane 111 extending through the center of gravity G of the carrier also extends through the one or more first actuators 121. In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect with the one or more first actuators 121. In particular, the vertical plane 111 may approximately intersect with a center of the one or more first actuators 121, e.g. with a deviation of ± 10% from the center of the one or more first actuators. According to an example, the vertical plane 111 may represent a plane of symmetry for the one or more first actuators 121.

[0063] With exemplary reference to FIG. 4, a carrier 10 according to the present disclosure includes a main body 13 for carrying an object, e.g. a substrate or a mask. For instance, the main body 13 can be implemented as a carrier plate configured for holding a substrate or a mask. Alternatively, the main body 13 can be implemented as a carrier frame configured for holding a substrate or a mask. As exemplarily shown in FIG. 4, the main body 13 has a first end 11 and a second end 12. The second end 12 is opposite the first end 11. The first end 11 of the main body 13 includes one or more first magnetic counterparts 181 for interacting with one or more first actuators 121 of one or more magnetic bearings 120 of the magnetic levitation system. The second end portion 12 includes one or more laterally arranged second magnetic counterparts 182 for interacting with one or more second actuators 132 of a laterally arranged drive unit 130 of the magnetic levitation system. Further, the second end portion 12 typically includes a third magnetic counterpart 183 for interacting with a first passive magnetic bearing 125A of a contactless guiding arrangement 140 of the magnetic levitation system. In particular, the one or more first magnetic counterparts 181 and the third magnetic counterpart 183 are typically arranged on the same side of the second end portion 12 of the carrier, particularly facing an inner side of a chamber side wall 213 when employed in combination with a magnetic levitation system as described herein.

[0064] As exemplarily shown in FIG. 3B, according to some embodiments which can be combined with any other embodiments described herein, the third magnetic counterpart 183 includes a first interacting surface 183 A for interacting with the first passive magnetic bearing 125A. In particular, as shown in FIG. 4, an orientation of the first interacting surface 183 A of the third magnetic counterpart 183 typically is perpendicular to a top surface of the one or more first magnetic counterparts 181.

[0065] Further, with exemplary reference to FIG. 3B, according to embodiments which can be combined with other embodiments described herein, the second end portion 12 of the carrier 10 may include a fourth magnetic counterpart 184 for interacting with a second passive magnetic bearing 125B of the contactless guiding arrangement 140 of the magnetic levitation system. In particular, as shown in FIG. 3B, the fourth magnetic counterpart 184 has a second interacting surface 184B for interacting with the second passive magnetic bearing 125B. More specifically, an orientation of the second interacting surface 184B typically is perpendicular to a top surface of the one or more first magnetic counterparts 181.

[0066] From FIG. 4, it is to be understood that the dimension of the carrier typically corresponds to the dimension of the carrier transportation space 15. Accordingly, the carrier may have a height He corresponding to the height H of the carrier transportation space 15. Further, the carrier may have a width Wc corresponding to the width W of the carrier transportation space 15. Accordingly, the aspect ratio of Hc/Wc can be Hc/Wc ³ 5, particularly Hc/W c ³ 10.

[0067] According to some embodiments which can be combined with any other embodiments described herein, at least one carrier stabilization magnet 162 may be attached to the first end 11 of the carrier 10, as exemplarily shown in FIGS. 4 and 5. Further, a protective element 163, e.g. a protective strip, may be attached to the least one carrier stabilization magnet 162, as exemplarily described with reference to FIG. 5.

[0068] Further, with exemplary reference to FIG. 7, according to some embodiments which can be combined with any other embodiments described herein, the carrier may be provided with coupling elements adapted to be coupled to a carrier holding portion 153 of one or more carrier transfer elements 152 of a path switch assembly 150. For example, in FIG. 7 the coupling elements of the carrier are schematically illustrated as recesses. [0069] With exemplary reference to FIG. 6, an apparatus for transportation of a carrier 10 in a vacuum chamber is described. According to embodiments which can be combined with other embodiments described herein, the apparatus includes a first magnetic levitation system 101 provided along a first transport path Tl. The first magnetic levitation system 101 includes a first lower track section 11L and a first upper track section 11U. The first upper track section 11U includes one or more magnetic bearings 120 having one or more first actuators 121 for contactlessly holding the carrier 10 in a first carrier transportation space 15 A. The first lower track section 11L includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 along the first transport path Tl. The one or more second actuators 132 are laterally arranged of a first lower portion 15AL of the first carrier transportation space 15 A. In particular, the one or more second actuators 132 can be arranged in an atmospheric space 110, e.g. by being attached to an outside surface of a chamber side wall 213 as exemplarily shown in FIG. 6.

[0070] Additionally, as exemplarily shown in FIG. 6, the apparatus includes a second magnetic levitation system 102 provided along a second transport path T2. The second magnetic levitation system 102 includes a second lower track section 14L and a second upper track section 14U. The second upper track section 14U includes one or more further magnetic bearings 120) having one or more further first actuators 121B for contactlessly holding the carrier 10 in a second carrier transportation space 15B. The one or more further first actuators 121B are arranged above the second carrier transportation space 15B. The second lower track section 14L includes a further drive unit 130B having one or more further second actuators 132B for moving the carrier 10 along the second transport path T2. The one or more further second actuators 132B are laterally arranged on a second lower portion 15BL of the second carrier transportation space 15B. In particular, the further drive unit 130B can be movable in a vertical direction, as exemplarily indicated by arrow A2 in FIG. 6. More specifically, the one or more further second actuators 132B can be arranged in an atmospheric space 110 by being arranged in an atmospheric box 50, as exemplarily shown in FIG. 6. The atmospheric box 50 with the further drive unit 130B can be coupled to an actuator configured for vertically moving ( indicated by arrow A2 in FIG. 6) the atmospheric box 50 with the further drive unit 130B. According to some embodiments which can be combined with other embodiments described herein, a contactless guiding arrangement 140 can be attached to the atmospheric box 50. Accordingly, by moving the atmospheric box 50, the contactless guiding arrangement 140 can be moved.

[0071] From FIG. 6 it is to be understood that the first magnetic levitation system 101 providing the first transport path Tl may be provided next to the second magnetic levitation system 102 providing the second transport path T2. In particular, the second magnetic levitation system 102 is horizontally offset from the first magnetic levitation system 101. Accordingly, typically the second transport path T2 is horizontally offset from the first transport path Tl. As can be seen from FIG. 6, the components of the first magnetic levitation system 101 may substantially correspond to the components of the second magnetic levitation system 102. Accordingly, it is to be understood that the features as described with reference to FIGS. 1 to 5 can also be applied to the exemplary embodiment shown in FIG. 6.

[0072] Further, as exemplarily shown in FIG. 6, the apparatus includes a path switch assembly 150 for moving the carrier away from the first transport path Tl in a path switch direction S to at least one of the second transport path T2 and a processing position T3 (shown in FIG. 7) horizontally offset from the first transport path Tl and the second transport path T2.

[0073] With exemplary reference to FIG. 7, according to some embodiments, which can be combined with other embodiments described herein, the path switch assembly 150 includes one or more carrier transfer elements 152. For instance, the one or more carrier transfer elements 152 can be elongated elements extending in the path switch direction S. As exemplarily indicated by the double sided arrows, the one or more carrier transfer elements 152 are movable in the path switch direction S for transferring the carrier 10 in the path switch direction S. In particular, the one or more carrier transfer elements 152 can be connected to a transfer actuator 154. For instance, the transfer actuator 154 can be provided outside the vacuum chamber 210. Further, protective bellows 156 may be provided for ensuring a vacuum sealing between the one or more carrier transfer elements 152 and the vacuum chamber. For example, FIG. 7 shows two carrier transfer elements each being connected to a separate transfer actuator, wherein respective bellows are provided. However, it is to be understood that alternatively more than two carrier transfer elements may be provided. Further, it is to be understood that according to an alternative configuration, the carrier transfer elements may be connected or coupled to a common transfer actuator.

[0074] As schematically indicated in FIG. 7, according to some embodiments which can be combined with other embodiments described herein, the one or more carrier transfer elements 152 include a carrier holding portion 153 for holding the carrier 10. In particular, the carrier holding portion 153 can be adapted to be coupled to respective coupling elements provided at the carrier. For example, in FIG. 7 the coupling elements of the carrier are schematically illustrated as recesses. It is to be understood that the carrier holding portion 153 and the coupling elements of the carrier can have other configurations which are configured for coupling the carrier holding portion of the carrier transfer elements to the carrier.

[0075] Further, according to some embodiments which can be combined with any other embodiments described herein, the upper chamber wall may be implemented as a separate plate element, particularly a tub-like plate element. Accordingly, beneficially the one or more first actuators of the one or more magnetic bearings can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing the upper chamber wall with pre-mounted one or more first actuators may facilitate the assembly procedure and can reduce the costs. Accordingly, compared to the state of the art, beneficially a simpler interface to the chamber is provided.

[0076] With exemplary reference to FIG. 7, a processing system 200 for vertically processing a substrate according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the processing system 200 includes at least one vacuum chamber 210, particularly a vacuum processing chamber, including a processing device 205. In particular, typically the processing device 205 is arranged in the vacuum processing chamber. The processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source. Further, as exemplarily shown in FIG. 7, a mask 206 (e.g. an edge exclusion mask) may be provided between a processing position T3 and the processing device 205.

[0077] Further, as exemplarily shown in FIG. 7, the processing system 200 includes at least one magnetic levitation system 100 according to any of the embodiments described herein. Additionally or alternatively, the processing system 200 may include at least one apparatus for transportation of a carrier in a vacuum chamber, as exemplarily described with reference to FIG. 6.

[0078] The term“vacuum” can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10 ⁵ mbar and about 10 ⁸ mbar, more typically between 10 ⁵ mbar and 10 ⁷ mbar, and even more typically between about 10 ⁶ mbar and about 10 ⁷ mbar. According to some embodiments, the pressure in the vacuum chamber may be considered to be either the partial pressure of the evaporated material within the vacuum chamber or the total pressure, which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber. In some embodiments, the total pressure in the vacuum chamber may range from about 10 ⁴ mbar to about 10 ⁷ mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like). Accordingly, the vacuum chamber can be a“vacuum deposition chamber”, i.e. a vacuum chamber configured for vacuum deposition.

[0079] With exemplary reference to the flowchart shown in FIG. 8A, a method of switching a transport path of a carrier according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the method 300 includes levitating (represented by block 310 in FIG. 8A) the carrier 10 by using one or more magnetic bearings 120 having one or more first actuators 121 for contactlessly holding the carrier 10 in a first carrier transportation space 15A of a first transport path Tl. Additionally, the method 300 includes attracting (represented by block 320 in FIG. 8A) the carrier by using the one or more first actuators 121, particularly of a first magnetic levitation system as described herein, to reduce a distance between the one or more first actuators 121) and the carrier 10. In particular, attracting (represented by block 320 in FIG. 8A) the carrier 10 may include reducing the gap 122 between the upper chamber wall 212 and the carrier 10 by 2/3 of an original vertical width of the gap 122 between the upper chamber wall 212 and the carrier 10. For instance, reducing the gap can include a vertical gap width reduction from 3 mm to 1 mm. Accordingly, a vertical gap width provided between a safety roller 172 and the carrier 10 may be increased by 2/3, e.g. from 3 mm to 5 mm.

[0080] Further, the method 300 includes moving (represented by block 330 in FIG. 8 A) one or more carrier transfer elements 152 of a path switch assembly 150 towards the carrier 10 up to a holding position. In particular, the holding position may be the position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 can hold the carrier when the carrier is lowered in a vertical direction to come into contact with the coupling elements of the carrier. For instance, the coupling elements of the carrier can be recesses, as exemplarily shown in FIG. 7. Accordingly, the holding position can be a position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 has entered the respective recesses of the carrier.

[0081] Additionally, the method 300 includes lowering (represented by block 340 in FIG. 8A) the carrier by using the one or more first actuators 121 to establish a contact between the one or more carrier transfer elements 152 and the carrier 10, particularly the coupling elements of the carrier. For example, when the contact between the one or more carrier transfer elements 152 and the carrier 10 is established, a gap between the safety roller 172, as exemplarily shown in FIG. 5, and the carrier 10 may have a vertical gap width of approximately 1 mm. Accordingly, the vertical distance between the carrier and the upper chamber wall 212 during lateral movement of the carrier may be approximately 5 mm.

[0082] Yet further, the method 300 includes moving (represented by block 350 in FIG. 8 A) at least one of a laterally arranged drive unit 130 and a laterally arranged contactless guiding arrangement 140 away from a first lower portion 15AL of the first carrier transportation space 15 A. [0083] For instance, as exemplarily indicated by arrow Al in FIG. 7, the laterally arranged drive unit 130 and/or the laterally arranged contactless guiding arrangement 140 may be translated or rotated away from the first lower portion 15AL of the first carrier transportation space 15 A. In particular, the drive unit 130 and/or the contactless guiding arrangement 140 may be moved away from the chamber side wall 213.

[0084] Moreover, the method 300 includes moving (represented by block 360 in FIG. 8A) the carrier from the first transport path Tl to a further transport path, e.g. a second transport path T2, horizontally offset from the first transport path. In particular, moving the carrier from the first transport path Tl to the further transport path includes using a path switch assembly 150 as described herein. Further, it is to be understood that the method 300 may also include moving the carrier to a processing position T3 horizontally offset from the first and second transport paths, as exemplarily described with reference to FIG. 7. The carrier can either be directly transported from the first transport path Tl to the processing position T3, or first transported from the first transport path Tl to the second transport path T2 and then to the processing position T3.

[0085] With exemplary reference to FIG. 8B, according to some embodiments which can be combined with other embodiments described herein, the method may further include vertically moving (represented by block 345 in FIG. 8B) at least one element selected from the group consisting of: a further drive unit 130B of second magnetic levitation system 102, an atmospheric box 50 including the further drive unit 130B, and the one or more passive magnetic bearings 125, particularly connected or attached to the atmospheric box 50. In particular, as indicated by arrow A2 in FIG. 6, the further drive unit 130B of second magnetic levitation system 102 and/or the atmospheric box 50 including the further drive unit 130B and/or the one or more passive magnetic bearings 125 connected or attached to the atmospheric box 50 may be moved vertically downwards away from the upper chamber wall 212 in order to allow for a lateral movement of the carrier to the second transport path T2. As exemplarily indicated by arrow A3 in FIG. 7, when the carrier is provided at the second transport path T2, the further drive unit 130B of second magnetic levitation system 102 and/or the atmospheric box 50 including the further drive unit 130B and/or the one or more passive magnetic bearings 125 connected or attached to the atmospheric box 50 may be moved vertically up towards the upper chamber wall 212 in order to provide for the driving and/or guiding function at the second transport path T2.

[0086] Accordingly, it is to be understood that the method 300 of switching a transport path of a carrier is typically conducted by employing at least one of the embodiments of the magnetic levitation system, the embodiments of the carrier, the embodiments of the apparatus for transportation of a carrier, and the processing system as described herein.

[0087] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide for a magnetic levitation system, a carrier for a magnetic levitation system, an apparatus for transportation of a carrier a processing system, and a method of transporting a carrier which are improved with respect to accurate and smooth transportation of the carriers in high temperature vacuum environments, particularly for high quality display manufacturing. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. [0088] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.

Claims

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T), comprising:

one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15), the one or more first actuators (121) are arranged above the carrier transportation space (15), and

a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T), the one or more second actuators (132) are laterally arranged on a lower portion (15L) of the carrier

transportation space (15).

2. The magnetic levitation system (100) of claim 1, wherein the one or more first actuators (121) and the one or more second actuators (132) are arranged in an atmospheric space (110). 3. The magnetic levitation system (100) of claim 1 or 2, wherein the one or more first actuators (121) are attached to an outside surface of an upper chamber wall (212), particularly of a vacuum chamber (210).

4. The magnetic levitation system (100) of any of claims 1 to 3, wherein the one or more second actuators (132) are attached to an outside surface of a chamber side wall (213), particularly of a vacuum chamber (210).

The magnetic levitation system (100) of any of claims 1 to 4, further comprising a contactless guiding arrangement (140) for guiding the carrier (10) in the transport direction (T), the contactless guiding arrangement (140) is laterally arranged on the lower portion (15L) of the carrier transportation space

(15).

6. The magnetic levitation system (100) of claim 5, wherein the contactless guiding arrangement (140) comprises a first passive magnetic bearing (125 A) arranged above the drive unit (130) and/or a second passive magnetic bearing (125B) arranged below the drive unit (130). 7. The magnetic levitation system (100) of any of claims 1 to 5, further

comprising at least one side stabilization device (160) with at least one stabilization magnet (161) arranged above the carrier transportation space, the at least one stabilization magnet (161) is configured to apply a restoring force (F) on the carrier (10) in a lateral direction (L) transverse to the transport direction (T).

8. The magnetic levitation system (100) of any of claims 1 to 7, further

comprising a safety arrangement (170) comprising at least one element of the group consisting of: a lateral guard guiding element (171) provided at at least one side of the carrier transportation space (15), and a safety roller (172) for providing a vertical safety support for the carrier (15).

9. The magnetic levitation system (100) of any of claims 1 to 8, wherein the carrier transportation space (15) is a vertical carrier transportation space having a height (H) extending in a vertical direction and a width (W) extending in a horizontal direction, wherein an aspect ratio of H/W is H/W > 5. 10. A carrier (10) for a magnetic levitation system, comprising a main body (13) for carrying an object, the main body having a first end portion (11) and a second end portion (12) opposite the first end portion (11),

wherein the first end portion (11) comprises one or more first magnetic counterparts (181) for interacting with one or more first actuators (121) of one or more magnetic bearings (120) of the magnetic levitation system,

wherein the second end portion (12) comprises one or more laterally arranged second magnetic counterparts (182) for interacting with one or more second actuators (132) of a laterally arranged drive unit (130) of the magnetic levitation system, and

wherein the second end portion (12) comprises a third magnetic counterpart (183) for interacting with a first passive magnetic bearing (125A) of a contactless guiding arrangement (140) of the magnetic levitation system.

11. The carrier of claim 10, wherein the third magnetic counterpart (183) has a first interacting surface (183 A) for interacting with the first passive magnetic bearing (125 A), wherein an orientation of the first interacting surface (183A) is perpendicular to a top surface of the one or more first magnetic counterparts (181).

12. The carrier of claim 10 or 11, wherein the second end portion (12) comprises a fourth magnetic counterpart (184) for interacting with a second passive magnetic bearing (125B) of the contactless guiding arrangement (140) of the magnetic levitation system, particularly wherein the fourth magnetic counterpart (184) has a second interacting surface (184B) for interacting with the second passive magnetic bearing (125B), and wherein an orientation of the second interacting surface (184B) is perpendicular to a top surface of the one or more first magnetic counterparts (181).

13. The carrier of any of claims 10 to 12, further comprising at least one carrier stabilization magnet (162) attached to the first end portion (11) of the carrier (10).

14. An apparatus for transportation of a carrier (10) in a vacuum chamber (210), comprising:

a first magnetic levitation system (101) provided along a first transport path (Tl) and comprising a first lower track section (11L) and a first upper track section (11U), the first upper track section (11U) comprises one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a first carrier transportation space (15A), the first lower track section (11L) comprises a drive unit (130) having one or more second actuators (132) for moving the carrier (10) along the first transport path (Tl), the one or more second actuators (132) are laterally arranged on a first lower portion (15AL) of the first carrier transportation space (15A);

a second magnetic levitation system (102) provided along a second transport path (T2) and comprising a second lower track section (14L) and a second upper track section (14U),

the second upper track section (14U) comprises one or more further magnetic bearings (120B) having one or more further first actuators (121B) for contactlessly holding the carrier (10) in a second carrier transportation space (15B), the one or more further first actuators (121B) are arranged above the second carrier transportation space (15B), the second lower track section (14L) comprises a further drive unit (130B) having one or more further second actuators (132B) for moving the carrier (10) along the second transport path (T2), the one or more further second actuators (132B) are laterally arranged on a second lower portion (15BL) of the second carrier transportation space (15B); and

a path switch assembly (150) for moving the carrier away from the first transport path (Tl) in a path switch direction (S) to at least one of the second transport path (T2) and a processing position (T3) horizontally offset from the first transport path (Tl) and the second transport path (T2).

15. The apparatus of claim 14, wherein the further drive unit (130B) is movable in a vertical direction.

16. A processing system (200) for vertically processing a substrate, comprising: at least one vacuum processing chamber comprising a processing device (205), and at least one magnetic levitation system (100) according to any of claims 1 to 9; and/or

at least one apparatus for transportation of a carrier according to any of claims 14 or 15. 17. A method (300) of switching a transport path of a carrier, comprising:

levitating (310) the carrier (10) by using one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a first carrier transportation space (15A) of a first transport path (Tl);

attracting (320) the carrier by using the one or more first actuators (121) to reduce a distance between the one or more first actuators (121) and the carrier

(10);

moving (330) one or more carrier transfer elements (152) of a path switch assembly (150) towards the carrier (10) up to a holding position;

lowering (340) the carrier by using the one or more first actuators (121) to establish a contact between the one or more carrier transfer elements (152) and the carrier;

moving (350) at least one of a laterally arranged drive unit (130) and a laterally arranged contactless guiding arrangement (140) away from a first lower portion (15AL) of the first carrier transportation space (15A); and moving (360) the carrier from the first transport path (Tl) to a second transport path (T2) horizontally offset from the first transport path.