KR20230104686A - Carrier transport system, magnetic stabilization unit, carrier, and method for contactless transport of a carrier - Google Patents

Abstract

A carrier transport system (100) for contactless transport of a carrier (10) along a track assembly is described. The carrier transport system includes a passive magnet arrangement 120 for generating a carrier levitation force F _L to counteract the weight force of the carrier; and an active control configured to selectively apply a magnetic stabilizing force F _S to the carrier 10 in an upward direction and a downward direction to maintain the carrier 10 in a predetermined vertical position in the carrier transport space 102. A bi-directional magnetic stabilization unit 140 is included. Also described is a carrier 10 configured to be transported contactlessly with the carrier transport system, as well as a bi-directional magnetic stabilization unit 140 for the carrier transport system.

Description

Carrier transport system, magnetic stabilization unit, carrier, and method for contactless transport of a carrier

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transport of carriers by a magnetic levitation system, particularly carriers used to transport large area substrates. More specifically, embodiments of the present disclosure relate to devices and methods for contactless transport of vertically oriented carriers in a substrate processing apparatus, eg, a vacuum deposition system. In particular, embodiments of the present disclosure relate to carrier transport systems, self-stabilizing units, carriers, and methods for contactless transport of carriers.

[0002] Techniques for depositing a layer on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. Coated substrates can be used in many applications and fields of technology. For example, coated substrates can be used in the field of display devices. Display devices may be used in the manufacture of television screens, computer monitors, cell phones, other hand-held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] Substrates are typically coated in a vacuum deposition system with a plurality of deposition sources and other substrate processing devices. Substrates are typically transported through a vacuum deposition system along a track assembly, eg, from a first deposition module to a second deposition module and/or other substrate processing devices. Substrates may be transported through the vacuum system in an essentially vertical orientation.

[0004] The substrate is typically transported by a carrier, ie a transport device for transporting the substrate. A carrier is typically transported through a vacuum deposition system using a carrier transport system, for example a magnetic levitation system where the carrier's weight is held at least in part by magnetic forces. The magnetic levitation system may be configured to transport a carrier carrying a substrate along a track assembly extending in the transport direction and defining a transport path for the carrier.

[0005] Accurate and smooth transport of carriers through a vacuum system will be difficult, especially if the carriers are oriented vertically during transport. It is possible to support and/or move the carriers with rollers. However, particle generation due to friction between moving parts may lead to deterioration of the manufacturing process. Transporting carriers in a magnetic levitation system can reduce particle generation because mechanical contact between moving parts is reduced. For example, a magnetic levitation system may include magnetic levitation units that generate a carrier levitation force, that is, a magnetic force acting on the carrier in a vertical direction to maintain the weight of the carrier.

[0006] The magnetic levitation units of the magnetic levitation system can be actively controlled. In other words, the upwardly directed levitation force generated by the magnetic levitation units is actively controlled based on the measured gap width to continuously maintain a predetermined distance between the carrier and the actively controlled maglev units. can be guaranteed However, actively controlled magnetic levitation units are typically expensive and complex, and significant efforts may be required to provide sufficient cooling of the large electromagnets used to generate large magnetic levitation forces. In addition, stable position control of the carrier may be difficult due to thermally induced expansion or contraction of the carrier during processing.

[0007] In view of the foregoing, it would be advantageous to provide an improved carrier transport system for transporting carriers by levitation, and improved methods for transporting carriers in a contactless manner in a vacuum system, which overcome at least some of the problems of the prior art. Specifically, it would be beneficial to provide a carrier transport system that allows contactless carrier transport while reducing efforts and improving reliability.

[0008] With respect to the above, carrier transport systems for contactless transport of a carrier along a track assembly in a vacuum chamber according to the independent claims, magnetic stabilizing units for a carrier transport system, by means of a carrier transport system Transported carriers and methods for contactless transport of carriers are provided. Additional aspects, advantages and features are apparent from the dependent claims, detailed description and accompanying drawings.

[0009] According to one aspect, a carrier transport system is provided for contactless transport of a carrier along a track assembly in a transport direction. The carrier transport system includes a passive magnet arrangement for generating a carrier levitation force counteracting the weight force of the carrier; and an actively controlled bi-directional magnetic stabilization unit configured to selectively apply a magnetic stabilization force to the carrier in an upward direction and a downward direction to maintain the carrier in a predetermined vertical position in the carrier transport space.

[0010] In some embodiments, the magnetic stabilization unit is arranged at a first vertical coordinate, and the first permanent magnetic levitation unit of the passive magnet arrangement has a distance of at least 1 m from the first vertical coordinate, for example. Arranged at a second vertical coordinate different from

[0011] According to one aspect, a self-stabilizing unit for a carrier transport system is provided, in particular a self-stabilizing unit for a carrier transport system as described herein. The magnetic stabilization unit includes at least one electromagnet for acting on a first magnetic unit of a carrier arranged in a guiding space between two poles of the at least one electromagnet; a set of permanent magnets generating a magnetic field having opposite directions in the upper and lower regions of the guidance space; gap sensor; and a controller configured to control the at least one electromagnet based on a signal from the gap sensor. The self-stabilizing unit is configured and actively controlled to selectively apply a self-stabilizing force in an upward direction and a downward direction to the carrier to maintain the carrier in a predetermined vertical position in the carrier transport space.

[0012] According to one aspect, a carrier transported by a carrier transport system, in particular a carrier transported by any of the carrier transport systems described herein, is described. The carrier includes a holding section for carrying objects to be transported in the carrier in an essentially vertical orientation; a first magnetic unit projecting laterally from the carrier at a first vertical coordinate and configured to magnetically interact with the actively controlled bidirectional magnetic stabilization unit; and a second magnetic unit arranged on the carrier at a second vertical coordinate and configured to magnetically interact with the first permanent magnetic levitation unit generating a carrier levitation force. The object to be transported can be, for example, a substrate or a mask.

[0013] The carrier optionally comprises a third magnetic unit arranged on the carrier at a third vertical coordinate and configured to interact with a drive unit configured to move the carrier along the track assembly in a transport direction; and a fourth magnetic unit arranged at a fourth vertical coordinate in the carrier and configured to magnetically interact with the second permanent magnetic levitation unit generating the carrier levitation force.

[0014] According to one aspect, a vacuum deposition system for depositing a material on a substrate in a vacuum chamber is provided. The vacuum deposition system includes a vacuum chamber; a carrier transport system according to any of the embodiments described herein; and a deposition source arranged in the vacuum chamber. Optionally, a carrier according to any of the embodiments described herein may also be part of a vacuum deposition system.

[0015] According to one aspect, a method for contactless transport of a carrier is provided. The method includes generating a carrier levitation force opposing the gravitational force of the carrier with a passive magnet arrangement, which may include a first permanent magnetic levitation unit arranged at a second vertical coordinate; stabilizing a predetermined vertical positioning of the carrier in the carrier transport space by selectively applying magnetic stabilization forces to the carrier in upward and downward directions with an actively controlled bi-directional self-stabilizing unit arranged at a first vertical coordinate; and moving the carrier in the transport direction with the drive unit arranged at the third vertical coordinate.

[0016] Embodiments also relate to devices for performing the disclosed methods, including device components for performing each method aspect described. These method aspects may be performed by hardware components, a computer programmed with suitable software, any combination of the two, or in any other manner. In addition, embodiments in accordance with the present disclosure also relate to methods of operating the described apparatus and methods of manufacturing the apparatuses and devices described herein. Methods of operating the device described include method aspects for performing all functions of the device.

[0017] A more detailed description of the present disclosure briefly summarized above may be made with reference to embodiments so that the above-cited features of the present disclosure may be understood in detail. The accompanying drawings relate to embodiments of the present disclosure and are described below:
[0018] FIG. 1 shows a schematic cross-sectional view of a carrier transport system and carrier according to embodiments described herein.
[0019] FIG. 2 shows a schematic side view of a carrier transport system and carrier according to embodiments described herein.
[0020] Figure 3 shows a schematic perspective view of a self stabilizing unit according to embodiments described herein.
[0021] FIG. 4 shows a plan view of the magnetic stabilization unit of FIG. 3;
[0022] FIG. 5A shows a side view of the magnetic stabilization unit of FIG. 3 in a first controlled state (I).
[0023] FIG. 5B shows a side view of the magnetic stabilization unit of FIG. 3 in a second controlled state (II).
[0024] Figure 6 shows a flow diagram of a method for contactless transporting a carrier in a transport direction according to embodiments described herein.

[0025] Reference will now be made in detail to various embodiments of the present disclosure, examples of one or more of which are illustrated in the drawings. Within the following description of the drawings, like reference numbers refer to like components. Only differences for individual embodiments are described. Each example is provided by way of explanation of the present disclosure and is not meant to be limiting of the present disclosure. Also, features illustrated or described as part of one embodiment may be used on or in conjunction with other embodiments to yield a still further embodiment. This description is intended to cover such modifications and variations.

[0026] The carrier transport system is configured for transporting a carrier in a vacuum environment, in particular a vacuum system comprising a vacuum chamber or a plurality of vacuum chambers arranged next to each other. A carrier transport system may provide one, two or more transport routes, and a carrier may be moved or transported along one or more transport pathways in transport direction T along a track assembly.

[0027] The carrier transport system described herein may be part of a vacuum processing system, particularly a vacuum deposition system configured to deposit material onto a substrate carried by a carrier. Carrier transport systems may be configured to move carriers along a track array for distances greater than 5 m or greater than 10 m.

[0028] As used herein, a "direction of transport (T)" is a direction in which a carrier may be transported by a carrier transport system. A track assembly 105 extending in the transport direction T may be provided and the carrier may be transported along the track assembly 105 by the carrier transport system 100 . The transport direction (T) is typically horizontal or essentially horizontal (horizontal direction +/−10°). As used herein, “vertical direction (V)” corresponds to the direction of gravity, i.e., the gravitational force of the carrier is directed downward in the vertical direction. The magnetic levitation unit is configured to apply a carrier levitation force (F _L ) directed upwardly in a vertical direction (V) to the carrier, in order to counteract the gravitational force of the carrier so that the carrier can be held in a floating state in a non-contact manner. As used herein, “lateral direction (L)” is transverse to the transport direction (T) and transverse to the vertical direction (V). The lateral direction (L) is typically a horizontal direction essentially perpendicular to the transport direction (T).

[0029] In some embodiments, the carrier may have an essentially vertical orientation during transport. In other words, the orientation of the carrier and the substrate carried by the carrier may be substantially vertical during transport (vertical +/- 10°). The substrate may be a large-area substrate, in particular a large-area glass substrate, for example for display manufacture. In some embodiments, the substrate may be a semiconductor substrate, for example a wafer, and the vacuum system may be a semiconductor processing system.

[0030] The “carrier transport space 102” can be understood as a space in which carriers are held contactlessly by the carrier transport system 100 and where carriers are transported contactlessly by the carrier transport system. The magnets of the carrier transport system can apply magnetic forces to the carrier that contact-freely hold the carrier in the carrier transport space 102 , that is, prevent the carrier from dislodging from the carrier transport space 102 .

[0031] 1 is a schematic cross-sectional view of a carrier transport system 100 for contactless transport of a carrier 10 in a transport direction T along a track assembly, as described herein. The carrier 10 can carry a substrate 11 in the holding section of the carrier 10, for example a large area substrate having a surface area of 1 m2 or more. Alternatively, the carrier may carry other objects to be transported in the holding section, for example masks. The holding section may include a holding mechanism, for example a mechanical, electrostatic or magnetic chucking device for holding the object in the holding section. Specifically, the enclosed angle between the vertical direction V and the major surface of the substrate or other object may be less than 10° during carrier transport.

[0032] The carrier transport system 100 has a carrier levitation force (F _L ) and a passive magnet arrangement 120 for generating. A "passive" magnet arrangement may be understood to include passive magnets for the generation of an actively uncontrolled carrier lift force. For example, the passive magnet array 120 may include a permanent magnetic levitation unit for generating carrier levitation force F _L and/or an electromagnet or permanent magnet for generating a magnetic field whose strength is not controlled according to the current carrier position. can include Thus, a "passive magnet arrangement" differs from an "actively controlled magnet arrangement" which generates a magnetic field that varies depending on an input parameter such as the width of the gap between the carrier and the track assembly.

[0033] In some embodiments, the carrier levitation force F _L is a magnetic attraction applied to the carrier 10, pulling the carrier upward toward the passive magnet arrangement 120. Specifically, the passive magnet arrangement 120 includes floating magnets, eg permanent magnets, configured to exert an attractive force on the carrier to pull the carrier upward. For example, the levitation magnets of the passive magnet arrangement may be arranged above the carrier transport space 102 , as schematically depicted in FIG. 1 , eg to attract the carrier upward towards the levitation magnets.

[0034] In some implementations, the passive magnet arrangement 120 can also stabilize the carrier in the lateral direction (L). In other words, the magnetic forces applied to the carrier by the passive magnet arrangement can prevent the carrier from unintentionally leaving the carrier transport space 102 in the lateral direction (L). In the embodiment shown in FIG. 1 , the carrier is magnetically attracted by the passive magnet arrangement 120 and therefore does not attempt to disengage laterally. Other types of passive magnet arrangements 120 are possible. Optionally, a self-stabilizing unit may additionally be provided for stabilizing the carrier in the lateral direction L, which may be active or passive.

[0035] The carrier transport system 100 applies a magnetic stabilizing force F _S to the carrier 10 in upward and downward directions to maintain the carrier 10 in a predetermined vertical position within the carrier transport space 102 It further includes an actively controlled self-stabilizing unit 140 configured to. Since the self-stabilizing unit is capable of exerting an upward stabilizing force and a downward-facing stabilizing force on the carrier, the self-stabilizing unit is also referred to herein as "bi-directional". Specifically, if the current carrier position is determined to be too low, the self-stabilizing unit 140 can generate a self-stabilizing force that acts in an upward direction to attract the carrier upward, and if the current carrier position is determined to be too high, The self-stabilizing unit 140 can act in a downward direction to create a self-stabilizing force that pulls the carrier downward, eg maintaining a predetermined vertical positioning of the carrier.

[0036] As a result of Earnshaw's theorem, a carrier cannot be held contactless in afloat with only passive magnetic units generating constant magnetic fields. For example, in the absence of active control exerted by a self-stabilizing unit or other stabilizing force, the carrier may move towards and collide with a passive flotation unit that exerts an attractive force on the carrier from above, or the carrier may exert a repulsive force on the carrier from below. It will disengage laterally from the manual flotation unit. According to the embodiments described herein, the carrier can be continuously held contactless in the carrier transport space by an actively controlled magnetic stabilization unit ensuring a predetermined distance between the carrier and the passive magnet arrangement. In other words, the magnetic stabilization force applied to the carrier by the magnetic stabilization unit 140 allows the carrier to be stabilized at a predetermined vertical distance from the passive magnet arrangement.

[0037] The carrier transport system described herein is advantageous compared to other magnetic levitation systems for the following reasons:

[0038] Other magnetic levitation systems that rely on a passive magnet arrangement to generate a carrier levitation force (F _L ), wherein the carrier can be held in a predetermined position and hit or run into the passive magnet arrangement. Use mechanical elements such as rollers or spacer elements that are at least temporarily in contact with the carrier to ensure that it does not come off. However, rollers or spacer elements in contact with the moving carrier can create small particles due to frictional forces, negatively affecting the quality of the deposition on the substrate carried by the carrier. The carrier transport system described herein is capable of transporting carriers in a completely contactless manner, ie without contact stabilization elements, due to the magnetic stabilization force exerted by the actively controlled magnetic stabilization unit.

[0039] Still other magnetic levitation systems rely on actively controlled levitation magnets to apply a magnetic levitation force to the carrier. Strong magnetic forces need to be generated by these levitation magnets to counteract the weight force of the carrier. This typically means that large coils and complex cooling systems are provided for actively controlled floating magnets. Actively controlled levitation magnets also typically control the strength of the carrier levitation force based on a distance signal measured with a gap sensor that measures the vertical gap between the carrier and the levitation magnets for the purpose of keeping the gap width constant. However, it can be difficult to keep the gap width (typically as small as a few millimeters or less) constant, for example when the carrier thermally expands or contracts. For example, the height of the homeotropically oriented carrier increases significantly during thermal processing, causing gap width to decrease resulting in problems in active control of the floating units and/or problems associated with maintaining a constant gap width of a linear motor. may occur.

[0040] In contrast, in the carrier transport systems described herein, the magnetic levitation units are passive units provided separately at a vertical distance from the actively controlled magnetic stabilization unit. Thus, a relatively small magnetic stabilizing force generated by the magnetic stabilizing unit is sufficient, which is zero, since the (significantly large) carrier levitation force is passively generated by the passive magnet arrangement arranged in different positions. may fluctuate around the force value of Thus, a small and compact actively controlled self-stabilizing unit can be provided, and cooling efforts can be reduced. Additionally, the magnetic stabilization unit can be placed in a position remote from the magnetic levitation unit, eg in which thermally induced carrier deformations do not play a role or negatively affect the control of the magnetic stabilization force and/or driving force. Can be placed in position.

[0041] Still other magnetic levitation systems rely on a plurality of active stabilization units arranged at different positions around the carrier transport space and configured to generate stabilizing forces in different directions. These magnetic levitation systems are complex and expensive, and it is difficult to coordinate multiple active stabilization units. In contrast, the self-stabilizing unit 140 of the carrier transport system 100 described herein is bi-directional, ie capable of generating both upward and downward stabilizing forces, and is arranged in a first vertical coordinate. Thus, two or more stabilization units arranged at different vertical coordinates (eg above and below the carrier) may not be necessary. Therefore, control of carrier positioning is simplified, and more stable and smoother non-contact carrier transport can be obtained.

[0042] In some embodiments, the passive magnet arrangement 120 has a first permanent magnetic levitation unit arranged at a second vertical coordinate V2 different from the first vertical coordinate V1 at which the magnetic stabilization unit 140 is arranged 121). The first permanent magnetic levitation unit 121 may include permanent magnets configured to apply an upwardly directed carrier levitation force to the carrier, and the carrier 10 may have a magnetic counter attracted by the first permanent magnetic levitation unit 121. (counter) unit (herein referred to as second magnetic unit 15), for example a ferromagnetic track or permanent magnet fixed to a carrier. Alternatively or additionally, the passive magnet arrangement may include one or more coils or ferromagnetic magnets attracted by permanent magnets provided on the carrier.

[0043] The first permanent magnetic levitation unit 121 may be arranged above the carrier transport space 102 and may be configured to magnetically interact with the second magnet unit 15 which may be arranged at a head portion of the carrier. can Specifically, the second vertical coordinate V2 where the first permanent magnetic levitation unit 121 is arranged may be provided above the first vertical coordinate V1 where the magnetic stabilization unit 140 is arranged. Specifically, the first permanent magnetic levitation unit 121 may be configured to magnetically interact with the second magnetic unit 15 provided on the head portion of the carrier, and the magnetic stabilization unit 140 is provided on the lowermost portion of the carrier. It can be configured to magnetically interact with the provided first magnetic unit 14 . In some embodiments, the first magnetic unit 14 of the carrier may be a ferromagnetic element, for example a ferromagnetic track, which may be provided on the side of the carrier and protrude from the carrier towards the magnetic stabilization unit.

[0044] In some implementations, the distance D1 between the first vertical coordinate V1 and the second vertical coordinate V2 may be 1 m or more, particularly 2 m or more, more particularly 3 m or more, or even 4 m or more. For example, in a carrier transport system configured to transport vertically oriented carriers, a passive magnet arrangement 120 may be provided on a top rail 106 of a track assembly 105 and a magnetic stabilization unit 140 ) may be provided on the lowermost rail of the track assembly 105. It may be sufficient to precisely control the vertical carrier positioning relative to the lowermost rail on which the magnetic stabilization unit 140 is arranged, while a less precise carrier positioning relative to the uppermost rail (where only passive magnetic units may be provided) may be permitted. . Therefore, thermally induced carrier deformation, which can lead to vertical movement of the head portion of the carrier, does not adversely affect the control of the magnetic stabilization force and does not impair carrier transport by the linear motor.

[0045] The head part of a vertically oriented carrier can be understood as the part of the carrier above the substrate holding section interacting with the top rail 106 and the bottom part as the part of the carrier below the substrate holding section interacting with the bottom rail. there is. The distance between the head part and the lowermost part of the carrier may be 1 m or more, in particular 2 m or more, more particularly 3 m or more, or even 4 m or more. In some embodiments, first permanent magnetic levitation unit 121 can be configured to magnetically interact with a head portion of the carrier and magnetic stabilization unit 140 can be configured to magnetically interact with a lowermost portion of the carrier. can be configured. Specifically, the first permanent magnetic levitation unit 121 may be arranged on the top rail 106 of the track assembly, in particular may be arranged above the carrier transport space 102, and the magnetic stabilization unit 140 may be arranged on the track assembly It can be arranged on the lowermost rail. It may be sufficient to accurately monitor and maintain the positioning of the carrier relative to the lowermost rail, on which the self-stabilizing unit 140 and drive unit 150 may be provided.

[0046] In some embodiments, which can be combined with other embodiments described herein, the passive magnet arrangement 120 further comprises a second permanent magnetic levitation unit 122 arranged at the fourth vertical coordinate V4. do. The first permanent magnetic levitation unit 121 can be configured to counter a first portion of the gravitational force of the carrier, and the second permanent magnetic levitation unit 122 can be configured to counter a second portion of the gravitational force of the carrier. there is.

[0047] Similar to the first permanent magnetic levitation unit 121, the second permanent magnetic levitation unit 122 may also include permanent magnets or electromagnets for applying an upwardly directed passive magnetic levitation force F _L to the carrier. can In Figure 1, the north poles of the permanent magnetic levitation units are shaded, while the south poles are shown in white. The south pole of the second permanent magnetic levitation unit 122 is directed towards the north pole of the magnetic counter unit (herein referred to as the fourth magnetic unit 17) of the carrier arranged below the second permanent magnetic levitation unit 122. Since they are facing each other, an upward levitation force is applied to the carrier. The fourth magnetic unit 17 of the carrier may be a ferromagnetic unit or a permanent magnet. In other embodiments, the orientation, arrangement or shape of the permanent magnetic levitation units can be different as long as an upward directed levitation force is applied to the carrier.

[0048] In some embodiments, the first portion of the gravimetric force of the carrier countered by the first permanent magnetic levitation unit 121 may be greater than 20%, particularly greater than about 30%, and more particularly greater than 40% of the total gravimetric force. The second portion of the gravimetric force of the carrier counteracted by the second permanent magnetic levitation unit 122 may be greater than 50%, particularly greater than about 80%, and more particularly greater than 90% of the total gravimetric force.

[0049] By providing two or more magnetic levitation units at two or more different vertical coordinates (optionally offset in the lateral direction (L)) generating a respective portion of the carrier levitation force (F _L ), more smoothly and more stable carrier transport can be obtained. For example, the first permanent magnetic levitation unit 121 may be arranged on the top rail 106 of the track assembly and configured to magnetically interact with the head portion of the carrier, and the second permanent magnetic levitation unit 122 may be arranged on the bottom rail of the track assembly and configured to magnetically interact with the bottom portion of the carrier. The distance between the second vertical coordinate V2 and the fourth vertical coordinate V4 may be greater than 1 m, in particular greater than 2 m, more particularly greater than 3 m or greater than 4 m. The distance between the first vertical coordinate V1 and the fourth vertical coordinate V4 may be 30 cm or less.

[0050] Both the second permanent magnetic levitation unit 122 and the magnetic stabilization unit 140 can be arranged on the lowermost rail of the track assembly 105 . For example, the second permanent magnetic levitation unit 122 may be arranged below the magnetic stabilization unit 140 of the lowermost rail and be configured to magnetically interact with the fourth magnetic unit 17 arranged on the carrier. can

[0051] The sum of the first portion and the second portion may be greater than 100%, particularly greater than 120%, more particularly about 130%, or more of the gravimetric force of the carrier. In other words, the first and second permanent magnetic levitation units in combination can carry the entire weight of the carrier (or generate a greater force).

[0052] The reason for the carrier levitation force, which is greater than 100% of the carrier's gravimetric force, may be that there is additionally at least one additional downward force component acting on the carrier during transport of the carrier. For example, a linear motor arranged below the carrier typically not only applies a transport force F _T in the transport direction T on the carrier, but also has a downward force component that can correspond to 20% or more of the carrier's gravimetric force ( F _C ) can also be added additionally. The passive magnet arrangement 120 may also oppose the latter force component pulling the carrier downward.

[0053] In some embodiments, (i) the carrier levitation force (F _L ) of the passive magnet arrangement 120, (ii) the gravimetric force of the carrier and (iii) the force exerted on the carrier by the drive unit 150 The downward force component F _C sums to essentially zero during carrier transport if the carrier is correctly arranged in a predetermined position within the carrier transport space 102 . Accordingly, the average magnetic stabilization force F _S applied to the carrier by the magnetic stabilization unit 140 may also be essentially zero. For example, the magnetic stabilization force F _S applied by magnetic stabilization unit 140 on the carrier may continuously fluctuate around zero force (eg, the applied stabilization force integrated over time is essentially can be 0). The self-stabilizing force serves only to stabilize and hold the carrier in a predetermined vertical position where the above forces (i), (ii), (iii) (and/or other optional forces acting on the carrier) sum to essentially zero. can be provided. Since large magnetic forces need not be applied to the carrier by the magnetic stabilization unit 140, the magnetic stabilization unit can be kept small and compact, and cooling efforts on individual coils can be reduced.

[0054] The carrier levitation force (F _L ) generated by the passive magnet arrangement 120 may correspond to 100% or more, particularly 120% or more, and more particularly 130% or more of the weight force of the carrier. Thus, the overall carrier levitation force can be generated passively (eg by the first and/or second permanent magnetic levitation units) and the actively controlled magnetic stabilization unit allows the carrier to track within the carrier transport space 102 . It may be provided only to prevent possible displacement from a predetermined position relative to the assembly.

[0055] In some embodiments, which can be combined with other embodiments described herein, the carrier transport system 100 includes a drive unit 150 for moving a carrier along a track assembly 105 in a transport direction T. , in particular a linear motor. The drive unit 150 can be arranged at a third vertical coordinate V3, in particular below the magnetic counterpart of the carrier (herein referred to as the third magnetic unit 16). Specifically, the drive unit 150 may be arranged below the carrier transport space 102 and is configured to magnetically interact with the lowermost part of the carrier, in particular the third magnetic unit 16 arranged in the lowermost part of the carrier. It can be.

[0056] In some embodiments, the distance D2 between the first vertical coordinate V1 at which the self stabilization unit 140 is arranged and the third vertical coordinate V3 at which the driving unit 150 is arranged is 30 cm or less; In particular, it may be 20 cm or less, or even 10 cm or less. In particular, the self-stabilizing unit 140 and the driving unit 150 can be arranged at a close vertical distance from each other, for example both on the lowermost rail of the track assembly. The drive unit 150 (which may be a linear motor) may rely on a precise and small gap width for the third magnetic unit 16 of the carrier. Thus, if the self-stabilizing unit 140 ensuring a predetermined vertical carrier positioning is arranged very close to the drive unit 150, the gap width can be maintained exactly even if the carrier has to undergo thermally induced deformations. .

[0057] Specifically, when the carrier is to be extended, the head portion of the carrier can move upward towards the top rail of the track assembly, but the lowermost part where the first magnetic unit 14 and also the third magnetic unit 16 of the carrier are arranged. The part can hold predetermined vertical positions. Therefore, it is advantageous to arrange the self-stabilizing unit very close to the drive unit. By arranging the actively controlled magnetic stabilization unit 140 in close proximity to the drive unit 150, problems associated with large distances between the linear motor and the actively controlled levitation unit can be avoided, while the passive magnet arrangement can be placed in different positions. , for example on the top rail 106 . Actively controlled floating units are not required on the top rail.

[0058] According to some embodiments, the self-stabilizing unit 140 is laterally arranged on one side of the carrier transport space 102 . In particular, the magnetic stabilization unit 140 can be arranged laterally only on one side of the carrier, rather than on two opposite sides of the carrier. By providing a magnetic stabilization unit 140 arranged on one side of the carrier and capable of bi-directionally controlling and stabilizing the carrier position, the control can be simplified and several controllers of the active units responsible for stabilizing the carrier can be used in different ways. There may be no need to adjust in directions.

[0059] The magnetic stabilization unit 140 can define a guide space 148 for the first magnetic unit 14 projecting laterally from the carrier into the guide space 148 . The first magnetic unit 14 can be a ferromagnetic element, for example a ferromagnetic track, which faces from the side surface of the carrier towards the magnetic stabilization unit, in particular into the guide space 148 defined by the magnetic stabilization unit 140 . protrudes in the direction For example, the magnetic stabilization unit 140 can be a coil with a magnetic core shaped so that the magnetic core partially surrounds the guidance space 148 , in particular on its three sides. The two magnetic poles of the coil can be directed towards the guide space 148 from two opposite sides, so that when the first magnetic unit 14 is arranged in the guide space 148 both poles are directed to the first magnetic unit ( 14) is directed towards.

[0060] The guide space 148 allows to stably guide the first magnetic unit 14 of the carrier moving in the transport direction T in the guide space, while the magnetic field of the magnetic stabilization unit extends through the guide space 148. can do. Further, the guide space enables stabilizing forces in two opposite vertical directions to be applied to the first magnetic element 14 by the magnetic stabilization unit.

[0061] In some embodiments, which can be combined with other embodiments described herein, the magnetic stabilization unit 140 is at least one electromagnet for acting on the first magnetic unit 14 arranged in the guide space 148. 141 , a gap sensor 146 , and a controller 145 configured to control at least one electromagnet 141 based on a signal from the gap sensor 146 . The gap sensor 146 is configured to measure the vertical positioning of the carrier, for example by measuring the width of the gap between the carrier and the magnetic stabilization unit (or other fixed component of the track assembly), and communicate the measured position value to the controller. It can be. The controller controls the self-stabilizing unit to apply an upward stabilizing force to the carrier (e.g., if the carrier position is too low) or to apply a downward stabilizing force to the carrier (e.g., if the carrier position is too high). ) can be configured. Thus, a bi-directional self-stabilizing unit is provided.

[0062] In some embodiments, magnetic stabilization unit 140 may have a permanent magnetic bias. Details of a specific example of a bi-directional self-stabilizing unit will be described below with reference to FIGS. 3, 4, 5A and 5B.

[0063] 2 shows a schematic side view of a carrier transport system 100 for contactless holding a carrier 10 according to embodiments described herein. As carrier transport system 100 and carrier 10 may have some or all features of the embodiment shown in FIG. 1 , reference may be made to the above descriptions, which are not repeated here.

[0064] The carrier 10 is configured to be transported by the carrier transport system 100 described herein. The carrier 10 comprises a holding section for carrying an object, such as a substrate 11 to be processed, in particular in an essentially vertical orientation. The carrier part above the retaining section is also referred to herein as the head part, and the carrier part below the retaining section is also referred to herein as the bottom part. The carrier 10 has a first magnetic unit 14 that projects laterally from the carrier at a first vertical coordinate and is configured to magnetically interact with an actively controlled bi-directional magnetic stabilization unit 140 as described herein. ) is further included. The first magnetic unit 14 can be a ferromagnetic element, for example a metal track, extending along the transport direction T on the side of the carrier and protruding from the carrier in the lateral direction L. The first magnetic unit 14 may be provided in the lowermost part of the carrier, ie below the substrate holding section.

[0065] The self-stabilizing unit 140 is shown schematically in FIG. 2 for illustrative purposes in a rotated position. The magnetic stabilization unit 140 is arranged such that, in practice, as shown in FIG. 1 , a guide space 148 defined between its magnetic poles opens towards the carrier, so that the first magnetic unit 14 has a guide space 148 ) can protrude laterally into. Several self-stabilizing units 140 may be provided at a first vertical coordinate V1 along the transport direction T, for example at predetermined intervals, so that the first vertical coordinate V1 is also provided The first magnetic unit 14 of the carrier always projects into at least one magnetic stabilizing unit during movement along the track assembly, and in particular into at least two magnetic stabilizing units at all times during movement along the track assembly. The first magnetic unit 14 of the carrier is projected into the two magnetic stabilizing units simultaneously, so that the vertical position of the carrier and the pitch of the carrier (i.e., the rotational position of the carrier with respect to the lateral direction L) will be stabilized. It is advantageous to be able to The carrier can thus be vertically stabilized at various positions along the track assembly during transport in the transport direction.

[0066] The carrier 10 comprises a passive magnet arrangement 120, in particular the first described herein, which is arranged on the carrier at a second vertical coordinate and exerts a carrier levitation force F _L on the second magnetic unit 15. and a second magnetic unit 15 configured to magnetically interact with the first permanent magnetic levitation unit 121. The second magnetic unit 15 may include a permanent magnetic track or a ferromagnetic track, for example a metal track. The second magnetic unit 15 may be provided at the head part of the carrier, for example 1 m or more above the first magnetic unit 14 . In particular, the second magnetic unit 15 can be arranged on the uppermost surface of the carrier.

[0067] In some embodiments, the carrier 10 is configured to interact with a drive unit 150 arranged on the carrier at a third vertical coordinate and configured to move the carrier along the track assembly in the transport direction T. unit 16 is further included. The third magnetic unit 16 may include a plurality of permanent magnets provided on the lowermost surface of the carrier. Specifically, the third magnetic unit 16 may be a moving part of a linear motor that may be driven to be moved by the linear motor. The third magnetic unit 16 can be arranged in the lowermost part of the carrier, in particular on the lowermost surface of the carrier. A vertical distance between the first magnetic unit 14 and the third magnetic unit 16 may be 30 cm or less. The gap width between the third magnetic component 16 of the carrier and the drive unit 150 may be less than or equal to 5 mm, in particular less than or equal to 3 mm during transportation of the carrier.

[0068] According to some embodiments, the drive unit 150 may include a linear motor configured to apply a magnetic force to the carrier to contactlessly move the carrier along the track assembly in the transport direction T. The drive unit 150 may include a plurality of linear motors provided at predetermined intervals along the transport direction T, for example, in the track assembly.

[0069] The linear motor of the drive unit 150 may be configured to couple with the third magnetic unit 16 of the carrier to provide a driving force in the transport direction T. The drive unit that generates the driving force in the transport direction T is non-contact and thus does not generate particles during transport. In some implementations, drive unit 150 can include a synchronous linear motor. In other embodiments, drive unit 150 may include an asynchronous linear motor.

[0070] In some embodiments, the carrier 10 is configured to magnetically interact with a second permanent magnetic levitation unit that is arranged at a fourth vertical coordinate in the carrier and generates a carrier levitation force F _L . unit 17 is further included. The fourth magnetic unit 17 may include a permanent magnetic track or a ferromagnetic track (eg, a metal track). The fourth magnetic unit 17 may be provided at a lowermost part of the carrier, for example 1 m or more below the second magnetic unit 15 . In some implementations, the fourth magnetic unit 17 is arranged in the lowermost portion of the carrier between the first magnetic unit 14 and the third magnetic unit 16 .

[0071] In some embodiments, during transport of the carrier, the second magnetic unit 15 is arranged in the head part of the carrier above the holding section, and the first magnetic unit 14, the third magnetic unit 16, and/or the The four magnetic units 17 are arranged in the lowermost part of the carrier below the holding section. In particular, the first, third and fourth magnetic units may be arranged in the lowermost portion.

[0072] The carrier depicted in FIG. 2 is particularly suited to be transported by the carrier transport system 100 described herein. Due to the arrangement of the above magnetic units, even if the carrier expands or contracts in the vertical direction during thermal processing, smooth and stable non-contact transport of the carrier is possible.

[0073] Hereinafter, the self-stabilizing unit 140 of the carrier transport system according to embodiments of the present disclosure will be described in more detail with reference to FIGS. 3, 4, 5A and 5B. 3 shows a schematic perspective view of the magnetic stabilization unit 140 . 4 shows a top view of the magnetic stabilization unit 140 . 5A shows a side view of the self-stabilizing unit 140 in a first control state (I), and FIG. 5B shows a side view of the self-stabilizing unit 140 in a second control state (ii).

[0074] The magnetic stabilization unit 140 is actively controlled and can apply a magnetic stabilization force F _S to the first magnetic unit 14 in both upward and downward directions. The first magnetic unit 14 can be a ferromagnetic carrier track of a carrier arranged in the guide space 148 provided by the magnetic stabilization unit 140 . The magnetic stabilization unit 140 includes at least one electromagnet 141 for applying a magnetic stabilization force F _S to the first magnetic unit 14, in particular at least one electromagnet 141 based on a coil, a gap sensor, and a signal from the gap sensor. and a controller (shown in FIG. 1 ) configured to control the electromagnet 141 . The gap sensor can measure the vertical gap width between the carrier and a fixed component of the track assembly, for example between the at least one electromagnet 141 and the first magnetic unit 14 .

[0075] The at least one electromagnet 141 may include a first pole 181 and a second pole 182 arranged to face each other vertically, and a guide space 148 for the first magnetic unit 14 of the carrier. ) is provided between the first pole 181 and the second pole 182. For example, the at least one electromagnet 141 has a core bent so that the first pole 181 and the second pole 182 provided at the ends of the core face each other and define a guide space 148 therebetween. May contain coils.

[0076] Magnetic stabilization unit 140 may further include a permanent magnetic bias provided by at least one set of permanent magnets 175, as described in more detail below.

[0077] In some embodiments, the self-stabilizing unit 140 operates in a first control state I (illustrated in FIG. 5A) in which a self-stabilizing force F _S is applied to the carrier in an upward direction, and a self-stabilizing force. (F _S ) can be switched between a second control state (II) (illustrated in FIG. 5B ) applied to the carrier in the downward direction. The switching may be performed by reversing the magnetic polarities of the first and second poles of the at least one electromagnet 141 , for example, by reversing the direction of current flowing through the coil. Also, by controlling the current flowing through the coil through the controller, the absolute value of the force can be changed. Accordingly, both the direction and absolute value of the magnetic stabilization force can be set to suit holding the carrier in a predetermined vertical position.

[0078] In some embodiments, which may be combined with other embodiments described herein, the at least one electromagnet 141 may include a first electromagnet 171, a second electromagnet 172, and optionally a third electromagnet 171. electromagnets 173 (and optionally also further electromagnets), each partially surrounding the guide space 148 and arranged side by side in the transport direction. The second electromagnet 172 is arranged next to the first electromagnet 171 in the transport direction T and optionally arranged between the first electromagnet 171 and the third electromagnet 173 . To apply a magnetic stabilizing force (F _S ) to the carrier, the controller causes the first electromagnet 171 (and the optional third electromagnet 173, ie, the outer electromagnets) to move relative to the second electromagnet (ie, the center electromagnet). Control these electromagnets to be of reverse polarity. Thus, as schematically depicted in FIGS. 5A and 5B , the magnetic field lines generated by the first electromagnet 171 (and optional third electromagnet 173 ) extend through the guide space 148 . ) have opposite directions to the magnetic field lines 192 generated by the second electromagnet 172 extending through the guide space 148 . If at least one electromagnet 141 includes more than three electromagnets arranged side by side in the transport direction, two adjacent electromagnets are each of opposite polarity, thus providing a linear array of electromagnets of alternating polarity.

[0079] In particular, in the first control state (I) schematically depicted in FIG. 5A , the magnetic field lines 192 generated by the second electromagnet 172 extend downward through the guide space 148 , and the first electromagnet 172 extends in a downward direction. The magnetic field lines generated by 171 (and by optional third electromagnet 173 ) extend in an upward direction through guide space 148 . In the second control state (II) schematically depicted in FIG. 5B, the magnetic field lines 192 generated by the second electromagnet 172 extend upward through the guide space 148, and the first electromagnet 171 The magnetic field lines generated by (and by the optional third electromagnet 173) extend downward through the guide space 148. As depicted in FIG. 5A, a “symmetrical” arrangement of three or more electromagnets of opposite polarity in an alternating arrangement can reduce unwanted force components exerted on the carrier by the magnetic stabilization unit. Specifically, a stabilizing force directed precisely in an upward or downward direction (eg, in the vertical direction V or in a direction surrounding an angle of 10° or less with respect to the vertical direction V) may be provided.

[0080] In some embodiments, which can be combined with other embodiments described herein, magnetic stabilization unit 140 includes a permanent magnetic bias. In particular, the magnetic stabilization unit 140 comprises a set of permanent magnets 175 which generate a magnetic field in the guidance space 148 that superimposes the magnetic field generated by the at least one electromagnet 141 .

[0081] The magnetic field lines 191 of the magnetic field generated by the set of permanent magnets 175 may have opposite directions in at least one upper region 178 and at least one lower region 179 of the guide space 148 . For example, two first permanent magnets with identical poles directed towards each other can be arranged above the guide space 148 and two second permanent magnets with equal poles directed towards each other can be arranged on the guide space 148 . 1 can be arranged on the other side of the guidance space below the permanent magnets. This arrangement of permanent magnets generates oppositely directed magnetic field lines 191 in the upper and lower regions of the guidance space, as schematically depicted in Figs. 5a and 5b. Alternatively, a set of permanent magnets 175 may be for example a pair of permanent magnets arranged above and below the guidance space to generate oppositely directed magnetic field lines 191 in the upper and lower regions of the guidance space. may include For example, the first permanent magnet may be arranged between the first electromagnet and the second electromagnet above the guide space, and the second permanent magnet may be arranged between the first electromagnet and the second electromagnet below the guide space.

[0082] In some embodiments, the set of permanent magnets 175 can be arranged between the first electromagnet and the second electromagnet, and optionally arranged between the second electromagnet and the third electromagnet. In particular, a first pair of permanent magnets may be arranged between a first electromagnet and a second electromagnet above and below guide space 148 , and an optional second pair of permanent magnets above and below guide space 148 . It may be arranged between the second electromagnet and the third electromagnet. This array of permanent magnets has oppositely directed magnetic field lines 191 in the upper and respective lower regions between the poles of the first, second and third electromagnets, as schematically depicted in FIGS. 5A and 5B. causes

[0083] In a first controlled state (I), schematically depicted in FIG. 5A , a set of permanent magnets 175 are placed on first and second electromagnets (and an optional third electromagnet) in an upper region 178 of the guidance space. magnetic field lines 191 having essentially the same directions as the magnetic field lines 192 generated by Thus, an upwardly directed magnetic force acts on the first magnetic unit 14 in the upper regions 178 of the guide space (see the three upper regions 178 circled in FIG. 5A for illustrative purposes). In addition, the set of permanent magnets 175 is a magnetic field having directions essentially opposite to the magnetic field lines 192 generated by the first and second electromagnets (and an optional third electromagnet) in the lower regions of the guidance space. lines 191. Thus, no net magnetic force or only a small net magnetic force acts on the first magnetic unit 14 in the lower regions of the guidance space (see individual oppositely directed arrows in the lower regions of Fig. 5a). Accordingly, the carrier is pulled upward in FIG. 5A.

[0084] In a second control state (II), schematically depicted in FIG. 5B , the set of permanent magnets 175 engages first and second electromagnets (and an optional third electromagnet) in the lower regions 179 of the guidance space. generates magnetic field lines 191 having essentially the same directions as the magnetic field lines 192 generated by Thus, a downward directed magnetic force acts on the first magnetic unit 14 in the lower regions 179 of the guidance space (see the three lower regions 179 circled in FIG. 5B for illustrative purposes). In addition, the set of permanent magnets 175 is a magnetic field having directions essentially opposite to the magnetic field lines 192 generated by the first and second electromagnets (and an optional third electromagnet) in the upper regions of the guidance space. lines 191. Thus, no net magnetic force or only a small net magnetic force acts on the first magnetic unit 14 in the upper regions of the guidance space (see individual oppositely directed arrows in the upper regions of Fig. 5b). Thus, the carrier is pulled downward.

[0085] Thus, by reversing the poles of at least one electromagnet 141, in particular by reversing the poles of each of the first, second, and optional third (or additional) electromagnets, the upward force exerted on the carrier and the downward force A bi-directional magnetic stabilization unit capable of switching between directing forces is provided. In addition, the stabilizing force can be controlled by controlling the current flowing through the at least one electromagnet 141, in particular the current flowing through the first, second and optional third electromagnets. One or more stabilization units having one common controller or an individual number of controllers arranged along the transport direction T at predetermined intervals therebetween in one vertical coordinate are sufficient to stabilize the carrier in the vertical direction in both directions. do. Thus, a simple and reliable arrangement is provided according to the embodiments described herein.

[0086] The first electromagnet, the second electromagnet, and the optional third electromagnet can be controlled through the same control circuit and can be connected to the same controller. Specifically, as schematically depicted in FIG. 4 , the same current (or currents varied in a corresponding manner) may flow in alternating directions through the first, second, and third coils during carrier transport, so that the first 2 The magnetic field of the electromagnet is opposite to that of the first and third electromagnets.

[0087] The self-stabilizing unit may be configured to produce a maximum self-stabilizing force of +/-400 N or less, particularly +/-300 N or less, more particularly about +/-200 N.

[0088] 6 is a block diagram illustrating a method for contactless transport of a carrier in a transport direction T along a track assembly, for example through a vacuum chamber of a vacuum deposition system. As this transport method may be performed using a carrier transport system as described herein that holds the carrier contactless as described herein, reference may be made to the above descriptions, which are not repeated here.

[0089] In box 610, a carrier levitation force is generated by a passive magnet array that opposes the weight force of the carrier. The passive magnet arrangement may include a first permanent magnetic levitation unit 121 arranged at the second vertical coordinate V2, and optionally a second permanent magnetic levitation unit 122 arranged at the fourth vertical coordinate V4. can

[0090] In box 620, the predetermined vertical positioning of the carrier in the carrier transport space is stabilized by applying magnetic stabilizing forces to the carrier. The self-stabilizing force may be applied to the carrier by an actively controlled bi-directional self-stabilizing unit 140 as described herein capable of applying a self-stabilizing force to the carrier in an upward direction and a downward direction. In the first control state (I), an upwardly directed self-stabilizing force is applied to the carrier, for example if the carrier position is too low and/or it is detected that the carrier is sinking downward. In the second control state (II), a downward self-stabilizing force may be applied to the carrier, for example if the carrier position is too high and/or it is detected that the carrier is rising upward. The position of the carrier can be controlled in closed loop control.

[0091] In box 630, the carrier is transported along the track assembly in the transport direction T using a drive unit arranged at the third vertical coordinate V3, in particular a linear motor that applies a magnetic transport force F _T to the carrier. are moved

[0092] The levitation of box 610, the stabilization of box 620, and the movement of box 630 can occur simultaneously, thus a compact magnetic levitation system with active control that is not adversely affected by thermal deformations of the carrier. Smooth and stable non-contact carrier transport is possible in a vacuum system with

[0093] In some embodiments, which can be combined with other embodiments, the carrier is oriented essentially vertically during transport. The distance between the first vertical coordinate V1 and the second vertical coordinate V2 may be greater than the distance between the first vertical coordinate V1 and the third vertical coordinate V3. Thus, even when the head portion of the carrier has to “extend away” from the lowermost portion due to thermally induced deformations, the gap width between the linear motor 150 and the third magnetic unit 16 is determined by the magnetic stabilization unit. It can be accurately maintained through control (eg, maintaining a gap width of 3 mm or less).

[0094] During carrier levitation and transport, (i) the carrier levitation force (F _L ) exerted by the passive magnet array, (ii) the gravimetric force of the carrier, and (iii) the vertical force component applied to the carrier by the drive unit Since ( _FC ) sums to essentially zero during transport of the carrier, the average magnetic stabilization force ( _FS ) applied to the carrier by magnetic stabilization unit 140 is also essentially becomes 0. This allows the self-stabilizing unit to be compact and relatively small.

[0095] In some implementations, the carrier and the substrate carried by the carrier are oriented essentially vertically. The substrate may be a large-area substrate with a surface area of 1 m2, in particular 3 m2 or more. The carrier may have a vertical dimension of greater than 1 m, in particular greater than 2 m.

[0096] The first permanent magnetic levitation unit 121 can magnetically interact with the head portion of the carrier, the magnetic stabilization unit 140 can magnetically interact with the lowermost portion of the carrier, and the driving unit 150 can interact magnetically with the carrier. can interact with the lowermost part of

[0097] Although the foregoing has been directed to embodiments, other and additional embodiments may be devised without departing from the basic scope, which scope is determined by the following claims.

Claims (20)

A carrier transport system (100) for contactless transport of a carrier (10) along a track assembly (105), comprising:
a passive magnet arrangement (120) for generating a carrier levitation force (F _L ) to oppose the weight force of the carrier; and
arranged at a first vertical coordinate V1 and selectively self-stabilizing the carrier 10 in the upward and downward directions to keep the carrier 10 in a predetermined vertical position in the carrier transport space 102 An actively controlled bi-directional magnetic stabilization unit 140 configured to apply a magnetic stabilization force (F _S ),
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 1,
The passive magnet assembly 120 includes, in particular, a first permanent magnetic levitation unit 121 arranged at a second vertical coordinate V2 above the carrier transport space 102, and at the first vertical coordinate V1 and The distance D1 between the second vertical coordinates V2 is 1 m or more,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 2,
The passive magnet arrangement 120 further includes a second permanent magnetic levitation unit 122 arranged at a fourth vertical coordinate V4, and the first permanent magnetic levitation unit 121 is the gravitational force of the carrier. configured to counter a first portion, and wherein the second permanent magnetic levitation unit 122 is configured to counter a second portion of the gravitational force of the carrier;
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 1 to 3,
The carrier levitation force F _L generated by the passive magnet arrangement 120 corresponds to 100% or more, particularly 120% or more, of the weight force of the carrier 10,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 1 to 4,
Further comprising a drive unit 150, in particular a linear motor, for moving the carrier along the track assembly 105 in a transport direction T, the drive unit 150 in particular the carrier transport space ( 102) arranged at the third vertical coordinate V3 below,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 5,
The distance D2 between the first vertical coordinate V1 and the third vertical coordinate V3 is 30 cm or less,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 1 to 6,
The magnetic stabilization unit 140 is laterally arranged on one side of the carrier transport space 102 and defines a guide space for the first magnetic unit 14 projecting laterally from the carrier 10 . doing,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 1 to 7,
The self-stabilizing unit 140,
at least one electromagnet (141) for acting on the first magnetic unit (14) of the carrier arranged in a guide space (148);
gap sensor 146; and
a controller (145) configured to control the at least one electromagnet (141) based on a signal of the gap sensor (146);
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 8,
The magnetic stabilization unit (140) further comprises a set of permanent magnets (175) generating magnetic field lines with opposite directions in the upper and lower regions of the guide space (148).
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 8 or 9,
The at least one electromagnet 141 includes a first magnetic pole 181 and a second magnetic pole 182 arranged to face each other vertically, and the guide space 148 between the first magnetic pole and the second magnetic pole. ) is provided,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 8 to 10,
The magnetic stabilization unit 140 is in a first control state (I) in which the magnetic stabilization force ( _FS ) is applied to the carrier 10 in the upward direction by inverting the polarities of the at least one electromagnet 141. and a second control state (ii) in which the magnetic stabilizing force F _S is applied to the carrier 10 in the downward direction,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to any one of claims 8 to 11,
The at least one electromagnet 141 includes a first electromagnet 171 and a second electromagnet 172 arranged side by side in a transport direction T, the second electromagnet 172 being the first electromagnet 171 Since it is reverse polarity to
- in the first control state (I), the magnetic field lines generated by the second electromagnet 172 extend downward through the guide space 148, and the magnetic field generated by the first electromagnet 171 The lines extend in an upward direction through the guide space 148, and
- In the second control state (II), the magnetic field lines generated by the second electromagnet 172 extend in an upward direction through the guide space 148, and the magnetic field generated by the first electromagnet 171 lines extend in a downward direction through the guide space 148,
A carrier transport system for non-contact transport of a carrier along a track assembly. According to claim 12,
further comprising a set of permanent magnets (175) arranged between the first electromagnet and the second electromagnet,
- in one of the first and second control states, the set of permanent magnets connects to the magnetic field lines 192 generated by the first and second electromagnets in the upper regions 178 of the guide space; generate magnetic field lines (191) having essentially the same directions and essentially opposite directions in lower regions (179) of the guidance space, thereby creating a magnetic stabilizing force (F _S ) in the upward direction; and
- in the other of the first and second control states, the set of permanent magnets engages the magnetic field lines (192) generated by the first and second electromagnets in the lower regions (179) of the guide space. ) and essentially opposite directions in the upper regions (178) of the guide space, generating magnetic field lines (191) in the downward direction, creating a magnetic stabilizing force F _S ,
A carrier transport system for non-contact transport of a carrier along a track assembly. Self-stabilizing unit (140), in particular for the carrier transport system of any one of claims 1 to 13, comprising:
at least one electromagnet (141) for acting on the first magnetic unit (14) of the carrier arranged in the guiding space (148) between the two magnetic poles of the at least one electromagnet;
a set of permanent magnets (175) generating a magnetic field with opposite directions in the upper region (178) and lower region (179) of the guide space;
gap sensor 146; and
a controller (145) configured to control the at least one electromagnet based on a signal from the gap sensor;
wherein the self-stabilizing unit is configured and actively controlled to apply a magnetic stabilizing force ( _FS ) to the carrier (10) selectively in upward and downward directions to hold the carrier (10) in a predetermined vertical position.
Self-stabilizing unit for carrier transport systems. In particular a carrier (10) transported by a carrier transport system (100) according to any one of claims 1 to 14, comprising:
a holding section for carrying an object to be transported in an essentially vertical orientation in the carrier;
a first magnetic unit (14) projecting laterally from the carrier at a first vertical coordinate and configured to magnetically interact with an actively controlled bidirectional magnetic stabilization unit (140); and
a second magnetic unit (15) arranged on the carrier at a second vertical coordinate and configured to magnetically interact with the first permanent magnetic levitation unit (121) generating a carrier levitation force (F _L );
A carrier transported by a carrier transport system. According to claim 15,
a third magnetic unit (16) arranged at a third vertical coordinate in the carrier and configured to interact with a drive unit (150) configured to move the carrier along the track assembly in a transport direction (T); and
At least one of the fourth magnetic units 17 arranged at a fourth vertical coordinate in the carrier and configured to magnetically interact with the second permanent magnetic levitation unit 122 generating a carrier levitation force F _L . including,
A carrier transported by a carrier transport system. According to claim 16,
The second magnetic unit 15 is arranged in a head portion of the carrier above the holding section, and the first magnetic unit 14, the third magnetic unit 16 and the fourth magnetic unit ( at least one of 17) is arranged in the lowermost part of the carrier below the holding section during transport of the carrier;
A carrier transported by a carrier transport system. As a method for non-contact transport of a carrier,
generating a carrier levitation force (F _L ) counteracting the weight force of the carrier with a passive magnet arrangement;
By selectively applying a magnetic stabilization force (F _S ) to the carrier in an upward direction and a downward direction with an actively controlled bi-directional self-stabilizing unit 140 arranged at a first vertical coordinate (V1), the predetermined stability of the carrier in the carrier transport space is achieved. stabilizing vertical positioning; and
moving the carrier in the transport direction with a drive unit arranged at a third vertical coordinate (V3).
A method for contactless transport of carriers. According to claim 18,
(i) the carrier levitation force (F _L ) of the passive magnet array, (ii) the gravimetric force of the carrier, and (iii) the vertical force component ( _FC ) applied to the carrier by the driving unit during transport of the carrier the sum is essentially zero, and the average magnetic stabilization force exerted on the carrier by the magnetic stabilization unit (140) is essentially zero.
A method for contactless transport of carriers. According to claim 18 or 19,
The carrier is oriented essentially vertically and has a vertical dimension of at least 1 m, the first permanent magnetic levitation unit 121 of the passive magnet assembly magnetically interacts with the head portion of the carrier, and the magnetic stabilization unit (140) magnetically interacts with the lowermost portion of the carrier and the drive unit (150) interacts with the lowermost portion of the carrier;
A method for contactless transport of carriers.

Images