KR20200106964A - Magnetic levitation system and method for non-contact transport of carriers in a vacuum environment - Google Patents

Abstract

A magnetic levitation system in a vacuum environment, and a method of contactlessly transporting a carrier in a vacuum environment are provided. The system includes a carrier that is non-contactly movable in a traveling direction; At least one magnetic bearing, wherein the at least one magnetic bearing is configured to apply a magnetic force on the carrier in a holding direction opposite to gravity, and to hold the carrier in a non-contact manner to the bearing; And a damping device acting on the carrier, wherein the damping device is configured to attenuate carrier vibrations in a direction of travel and a transverse direction perpendicular to the holding direction.

Description

Magnetic levitation system and method for non-contact transport of carriers in a vacuum environment

Embodiments of the present disclosure relate to a magnetic levitation system and a method of contactlessly transporting a carrier in a vacuum environment. Embodiments of the present disclosure relate in particular to a magnetic levitation system configured to contactlessly hold, position, and/or transport a carrier through a vacuum system, wherein the carrier holds an object, such as a substrate, particularly in an essentially vertical orientation. Can be carried. More specifically, the method described herein is adapted to be able to damp vibrations of the carrier in the transverse direction, the transverse direction being perpendicular to the traveling direction in which the carrier is transported and the holding direction opposite to gravity. .

The magnetic levitation system can be utilized for non-contact transport of the carrier relative to the base structure, for example under sub-atmospheric pressure. The object carried by the carrier, such as a substrate, may be transported from a first position in the vacuum system, ie a loading position, to a second position in the vacuum system, eg a deposition position. Magnetic levitation systems can enable contactless and therefore frictionless transport of the carrier, and reduce the generation of small particles in the vacuum processing system.

The desired behavior of the magnetic bearing can be compared to a mechanical spring. The greater the distance between the attracting magnets, the greater the force trying to realign the magnets. Since there is no mechanical contact between the magnets, only slight damping effects occur during relative movement. The mass of the supported and floating carrier and the spring-like force of the magnets create little damped mechanical oscillation. Typically, it takes 20 seconds or more for such oscillations in the typical range of approximately 10, 20, or 30 Hz to weaken to an acceptable magnitude.

At the same time, sometimes, structures in the micron or even nanometer range need to be formed on the substrate, and thus extremely precise positioning of the substrate is required. However, the oscillations of the carrier may adversely affect the positioning accuracy and transport stability of the carrier. Reducing, damping, or preventing oscillations of the carrier of a magnetic levitation system can be a challenge. Therefore, it would be beneficial to improve the transportation and positioning accuracy of the magnetic levitation system.

According to an aspect of the present disclosure, a magnetic levitation system in a vacuum environment is provided. The system includes a carrier that is non-contactly movable in a traveling direction; At least one magnetic bearing, wherein the at least one magnetic bearing is configured to apply magnetic force on the carrier in a holding direction opposite to gravity, and to hold the carrier in a non-contact manner to the bearing; And a damping device acting on the carrier. The damping device is configured to dampen carrier vibrations in the traveling direction and the transverse direction perpendicular to the holding direction.

According to another aspect of the present disclosure, a method of contactlessly transporting a carrier in a vacuum environment is provided. The method includes the steps of applying a magnetic force on the carrier in a holding direction opposite to gravity to hold the carrier contactlessly; Moving the carrier in the traveling direction; And damping vibrations of the carrier in a transverse direction perpendicular to the traveling direction and the holding direction.

The devices and methods of the present disclosure provide an improved magnetic levitation system for holding, positioning, and/or moving carriers within a vacuum environment, and transporting carriers within a vacuum environment with improved transport and positioning accuracy of the carrier. Make it possible.

Additional aspects, advantages, and features of the present disclosure are apparent from the dependent claims, the detailed description, and the accompanying drawings.

In such a way that the above-listed features of the present disclosure can be understood in detail, a more specific description of the present disclosure, briefly summarized above, may be made with reference to exemplary embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below.
1A shows a schematic cross-sectional view of a magnetic levitation system according to embodiments described herein, wherein lateral stabilization is achieved by repelling magnets.
1B shows a schematic cross-sectional view of a magnetic levitation system according to embodiments described herein, wherein vertical and lateral stabilization is achieved by attracting magnets.
FIG. 2A shows a cross-sectional view of detail B of FIG. 1B, in accordance with embodiments described herein, wherein a movable damping component arranged on a carrier is illustrated.
2B shows a cross-sectional view of the movable damping component of FIG. 2A, designed as a dissipating damper, according to embodiments described herein.
2C shows a cross-sectional view of the movable damping component of FIG. 2A, designed as a movable tuning mass damper, according to embodiments described herein.
FIG. 2D shows a cross-sectional view of detail A of FIG. 1A, in accordance with embodiments described herein, wherein a movable damping component arranged in a carrier is illustrated.
FIG. 3A shows a cross-sectional view of detail B of FIG. 1B, in accordance with embodiments described herein, wherein a stationary damping component arranged on a base is illustrated.
3B shows a cross-sectional view of the stationary damping component of FIG. 3A, designed as a dissipation damper, according to embodiments described herein.
3D shows a cross-sectional view of detail A of FIG. 1A, in accordance with embodiments described herein, wherein a stationary damping component arranged on a base is illustrated.
4A shows a cross-sectional view of detail A of FIG. 1A, in accordance with embodiments described herein, wherein a movable magnetic damper is illustrated.
FIG. 4B shows a cross-sectional view of detail A of FIG. 1A, according to embodiments described herein, wherein a movable damping component arranged on a carrier and designed as an active damping component is illustrated.
4C shows a cross-sectional view of a movable damping component arranged on a carrier and designed as the active damping component of FIG. 4B according to embodiments described herein.
FIG. 5A shows a cross-sectional view of detail A of FIG. 1A, in accordance with embodiments described herein, wherein a stationary magnetic damper is illustrated.
FIG. 5B shows a cross-sectional view of detail A of FIG. 1A, according to embodiments described herein, wherein a fixed damping component arranged on the base and designed as an active damping component having a damping actuator to move the guiding rail Components are illustrated.
FIG. 5C shows a cross-sectional view of detail A of FIG. 1A, according to embodiments described herein, with a damping actuator arranged at the base and generating and/or regulating a laterally oriented magnetic field. A fixed damping component designed as an active damping component is illustrated.

Reference will now be made in detail to various embodiments of the present disclosure, and one or more examples of the various embodiments are illustrated in the drawings. Within the following description of the drawings, like reference numbers refer to like components. In general, only the differences for the individual embodiments are described. Each example is provided as a description and is not intended as a limitation of the present disclosure. Features illustrated or described as part of an embodiment may be used in conjunction with or with respect to other embodiments to create further additional embodiments. It is intended that this description include such modifications and variations.

Here, it is noted that the terms magnetic levitation or maglev as used within the embodiments described herein can typically characterize the concept in which an object is suspended and moved without a support other than magnetic fields. Magnetic force is used to counteract the effects of gravity and to move and/or advance objects.

Additionally, in this document, it is noted that the expressions "element X of device Y" and "element X in device Y", or "element X arranged in device Y" are the same. Additionally, the terms “transverse direction” (eg, transverse force, transverse vibration), “lateral direction” and “transverse direction” are also the same.

1A shows a schematic diagram of an exemplary embodiment of a maglev system 10 in a vacuum environment. It should not be understood that the details described with reference to FIG. 1A by way of example are limited to the elements of FIG. 1A. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

The maglev system 10 as described herein,

-A carrier 12 non-contactly movable in the direction of travel 20.3;

-At least one magnetic bearing (14.2)-At least one magnetic bearing (14.2) applies a magnetic force on the carrier 12 in the holding direction (20.2) opposite to the gravity, and the carrier 12 is contactlessly applied to the bearing (14.2). Configured to hold with -; And

-Damping device 18 acting on the carrier 12

It may include,

The damping device 18 is configured to attenuate carrier vibrations in the traveling direction 20.3 and in the transverse direction 20.1 perpendicular to the holding direction 20.2.

The transverse direction 20.1, the holding direction 20.2, and the traveling direction 20.3 can form a coordinate system, in particular a Cartesian coordinate system, or possibly an inclined coordinate system. For all embodiments, it is evident that the transverse direction 20.1 is perpendicular to the planar carrier surface and/or the surface of the planar object 12.5 carried by the carrier 12, the carrier 12 in turn holding Oriented parallel to direction 20.2.

The carrier 12 may be designed as a plate-like structure, and the object 12.5 for transporting an object 12.5, such as a flat substrate, mask, shield, or waver along a transport path in a vacuum chamber. It can be configured to carry. The carrier 12 may carry the object 12.5 during transport, during alignment to the coating system, and/or during deposition on the object 12.5. The carrier 12, or the surface of the carrier 12, may be held and/or transported in an essentially vertical position, and the object 12.5 may be held on the carrier 12 in an essentially vertical orientation during transport and/or deposition. . The object 12.5 can be held on the carrier 12 by a mounting device, such as a mechanical mount, such as a clamp, an electrostatic chuck, or a magnetic chuck.

The object 12.5 may be a substrate, in particular a large area substrate having a size of 0.5 m ² or more, more specifically 1 m ² or more, or even 5 m ² or 10 m ² or more. For example, the substrate may be a large area substrate for manufacturing a display.

Organic materials may be deposited on the substrate. For example, OLED devices can be manufactured by depositing an organic material on a substrate.

According to the embodiments described herein, the damping device 18 may have a housing, in which components of the damping device other than sensors are arranged. In some embodiments, the housing can be vacuum-tight.

The vacuum-tight housing allows the arrangement of the damping unit 18 and carrier 12 in a vacuum or high vacuum. The vacuum-tight housing is gas-impermeable. Any movements inside the housing, which may be associated with friction or vibration, such as movement of the reaction mass 18.9, occur only inside the housing, hermetically isolated from the outer space.

In this way, it may be possible to use damping materials or material combinations for the damping device 18, which would otherwise be problematic in a vacuum environment or create impurities in the vacuum environment.

According to the embodiments described herein, the magnetic levitation system 10 includes: i) a base 14 for holding, positioning, and/or transporting the carrier 12, and/or ii) the carrier 12 At least one support rail (14.1) arranged on the base 14 and vertically spaced from the top and/or bottom side, and/or iii) laterally spaced from the left side and/or the right side of the carrier 12 And at least one guiding rail 14.3 arranged on the base 12. In this document, the terms "rail" and "track" are used synonymously.

Here, the top and bottom are positions defined with respect to the holding direction, and the left and right are positions defined with respect to the transverse direction.

The support rail can be designed as a top rail 14.1 arranged above the carrier 12, where the carrier 12 is held under the top rail 14.1 by magnetic force. Alternatively or additionally, the support rail can be designed as a lowermost rail arranged under the carrier 12, wherein the carrier 12 is held on the lowermost rail by magnetic force.

According to the embodiments described herein, at least one magnetic bearing 14.2 may be arranged on each support rail 14.1, in particular, each of the magnetic bearings 14.2, i) at least one permanent magnet , And/or ii) at least one actively controlled electromagnetic bearing actuator 14.5.

A plurality of active magnetic bearings 14.2 may be provided. The magnetic force acts between the base structure 14 and the carrier such that the carrier 12 is non-contactly held at a predetermined distance from the base 14. In some embodiments, the active magnetic bearing 14.2 is typically essentially vertical so that the distance between the top support rail 14.1 and the carrier 12 in the holding direction 20.2 can be kept essentially constant. It is configured to generate a magnetic force acting in the holding direction (20.2) which is the direction. In particular, at least one active magnetic bearing with a controllable actuator 14.5 can provide a magnetic attraction between the carrier 12 and the base 14.

According to embodiments described herein, the magnetic levitation system 10 may include at least one vertical magnetic counterpart 12.2 arranged on the top and/or bottom side of the carrier 12. . The vertical magnetic counterpart (12.2) in the carrier 12 magnetically interacts with the magnetic bearing (14.2) in the base (14), so that the magnetic force on the carrier (12) in the holding direction (20.2) opposite to gravity. And holding the carrier 12 on the bearing 14.2 in a non-contact manner. Here, vertical stabilization can be achieved by repelling magnets.

According to the embodiments described herein, the magnetic levitation system 10 may comprise at least one guiding magnet 14.4 which may be arranged on each guiding rail 14.3, wherein, in particular, a guiding magnet The ding magnet 14.4 is at least one permanent magnet to provide lateral stabilization of the carrier 12 in the transverse direction (20.1), and/or to provide lateral damping of the carrier 12 in the transverse direction (20.1). And at least one actively controlled electromagnetic damping actuator for. The transverse direction 20.1 may correspond to an essentially horizontal direction, in particular the thickness direction of the carrier 12. Here, lateral stabilization can be achieved by repelling magnets.

Actively controlled electromagnetic actuators of magnetic bearings 14.2, guiding magnets 14.4, or any other device that generates a magnetic field may include devices based on electromagnetic coils, or magnetic repulsion mechanisms by eddy currents, respectively, It can be actively controllable.

According to embodiments described herein, the magnetic levitation system 10 may include at least one lateral magnetic counterpart 12.4 arranged on the left side and/or the right side of the carrier 12. Each of the magnetic counterparts comprises at least one permanent magnet and/or at least one actively controlled electromagnetic counterpart actuator, such as an electromagnetic coil, or a device based on a magnetic repulsion mechanism by an eddy current, thereby carrying a carrier ( It is possible to apply a magnetic force on 12), keep the carrier 12 non-contact at a predefined distance from the guiding rail 14.3, and guide the carrier 12 along the guiding rail 14.3.

The guiding magnet 14.4 may be a passive magnetic stabilization device. In particular, the guiding magnet 14.4 may include a first plurality of permanent magnets fixed to the base 14, and the lateral magnetic counter part 12.4 is attached to the guiding rail 12.3 in the carrier 12. It may include a fixed second plurality of permanent magnets. The magnetic repulsive forces between the first plurality of permanent magnets and the second plurality of permanent magnets move the carrier 12 in a predetermined position in the transverse direction 20.1, e.g., the guiding rail 14.3 at the base 14 It can be forced to be in a position at a predetermined distance from, or a central position between the left and right guiding rails 14.3 at the base 14.

For example, parameters such as current applied to the active controlled electromagnetic bearing actuator 14.5 or the active controlled electromagnetic counterpart actuator may be controlled according to parameters such as the distance between the carrier 12 and the base 14. In particular, the distance between the support rail 12.1 and/or the guiding rail 12.3 and the carrier 12 can be measured by a distance sensor, and the magnetic field strength of the bearing actuator 14.5 will be set according to the measured distance. I can. In particular, the magnetic field strength may be increased when the distance exceeds a predetermined threshold value, and the magnetic field strength may be decreased when the distance is less than the threshold value. The actuator can be controlled with closed loop or feedback control.

According to the embodiments described herein, the magnetic levitation system 10 comprises at least one movable damping component 18.1 arranged on the carrier 12 (see FIGS. 2A-2C, 4A-4C), or at least It may comprise one stationary damping component 18.2, at least one stationary damping component 18.2 arranged on the base 14 and in particular spaced apart from the carrier 12, in particular the guiding rail of the base 14 It can be arranged in (14.3) (see Figs. 3A, 3B, 5A, 5B). The fixed damping component 18.2 and the movable damping component 18.1 may each comprise a passive damping component 18.3 or an active damping component 18.4.

In accordance with the embodiments described herein and with respect to the operation and arrangement of the damping device 18, several embodiments for damping the lateral vibrations of the carrier 12 may be provided.

As far as the operation of the damping device 18 is concerned, the damping device 18 may comprise i) at least one passive damping component 18.3, and/or ii) at least one active damping component 18.4. .

As far as the arrangement of the damping device 18 is concerned, the damping device 18 is arranged in a) at least one movable damping component 18.1 arranged in the carrier 12 and/or b) in the base 14 It can in particular comprise at least one stationary damping component 18.2 spaced apart from the carrier 12.

The movable damping component 18.1 can be arranged in the vertical magnetic counterpart 12.2 of the carrier 12 and/or the lateral magnetic counterpart 12.4 of the carrier 12, and the fixed damping component 18.2 is a base ( 14) of the support rail 14.1 and/or on the guiding rail 14.3 of the base 14.

As illustrated in FIG. 1A, the fixed damping component 18.2 can be fixed to the guiding rail 14.3 at the base 14. The detail marked as “A” in FIG. 1A includes the components of the maglev system, in which the damping device 18 can be arranged in whole or in part. To explain different embodiments of the damping device 18, detail A is enlarged on some figures and described in some figures.

According to embodiments described herein, the active damping component 18.4 comprises: i) at least one vibration sensor configured to generate a vibration sensor signal representing carrier vibrations in the transverse direction 20.1, and/or ii) At least one damping actuator 18.15, 18.16 configured to generate counter vibrations in response to the damping actuator signal, and/or iii) at least one damping actuator 18.14 connected to the vibration sensor 18.14 and at least one damping actuator 18.15, 18.16 It may include a controller 18.13. The controller 18.13 may be configured to generate a damping actuator signal in response to the vibration sensor signal, in particular such that counter vibrations damp or damp carrier vibrations in the transverse direction 20.1.

According to the embodiments described herein, the vibration sensor may include at least one of a position sensor, a speed sensor, an acceleration sensor, a force sensor, a pressure sensor, and a Hall sensor.

As illustrated in FIG. 1A, the actuator in the lateral guiding rail 14.3 at the base 14 is lateral guiding on the base 14 when the actuator current flows through the guiding magnet 14.4. It can be designed to generate the magnetic field of the magnet 14.4. The magnetic field of the lateral guiding magnet 14.4 on the base 14 can interact with the lateral guiding magnet 12.4 on the carrier 12 to exert a magnetic transverse or transverse force on the carrier 12. have.

The magnetic field and associated magnetic transverse force can be used to counteract the carrier vibrations. Thus, such a magnetic field is a magnetic field for lateral damping. The canceling magnetic force on the carrier 12 may be provided and controlled by a control loop for lateral damping by adjusting and/or regulating the actuator current.

A weakening magnetic transverse force that counteracts the carrier transverse vibrations may be provided by the magnetic field of the lateral guiding magnet 14.4. An oscillating magnetic transverse force interacting with the carrier 12, in particular having a phase shifted by 90° and the frequency of the carrier transverse vibrations, can achieve a weakening or canceling effect on the carrier transverse vibrations. In the following, several concepts and devices for providing such an oscillating magnetic transverse force are described.

According to the embodiments described herein, the stationary damping actuator 18.16, which is part of the active stationary damping component 18.2, is by means of a magnetic field relative to the carrier 12, in particular a magnetic guide element and/or an electromagnetic bearing actuator 14.5. By adaptively forming and/or adjusting the interference of the generated magnetic field, it can be configured to determine and/or adjust the magnetic force acting on the carrier 12, in particular in the transverse direction 20.1.

According to the embodiments described herein, the fixed damping actuator 18.16 moves and/or tilts the magnetic guide element or electromagnetic bearing actuator 14.5 with respect to the carrier 12 and/or base 14, thereby transversely It can be adapted to adaptively form and/or adjust the magnetic field interference for the carrier 12 in the direction 20.1. The fixed damping actuator 18.16 can be adapted to tilt and/or oscillate the magnetic field lines with respect to the vertical direction, in particular by superimposing an auxiliary magnetic field exerting a force on the carrier 12 in the transverse direction 20.1. .

1B shows a schematic cross-sectional view of a magnetic levitation system according to embodiments described herein, wherein vertical and lateral stabilization is achieved by attracting magnets. It should not be understood that the details described with exemplary reference to FIG. 1B are limited to the elements of FIG. 1B. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

According to this design, the guiding magnets 14.4 can exert an attractive force in a vertical direction on the carrier 12, that is, the guiding magnetic counterpart 12.4 in the carrier 12. Magnets 12.4, 14.4 are counter-pole, and thus, attractive forces are generated between magnets 12.4, 14.4. However, to achieve vertical stabilization, active controlled electromagnetic bearing actuators 14.5 arranged at the top and bottom of the maglev system can be used. Regarding the horizontal direction, the repulsive force of the same-polar magnets 12.4, 14.4 facing each other has a stabilizing effect of the mechanical springs. The arrangements shown in FIGS. 1A and 1B for the upper range of each lateral horizontal stabilization may also be provided in the lower range of the maglev system.

If, for any given reason, the carrier 12 has to move sideways, the guiding magnets 14.4 are laterally oriented on the carrier 12, i.e. the guiding magnetic counterpart 12.4 in the carrier 12. A force can be applied, which creates a force in the lateral direction and exerts it on the carrier 12, which prevents it from escaping. This allows the carrier 12 to be stabilized in the lateral direction.

According to the embodiments described herein, the magnetic levitation system,

-i) a carrier non-contactly movable in the direction of travel and ii) adapted to hold a planar object;

-At least one magnetic bearing configured to apply a magnetic force on the carrier for contactlessly holding the carrier in the bearing; And

-Damping device acting on the carrier

It may include,

The damping device is configured to damp carrier vibrations in a transverse direction perpendicular to the planar object.

According to this arrangement, the carrier can be transported in the direction of travel in both vertical and horizontal planes (upright and lying position), where the terms vertical (upright) or horizontal (lying down) refer to the vertical direction parallel to gravity. Indicates the orientation of the carrier relative to.

According to this arrangement, the magnetic bearing may be configured to apply a magnetic force on the carrier in a holding direction opposite to the remaining magnetic force, or in a direction opposite to magnetic forces in a horizontal direction. When the carrier 12 is arranged horizontally, the repelling guiding magnets 14.4, 12.4 can be used to overcompensate the gravity. Since the repelling magnets 14.4, 12.4 can also generate unstable horizontal forces, according to Earnshaw law, such forces can be stabilized in the horizontal direction by the active magnetic bearing 14.2.

According to this arrangement, the damping device can be configured to attenuate carrier vibrations in the traveling direction and in the transverse direction perpendicular to the holding direction.

FIG. 2a shows a cross-sectional view of detail B of FIG. 1b, wherein in the lateral magnetic counterpart 12.4 of the carrier 12, in particular, the carrier 12 and the guiding rail 12.3 on the carrier 12 A movable damping component 18.1 arranged in between is illustrated. The movable damping component 18.1 can be designed as an active or passive damping component 18.3 and is located on the side of the carrier 12 facing the right guiding rail 12.3 in the carrier 12. It should not be understood that the details described with exemplary reference to FIG. 2A are limited to the elements of FIG. 2A. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

According to embodiments described herein, the passive damping component 18.3 is at least one of a movable or stationary dissipation damper 18.5, a movable tuning mass damper 18.6, a movable magnetic damper 18.7, or a stationary magnetic damper 18.8. It can contain one. Such a passive damping component 18.3 is particularly suitable for embedding in a vacuum-tight housing decoupled from the controller of the magnetic bearing 14.2, for example, or for vacuum-tight encapsulation.

2B shows a cross-sectional view of the movable damping component 18.1 of FIG. 2A, designed as a dissipation damper 18.5. The movable dissipation damper 18.5 may comprise a reaction mass 18.9 and a dissipation element 18.10, wherein the dissipation element 18.10 is rigidly connected to the reaction mass 18.9 on one side and on the other side. It is rigidly connected to the carrier 12. In particular, there is no rigid connection between the dissipation damper 18.5 and the carrier guiding rail 12.3. Instead, a joint 12.6 can rigidly connect the carrier guiding rail 12.3 and the carrier 12. The details described with reference to FIG. 2B by way of example should not be understood as being limited to the elements of FIG. 2B. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

By vibrations of the carrier 12 connected to the dissipating element, an oscillating force is exerted on the dissipating element. Due to the rigid connection of the dissipating element to the reaction mass (18.9), which has a significantly larger mass compared to the dissipating element, and therefore has a high inertia, the dissipating element cannot vibrate freely, but instead oscillating the carrier 12 with an opposite force. Against power.

The superposition of the oscillating force of the carrier 12 and the anti-braking force of the dissipating element causes the energy of the carrier vibrations to be consumed, that is, converted into heat, causing the dissipating element to be heated. The vibration amplitude of the carrier 12 decreases with each oscillation, and accordingly, the carrier vibrations subside after several oscillations.

In this way, the dissipation damper 18.5 provides an efficient transverse vibration damping effect at an inexpensive price.

3A shows a cross-sectional view of detail B of FIG. 1B, in which a fixed damping component 18.2 arranged in the base 14 is illustrated. The fixed damping component 18.2 can be designed as a passive damping component 18.3 and is located on the side of the base 14 facing the right guiding rail 14.3 at the base 14. It should not be understood that the details described with exemplary reference to FIG. 3A are limited to the elements of FIG. 3A. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

According to the embodiments described herein, the fixed dissipation damper 18.5 may comprise a dissipation element 18.10, wherein the dissipation element 18.10 is rigidly connected to the base 14 on one side, and On the other side it is rigidly connected to the guiding rail 14.3 at the base 14.

3B shows a cross-sectional view of the stationary damping component 18.2 of FIG. 3A, designed as a dissipation damper 18.5. The details described with exemplary reference to FIG. 3B should not be understood as being limited to the elements of FIG. 3B. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

According to the embodiments described herein, the dissipating element 18.10 is a damping material, such as a rubber compound (e.g. Viton®), a polymer, an elastomer, a damping cushion (e.g. Sylomer®), a metal foam, Metal sponges (eg Stop-Choc®), viscoelastic materials, viscous fluids, high damping alloys, or particle damping materials. Such materials may have a high strength in the vertical direction so that the magnet tracks cannot attract each other, and may have a low strength in the transverse direction (20.1) to enable relative motion for the damping effect of transverse vibrations. Elastomers can also be used in combination on both lateral tracks.

Such materials are particularly suitable for vacuum applications, are elastic, and provide good weakening properties. Thus, vibrations of the carrier 12 can be effectively attenuated. In order to prevent contamination of the vacuum by the materials, for example residual moisture in the materials, the damping component 18.2 can advantageously be encapsulated or sealed against the outside. Such encapsulation can generally be used with materials that are not suitable for use in vacuum.

The dissipating element 18.10 may further include a piezoelectric material or a viscoelastic material.

According to the embodiments described herein, the dissipating element 18.10 may include a wire rope isolator, which is a spiral spring composed of a stranded cable formed in a loop. The remarkable damping effect is a result of the relative friction between the individual strands of the cable. In order to prevent contamination of the vacuum by the release of materials, such as particles due to friction, the damping component 18.2 can advantageously be encapsulated or sealed against the outside.

Piezoelectric materials or elements can be used for both the passive damping component 18.3 and the active damping component 18.4.

Passive damping is achieved by applying a resistive shunt to the piezo. This design is very robust against structural uncertainties. In order to obtain high damping values, the piezo can also be shunted to a tuning electrical network, the impedance of which is suitably matched with mechanical vibrations.

Active vibration control is realized by considering a piezoelectric material or element as a sensor or actuator to be used within the control loop. In this application, two situations can be distinguished, namely, colocation and non-colocation. Active damping can be realized by corocated actuator-sensor-pairs. If the actuator-sensor-pair can be properly designed in the structure (i.e., with a minimum amount of crosstalk between the actuator and sensor), the good damping values are robust by the passivity based control law. Can be obtained. Additionally, with MIMO-control, distributed sensors and actuators can be used.

In the case of active control, it is also possible to use a single piezoelectric element as both a sensor and an actuator. However, such a configuration can suffer from crosstalk. Then, by compensating for crosstalk, such as shifting the zeros of the control loop, high damping values can be obtained.

Viscoelastic materials can achieve an effective damping effect by dissipating mechanical energy as heat when the material is subjected to cyclic stress due to polymer chain interactions.

3D shows a cross-sectional view of detail A of FIG. 1A, wherein a fixed damping component 18.2 arranged at the base 14, in particular between the base 12 and the guiding rail 14.3 on the base 14. ) Is illustrated. The details described with exemplary reference to FIG. 3D should not be understood as being limited to the elements of FIG. 3D. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

The design shown here corresponds to the design of Fig. 3A, the difference being that the magnets 12.4 and 14.4 are made of the same poles and are arranged side by side, so that they repel each other.

2C shows a cross-sectional view of the movable damping component 18.1 of FIG. 2A, designed as a movable tuning mass damper 18.6. It should not be understood that the details described with exemplary reference to FIG. 2C are limited to the elements of FIG. 2C. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

According to embodiments described herein, the movable tuning mass damper 18.6 may comprise a spring element 18.11, a reaction mass 18.9, and a dissipating element 18.10, wherein the spring element 18.11 and The dissipating element 18.10 is arranged parallel between the reaction mass 18.9 and the carrier 12 and, in particular, is rigidly connected to the reaction mass 18.9 on one side and on the other side to the carrier 12 Connected firmly.

A movable tuning mass damper 18.6 can be attached to the carrier 12 to reduce the dynamic response of the carrier 12. The frequency of the damper can be tuned to a specific structural frequency, so that when that frequency is excited, the damper will resonate out of phase with the carrier motion. For carrier oscillations of about 12 Hz, the absorber can be tuned to 12 Hz plus/minus 3 Hz. Energy is dissipated by the damper inertial force acting on the carrier 12. In particular, there is no rigid connection between the tuning mass damper 18.6 and the carrier guiding rail 12.3. Instead, a joint 12.6 can rigidly connect the carrier guiding rail 12.3 and the carrier 12.

In other words, the lateral vibrations of the floating carrier 12 supported on the lateral magnetic "spring" occur at well-known and only slightly varying frequencies, so-called eigen frequencies. These can be estimated by the mass (m) of the carrier 12 and the strength (k) of the magnetic spring, and the natural frequency = sqrt(k / m) / 2 / pi. A vibration absorber composed of a reaction mass 18.9, a mechanical spring, and a dissipating element 18.10 (damper) can be tuned to such frequencies to effectively reduce vibrations.

Thus, any vibration that may occur in this range can be reliably attenuated through the passive damping component 18.3.

According to embodiments described herein, the magnetic damper may comprise an electrical conductor 18.12 made of an electrically conductive metal, such as aluminum or copper, wherein carrier vibrations in the transverse direction 20.1 weaken the carrier vibrations. Eddy currents are induced in the electrical conductor (18.12).

Fig. 2d shows a cross-sectional view of detail A of Fig. 1a, wherein in the lateral magnetic counterpart 12.4 of the carrier 12, in particular, the carrier 12 and the guiding rail 12.3 on the carrier 12 A movable damping component 18.1 arranged in between is illustrated. It should not be understood that the details described with exemplary reference to FIG. 2D are limited to the elements of FIG. 2D. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

The design shown here corresponds to the design of Fig. 2A, the difference is that the magnets 12.4 and 14.4 are made of the same poles and are arranged side by side, so that they repel each other.

4A and 5A show a cross-sectional view of detail A of FIG. 1A, respectively. In FIG. 4A a movable magnetic damper 18.7 is illustrated, in which an electrical conductor 18.12 is arranged on a guiding magnetic counterpart 12.4 in the carrier 12. In FIG. 5a a stationary magnetic damper 18.8 is illustrated, in which an electrical conductor 18.12 is arranged on the guiding rail 14.3 at the base 14. It should not be understood that the details described with exemplary reference to FIGS. 4A and 5A are limited to the elements of FIGS. 4A and 5A. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

These embodiments are based on the following technical effect, that is, the relative motion between the electrical conductor 18.12 and the magnetic field 14.6 induces an eddy current in the electrical conductor 18.12. The flow of electrons in the conductor creates an opposing magnetic field, which creates damping of motion, and creates heat inside the conductor, similar to the accumulation of heat inside the power cord during use. The amount of energy transferred to a conductor in the form of heat is equal to the change in kinetic energy lost by vibrations that cause movement-the greater the loss of kinetic energy, the greater the heat accumulation in the conductor and the stronger the damping effect.

According to the embodiments described herein, the electrical conductor 18.12 of the movable magnetic damper 18.7 shown in FIG. 4A can be i) arranged substantially vertically, or ii) the magnetic field line of the electromagnetic bearing 14.2 It can be arranged at an angle of at least 45° and/or at most 135° with respect to s 14.6. The conductor may be a) a linear conductor 18.12 extending along a linear axis, or b) a coil having at least one loop or winding. The angle or arrangement with respect to the magnetic field lines 14.6 is defined with respect to the conductor axis in case a) and with respect to the coil plane in case b). In particular, the coil plane is perpendicular to the coil axis.

According to the embodiments described herein, the electrical conductor 18.12 of the stationary magnetic damper 18.8 shown in FIG. 5A may be i) arranged substantially vertically, or ii) a guy arranged on the carrier 12. It may be arranged at an angle of at least 45° and/or up to 135° with respect to the magnetic field lines 14.6 of the Ding magnetic counterpart 12.4.

Both the arrangements of the electric conductor 18.12 with respect to the magnetic field lines 14.6 have a significant damping effect against carrier transverse vibrations.

FIG. 5b shows a cross-sectional view of detail A of FIG. 1a, in which a stationary damping component 18.2 arranged in the base 14 is illustrated. It should not be understood that the details described with exemplary reference to FIG. 5B are limited to the elements of FIG. 5B. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

The stationary damping component 18.2 depends on the vibrations arranged on the carrier 12 and/or the base 14 or the carrier transverse vibrations which can be measured by a position sensor, and/or to the transverse vibrations of the carrier. Adaptably, it may include a fixed damping actuator 18.16 such as a drive or servo motor designed to move or displace one of the guiding magnets.

By using the guide rail 14.3 or a fixed damping component 18.2 arranged in the base 14, which is shown in FIG. 5b, in particular by vibrating movement, the guiding rail 14.3 at the base 14 By moving the guiding magnet 14.4 against, an oscillating magnetic transverse force can be generated or provided that attenuates the carrier transverse vibrations.

A control loop may be provided for attenuation of transverse vibrations, wherein the drive current is determined by the controller 18.13, based on a sensor signal provided to the drive controller 18.13 by the sensor 18.14, and The driving part 18.16 is supplied in the drive part 18.16, and thus the driving part 18.16 is guided magnet in such a way that the magnetic field and the associated magnetic force of the guiding magnet 14.4 act on the carrier 12 to dampen the transverse carrier vibrations. Determined to move (14.4), a control loop is formed. The control loop can be adjusted in such a way that the carrier vibrations are dissipated very quickly.

This significantly improves the transport and positioning accuracy of the magnetic levitation system 10 by generating an effective damping of the transverse carrier vibrations. The described embodiment can be implemented using already existing lateral magnets, without the need for additional magnets to attenuate the lateral vibrations, thereby making the implementation cost effective and the operation stable. And be reliable.

FIG. 5c shows a cross-sectional view of detail A in FIG. 1a, in which a fixed damping component 18.2 is arranged on the base 14. It should not be understood that the details described with exemplary reference to FIG. 5C are limited to the elements of FIG. 5C. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

The stationary damping component 18.2 is designed as an active damping component 18.4 with a stationary damping actuator 18.16 that generates and/or regulates a laterally oriented magnetic field. Here, the following cases can be considered.

i) If the guiding magnet 14.4 already includes a controllable magnetic damping actuator, the fixed damping actuator 18.16 can be incorporated into the guiding magnet 14.4 to influence the magnetic field of the guiding magnet 14.4. And can be controlled by an associated control loop. In this case, the active damping component 18.4 may comprise a control loop for transverse vibration damping and, in particular, may comprise only a control loop without requiring a separate magnetic damping actuator.

ii) Alternatively, the damping actuator 18.16 is additionally mounted on the lateral guiding rail 14.3 at the base 14, controlled by the associated control loop for transverse vibration damping. It can be designed as an actuator. Similar to the case i), the magnetic field generating a weakening transverse force acting on the carrier 12 can be determined and/or controlled by a damping actuator current that creates a magnetic field for transverse vibration damping.

The stationary damping component 18.2 located on the base 14 can be designed to control the damping actuator current component by means of a corresponding control loop in such a way that the carrier transverse vibrations are damped. For this purpose, in particular by means of at least one sensor of the damping device 18, such as a vibration sensor, mounted on the carrier 12 or the base 14, transverse vibrations of the carrier can be detected. Based on the sensor current provided by the sensor to the transverse vibration controller, the damping actuator current is determined by the controller and supplied into the lateral guiding magnet 14.4 which creates a magnetic field to attenuate the carrier transverse vibrations. In addition, a control loop is formed for attenuating the transverse vibration.

In both cases, the stationary damping component 18.2 can advantageously be realized by means of an electronic circuit integrated in the magnetic guiding element. This situation is indicated by the fact that in Fig. 1A the guiding magnet 14.4 and the damping device 18 are represented by very same graphic elements.

In the case of ii), the damping actuator 18.16 is in particular even if the damping actuator 18.16 can be designed as an electromagnetic actuator additionally mounted on the lateral guiding rail 14.3 at the base 14. It is noteworthy that it is specially designed to damp vibrations with very small amplitudes in the sub-millimeter or micron range, so that the damping actuator 18.16 can have a small size and low weight and, consequently, be compactly constructed.

The control loop shown in Fig. 5C operates similarly to the control loop in Fig. 5B.

In both case i) and case ii), effective damping of the transverse carrier vibrations is provided, so that the accuracy of the transport and positioning of the magnetic levitation system 10 is significantly improved.

The stationary damping component 18.2 can also be arranged on the support rail 14.1 of the base 14. The stationary damping component 18.2 may comprise a magnetic damping actuator for generating an adjustable magnetic field, wherein an adaptively variable and adjustable transverse force can be generated by the magnetic field. In the embodiment included in FIG. 1A but not shown in detail elsewhere, a separate damping actuator arranged in the support rail 14.1 or incorporated in the bearing 14.2 may be adapted to generate and/or adapt such a magnetic field. And the magnetic field may be superimposed on the magnetic field of the magnetic bearing 14.2, and may be generated based on a concept similar to the concept described with respect to the embodiments shown in FIGS. 5B and 5C.

According to the embodiments described herein, a damping actuator, that is, both a fixed damping actuator and a movable damping actuator, may include at least one of a piezoelectric element, a linear drive, a voice coil actuator, and a moving coil actuator.

Fig. 4b shows a cross-sectional view of detail A of Fig. 1a, wherein a movable damping arranged or fixed on the carrier 12, for example between the carrier 12 and the guiding rail 12.3 in the carrier 12 Component 18.1 is illustrated. The movable damping component 18.1 can be designed as an active damping component 18.4. It should not be understood that the details described with exemplary reference to FIG. 4B are limited to the elements of FIG. 4B. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

Active damping component 18.4 comprises at least one vibration sensor 18.14 configured to generate a vibration sensor signal representing carrier vibrations in the transverse direction 20.1, movable configured to generate counter vibrations in response to the damping actuator signal. A damping actuator 18.15, and a vibration sensor 18.14 and a controller 18.13 connected to the damping actuator 18.15 may be included. The controller 18.13 may be configured to generate a damping actuator signal in response to the vibration sensor signal, in particular such that counter vibrations damp or damp carrier vibrations in the transverse direction 20.1.

According to embodiments described herein, the movable damping actuator 18.5 that is part of the active movable damping component 18.1 may include a reactive mass 18.9 and a vibrating element 18.17, with one vibrating element 18.17 one. It is rigidly connected to the reaction mass (18.9) on the side of and to the carrier 12 on the other side.

4C shows a cross-sectional view of a movable damping component 18.1 arranged on the carrier 12 and designed as the active damping component 18.4 of FIG. 4B. The details described with exemplary reference to FIG. 4C should not be understood as being limited to the elements of FIG. 4C. Rather, these details may also be combined with additional embodiments described with exemplary reference to other drawings.

As already explained, the controller 18.13 of the active movable damping component 18.1 allows the vibrations of the actuator to match the vibrations of the carrier 12 so that the superposition of the actuator vibrations and the carrier vibrations results in damping of the carrier vibrations. In such a way that the phase is reversed, the damping actuator current can be determined or adjusted. The vibration amplitude of the carrier 12 decreases with each oscillation, and accordingly, the carrier vibrations subside after several oscillations.

The movable damping actuator 18.15 is capable of exerting only the necessary counter force acting on the carrier 12 by means of a rigid connection to the inert reaction mass 18.9. In particular, there is no rigid connection between the movable damping actuator 18.15 and the carrier guiding rail 12.3. Instead, a joint 12.6 can rigidly connect the carrier guiding rail 12.3 and the carrier 12. The reaction mass (18.9) is typically less than 10% of the carrier mass, more typically even less than 5% of the carrier mass, in order to keep the total weight of the carriers within an acceptable range.

The damping actuator 18.15 of the active movable damping component 18.1 may comprise a drive, such as a micro motor, or a piezoelectric element. A battery or wireless energy transfer may be provided for power supply.

1A and 1B, non-contact transportation of the carrier 12 in a vacuum environment,

-Applying a magnetic force on the carrier 12 in a holding direction 20.2 opposite to gravity, to hold the carrier 12 contactlessly;

-Moving the carrier 12 in the traveling direction 20.3; And

-Damping the vibrations of the carrier 12 in the traveling direction (20.3) and the transverse direction (20.1) perpendicular to the holding direction (20.2)

Includes.

Damping the carrier vibrations may be achieved by: a) passively dissipating the energy of the carrier vibrations, or b) applying an actively or adaptively controllable magnetic force on the carrier 12 in the transverse direction (20.1), and /Or in particular the frequency of the carrier transverse vibrations and controllable counter vibrations with a phase shifted by 90° can be carried out by superimposing the carrier vibrations.

Moving the carrier 12 may be made possible by applying a magnetic force on the carrier 12 in the traveling direction 20.3.

This described description is intended to disclose the present disclosure, including in the best mode, and also to those skilled in the art, including making and using any device or system, and performing any included methods. Use examples to enable you to practice what is being done. Embodiments described herein provide an improved method and apparatus for holding, positioning, and/or moving a carrier within a vacuum environment, and transporting a carrier within a vacuum environment with improved transport and positioning accuracy of the carrier. Make it possible. While various specific embodiments have been disclosed above, mutually non-exclusive features of the embodiments described above may be combined with each other. The patentable scope is defined by the claims, and other examples are, if they have structural elements that are not different from the written language of the claims, or if they contain equivalent structural elements with non-substantial differences from the written language of the claims. It is intended to be within the scope of.

Claims (15)

A carrier movable in a non-contact manner in a forward direction;
At least one magnetic bearing, wherein the at least one magnetic bearing is configured to apply magnetic force on the carrier in a holding direction opposite to gravity, and to hold the carrier in a non-contact manner to the bearing; And
Damping device acting on the carrier
Including,
The damping device is configured to damp carrier vibrations in the traveling direction and in a cross direction perpendicular to the holding direction,
Maglev system in a vacuum environment. The method of claim 1,
A base for holding, positioning, and/or transporting the carrier;
At least one support rail vertically spaced from the uppermost and/or lowermost faces of the carrier, arranged on the base, and/or laterally spaced apart from the left and/or right faces of the carrier, to the base At least one guiding rail arranged, in particular at least one magnetic bearing arranged on each support rail;
In particular, at least one guiding magnet arranged on each guiding rail
It contains at least one of,
In particular, the guiding magnet comprises at least one permanent magnet and/or at least one actively controlled electromagnetic damping actuator,
The magnetic bearing and/or the guiding magnet comprises at least one permanent magnet or at least one actively controlled electromagnetic bearing actuator,
Maglev system in a vacuum environment. The method according to claim 1 or 2,
At least one vertical magnetic counterpart arranged on the uppermost surface and/or the lowermost surface of the carrier; And
At least one lateral magnetic counterpart arranged on the left side and/or the right side of the carrier
It further includes,
Each of the magnetic counterparts optionally comprises at least one permanent magnet and/or at least one actively controlled electromagnetic counterpart actuator,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 3,
The damping device comprises i) at least one passive damping component and/or ii) at least one active damping component,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 4,
The damping device comprises i) at least one movable damping component arranged on the carrier and/or ii) at least one stationary damping component arranged on the base and in particular spaced from the carrier;
The movable damping component is arranged in i) a perpendicular magnetic counterpart of the carrier and/or ii) a lateral magnetic counterpart of the carrier;
The fixed damping component is arranged on the support rail of the base and/or the guiding rail of the base.
According to at least one of,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 5,
The active damping component i) at least one vibration sensor configured to generate a vibration sensor signal representing carrier vibrations in the transverse direction, and/or ii) to generate counter vibrations in response to a damping actuator signal. At least one damping actuator configured, and/or iii) at least one controller coupled to the vibration sensor and the damping actuator;
The controller is configured to generate the damping actuator signal in response to the vibration sensor signal, in particular such that the counter vibrations damp or attenuate the carrier vibrations in the transverse direction.
Containing at least one of,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 6,
Fixed damping actuators, which are part of an active fixed damping component, by adaptively forming and/or adjusting the interference of the magnetic field against the carrier, in particular the magnetic field generated by the magnetic guide element and/or the electromagnetic bearing actuator, in particular in the transverse direction. A feature configured to determine and/or adjust a magnetic force acting on the carrier;
The fixed damping actuator moves or tilts the magnetic guide element or the electromagnetic bearing actuator with respect to the carrier and/or the base, thereby adaptively forming magnetic field interference with the carrier in the transverse direction and/or Features adapted to adjust;
The fixed damping actuator is adapted to incline and/or oscillate magnetic field lines with respect to the vertical direction, in particular by superimposing an auxiliary magnetic field exerting a force on the carrier in the transverse direction.
Containing at least one of,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 7,
A movable damping actuator that is part of an active movable damping component comprising a reactive mass and a vibrating element, the vibrating element rigidly connected to the reactive mass on one side and rigidly connected to the carrier on the other side;
The damping actuator includes at least one of a piezoelectric element, a linear drive, a voice coil actuator, and a moving coil actuator;
The vibration sensor includes at least one of a position sensor, a speed sensor, and an acceleration sensor.
Containing at least one of,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 8,
The passive damping component comprises at least one of a movable or fixed dissipating damper, a movable tuning mass damper, a movable magnetic damper, or a stationary magnetic damper,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 9,
Wherein the movable dissipation damper comprises a reaction mass and a dissipation element, the dissipation element being rigidly connected to the reaction mass on one side and rigidly connected to the carrier on the other side;
The movable tuning mass damper comprises a spring element, a reaction mass, and a dissipating element, wherein the spring element and the dissipating element are arranged parallel between the reaction mass and the carrier, and, in particular, the reaction on one side A feature that is rigidly connected to the mass and rigidly connected to the carrier on the other side;
The fixed dissipation damper includes a dissipating element, and the dissipating element is rigidly connected to the base on one side and rigidly connected to the guiding rail on the other side.
Containing at least one of,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 10,
The dissipating element comprises a damping material or a wire rope isolator,
Maglev system in a vacuum environment. The method according to any one of claims 1 to 11,
The damping material comprises at least one of a rubber compound, a polymer, an elastomer, a damping cushion, a metal foam, a metal sponge, a viscoelastic material, a viscous fluid, a piezoelectric material, a high damping alloy, and a particle damping material.
Maglev system in a vacuum environment. The method according to any one of claims 1 to 12,
The magnetic damper includes an electric conductor, wherein carrier vibrations in the transverse direction induce eddy currents damping the carrier vibrations to the electric conductor;
The electrical conductor of the movable magnetic damper i) is arranged substantially vertically, or ii) is arranged at an angle of at least 45° and/or up to 135° with respect to the magnetic field lines of the electromagnetic bearing;
The electrical conductors of a fixed magnetic damper are i) arranged substantially vertically, or ii) arranged at an angle of at least 45° and/or up to 135° with respect to the magnetic field lines of the magnetic counterpart arranged on the carrier.
Containing at least one of,
Maglev system in a vacuum environment. As a method of non-contact transport of carriers in a vacuum environment,
Applying a magnetic force on the carrier in a holding direction opposite to gravity to hold the carrier in a non-contact manner;
Moving the carrier in a traveling direction; And
Damping vibrations of the carrier in a transverse direction perpendicular to the traveling direction and the holding direction
Containing,
A method of non-contact transport of carriers in a vacuum environment. The method of claim 14,
Damping the vibrations of the carrier is performed by passively dissipating the energy of the carrier vibrations;
Damping the vibrations of the carrier can be achieved by applying an actively or adaptively controllable magnetic force on the carrier in the transverse direction, and/or in particular the frequency of the carrier transverse vibrations and the phase shifted by 90°. Performed by superimposing the carrier vibrations with controllable counter vibrations having;
The step of moving the carrier is made possible by applying a magnetic force on the carrier in the traveling direction,
A method of non-contact transport of carriers in a vacuum environment.

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