KR102468292B1 - Apparatus for transporting a first carrier and a second carrier, a processing system for vertically processing a substrate, and methods therefor - Google Patents

Abstract

An apparatus 100 for transporting a first carrier 10A and a second carrier 10B in a vacuum chamber 210 is described. The device 100 comprises magnetic bearings 120 for holding the first carrier 10A in a non-contact manner and a drive unit 130 for moving the first carrier 10A along a first transport path T1. A first transport system 101 comprising magnetic bearings 120 and a drive unit 130 are arranged above the first carrier transport space 15A. The device 100 also includes a second transport system 102, which is offset horizontally from the first transport system 101 and which holds the second carrier 10B in a non-contact manner. and an additional drive unit 130B for moving the second carrier 10B along the second transport path T2, wherein the additional magnetic bearings 120B are Arranged next to the magnetic bearings 120 . Also described are processing systems and methods for vertically processing a substrate.

Description

Apparatus for transporting a first carrier and a second carrier, a processing system for vertically processing a substrate, and methods therefor

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transporting carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for non-contact transfer of carriers usable in processing systems for vertical substrate processing, such as material deposition on large area substrates for display production. . In particular, embodiments of the present disclosure relate to apparatuses for transporting a first carrier and a second carrier in vertical substrate processing systems, such as for the manufacture of organic light-emitting diode (OLED) devices.

[0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD) and thermal evaporation. Coated substrates can be used in several applications and in several fields of technology. For example, coated substrates can be used in the field of display devices. Display devices may be used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] For example, coated substrates can be used in the field of organic light emitting diode (OLED) devices. OLEDs can be used, for example, for the manufacture of television screens for displaying information, computer monitors, mobile phones, other hand-held devices, and the like. An OLED device, such as an OLED display, may include one or more layers of organic material sandwiched between two electrodes deposited on a substrate.

[0004] During deposition of a coating material on a substrate, the substrate may be held by a substrate carrier, and a mask may be held in front of the substrate by the mask carrier. A material pattern corresponding to the opening pattern of the mask, for example a plurality of pixels, may be deposited on the substrate, for example by material evaporation.

[0005] The functionality of an OLED device is typically dependent on the accuracy of the coating pattern and the thickness of the organic material, which must fall within a predetermined range. In order to obtain high-resolution OLED devices, the technical challenges associated with the deposition of evaporated materials need to be mastered. In particular, accurate and smooth transfer of substrate carriers carrying substrates and/or mask carriers carrying masks via a vacuum system is a challenge. Also, precise handling of the substrate carrier relative to the mask carrier under vacuum conditions is important to achieve high quality deposition results, for example for producing high resolution OLED devices.

[0006] Accordingly, there is a continuing need for improved apparatuses and methods for transporting carriers as well as providing improved vacuum processing systems that overcome at least some of the problems of the prior art.

[0007] In view of the above, according to the independent claims, an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, a processing system for vertically processing a substrate, a first carrier and a second carrier in a vacuum chamber A method of transferring the carrier and a method of adjusting the distance between the first carrier and the second carrier in the vacuum chamber are provided. Further aspects, advantages and features are apparent from the dependent claims, the detailed description and the accompanying drawings.

[0008] According to one aspect of the present disclosure, an apparatus for transporting a first carrier and a second carrier in a vacuum chamber is provided. The device includes a first transport system provided along a first transport path and comprising a first upper track section. The first upper track section includes one or more magnetic bearings for non-contact holding the first carrier in the first carrier transport space. One or more magnetic bearings are arranged centrally above the center of gravity of the first carrier to be transported. Additionally, the first upper track section includes a drive unit for moving the first carrier along the first transport path. One or more magnetic bearings and a drive unit are arranged above the first carrier transport space. The apparatus also includes a second transport system provided along a second transport path horizontally offset from the first transport path and comprising a second upper track section. The second upper track section comprises one or more additional magnetic bearings for non-contact holding the second carrier in the second carrier transport space. One or more further magnetic bearings are arranged centrally above the center of gravity of the second carrier to be transported. Additionally, the second upper track section comprises a further drive unit for moving the second carrier along the second transport path. One or more additional magnetic bearings and a further drive unit are arranged above the second carrier transport space. The one or more additional magnetic bearings of the second upper track section are arranged next to the one or more magnetic bearings of the first upper track section.

[0009] According to a further aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum chamber containing a processing device. The processing system also includes an apparatus for transferring a first carrier and a second carrier in a vacuum chamber according to any of the embodiments described herein.

[0010] According to another aspect of the present disclosure, a method of transporting a first carrier and a second carrier in a vacuum chamber is provided. The method includes contactlessly holding a first carrier in a first carrier transport space using one or more magnetic bearings. One or more magnetic bearings are arranged centrally above the center of gravity of the first carrier to be transported. Additionally, the method includes contactlessly holding the second carrier in the second carrier transport space using one or more additional magnetic bearings. One or more further magnetic bearings are arranged centrally above the center of gravity of the second carrier to be transported. One or more additional magnetic bearings are arranged next to the one or more magnetic bearings. The method also includes conveying the first carrier in the conveying direction using a drive unit arranged above the first carrier conveying space. Still further, the method includes conveying the second carrier in the conveying direction using a further drive unit arranged above the second carrier conveying space.

[0011] According to another aspect of the present disclosure, a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber is provided. The method includes providing an apparatus for transporting a first carrier and a second carrier. The device includes a first transport system provided along a first transport path and comprising a first upper track section. The first upper track section includes one or more magnetic bearings for non-contact holding the first carrier in the first carrier transport space. One or more magnetic bearings are arranged centrally above the center of gravity of the first carrier to be transported. Additionally, the first upper track section includes a drive unit for moving the first carrier along the first transport path. One or more magnetic bearings and a drive unit are arranged above the first carrier transport space. The apparatus also includes a second transport system provided along a second transport path horizontally offset from the first transport path and comprising a second upper track section. The second upper track section comprises one or more additional magnetic bearings for non-contact holding the second carrier in the second carrier transport space. One or more further magnetic bearings are arranged centrally above the center of gravity of the second carrier to be transported. Additionally, the second upper track section comprises a further drive unit for moving the second carrier along the second transport path. One or more additional magnetic bearings and a further drive unit are arranged above the second carrier transport space. The one or more additional magnetic bearings of the second upper track section are arranged next to the one or more magnetic bearings of the first upper track section. Additionally, the device includes a second carrier transfer assembly for moving a second carrier from the second transport path toward the first transport path in a second carrier transfer direction. The second carrier transfer assembly includes a second transfer actuator provided in an atmospheric space, in particular outside the vacuum chamber or in an atmospheric box. In addition, a method for adjusting the distance between the first carrier and the second carrier in the vacuum chamber is to move the second carrier from the second transport path toward the first transport path in the second carrier transfer direction by using the second transfer actuator. Including moving. Alternatively, a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber may include using a second transfer actuator to move the second carrier from the second transport path in a second carrier transfer direction to the first transport path. moving away from

[0012] Embodiments also relate to apparatuses for performing the disclosed methods, including apparatus parts for performing each described method aspect. These method aspects may be performed by hardware components, by a computer programmed by suitable software, by any combination of the two, or in any other manner. Moreover, embodiments according to the present disclosure also relate to methods for operating the described apparatus. The methods for operating the device described include method aspects for performing every function of the device.

[0013] In such a manner that the above-listed features of the present disclosure may be understood in detail, a more detailed description of the present disclosure briefly summarized above may be made with reference to the embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below:
1 shows a schematic diagram of an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, according to embodiments described herein;
2 and 3a show schematic views of an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, according to further embodiments described herein;
3b shows a schematic side view of an upper portion of an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, according to embodiments described herein;
4 shows a schematic diagram of an upper part of an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, according to further embodiments described herein;
5 shows a schematic diagram of a processing system for vertically processing a substrate, in accordance with embodiments described herein;
6 shows a flow chart to illustrate a method for transferring a first carrier and a second carrier in a vacuum chamber, in accordance with embodiments described herein; and
7 shows a flow chart to illustrate a method of adjusting a distance between a first carrier and a second carrier in a vacuum chamber, in accordance with embodiments described herein.

[0014] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of the various embodiments being illustrated in the drawings. Within the following description of the drawings, like reference numbers refer to like components. Only differences for individual embodiments are described. Each example is provided by way of explanation of the present disclosure, and is not intended as a limitation of the present disclosure. Also, features illustrated or described as part of one embodiment may be used on or in conjunction with other embodiments to yield a still further embodiment. The description is intended to cover such modifications and variations.

Referring exemplarily to FIG. 1 , an apparatus 100 for transporting a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure is described. For example, as described herein, vacuum chamber 210 may be a vacuum chamber of processing system 200 for vertically processing a substrate. A device for transporting the first carrier and the second carrier may also be referred to herein as a transporting device.

[0016] According to embodiments, which may be combined with any other embodiments described herein, the device 100 is provided along a first transport path T1 in a transport direction T with a first transport system ( 101). The conveying direction T is perpendicular to the drawing plane of FIG. 1 . The first transport system 101 includes a first upper track section 11U. The first upper track section 11U includes one or more magnetic bearings 120 for non-contact holding the first carrier 10A in the first carrier transport space 15A. One or more magnetic bearings 120 are arranged centrally above the center of gravity G1 of the first carrier 10A to be transported. Additionally, the first upper track section 11U includes a drive unit 130 for moving the first carrier 10A along the first transport path T1. One or more magnetic bearings 120 and drive unit 130 are arranged above the first carrier transport space 15A.

[0017] Additionally, apparatus 100 includes a second transport system provided along a second transport path T2 horizontally offset from the first transport path T1 and comprising a second upper track section 14U. (102). The second upper track section 14U includes one or more additional magnetic bearings 120B for non-contact holding the second carrier 10B in the second carrier transport space 15B. One or more additional magnetic bearings 120B are arranged centrally above the center of gravity G2 of the second carrier 10B to be transported. The second upper track section 14U also includes an additional drive unit 130B for moving the second carrier 10B along the second transport path T2. One or more additional magnetic bearings 120B and an additional drive unit 130B are arranged above the second carrier transport space 15B. As exemplarily shown in FIG. 1 , one or more additional magnetic bearings 120B are arranged next to one or more magnetic bearings 120 .

[0018] Accordingly, embodiments of the device for transporting the first carrier and the second carrier, as described herein, are particularly useful for accurate and smooth transport of carriers, for example in a vacuum chamber in which a high-temperature vacuum environment is provided. As well as with respect to compactness, it is improved compared to conventional carrier transport devices. Further, embodiments as described herein advantageously provide more robust contactless carrier transport with lower production costs compared to conventional carrier transport devices. In particular, embodiments of an apparatus for transporting a carrier, as described herein, are less susceptible to manufacturing tolerances, deformation, and thermal expansion. Also advantageously, a simpler integration of the device for transporting the first carrier and the second carrier into the vacuum chamber is provided.

[0019] Before various additional embodiments of the present disclosure are described in more detail, some aspects of some terms used herein are described.

[0020] In the present disclosure, a "carrier transport space" may be understood as an area in which carriers are arranged in a transport direction along a transport path while the carrier is transported. In particular, as exemplarily shown in FIG. 1 , the carrier transport space may be a vertical carrier transport space having a height H extending in the vertical direction and a width W extending in the horizontal direction. For example, the aspect ratio of H/W may be H/W ≥ 5, particularly H/W ≥ 10. Unless explicitly stated otherwise, the term "carrier transport space" as used herein may refer to a first carrier transport space and/or a second carrier transport space as described herein.

Referring illustratively to FIG. 1 , it should be understood that an upper track section as described herein advantageously provides a magnetic levitation system for contactless transport of a carrier. As schematically shown in FIG. 1 , the first carrier 10A is held in a non-contact manner in the first carrier transport space 15A between the upper chamber wall 212 and the lowermost chamber wall 211 . The second carrier 10B is held in a non-contact manner in the second carrier transport space 15B between the upper chamber wall 212 and the lower chamber wall 211 . In particular, the upper chamber wall 212 may be the ceiling of the vacuum chamber. Thus, the lowermost chamber wall 211 may be the lowermost wall of the vacuum chamber.

[0022] Referring to Figure 1, in the present disclosure, the expression "centrally arranged above the center of gravity of the carrier" means that the vertical plane 111 extending through the center of gravity G of the carrier also supports magnetic bearings. It can be understood that it extends through. In other words, the vertical plane 111 extending through the center of gravity G of the carrier, for example the first carrier 10A or the second carrier 10B, has individual magnetic bearings, for example one or more magnetic bearings 120 or It may intersect with one or more additional magnetic bearings 120B. In particular, the vertical plane 111 may approximately intersect the centers of the individual magnetic bearings. The expression "approximately intersects the center of the individual magnetic bearings" will be understood as the vertical plane 111 intersects the magnetic bearings at a lateral distance from the center of the individual magnetic bearings. can In particular, the vertical plane 111 may intersect the magnetic bearings with a lateral deviation from the center of the individual magnetic bearings, i.e., with a certain lateral distance to the center of the individual magnetic bearings. have. The term "lateral deviation" can be understood as a lateral deviation from the center of the individual magnetic bearings, in the direction of the lateral edges of the individual magnetic bearings. Accordingly, the vertical plane 111 that exactly intersects the center of the individual magnetic bearings has a lateral deviation of 0% from the center of the individual magnetic bearings. A vertical plane 111 that exactly intersects the edge of the individual magnetic bearings has a lateral deviation of 100% from the center of the individual magnetic bearings. According to some embodiments, which may be combined with other embodiments described herein, the lateral deviation of the vertical plane 111 intersecting the center of the individual magnetic bearings is ± 75%, particularly ± 50%, more particularly ± 25%, more particularly ± 10%. According to one example, the vertical plane 111 may represent a plane of symmetry for the individual magnetic bearings. As exemplarily shown in FIG. 1 , a drive unit as described herein may be arranged laterally relative to the individual magnetic bearings.

[0023] A "magnetic levitation system" in the present disclosure may be understood as a system configured to hold an object, such as a carrier, in a non-contact manner by using magnetic force. In the present disclosure, the term "floating" or "floating" refers to the condition of a carrier carrying an object, such as a substrate or mask, where the object floats without mechanical contact or support. Moving or transporting an object also means providing a force in a direction different from that of the driving force, eg, the levitation force, where the object is moved from one position to another different position, eg, a different position along the transport direction. are moved For example, a carrier carrying a substrate or mask may be levitated, that is, it may be levitated by a force that counteracts gravity, and may be moved while levitated in a direction different from the direction parallel to gravity.

[0024] In the present disclosure, the term "contactless" is understood to mean that the weight, such as the weight of a carrier, in particular the weight of a carrier carrying a substrate or mask, is held by magnetic force and not by mechanical contact force or mechanical force. It can be. In other words, the term “contactless,” as used throughout this description, can be understood to mean that the carrier is held in a floating or afloat state using mechanical forces, ie, magnetic forces instead of contact forces.

[0025] In the present disclosure, a "carrier" may be understood as a carrier configured to hold a substrate (also referred to as a substrate carrier). For example, the carrier may be a substrate carrier for transporting a large area substrate. It should be understood that embodiments of the apparatus for transporting a carrier may also be used with other carrier types, eg mask carriers. Thus, additionally or alternatively, the carrier may be a carrier configured to carry a mask. In particular, the first carrier 10A as described herein may be, for example, a substrate carrier carrying the substrate 1, and the second carrier 10B as described herein may be, for example, a mask 2. It may be a mask carrier that carries. The size of the substrate carrier can be different from the size of the mask carrier. For example, the height and/or width of the substrate carrier may be greater than the height and/or width of the mask carrier. Alternatively, the height and/or width of the substrate carrier may be smaller than the height and/or width of the mask carrier. It should also be understood that the term "carrier" as used herein may refer to a first carrier and/or a second carrier, as described herein, unless explicitly stated otherwise in this disclosure. .

[0026] In this disclosure, the term "substrate" may encompass, among others, substantially inflexible substrates, such as wafers, slices of transparent crystal, such as sapphire, or glass plates. However, the present disclosure is not limited thereto, and the term “substrate” may also encompass flexible substrates such as webs or foils. The term “substantially inflexible” is understood to distinguish it from “flexible”. Specifically, a substantially inflexible substrate, such as a glass plate having a thickness of 0.5 mm or less, may have some degree of flexibility, where the flexibility of the substantially inflexible substrate is less than that of flexible substrates. According to the embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be glass (eg, soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, compound materials, carbon fiber materials, or any other material that may be coated by a deposition process. may be made of a material selected from the group consisting of other materials or combinations of materials.

[0027] In the present disclosure, the term "large area substrate" refers to a substrate having a main surface having an area of 0.5 m2 or more, especially 1 m2 or more. In some embodiments, the large area substrate is GEN 4.5, which corresponds to a substrate of about 0.67 m2 (0.73 x 0.92 m), GEN 5, which corresponds to a substrate of about 1.4 m2 (1.1 m x 1.3 m), about 4.29 m2. GEN 7.5 corresponding to a substrate (1.95 m × 2.2 m), GEN 8.5 corresponding to a substrate of about 5.7 m 2 (2.2 m × 2.5 m), or even GEN corresponding to a substrate of about 8.7 m 2 (2.85 m × 3.05 m) may be 10 Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. Also, the substrate thickness may be between 0.1 and 1.8 mm, particularly up to about 0.9 mm, such as 0.7 mm or 0.5.

[0028] In the present disclosure, a "conveying system" may be understood as a system configured to convey a carrier in a conveying direction along a conveying path. The term "direction of transport" can be understood as the direction in which the carrier is transported along the transport path. Typically, the conveying direction may be essentially horizontal.

[0029] In the present disclosure, an “upper track section” may be understood as an upper portion of a transport system as described herein, comprising one or more magnetic bearings and a drive unit.

[0030] In the present disclosure, a "magnetic bearing" may be understood as a bearing configured to hold or support an object, such as a carrier as described herein, in a non-contact manner, ie, without physical contact. Accordingly, one or more magnetic bearings as described herein generate a magnetic force acting on the carrier such that the carrier is held in a non-contact manner at a predetermined distance from a base structure, such as an upper chamber wall 212 as shown in FIG. 1 . can be configured to In particular, the one or more magnetic bearings 120 have an essentially vertical direction (V) such that the vertical width of the gap 122 between the carrier and the upper chamber wall 212 as described herein can remain essentially constant. ) can be configured to generate a magnetic force acting as

[0031] In the present disclosure, a “drive unit” may be understood as a unit configured to move an object, such as a carrier, as described herein in a non-contact manner in a transport direction. In particular, a drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Thus, the driving unit may be a linear motor. For example, the linear motor may be an iron-core linear motor. Alternatively, the linear motor may be an ironless linear motor. An ironless linear motor can be beneficial in preventing torsional moments on the carrier caused by normal forces due to possible interaction of the iron core of the linear motor with the passive magnetic elements of the carrier.

[0032] Some embodiments described herein involve the concept of a "vertical direction". A vertical direction is considered to be a direction substantially parallel to the direction in which the force of gravity extends. The vertical direction may deviate from the exact vertical (exact vertical is defined by gravity) by, for example, an angle of up to 15 degrees. Also, some embodiments described herein may involve the concept of “lateral”. The lateral direction should be understood to be distinguished from the vertical direction. The lateral direction may be orthogonal or substantially orthogonal to the exact vertical direction defined by gravity.

[0033] Referring illustratively to FIG. 1 and according to some embodiments that may be combined with other embodiments described herein, one or more magnetic bearings 120 and one or more additional magnetic bearings 120B ) are arranged mirror-symmetrically with respect to the plane of symmetry 105. The symmetry plane 105 is located between the first carrier transport space 15A and the second carrier transport space 15B. In particular, the plane of symmetry 105 is a vertical plane.

[0034] Referring illustratively to FIG. 1 and according to some embodiments that can be combined with other embodiments described herein, the drive unit 130 and the additional drive unit 130B may have a plane of symmetry 105 are arranged in mirror symmetry with respect to Typically, the lateral distance of drive unit 130 to symmetry plane 105 is greater than the lateral distance of one or more magnetic bearings 120 to symmetry plane 105 . Also typically, the lateral distance of the additional drive unit 130B relative to the symmetry plane 105 is greater than the lateral distance of the one or more additional magnetic bearings 120B relative to the symmetry plane 105 .

[0035] Referring illustratively to FIG. 1, typically, the lateral distance of drive unit 130 with respect to symmetry plane 105 is substantially less than the lateral distance of additional drive unit 130B with respect to symmetry plane 105. It should be understood that it corresponds and is in particular equal to this lateral distance. Thus, typically, the lateral distance of one or more magnetic bearings 120 with respect to symmetry plane 105 substantially corresponds to the lateral distance of one or more additional magnetic bearings 120B with respect to symmetry plane 105, in particular equal to this lateral distance.

[0036] According to some embodiments, with illustrative reference to FIG. 1 and which can be combined with other embodiments described herein, one or more magnetic bearings 120 contact-freely hold the first carrier 10A. It includes one or more first actuators 121 for holding. The driving unit 130 may include one or more second actuators 132 for moving the first carrier 10A along the first transport path T1. Also, the one or more additional magnetic bearings 120B may include one or more third actuators 121B for non-contact holding the second carrier 10B. The additional drive unit 130B may include one or more fourth actuators 132B for moving the second carrier 10B along the second transport path T2.

[0037] In the present disclosure, a “first actuator” of one or more magnetic bearings may be understood as an active, controllable element of the magnetic bearings. Thus, the "third actuator" of the one or more additional magnetic bearings can be understood as an active, controllable element of the magnetic bearings. In particular, the one or more first actuators and/or the one or more third actuators may include a controllable magnet, such as an electromagnet. The magnetic field of the one or more first actuators and/or the one or more third actuators is actively configured to maintain and/or adjust the distance between the upper chamber wall 212 and the carrier, eg, the first carrier and/or the second carrier, respectively. may be controllable. In other words, the "first actuator" of the one or more magnetic bearings and/or the "third actuator" of the one or more further magnetic bearings is a magnetic levitation force acting on the respective carrier, for example the first carrier and/or the second carrier. It can be understood as an element with a controllable and tunable magnetic field for providing

[0038] The one or more second actuators 132 and/or the one or more fourth actuators 132B may be one or more controllable magnets, such as electromagnets. Thus, the one or more second actuators 132 and/or the one or more fourth actuators 132B may be actively controllable to apply a movement force to the carrier in the conveying direction. As exemplarily shown in FIG. 1 , the one or more second magnetic counterparts 182 are provided on the first carrier 10A and/or the second carrier 10B, in particular on the first carrier 10A and/or the second carrier 10B. 2 may be arranged in the uppermost part of the carrier 10B. The one or more second magnetic counterparts 182 of the carrier, for example the first carrier 10A and/or the second carrier 10B, is connected to one or more second actuators 132 of the drive unit 130 and/or a further Each of the one or more fourth actuators 132B of the driving unit 130B may interact magnetically. In particular, the one or more second magnetic counterparts 182 may be passive magnetic elements. For example, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, may be made of a permanent magnet, or may have permanent magnetic properties.

[0039] According to some embodiments, which can be combined with other embodiments described herein, one or more first actuators 121, one or more second actuators 132, one or more third actuators ( 121B) and one or more fourth actuators 132B may be arranged in the waiting space. The expression "atmospheric space" can be understood as a space with atmospheric pressure conditions, ie approximately 1.0 bar. For example, the atmospheric space may be a space provided outside the vacuum chamber. Alternatively, the atmospheric space may be provided by an atmospheric box or atmospheric container (not shown explicitly) provided inside the vacuum chamber.

[0040] According to some embodiments, with illustrative reference to FIG. 1 and which can be combined with other embodiments described herein, one or more first actuators 121, one or more second actuators 132 ), one or more third actuators 121B, and one or more fourth actuators 132B may be attached, among other things, to the outer surface of the upper chamber wall 212 of the vacuum chamber 210 . Advantageously, therefore, the active elements of the one or more magnetic bearings are arranged in an easily accessible location for mounting and/or maintenance, reducing costs. According to one example, as illustratively shown in FIG. 1 , the outer surface of the upper chamber wall 212 is one or more first actuators 121 , one or more second actuators 132 , one or more third actuators 121 , Actuators 121B and one or more fourth actuators 132B may be included.

[0041] The one or more first actuators 121 are configured to contactlessly hold the first carrier 10A, and the one or more third actuators 121B are configured to contactlessly hold the second carrier 10B that should be understood As exemplarily shown in FIG. 1 , the one or more first magnetic counterparts 181 may be connected to the first carrier 10A and/or the second carrier 10B, in particular the first carrier 10A and/or the second carrier 10B. It can be arranged in the uppermost part of the carrier 10B. The one or more first magnetic counterparts 181 of the first carrier 10A can magnetically interact with the one or more first actuators 121 of the one or more magnetic bearings 120 . The one or more first magnetic counterparts 181 of the second carrier 10B can magnetically interact with the one or more third actuators 121B of the one or more further magnetic bearings 120B. In particular, the one or more first magnetic counterparts 181 may be passive magnetic elements. For example, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, may be made of a permanent magnet, or may have permanent magnetic properties.

[0042] An output parameter, such as a current applied to one or more of the first actuators, may be controlled according to an input parameter, such as a distance between the upper chamber wall 212 and the first carrier 10A. For example, the distance between the upper chamber wall 212 and the first carrier 10A (eg, the gap 122 shown in FIG. 1 ) can be measured by a distance sensor, and the magnetic field strength of one or more first actuators can be measured. It can be set according to the specified distance. In particular, in the case of a distance exceeding a predetermined threshold value, the magnetic field strength may be increased, and in the case of a distance less than a predetermined threshold value, the magnetic field strength may be decreased. The one or more first actuators may be controlled in closed loop or feedback control.

[0043] Similarly, an output parameter, such as a current applied to one or more of the third actuators, may be controlled according to an input parameter, such as a distance between the upper chamber wall 212 and the second carrier 10B. For example, the distance between the upper chamber wall 212 and the second carrier 10B (eg, the gap 122 shown in FIG. 1 ) can be measured by a distance sensor, and the magnetic field strength of one or more third actuators can be measured. It can be set according to the specified distance. In particular, in the case of a distance exceeding a predetermined threshold value, the magnetic field strength may be increased, and in the case of a distance less than a predetermined threshold value, the magnetic field strength may be decreased. The one or more third actuators may be controlled in closed loop or feedback control.

[0044] Referring illustratively to FIG. 1 and according to some embodiments that can be combined with other embodiments described herein, apparatus 100 includes a first lower track section 11L and a second lower track Section 14L is further included. The first lower track section 11L includes a first non-contact guiding arrangement 140A for guiding the first carrier 10A along the first transport path T1. The second lower track section 14L includes a second non-contact guiding arrangement 140B for guiding the second carrier 10B along the second transport path T2.

[0045] In the present disclosure, a "lower track section" may be understood as a lower portion of a transport system as described herein. Typically, the lower track section is arranged at a vertical distance from the upper track section. In particular, the lower track section may comprise a non-contact guiding arrangement as described herein for guiding the first carrier 10A and/or the second carrier 10B in the transport direction T.

[0046] According to some embodiments, with illustrative reference to FIG. 1 and which can be combined with other embodiments described herein, the first lower track section 11L and the second lower track section 14L are It is movable in the vertical direction (V). In particular, the device modifies the distance between the first lower track section 11L and the first upper track section 11U as well as the distance between the second lower track section 14L and the second upper track section 14U. To modify, it may include actuators 124 coupled to the first lower track section 11L and the second lower track section 14L.

[0047] As illustratively shown in FIG. 1 , according to some embodiments that may be combined with other embodiments described herein, a first non-contacting guidance arrangement 140A and/or a second non-contacting guidance arrangement 140A 140B may include one or more passive magnetic bearings 125 . In particular, as exemplarily shown in FIG. 1 , one or more passive magnetic bearings 125 may be arranged vertically. Accordingly, the one or more passive magnetic bearings 125, as exemplarily indicated in FIG. 1 , are arranged in the horizontal direction, in particular in the lateral direction L, on an individual carrier, in particular the first carrier 10A and/or the second carrier. It is configured to provide a magnetic force acting on (10B).

[0048] For example, as exemplarily shown in FIG. 1, one or more passive magnetic bearings 125 may be provided by vertically parallelly arranged passive magnetic elements. Typically, at least two passive magnetic elements are arranged to provide a receptacle for the third magnetic counterpart 183 of an individual carrier, in particular the first carrier 10A and/or the second carrier 10B. Thus, in the presence of the carrier, the third magnetic counterpart 183 is arranged between the oppositely arranged passive magnetic elements of the one or more passive magnetic bearings 125 . Typically, the third magnetic counterpart 183 includes a passive magnetic element. In Fig. 1, the north pole portion of the passive magnetic elements is schematically indicated by a hatching pattern. The south pole portion of the passive magnetic elements is represented by a blank element adjacent to the N pole portion.

[0049] As illustratively shown in FIG. 1, typically, one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 are So that the south pole portion of the passive magnetic element faces the south pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (the right side of the first non-contact guide arrangement 140A and the second non-contact guide arrangement shown in FIG. 1) (left of 140B), arranged. Therefore, the N-pole portion of the passive magnetic element of the third magnetic counterpart 183 may face the N-pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (first non-contact guide shown in FIG. 1). the left side of the arrangement 140A and the right side of the second non-contact guiding arrangement 140B). Thus, the one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 are connected to the passive magnetic element of the third magnetic counterpart 183 and the one or more passive magnetic bearings 125. It can be arranged so that repulsive magnetic forces act between the magnetic elements. Although not explicitly shown, alternatively the one or more passive magnetic bearings 125 and the passive magnetic elements of the third magnetic counterpart 183 may include the passive magnetic element of the third magnetic counterpart 183 and the one or more passive magnetic elements of the third magnetic counterpart 183. It should be understood that arrangements may be made such that attractive magnetic forces act between the passive magnetic elements of the magnetic bearings 125 .

[0050] As shown in FIGS. 1-3, the first non-contact guidance arrangement 140A and the second non-contact guidance arrangement 140B may be connected to a common support structure 145. The common support structure 145 can be coupled to an actuator 124 for modifying the distance between the lower and upper track sections. Also, as exemplarily shown in FIG. 3A , a protective bellows 174 may be provided to ensure a vacuum seal between the movable elements of the actuator 124 and the vacuum chamber.

[0051] According to an alternative configuration of non-contacting guidance arrangements as illustratively shown in FIG. 2, one or more passive magnetic bearings 125 are provided in the first non-contacting guidance arrangement 140A and the second non-contacting guidance arrangement 140B. It may be provided in the receiving portion of the common support structure 145 for. In particular, according to an alternative configuration, one or more passive magnetic bearings 125 are arranged below the third magnetic counterpart 183 of the individual carriers.

[0052] Thus, contactless lateral guidance of the carrier may advantageously be provided. It should also be noted that providing a passive guide arrangement is particularly well suited to providing robust carrier transport in high temperature vacuum environments at low cost.

[0053] In the present disclosure, a “passive magnetic bearing” may be understood as a bearing having passive magnetic elements that are not actively controlled or adjusted, at least during operation of the device. In particular, a passive magnetic bearing may be configured to generate a magnetic field, for example a static magnetic field. In other words, the passive magnetic bearing may not be configured to generate a tunable magnetic field. For example, the magnetic elements of one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, may be made of a permanent magnet, or may have permanent magnetic properties.

[0054] Accordingly, a "passive magnetic element" or "passive magnet" as used herein may be understood as a magnet that is not actively controlled, eg through feedback control. No output parameter, eg the magnetic field strength of a passive magnet, is controlled according to an input parameter such as distance. A “passive magnetic element” or “passive magnet” may rather provide lateral stabilization of the carrier without any feedback control. For example, a “passive magnetic element” or “passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a “passive magnetic element” or “passive magnet” may include one or more electromagnets that may not be actively controlled.

[0055] Thus, the first transport system 101 may be a magnetic levitation system comprising a fixed first upper track section 11U and a first lower track section 11L movable in the vertical direction V. that should be understood Correspondingly, the second transport system 102 may be a magnetic levitation system comprising a fixed second upper track section 14U and a second lower track section 14L movable in the vertical direction V.

[0056] According to some embodiments, with illustrative reference to FIG. 3A and that can be combined with other embodiments described herein, the device 100 moves the first carrier 10A in the first carrier transfer direction ( A first carrier transfer assembly 150A for moving away from the first transport path T1 to S1) may be further included. The first carrier transfer assembly 150A typically includes a first transfer actuator 154A, particularly provided in an atmospheric space outside the vacuum chamber or in an atmospheric box.

[0057] In the present disclosure, a “first carrier transfer assembly” may be understood as an assembly configured to move a first carrier, in particular a substrate carrier, between different transport paths laterally offset from each other. In particular, typically, the first carrier transfer assembly is configured to laterally move the first carrier, in the first carrier transfer direction S1, for example to switch the path of the first carrier. Referring illustratively to FIG. 3A , it should be understood that the term "first carrier transfer direction S1" can be understood as a horizontal direction, in particular perpendicular to the transport direction T.

[0058] Referring illustratively to FIG. 3A and according to some embodiments that can be combined with other embodiments described herein, the first carrier transfer assembly 150A includes one or more carrier transfer elements 152 includes For example, the one or more carrier transfer elements 152 may be elongated elements extending in the first carrier transfer direction S1. As illustratively indicated by double-headed arrows, one or more carrier transfer elements 152 are used to transfer the first carrier 10A, in particular from the first transport path T1 to the second transport path T2, for example. Alternatively, to switch the path from the second transport path T2 to the first transport path T1, it is movable in the first carrier transfer direction S1. In particular, one or more carrier transfer elements 152 may be coupled to the first transfer actuator 154A. For example, the first transfer actuator 154A may be provided outside the vacuum chamber 210 . A protective bellows 156 may also be provided to ensure a vacuum seal between the one or more carrier transfer elements 152 and the vacuum chamber.

[0059] For example, FIG. 3A shows two carrier transfer elements each connected to a separate transfer actuator, provided with a separate bellows. However, it should be understood that alternatively, more than two carrier transfer elements may be provided. It should also be understood that carrier transfer elements may be connected or coupled to a common transfer actuator according to alternative configurations.

[0060] Referring illustratively to FIG. 3A and according to some embodiments that can be combined with other embodiments described herein, the device 100, in the second carrier transfer direction S2, the second for moving the carrier 10B from the second transport path T2 towards the first transport path T1 or moving the second carrier 10B away from the second transport path T2 away from the first transport path T1 A second carrier transfer assembly 150B for moving the weight may be further included. The second carrier transfer assembly 150B typically includes a second transfer actuator 154B, particularly provided in an atmospheric space outside the vacuum chamber or in an atmospheric box. For example, as exemplarily shown in FIG. 3A , the second transfer actuator 154B may be arranged on the same side as the first transfer actuator 154A arranged in the vacuum chamber 210 .

[0061] In the present disclosure, a "second carrier transfer assembly" is configured to move a second carrier, in particular a mask carrier, toward the first carrier in order to adjust the distance between the second carrier and the first carrier. assembly can be understood. In particular, typically, the second carrier transfer assembly is configured to laterally move the second carrier, in the second carrier transfer direction S2. Referring illustratively to FIG. 3A , it should be understood that the term "second carrier transport direction S2" can be understood as a horizontal direction, in particular perpendicular to the transport direction T.

[0062] It is understood that the second carrier transfer assembly 150B may include one or more carrier transfer elements 152 that may be configured similarly to the one or more carrier transfer elements of the first carrier transfer assembly 150A. It should be. According to one example, as exemplarily shown in FIG. 3A , the one or more carrier transfer elements 152 of the second carrier transfer assembly 150B may include a first carrier transfer space 15A and a second carrier transfer space ( 15B) may be configured to extend around. In particular, as exemplarily shown in FIG. 3A , upper carrier transfer elements of one or more carrier transfer elements 152 are arranged above the first carrier 10A and the second carrier 10B. For example, the upper carrier transfer elements may be arranged in a gap or space provided between drive units and neighboring actuators of magnetic bearings as described herein. For simplicity of illustration, the actuators of drive units and magnetic bearings as described herein are indicated by reference numeral 190 in FIG. 3B.

[0063] It should be understood that the gap or space 191 between the neighboring actuators is configured such that upper carrier transfer elements are arranged between the neighboring actuators, as exemplarily shown in FIG. 3B. It should also be understood that carrier transfer elements as described herein typically extend in a lateral direction (L).

[0064] As illustratively shown in FIG. 3A, the upper chamber wall 212 may be configured to extend into the vacuum chamber 210. In particular, the upper chamber wall 212 equipped with drive units and magnetic bearings as described herein may extend vertically into the vacuum chamber by 50 mm to 100 mm. For example, as exemplarily shown in FIG. 3A , the upper chamber wall 212 may be implemented as a tub-like plate element. It should also be appreciated that the upper chamber wall may have recesses 192 for the upper carrier transfer elements. In particular, it should be understood from FIG. 3B that the upper carrier transfer elements are provided inside the vacuum chamber, and the drive units and magnetic bearings as described herein are provided either within the atmosphere box or outside the vacuum chamber.

[0065] As schematically indicated in FIG. 3A, according to some embodiments that may be combined with other embodiments described herein, one or more carrier transfer elements 152 may transfer a carrier as described herein. It includes a carrier holding portion 153 for holding. In particular, the carrier holding portion 153 can be configured to couple to individual coupling elements provided on the first carrier. For example, in Fig. 3a, the coupling elements of the first carrier are schematically illustrated as recesses. It should be understood that the carrier holding portion 153 and the coupling elements of the carrier may have other configurations configured to couple the carrier holding portion of the carrier transfer elements to the first carrier.

[0066] Referring illustratively to FIG. 4 and according to some embodiments that can be combined with other embodiments described herein, the device 100 has a lateral direction L transverse to the transport direction T , further comprising at least one lateral stabilization device 160 having at least one stabilization magnet 161 configured to apply a restoring force F to the carrier as described herein. For example, the at least one stabilizing magnet 161 can be arranged above the first carrier transport space 15A and/or the second carrier transport space 15B, in particular in the waiting space. In particular, at least one stabilization magnet 161 may be attached to an outer surface of the upper chamber wall 212 . Typically, the at least one stabilization magnet 161 may be arranged at a lateral distance to the drive units, for example the drive unit 130 and the further drive unit 130B.

[0067] Accordingly, the at least one lateral stabilization device 160 may advantageously, in the case of lateral displacement of the carrier, stabilize the carrier in a predetermined lateral position by applying a restoring force to the carrier as described herein. have. The restoring force F pushes or pulls the carrier back to a predetermined lateral position. Thus, the at least one lateral stabilization device 160 advantageously provides displacement of the carrier in the lateral direction L from the carrier transport space, for example the first carrier transport space 15A and/or the second carrier transport space 15B. A stabilizing force configured to cancel out may be created. In other words, the at least one lateral stabilization device 160, when the carrier is displaced in the lateral direction L from a predetermined lateral position or equilibrium position (exemplarily shown in FIG. 4 ), the individual It can be configured to create a restoring force (F) that pushes and/or pulls the carriers back into the individual carrier transport spaces.

[0068] As exemplarily shown in FIG. 4, at least one stabilizing magnet 161 may be a passive magnet having an N pole and an S pole. In some embodiments, the at least one stabilizing magnet may include a plurality of passive magnets that may be arranged in such a way that one lies behind the other in the direction of transport. Typically, the direction of the magnetic field lines within the at least one stabilizing magnet (running from south pole to north pole inside the magnet) may correspond essentially to the lateral direction (L).

[0069] The displacement of the individual carriers from the respective carrier transport space in the lateral direction (L) is determined by the at least one stabilization magnet 161 and the at least one carrier stabilization magnet 162 of the at least one lateral stabilization device 160. At least one carrier stabilizing magnet 162 may be attached to a carrier as described herein, such as a first carrier and/or a second carrier, in a manner that causes a magnetic repulsive force therebetween to cancel its displacement. Thus, the carrier, eg the first carrier and/or the second carrier, is advantageously maintained in the equilibrium position shown in FIG. 4 during holding and during transport of the carrier along the transport path.

[0070] As exemplarily shown in FIG. 4, the direction of the magnetic field lines inside the at least one carrier stabilization magnet 162 corresponds essentially to the lateral direction L. It can be a passive magnet with N and S poles arranged to

[0071] In particular, the at least one carrier stabilization magnet 162 may be arranged in a reverse orientation compared to the at least one stabilization magnet 161 of the at least one lateral stabilization device 160. Thus, when the carrier, eg the first carrier and/or the second carrier, is arranged in the equilibrium position, the north pole of the at least one carrier stabilization magnet 162 is arranged close to the south pole of the at least one stabilization magnet 161 attracted by its south pole, the south pole of the at least one carrier stabilization magnet 162 is arranged close to the north pole of the at least one stabilization magnet 161 of the at least one lateral stabilization device 160 and its north pole is pulled by For example, when the second carrier is displaced from its equilibrium position in a first lateral direction (e.g., toward the left in FIG. approaches the north pole of at least one stabilizing magnet 161 of the , which causes a restoring force that forces the carrier back toward its equilibrium position. When the second carrier is displaced from its equilibrium position in a second (opposite) lateral direction (e.g., toward the right in FIG. ) approaches the south pole of at least one stabilizing magnet 161, which causes a restoring force that forces the carrier back toward its equilibrium position. Accordingly, the at least one lateral stabilization device 160 stabilizes the second carrier in a predetermined lateral position so that lateral movements of the carrier can be reduced or prevented. The above descriptions of the second carrier and the at least one lateral stabilization device 160 corresponding to the second carrier, with the necessary modifications (mutatis mutandis), the first carrier and the at least one lateral stabilization corresponding to the first carrier Applies to device 160.

[0072] According to some embodiments, with illustrative reference to FIG. 4 and which can be combined with other embodiments described herein, device 100 may further include a safety arrangement 170. Typically, the safety arrangement 170 includes a lateral guard guiding element 171 provided between the first carrier transport space 15A and the second carrier transport space 15B. In particular, as exemplarily shown in FIG. 4 , a lateral guard guide element 171 may be provided on the symmetry plane 105 as described herein. The lateral guard guiding element 171 may be implemented as a guiding rail or a plurality of guiding pins in a row.

[0073] As exemplarily shown in FIG. 4, additionally or alternatively, the safety arrangement 170 may in particular include one or more first actuators 121 and/or one or more third actuators 121B. When deactivated, it may include a safety roller 172 for providing vertical support, in particular vertical safety support, for the carrier, eg the first carrier and/or the second carrier. Typically, the safety roller 172 is connected to a holder 173 attached to the inner surface of the upper chamber wall 212 . The holder holding the safety roller can also function as a lateral guard guide element.

[0074] Referring illustratively to FIG. 4 and according to some embodiments that can be combined with other embodiments described herein, a protective element 163, such as a protective strip, is provided on the at least one carrier It may be attached to stabilization magnet 162 . In particular, the protection element 163 can be attached to the side of the at least one carrier stabilization magnet 162 facing the holder 173 .

[0075] According to some embodiments, with illustrative reference to FIG. 4 and which may be combined with other embodiments described herein, apparatus 100 may further include an adjustment device 155. The adjustment device 155 determines the position, in particular the vertical position, of the at least one stabilization magnet 161 of the at least one lateral stabilization device 160 relative to the carrier transport space as described herein, the at least one stabilization magnet 161 ) of the orientation or angular position, the position of the lateral guard guiding element 171, in particular the vertical position, and the orientation or angular position of the lateral guard guiding element 171. In particular, as exemplarily indicated by the arrows shown in FIG. 4 , the adjusting device may be configured to move the lateral guard guide element 171 in a vertical direction, and/or at least one stabilizing magnet. (161) can be configured to move.

[0076] Thus, the adjustment device 155 is configured in such a way that the restoring force F exerted by the lateral stabilization device on the carrier, eg the first carrier and/or the second carrier, is varied, in particular reduced or completely switched off. In this way, the state of the at least one stabilization magnet 161 can be changed. After reduction or deactivation of the restoring force F exerted on the carrier by the lateral stabilization device, the carrier can be moved laterally away from the lateral stabilization device.

[0077] Thus, by enabling adjustment of the restoring force F via the adjusting device 155, the carrier can be reliably held and guided along the conveying path, in the conveying state of the lateral stabilization device. In the deactivated switched state of the lateral stabilization device, the carrier can be moved in the lateral direction (L). In addition, the restoring force (F) applied to the carrier when the carrier is displaced in the lateral direction (L) can be adjusted.

[0078] Also illustratively referring to FIG. 4, the adjustment device 155 is configured to move the lateral guard guide element 171 such that a carrier as described herein can be moved laterally. It should be understood that it can be. For example, the lateral guard guide elements 171 can be moved vertically upward to enable lateral movement of the first carrier and/or the second carrier. Also, as shown in FIG. 4 , a protective bellows 174 may be provided to ensure a vacuum seal between the movable lateral guard guide element 171 and the vacuum chamber. Alternatively, the lateral guard guide elements 171 can be rotated, eg, about an axis extending laterally, or about an axis extending in the transport direction, to enable lateral movement of the carrier ( not explicitly shown in FIG. 3A).

[0079] Referring illustratively to FIG. 3A, it should be understood that a carrier according to the present disclosure includes a main body 13 for carrying an object, such as a substrate 1 or a mask 2. For example, the main body 13 can be implemented as a carrier plate configured to hold a substrate or mask. Alternatively, the main body 13 may be implemented as a carrier frame configured to hold a substrate or mask. As exemplarily shown in FIG. 3A , the main body has a first end 11 and a second end 12 . The second end 12 is opposite the first end 11 . The first end 11 of the main body 13 includes one or more first magnetic counterparts 181 (shown in FIGS. 1 and 2 ) for interacting with one or more magnetic bearings as described herein. include The first end 11 further includes one or more second magnetic counterparts 182 (shown in FIGS. 1 and 2 ) for interacting with a drive unit as described herein. Additionally, the second end 12 of the main body 13 has a third magnetic counterpart 183 (FIG. 1) for interacting with one or more passive magnetic bearings 125 of a contactless guidance arrangement as described herein. and shown in Figure 2).

[0080] Referring illustratively to FIGS. 1-3, the first carrier 10A and/or the second carrier 10B may be asymmetrical carriers when the respective carrier is in a vertical orientation, i.e., It should be understood that it is not symmetric about the vertical plane 111 extending through the center of gravity (G1/G2 shown in Figs. 1 and 2).

[0081] From Figures 1 to 3, it can be seen that the dimensions of the carriers as described herein, i.e., the first carrier and the second carrier, are typically the respective carrier transport spaces, i.e., the first carrier transport space and the second carrier. It should be understood that it corresponds to the dimensions of the transport space. Accordingly, the carrier may have a height (H _C ) corresponding to the height (H) of the carrier transport space. In addition, the carrier may have a width (W _C ) corresponding to the width (W) of the carrier transport space. Thus, the aspect ratio of H _C /W _C may be H _C /W _C ≥ 5, in particular H _C /W _C ≥ 10.

[0082] According to some embodiments, which can be combined with any other embodiments described herein, the upper chamber wall is a separate plate element, particularly a tubular plate element, as exemplarily shown in FIG. 3A. can be implemented as Thus, advantageously, the actuators of the magnetic bearings and the actuators of the drive units can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing an upper chamber wall with one or more pre-mounted first actuators and one or more pre-mounted second actuators can facilitate the assembly procedure and reduce costs. Compared to the prior art, therefore, a simpler integration into the chamber of the transfer device, in particular with the magnetic levitation system, is advantageously provided.

[0083] Referring exemplarily to FIG. 5, a processing system 200 for vertically processing a substrate according to the present disclosure is described. According to embodiments, which can be combined with any other embodiments described herein, processing system 200 includes at least one vacuum chamber 210 including processing device 205, in particular a vacuum processing chamber. do. The processing system 200 also includes an apparatus 100 for transporting a first carrier 10A and a second carrier 10B according to any of the embodiments described herein. In particular, typically, the processing device 205 is arranged in a vacuum processing chamber, and the processing device 205 is configured as a deposition source, an evaporation source, such as an evaporation source for depositing one or more organic materials for OLED production, and a sputter source. can be selected from the group consisting of

[0084] In the present disclosure, the term "vacuum" may be understood to mean a technical vacuum having a vacuum pressure of, for example, less than 10 mbar. Typically, the pressure in a vacuum chamber as described herein is from 10 ⁻⁵ mbar to about 10 ⁻⁸ mbar, more typically from 10 ⁻⁵ mbar to 10 ⁻⁷ mbar, even more typically from about 10 ⁻⁶ mbar to It may be about 10 ⁻⁷ mbar. According to some embodiments, the pressure within the vacuum chamber is considered to be the partial pressure or the total pressure of the vaporized material within the vacuum chamber, which may be about the same when only the vaporized material is present as a component to be deposited within the vacuum chamber. It can be. In some embodiments, the total pressure in the vacuum chamber is in the range of about 10 ⁻⁴ mbar to about 10 ⁻⁷ mbar, particularly when a second component (such as gas, etc.) is present in the vacuum chamber in addition to the evaporated material. can be Thus, the vacuum chamber may be a "vacuum deposition chamber", ie, a vacuum chamber configured for vacuum deposition.

[0085] Referring illustratively to the flowchart shown in FIG. 6, a method 300 of transferring a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure is described. do. According to embodiments, which can be combined with any other embodiments described herein, the method 300 uses one or more magnetic bearings 120 in a first carrier transport space 15A with a first carrier ( 10A) and contactless holding (represented by block 310 in FIG. 6). One or more magnetic bearings are arranged centrally above the center of gravity of the first carrier 10A to be transported.

[0086] Additionally, the method 300 includes contactless holding the second carrier 10B in the second carrier transport space 15B using one or more additional magnetic bearings 120B (block (in FIG. 6)). 320)). One or more additional magnetic bearings 120B are arranged centrally above the center of gravity of the second carrier 10B to be transported. One or more additional magnetic bearings 120B are arranged next to one or more magnetic bearings 120 . In particular, one or more magnetic bearings 120 and one or more additional magnetic bearings 120B are arranged mirror-symmetrically with respect to symmetry plane 105 . The symmetry plane 105 is located between the first carrier transport space 15A and the second carrier transport space 15B. In particular, the plane of symmetry 105 is a vertical plane.

[0087] The method 300 also includes the first carrier 10A in the transport direction T along the first transport path T1 using the drive unit 130 arranged above the first carrier transport space 15A. ) (represented by block 330 in FIG. 6). Additionally, the method 300 provides the second carrier 10B in the transport direction T along the second transport path T2 using a further drive unit 130B arranged above the second carrier transport space 15B. (represented by block 340 in FIG. 6).

[0088] A method 300 of transporting a first carrier 10A and a second carrier 10B includes a first carrier 10A and a second carrier 10B according to any embodiments described herein. It should be understood that this can be done by using the device 100 for transporting.

[0089] Illustratively referring to the flowchart shown in FIG. 7, a method 400 of adjusting a distance between a first carrier 10A and a second carrier 10B in a vacuum chamber 210 according to the present disclosure. ) is explained. According to embodiments, which may be combined with any other embodiments described herein, the method 400 may move a second carrier 10B in a second carrier transfer direction S2 to a second transport path T2. A first carrier 10A and a second carrier 10B according to any of the embodiments described herein, including a second carrier transfer assembly 150B for moving from and providing an apparatus 100 for transporting (represented by block 410 in FIG. 7). The second carrier transfer assembly 150B includes, in particular, a second transfer actuator 154B provided in an atmospheric space outside the vacuum chamber or in the waiting box. The method 400 also directs the second carrier 10B in the second carrier transfer direction S2 from the second transport path T2 toward the first transport path T1 by using the second transfer actuator 154B. moving (represented by block 420 in FIG. 7).

[0090] According to embodiments, which can be combined with any other embodiments described herein, the method 400 transfers the second carrier 10B to the second carrier transport space of the second transport path T2 ( 15B) lifting the second carrier 10B by using one or more additional magnetic bearings 120B with one or more third actuators 121B for contactless holding. Additionally, the method 400 may include one or more third actuators (particularly of the second transport system as described herein) to reduce the distance between the one or more third actuators 121B and the second carrier 10B. 121B) to pull the second carrier 10B. In particular, the step of pulling the second carrier 10B is such that the upper chamber wall 212 and the second carrier 10B are separated by 2/3 of the original vertical width of the gap between the upper chamber wall 212 and the second carrier 10B. reducing the gap between the carriers 10B. For example, reducing the gap may include reducing the vertical gap width from 3 mm to 1 mm. Accordingly, the vertical gap width provided between the safety roller 172 and the second carrier 10B can be increased by 2/3, for example from 3 mm to 5 mm.

[0091] The method 400 may also include moving one or more carrier transfer elements 152 of the second carrier transfer assembly 150B toward the second carrier 10B at most to a holding position. have. In particular, the holding position is a position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 can hold the carrier so as to contact the coupling elements of the second carrier when the carrier is lowered in the vertical direction. can be For example, as exemplarily shown in FIG. 3A , the coupling elements of the second carrier may be recesses. Accordingly, the holding position may be a position in which the carrier holding portion 153 of the one or more carrier transfer elements 152 enters the individual recesses of the second carrier 10B.

[0092] Further, the method 400 is used to establish contact between one or more carrier transfer elements 152 and a second carrier 10B, particularly coupling elements of the second carrier, particularly as described herein. lowering the second carrier 10B by using one or more third actuators 121B of the second transport system, such as a bar. For example, when contact is established between the one or more carrier transfer elements 152 and the second carrier 10B, there is a gap between the safety roller 172 and the second carrier 10B as exemplarily shown in FIG. 3A. The gap may have a vertical gap width of approximately 1 mm. Thus, the vertical distance between the upper chamber wall 212 and the second carrier during lateral movement of the carrier may be approximately 5 mm.

[0093] Still further, the method 400 first transports the second carrier 10B from the second transport path T2 in the second carrier transfer direction S2 using the second transfer actuator 154B. and adjusting the distance between the first carrier 10A and the second carrier 10B by moving them towards path T1. Alternatively, adjusting the distance between the first carrier 10A and the second carrier 10B may include moving the second carrier 10B in the second carrier transfer direction S2 using the second transfer actuator 154B. It may include the step of moving away from the first conveyance path (T1) from the second conveyance path (T2).

[0094] According to some embodiments, which may be combined with other embodiments described herein, the method 400 may include a first lower track section 11L of a first transport path, as described herein, selected from the group consisting of a second lower track section 14L of the second transport system, a lateral guard guide element provided on at least one side of the second carrier transport space 15B, and at least one lateral stabilization device 160 Further comprising vertically moving the at least one element.

[0095] In particular, as described herein, the first lower track section 11L and the second lower track section 14L include an actuator 124 for modifying the distance between the lower and upper track sections ), it can be moved vertically downward. Also, as illustratively described with reference to FIG. 4 , the at least one stabilization magnet 161 of the at least one lateral stabilization device 160 is vertically upward to enable lateral movement of the second carrier. can be moved to Moreover, as illustratively described with reference to FIG. 4 , the lateral guard guide elements 171 can be moved vertically upward to enable lateral movement of the second carrier. Alternatively, the lateral guard guide elements 171 can be rotated, for example about an axis extending laterally or about an axis extending in the transport direction, to enable lateral movement of the second carrier. Thus, prior to moving the second carrier in the lateral direction, elements of the transport system (e.g., at least one stabilizing magnet 161 and/or lateral guard guide element 171) that impede the lateral movement of the second carrier ) and/or non-contact guidance arrangement) is moved to release the second carrier in the lateral direction.

[0096] In view of the foregoing, compared with the prior art, embodiments of the present disclosure advantageously provide an apparatus for transporting a first carrier and a second carrier in a vacuum chamber, a processing system for vertically processing a substrate , a method for transporting a first carrier and a second carrier in a vacuum chamber, and a method for adjusting a distance between the first carrier and the second carrier in the vacuum chamber, which are particularly suitable for example organic light emitting diode (OLED) displays It should be understood that improvements have been made for accurate and smooth transfer of carriers in high temperature vacuum environments for high quality display manufacturing for users. Further, embodiments as described herein advantageously provide more robust contactless carrier transport at lower production costs and are less susceptible to manufacturing tolerances, deformation, and thermal expansion, compared to the prior art. .

[0097] While the foregoing relates to embodiments, other and additional embodiments may be devised without departing from the basic scope, the scope being determined by the following claims.

Claims (15)

As a device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210),
A first transport system (101) provided along a first transport path (T1) comprising a first upper track section (11U) and a first lower track section (11L) movable in a vertical direction (V) - the first transport system (101) 1 upper track section 11U,
one or more magnetic bearings 120 for holding the first carrier 10A in a non-contact manner in the first carrier transport space 15A; and
and a drive unit 130 for moving the first carrier 10A along the first transport path T1,
the one or more magnetic bearings 120 are centrally arranged over the center of gravity of the first carrier 10A to be transported;
the one or more magnetic bearings 120 and the driving unit 130 are arranged above the first carrier transport space 15A; and
a second transport path (T2) comprising a second upper track section (14U) and a second lower track section (14L) movable in a vertical direction (V), horizontally offset from the first transport path (T1); The second transport system 102 provided according to - the second upper track section 14U,
one or more additional magnetic bearings 120B for non-contact holding the second carrier 10B in the second carrier transport space 15B, and
an additional drive unit (130B) for moving the second carrier (10B) along the second transport path (T2);
the one or more additional magnetic bearings (120B) are arranged centrally over the center of gravity of the second carrier (10B) to be transported;
The one or more additional magnetic bearings 120B and the additional drive unit 130B are arranged above the second carrier transport space 15B -
Including,
the one or more additional magnetic bearings (120B) are arranged next to the one or more magnetic bearings (120);
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to claim 1,
The one or more magnetic bearings 120 and the one or more additional magnetic bearings 120B are arranged mirror-symmetrically with respect to a plane of symmetry 105, which plane of symmetry 105 conveys the first carrier. Located between the space 15A and the second carrier transport space 15B,
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to claim 2,
The drive unit 130 and the further drive unit 130B are arranged mirror-symmetrically with respect to the symmetry plane 105, the lateral distance of the drive unit 130 with respect to the symmetry plane 105 ), and the lateral distance of the additional drive unit 130B relative to the symmetry plane 105 is greater than the lateral distance of the one or more magnetic bearings 120 relative to the symmetry plane 105. greater than the lateral distance of the additional magnetic bearings 120B,
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
The first lower track section 11L comprises a first non-contact guiding arrangement 140A for guiding the first carrier 10A along the first transport path T1, and the second lower track section (14L) comprises a second non-contact guiding arrangement (140B) for guiding the second carrier (10B) along the second transport path (T2).
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). delete According to claim 4,
Modify the distance between the first lower track section 11L and the first upper track section 11U as well as modify the distance between the second lower track section 14L and the second upper track section 14U. Further comprising an actuator 124 coupled to the first lower track section 11L and the second lower track section 14L to
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
The one or more magnetic bearings 120 include one or more first actuators 121 for holding the first carrier 10A in a non-contact manner, and the one or more additional magnetic bearings 120B are 2 includes one or more third actuators 121B for holding the carrier 10B in a non-contact manner, and the drive unit 130 moves the first carrier 10A along the first transport path T1 one or more second actuators 132 for moving the second carrier 10B along the second transport path T2; 132B, the one or more first actuators 121, the one or more second actuators 132, the one or more third actuators 121B and the one or more fourth actuators 132B ) is arranged in atmospheric space,
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
Further comprising a first carrier transfer assembly (150A) for moving the first carrier (10A) away from the first transport path (T1) in a first carrier transfer direction (S1),
The first carrier transfer assembly (150A) includes a first transfer actuator (154A) provided in an atmospheric space outside the vacuum chamber or in an atmospheric box,
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
A second carrier transfer assembly 150B for moving the second carrier 10B from the second transport path T2 toward the first transport path T1 in a second carrier transfer direction S2 is further included. and
The second carrier transfer assembly 150B includes a second transfer actuator 154B provided in an atmospheric space outside the vacuum chamber or in an atmospheric box.
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
The first carrier 10A and the second carrier ( 10B) further comprising at least one lateral stabilization device (160) having at least one stabilization magnet (161) configured to apply a restoring force (F) to at least one of
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
A lateral guard guiding element 171 provided between the first carrier transport space 15A and the second carrier transport space 15B, and the first carrier 10A and the second carrier a safety arrangement (170) comprising at least one element of the group consisting of safety rollers (172) for providing vertical support for at least one of (10B);
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). According to any one of claims 1 to 3,
vertical position of at least one stabilization magnet (161) of stabilization device (160) relative to at least one of said first carrier transport space (15A) and said second carrier transport space (15B), said at least one stabilization magnet (161) An adjustment device 155 configured to adjust one or more of the group consisting of an orientation or angular position of ), a vertical position of the lateral guard guiding element 171, and an orientation or angular position of the lateral guard guiding element 171. more inclusive,
Device (100) for transporting a first carrier (10A) and a second carrier (10B) in a vacuum chamber (210). A processing system (200) for vertically processing a substrate, comprising:
at least one vacuum chamber 210 containing a processing device 205, and
comprising a device (100) for transporting a first carrier (10A) and a second carrier (10B) according to any one of claims 1 to 3;
Processing system 200 for vertically processing a substrate. As a method of transferring the first carrier 10A and the second carrier 10B in the vacuum chamber 210,
holding the first carrier (10A) in a non-contact manner in a first carrier transfer space (15A) using one or more magnetic bearings (120) - the one or more magnetic bearings (120) hold the first carrier to be transported arranged centrally over the center of gravity of (10A);
holding the second carrier 10B in a non-contact manner in a second carrier transport space 15B using one or more additional magnetic bearings 120B - the one or more additional magnetic bearings 120B being transported arranged centrally above the center of gravity of the second carrier 10B, and the one or more additional magnetic bearings 120B arranged next to the one or more magnetic bearings 120;
conveying the first carrier (10A) in a conveying direction (T) using a driving unit (130) and a first lower track section (11L) arranged above the first carrier conveying space (15A); and
transporting the second carrier (10B) in a transport direction (T) using an additional drive unit (130B) and a second lower track section (14L) arranged above the second carrier transport space (15B). do,
The first lower track section (11L) and the second lower track section (14L) are movable in the vertical direction (V),
Method for transferring the first carrier (10A) and the second carrier (10B) in the vacuum chamber (210). As a method of adjusting the distance between the first carrier 10A and the second carrier 10B in the vacuum chamber 210,
providing a device (100) according to claim 9 for transporting a first carrier (10A) and a second carrier (10B); and
Moving the second carrier 10B from the second transport path T2 toward the first transport path T1 in a second carrier transfer direction S2 by using the second transfer actuator 154B or moving the second carrier 10B away from the second transport path T2 and away from the first transport path T1,
A method of adjusting the distance between the first carrier (10A) and the second carrier (10B) in the vacuum chamber (210).

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