WO2019223872A1

WO2019223872A1 - Magnetic levitation system for transporting a carrier, carrier for a magnetic levitation system, processing system for vertically processing a substrate, and method of transporting a carrier

Info

Publication number: WO2019223872A1
Application number: PCT/EP2018/063702
Authority: WO
Inventors: Oliver Heimel; Christian Wolfgang Ehmann; Ralph Lindenberg
Original assignee: Applied Materials, Inc.
Priority date: 2018-05-24
Filing date: 2018-05-24
Publication date: 2019-11-28
Also published as: KR20210011437A; CN112218971A; KR102430391B1

Abstract

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15). Additionally, the magnetic levitation system includes a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T). The one or more first actuators (121) and the one or more second actuators (132) are arranged above the carrier transportation space (15).

Description

MAGNETIC LEVITATION SYSTEM FOR TRANSPORTING A CARRIER, CARRIER FOR A MAGNETIC LEVITATION SYSTEM, PROCESSING SYSTEM FOR VERTICALLY PROCESSING A SUBSTRATE, AND METHOD OF TRANSPORTING A CARRIER

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to apparatuses and methods for transportation of carriers, particularly carriers used during processing of large area substrates. More specifically, embodiments of the present disclosure relate to apparatuses and methods for contactless transportation of carriers employable in processing systems for vertical substrate processing, e.g. material deposition on large area substrates for display production. In particular, embodiments of the present disclosure relate to magnetic levitation systems and methods for carrier transportation in vacuum processing systems.

BACKGROUND

[0002] Techniques for layer deposition on a substrate include, for example, sputter deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD) and thermal evaporation. Coated substrates may be used in several applications and in several technical fields. For instance, coated substrates may be used in the field of display devices. Display devices can be used in the manufacture of television screens, computer monitors, mobile phones, other hand held devices, and the like for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

[0003] In order to deposit a layer stack, an in-line arrangement of processing modules can be used. An in-line processing system includes a plurality of subsequent processing modules, such as deposition modules and optionally further processing modules, e.g., cleaning modules and/or etching modules, wherein processing aspects are subsequently conducted in the processing modules such that a plurality of substrates can continuously or quasi-continuously be processed in the in-line processing system.

[0004] The substrate may be carried by a carrier, i.e. a carrying device for carrying the substrate. The carrier is typically transported through a vacuum system using a transport system. The transport system may be configured for conveying the carrier having the substrate positioned thereon along one or more transport paths. At least two transport paths can be provided next to each other in the vacuum system, e.g. a first transport path for transporting the carrier in a forward direction and a second transport path for transporting the carrier in a return direction opposite to the forward direction.

[0005] The functionality of a display device typically depends on the coating thickness of the material, which has to be within a predetermined range. For obtaining high resolution display devices, technical challenges with respect to the deposition of materials need to be mastered. In particular, an accurate and smooth transportation of the substrate carriers and/or mask carriers through a vacuum system is challenging. For instance, particle generation due to wear of moving parts can deteriorate the manufacturing process. Accordingly, there is a demand for transportation of carriers in processing systems with reduced or minimized particle generation. Further, challenges are, for example, to provide robust carrier transport systems for high temperature vacuum environments at low costs.

[0006] Accordingly, there is a continuing demand for improved apparatuses and methods for transportation of carriers as well as for providing improved vacuum processing systems which overcome at least some problems of the state of the art.

SUMMARY

[0007] In light of the above, a magnetic levitation system for transporting a carrier, a carrier for a magnetic levitation system, a processing system for vertically processing a substrate, and a method of transporting a carrier according to the independent claims are provided. Further aspects, advantages, and features are apparent from the dependent claims, the description, and the accompanying drawings.

[0008] According to an aspect of the present disclosure, a magnetic levitation system for transporting a carrier in a transport direction is provided. The magnetic levitation system includes one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier in a carrier transportation space. Additionally, the magnetic levitation system includes a drive unit having one or more second actuators for moving the carrier in the transport direction. The one or more first actuators and the one or more second actuators are arranged above the carrier transportation space.

[0009] According to another aspect of the present disclosure, a carrier for a magnetic levitation system is provided. The carrier includes a main body for carrying an object. The main body includes a first end and a second end opposite the first end. The first end includes one or more first magnetic counterparts for interacting with one or more first actuators of one or more magnetic bearings of the magnetic levitation system. Additionally, the first end includes one or more second magnetic counterparts for interacting with one or more second actuators of a drive unit of the magnetic levitation system. The second end of the main body includes a third magnetic counterpart for interacting with one or more passive magnetic bearings of a contactless guiding arrangement of the magnetic levitation system.

[0010] According to a further aspect of the present disclosure, a processing system for vertically processing a substrate is provided. The processing system includes at least one vacuum processing chamber including a processing device. Additionally, the processing system includes one or more magnetic levitation systems for transporting one or more carriers in a transport direction. The one or more magnetic levitation systems include one or more magnetic bearings having one or more first actuators for contactlessly holding the carrier in a carrier transportation space. Further, the one or more magnetic levitation systems include a drive unit having one or more second actuators for moving the carrier in the transport direction. The one or more first actuators and the one or more second actuators are arranged above the carrier transportation space.

[0011] According to another aspect of the present disclosure, a method of transporting a carrier is provided. The method includes contactlessly holding the carrier in a carrier transportation space using one or more magnetic bearings having one or more first actuators arranged above the carrier transportation space. Further, the method includes transporting the carrier in a transportation direction using a drive unit having one or more second actuators being arranged above the carrier transportation space.

[0012] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0013] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic view of a magnetic levitation system according to embodiments described herein; FIGS. 2 to 5 show schematic views of magnetic levitation systems according to further embodiments described herein;

FIG. 6 shows a schematic view of an arrangement of two magnetic levitation systems for asymmetric carriers according to some embodiments described herein;

FIG. 7 shows a schematic view of an arrangement of two magnetic levitation systems for symmetric carriers according to some embodiments described herein;

FIG. 8 shows a schematic view of a processing system for vertically processing a substrate according to embodiments described herein; and

FIG. 9 shows a flowchart for illustrating a method of transporting a carrier according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0014] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0015] With exemplary reference to FIG. 1, a magnetic levitation system 100 for transporting a carrier 10 in a transport direction T according to the present disclosure is described. The transport direction T is perpendicular to the paper plane of FIG. 1.

[0016] According to embodiments which can be combined with any other embodiments described herein, the magnetic levitation system 100 includes one or more magnetic bearings 120 having one or more first actuators 121 for contactlessly holding the carrier 10 in a carrier transportation space 15. The carrier transportation space 15 may be understood as a zone where the carrier is arranged during the transport of the carrier in the transportation direction along a transport path. In particular, as exemplarily shown in FIG. 1, the carrier transportation space can be a vertical carrier transportation space having a height H extending in a vertical direction and a width W extending in a horizontal direction. For instance, the aspect ratio of H/W can be H/W > 5, particularly H/W > 10. Further, the magnetic levitation system 100 includes a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction The one or more first actuators 121 and the one or more second actuators 132 are arranged above the carrier transportation space 15.

[0017] Accordingly, embodiments of the magnetic levitation system as described herein are improved compared to conventional carrier transportation apparatuses, particularly with respect to accurate and smooth transportation of the carriers in high temperature vacuum environments. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses. In particular, embodiments of the magnetic levitation system as described herein are more insensitive against manufacturing tolerances, deformation, and thermal expansion. Further, beneficially a simpler integration of the magnetic levitation system into the chamber is provided.

[0018] Before various further embodiments of the present disclosure are described in more detail, some aspects with respect to some terms used herein are explained.

[0019] In the present disclosure, a “magnetic levitation system” can be understood as a system configured for holding an object, e.g. a carrier, in a contactless manner by using magnetic force. In the present disclosure, the term “levitating” or“levitation” refers to a state of an object, e.g. a carrier carrying a substrate or a mask, wherein the object floats without mechanical contact or support. Further, moving or transporting an object refers to providing a driving force, e.g. a force in a direction different from the levitation force, wherein the object is moved from one position to another, different position, for example a different position along the transport direction. For example, a carrier carrying a substrate or a mask can be levitated, i.e. by a force counteracting gravity, and can be moved in a direction different from a direction parallel to gravity while being levitated.

[0020] In the present disclosure, the term“contactless” can be understood in the sense that a weight, e.g. the weight of a carrier, particularly the weight of a carrier carrying a substrate or a mask, is not held by a mechanical contact or mechanical forces, but is held by a magnetic force. In other words, the term “contactless” as used throughout the description can be understood in that a carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces, i.e. contact forces.

[0021] As schematically shown in FIG.l, the carrier 10 is contactlessly held in the carrier transportation space 15 between an upper chamber wall 212 and a bottom chamber wall 211. In particular, the upper chamber wall 212 can be a ceiling of a vacuum chamber. Accordingly, the bottom chamber wall 211 can be the bottom wall of a vacuum chamber.

[0022] In the present disclosure, a“carrier” can be understood as a carrier configured for holding a substrate, also referred to as substrate carrier. For instance, the carrier can be a substrate carrier for carrying a large area substrate. It is to be understood that the embodiments of the magnetic levitation system may also be used for other carrier types, e.g. mask carriers. Accordingly, additionally or alternatively, the carrier may be a carrier configured for carrying a mask.

[0023] In the present disclosure, the term “substrate” may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto, and the term“substrate” may also embrace flexible substrates such as a web or a foil. The term“substantially inflexible” is understood to distinguish over“flexible”. Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates. According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass etc.), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.

[0024] In the present disclosure, the term“large area substrate” refers to a substrate having a main surface with an area of 0.5 m² or larger, particularly of 1 m² or larger. In some embodiments, a large area substrate can be GEN 4.5, which corresponds to about 0.67 m² of substrate (0.73x0.92m), GEN 5, which corresponds to about 1.4 m² of substrate (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m² of substrate (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7 m² of substrate (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m² of substrate (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. Further, the substrate thickness can be from 0.1 to 1.8 mm, particularly about 0.9 mm or below, such as 0.7 mm or 0.5.

[0025] In the present disclosure, the term “transport direction” can be understood as the direction in which the carrier is transported along a transport path. Typically, the transport direction can be an essentially horizontal direction.

[0026] In the present disclosure, a“magnetic bearing” can be understood as a bearing configured for holding or supporting an object, e.g. a carrier as described herein, in a contactless manner, i.e. without physical contact. Accordingly, the one or more magnetic bearings as described herein may be configured to generate a magnetic force acting on the carrier, such that the carrier is contactlessly held at a predetermined distance from a base structure, e.g. the upper chamber wall 212 as shown in FIG. 1. In particular, the one or more magnetic bearings 120 can be configured to generate a magnetic force acting in an essentially vertical direction V such that the vertical width of a gap 122 between the upper chamber wall 212 and the carrier 10 can be maintained essentially constant.

[0027] Some embodiments described herein involve the notion of a“vertical direction”. A vertical direction is considered a direction substantially parallel to the direction along which the force of gravity extends. A vertical direction may deviate from exact verticality (the latter being defined by the gravitational force) by an angle of, e.g., up to 15 degrees. Further, some embodiments described herein may involve the notion of a“lateral direction”. A lateral direction is to be understood to distinguish over a vertical direction. A lateral direction may be perpendicular or substantially perpendicular to the exact vertical direction defined by gravity.

[0028] In the present disclosure, a“first actuator” of the one or more magnetic bearings can be understood as an active and controllable element of the magnetic bearings. In particular, the one or more first actuators may include a controllable magnet such as an electromagnet. The magnetic field of the one or more first actuators may be actively controllable for maintaining and / or adjusting distance between the upper chamber wall 212 and the carrier 10. In other words, a“first actuator” of the one or more magnetic bearings can be understood as an element with a controllable and adjustable magnetic field to provide a magnetic levitation force acting on the carrier.

[0029] Accordingly, the one or more first actuators 121 are configured for contactlessly holding the carrier. As exemplarily shown in FIG. 1, one or more first magnetic counterparts 181 may be arranged at the carrier 10, particularly at a top part of the carrier. The one or more first magnetic counterparts 181 of the carrier may magnetically interact with the one or more first actuators 121 of the one or more magnetic bearings 120. In particular, the one or more first magnetic counterparts 181 can be passive magnetic elements. For instance, the one or more first magnetic counterparts 181 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0030] For example, an output parameter such as an electric current which is applied to the one or more first actuators may be controlled depending on an input parameter such as a distance between the upper chamber wall 212 and the carrier 10. For instance, a distance (e.g. the gap 122 indicated in FIG. 1) between the upper chamber wall 212 and the carrier 10 may be measured by a distance sensor, and the magnetic field strength of the one or more first actuators may be set depending on the measured distance. In particular, the magnetic field strength may be increased in the case of a distance above a predetermined threshold value, and the magnetic field strength may be decreased in the case of a distance below the threshold value. The one or more first actuators may be controlled in a closed loop or feedback control.

[0031] In the present disclosure, a“drive unit” can be understood as a unit configured for moving an object, e.g. a carrier as described herein, in a contactless manner in the transport direction. In particular, the drive unit as described herein may be configured to generate a magnetic force acting on the carrier in the transport direction. Accordingly, the drive unit can be a linear motor. For example, the linear motor can be an iron-core linear motor. Alternatively, the linear motor can be an ironless linear motor. An ironless linear motor can be beneficial for avoiding a torsional moment on the carrier caused by vertical forces due to possible interaction of the passive magnetic elements of the carrier and the iron-core of the linear motor.

[0032] More specifically, as exemplarily shown in FIG. 1, the drive unit typically includes one or more second actuators configured for contactlessly moving the carrier in the transport direction. The one or more second actuators can be one or more controllable magnets, e.g. electromagnets. Accordingly, the one or more second actuators may be actively controllable for exerting a moving force on the carrier in the transport direction. As exemplarily shown in FIG. 1, one or more second magnetic counterparts 182 may be arranged at the carrier 10, particularly at a top part of the carrier. The one or more second magnetic counterparts 182 of the carrier may magnetically interact with the one or more second actuators 132 of the drive unit 130. In particular, the one or more second magnetic counterparts 182 can be passive magnetic elements. For instance, the one or more second magnetic counterparts 182 may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0033] According to some embodiments, which can be combined with other embodiments described herein, the one or more first actuators 121 and the one or more second actuators 132 are arranged in an atmospheric space 110, as exemplarily shown in FIG. 1. The expression “atmospheric space” can be understood as a space having atmospheric pressure conditions, i.e. approximately 1.0 bar. For example, the atmospheric space may be a space provided outside the vacuum chamber. Alternatively, the atmospheric space can be provided by an atmospheric box or atmospheric container (not explicitly shown) provided inside the vacuum chamber.

[0034] With exemplary reference to FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the one or more first actuators 121 and the one or more second actuators 132 can be attached to an outside surface of an upper chamber wall 212, particularly of a vacuum chamber, e.g. a vacuum processing chamber 210. Accordingly, beneficially the active elements of the one or more magnetic bearings are arranged at a location which is well accessible for mounting /or maintenance resulting in a reduction of costs. According to an example, the outside surface of the upper chamber wall 212 may include receptions for receiving the one or more first actuators 121 and the one or more second actuators 132, as exemplarily shown in FIG. 1.

[0035] As exemplarily shown in FIG. 1, according to some embodiments, which can be combined with other embodiments described herein, the magnetic levitation system further includes a contactless guiding arrangement 140 for guiding the carrier 10 in the transport direction T. Typically, the contactless guiding arrangement 140 is arranged in a lower portion 15L of the carrier transportation space 15. For instance, the contactless guiding arrangement 140 can include one or more passive magnetic bearings 125. In particular, as exemplarily shown in FIG. 1, the one or more passive magnetic bearings 125 can be vertically arranged. Accordingly, the one or more passive magnetic bearings 125 are configured for providing a magnetic force acting on the carrier in a horizontal direction, particularly a lateral direction L, as exemplarily indicated in FIG. 1.

[0036] For instance, as exemplarily shown in FIG. 1, the one or more passive magnetic bearings 125 may be provided by vertically, parallel arranged passive magnetic elements. Typically, at least two passive magnetic elements are arranged to provide a reception for a third magnetic counterpart 183 of the carrier. Accordingly, in the presence of the carrier, the third magnetic counterpart 183 is arranged between oppositely arranged passive magnetic elements of the one or more passive magnetic bearings 125. Typically, the third magnetic counterpart 183 includes a passive magnetic element. In FIG. 1, a north pole N portion of the passive magnetic elements is schematically indicted by the hatching pattern. A south pole portion of the passive magnetic elements is represented by the blank element adjacent to the north pole N portion.

[0037] As exemplarily shown in FIG. 1, typically the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 are arranged such that a south pole portion of the passive magnetic element of the third magnetic counterpart 183 faces a south pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (right hand side of the contactless guiding arrangement 140 shown in FIG. 1). Accordingly, a north pole portion of the passive magnetic element of the third magnetic counterpart 183 may face a north pole portion of the passive magnetic element of the one or more passive magnetic bearings 125 (left hand side of the contactless guiding arrangement 140 shown in FIG. 1). Accordingly, the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that repulsive magnetic forces act between the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125. Although not explicitly shown, it is to be understood that alternatively the passive magnetic elements of the one or more passive magnetic bearings 125 and the third magnetic counterpart 183 can be arranged such that attractive magnetic forces act between the passive magnetic element of the third magnetic counterpart 183 and the passive magnetic elements of the one or more passive magnetic bearings 125.

[0038] Accordingly, beneficially a contactless lateral guiding of the carrier can be provided. Further, it is to be noted that providing a passive guiding arrangement is particularly well suited for providing a robust carrier transport in high temperature vacuum environments at low costs.

[0039] In the present disclosure, a “passive magnetic bearing” can be understood as a bearing having passive magnetic elements, which are not subject to active control or adjustment, at least not during operation of the apparatus. In particular, a passive magnetic bearing may be adapted for generating a magnetic field, e.g. a static magnetic field. In other words, a passive magnetic bearing may not be configured for generating an adjustable magnetic field. For instance, the magnetic elements of the one or more passive magnetic bearings may be made of a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0040] Accordingly, a“passive magnetic element” or“passive magnet” as used herein may be understood as a magnet which is not actively controlled, e.g. via a feedback control. For example, no output parameter such as a magnetic field strength of the passive magnet is controlled depending on an input parameter such as a distance. The“passive magnetic element” or“passive magnet” may rather provide a side stabilization of the carrier without any feedback control. For example, a“passive magnetic element” or“passive magnet” as described herein may include one or more permanent magnets. Alternatively or additionally, a “passive magnetic element” or “passive magnet” may include one or more electromagnets which may not be actively controlled. [0041] With exemplary reference to FIG. 2, according to some embodiments which can be combined with other embodiments described herein, the magnetic levitation system further includes at least one side stabilization device 160 with at least one stabilization magnet 161 configured to apply a restoring force F on the carrier 10 in a lateral direction L transverse to the transport direction T. For example, the at least one stabilization magnet 161 can be arranged above the carrier transportation space 15, particularly in an atmospheric space. In particular, the at least one stabilization magnet 161 can be attached to an outside surface of the upper chamber wall 212. Typically, the at least one stabilization magnet 161 can be arranged at a lateral distance with respect to the one or more first actuators 121. Additionally or alternatively, the at least one stabilization magnet 161 can be arranged at a lateral distance with respect to the one or more second actuators 132.

[0042] Accordingly, beneficially the side stabilization device 160 may stabilize the carrier at a predetermined lateral position by applying a restoring force on the carrier 10 in the case of a lateral displacement of the carrier. The restoring force F pushes or pulls the carrier 10 back to the predetermined lateral position. Accordingly, beneficially the side stabilization device 160 may generate a stabilization force configured to counteract a displacement of the carrier from the carrier transportation space 15 in the lateral direction L. In other words, the side stabilization device 160 may be configured to generate a restoring force F which pushes and/or pulls the carrier back into the carrier transportation space 15, when the carrier is displaced in the lateral direction L from a predetermined lateral position or equilibrium position that is exemplarily depicted in FIG. 2.

[0043] As exemplarily shown in FIG. 2, the at least one stabilization magnet 161 may be a passive magnet having a north pole N and a south pole S. In some embodiments, the at least one stabilization magnet may include a plurality of passive magnets which can be arranged one after the other in the transport direction. Typically, the direction of the magnetic field lines inside the at least one stabilization magnet (which run from the south pole to the north pole inside the magnet) may essentially correspond to the lateral direction L. [0044] At least one carrier stabilization magnet 162 may be attached to the carrier 10 in such a way that a displacement of the carrier 10 from the carrier transportation space 15 in the lateral direction L leads to repulsive magnetic force between the at least one stabilization magnet 161 of the side stabilization device 160 and the at least one carrier stabilization magnet 162 counteracting the displacement. Accordingly, beneficially the carrier remains in the equilibrium position that is shown in FIG. 2 during the holding and during the transport of the carrier along the transport path.

[0045] As exemplarily shown in FIG. 2, the at least one carrier stabilization magnet 162 can be a passive magnet having a north pole N and a south pole S, which are arranged such that the direction of the magnetic field lines inside the at least one carrier stabilization magnet 162 essentially correspond to the lateral direction L.

[0046] In particular, the least one carrier stabilization magnet 162 can be arranged in an inverse orientation as compared to the at least one stabilization magnet 161 of the side stabilization device 160, such that the north pole N of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the south pole S of the at least one stabilization magnet 161, and the south pole S of the at least one carrier stabilization magnet 162 is arranged close to and attracted by the north pole N of the at least one stabilization magnet 161 of the side stabilization device 160, when the carrier is arranged in the equilibrium position. When the carrier is displaced from the equilibrium position in a first lateral direction (e.g. toward the left side of FIG. 2), the north pole N of the at least one carrier stabilization magnet 162 approaches the north pole N of the at least one stabilization magnet 161 of the side stabilization device 160 which leads to a restoring force, urging the carrier back toward the equilibrium position. When the carrier is displaced from the equilibrium position in a second (opposite) lateral direction (e.g. toward the right side of FIG. 2), the south pole S of the at least one carrier stabilization magnet 162 approaches the south pole S of the at least stabilization magnet 161 of the side stabilization device 160 which leads to a restoring force, urging the carrier back toward the equilibrium position. Accordingly, the side stabilization device 160 stabilizes the carrier at a predetermined lateral position such that lateral movements of the carrier can be reduced or prevented.

[0047] With exemplary reference to FIG. 3, according to some embodiments which can be combined with other embodiments described herein, the magnetic levitation system further includes a safety arrangement 170. Typically, the safety arrangement 170 includes a lateral guard guiding element 171 provided at at least one side of the carrier transportation space 15. For instance, the lateral guard guiding element 171 may be attached to an inside surface of the upper chamber wall. In particular, the lateral guard guiding element 171 may be spaced apart from the at least one stabilization magnet 161 in a lateral direction, such that the at least one carrier stabilization magnet 162 attached to the carrier 10 can be arranged in-between. As exemplarily shown in FIG. 3, in the presence of the carrier, a gap is provided between the at least one carrier stabilization magnet 162 and the lateral guard guiding element 171. The lateral guard guiding element 171 can be implemented as a guiding rail or as a plurality of guiding pins in a row.

[0048] As exemplarily shown in FIG. 3, additionally or alternatively the safety arrangement 170 may include a safety roller 172 for providing a vertical safety support for the carrier 10, e.g. in the case that the one or more first actuators 121 are deactivated. Typically, the safety roller 172 is connected to a holder 173 attached to an inside surface of the upper chamber wall 212. The holder holding the safety roller may also function as a lateral guard guiding element.

[0049] As shown in FIG. 3, according to some embodiments which can be combined with other embodiments described herein, two side stabilization devices can be provided, as exemplarily described with reference to FIG. 2. For instance, a first side stabilization device 160 A may be provided at a lateral distance with respect to the one or more first actuators 121 and a second stabilization device 160B may be provided at a lateral distance with respect to the one or more second actuators 132. [0050] With exemplary reference to FIG. 3, according to some embodiments which can be combined with other embodiments described herein, a protective element 163, e.g. a protective strip, may be attached to the least one carrier stabilization magnet 162. In particular, the protective element 163 can be attached to a side of the least one carrier stabilization magnet 162 facing the lateral guard guiding element 171 and/or to a side of the least one carrier stabilization magnet 162 facing the holder 173.

[0051] With exemplary reference to FIG. 4, an embodiment of the magnetic levitation system is described having an asymmetric arrangement of one or more first actuators and one or more second actuators. According to some embodiments which can be combined with other embodiments described herein, the one or more first actuators 121 can be centrally arranged above a center of gravity G of the carrier 10 to be transported, as exemplarily shown in FIG. 4. In particular, with reference to the embodiment of FIG. 4, the expression“centrally arranged above the center of gravity G of the carrier” can be understood in that a vertical plane 111 extending through the center of gravity G of the carrier also extends through the one or more first actuators 121. In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect with the one or more first actuators 121. In particular, the vertical plane 111 may approximately intersect with a center of the one or more first actuators 121, e.g. with a deviation of ± 10% from the center of the one or more first actuators. According to an example, the vertical plane 111 may represent a plane of symmetry for the one or more first actuators 121. As exemplarily shown in FIG. 4, the one or more second actuators 132 may be laterally arranged with respect to the one or more first actuators 121. In particular, all of the one or more second actuators 132 can be arranged adjacent to the same side (e.g. the left side in FIG. 4) of the one or more first actuators 121. It is to be understood that the aspects and features as described with reference to FIGS. 1 to 3 may also be applied to the embodiment shown in FIG. 4.

[0052] With exemplary reference to FIG. 5, an embodiment of the magnetic levitation system is described having a symmetric arrangement of one or more first actuators and one or more second actuators. According to some embodiments which can be combined with other embodiments described herein, the one or more second actuators 132 can be centrally arranged above a center of gravity of the carrier 10 to be transported, as exemplarily shown in FIG. 5.

[0053] In particular, with reference to the embodiment of FIG. 5, the expression“centrally arranged above the center of gravity G of the carrier” can be understood in that a vertical plane 111 extending through the center of gravity G of the carrier also extends through the one or more second actuators 132. In other words, the vertical plane 111 extending through the center of gravity G of the carrier may intersect with the one or more second actuators 132. In particular, the vertical plane 111 may approximately intersect with a center of the one or more second actuators 132, e.g. with a deviation of ± 10% from the center of the one or more second actuators. According to an example, the vertical plane 111 may represent a plane of symmetry for the one or more second actuators 132.

[0054] As exemplarily shown in FIG. 5, the one or more first actuators 121 may include a first group 121 A of one or more first actuators and a second group 121B of one or more first actuators. The first group 121 A of one or more first actuators and the second group 121B of one or more first actuators may be laterally arranged with respect to the one or more second actuators 132. In particular, the first group 121 A of one or more first actuators can be arranged adjacent to a first side of the one or more second actuators 132, and the second group 121B of one or more first actuators can be arranged adjacent to a second side of the one or more second actuators 132, the second side being opposite the first side, as exemplarily shown in FIG. 5. For instance, the first group 121A of the one or more first actuators and the second group 121B of one or more first actuators can be symmetrically arranged with respect to the one or more second actuators 132. It is to be understood that the aspects and features as described with reference to FIGS. 1 to 3 may also be applied to the embodiment shown in FIG. 5.

[0055] With exemplary reference to FIGS. 4 and 5, a carrier 10 according to the present disclosure includes a main body 13 for carrying an object, e.g. a substrate or a mask. For instance, the main body 13 can be implemented as a carrier plate configured for holding a substrate or a mask. Alternatively, the main body 13 can be implemented as a carrier frame configured for holding a substrate or a mask. As exemplarily shown in FIGS 4 and 5, the main body has a first end 11 and a second end 12. The second end 12 is opposite the first end 11. The first end 11 of the main body 13 includes one or more first magnetic counterparts 181 for interacting with one or more first actuators 121 of one or more magnetic bearings 120 of the magnetic levitation system. The first end 11 further includes one or more second magnetic counterparts 182 for interacting with one or more second actuators 132 of a drive unit 130 of the magnetic levitation system. Additionally, the second end 12 of the main body 13 includes a third magnetic counterpart 183 for interacting with one or more passive magnetic bearings 125 of a contactless guiding arrangement 140 of the magnetic levitation system.

[0056] According to some embodiments which can be combined with any other embodiments described herein, the top surface 181S of the one or more first magnetic counterparts 181 and the top surface 182S of the one or more second magnetic counterparts 182 have the same orientation. More specifically, as exemplarily shown in FIGS. 4 and 5 the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 are substantially horizontal. For example, the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182 can be coplanar. Alternatively, a small step, e.g. a step ST of ST < 2 mm, particularly ST < 1 mm, may be provided between the top surface of the one or more first magnetic counterparts 181 and the top surface of the one or more second magnetic counterparts 182.

[0057] As exemplarily shown in FIGS. 4 and 5, according to some embodiments which can be combined with any other embodiments described herein, the third magnetic counterpart 183 includes a first surface 183 A and a second surface 183B. The second surface 183B is opposite the first surface 183 A. Typically, the orientation of the first surface 183 A and the orientation of the second surface 183B are perpendicular to a top surface of the one or more first magnetic counterparts 181 and a top surface of the one or more second magnetic counterparts 182.

[0058] According to some embodiments, as exemplarily shown in FIG. 4, the carrier 10 can be an asymmetric carrier, i.e. not being symmetrical with respect to a vertical plane 111 extending through the center of gravity G when the carrier is in a vertical orientation. Alternatively, as exemplarily shown in FIG. 5, the carrier 10 can be a symmetric carrier, i.e. being symmetrical with respect to a vertical plane 111 extending through the center of gravity G when the carrier is in a vertical orientation.

[0059] From FIGS. 4 and 5, it is to be understood that the dimension of the carrier typically corresponds to the dimension of the carrier transportation space 15. Accordingly, the carrier may have a height H_c corresponding to the height H of the carrier transportation space 15. Further, the carrier may have a width Wc corresponding to the width W of the carrier transportation space 15. Accordingly, the aspect ratio of H_c/Wc can be H_c/Wc > 5, particularly H_c/W _c ³ 10.

[0060] According to some embodiments which can be combined with any other embodiments described herein, at least one carrier stabilization magnet 162 may be attached to the first end 11 of the carrier 10, as exemplarily described with reference to FIGS. 2 and 3. As exemplarily shown in FIGS. 6 and 7, the at least one carrier stabilization magnet 162 may be provided for an asymmetric carrier (see FIG. 6) as well as for a symmetric carrier (see FIG. 7). Further, a protective element 163, e.g. a protective strip, may be attached to the least one carrier stabilization magnet 162, as exemplarily described with reference to FIG. 3.

[0061] With exemplary reference to FIG. 6, an arrangement of two asymmetric magnetic levitation systems for transporting respective asymmetric carriers is described. In particular, a first asymmetric magnetic levitation system 101 providing a first transport path Tl may be provided next to a second asymmetric magnetic levitation system 102 providing a second transport path T2. In particular, the second asymmetric magnetic levitation system 102 is horizontally offset from the first asymmetric magnetic levitation system 101. Accordingly, typically the second transport path T2 is horizontally offset from the first transport path Tl. As can be seen from FIG. 6, the components of the first asymmetric magnetic levitation system 101 may substantially correspond to the components of the second asymmetric magnetic levitation system 102. Accordingly, it is to be understood that the features as described with reference to FIGS. 1 to 3 can also be applied to the exemplary embodiment shown in FIG. 6. As shown in FIG. 6, the contactless guiding arrangement 140 of the first asymmetric magnetic levitation system 101 and the second asymmetric magnetic levitation system 102 can be connected to a common support structure 145. The common support structure 145 can be coupled to the bottom chamber wall 211, as exemplarily shown in FIG. 6.

[0062] With exemplary reference to FIG. 7, an arrangement of two symmetric magnetic levitation systems for transporting respective symmetric carriers is described. In particular, a first symmetric magnetic levitation system 103 providing a first transport path Tl may be provided next to a second symmetric magnetic levitation system 104 providing a second transport path T2. In particular, the second symmetric magnetic levitation system 104 is horizontally offset from the first symmetric magnetic levitation system 103. Accordingly, the second transport path T2 is horizontally offset from the first transport path Tl. As can be seen from FIG. 7, the components of the first symmetric magnetic levitation system 103 may substantially correspond to the components of the second symmetric magnetic levitation system 104. Further, it is to be understood that the features as described with reference to FIGS. 1 to 4 can also be applied to the exemplary embodiment shown in FIG. 7. As shown in FIG. 7, the contactless guiding arrangement 140 of the first symmetric magnetic levitation system 103 and the second symmetric magnetic levitation system 104 can be connected to a common support structure 145. The common support structure 145 can be coupled to the bottom chamber wall 211, as exemplarily shown in FIG. 7.

[0063] Further, as exemplarily shown in FIG. 7, according to some embodiments which can be combined with any other embodiments described herein, the upper chamber wall 212 may be implemented as a separate plate element, particularly a tub-like plate element. Accordingly, beneficially the one or more first actuators of the one or more magnetic bearings and the one or more second actuators of the drive unit can be pre-mounted to the upper chamber wall before the upper chamber wall is mounted to the side walls of the chamber. Providing the upper chamber wall with pre-mounted one or more first actuators and pre-mounted one or more second actuators may facilitate the assembly procedure and can reduce the costs. Accordingly, compared to the state of the art, beneficially a simpler interface to the chamber is provided.

[0064] With exemplary reference to FIG. 8, a processing system 200 for vertically processing a substrate according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the processing system 200 includes at least one vacuum processing chamber 210 including a processing device 205. In particular, typically the processing device 205 is arranged in the vacuum processing chamber 210 and the processing device 205 may be selected from the group consisting of a deposition source, an evaporation source, and a sputter source. The term “vacuum” can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. Typically, the pressure in a vacuum chamber as described herein may be between 10 -5 mbar and about 10 -8 mbar, more typically between 10 -5 mbar and 10 -7 mbar, and even more typically between about 10 ⁶ mbar and about 10 ⁷ mbar. According to some embodiments, the pressure in the vacuum chamber may be considered to be either the partial pressure of the evaporated material within the vacuum chamber or the total pressure (which may approximately be the same when only the evaporated material is present as a component to be deposited in the vacuum chamber). In some embodiments, the total pressure in the vacuum chamber may range from about 10 ⁴ mbar to about 10 ⁷ mbar, especially in the case that a second component besides the evaporated material is present in the vacuum chamber (such as a gas or the like). Accordingly, the vacuum chamber can be a“vacuum deposition chamber”, i.e. a vacuum chamber configured for vacuum deposition. [0065] Further, as exemplarily shown in FIG. 8, the processing system 200 includes one or more magnetic levitation systems for transporting one or more carriers in a transport direction T. For example, the processing system 200 may include a first magnetic levitation system 100 A and a second magnetic levitation system 100B. The first magnetic levitation system 100 A and the second magnetic levitation system 100B can be configured according to any embodiments described herein, in particular as described with reference to FIGS. 1 to 7. As shown in FIG. 8, the first magnetic levitation system 100A providing a first transport path Tl may be provided next to the second magnetic levitation system 100B providing a second transport path T2. In particular, the second magnetic levitation system 100B is horizontally offset from the first magnetic levitation system 100A. Accordingly, the second transport path T2 is horizontally offset from the first transport path Tl.

[0066] The one or more magnetic levitation systems of the processing system 200 include: one or more magnetic bearings 120 having one or more first actuators 121 for contactlessly holding the carrier 10 in a carrier transportation space 15. Additionally, the one or more magnetic levitation systems include a drive unit 130 having one or more second actuators 132 for moving the carrier 10 in the transport direction T. The one or more first actuators 131 and the one or more second actuators 132 are arranged above the carrier transportation space 15.

[0067] According to some embodiments which can be combined with any other embodiments described herein, the processing system 200 may further include a track switch assembly 190 configured to move the carrier from the first transport path Tl to the second transport path T2 in a path switch direction S, as exemplarily indicated in FIG. 8. Typically, the path switch direction S corresponds to the lateral direction L. Further, the track switch assembly 190 may be configured to move the carrier to a processing position T3 horizontally offset from the first and second transport paths. Further, as exemplarily indicated by the double sided arrows 144 in FIG. 8, the contactless guiding arrangement 140 of the first magnetic levitation system 100 A and of the second magnetic levitation system 100B can be movable in a vertical direction in order to allow the movement of the carrier in the path switch direction S. Further, as exemplarily shown in FIG. 8, a mask 206 (e.g. an edge exclusion mask) may be provided between the processing position T3 and the processing device 205.

[0068] With exemplary reference to the flowchart shown in FIG. 9, a method 300 of transporting a carrier according to the present disclosure is described. According to embodiments which can be combined with any other embodiments described herein, the method 300 includes contactlessly holding (represented by block 310 in FIG. 9) the carrier 10 in a carrier transportation space 15 using one or more magnetic bearings 120. The one or more magnetic bearings 120 have one or more first actuators 121 arranged above the carrier transportation space 15. Further, the method 300 includes transporting (represented by block 320 in FIG. 9) the carrier 10 in a transportation direction T using a drive unit 130. The drive unit 130 has one or more second actuators 132 being arranged above the carrier transportation space 15.

[0069] In view of the above, it is to be understood that compared to the state of the art, embodiments of the present disclosure beneficially provide for a magnetic levitation system, a processing system, and a method of transporting a carrier which are improved with respect to accurate and smooth transportation of the carriers in high temperature vacuum environments, particularly for high quality display manufacturing. Further, embodiments as described herein beneficially provide for more robust contactless carrier transportation at lower production costs compared to conventional carrier transportation apparatuses.

[0070] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow.

Claims

1. A magnetic levitation system (100) for transporting a carrier (10) in a

transport direction (T), comprising:

one or more magnetic bearings (120) having one or more first actuators (121) for contactlessly holding the carrier (10) in a carrier transportation space (15), and

a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T), the one or more first actuators (121) and the one or more second actuators (132) are arranged above the carrier transportation space (15).

2. The magnetic levitation system (100) of claim 1, wherein the one or more first actuators (131) and the one or more second actuators (132) are arranged in an atmospheric space.

3. The magnetic levitation system (100) of claim 1 or 2, wherein the one or more first actuators (131) and the one or more second actuators (132) are attached to an outside surface of an upper chamber wall (212), particularly of a vacuum chamber (210).

4. The magnetic levitation system (100) any of claims 1 to 3, further

comprising a contactless guiding arrangement (140) for guiding the carrier (10) in the transport direction (T), the contactless guiding arrangement (140) is arranged in a lower portion (15L) of the carrier transportation space (15).

5. The magnetic levitation system (100) of claim 4, wherein the contactless guiding arrangement (140) comprises one or more passive magnetic bearings (125).

6. The magnetic levitation system (100) of any of claims 1 to 5, further comprising at least one side stabilization device (160) with at least one stabilization magnet (161) configured to apply a restoring force (F) on the carrier (10) in a lateral direction (L) transverse to the transport direction (T).

7. The magnetic levitation system (100) of claim 6, wherein at least one

stabilization magnet (161) is arranged above the carrier transportation space (15), particularly in an atmospheric space.

8. The magnetic levitation system (100) of any of claims 1 to 7, further

comprising a safety arrangement (170) comprising at least one element of the group consisting of: a lateral guard guiding element provided at at least one side of the carrier transportation space (15), and a safety roller for providing a vertical safety support for the carrier (15).

9. The magnetic levitation system (100) of any of claims 1 to 8, wherein the carrier transportation space (15) is a vertical carrier transportation space having a height (H) extending in a vertical direction and a width (W) extending in a horizontal direction, wherein the aspect ratio of H/W is H/W > 5.

10. The magnetic levitation system (100) of any of claims 1 to 9, wherein the one or more first actuators (121) are centrally arranged above a center of gravity of the carrier (10) to be transported.

11. The magnetic levitation system (100) of any of claims 1 to 10, wherein the one or more second actuators (132) are laterally arranged with respect to the one or more first actuators (121).

12. The magnetic levitation system (100) of any of claims 1 to 9, wherein the one or more second actuators (132) are centrally arranged above a center of gravity of the carrier (10) to be transported.

13. The magnetic levitation system (100) of any of claims 1 to 9 or 12, wherein the one or more first actuators (121) comprise a first group (121 A) of one or more first actuators and a second group (121B) of one or more first actuators, the first group (121A) and the second group (121B) are symmetrically arranged with respect to the one or more second actuators (132).

14. A carrier (10) for a magnetic levitation system, comprising a main body (13) for carrying an object, the main body having a first end (11) and a second end (12) opposite the first end (11),

wherein the first end (11) comprises one or more first magnetic counterparts (181) for interacting with one or more first actuators (121) of one or more magnetic bearings (120) of the magnetic levitation system, the first end (11) further comprising one or more second magnetic counterparts (182) for interacting with one or more second actuators (132) of a drive unit (130) of the magnetic levitation system, and

wherein the second end (12) comprises a third magnetic counterpart (183) for interacting with one or more passive magnetic bearings (125) of a contactless guiding arrangement (140) of the magnetic levitation system.

15. The carrier of claim 14, wherein the top surface of the one or more first magnetic counterparts (181) and the top surface of the one or more second magnetic counterparts (182) are coplanar.

16. The carrier of claim 14 or 15, wherein the third magnetic counterpart (183) has a first surface (183A) and a second surface (183B), the second surface (183B) being opposite the first surface (183A), and wherein an orientation of the first surface (183 A) and an orientation of the second surface (183B) are perpendicular to a top surface of the one or more first magnetic counterparts (181) and a top surface of the one or more second magnetic counterparts (182).

17. The carrier of any of claims 14 to 16, further comprising at least one carrier stabilization magnet (162) attached to the first end (11) of the carrier (10).

18. A processing system (200) for vertically processing a substrate, comprising: at least one vacuum processing chamber (210) comprising a processing device (205), and

one or more magnetic levitation systems (100) for transporting one or more carriers (10) in a transport direction (T), one or more magnetic levitation systems comprising:

a drive unit (130) having one or more second actuators (132) for moving the carrier (10) in the transport direction (T), the one or more first actuators (131) and the one or more second actuators (132) being arranged above the carrier transportation space (15).

19. A method (300) of transporting a carrier (10), comprising:

contactlessly holding (310) the carrier (10) in a carrier transportation space (15) using one or more magnetic bearings (120) having one or more first actuators (121) arranged above the carrier transportation space (15), and

transporting (320) the carrier (10) in a transportation direction (T) using a drive unit (130) having one or more second actuators (132) being arranged above the carrier transportation space (15).