JP6766189B2 - An assembly for raising or lowering the carrier, a device for transporting the carrier in a vacuum chamber, and a method for raising or lowering the carrier. - Google Patents

Description

Embodiments of the present disclosure include an assembly for raising or lowering carriers in a vacuum chamber, an apparatus for transporting carriers in a vacuum chamber, a system for vacuuming a substrate, and a method for raising or lowering carriers. Regarding. An embodiment of the present disclosure relates to a vacuum processing system having at least one deposition source and a path switching assembly configured to move carriers between a first transfer path and a second transfer path. Specifically, a method for changing the track of a carrier in a vacuum chamber will be described.

Techniques for layer deposition on substrates include, for example, sputter deposition, evaporation, and chemical vapor deposition (CVD). The sputter deposition process can be used to deposit a material layer, such as a layer of insulating or conductive material, on a substrate.

An in-line configuration of processing modules can be used to deposit multi-layer stacks. The in-line processing system includes a plurality of subsequent processing modules, such as deposition modules, and optionally additional processing modules, such as cleaning modules and / or etching modules. A plurality of processing modes are performed one after another in the processing module. Thereby, a plurality of substrates can be processed continuously or semi-continuously in the in-line processing system.

During processing, the substrate can be transported by a carrier, i.e., a transport device for transporting the substrate. Carriers are typically transported through a vacuum chamber using one or more transfer systems. The transport system may be configured to carry carriers along one or more transport paths. Within the vacuum system, at least two transport paths may be provided next to each other. For example, it is a first transport path for transporting the carrier in the forward direction and a second transport path for transporting the carrier in the return direction opposite to the front direction.

The transport system was configured to support and carry carriers along the transport path and / or from one transport path (also referred to as "route switching" or "track switching") to another transport path. It may have rollers or other supports. Further, the carrier may be moved upward or downward (also referred to as "raising" or "lowering" the carrier), for example, to correct or change the vertical height of the carrier. Friction between the carrier and the carrier support during carrier movement can produce particles that can adversely affect the vacuum conditions inside the vacuum system. The particles can contaminate the layers deposited on the substrate and reduce the quality of the deposited layers.

From the above viewpoint, an improved assembly for raising or lowering the carrier in the vacuum chamber, an improved device for transporting the carrier in the vacuum chamber, and reducing particle formation in the vacuum chamber, An improved way to raise or lower the carrier is needed. New equipment, systems, and methods are also needed that provide easy path switching between at least two transfer paths within the vacuum chamber.

In light of the above, the assembly for raising or lowering the carrier in the vacuum chamber, the device for transporting the carrier in the vacuum chamber, the system for vacuuming the substrate, and the carrier in the vacuum chamber. A method for raising or lowering is provided. Further aspects, advantages, and features of the present disclosure will become apparent from the claims, description of the specification, and accompanying drawings.

According to one aspect of the present disclosure, an assembly for raising or lowering carriers in a vacuum chamber is provided. The assembly includes a carrier support that is essentially vertically movable and a holding device that is configured to hold the upper portion of the carrier in a non-contact manner.

The carrier support is configured to support the carrier. Thereby, when the carrier support moves upward or downward, the carrier is raised or lowered. The holding device is configured to hold the upper portion of the carrier in a non-contact manner while raising or lowering the carrier.

According to one aspect of the present disclosure, an apparatus for transporting a carrier in a vacuum chamber is provided. The device is configured to move the carrier in a path switching direction across the transport direction so as to be away from the first transport system provided in the transport direction along the first transport path and the first transport path. Includes a route switching assembly. The rerouting assembly includes a carrier support that is essentially vertically movable, and a holding device that is configured to hold the upper portion of the carrier in a non-contact manner.

According to another aspect of the present disclosure, a system for vacuuming a substrate is provided. The system is located in a vacuum chamber, an assembly for raising or lowering carriers in the vacuum chamber according to any of the embodiments described herein, and in the vacuum chamber, deposit sources, evaporation sources, sputtering sources. Includes one or more treatment tools selected from the group consisting of surface treatment tools, heating devices, cleaning devices, etching tools, and combinations thereof.

According to yet another aspect of the present disclosure, a method for raising or lowering carriers in a vacuum chamber is provided. The method comprises placing the carrier on a carrier support and moving the carrier support essentially vertically to raise or lower the carrier. In that case, the upper portion of the carrier is held in a non-contact manner by the holding device while the carrier is raised or lowered.

The embodiments also cover devices for performing the methods of the present disclosure, including device portions for performing each of the described method embodiments. These method embodiments may be performed in any combination of the two, or in any other way, using hardware components and a computer programmed with appropriate software. Further, embodiments according to the present disclosure also cover methods for operating the devices described. The methods described for operating the device include method embodiments for performing all functions of the device.

By referring to the embodiments, a more specific description of the present disclosure briefly outlined above can be obtained so that the above features of the present disclosure can be understood in detail. The accompanying drawings relate to embodiments of the present disclosure and are described in the following description.

A schematic cross-sectional view of an assembly for raising or lowering carriers according to the embodiments described herein is shown. Demonstrates one step of a method for raising or lowering carriers using an assembly according to the embodiments described herein. Demonstrates one step of a method for raising or lowering carriers using an assembly according to the embodiments described herein. Demonstrates one step of a method for raising or lowering carriers using an assembly according to the embodiments described herein. Demonstrates one step of a method for raising or lowering carriers using an assembly according to the embodiments described herein. A schematic cross-sectional view of an assembly for raising or lowering carriers according to the embodiments described herein is shown. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. Demonstrates a step performed by an apparatus for transporting carriers according to the embodiments described herein. A schematic cross-sectional view of a system for vacuuming a substrate according to an embodiment described herein is shown. FIG. 5 is a flow chart for showing a method for raising or lowering a carrier according to an embodiment described herein. It is a flow diagram for demonstrating the method for carrying a carrier according to the embodiment described in this specification.

From here, various embodiments of the present disclosure will be referred to in detail, one or more of which are illustrated. In the following description of the drawings, the same reference numbers refer to the same components. In general, only differences for individual embodiments are explained. Each embodiment is given as an explanation of the present disclosure, but this is not intended to limit the present disclosure. Furthermore, the features illustrated or described as part of one embodiment may be used in other embodiments or in combination with other embodiments. This creates yet another embodiment. The present description is intended to include such modifications and modifications.

FIG. 1 shows a schematic cross-sectional view of an assembly 100 for raising or lowering a carrier 10 according to an embodiment described herein. Assembly 100 includes a carrier support 20 that can move upward or downward (also referred to herein as "essentially vertical V"). The assembly further includes a holding device 30 configured to hold the upper portion of the carrier 10 in a non-contact manner.

The carrier 10 can be placed and supported on the carrier support 20. The carrier support 20 is movable downward to lower the carrier 10 supported on it. Alternatively or further, the carrier support 20 can move upwards to raise the carriers supported on it. In certain embodiments, the carrier support 20 may be movable both in the upward direction to raise the carrier and in the downward direction to lower the carrier. An actuator 25 may be provided to move the carrier support 20.

The carrier 10 can be used to carry the substrate 11 or another object along the transport path within the vacuum chamber. The carrier 10 may hold the substrate 11 during transport and / or while the coating material is deposited on the substrate in a vacuum chamber. For example, the substrate 11 can be held essentially in vertical orientation on the substrate holding surface of the carrier 10. The carrier holding the substrate can be moved through the vacuum chamber. The carrier can be a substrate carrier configured to carry the substrate 11. Alternatively, the carrier may be configured to carry and carry different objects, such as masks or shielding devices.

In certain embodiments, the carrier 10 includes a chucking device, such as a magnetic or electrostatic chuck for attracting the substrate 11 or another object towards the holding surface of the carrier 10. The carrier 10 may be configured to hold the substrate 11 essentially in vertical orientation. In other words, the angle between the main surface of the substrate 11 in motion of the carrier and the gravity vector is typically less than 20 degrees. For example, the angle between the main surface of the substrate and the gravity vector can be −10 degrees to +10 degrees, in particular essentially 0 degrees. In that case, a negative angle means that the substrate faces downward.

The carrier support 20 may be configured to support essentially vertically oriented carriers 10 on it. By moving the carrier support 20 in the vertical direction V, essentially vertically oriented carriers can be raised or lowered.

The carrier 10 may be configured to carry a large area substrate, in particular a large area substrate for manufacturing a display. In embodiments, the substrate 11 may have a surface area to be treated that is greater than or equal to 1 m ² , particularly 5 m ² or greater, or even 10 m ² or greater. For this reason, the carrier may have a substrate holding surface having a size of 1 m ² or more, particularly 5 m ² or more, or even 10 m ² or more.

For example, the height of the carrier 10 may be 1 m or more, particularly 2 m or more, and / or the width of the carrier 10 may be 1 m or more, particularly 2 m or more. The height of the carrier can be understood as the vertical dimension of the carrier supported on the carrier support 20.

An actuator 25 for moving the carrier support 20 in the vertical direction V may be provided. The actuator 25 may include a drive device for raising or lowering the carrier support 20, such as a motor, hydraulic device, or gas pressure device. The actuator 25 may be configured to move the carrier support 20 between a first vertical height and a second vertical height. In that case, the first vertical height can be 5 mm or more higher than the second vertical height. In particular, the first vertical height may be 20 mm or more, particularly 40 mm or more, and more particularly 100 mm or more higher than the second vertical height.

The thickness of the carrier can be significantly smaller than the height and / or width of the carrier. Therefore, when the carriers are supported on the carrier support 20 in an essentially vertical orientation, there may be a risk of the carriers tilting or falling from the carrier support. Therefore, it may be beneficial to provide a holding device that stabilizes the upper portion of the carrier while raising or lowering.

To prevent the carrier from tilting or falling from the carrier support, a mechanical holder such as a spring-loaded finger or clamp is provided to contact the upper portion of the carrier and hold the upper portion of the carrier. You may. For example, a mechanical holder can contact the carrier from above and grab the carrier. However, it can be difficult to maintain constant and reliable contact between the mechanical holder and the carrier during vertical movement of the carrier. For example, the holding force of the spring can be reduced as the carrier moves away from the spring support. In addition, particles can be generated due to mechanical sliding contact between the mechanical holder and the carrier. It can adversely affect the vacuum conditions in the vacuum chamber.

It is possible to provide a mechanical holder for the upper part of the carrier. In that case, the mechanical holder is mounted movably in the vertical direction V. In other words, the mechanical holder can be raised and lowered with the carrier to maintain an essentially constant holding force. However, vertically movable holders can be complex and large. Further, during raising, particles can be generated in the vacuum chamber, for example, when the mechanical holder and carrier support do not move in synchronization and at the same speed.

According to the embodiments described herein, a holding device 30 is provided for holding the upper portion of the carrier 10 in a non-contact manner while raising or lowering the carrier. In other words, the holding device 30 is configured to hold and stabilize the upper portion of the carrier without contacting the upper portion of the carrier. Therefore, tilting or falling of the carrier 10 from the carrier support 20 can be prevented. On the other hand, particle formation due to frictional contact between the holding device and the carrier can be reduced or avoided. For example, the retention device 30 can interact magnetically or electrostatically with the upper portion of the carrier.

As outlined in FIG. 1, the holding device 30 can stabilize the vertical orientation of the carriers in a non-contact manner during vertical movement of the carriers, eg, while the carriers are moving downwards. it can. The holding device 30 will not move in the vertical V along with the carrier support 20. For example, the holding device 30 may be stationary during the vertical movement of the carrier support 20. The holding device 30 may be configured to stabilize the upper portion of the carrier in a non-contact manner while the carrier 10 is moving perpendicular to the holding device 30. The generation of particles in the vacuum chamber is reduced and a simple, space-saving holding device can be provided.

The holding device 30 may be located essentially above the carrier support 20. The carrier transport space for receiving the carrier may extend vertically between the carrier support 20 and the holding device 30. For example, the holding device 30 may be located above the carrier support 20 at a position greater than 1 m when, for example, the height of the carrier to be raised or lowered exceeds 1 m.

The holding device 30 may be configured to stabilize the upper portion of the carrier in a non-contact manner, especially in the horizontal direction S (also referred to herein as the "track switching direction S"). In other words, the holding device may apply a stabilizing force acting horizontally to the upper portion of the carrier 10, for example, to reduce the risk of the carrier tilting while raising or lowering the carrier.

The "upper portion of the carrier" can be understood as the upper portion of the vertically oriented carrier 10, including the upper 50% of the height of the vertically oriented carrier, particularly the upper 20%. For example, the holding device 30 can stabilize the upper edge of the carrier to prevent the carrier from tilting. The retention device 30 may include at least one stabilizing portion that interacts non-contactly with the upper portion of the carrier. The counterpart of at least one stabilizing portion configured to interact in a non-contact manner may be secured to the upper portion of the carrier. For example, the holding device 30 can stabilize the carrier by applying oppositely directed horizontal stabilizing forces from the two opposite sides onto the carrier.

In one embodiment, which can be combined with other embodiments described herein, the retention device 30 is configured to non-contactly retain the upper portion of the carrier between the two stabilizing portions. It has two stabilizing parts. For example, the first stabilizing portion 37 may be located on the first side of the carrier (ie, on the first side of the carrier transport space). Then, the second stabilizing portion 38 may be arranged on the second side of the carrier opposite to the first side (that is, on the second side of the carrier transport space). The second side may coincide with the front side of the carrier on which the substrate 11 is held. The first side can then coincide with the back side of the carrier opposite to the front side.

When the carrier is held between the first stabilizing portion 37 and the second stabilizing portion 38 of the holding device 30, the inclination of the carrier in both directions is the stabilization of the two sides of the carrier. Can be hindered by conversion.

In certain embodiments, which can be combined with other embodiments described herein, the holding device 30 comprises at least one magnetic unit configured to magnetically interact with the upper portion of the carrier. For example, an opponent, which is a magnetic counter unit for magnetically interacting with at least one magnet unit of the holding device, may be fixed to the upper portion of the carrier. The upper portion of the carrier can be stabilized in a non-contact manner via magnetic force. The magnet unit is reliable, cost effective and can provide a great stabilizing force.

In particular, at least one magnet unit may include a permanent magnet. The complexity of the holding device can be reduced and energy can be saved. This is because permanent magnets provide magnetic force without an external power source.

In certain embodiments, at least one magnet unit has a vertical extension of 30 mm or more, in particular 50 mm or more. A magnet unit with a large vertical extension can ensure a magnetic interaction between the carrier 10 and the holding device 30 at various relative vertical positions between the carrier and the holding device. Therefore, the holding device 30 may remain in a constant vertical position during the vertical movement of the carrier support 20.

The holding device 30 may include at least one magnet unit for applying a repulsive magnetic force to the upper portion of the carrier. In certain embodiments, which may be combined with other embodiments described herein, a first magnet unit 33 for the holding device 30 to apply a repulsive magnetic force from the first side to the upper portion of the carrier 10. , And a second magnet unit 34 for applying a repulsive magnetic force to the upper portion of the carrier 10 from the second side opposite to the first side.

A magnetic counter unit may be fixed to the upper portion of the carrier 10 for magnetic interaction with the first magnet unit 33 and the second magnet unit 34, respectively. In particular, the first magnet unit 33 of the holding device 30 may apply a repulsive magnetic force to the first magnetic counter unit 13 fixed to the first side of the carrier 10. And / or the second magnet unit 34 of the holding device 30 may apply a repulsive magnetic force to the second magnetic counter unit 14 fixed to the second side of the carrier opposite to the first side. The carrier may be propelled in a non-contact manner towards the central area between the first magnet unit 33 and the second magnet unit 34. Contact between the carrier 10 and the holding device 30 can be avoided by the repulsive magnetic forces acting on both sides of the carrier. Reliable and non-contact stabilization of carriers can be provided.

In certain embodiments that can be combined with other embodiments described herein, the holding device 30 is a first arm, eg, a first cantilever 31, and a second arm, eg, A second cantilever 32 may be included. The first arm may include a first stabilizing portion 37 on the first side of the carrier transfer space. The second arm may then include a second stabilizing portion 38 on the second side of the carrier transfer space. The first magnet unit 33 may be fixed to the first cantilever 31, for example, the distal end of the first cantilever 31. Then, the second magnet unit 34 may be fixed to the distal end of the second cantilever 32, for example, the second cantilever 32.

A "cantilever" can be an elongated mounting device configured to carry the magnetic unit of the holding device 30 in the vicinity of each side of the carrier. The first magnet unit 33 may be located at the distal end of the first cantilever 31. Then, the first cantilever beam 31 may be configured to be carried in the vicinity of the upper portion of the carrier provided with the first magnetic counter unit 13. The second magnet unit 34 may be located at the distal end of the second cantilever 32. Then, the second cantilever beam 32 may be configured to be carried in the vicinity of the upper portion of the carrier provided with the second magnetic counter unit 14.

In certain embodiments, which may be combined with other embodiments described herein, the retention device 30 is movable in a horizontal direction, particularly in a track switching direction S that may coincide with the thickness direction of the carrier. possible. For example, the holding device 30 may be horizontally movable in order to carry the holding device 30 close to the carrier so as to hold and stabilize the upper portion of the carrier.

In some embodiments, the first cantilever 31 and the second cantilever 32 can move horizontally, especially independently of each other. For example, the first drive for horizontally moving the first cantilever 31 (eg, back and forth in the track switching direction S) is at the proximal end of the first cantilever 31, eg, a vacuum chamber. It can be provided on the outside. A second drive for horizontally moving the second cantilever 32 (eg, back and forth in the track switching direction S) is located at the proximal end of the second cantilever 32, eg, outside the vacuum chamber. Can be provided. The first drive and the second drive may be placed next to each other on the same side of the carrier transfer space, eg, outside the vacuum chamber.

The first drive and the second drive can be operated independently of each other. In particular, the first drive and the second drive may be configured to move the first cantilever and the second cantilever in opposite directions. Alternatively or further, the first drive and the second drive may be configured to move the first cantilever and the second cantilever synchronously in the same direction at the same speed.

In particular, the first stabilizing portion 37 of the first cantilever 31 may be movable towards the first side of the carrier. Then, the second stabilizing portion 38 of the second cantilever 32 may be movable toward the second side of the carrier opposite to the first side. By moving the first stabilizing portion 37 towards the first side of the carrier, the carrier is magnetically pushed towards the second stabilizing portion 38 away from the first stabilizing portion 37. Can be done. By moving the second stabilizing portion 38 towards the second side of the carrier, the carrier is magnetic in the opposite direction towards the first stabilizing portion 37 away from the second stabilizing portion 38. Can be pushed. Therefore, the carrier is stable in a non-contact manner and can be held in place between the first stabilizing portion 37 and the second stabilizing portion 38.

The first cantilever beam 31 and the second cantilever beam 32 can each be essentially L-shaped. The long legs of the first cantilever 31 can extend essentially horizontally. The short leg, connected to the distal end of the long leg, extends downward and may include a first stabilizing portion 37. The long legs of the second cantilever 32 can extend essentially horizontally above the carrier transport space. The short leg, connected to the distal end of the long leg, extends downward and may include a second stabilizing portion 38. In certain embodiments, the long legs of the second cantilever 32 can be placed above the vertical height of the long legs of the first cantilever 31, as schematically depicted in FIG. ..

In certain embodiments, the holding device 30 may have at least two first cantilever beams and / or at least two second cantilever beams. Each of them can be horizontally spaced from each other. At least one magnet unit configured to stabilize the upper portion of the carrier in a non-contact manner may be provided at the distal ends of each of the first and second cantilever beams. Therefore, stable and reliable stabilization of the carrier can be provided over the entire width of the carrier.

According to embodiments, the carrier can be moved vertically using the assembly 100 for at least one or more of the following reasons: That is, (i) positioning the carrier to a predetermined vertical height, (ii) correcting or adjusting the vertical height of the carrier, (iii) controlling the vertical height of the carrier, for example, via active control. That, (iv) the carrier is placed on the track of the transport system arranged at a specific vertical height, (v) the carrier is lowered onto a route switching support to perform the route switching, and (Vi) Raising the carrier from the path switching support in order to place the carrier back on the track of the transport system.

2A-2D show several steps of a method for raising or lowering carriers using assembly 100 according to the embodiments described herein.

In FIG. 2A, the carrier 10 is arranged on the carrier support 20. The carrier support 20 can move in an upward direction and / or a downward direction while the carrier 10 is supported on the carrier support 20.

The holding device 30 may be spaced apart from the upper portion of the carrier. In particular, the holding device 30 may be placed in a retracted position where the holding device does not apply stabilizing force to the carrier or applies a negligible stabilizing force. In the retracted position, a first stabilizing portion 37 provided on the first side of the carrier (eg, behind the carrier) is located at a distance of 10 cm or more from the carrier and is located on the second side of the carrier (eg, the rear side of the carrier). For example, a second stabilizing portion provided on the front side of the carrier) is arranged at a distance of 10 cm or more from the carrier.

The first stabilizing portion 37 may be provided, for example, at the distal end of a first cantilever 31 that is horizontally movable via a first drive. Then, the second stabilizing portion 38 may be provided, for example, at the distal end of the second cantilever 32, which can move horizontally via the second drive independently of each other, for example.

When the carrier support 20 is moved vertically, for example, in the downward direction, the upper portion of the carrier is held and stabilized by the holding device 30. Therefore, the first stabilizing portion 37 is moved toward the first side of the carrier and the second stabilizing portion 38 is moved toward the second side of the carrier.

As schematically depicted in FIG. 2B, in the holding state of the holding device 30, the distance between the holding device 30 and the upper portion of the carrier can be 5 cm or less, especially 1 cm or less. In particular, the first stabilizing portion 37 has been moved closer to the first side of the carrier and the second stabilizing portion 38 has been moved closer to the second side of the carrier. However, the holding device 30 does not come into contact with the carrier due to the repulsive magnetic force between the magnet units provided in both stabilizing portions and the magnetic counter units provided on both sides of the carrier. Therefore, the upper portion of the carrier can be retained and stabilized between the stabilizing portions of the retaining device.

In FIG. 2C, the carrier support 20 moves in a downward direction or an upward direction. Therefore, the carrier supported on the carrier support 20 is lowered or raised. The carrier is stable while being lowered or raised by the holding device 30.

In particular, the magnet unit provided on the holding device 30 and / or the magnetic counter unit provided on the carrier is the upper portion of the holding device 30 and the carrier during relative vertical movement between the holding device 30 and the carrier 10. Has a vertical extension that ensures a magnetic interaction with. In particular, the magnet unit provided on the holding device and the magnetic counter unit provided on the carrier are located in both the upper vertical position of the carrier depicted in FIG. 2B and the lower vertical position of the carrier depicted in FIG. 2C. Can overlap.

The carrier can be lowered or raised by 10 mm or more, 20 mm or more, 40 mm or more, or even 100 mm or more.

The holding device 30 may remain stationary during the vertical movement of the carrier.

After being raised or lowered, the holding device 30 may move away from the carrier 10, as schematically depicted in FIG. 2D. For example, the first stabilizing portion 37 may move away from the first side of the carrier and the second stabilizing portion 38 may move away from the second side of the carrier.

In FIG. 2D, it will no longer be necessary to hold the upper portion of the carrier 10 by the holding device 30. This is because, for example, the magnetic levitation force provided by an additional carrier holding device or magnetic levitation system (not depicted in FIG. 2D) can hold and stabilize the carrier in an raised or lowered position. Is.

FIG. 3 is a cross-sectional view of the assembly 200 for raising or lowering the carrier according to the embodiments described herein. Assembly 200 is essentially consistent with assembly 100 in FIG. Therefore, the above description can be referred to, and the above description is not repeated here.

The assembly 200 of FIG. 3 includes a first transport system 112 configured to transport the carrier 10 in the transport direction along the first transport path T1. The transport direction is perpendicular to the paper surface of FIG. The first transport system 112 may be configured to transport carriers in the transport direction in a non-contact manner, for example, using magnetic force. In other words, the first transport system cannot use mechanical forces to transport the carriers. Alternatively, the first transfer system may magnetically push or attract the carrier to a new position along the transfer path. As used throughout this disclosure, the terms "contactless" and "moving in a non-contact manner" use the mechanical contact of the carrier between the carrier and the first transport system. It is not moved, but can be understood in the sense that it is moved magnetically by a repulsive and / or attractive magnetic force. There can be no mechanical contact between the device and the carrier during transport along the first and / or second transport path.

In certain embodiments, the first transfer system 112 may be a magnetic levitation system. The magnetic levitation system may include an upper track section 122 and a lower track section 121. In that case, the carrier 10 may be conveyed in essentially vertical orientation between the upper track section 122 and the lower track section 121. The upper track section 122 may be located above the lower track section 121. The magnets and / or drive units of the magnetic levitation system may be located in the upper track section 122 and / or the lower track section 121. For example, an active magnetic unit configured to hold the carrier in a non-contact manner below the upper track section 122 may be located in the upper track section. A drive unit configured to move the carrier along the track, such as a linear motor, may then be placed in the lower track section 121.

It can be beneficial to transport the carriers in a non-contact manner. This is because during carrier transfer, the number of particles produced by mechanical contact between the carrier and sections of the transfer system, such as rollers, is reduced. Therefore, the vacuum state in the vacuum chamber is not adversely affected by carrier transport. The purity of the layers deposited on the substrate can be improved. This is because particle formation is minimized or even completely avoided, especially when using transport systems configured to transport in a non-contact manner.

The assembly further includes a carrier support 20 that is vertically movable via the actuator 25, as well as a holding device 30 for holding the upper portion of the carrier 10 during vertical movement of the carrier. The details of the holding device 30 are described with reference to FIG. 1, and are not repeated here.

In certain embodiments, which may be combined with other embodiments described herein, the carrier support 20 may be coupled or integrally formed with the lower track section 121 of the first transport system 112. In particular, as schematically depicted in FIG. 3, the carrier support 20 is connected to the lower track section 121, for example because it can move vertically with the lower track section 121.

While the carrier is transported in the transport direction in a non-contact manner by the first transport system 112, the carrier is held in a non-contact manner below the upper track section 122 and above the lower track section 121. The magnetic levitation system may further provide magnetic lateral stabilization of the carrier. In other words, the magnetic levitation system may provide a magnetic force acting on the carrier in the horizontal direction (particularly in the track switching direction S) to prevent the carrier from drifting away from the upper track section 122. Therefore, while the carrier is being conveyed using the magnetic levitation system, the upper portion of the carrier can be held horizontally and stabilized by the magnetic levitation system. However, the magnetic lateral stabilization of magnetic levitation systems usually acts on a particular vertical height. Retaining and stabilizing the upper portion of a vertically moving carrier can be difficult.

According to the embodiments described herein, a holding device 30 is provided that is configured to hold the upper portion of the carrier in a non-contact manner during vertical movement of the carrier. The holding device 30 may magnetically interact with the upper portion of the vertically moving carrier while the holding device 30 can remain at a constant vertical height.

Therefore, the magnetic levitation of the first transfer system 112 can be switched off or reduced. Then, the carrier 10 can be lowered by moving the carrier support 20 in the downward direction. The distance between the upper track section 122 and the carrier 10 is increased by lowering the carrier. By increasing the distance between the upper track section 122 and the carrier 10, the carrier 10 can then be moved in the path switching direction S away from the first transport path T1.

4A-4F show the continuous operating positions of the device 400 for transporting carriers in a vacuum chamber according to the embodiments described herein.

The device 400 has a path switching direction that is essentially perpendicular to the transport direction T so as to be away from the first transport system 112 provided in the transport direction T along the first transport path T1 and the first transport path T1. Includes a routing assembly 150 configured to move carriers to S.

The path switching assembly 150 includes a carrier support 20 that is essentially vertically movable and a holding device 30 that is configured to hold the upper portion of the carrier in a non-contact manner. The holding device 30 may be configured according to the holding device depicted in FIG. This allows references to the above description that are not repeated here. In particular, the holding device 30 is configured to hold the upper portion of the carrier while raising or lowering the carrier supported on the carrier support.

The track switching direction S may coincide with the horizontal direction in which the holding device 30 can move. In particular, the track switching direction S may coincide with the direction of the stabilizing force applied by the holding device 30 to the upper portion of the carrier.

The device 400 for transporting carriers in a vacuum chamber may be provided with one, two, or more transport paths. In that case, the carriers may be moved or carried along their transport path. The first transport path T1 may extend next to, for example, a second transport path T2 that is essentially parallel to the first transport path T1. The first transport path T1 and / or the second transport path T2 may extend in the transport direction T, which may be horizontal, essentially perpendicular to the route switching direction S.

The first transport path T1 and the second transport path T2 can be offset horizontally from each other in the path switching direction S. The distance between the first transport path T1 and the second transport path T2 in the route switching direction S can be 10 cm or more, particularly 20 cm or more, and / or 100 cm or less, particularly 50 cm or less.

The device 400 can be part of a vacuum processing system such as an in-line processing system. Thereby, the substrate can be processed continuously or quasi-continuously. The device 400 may be configured to move or move the carrier to a processing position T3 where the second transport path T2 and / or the substrate can be processed so as to be away from the first transport path T1. Specifically, the device 400 may laterally move the carrier in the path switching direction S from a first position on the first transport path T1 to a second position away from the first track. The route switching direction S can be essentially perpendicular to the transport direction. When the carrier is moved from one transport path to another transport path in the route switching direction S, the movement may also be referred to as "route switching" or "track switching".

The first transport system 112 may be configured to transport the carrier 10 in the transport direction T along the first transport path T1 in a non-contact manner. The first transport system 112 may be a first magnetic levitation system configured to transport carriers along the first transport path T1 in a non-contact manner. In certain embodiments, the first transport system 112 includes a lower track section 121 and an upper track section 122. Carriers can be transported within the carrier transport space between the lower track section 121 and the upper track section 122, especially in essentially vertical orientation.

In certain embodiments, the carrier support 20 of the route switching assembly 150 is coupled or integrally formed with the lower track section 121 of the first transport system 112. The carrier support 20 may be movable in the vertical direction V along with the lower track section 121. In particular, an actuator 25 may be provided to vertically move the lower track section 121 along with the carrier support 20.

The upper track section 122 may be located essentially above the lower track section 121. The magnetic unit of the first transport system 112 may be located in the lower track section 121 and / or the upper track section 122. For example, below the upper track section 122, a plurality of dynamically controlled magnetic units may be placed in the upper track section 122 to hold the carrier 10 in a non-contact manner.

The upper track section 122 may be part of an upper track configured as an upper guiding rail extending in the transport direction T along the first transport path T1. The gap between the upper track section 122 and the carrier can have a width of 5 mm or less, in particular about 2 mm, while the carriers are non-contactly conveyed below the upper track section 122 via the magnetic bearings. The active and / or passive magnetic unit of the first transport system 112 may be secured to the upper track section 122.

The lower track section 121 may be part of a lower track configured as a lower guiding rail extending in the transport direction T along the first transport path T1. While the carrier is non-contactly transported above the lower track section 121 by the first transport system 112, the gap between the lower track section 121 and the carrier should be no more than 5 mm, in particular about 2 mm wide. Can have. The drive unit of the first transport system configured to transport the carrier in the transport direction T in a non-contact manner may be fixed to the lower track section 121.

The device 400 further includes a route switching assembly 150. The path switching assembly 150 may be configured to move the carrier in a path switching direction S across the transport direction T so as to be away from the first transport path T1. For example, the route switching assembly 150 may be configured to move carriers in the route switching direction S from the first transport path T1 to the second transport path T2. Alternatively or further, the route switching assembly 150 may be configured to move the carriers to a processed, eg, covered processing position T3. The processing position T3 can be offset horizontally from the first and second transport paths.

As schematically depicted in FIG. 4D, for example, when carriers are placed at processing position T3, a processing tool 105 is placed in the vacuum chamber to process the substrate 11 held by the carriers 10. Can be done. The processing tool 105 can be a deposit source configured to deposit the coating material on the substrate.

In certain embodiments that can be combined with other embodiments described herein, the routing assembly 150 includes a routing support 152. The route switching support 152 may be movable in the route switching direction S in order to move the carrier 10 in the route switching direction S. For example, the carrier 10 can be supported on the path switching support 152. In FIG. 4C, the carrier 10 is supported from below by the path switching support 152. That is, the carrier 10 may be placed on the upper end of the path switching support 152. In other embodiments, the path switching support 152 may hold the carrier laterally. For example, the path switching support 152 may include a magnetic chuck for magnetically engaging the sides of the carrier.

A drive device is provided to move the path switching support 152 in the path switching direction S in order to move the carrier from the first transport path T1 to the second transport path T2 and / or the processing position T3. obtain. The drive device (not shown in the drawing) can be located outside the vacuum chamber. The path switching support 152 can then extend through the walls of the vacuum chamber. Alternatively, the drive device can be located inside the vacuum chamber.

The drive device moves the route switching support 152 from the first transport path T1 to the second transport path T2 and / or the processing position T3 by a distance of 10 cm or more, particularly 25 cm or more, in the route switching direction S. Can be configured in. For example, the distance between the first transport path T1 and the second transport path T2 can be 25 cm or more and 100 cm or less.

The path switching support 152 of the embodiment depicted in FIG. 4A includes a support surface for positioning the carrier on the support surface. The carrier 10 can be moved downward by the carrier support 20 and positioned on the support surface of the path switching support 152. After that, the path switching support 152 may be moved in the path switching direction S in order to move the carrier away from the first transport path T1.

In certain embodiments that can be combined with other embodiments described herein, a second transport system 114 may be provided to transport the carrier 10 along the second transport path T2. The second transfer system 114 may be a second magnetic levitation system provided along the second transfer path T2. The second transport path T2 can be offset horizontally from the first transport path T1. In particular, in order to move the carrier 10 from the first transport path T1 to the second transport path T2 and / or to the processing position T3 horizontally offset from both the first transport path and the second transport path. , The route switching support 152 may be movable in the route switching direction S.

Like the first transport system 112, the second transport system 114 may include a second lower track section 123 and a second upper track section 124. In that case, the carrier may be transported between the second lower track section 123 and the second upper track section 124 along the second transport path T2.

In certain embodiments, the second lower track section 123 may be movable in the vertical direction V. Therefore, the carrier placed on the second lower track section 123 can be moved up and down by moving the second lower track section 123 in the upward direction or the downward direction. In certain embodiments, the lower track section 121 of the first transport system 112 may be movable in the vertical V direction independently of the second lower track section 123 of the second transport system 114.

In FIG. 4A, the carrier is transported in the transport direction T along the first transport path T1 by the first transport system 112. The transport can be a non-contact transport. The carrier 10 is placed at a distance below the upper track section 122 (eg, about 2 mm) by magnetic force, such as a repulsive magnetic force acting from below and / or an attractive magnetic force acting from above, and the lower track section. It can be held at a distance above 121 (eg, about 2 mm). The carrier 10 is transported to a position on the first transport path T1 depicted in FIG. 4A, where the path switching assembly 150 is located.

While the carrier is being transported by the first transport system 112, the upper portion of the carrier may be held and stabilized by the magnetic force provided by the first transport system 112. The holding device 30 may be spaced apart from the upper portion of the carrier.

As depicted in FIG. 4B, the holding device 30 can be moved horizontally towards the carrier 10. The first stabilizing portion of the holding device 30 can be moved towards the first side of the carrier (eg, the back side of the carrier). The second stabilizing portion of the holding device 30 can then be moved towards the second side of the carrier (eg, the front side of the carrier). The carrier is then held and stabilized by the holding device in a non-contact manner. The magnetic force may act in the track switching direction S between the stabilizing portion of the holding device 30 and the upper portion of the carrier.

As further depicted in FIG. 4B, the magnetic levitation force can be switched off or reduced in order to place the carriers on the carrier support 20. The magnetic levitation force can be gradually reduced so that the carriers are smoothly placed on the carrier support 20. The upper portion of the carrier is held in a non-contact manner by the holding device 30.

As schematically depicted in FIG. 4C, the carrier support 20 can then be moved downward by the actuator 25, for example, by a distance of 40 mm or more. The carrier 10 is lowered and arranged on the path switching support 152. While lowered, the upper portion of the carrier 10 is held in a non-contact manner by the holding device 30. In embodiments, the holding device 30 may remain essentially stationary while lowering the carrier.

When the carrier is placed on the route switching support 152, the carrier support 20 is further moved downward to allow the unobstructed route switching operation of the route switching support 152 in the route switching direction S. obtain.

As schematically depicted in FIGS. 4B and 4C, the carrier support 20 and the path switching support 152 of the path switching assembly 150 may be configured to support the carrier 10 from below. The bottom surface of the carrier 10 may first be placed on the carrier support (FIG. 4B) and then on the path switching support 152 (FIG. 4C). Due to the downward movement of the carrier 10 supported on the carrier support 20, the distance between the carrier 10 and the upper track section 122 may be increased. The distance between the carrier and the lower track section 121 may be increased due to the downward movement of the carrier support 20 with respect to the carrier 10 supported by the path switching support 152. Since the free space above the carrier 10 and below the carrier during route switching is increased, the movement operation of the carrier in the route switching direction S can be facilitated.

As schematically depicted in FIG. 4D, the path switching support 152 having the carrier 10 supported on the path switching support 152 has a first transport path T1 to a second transport path T2 and / or It can be moved to the processing position T3 (FIG. 4D) in the route switching direction S. At the processing position T3, the substrate can be processed by the processing tool 105.

In certain embodiments, which can be combined with other embodiments described herein, the holding device 30 can move with the path switching support 152 in the path switching direction S. The holding device 30 can hold and stabilize the upper portion of the carrier 10 in a non-contact manner while moving the carrier in the path switching direction S. The holding device 30 may be able to move in the path switching direction S essentially in sync with the path switching support 152 and at essentially the same speed as the path switching support 152. In particular, the first cantilever 31 and the second cantilever 32 are synchronized with the path switching support 152 in order to provide reliable stabilization of the upper portion of the carrier 10 during the carrier path switching operation. Moreover, it can move in the route switching direction S at the same speed as the route switching support 152. The upper portion of the carrier may be held in a non-contact manner at a central position between the first magnet unit 33 and the second magnet unit 34 of the holding device 30.

As outlined in FIG. 4E, the carrier can be moved to the second transport path T2 by the path switching support 152. On the other hand, the upper portion of the carrier is held by the holding device 30 in a non-contact manner. The holding device 30 can move at the same speed as the path switching support.

In certain embodiments, which may be combined with other embodiments described herein, the second transport system 114 may include a second lower track section 123 that is essentially vertically movable. A second carrier support configured to raise or lower a carrier supported on the second carrier support may be coupled or integrally formed with the second lower track section 123.

As depicted in FIG. 4E, the second lower track section 123 of the second transport system 114 can then be moved upwards. It is until the carrier is lifted from the path switching support 152 and moved upward towards the second upper track section 124 of the second transport system 114. While raising the carrier 10, the upper portion of the carrier can be held in a non-contact manner by the holding device 30.

The magnetic levitation of the second transfer system 114 may be switched on when the carrier is raised to a predetermined vertical height. The carrier can then be held in a non-contact manner below the second upper track section 124 and above the second lower track section 123 by the respective repulsive magnetic bearings of the second transport system 114. The magnetic force of the second transfer system 114 may further provide lateral stabilization of the upper portion of the carrier.

As outlined in FIG. 4F, the holding device 30 can be moved horizontally away from the carrier when lateral stabilization of the upper portion of the carrier is provided by the magnetic levitation system.

The carrier is then non-contacted in the transport direction T along the second transport path T2 by the second transport system 114, eg, towards a further processing module or towards the carrier unloading chamber. Can be transported.

FIG. 5 shows a schematic top view of a system 500 including an apparatus for transporting carriers according to an embodiment described herein. The device may correspond to the device 400 depicted in FIGS. 4A-4F. Therefore, the above description can be referred to, and the above description is not repeated here.

The system 500 for vacuuming a substrate according to the embodiments described herein comprises a vacuum chamber 101, an apparatus for transporting carriers according to any of the embodiments described herein, and a vacuum chamber. Includes one or more processing tools 105 arranged within 101. One or more treatment tools may be selected from the group consisting of deposit sources, sputtering sources, evaporation sources, surface treatment tools, heating devices, cleaning devices, etching tools, and any combination thereof.

A first transport path T1 and a second transport path T2 horizontally offset from the first transport path T1 extend at least partially through the vacuum chamber 101. Optionally, a processing position T3 where the substrate can be processed is provided, which is horizontally offset from the first transport path T1 and the second transport path T2. In one embodiment, a mask 12 is provided between the processing position T3 and the processing tool 105. The mask 12 can be, for example, an edge exclusion mask or a fine metal mask. For example, the mask 12 prevents a portion of the substrate from being coated and / or the mask may have an aperture pattern corresponding to the material pattern to be deposited on the substrate.

The device conveys the carrier 10 in a non-contact manner along the first transport system 112 and the second transport path T2 for transporting the carrier 10 in a non-contact manner along the first transport path T1. The path switching assembly 150 configured to move the carrier 10 in the path switching direction S from the second transport system 114 and the first transport path T1 to the second transport path T2 and / or the processing position T3. including.

The path switching assembly 150 includes a carrier support 20 that is vertically movable (indicated by a dashed line in FIG. 5) to raise or lower the carrier. The carrier support 20 may be arranged below the carrier transport space. Thereby, the carrier can be placed on the carrier support 20 by reducing the magnetic levitation force of the first transport system 112.

The path switching assembly 150 further includes a path switching support 152 configured to support the carrier 10 (shown by a dashed line in FIG. 5). The route switching support 152 can move in the route switching direction S in order to move the carrier between the transport paths. Both the carrier support 20 and the path switching support 152 may be configured to support the carrier from below. In the embodiment of FIG. 5, two route switching supports 152 are provided. They are spaced from each other in the transport direction T by, for example, a distance of 1 m or more. In other embodiments, more than two routing supports may be provided.

The path switching assembly 150 further includes, in particular, a retention device 30 configured to non-contactly stabilize the upper portion of the carrier by applying magnetic stabilizing forces to the carrier from both sides of the carrier.

The holding device 30 depicted in FIG. 5 includes two first cantilever beams 31 spaced apart from each other in the transport direction T by, for example, a distance of 2 m or more and 4 m or less. At least one magnetic unit configured to interact with the posterior side of the carrier may be secured to the distal end of each first cantilever 31. The two first cantilever beams may be movable in the path switching direction S towards the rear side of the carrier by a common drive unit or by two separate drive units. In other embodiments, more than two first cantilever beams can be provided.

The holding device 30 depicted in FIG. 5 includes two second cantilever beams 32 that are spaced from each other in the transport direction T by, for example, 50 cm or more and 150 cm or less. At least one magnet unit configured to interact with the anterior side of the carrier may be secured to the distal end of each second cantilever 32. The two second cantilever beams may be movable in the path switching direction S towards the front side of the carrier by a common drive unit or by two separate drive units. In other embodiments, more than two second cantilever beams can be provided.

During the path switching, the two path switching supports 152, the two first cantilever beams 31, and the two second cantilever beams 32 are synchronized together and in the path switching direction S toward the processing tool 105. Can be mobile. Quick and reliable route switching can be performed.

By holding the upper portion of the carrier in a non-contact manner while moving the carrier up and down as in the horizontal path switching operation, the generation of particles in the vacuum chamber can be reduced and the processing result can be improved.

FIG. 6 is a flow diagram illustrating a method of raising or lowering carriers in a vacuum chamber according to an embodiment described herein.

In box 610, carriers are placed on carrier supports. The carrier support may support the carrier from below.

The carrier can be a vertically oriented carrier, in particular a substrate carrier that carries a large area substrate that is essentially vertically oriented.

The carrier has a height of 1 m or more, particularly 2 m or more, a width of 1 m or more, particularly a width of 2 m or more, and / or a thickness of 50 cm or less, particularly 20 cm or less. obtain. The "thickness" of the carrier can be the dimension of the carrier in the horizontal direction that coincides with the path switching direction S.

In the (optional) box 620, the holding device 30 is horizontally moved towards a carrier supported on a carrier support. In particular, the first stabilizing portion of the holding device can be moved towards the first side of the carrier. The second stabilizing portion of the holding device can then be moved towards the second side of the carrier opposite to the first side. The second side may coincide with the front side of the carrier on which the substrate is held. The first side may coincide with the back side of the carrier. Therefore, the carrier is held between the first stabilizing portion and the second stabilizing portion. They can apply magnetic forces that repel the carriers from both sides of the carrier. Therefore, the carrier can be magnetically stabilized at the central position between the first stabilizing portion and the second stabilizing portion.

In box 630, the carrier support can be moved essentially vertically to raise or lower the carrier. While raised or lowered, the upper portion of the carrier is non-contact supported by a holding device. The holding device can remain essentially stationary while raising or lowering the carrier.

In the (optional) box 640, the holding device is moved horizontally away from the carrier. In particular, the first stabilizing portion of the holding device is moved away from the first side of the carrier and the second stabilizing portion of the holding device is moved away from the second side of the carrier. .. The carrier can then be further transported and removed, for example, from the carrier support in a horizontal direction that may coincide with the path switching direction S.

In one embodiment, the carrier carries a large area substrate for display manufacturing to be processed in a vacuum chamber. The substrate can have a size of 1 m ² or more, particularly 5 m ² or more.

The substrate can be processed in a vacuum chamber, for example, by depositing a coating material on the substrate by vapor deposition, sputtering, and / or chemical vapor deposition.

FIG. 7 is a flow diagram illustrating a method for transporting carriers in a vacuum chamber according to an embodiment described herein.

In the box 710, carriers are non-contactly transported into the vacuum chamber along the first transport path by a first transport system, particularly by a first magnetic levitation system. The carrier is stopped at the position of the first transport path where the path switching assembly is located. In the above position, the carrier may be placed above a vertically movable carrier support.

In the box 720, the holding device 30 of the carrier to hold the upper portion in a non-contact manner, in particular to stabilize the upper portion of the carrier in a non-contact manner between the two stabilizing parts of the holding device. Moved towards the upper part.

In box 730, the magnetic levitation force of the first transport system can be switched off or reduced in order to place the carriers on the carrier supports so that the carriers make mechanical contact with the carrier supports.

In box 740, the carrier support is moved vertically to lower the carriers supported on it. While lowered, the upper portion of the carrier is held in a non-contact manner by the holding device. The holding device can apply a horizontal stabilizing force to the carrier. The carrier can be lowered, in particular, on a path switching support that is movable in a path switching direction S that is essentially perpendicular to the transport direction.

In the box 750, the route switching support is moved in the route switching direction in order to move the carrier from the first transport path to the second transport path and / or processing position. The holding device moves in the path switching direction together with and in synchronization with the path switching support. In the (optional) processing position, the substrate carried by the carrier can be processed and, for example, coated with a coating material.

The carrier can be moved to a second transport path where the carrier can be placed above the vertically movable second lower track section of the second transport system.

In the box 760, the second lower track section is moved upward when the carrier is placed on the second transport path. The carrier can be lifted from the path switching support by a second lower track section that moves upwards. The second lower track section may position the carrier at a predetermined vertical height at which the upper end of the carrier can be located close to the second upper track section of the second transport system. The upper portion of the carrier is non-contactly held by the holding device while the carrier is moving upwards.

In the box 770, the magnetic levitation force of the second transfer device provided along the second transfer path can be switched on. The holding device can be removed from the upper portion of the carrier. After that, the carrier can be transported in the transport direction along the second transport path T2 in a non-contact manner by the second transport system.

Although the above description is intended for the embodiments of the present disclosure, it is possible to devise other further embodiments of the present disclosure without departing from the basic scope of the present disclosure, and the scope of the present disclosure is as follows. It is determined by the scope of claims of.

Claims (15)

An assembly (100) for raising or lowering the carrier (10) in a vacuum chamber.
A carrier support (20) that is essentially movable in the vertical direction (V) and a holding device (30) that is configured to hold the upper portion of the carrier in a non-contact manner and that moves in the horizontal direction. An assembly with a possible holding device (30) . The holding device (30) is two stabilizing portions, and the two stabilizing portions are configured to hold the upper portion of the carrier between the two stabilizing portions in a non-contact manner. The assembly according to claim 1. The assembly of claim 1 or 2, wherein the holding device (30) comprises at least one magnetic unit configured to magnetically interact with the upper portion of the carrier. The first magnet unit (33) for the holding device (30) to apply a magnetic force repulsive to the carrier from the first side, and the carrier from the second side opposite to the first side. The assembly according to claim 3, comprising a second magnet unit (34) for applying a repulsive magnetic force to the upper portion. Is before Kisui flat direction path switching direction (S), the assembly according to any one of claims 1 to 4. The holding device (30) includes a first arm (31) and a second arm (32), and the first arm and the second arm can move horizontally independently of each other. The assembly according to any one of claims 1 to 5. The first stabilizing portion (37) of the first arm (31) is movable toward the first side of the carrier, and the second stabilizing portion of the second arm (32). 6. The assembly of claim 6, wherein (38) is movable towards a second side of the carrier opposite to the first side. A device (400) for transporting a carrier (10) in a vacuum chamber.
A first transport system (112) provided in the transport direction (T) along the first transport path (T1), and
The route switching assembly (150) includes a route switching assembly (150) configured to move the carrier in the route switching direction (S) so as to move away from the first transport path (T1).
A carrier support (20) that is essentially movable in the vertical direction (V) and a holding device (30) that is configured to hold the upper portion of the carrier in a non-contact manner and that moves in the horizontal direction. A device comprising a possible holding device (30) . The first transport system (112) is a magnetic levitation system including a lower track section (121) and an upper track section (122), and the carrier support (20) is the lower track section (12). 121) The device according to claim 8, which is connected to or integrally formed with (121). In order for the path switching assembly (150) to be a path switching support (152) and to move the carrier (10) held by the path switching support (152) in the route switching direction (S). The device according to claim 8 or 9, further comprising a route switching support (152) capable of moving in the route switching direction (S). The device according to claim 10, wherein the holding device (30) can move in the route switching direction (S) together with the route switching support (152). A second transport system (114) provided along the second transport path (T2) horizontally offset from the first transport path (T1) is further provided, and the path switching support (152) is provided. , from said first transport path (T1), to at least one of said second horizontal offset has been processed position conveyance path and (T2) from said first and second transport path (T3), The device according to claim 10 or 11, which is movable in the route switching direction (S). 12. The apparatus of claim 12, wherein the second transport system (114) comprises a second lower track section (123) that is essentially movable in the vertical direction (V). A method for raising or lowering the carrier (10).
Including placing the carrier (10) on the carrier support (20) and moving the carrier support (20) essentially in the vertical direction (V) to raise or lower the carrier.
A method in which an upper portion of the carrier is held in a non-contact manner by a holding device (30) while the carrier is raised or lowered so that the holding device (30) is horizontally movable . The carrier, to transport a large area board having 1 m ² or more sizes for the display manufacturing method according to claim 14.

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