CN217534225U

CN217534225U - Magnetic guide for guiding a carrier, transport system for transporting a carrier, and substrate processing system

Info

Publication number: CN217534225U
Application number: CN201990001437.3U
Authority: CN
Inventors: 奥利弗·海默尔; 拉尔夫·林登贝格
Original assignee: Applied Materials Inc
Current assignee: Applied Materials Inc
Priority date: 2019-09-05
Filing date: 2019-09-05
Publication date: 2022-10-04
Anticipated expiration: 2029-09-05
Also published as: WO2021043411A1

Abstract

One aspect of the present disclosure provides a magnetic guide for guiding a carrier. The magnetic guide includes: a housing having a first portion and a second portion disposed opposite the first portion; at least one first guide magnet disposed on a surface of the first portion; and at least one second guide magnet disposed on a surface of the second portion, wherein the at least one first guide magnet extends beyond a first end of the first portion, the first end comprising a magnetic material, and the at least one second guide magnet extends beyond a second end of the second portion, the second end comprising a magnetic material. Other aspects of the present disclosure provide a transport system for transporting a carrier having the magnetic guide and a substrate processing system.

Description

Magnetic guide for guiding a carrier, transport system for transporting a carrier, and substrate processing system

Technical Field

Embodiments of the present disclosure relate to an apparatus for guiding a carrier, in particular a carrier for carrying large area substrates, in a transport system. More particularly, embodiments of the present disclosure relate to a transport system for transporting a carrier, in particular in a vacuum chamber, and a substrate processing system comprising the same.

Background

Techniques for layer deposition on a substrate include, for example, sputter deposition, physical Vapor Deposition (PVD) such as thermal evaporation or sputtering, and Chemical Vapor Deposition (CVD). Coated substrates can be used in several applications and in several technical fields. For example, the coated substrate may be used in the field of display devices. Display devices may be used to make television screens, computer monitors, mobile phones, other handheld devices, etc. for displaying information. Typically, displays are produced by coating a substrate with a stack of layers of different materials.

Substrates are typically coated in a processing system (e.g., a vacuum deposition system) that may include multiple deposition sources and other substrate processing equipment. The substrates are typically transported through the processing system along a transport system, for example from a first deposition source to a second deposition source and to other substrate processing equipment. The substrate may be transported through the processing system in a substantially vertical orientation.

The substrate is typically carried by a carrier, i.e. a carrier means for carrying the substrate. The carrier is typically transported through the processing system using a transport system. The transport system may be a roller system in which the weight of the carrier is maintained by a plurality of rollers, or a magnetic levitation system in which the weight of the carrier is maintained by magnetic force. The transport system may be configured to transport the carrier carrying the substrate along.

When transporting carriers on a transport system, it is challenging to cross gaps in the transport system. For example, the transport system may require transport of the carrier through a load lock chamber or through a door separating the process chamber from other areas of the process system. At these points, a gap is provided in the transport system and the carrier, when transported, spans the gap. However, the magnetic attraction between the carrier and the magnetic guide guiding the carrier may cause a collision between the carrier and one end of the magnetic guide.

Accordingly, it would be beneficial to provide an improved magnetic guide for guiding a carrier through a gap in a transport system that overcomes at least some of the problems of the prior art. In particular, it would be beneficial to provide a magnetic guide for a transport system for transporting a carrier carrying a large area substrate.

Disclosure of Invention

In view of the above, a magnetic guide for guiding a carrier, a transport system for transporting a carrier and a handling system are provided. Further aspects, advantages and features are apparent from the dependent claims, the description and the drawings.

According to an aspect of the present disclosure, a magnetic guide for guiding a carrier is provided. The magnetic guide includes: a housing including a first portion and a second portion arranged opposite to the first portion in a lateral direction, the first portion and the second portion extending in a first direction as a transport direction; at least one first guide magnet disposed on a surface of the first portion; and at least one second guide magnet arranged on a surface of the second portion, wherein the at least one first guide magnet extends in a second direction opposite the transport direction beyond a first end of the first portion, the first end comprising a magnetic material, and the at least one second guide magnet extends in the second direction opposite the transport direction beyond a second end of the second portion, the second end comprising a magnetic material.

In some embodiments, the carrier is oriented in a substantially vertical orientation.

In some embodiments, the at least one first guide magnet and the at least one second guide magnet extend at least 5mm beyond the first end of the respective first portion and the second end of the respective second portion in the second direction.

According to a further aspect, a magnetic guide for guiding a carrier is provided. The magnetic guide includes: a housing including a first portion and a second portion arranged opposite to the first portion in a lateral direction, the first portion and the second portion extending in a first direction as a transport direction; at least one first guide magnet disposed on a surface of the first portion; and at least one second guiding magnet arranged on a surface of the second part, wherein the at least one first guiding magnet and the at least one second guiding magnet are arranged to shield magnetic attraction of the carrier towards the housing.

In some embodiments, the carrier comprises at least one carrier guiding magnet arranged to be guided between the at least one first guiding magnet and the at least one second guiding magnet.

In some embodiments of another aspect, the at least one first guidance magnet comprises two first guidance magnets, the at least one second guidance magnet comprises two second guidance magnets, the two first guidance magnets are offset from each other in a third direction perpendicular to the transport direction, and the two second guidance magnets are offset from each other in the third direction perpendicular to the transport direction.

In some embodiments, the at least one carrier guidance magnet is arranged to be guided at a point in the third direction between the two first guidance magnets and at a point in the third direction between the two second guidance magnets.

According to yet another aspect of the present disclosure, a transport system for transporting a carrier is provided. The transportation system comprises: a transport device extending in a transport direction, the transport device configured to support the carrier against gravity and to move the carrier in the transport direction; and a magnetic guide according to the above aspect.

In some embodiments, the magnetic guide is at least one of the group consisting of an upper guide and a lower guide.

In some embodiments, the transport system is configured to operate in a vacuum.

In some embodiments, the transport system comprises a plurality of active magnetic bearings configured to support and move the carrier by magnetic levitation.

In some embodiments, the transport system comprises a plurality of rollers.

According to yet another aspect of the present disclosure, there is provided a substrate processing system including: at least one processing chamber; and a transport system according to the above aspect.

The magnetic guide is configured to guide a carrier such that a collision between the carrier and the housing is avoided. In particular, the magnetic guide is configured to avoid magnetic attraction between the carrier and the housing causing the carrier to collide with the housing.

Drawings

So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The figures relate to embodiments of the present disclosure and are described as follows:

FIG. 1 is a schematic bottom view of a prior art magnetic guide;

fig. 2 shows a schematic bottom view of a magnetic guide according to embodiments described herein;

fig. 3A and 3B illustrate schematic end views of the magnetic guide of fig. 2 according to embodiments described herein; and is provided with

Fig. 4 shows a schematic side view of a transport system according to embodiments described herein.

Detailed Description

Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in each figure. Within the following description of the drawings, like reference numerals refer to like parts. Only the differences with respect to the individual embodiments are described. Each example is provided by way of explanation of the disclosure, and is not intended as a limitation of the disclosure. In addition, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. The description is intended to embrace such modifications and variations.

The processing system may include at least one processing chamber and a transport system for transporting carriers therebetween. For example, the processing system may include at least two chambers, which may include at least one of a deposition chamber, a load lock chamber, a transfer chamber, or a storage chamber, etc., and at least one of the chambers may include a vacuum. Adjacent chambers may contain different processing environments separated, for example, by a sealed door or hatch. The transport system according to embodiments described in the present disclosure may be configured to transport a carrier from one chamber into another chamber through a sealing door or hatch and thus the transport system is provided with a gap at the location of the sealing door or hatch.

A "carrier" as used herein may be understood as a carrier device configured to carry an object, in particular a substrate to be coated, through a processing system. The carrier may comprise a carrier body and holding means (e.g. mechanical, electrostatic or magnetic chucking means) configured to hold the substrate at a support surface of the carrier body.

The carrier 10 may be configured to carry a large area substrate,i.e. having 1m ² Or more, in particular 5m ² Or larger, more particularly 8m ² Or larger or even 10m ² Or larger sized substrates. Thus, the carrier may be a large and heavy component, with the carrier body 32 having a substrate support surface of several square meters. For example, the carrier may have a weight of 200kg or more (e.g., from 400kg to 2000kg, such as 1000kg or more) and/or a length of several meters.

Transporting carriers across gaps in a transport system can be challenging. In a typical operation, the carrier is guided by means of at least one guide rail. However, the guide rails are not present in the gap and thus the carrier spans the gap with a reduced guiding level. Such a gap to be spanned by a carrier transported in the transport system may be as much as 500mm. The end of the gap where the end of the guide rail is arranged is a problematic area, since a partially unguided carrier may collide with the end of the guide rail. Such collisions may cause the carrier to become jammed or may damage the carrier or the transport system.

Typically, magnetic guides may be used in transport systems for guiding carriers. The magnetic guide comprises a number of magnets arranged on a housing made of a magnetic material, such as iron or steel. The carrier guided by the magnetic guide typically comprises carrier guide magnets guided between the magnets of the magnetic guide. However, the problem of the carrier colliding with one end of the guide rail becomes more pronounced in the presence of the magnetic guide, since there is a magnetic attraction between the magnetic housing and the carrier-guiding magnet, which causes the carrier to be attracted towards the housing.

Fig. 1 exemplarily shows a case where a carrier collides with an end portion of a magnetic guide, which shows a schematic bottom view of an existing magnetic guide 100. The magnetic guide 100 comprises a housing 10 in the form of a U-shaped channel having a first portion 11 and a second portion 12 connected by a third portion 13. A first guiding magnet 21 is provided on the first part 11 and a second guiding magnet 22 is provided on the second part 12. The carrier 30, which may comprise a carrier guide magnet 31, is intended to be guided through the magnetic guide 100 in the transport direction T. A magnetic repulsion force is provided between the carrier guide magnet 31 and the first guide magnet 21 and the second guide magnet 22 in order to maintain the carrier 30 in a stable position in the transverse direction 4.

The first portion 11 and the second portion 12 of the housing 10 each have a first end 11a of the first portion 11 and a second end 12a of the second portion 12. The first end 11a and the second end 12a include a magnetic material (such as iron or steel), and a magnetic attractive force a is generated between the first end 11a and/or the second end 12a and the carrier guide magnet 31. This magnetic attraction force a causes the carrier 30 to be attracted toward the housing 10, possibly causing a collision C between the carrier 30 and the housing 10.

According to embodiments of the present disclosure, a magnetic guide may be provided, the magnetic guide being configured to avoid collision of the carrier with the housing. As exemplarily shown in fig. 2 and 3A, a magnetic guide 200 for guiding the carrier 30 is provided. Fig. 2 shows a schematic bottom view of the magnetic guide 200, while fig. 3A shows a schematic end view of the magnetic guide 200. The magnetic guide 200 comprises a housing 10 having a first portion 11 and a second portion 12 arranged opposite the first portion 11 in the transverse direction 4, the first and second portions extending in a first direction 1 corresponding to the transport direction T. At least one first guiding magnet 21 is arranged on the surface of the first part 11 and at least one second guiding magnet 22 is arranged on the surface of the second part 12.

The at least one first guiding magnet 21 and the at least one second guiding magnet 22 are arranged to extend beyond the first end 11a of the first part 11 and the second end 12a of the second part 12, respectively, in the second direction 2 opposite to the transport direction T. As shown in fig. 2, the at least one first guide magnet 21 and the at least one second guide magnet 22 extend beyond the respective first end 11a and second end 12a by a distance X. By arranging the first and

second guide magnets

21 and 22 to extend beyond the housing, the magnetic attractive force a exhibited in the existing magnetic guide 100 of fig. 1 can be shielded by the magnetic repulsive force R between the first and

second guide magnets

21 and 22 and the carrier guide magnet 31. By preventing the magnetic attractive force a between the carrier guide magnet 31 and the housing 10, the carrier 30 does not move in the direction of the housing, and collision between the carrier 30 and the housing 10 is avoided.

According to embodiments which can be combined with other embodiments described herein, the at least one first guide magnet 21 and the at least one second guide magnet 22 can extend in the second direction 2 at least 5mm, in particular at least 10mm, more in particular at least 20mm, i.e. a distance X, beyond the first end 11a of the respective first portion 11 and the second end 12a of the respective second portion 12. The at least one first guide magnet 21 and the at least one second guide magnet 22 may alternately extend in the second direction 2 such that the distance X is less than or equal to 50mm. In particular, the first guide magnet 21 and the second guide magnet 22 may extend in the second direction 2 such that the distance X is in the range from 5mm to 50mm, in particular from 10mm up to 50mm, more in particular from 20mm up to 50mm. The larger the distance X over which the first guide magnet 21 and the second guide magnet 22 extend, the larger the amount of shielding against the magnetic attractive force a between the carrier guide magnet 31 and the housing 10.

In the context of the present disclosure, the housing 10 comprises a first portion 11 and a second portion 12, both comprising a magnetic material. Thus, the first end 11a of the first part 11 and the second part 12a of the second part 12 also comprise magnetic material. The housing 10 may also include other portions that may include non-magnetic materials. For example, the housing 10 may include additional non-magnetic extensions that extend beyond the first and

second ends

11a, 12a, such that the housing 10 may extend further than the first and

second guide magnets

21, 22. Such non-magnetic extensions may comprise, for example, an aluminum alloy or a plastic material. However, the method is not limited to the specific method, the distance X by which the first guide magnet 21 and the second guide magnet 22 extend beyond the first end 11a and the second end 12a is maintained as the distance X by which the first guide magnet 21 and the second guide magnet 22 extend beyond the portion of the housing 10 containing the magnetic material.

An extreme example of the above is a case where the first part 11 and the second part 12 are infinitesimally small and the housing 10 includes a non-magnetic material on which the first guide magnet 21 and the second guide magnet 22 are arranged. In this case, the first and

second parts

11, 12 of the housing 10 are substantially replaced by a substantially non-magnetic housing. However, this example is beyond the scope of the present disclosure, as there is no longer the challenge of the carrier guide magnet 31 being attracted to the housing 10.

The effect of the first and

second guiding magnets

21, 22 extending beyond the respective first and

second ends

11a, 12a is that the magnetic attraction a of the carrier 30 towards the housing 10 is shielded. By shielding the magnetic attraction force a of the carrier 30 toward the housing 10, collision between the carrier 30 and the housing 10 is avoided. According to an embodiment of the present disclosure, a magnetic guide 200 for guiding a carrier 30 is provided. The magnetic guide 200 comprises a housing 10 having a first portion 11 and a second portion 12 arranged opposite to the first portion 11 in the transverse direction 4, the first portion 11 and the second portion 12 extending in a first direction 1 as transport direction T. The magnetic guide 200 further comprises at least one first guide magnet 21 arranged on the surface of the first part 11 and at least one second guide magnet 22 arranged on the surface of the second part 12, wherein the at least one first guide magnet 21 and the at least one second guide magnet 22 are arranged to shield the magnetic attraction a of the carrier 30 towards the housing 10.

According to embodiments, which can be combined with other embodiments described herein, the carrier 30 is oriented in a substantially vertical orientation. In other words, the carrier 30 may be oriented such that the major surfaces of the carrier 30 are substantially vertical (vertical +/-10 °) during transport of the carrier 30. The magnetic guide 200 may be provided as an upper guide arranged for guiding an upper portion of the carrier 30 configured to magnetically interact with the magnetic guide 200. Thus, the magnetic guide 200 serves to hold the carrier 30 in a stable orientation in the transverse direction 4 while it is being transported. The transport direction T may be a substantially horizontal direction. The transport direction T may correspond to a longitudinal direction of the carrier 30 along which the carrier is moved.

According to embodiments, which can be combined with other embodiments described herein, the carrier 30 may comprise at least one carrier guiding magnet 31. The at least one carrier guide magnet 31 is arranged to be guided between the at least one first guide magnet 21 and the at least one second guide magnet 22. The magnetic guide 200 does not particularly require the carrier guide magnet 31 to be provided on the carrier 30 to magnetically guide the carrier 30, however, providing the carrier guide magnet 31 on the carrier 30 improves the guiding performance and stability. The at least one carrier guiding magnet 31 may comprise one carrier guiding magnet 31, or alternatively a plurality of carrier guiding magnets 31. In the case where a plurality of carrier guide magnets 31 are provided, the carrier guide magnets 31 may be offset from each other in the third direction 3 perpendicular to the transport direction T.

The carrier guide magnet 31 may be arranged such that the magnetic poles of the carrier guide magnet 31 facing each of the respective first and

second guide magnets

21 and 22 are of the same polarity, such that a magnetic repulsive force is exerted on the carrier guide magnet 31 by the respective first and

second guide magnets

21 and 22.

As exemplarily shown in fig. 3A, the magnetic guide 200 may include one first guide magnet 21 and one second guide magnet 22 such that a magnetic repulsive force is applied to the carrier guide magnet 31 in the transverse direction 4. However, additional shipping stability may be achieved by providing more than one guide magnet on each side of the magnetic guide 200.

Referring now to fig. 3B, an alternative arrangement of the guidance magnets is shown. According to an embodiment, which can be combined with other embodiments described herein, the at least one first guiding magnet comprises two

first guiding magnets

21a, 21b and the at least one second guiding magnet comprises two

second guiding magnets

22a, 22b, and wherein the two

first guiding magnets

21a, 21b are offset from each other in a third direction 3 perpendicular to the transport direction T and the two

second guiding magnets

22a, 22b are offset from each other in the third direction 3 perpendicular to the transport direction T.

Arranging two

first guide magnets

21a, 21b and two

second guide magnets

22a, 22b on each side of the magnetic guide 200 allows the magnetic repulsion forces between the

first guide magnets

21a, 21b and the

second guide magnets

22a, 22b to be directed not only in the transverse direction 4, but also in the third direction 3. In case the carrier 30 is transported in a substantially vertical orientation, the third direction 3 is in a vertical direction. Thus, one component of the magnetic repulsion force is directed in the lateral direction 4, while the other component of the magnetic repulsion force is directed in the third direction 3.

By also applying a magnetic repulsion force in the third direction 3, an improved stability is provided to the transported carrier in a direction perpendicular to the transport direction T. In case the carrier 30 is transported in a substantially vertical orientation, additional stability is provided in the vertical direction, so that an enhanced guidance of the carrier 30 is provided.

According to embodiments, which can be combined with other embodiments described herein, the at least one carrier guiding magnet 31 may be arranged to be guided at a point in the third direction 3 between the two

first guiding magnets

21a, 21b and at a point in the third direction 3 between the two

second guiding magnets

22a, 22 b. More specifically, the at least one carrier guide magnet 31 may be arranged at a magnetic balance point between the two

first guide magnets

21a, 21b and the two

second guide magnets

22a, 22 b.

Alternative arrangements of the first and second guidance magnets and the carrier guidance magnet may also provide the additional stability advantages described above. For example, providing one first guide magnet 21 and one second guide magnet 22 and providing two carrier guide magnets 31 offset from each other in the third direction 3 will also provide additional vertical stability to the transported carrier. Alternatively, providing three or more first guide magnets 21 and three or more second guide magnets 22 and providing two carrier guide magnets 31 offset from each other in the third direction 3 also provides additional vertical stability. In particular, additional stability may be provided when the number of first and second guiding magnets is equal to the number of carrier guiding magnets plus or minus one.

According to an embodiment of the present disclosure, a transport system for transporting a carrier is provided. Reference will now be made to fig. 4, which shows a schematic side view of a transport system 300 for transporting a carrier 30 in a transport direction T. The transport system 300 includes: a transport device 40 extending in the transport direction T, the transport device being configured to support the carrier 30 against gravity and to move the carrier 30 in the transport direction T; and a magnetic guide 200 according to embodiments described in the present disclosure.

Since the transport device 40 provides support for the carrier 30 against gravity, the magnetic guide 200 is primarily configured to provide guidance in the lateral direction. The carrier 30 may be provided with a carrier guide magnet 31 on one edge and a guide structure 33 on the opposite edge. A carrier guide magnet 31 is provided for interacting with the magnetic guide 200 and a guide structure 33 is provided for interacting with the transportation device 40. Additionally, according to embodiments, the carrier 30 is oriented in a substantially vertical orientation.

Fig. 4 schematically shows an example in which a gap G is provided in the transport system 300. In this example, a sealing door 50 may be disposed between the two process chambers. The transport system 300 transports the carrier 30 so as to cross the gap G. The gap G between the ends of the respective magnetic guides 200 may be up to 500mm, and the gap between the ends of the respective transport devices 40 may be different. According to the embodiments described herein, the first and

second guide magnets

21 and 22 of each respective magnetic guide 200 extend from the housing 10 so as to shield the magnetic attraction force between the carrier guide magnet 31 and the housing 10 such that collision between the carrier 30 and the housing 10 is avoided.

The transport system exemplarily shown in fig. 4 provides for transporting the carrier 30 in a substantially vertical orientation. As exemplarily shown, the magnetic guide 200 is arranged on the upper side of the carrier 30 in order to provide guidance in the lateral direction by interacting with the upper edge of the carrier 30. Thus, the transport means 40 are arranged at the lower side of the carrier 30 in order to support and transport the carrier 30 by interaction with the lower edge of the carrier 30. According to embodiments, which can be combined with other embodiments described herein, the magnetic guide 200 is an upper guide. The transport system 300 of this embodiment may be considered a "standing" system whereby the carrier 30 is supported at its lower edge and "stands" on the transport apparatus 40 in a substantially vertical orientation. Thus, the carrier 30 may be provided at its upper edge with a carrier guide magnet 31, which is guided between the first guide magnet 21 and the second guide magnet 22 of the magnetic guide 200.

Alternatively, the transport system 300 may be arranged in reverse of the arrangement exemplarily shown in fig. 4. In other words, the magnetic guide 200 may be arranged at the lower side of the carrier 30 in order to provide guidance in the lateral direction by interacting with the lower edge of the carrier 30. Thus, the transport device 40 is arranged on the upper side of the carrier 30 in order to support and transport the carrier 30 by interaction with the upper edge of the carrier 30. According to embodiments, which can be combined with other embodiments described herein, the magnetic guide 200 is a lower guide. The transport system 300 of this embodiment may be considered a "hanging" system whereby the carrier 30 is supported at its upper edge and "hangs" from the transport device 40 in a substantially vertical orientation.

According to embodiments, which can be combined with other embodiments described herein, the transport system 300 is configured to operate in vacuum. The transport system 300 may be configured to transport the carrier 30 into and out of a processing chamber maintained at vacuum conditions or reduced pressure conditions. In the present disclosure, the term "vacuum" may refer to a partial vacuum whereby the internal pressure of the process chamber is lower than the ambient pressure outside the process chamber. Thus, the components of the transport system 300 may be configured to withstand the vacuum environment, or configured to not contaminate the vacuum environment.

The transport device 40 may use a non-contact device (e.g., using magnetic levitation) to support and transport the carrier 30. According to embodiments, which can be combined with other embodiments described herein, the transport device 40 comprises a plurality of active magnetic bearings configured to support and move the carrier 30 by magnetic levitation. The plurality of active magnetic bearings may be controlled such that the plurality of active magnetic bearings form a linear motor. Thus, the guiding structure 33 of the carrier 30 may comprise a magnetic material component having a surface directed towards the active magnetic bearing of the transportation means 40 during transportation of the carrier 30 in the transportation direction T.

The transport device 40 may be configured to hold the carrier 30 by magnetic force at least a portion of the weight of (a) or the entire weight of the carrier 30. For example, the carrier 30 may be held relative to the transport device 40 in a non-contact manner or in a substantially non-contact manner during transport along the transport system 300. The magnetic levitation system may comprise a plurality of levitation magnets, e.g. active and/or passive levitation magnets, such as a plurality of active magnetic bearings, for levitating the carrier relative to the transport device 40. Magnetic levitation of the carrier 30 along the transport system 300 has the advantage of friction-free transport, so that the generation of particles caused by friction between the carrier and the transport system 300 is reduced. Reducing the generation of particles in the processing system allows higher quality materials to be deposited on a substrate, for example, in a deposition chamber.

Alternatively, the transporting means 40 may support and transport the carrier 30 using a non-contact means. According to embodiments, which can be combined with other embodiments described herein, the transport device 40 may comprise a plurality of rollers. For example, a plurality of rollers may be arranged in the transport direction T in which the carrier 30 is supported. The rotation of at least some of the plurality of rollers in a particular direction causes the carrier 30 to be transported in the transport direction T. The guide structure 33 of the carrier 30 may have the form of a cylindrical bar or rod extending in the transport direction. Thus, the plurality of rollers may have circumferential grooves formed therein that provide a guide structure 33 for receiving the carrier 30.

While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. A magnetic guide (200) for guiding a carrier (30), the magnetic guide (200) comprising:

a housing (10) comprising a first portion (11) and a second portion (12) arranged opposite to the first portion (11) in a transverse direction (4), the first portion (11) and the second portion (12) extending in a first direction (1) as a transport direction (T);

at least one first guide magnet (21) arranged on a surface of the first portion (11); and

at least one second guide magnet (22) arranged on a surface of the second portion (12);

wherein the at least one first guiding magnet (21) extends in a second direction (2) opposite to the transport direction (T) beyond a first end (11 a) of the first part (11), the first end (11 a) comprising a magnetic material, and the at least one second guiding magnet (22) extends in the second direction (2) opposite to the transport direction (T) beyond a second end (12 a) of the second part (12), the second end (12 a) comprising a magnetic material.

2. The magnetic guide (200) of claim 1, wherein the carrier (30) is oriented in a substantially vertical orientation.

3. The magnetic guide (200) of claim 1, wherein the at least one first guide magnet (21) and the at least one second guide magnet (22) extend in the second direction (2) at least 5mm beyond the first end (11 a) of the respective first portion (11) and the second end (12 a) of the respective second portion (12).

4. The magnetic guide (200) of claim 3, wherein the carrier (30) is oriented in a substantially vertical orientation.

5. The magnetic guide (200) of claim 1, wherein the carrier (30) comprises at least one carrier guide magnet (31) arranged to be guided between the at least one first guide magnet (21) and the at least one second guide magnet (22).

6. The magnetic guide (200) of claim 5, wherein the at least one first guide magnet (21) comprises two first guide magnets (21 a, 21 b), and wherein the at least one second guide magnet (22) comprises two second guide magnets (22 a, 22 b), and wherein

The two first guiding magnets (21 a, 21 b) being offset from each other in a third direction (3) perpendicular to the transport direction (T); and is

The two second guiding magnets (22 a, 22 b) are offset from each other in the third direction (3) perpendicular to the transport direction (T).

7. The magnetic guide (200) of claim 6, wherein the at least one carrier guide magnet (31) is arranged to be guided at a point in the third direction (3) between the two first guide magnets (21 a, 21 b) and at a point in the third direction (3) between the two second guide magnets (22 a, 22 b).

8. The magnetic guide (200) according to claim 3, wherein the carrier (30) comprises at least one carrier guide magnet (31) arranged to be guided between the at least one first guide magnet (21) and the at least one second guide magnet (22).

9. The magnetic guide (200) of claim 8, wherein the at least one first guide magnet (21) comprises two first guide magnets (21 a, 21 b), and wherein the at least one second guide magnet (22) comprises two second guide magnets (22 a, 22 b), and wherein

10. The magnetic guide (200) of claim 9, wherein the at least one carrier guide magnet (31) is arranged to be guided at a point in the third direction (3) between the two first guide magnets (21 a, 21 b) and at a point in the third direction (3) between the two second guide magnets (22 a, 22 b).

11. A magnetic guide (200) for guiding a carrier (30), the magnetic guide (200) comprising:

wherein the at least one first guiding magnet (21) and the at least one second guiding magnet (22) are arranged to shield magnetic attraction of the carrier (30) towards the housing (10).

12. The magnetic guide (200) of claim 11, wherein the carrier (30) is oriented in a substantially vertical orientation.

13. A transport system (300) for transporting a carrier (30), comprising:

a transport device (40) extending in a transport direction (T), the transport device being configured to support the carrier (30) against gravity and to move the carrier (30) in the transport direction (T); and

the magnetic guide (200) of any of claims 1 to 12.

14. The transport system (300) of claim 13, wherein the magnetic guide (200) is at least one of the group consisting of an upper guide and a lower guide.

15. The transport system (300) of claim 13, wherein the transport system (300) is configured to operate in a vacuum.

16. Transport system (300) according to claim 13, wherein the transport means (40) comprise a plurality of active magnetic bearings configured to support and move the carrier (30) by magnetic levitation.

17. The transport system (300) of claim 16, wherein the transport system (300) is configured to operate in a vacuum.

18. A transport system (300) according to claim 13, wherein the transport means (40) comprises a plurality of rollers.

19. The transport system (300) of claim 18, wherein the transport system (300) is configured to operate in a vacuum.

20. A substrate processing system comprising at least one processing chamber and a transport system (300) according to claim 8.