WO2020147929A1

WO2020147929A1 - Transport system for transporting a carrier, vacuum processing system and method for transportation of a carrier

Info

Publication number: WO2020147929A1
Application number: PCT/EP2019/050934
Authority: WO
Inventors: Oliver Graw
Original assignee: Applied Materials, Inc.
Priority date: 2019-01-15
Filing date: 2019-01-15
Publication date: 2020-07-23

Abstract

A transport system (200) for transporting a carrier (210) in a processing system is provided. The transport system includes a guiding structure (250) comprising one or more first magnet units (255) provided along a transport direction (1) of the carrier (210) and levitating the carrier, a drive unit (260) moving the carrier along the transportation direction (1), and a stopping arrangement (262) configured to decelerate the moving of the carrier (210) upon power loss at the stopping arrangement.

Description

TRANSPORT SYSTEM FOR TRANSPORTING A CARRIER, VACUUM PROCESSING SYSTEM AND METHOD FOR TRANSPORTATION OF A CARRIER

TECHNICAL FIELD [0001] Embodiments of the present disclosure relate to a transport system, a vacuum processing system and a method for transportation of a carrier. Embodiments of the present disclosure particularly relate to transportation of a levitated carrier.

BACKGROUND [0002] Techniques for layer deposition on a substrate include physical vapor deposition, for example, sputter deposition or evaporation, and chemical vapor deposition. A sputter deposition process can be used to deposit a material layer on the substrate, such as a layer of an insulating material or a conductor material.

[0003] In order to deposit a multiple layer stack, an in-line arrangement of processing chambers can be used. An in-line processing system includes a plurality of subsequent processing chambers, such as deposition chambers and optionally further processing chambers, e.g., cleaning chambers and/or etching chambers, wherein processing aspects are subsequently conducted in the processing chambers such that a plurality of substrates can continuously or quasi-continuously be processed in the in-line processing system. [0004] The substrate may be carried by a carrier, i.e. a carrying device for carrying the substrate. The carrier can be transported through a vacuum system using a magnetic levitation transport system. The transport system may be configured for conveying the carrier having the substrate positioned thereon along one or more (magnetic) transport paths.

[0005] In light of the above, there is a need for systems and methods to provide proper transport of the carrier including protective mechanisms. SUMMARY

[0006] According to an aspect, a transport system for transporting a carrier in a processing system is provided. The transport system includes a guiding structure comprising one or more first magnet units provided along a transport direction of the carrier and levitating the carrier, a drive unit moving the carrier along the transportation direction, and a stopping arrangement configured to decelerate the moving of the carrier upon a power loss at the stopping arrangement.

[0007] According to an aspect, a transport system for transporting a carrier in a processing system is provided. The transport system includes a guiding structure comprising one or more first magnet units provided along a transport direction of the carrier and levitating the carrier, a drive unit moving the carrier along the transportation direction, a power supply providing power and a stopping arrangement connected to the power supply. The stopping arrangement includes an actuator, and one or more stoppers coupled to the actuator, the actuator moving the one or more stoppers from an operation position to a deceleration position when no power is provided by the power supply.

[0008] According to an aspect, a vacuum processing system is provided. The vacuum processing system includes a vacuum generation device, one or more processing chambers and a transport device according to embodiments described herein.

[0009] According to an aspect, a method for transportation of a carrier in a processing system is provided. The method includes transporting a carrier in a transport direction in a levitated state, and moving one or more stoppers to decelerate the carrier upon a power loss at a stopping arrangement.

[0010] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner.

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a top view of a processing system according to embodiments described herein; FIG. 2 shows a schematic view of a transport system for transporting a carrier according to embodiments described herein;

FIG. 3A and B show schematic side views of a transport system for transporting a carrier according to embodiments described herein;

FIG. 4 shows a schematic front view of a transport system for transporting a carrier according to embodiments described herein;

FIGs. 5A and B show schematic front views of a transport system for transporting a carrier according to embodiments described herein; and

FIG. 6 shows a flow diagram of a method according to embodiments herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0012] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations. [0013] The embodiments described herein are directed to a transport system including an emergency stop mechanism. The emergency stop mechanism is particularly beneficial in case of an electricity failure or a power loss in a vacuum processing system. Advantageously, such an emergency stop mechanism leads to deceleration of one or more carriers being transported through the vacuum processing system in case the transport system fails to carry the one or more carriers. Particularly, the emergency stop mechanism results in a deceleration of all carriers being transported in the vacuum processing system. Accordingly, the one or more carriers, as well as the substrates being carried can be prevented from damage due to a non- decelerated collision of the carriers with each other or with walls of chambers of the processing system.

[0014] FIG. 1 shows a top view of a substrate processing system 100 according to embodiments described herein. The processing system may include several chambers for processing of a substrate. The processing system includes one or more atmospheric chambers 170. The one or more atmospheric chambers may include a swing chamber 172 for bringing the substrate into an essentially vertical orientation.

[0015] According to embodiments, the substrate 10 may be transported between the chambers via a transport system 200. Furthermore, the processing system may include one or more transfer chambers 182. The one or more transfer chambers 182 may include pre- vacuum chambers including one or more load lock chambers. The one or more transfer chambers 180 may include one or more high- vacuum chambers.

[0016] According to embodiments described herein, the processing system includes one or more processing chambers 190. Vacuum conditions may be provided in the one or more processing chambers 190 and/or the transfer chambers 182. The processing system may be used to process a substrate 10 e.g. to deposit material onto the substrate. The vacuum processing system may include a vacuum generation device like e.g. a vacuum pump or the like.

[0017] Processing of a substrate may be understood as transferring material to a substrate, etching a substrate, pre-treatment of a substrate, heating the substrate, e.g. during annealing, or another substrate processing. For example, deposition material may be deposited on the substrate, for example, by a CVD process or a PVD process, such as sputtering or evaporation. The substrate 10 may include a deposition material receiving side. The deposition material receiving side of the substrate may be regarded as the side of the substrate facing a deposition source. Further, processing of a substrate may also include transportation of the substrate from one chamber to another chamber of the processing system. [0018] Vacuum conditions as used herein, include pressure conditions in the range of below

10 -1 mbar or below 10 -3 mbar, such as 10 -7 mbar to 10 -2 mbar. Vacuum conditions may be applied through the use of vacuum pumps or other vacuum creating techniques For example, vacuum conditions in the load lock chamber may be switched between atmospheric pressure conditions and subatmospheric pressure conditions, e.g. in a range at or below 10 ¹ mbar. For transferring a substrate into a high vacuum chamber, the substrate may be inserted into the load lock chamber provided at atmospheric pressure, the load lock chamber may be sealed, and subsequently may be set on a subatmospheric pressure in the range below 10 ¹ mbar. Subsequently, an opening between the load lock chamber and the high vacuum chamber may be opened, and the substrate may be inserted into the high vacuum chamber to be transported into the processing chamber.

[0019] According to embodiments described herein, the one or more processing chambers or chambers contain one or more deposition sources 192. If more than one deposition source is present, the deposition sources may be arranged in an array. For example, the deposition sources are arranged next to each other. The deposition sources may extend vertically in length direction.

[0020] According to embodiments, the one or more deposition sources may be rotatably fixed to a bottom side of the processing chamber. Particularly, three or more, such as 3 to 18 deposition sources may be present in the one or more processing chambers.

[0021] According to embodiments, the substrate processing system may include a transport system 200. The transport system may be configured to transport one or more carriers. The one or more carriers may be configured for transferring one or more substrates 10. Particularly, the transport system 200 may include transportation paths extending through the processing system. The one or more carriers may be transported through the processing system with or without having loaded one of the one or more substrates 10.

[0022] According to embodiments, the transport system 200 is configured for transporting a carrier in a processing system. The transport system includes a guiding structure including one or more first magnet units provided along a transport direction of the carrier and levitating the carrier, a drive unit moving the carrier along the transportation direction, and a stopping arrangement configured to decelerate the moving of the carrier upon a power loss at the stopping arrangement. [0023] According to further embodiments, the transport system 200 is configured for transporting a carrier in a processing system. The transport system includes a guiding structure including one or more first magnet units provided along a transport direction of the carrier and levitating the carrier, a drive unit moving the carrier along the transportation direction, a power supply providing power, and a stopping arrangement connected to the power supply. The stopping arrangement includes an actuator, and one or more stoppers coupled to the actuator, the actuator moving the one or more stopper from an operation position to a deceleration position when no power is provided by the power supply.

[0024] The carrier may be configured to carry a large-area substrate, particularly a large- area substrate for display manufacturing. In embodiments, the substrate may have a surface area to be processed of 1 m² or more, particularly 5 m² or more, or even 10 m² or more. Accordingly, the carrier may have a substrate holding surface having a size of 1 m² or more, particularly 5 m² or more, or even 10 m² or more. For example, the height of the carrier may be 1 m or more, particularly 2 m or more, and/or a width of the carrier may be 1 m or more, particularly 2 m or more. The carrier may be configured for carrying or holding the substrate in an essentially vertical orientation. In other words, an angle between a main surface of the substrate 10 and the gravity vector is typically less than 20° during the transport of the carrier. For example, the angle between the main surface of the substrate and the gravity vector may be from -10° to +10°, particularly from -1° to -5°, wherein negative angles are meant to designate downwardly facing substrates.

[0025] For example, the one or more carriers may be transported from the atmospheric chamber to the one or more processing chambers. Further, the one or more carriers may be transported between the one or more processing chambers. For example, a plurality of carriers may be transported. Particularly, the one or more carriers and/or the plurality of carriers may circulate through the substrate processing system 100. The carriers, for example, may cycle between the atmospheric chamber and the one or more processing chambers. For example, such transportation may be along the transportation paths and/or along a transportation loop. Accordingly, the processing system may include a plurality of carriers carrying a plurality of substrates 10. Each carrier may carry one substrate. A plurality of carriers may be transported through the processing system simultaneously.

[0026] According to embodiments, the one or more carriers may be at least partially contactlessly transported through the processing system.“Partially contactlessly transported” or“contactless transport” or“levitation” as used herein may be understood in the sense that a weight of e.g. the carrier and the substrate is not held by a mechanical contact or mechanical forces, but is held by e.g. a magnetic force. Specifically, the carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces. For example, the transport arrangement described herein may have no mechanical devices, such as a mechanical rail, supporting the entire weight of the carrier. In some implementations, there can be no mechanical contact between the carrier and the rest of the apparatus during levitation, and for example movement, of the carrier in the vacuum system. In further implementations, there can be a temporary mechanical contact between the carrier and elements of the apparatus during levitation and for example movement, of the carrier in the vacuum system.

[0027] For example, a magnetic levitation system may be used to at least partially contactlessly transport the one or more carriers through the processing system. The one or more carriers may be moved in a transport direction. This may also include a magnetic levitation, wherein the one or more carriers may contact elements that increase stability of the magnetic transport e.g. guiding elements that limit movement of the one or more carriers in a direction perpendicular to (arrow 2 in FIG. 2) or away from the transport direction.

[0028] FIG. 2 shows a schematic view of a transport system for transporting a carrier according to embodiments described herein. The transport system may be a magnetic levitation system.

[0029] The transport system 200 may include a transport arrangement having a guiding structure 250, which may include one or more first magnet units 255 provided along a transport direction 1 of the carrier and levitating the carrier and the carrier 210 according to the present disclosure. The one or more first magnet units may be active magnet units. The transport system 200 may further include a controller configured to selectively control at least one active magnet unit of the one or more first magnet units 255. According to some embodiments described herein, the transport system may be arranged in at least one of the chambers described with respect to FIG. 1 of the processing system.

[0030] The carrier 210 can include one or more second magnet units. The one or more second magnet units may be configured to magnetically interact with guiding structure 250 of the processing system for providing a magnetic levitation force for levitating the carrier 210. The one or more second magnet units can be one or more passive magnetic units 230. The guiding structure 250 may extend in the transport direction 1 of the carrier 210, which can be a horizontal direction. The guiding structure 250 can include the one or more first magnetic units 255. The transport system may include a drive unit 260 moving the carrier 210 along the transport direction 1. In other words, the carrier 210 can be movable along the guiding structure 250 by using drive unit 260. The one or more second magnetic units 230, e.g. a bar of ferromagnetic material, and the one or more first magnetic units 255 of the guiding structure 250 can be configured for providing a first magnetic levitation force for levitating the carrier 210. The devices for levitating as described herein are devices for providing a contactless force to levitate e.g. the carrier 210. The arrangement of the guiding structure and the drive unit in the processing system are explained in more detail with respect to FIGs. 5A and B.

[0031] According to some embodiments, the transport arrangement may include a drive unit 260. The drive unit 260 can include one or more drive unit actuators. For example, the drive unit 260 i.e. the one or more drive unit actuators can include one or more further magnet units, such as further active and/or passive magnetic units. The carrier 210 can include one or more third magnet units configured to magnetically interact with the drive unit 260. In particular, the one or more third magnet units can be a second passive magnetic unit, e.g. a bar of ferromagnetic material, to interact with the further active magnetic units 265 of the drive unit 260 are the one or more drive unit actuators.

[0032] According to embodiments, the drive unit and/or the guiding structure 250 may include a stopping arrangement 262. The stopping arrangement 262 may be arranged with the processing chamber e.g. with a bottom wall of any chamber of the processing system. The stopping arrangement 262 may include one or more stoppers 264 which may be configured to decelerate the one or more carriers 210. The stopping arrangement i.e. the one or more stoppers 264 may be arranged with the further active magnet units 265 of the drive unit 260. The stopping arrangement i.e. one or more stoppers 264 may be movable. For example, the one or more stoppers may be movable in a direction substantially perpendicular with respect to the transport direction. The stopping arrangement i.e. the one or more stoppers may be made from a non-magnetic material e.g. from plastic, rubber, or the like.

[0033] In FIG. 2, a first magnetic unit of the one or more first magnetic units 255 is shown. The first magnet unit may be an active magnetic unit and may provide a magnetic force interacting with the second magnetic unit 230 of the carrier 210. For example, the second magnetic unit 230 can be a passive magnet unit i.e. a rod of a ferromagnetic material. A rod can be a portion of the carrier 210 that is connected to a support structure 212. The support structure 212 can be provided by the body of the carrier 210. The rod or the second magnetic unit, respectively, may also be integrally formed with the support structure 212 for supporting the substrate 10. The carrier 210 can further include the third magnetic unit 240, for example a further rod. The further rod can be connected to the carrier 210. The rod or the third magnetic unit, respectively, may also be integrally formed with the support structure 212.

[0034] The terminology of a“passive” magnetic unit is used herein to distinguish from the notion of an“active” magnetic unit. A passive magnetic unit may refer to an element with magnetic properties, which are not subject to active control or adjustment, at least not during operation of the transport arrangement. For example, the magnetic properties of a passive magnetic unit, e.g. the rod or the further rod of the carrier, are not subject to active control during movement of the carrier through the vacuum chamber or vacuum system in general. According to some embodiments, which can be combined with other embodiments described herein, a controller of the transport arrangement is not configured to control a passive magnetic unit. A passive magnetic unit may be adapted for generating a magnetic field, e.g. a static magnetic field. A passive magnetic unit may not be configured for generating an adjustable magnetic field. A passive magnetic unit may be a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties.

[0035] According to embodiments described herein, the one or more first magnetic units 255 may provide for a magnetic force on the second magnetic unit 230 and thus, the carrier 210. The one or more first magnetic units 255 may levitate the carrier 210. The further active magnetic units 265 can move or drive the carrier 210 within the vacuum chamber, for example along the transport direction 1. The plurality of further active magnetic units 265 may form the drive unit for moving the carrier 210 in the transport direction 1 while being levitated by the one or more first magnetic units 255 located above the carrier 210. The further active magnetic units 265 can interact with the third magnetic unit 240 to provide a force along the transport direction 1. For example, the third magnetic unit 240 can include a plurality of permanent magnets arranged with an alternating polarity. The resulting magnetic fields of the third magnetic unit 240 can interact with the plurality of further active magnetic units 265 to move the carrier 210 while being levitated.

[0036] In order to levitate the carrier 210 with the one or more first magnetic units 255 and/or to move the carrier 210 with the plurality of further active magnetic units 265, the active magnetic units can be controlled to provide adjustable magnetic fields. The adjustable magnetic field may be a static or a dynamic magnetic field. According to embodiments, which can be combined with other embodiments described herein, an active magnetic unit is configured for generating a magnetic field for providing a magnetic levitation force extending along a vertical direction 3. According to other embodiments, which can be combined with further embodiments described herein, an active magnetic unit may be configured for providing a magnetic force extending along a transversal direction. An active magnetic unit, as described herein, may be or may include an element selected from the group consisting of an electromagnetic device, a solenoid, a coil, a superconducting magnet, or any combination thereof.

[0037] Embodiments described herein relate to magnetic levitation and/or transportation of a carrier, a substrate and/or a mask. The disclosure refers to a carrier, which may include one or more elements of the group consisting of a carrier supporting a substrate, a carrier without a substrate, a substrate, or a substrate supported by a support.

[0038] According to embodiments of the present disclosure, levitating or levitation refers to a state of an object, wherein the objects floats without mechanical contact or support or without mechanical contact counteracting the force of gravity. Further, moving an object refers to providing a driving force, e.g. a force in a direction different to that of a levitation force, wherein the object is moved from one position to another, different position. For example, an object such as a carrier can be levitated, i.e. by a force counteracting gravity, and can be moved in a direction different then a direction parallel to gravity while being levitated.

[0039] The contactless levitation and transportation of the carrier according to embodiments described herein is beneficial in that no particles are generated due to a mechanical contact between the carrier and sections of the transport arrangement, such as mechanical rails, during the transport or alignment of the carrier. Accordingly, embodiments described herein provide for an improved purity and uniformity of the layers deposited on the substrate, in particular since a particle generation is minimized when using the contactless levitation and/or transportation.

[0040] FIGs. 3A and 3B show a schematic side view of a transport system 300 for transporting a carrier according to embodiments described herein. The transport system may be a magnetic levitation system. In particular, FIG. 3A shows a first configuration of the transport system according to embodiments described herein and FIG. 3B shows a second configuration of the transport system according to embodiments described herein.

[0041] According to embodiments described herein, the drive unit 360 may include one or more drive unit actuators 366 configured to allow for a movement of the one or more carriers in the transport direction. For example, moving the one or more carriers in the transport direction may be at least partially dependent on magnetic forces. As described with respect to FIG. 2, the one or more drive unit actuators 366 may include one or more further magnet units to allow for a movement of the one or more carrier that is at least partially dependent on magnetic forces.

[0042] According to embodiments described herein, the one or more carrier may be transported along the transportation direction with a distance D between the carrier and the stopping arrangement 362. Particularly, distance D may extend from a point of the stopping arrangement being in an operation position that is nearest to the carrier, substantially perpendicular to the carrier. The stopping arrangement may be configured to bridge distance D. Particularly, the stopping arrangement may be arranged in the vacuum processing system independently from the drive unit 360 and/or the guiding structure. The stopping arrangement 362 may include the one or more stoppers 364. The length of the stopping arrangement i.e. of the one or more stoppers may be at least the same length as distance D. The length dimension of the stopping arrangement 362 may extend in a direction substantially perpendicular to the carrier 310.

[0043] According to embodiments described herein, the size of the stopping arrangement 362 i.e. the length of the one or more stoppers 364, may extend in the direction perpendicular to the drive unit 360. The length of the stopping arrangement 362 i.e. the length of the one or more stoppers 364 may be at least as long as a distance D’ between the carrier and the drive unit 360. As such, the stopping arrangement i.e. the one or more stoppers may be configured to bridge distance D’.

[0044] According to embodiments described herein, the stopping arrangement may be arranged adjacent to the one or more further magnet units i.e. the one or more drive unit actuators 366. Particularly, one stopper of the one or more stoppers 364 may be arranged between two of the one or more drive unit actuators. The stopping arrangement may be connected to a power supply 370. For example, each of the one or more stoppers may be individually connected to the power supply. The power supply may be particularly configured to provide power to the processing system.

[0045] According to embodiments described herein, the stopping arrangement i.e. the one or more stoppers may be moved to an operation position. The term“operation position” as used herein, may be understood as the stopping arrangement i.e. the one or more stoppers to be in line with the driving unit, below the drive unit, or further distant from the drive unit as distance D. The stopping arrangement i.e. the one or more stoppers may adopt the operation position when power i.e. an electrical current flows from the power supply to the stopping arrangement i.e. to the one or more stoppers. Additionally or alternatively, the stopping arrangement i.e. the one or more stoppers may adopt an operation position during the time span when the processing system is powered by the power supply.

[0046] According to embodiments that can be combined with any other embodiment described herein, the stopping arrangement may be moved to a deceleration position. When being in a deceleration position, the stopping arrangement may extend over distance D between the stopping arrangement in an operation position and the carrier 310. In other words, the stopping arrangement may be in contact with the carrier for example, the stopping arrangement i.e. the one or more stoppers may be configured to hold the carrier 310. The stopping arrangement may span distance D between the drive unit and the carrier when being in a deceleration position.

[0047] According to embodiments described herein, the stopping arrangement may be connected to the power supply. The stopping arrangement may include an actuator. The one or more stoppers may be coupled to the actuator, the actuator moving the one or more stoppers from the operation position to the deceleration position when no power may be provided by the power supply i.e. when magnetic levitation may be disabled.

[0048] According to embodiments described herein, the stopping arrangement may be moved to the deceleration position when magnetic levitation of the carrier is disabled and/or magnetic driving is disabled. In particular, the stopping arrangement i.e. the one or more stoppers may adopt the deceleration position when being disconnected from the power supply. Disconnection of the power supply may include that no energy is supplied by the power supply e.g. due to an electricity failure. Furthermore, disconnection may also occur due to disruptions in a power supply line. The stopping arrangement may be configured to decelerate the carrier. [0049] It is to be understood that the carrier experiences kinetic energy from the drive unit when being transported through the processing system in the transport direction. When magnetic levitation or control of the driving is disabled it is beneficial to compensate the kinetic energy of the carrier to avoid damage of the carrier and/or the substrate and/or the processing system. The stopping arrangement may decelerate the carrier and/or may reduce the kinetic energy of the carrier. The term“decelerate” may include reduction of the kinetic energy of the carrier i.e. reducing the speed of the carrier. The term may also include deceleration to a zero value i.e. to free the carrier from any kinetic energy and thus to stop the carrier in the processing system. The stopping arrangement may generate friction between the drive unit and the carrier to compensate the kinetic energy of the carrier.

[0050] Advantageously, the stopping arrangement may be configured to avoid damage of the carrier and/or the carried substrates when magnetic levitation or control of the driving is disabled, a power loss in the system occurs, or control of the positioning of the carrier fails. The stopping arrangement may act as an emergency stop of the carrier in the processing system when other emergency arrangements do not work anymore or are disabled for any reason. For example, an emergency software that may stop or decelerate the carrier could be disabled due to an electricity failure. In such situations, the stopping arrangement may overtake emergency deceleration of the carrier and/or the substrate. The person skilled in the art may understand that the stopping arrangement may be beneficial especially when no energy may be supplied to the process anymore and/or when other emergency systems fail for other reasons like disruptions of system components or the like.

[0051] According to embodiments described herein, the stopping arrangement may include a mechanical arrangement, a pneumatic arrangement, a hydraulic arrangement and/or combinations thereof. For example, the actuator may be configured to mechanically move to the deceleration position when the power supply is disabled. In particular, the actuator may be a mechanical arrangement, e.g. a spring. The spring may be tensioned as long as the power supply supplies energy to the processing system or at least to the transport system and the stopping arrangement. When power is lost or disconnected, the spring may be released, thereby moving the stopping arrangement i.e. the one or more stoppers in the deceleration position.

[0052] According to embodiments, the stopping arrangement may be moved pneumatically. The actuator may be a pneumatic arrangement. Upon disablement of the magnetic levitation, e.g. upon power loss of the system, air which may be compressed during the presence of energy supplied by the power supply, may be released to bring the stopping arrangement into a deceleration position. For example, one or more valves may be electrically held in a closed position and may open upon loss of electricity.

[0053] According to embodiments described herein, the stopping arrangement may be moved hydraulically. The actuator may be a hydraulic arrangement. Upon disablement of the magnetic levitation, e.g. upon power loss of the system, one or more valves may be opened to allow for a flow of a fluid to move the stopping arrangement into the deceleration position. It is to be understood that the actuator may include a tubing allowing for the hydraulic movement of the stopping arrangement.

[0054] FIG. 4 shows a schematic front view of a transport system for transporting a carrier according to embodiments described herein. In particular, the transport system may include a backup support structure 442.

[0055] According to embodiments which can be combined with any other embodiment described herein, the transport system may include a backup support structure 442. For example, the backup support structure may include one or more emergency rolls at a side of the carrier, particularly at least one emergency roll at a front side and a back side of the carrier. The front side of the carrier may be understood as the side where material is deposited on the substrate i.e. the substrate facing side and the back side of the carrier may be understood as the side opposite to the substrate facing side.

[0056] According to embodiments described herein, the carrier 410 is transported through the processing system via a magnetic levitation system, i.e. via a guiding structure 450 as e.g. described with respect to FIG. 2. The carrier may include a backup support structure 442 arranged at the front side and/or the back side of the carrier. The carrier may be moved or driven through the processing system by using drive unit 460 as explained with respect to FIG. 2. Distance D may be between the carrier and the stopping arrangement or distance D’ may be between the carrier and the drive unit. The backup support structure may be arranged such that part of distance D or distance D’ is bridged by the backup support structure. In other words, the backup support structure may provide support to the carrier when the carrier is (accidentally) not magnetically levitated. [0057] The backup support structure may include emergency rolls rotating around an axis. In case magnetic levitation does not occur, the carrier may fall down due to gravitational forces onto the backup support structure i.e. the emergency rolls. The backup support structure may e.g. contact the drive unit or any other structure below the carrier (e.g. a bottom wall of a chamber where the carrier is in). Accordingly, the emergency rolls may commence rotating around the axis to compensate the kinetic energy of the carrier resulting from carrier transportation through the processing system. By contacting the drive unit or the other structure below the carrier, the emergency rolls may generate friction between the backup support structure i.e. the emergency rolls and the drive unit or the other structure below the carrier to decelerate the carrier.

[0058] According to embodiments, the stopping arrangement 462 may support or complete deceleration of the carrier when magnetic levitation is disabled e.g. due to a power loss. With exemplary reference to FIG. 4, the stopping arrangement 462 may extend into the gap between the carrier and the stopping arrangement to bridge distance D or between the carrier and the driving unit to bridge distance D’ and to decelerate the carrier. Accordingly, the deceleration of the carrier provided by the stopping arrangement may synergize with the deceleration provided by the emergency rolls. Advantageously, the backup support structure 442 may be especially beneficial to compensate for the time span of triggering the deceleration position of the stopping arrangement.

[0059] FIGS. 5 A and 5B show schematic front views of a transport system for transporting a carrier according to embodiments described herein. In particular, various embodiments of the stopping arrangement are displayed.

[0060] According to embodiments described herein, a guiding structure 550 is configured for magnetically levitating a carrier 510. A stopping arrangement 562 may be provided on top of a drive unit 560. In such a case, the stopping arrangement may be made from a non magnetic material such that magnetic forces generated by the drive unit 560 and acting on the carrier may not be impaired. The one or more stoppers 564 may be provided at the front side and at the back side of the carrier. The one or more stoppers may be free from contact with a substrate transported by the carrier.

[0061] According to embodiments, the stopping arrangement i.e. the one or more stoppers may adopt an operation position. The operation position with respect to the embodiments exemplarily shown in FIGs. 5 A und 5B may include the one or more stoppers being in an upright position i.e. the one or more stoppers extending parallel adjacent to the carrier without contacting the carrier.

[0062] According to embodiments described herein and upon disablement of magnetic levitation, the one or more stoppers may adopt a deceleration position. The deceleration position may include the one or more stoppers contacting the carrier at a front and/or a back side of the carrier (without contacting a substrate transported by the carrier). The front side of the carrier may typically be the side where the substrate is loaded on the carrier and the back side of the carrier may typically be the side of the carrier being turned away from the front side. The one or more stoppers may be configured to move at a movable section 568. For example, one stopper may be arranged at the front side of the carrier and one stopper may be arranged at the back side of the carrier 510. Upon disablement of the magnetic levitation, the stopper at the front side of the carrier and the stopper at the back side of the carrier may be moved at the respective movable section to capture the carrier in between the two stoppers. The movable section may include a hinge such that the carrier may be captured by folding the movable section of the front side and the back side of the carrier towards the carrier. Additionally or alternatively, the movable section may include a sliding element such that the carrier may be captured when sliding the movable section of the front side and the back side of the carrier towards the carrier with the help of the sliding element.

[0063] According to embodiments and as exemplarily shown in FIGs. 5A and 5B, the stopping arrangement may be arranged above or below the carrier. Additionally or alternatively, the stopping arrangement may be arranged on top or below the guiding structure and/or on top or below the drive unit 560. The movement of the stopping arrangement may be triggered as described with respect to FIGs. 3 A and B. According to embodiments described herein, the stopping arrangement may be arranged between the magnetic units of the drive unit and/or the guiding structure, respectively.

[0064] According to embodiments which can be combined with any other embodiment described herein, the carrier may be magnetically levitated by active levitation. The term “active levitation” may be understood as a magnetic levitation established by using active magnetic units i.e. for example electro-inducible magnets. The active levitation may include levitation upon attractive forces between at least two magnetic units (including at least one active magnetic unit). Additionally or alternatively, the carrier may be magnetically levitated by passive levitation. The term“passive levitation” may be understood as a magnetic levitation established by using passive magnetic units i.e. for example permanent magnets. The passive levitation may include levitation upon repulsive forces between at least two magnetic units.

[0065] According to embodiments described herein, the attractive forces between the at least two magnetic units (including at least one active magnetic unit) may occur between the one or more first magnet units of the guiding structure (see FIG. 2) and the one or more second magnet units of the carrier. The one or more first magnetic units may be arranged above the one or more second magnetic units. Additionally or alternatively, the one or more second magnet units may be arranged at the front side and the back side of the carrier and the one or more first magnet units may be arranged at a chamber wall of the processing system facing the front side of the carrier and at a chamber wall of the processing system facing the back side of the carrier. The magnet units may be arranged such that attractive magnetic poles of the first and second magnet units may face each other.

[0066] According to embodiments described herein, the repulsive forces between the at least two magnetic units (including at least one passive magnetic unit) may occur between the one or more third magnet units (see FIG. 2) of the carrier and the drive unit actuator. The one or more third magnet units of the carrier may be arranged above the drive unit actuator. Additionally or alternatively, the one or more third magnet units of the carrier may be arranged at the front side and the back side of the carrier and the drive unit actuator may be arranged at a chamber wall of the processing system facing the front side of the carrier and at a chamber wall of the processing system facing the back side of the carrier. The magnet units may be arranged such that repulsive magnetic poles of the one or more third magnet units and the drive unit actuator may face each other.

[0067] FIG. 6 shows a flow diagram of a method according to embodiments described herein. Box 610 of the method for transportation of a carrier in a processing system includes transporting a carrier in a transport direction in a levitated state. The carrier or one or more carriers may be transported with a magnetic levitation system according to embodiments described herein.

[0068] According to embodiments, box 620 includes moving one or more stoppers to decelerate the carrier upon a power loss at a stopping arrangement. The stopping arrangement may include the one or more stoppers according to embodiments described herein. [0069] According to embodiments, moving the one or more stoppers may further include moving the one or more stoppers simultaneously. For example, when movement of the stopping arrangement is triggered by a power loss at the stopping arrangement, all of the one or more stoppers of the stopping arrangement may move at the same time such that all of the one or more carriers being present in the processing system are decelerated such that damage of the carriers or substrates is prevented.

[0070] While the foregoing is directed to embodiments, other and further embodiments may be devised without departing from the basic scope, and the scope is determined by the claims that follow. [0071] In particular, this written description uses examples to disclose the disclosure, including the best mode, and also to enable any person skilled in the art to practice the described subject-matter, including making and using any devices or systems and performing any incorporated methods. While various specific embodiments have been disclosed in the foregoing, mutually non-exclusive features of the embodiments described above may be combined with each other. The patentable scope is defined by the claims, and other examples are intended to be within the scope of the claims if the claims have structural elements that do not differ from the literal language of the claims, or if the claims include equivalent structural elements with insubstantial differences from the literal language of the claims.

Claims

1. A transport system (200) for transporting a carrier (210) in a processing system, the transport system comprising:

a guiding structure (250) comprising one or more first magnet units (255) provided along a transport direction (1) of the carrier (210) and levitating the carrier;

a drive unit (260) moving the carrier along the transportation direction (1); and a stopping arrangement (262) configured to decelerate the moving of the carrier (210) upon a power loss at the stopping arrangement.

2. A transport system (200) for transporting a carrier (210) in a processing system, the transport system comprising:

a drive unit (260) moving the carrier (210) along the transportation direction;

a power supply (370) providing power;

a stopping arrangement (262) connected to the power supply, the stopping arrangement comprising:

an actuator; and

one or more stoppers (264) coupled to the actuator, the actuator moving the one or more stoppers from an operation position to a deceleration position when no power is provided by the power supply.

3. The transport system according to claim 2, wherein the stopping arrangement (262) is arranged in a distance D away from the carrier when being in the operation position.

4. The transport system (200) according to any of claims 1 to 3, wherein the stopping arrangement (262) is configured to hold the carrier upon power loss.

5. The transport system (200) according to any of claims 2 to 4, wherein the actuator comprises a mechanical arrangement, a pneumatic arrangement, a hydraulic arrangement and/or combinations thereof.

6. The transport system (200) according to any of the preceding claims, wherein the carrier (210) comprises a backup support structure (442).

7. The transport system according to any of the preceding claims, wherein the stopping arrangement is configured to bridge over a distance D between the carrier (210) and the stopping arrangement (262).

8. The transport system (200) according to any of claims 3 to 6, wherein the one or more stoppers (264) comprise a length being at least as long as the distance D between the stopping arrangement (262) and the carrier (210).

9. The transport system (200) according to any of claims 2 to 8, wherein the one or more stoppers (264) extend in parallel and are arranged adjacent to the carrier without contacting the carrier when in the operation position.

10. The transport system (200) according to any of claims 2 to 9, wherein the one or more stoppers (264) are made from a non-magnetic material.

11. The transport system (200) according to any of claims 2 to 10, wherein the one or more stoppers comprise a movable section (568) for capturing the carrier between two of the one or more stoppers.

12. A vacuum processing system (100), the vacuum processing system comprising: a vacuum generation device;

one or more processing chambers; and

the transport device of any one of claims 1 to 11.

13. The vacuum processing system according to claim 12, the vacuum processing system further comprising one or more atmospheric chambers (170) and/or one or more transfer chambers (182).

14. A method for transportation of a carrier in a processing system, the method comprising:

transporting a carrier in a transport direction in a levitated state; and

moving one or more stoppers to decelerate the carrier upon a power loss at a stopping arrangement.

15. The method according to claim 14, wherein moving the one or more stoppers comprises moving the one or more stoppers simultaneously.