CN102859677A - Traverse device and substrate processing device - Google Patents
Traverse device and substrate processing device Download PDFInfo
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- CN102859677A CN102859677A CN201180020937XA CN201180020937A CN102859677A CN 102859677 A CN102859677 A CN 102859677A CN 201180020937X A CN201180020937X A CN 201180020937XA CN 201180020937 A CN201180020937 A CN 201180020937A CN 102859677 A CN102859677 A CN 102859677A
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- base portion
- carriage
- conveyance
- transfer device
- maintenance base
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Abstract
Provided is a traverse device with which it is possible to reduce the number of components by means of a simplified structure and with which it is also possible to reduce the time taken to move a substrate, and also provided is a vacuum processing device which has the traverse device mounted therein. A holding base (32) for holding a transfer tray (17) is rotated by means of a parallel link mechanism (40) to thereby move the transfer tray (17) between an outward path (R1) and a return path (R2). It is therefore possible to move the transfer tray (17) by means of one drive unit (50) for driving the parallel link mechanism (40), without the need for a conventional biaxial movement operation involving a lift mechanism and a slide mechanism. In other words, it is possible to simplify the structure of the traverse device (30) and reduce the number of components. It is consequently possible to reduce costs and reduce maintenance frequency. Furthermore, by using the rotation of the holding base (32) to induce movement, it is possible to reduce movement time compared with a conventional traverse device.
Description
Technical field
The present invention relates to a kind of device that moves remaining upright substrate, be about to be positioned at a substrate on the conveyance route and move the substrate board treatment that changes to the transfer device on the other conveyance route and be mounted with this transfer device.
Background technology
The carrying device that loads in the vacuum treatment installation of record in the patent document 1 carries out conveyance to processed substrate being remained perpendicular long conveyance carriage.Set transfer device keeps the carriage both sides along the conveyance direction of carriage in this carrying device, at parallel lay-up between the conveyance route of each chamber bottom, the mobile conveyance carriage that keeps processed substrate.
This transfer device has the carriage of mounting conveyance carriage, is used for making the elevating mechanism of carriage lifting, and is used for the in the horizontal direction slide mechanism of mobile this elevating mechanism.These elevating mechanisms and slide mechanism are respectively equipped with drive source (engine M1 and M2) (for example referring to patent document 1 paragraphs [0032], [0033], Fig. 2 and Fig. 3).
Patent document 1: No. 2009/107728 brochure of international publication
Yet this transfer device moves the conveyance carriage by the double-shaft mechanism of elevating mechanism and slide mechanism, in addition, owing to being respectively equipped with drive source so these mechanism's complicateds.Mechanism's complicated then number of components increases, and cost also uprises.
In addition, in this transfer device, by utilizing elevating mechanism to rise, utilize slide mechanism to move horizontally and utilize these three operations that elevating mechanism descends the conveyance carriage is moved, therefore have long problem of operating time.
Summary of the invention
In view of foregoing, the object of the present invention is to provide a kind of can be by making simple structure reduce number of components and can shorten the transfer device of substrate traveling time, and the vacuum treatment installation that is mounted with this transfer device.
In order to achieve the above object, the transfer device that relates to of one embodiment of the present invention possesses tray moving mechanism and drive division.
Described tray moving mechanism has the maintenance base portion that the carriage that will keep substrate remains erectility.Be set under the state of the attitude of keeping the described carriage that described maintenance substrate keeps, make described maintenance base portion rotation.
Described drive division drives described tray moving mechanism, to form the mobile route of the described carriage that described maintenance base portion kept between the first conveyance route that is used for the described carriage of conveyance and the second conveyance route.
Among the present invention, by tray moving mechanism, make to keep the maintenance base portion of carriage to rotate, thereby carriage is mobile between the first conveyance route and the second conveyance route.Therefore, do not need the move operation of the twin shaft of elevating mechanism as prior art and slide mechanism, but can realize by a drive division of driven bracket travel mechanism the movement of carriage.That is, the simple structure of transfer device can be made, the quantity of parts can be reduced.In addition, the rotation by tray moving mechanism makes and keeps base portion to move, thereby compares with existing transfer device, can shorten traveling time.
Described transfer device can further comprise the meshing part that is arranged at described maintenance base portion, is used for meshing and supporting with the engaging piece of described carriage described carriage.Thus, can when moving, carriage make the attitude stabilization of carriage.
Described transfer device can further comprise the transmission of power of the described tray moving mechanism Poewr transmission mechanism to described meshing part.In the present invention, because the drive source of demand motive meshing part not, therefore can make the simple structure of transfer device.As Poewr transmission mechanism, can example such as cam mechanism.
Described meshing part comprises the engagement end of the part that meshes as the engaging piece with described carriage, and described meshing part can be connected with close position, the upper end of described maintenance base portion, so that the upper-end part of driving of described maintenance base portion is compared in the top in described engagement end.That is, can will keep the size Control of base portion to be less (perhaps highly lower), thereby can realize miniaturization, the lightweight of transfer device.
Described maintenance base portion can comprise perpendicular length section and protuberance.Perpendicular length section rotatably connects described meshing part; Protuberance comprises the described carriage of mounting and supports the support sector of described carriage from the below, and is set to from the bottom of described perpendicular long section outstanding in the horizontal direction.In this case, described maintenance base portion is driven, so that configure the pivot of the described support sector of described maintenance base portion on the parallel direction of described the first conveyance route and the second conveyance route, at the center line of described the first conveyance route of distance and the second conveyance route equidistance.
For example, in the substantially the same situation of the height and position of the first conveyance route and the second conveyance route, the present invention produces effect especially.That is, in the present invention, from the conveyance direction of the first conveyance route and the second conveyance route of carriage, can make the most close the first conveyance route of configuration and the second conveyance route of transfer device.Its result comprises the overall structure miniaturization of the first conveyance route and the second conveyance route and transfer device, can not hinder carriage conveyance ground to form the mobile route of carriage rotation.
Described tray moving mechanism can comprise fixed base and bent axle, and described bent axle is driven by described drive division, and is connected between described fixed base and the described maintenance base portion.
The substrate board treatment that the present invention relates to comprises process chamber, the first conveyance route and the second conveyance route and above-mentioned transfer device.
Described process chamber is for the treatment of substrate.
Described the first conveyance route and described the second conveyance route keep the carriage of substrate with the erectility conveyance, and are arranged in the described process chamber.
Among the present invention, by tray moving mechanism, make to keep the maintenance base portion of carriage to rotate, thus this carriage in being located at process chamber the first conveyance route and the second conveyance route between mobile.Therefore, do not need the move operation of the twin shaft of elevating mechanism as prior art and slide mechanism, but can realize by a drive division of driven bracket travel mechanism the movement of carriage.That is, the simple structure of transfer device can be made, the quantity of parts can be reduced.In addition, mobile by the rotation generation of tray moving mechanism, thus can shorten traveling time.
Described process chamber can be kept vacuum state in described process chamber, the described drive division of described transfer device can have the engine that is disposed at outside the described process chamber.In the prior art, the engine configurations of slide mechanism is outside the process chamber of vacuum, so in order to keep the vacuum in the process chamber, bellows is necessary.And, in the situation of engine configurations outside process chamber of the such elevating mechanism of prior art, the mechanism that need to seal on every side the rotating shaft of engine.For this reason, among the present invention owing to not needing the such linear pattern driving mechanism of elevating mechanism, even thereby the engine of drive division be positioned at outside the process chamber, do not need bellows yet, only around engine, have sealing mechanism just enough in the present invention.
Above, according to the present invention, can make simple structure, thereby reduce number of components, therefore can control cost, in addition, can also shorten the traveling time of substrate.
Description of drawings
Fig. 1 is the stereogram that has schematically shown as the vacuum treatment installation of the substrate board treatment with transfer device;
Fig. 2 is the stereogram that shows a transfer device in a pair of transfer device;
Fig. 3 is the figure that sees from Y direction for amplifying the figure of the transfer device that illustrates near the bent axle to top;
Fig. 4 is the front view of Poewr transmission mechanism;
Fig. 5 is the figure that sees from directions X for the schematic diagram of explanation transfer device operation;
Fig. 6 is the figure of the rotational trajectory of the support sector of explanation maintenance base portion.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
Fig. 1 is the stereogram that has schematically shown as the vacuum treatment installation 10 of the substrate board treatment with transfer device 30.Vacuum treatment installation 10 has a plurality of process chambers 11～15.Among Fig. 1, in the vacuum treatment installation 10, unloading chamber 11, load lock (Load-lock) chamber (being designated hereinafter simply as LL chamber 12), the first process chamber 13, the second process chamber 14 and carrying room 15 connect by gate valve respectively.
In the vacuum treatment installation 10, be provided with the first conveyance routes (being designated hereinafter simply as outlet R1) of 15 extensions from unloading chamber 11 to carrying room and 11 the second conveyance routes (being designated hereinafter simply as loop R2) that extend from carrying room 15 to unloading chamber.In the present embodiment, outlet R1 and loop R2 are parallel to each other.
In outlet R1 and loop R2, a plurality of conveyance carriages 17 carry out conveyance by the roller conveyance respectively.For example, by the carrying roller 19 take Y direction as the rotating shaft rotary actuation support conveyance carriage 17 below, simultaneously carry out conveyance along outlet R1 and loop R2.Each conveyance carriage 17 forms the quadrilateral frame shape of the outer rim of surrounding processed substrate (being designated hereinafter simply as substrate) S.And, can replace carrying roller 19 with rack and pinion mechanism, come conveyance carriage 17 is carried out conveyance.In this case, can be provided with tooth bar in the bottom of conveyance carriage 17, be provided with a plurality of and gear this tooth bar interlock along each conveyance route R1 and R2.In addition, carry out in the roller conveyance, by rack and pinion mechanism in conveyance any, all can not shown deflector roll take Z-direction as the rotating shaft rotary actuation be set along each conveyance route R1 and R2.
In the left and right sides of each conveyance carriage 17 (front side on the conveyance direction and rear side), be respectively equipped with the protuberance 17a as engaging piece.Each protuberance 17a as describing after a while, is used for by transfer device 30 these conveyance carriages 17 of locking in the conveyance operation of conveyance carriage 17.In addition, at the upside of each conveyance carriage 17, be equipped with carriage magnet 21.In the first process chamber 13, the second process chamber 14 and carrying room 15, be equipped with respectively the magneto motive holding device 22 of carriage magnet 21 generations with conveyance carriage 17.The carriage magnet 21 of conveyance carriage 17 acts on by the holding magnet 23 with each holding device in the conveyance process of this conveyance carriage 17, and this conveyance carriage 17 is limited to each conveyance route top non-contactly.
In the present embodiment, with the conveyance direction of conveyance carriage 17 among the R1 of outlet as X-direction.In addition, with respect to the horizontal plane vertical direction is as Z-direction, will with direction, outlet R1 that X-direction and Z-direction the intersect vertically direction parallel with loop R2 as Y direction.
In the unloading chamber 11, the substrate S before the processing that the outside is put into is installed on conveyance carriage 17 and keeps, and under erectility this substrate S is taken out of to LL chamber 12.In addition, in the unloading chamber 11, the substrate S after the processing that remains on the conveyance carriage 17 is taken out from conveyance carriage 17, take out of to the outside of vacuum treatment installation 10.In the unloading chamber 11, the loading and unloading of aforesaid substrate S are under atmospheric pressure carried out.
In the LL chamber 12, make the indoor atmospheric pressure that is, conveyance carriage 17 is moved into from unloading chamber 11 along outlet R1, then by reducing pressure to indoor, this conveyance carriage 17 is taken out of to the first process chamber 13 along outlet R1.In addition, in the LL chamber 12, reduce pressure to indoor, conveyance carriage 17 moved into to indoor along loop R2 from the first process chamber 13, then, make indoor to atmosphere opening, thereby conveyance carriage 17 11 is taken out of along loop R2 to unloading chamber.
In the first process chamber 13, conveyance carriage 17 is moved into along outlet R1 from LL chamber 12, and passed through the magneticaction of holding device 22, this conveyance carriage 17 is limited on the R1 of outlet.In the first process chamber 13, after remain in that substrate S on the conveyance carriage 17 implements that film forming is processed or heat treated etc. processed, remove the restriction of holding device 22, this conveyance carriage 17 is taken out of to the second process chamber 14 along outlet R1.
In addition, in the first process chamber 13, conveyance carriage 17 is moved into along loop R2 from the second process chamber 14, by the magneticaction of holding device 22, this conveyance carriage 17 is limited on the R2 of loop.In the first process chamber 13, after remain in that substrate S on the conveyance carriage 17 implements that film forming is processed or heat treated etc. processed, remove the restriction of holding device 22, this conveyance carriage 17 is taken out of to LL chamber 12 along loop R2.In the first process chamber 13, moving into and taking out of under reduced pressure and carry out above-mentioned conveyance carriage 17.
Also substrate S is implemented the processing such as film forming processing or heat treated in the second process chamber 14.In the second process chamber 14, utilize the operation of holding device 22 and the methods such as moving into and take out of of conveyance carriage 17, with identical in the first process chamber 13.In the second process chamber 14, along outlet R1, substrate S is moved into from the first process chamber 13, and substrate S is taken out of to carrying room 15.In addition, in the second process chamber 14, along loop R2, substrate S is moved into from carrying room 15, and substrate S is taken out of to the first process chamber 15.
The both sides of the X-direction in the carrying room 15 (front side on the conveyance direction and rear side) are mounted with a pair of transfer device 30.In the carrying room 15, conveyance carriage 17 is moved into along outlet R1 from the second process chamber 14, by the magneticaction of holding device 22, with these conveyance carriage 17 temporary being limited on the R1 of outlet.In the carrying room 15, remove the magnetic force restriction of the conveyance carriage on the R1 of outlet, utilize simultaneously transfer device 30, with conveyance carriage 17 upper conveyance from outlet R1 to loop R2.In the carrying room 15, will take out of to the second process chamber 14 along loop R2 towards the conveyance carriage 17 that loop R2 moves.
In the carrying room 15, the conveyance of conveyance carriage 17 from outlet R1 to loop R2 under reduced pressure carried out.In addition, in the carrying room 15, with conveyance carriage 17 during from outlet R1 to loop R2 conveyance, the lock function by transfer device 30 locks this conveyance carriage 17.
Fig. 2 is the stereogram that shows a transfer device in a pair of transfer device 30.The both sides that a pair of transfer device 30 utilizes the maintenance base portion that describes in detail later to keep respectively conveyance carriage 17.Two transfer devices 30 have identical function and structure (being shaped as for example symmetrical on X-direction).
As shown in Figure 2, transfer device 30 has drive division 50 and parallel bindiny mechanism 40 as tray moving mechanism, and wherein tray moving mechanism comprises the maintenance base portion 32 that can keep the conveyance carriage 17 that keeps substrate S.
Gearbox 35 for example is arranged on the fixed base 31, the actuating force of engine 33 is decelerated to the rotary speed of regulation and is passed on the bent axle 37 of lower side, changes engine 33 into around X-axis rotary power around the rotary power of Y-axis.
In order to make the stable operation of parallel bindiny mechanism 40, be provided with the connection assist 44 that connects two bent axles 36 and bent axle 37 in a side that keeps base portion 32.Connection assist 44 is rotationally attached to axial region 36a and the axial region 37a that is integrally formed at respectively on bent axle 36 and the bent axle 37.Connection assist 44 also can be rotationally attached to bent axle 36 and bent axle 37, near the end of fixed base 31 1 sides.
Keep base portion 32 under erectility, to keep conveyance carriage 17.Keep base portion 32 to form perpendicular long L word shape, at the perpendicular 32a of length section and the distal portion that is set to from the bottom of this perpendicular 32a of length section the protuberance 32b that in the horizontal direction (Y direction) give prominence to be on the 32c of support sector, load conveyance carriage 17.And, as describing after a while, be engaged on the protuberance 17a of conveyance carriage 17 as the hook part 38 of meshing part.Like this, support the below of conveyance carriage 17 by the 32c of support sector, and hook part 38 is engaged to protuberance 17a, thereby when keeping the rotary moving of base portion 32, can makes the attitude stabilization of conveyance carriage 17.
When transfer device 30 was in holding state (state shown in Fig. 5 (A) and Fig. 5 (E)), the 32c of support sector of maintenance base portion 32 was disposed at the lower side on each road surface (bottom of conveyance carriage 17) of outlet R1 and loop R2.
Keep the upper end of base portion 32 connecting rotatably hook part 38 centered by the rotating shaft 39.Hook part 38 has the opening of the engagement end 38a that is located at top, this opening and protuberance 17a engagement.As described below, hook part 38 utilizes the power of parallel bindiny mechanism 40 to operate.
Fig. 3 is the figure that see from Y direction for the bent axle 36 on top being amplified the figure of the transfer device 30 that illustrates.Transmission of power to the Poewr transmission mechanism 45 of hook part 38 of above-mentioned parallel bindiny mechanism 40 is located at fixed base 31 sides that keep base portion 32.Among Fig. 2, omitted the diagram of Poewr transmission mechanism 45.Fig. 4 is the front view of Poewr transmission mechanism 45.
As shown in Figure 4, in the bottom of hook part 38 and be located between the spring base 47 that keeps base portion 32, be connected with spring 46.Among Fig. 2, spring 46 and spring base 47 have been omitted.In the described spring 46, when hook part 38 with the state of the protuberance 17a of conveyance carriage 17 engagement under when operating when state (shown in Fig. 5 (B)～Fig. 5 (D)), or all the time, be set to tension force (for example power of spring 46 retracted orientations) and have an effect.
By the tension force of this spring 46, when cam follower 42 for example when the recess 41a of cam 41 moves, connecting rod 43 descends, hook part 38 rotate in the direction of arrow A, thereby the engagement between the protuberance 17a of releasing hook part 38 and conveyance carriage 17.Namely, the action of Poewr transmission mechanism 45 (sequential of cam 41) is designed to, and cam follower 42 is consistent for the sequential of holding state (sequential of (state shown in Fig. 5 (A) and Fig. 5 (E)) when namely keeping base portion 32 to be positioned at position of readiness) with transfer device 30 in the mobile sequential of the recess 41a of cam 41.
Operation to the transfer device 30 that as above consists of describes.Fig. 5 is the figure that sees from directions X for the schematic diagram of explanation transfer device operation.Fig. 6 is the figure of the rotational trajectory of the 32c of support sector of explanation maintenance base portion 32.And, omitted the diagram of connection assist 44 among Fig. 5 and 6.
Among Fig. 5, as described above, transfer device 30 is in holding state, keeps base portion 32 to be positioned at position of readiness.Under this state, as described above, hook part 38 but is backed out not on conveyance route R1 and R2.The rotary angle position of the 32c of support sector that is positioned at the maintenance base portion 32 of position of readiness is made as shown in Figure 60 °.At this moment, the holding magnet 23 of holding device 22 has descended, and the top of conveyance carriage 17 is held non-contactly, its attitude stabilization.
Shown in Fig. 5 (B), operation by parallel bindiny mechanism 40, keep base portion 32 to be rotated with turning clockwise among Fig. 5 and Fig. 6, when keeping the 32c of support sector of base portion 32 to reach 90 ° of positions shown in Figure 6, conveyance support 17 contacts and is loaded with the 32c of support sector.At this moment, by the effect of Poewr transmission mechanism 45 (referring to Fig. 3 and Fig. 4), hook part 38 rotation, the engagement end 38a of hook part 38 be configured in conveyance carriage 17 protuberance 17a under the position.Then, further begin to be rotated to turn clockwise by maintenance base portion 32, thereby the protuberance 17a that is opened on of the engagement end 38a of hook part 38 meshes and locks, under this lock-out state, keep base portion 32 maintenance conveyance carriages 17 also to rotate.After locked, the holding magnet of holding device 22 rises, thereby removes non-contacting maintenance.
Shown in Fig. 5 (C), keep base portion 32 to be rotated to turn clockwise, keep the 32c of support sector of base portion 32 to pass through 180 ° position of rotation (referring to Fig. 6).Then, shown in Fig. 5 (D), until the 32c of support sector arrives 270 ° position of rotation, beginning is kept non-contactly by holding device 22.Then, the 32c of support sector reaches 270 ° position of rotation, and conveyance carriage 17 loads in the R2 of loop.The 32c of support sector is by after 270 ° the position of rotation, and by the effect of Poewr transmission mechanism 45, hook part 38 begins rotation, removes the lock-out state that hook part 38 forms.
So, in the transfer device 30, keep the attitude by the conveyance carriage 17 that keeps base portion 32 to keep, utilize simultaneously the effect of parallel bindiny mechanism 40, by keeping the rotation of base portion 32, conveyance carriage 17 is moved from outlet R1 to loop R2.That is, between outlet R1 and loop R2, form the mobile route in conveyance carriage 17 loops.
Shown in Fig. 5 (E), after the state of Fig. 5 (D), keep base portion 32 also to be rotated to turn clockwise, thereby keep base portion 32 to get back to position of readiness, hook part 38 is backed out.
As mentioned above, in the present embodiment, keep the maintenance base portion 32 of conveyance carriage 17 to rotate by parallel bindiny mechanism 40, thereby conveyance carriage 17 is mobile between outlet R1 and loop R2.Thereby, do not need the move operation of the twin shaft of elevating mechanism as prior art and slide mechanism, but realize the movement of conveyance carriage 17 by a drive division that drives parallel bindiny mechanism 40.That is, the simple structure of transfer device 30 can be made, the quantity of parts can be reduced.Thus, cost can be reduced, and the frequency of maintenance can be reduced.In addition, move by the rotation of parallel bindiny mechanism 40, compare with existing transfer device, can shorten its traveling time.
In the present embodiment, Poewr transmission mechanism 45 is used for hook part 38 is worked.That is, owing to the drive source that does not need for other approach that drive hook part 38, can make the simple structure of transfer device 30.
Here, in order when keeping base portion 32 rotation, to make the attitude stabilization of conveyance carriage 17, also considered not use hook part 38, but made the action of holding device 22 imitate the spinning movement of conveyance carriage 17.But if the structure that makes holding device 22 for rotating the structure of operation, exists the dust that is produced by this holding device 22 to become many worries, the dust of generation brings ill effect for the processing of the substrate S of bottom along with gravity fall.Thereby, compare conveyance carriage 17 superposed structures and be preferably as far as possible simple structure, and for the attitude stabilization of conveyance carriage 17, hook part 38 is installed.
In the present embodiment, hook part 38 is connected to the position near the upper end that keeps base portion 32, keeps base portion 32 upper-end part of drivings in the top so that the engagement end 38a of hook part 38 compares.Thus, for example compare with existing transfer device, can be the size of less (or highly lower) with keeping the size Control of base portion 32, thereby can realize miniaturization, the lightweight of transfer device 30.
In the present embodiment, as shown in Figure 6, parallel bindiny mechanism 40 makes and keeps base portion 32 rotations so that keep the rotary middle spindle O of the 32c of support sector of base portion 32 be disposed on the Y direction with outlet R1 and the equidistant center line C of loop R2 on.For example, thus, from X-direction, can make the configuration of transfer device 30 near conveyance route R1 and R2.Its result, the overall structure that comprises each conveyance route R1, R2 and transfer device 30 is able to miniaturization, and can be in the situation that do not hinder 17 conveyances of conveyance carriage, the mobile route of formation conveyance carriage 17 rotations.
Further, the rotary middle spindle O of the 32c of support sector of maintenance base portion 32 is parallel with loop R2 with outlet R1.In this case, when keeping base portion 32 rotation because the three-dimensional volume that keeps the track of the substrate S process that base portion 32 keeps to form is minimum, to comprise the effect of overall structure miniaturization of each conveyance route R1, R2 and transfer device 30 the highest.
In the present embodiment, engine 33 is disposed at outside the carrying room.In the prior art, because that the slip transmitter of slide mechanism is disposed at vacuum treatment is outdoor, in order to keep the indoor vacuum of vacuum treatment, need to arrange bellows on the output shaft of this slip engine.And, in prior art like that with the lifting engine configurations of elevating mechanism in the outdoor situation of vacuum treatment, the mechanism that seal around need to the rotating shaft 39 to this engine 33 is such as the magnetic envelope etc.To this, in the present embodiment, owing to not needing the such linear pattern driving mechanism of slide mechanism, even therefore engine 33 is positioned at carrying room and does not also need bellows outward, only around the rotating shaft of lifting transmitter, there is sealing mechanism just enough.
Other execution modes
In the execution mode that the present invention relates to, be not limited to the execution mode of above-mentioned explanation, other various execution modes also can be realized.
Can carry out suitable change to the configuration of drive division 50, gearbox 35, bent axle 36, Poewr transmission mechanism 45, cam mechanism, hook part 38 etc. or structure etc.For example, the change shown in following may be arranged.
Can be with the bent axle 36 on the top in two bent axles 36 and 37 as driving shaft, with the bent axle 37 of bottom as driven shaft.
Perhaps, two drive divisions 50 can be set also, these drive divisions 50 are driven in synchronism bent axle 36 and bent axle 37 respectively.In this case, do not need above-mentioned connection assist 44.
Also hook part 38 can be constituted, the engagement end 38a of the relative hook part 38 of height and position of the rotating shaft 39 of hook part 38 is positioned at the top.
In the above-mentioned execution mode, enumerate the example of parallel bindiny mechanism as tray moving mechanism, but also can use other mechanism.For example, also can the guide member that the rotary moving that keep base portion 32 is guided be set with replacing to bent axle shown in Figure 2 36.In this case, keep can being connected with on the base portion 32 rotary body such as roller, this roller rotatably is connected with the guide sections part of for example track segment (along the curve-like parts that keep the base portion mobile route).In this case, as mentioned above, also can configuration or the structure of drive division 50, gearbox 35 etc. suitably be changed.
The holding components of cam follower 42 actions of supporting block mechanism can be set, and this holding components flexibly is arranged at and keeps base portion 32.For example under these circumstances, the part of holding components rotatably is connected with cam follower 42, other positions of holding components be connected the rotating shaft 39 of supporting base portion 32 and connect.Holding components is able to be rotated (rotation) with the center of this rotating shaft, and this holding components is connected with above-mentioned connecting rod 43 or bar-like member.By such structure, holding components can make cam follower 42 move along the shape of cam 41 by its elastic force, and can operate hook part 38.
Be not limited to the mode of the such Poewr transmission mechanism of above-mentioned execution mode 45 operation hook parts 38, shown in Fig. 5 (A)～Fig. 5 (E), the drive division that drives hook part 38 also can adopt the setting different from drive division 50.
The shape of fixed base 31, maintenance base portion 32, hook part 38 etc. etc. can suitably change.
In the above-mentioned execution mode, for being provided with the structure of hook part 38.But, be also can for example keep the structure of conveyance carriage 17 sides if keep base portion 32, then hook part 38 can be set.
The height and position that outlet R1 and loop R2 configure respectively can be different.In this case, keep the pivot of the 32c of support sector of base portion 32 not on the above-mentioned center line C in Fig. 6.
Description of reference numerals
Claims (8)
1. transfer device comprises:
Tray moving mechanism, described tray moving mechanism has the maintenance base portion that the carriage that will keep substrate remains erectility, and described tray moving mechanism is set to make described maintenance base portion rotation under the state of the attitude of keeping the described carriage that described maintenance base portion keeps;
Drive division, described drive division drives described tray moving mechanism, so that the mobile route of the described carriage that the described maintenance base portion of formation keeps between the first conveyance route that is used for the described carriage of conveyance and the second conveyance route.
2. transfer device according to claim 1, wherein said transfer device further comprises meshing part, described meshing part is arranged at described maintenance base portion, is used for the engaging piece engagement of described carriage and supports described carriage.
3. transfer device according to claim 2, wherein said transfer device further comprise the transmission of power of the described tray moving mechanism Poewr transmission mechanism to described meshing part.
4. according to claim 2 or 3 described transfer devices, wherein said meshing part comprise as with the engagement end of the part of the engaging piece engagement of described carriage; And
Described meshing part is connected to the position near the described upper end of described maintenance base portion, so that the upper-end part of driving of described maintenance base portion is compared in the top in described engagement end.
5. each described transfer device in 4 according to claim 2, wherein said maintenance base portion comprises:
Perpendicular length section, described perpendicular long section rotatably connects described meshing part;
Protuberance, described protuberance comprise the support sector that loads described carriage and support described carriage from the below, and are set to give prominence in the horizontal direction from the bottom of described perpendicular long section,
Described maintenance base portion is driven, so that configure the pivot of the described support sector of described maintenance base portion on the parallel direction of described the first conveyance route and the second conveyance route, at the center line of described the first conveyance route of distance and the second conveyance route equidistance.
6. each described transfer device in 5 according to claim 1, wherein, described tray moving mechanism further has:
Fixed base; And
Bent axle, described bent axle is driven by described drive division, and is connected between described fixed base and the described maintenance base portion.
7. substrate board treatment comprises:
Process chamber is for the treatment of substrate;
The first conveyance route and the second conveyance route are used for keeping with the erectility conveyance carriage of substrate, and are arranged in the described process chamber;
Transfer device comprises:
Tray moving mechanism, described tray moving mechanism have the maintenance base portion that described carriage is remained erectility, and described tray moving mechanism is set to make described maintenance base portion rotation under the state of the attitude of keeping the described carriage that described maintenance base portion keeps,
Drive division, described drive division drives described tray moving mechanism, so that the mobile route of the described carriage that the described maintenance base portion of formation keeps between the first conveyance route and the second conveyance route.
8. substrate board treatment according to claim 7, wherein, described process chamber can be kept vacuum state in described process chamber, and the described drive division of described transfer device has the engine that is disposed at outside the described process chamber.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010121964 | 2010-05-27 | ||
| JP2010-121964 | 2010-05-27 | ||
| PCT/JP2011/002918 WO2011148633A1 (en) | 2010-05-27 | 2011-05-25 | Traverse device and substrate processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102859677A true CN102859677A (en) | 2013-01-02 |
| CN102859677B CN102859677B (en) | 2015-04-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180020937.XA Active CN102859677B (en) | 2010-05-27 | 2011-05-25 | Traverse device and substrate processing device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5463417B2 (en) |
| KR (1) | KR101477370B1 (en) |
| CN (1) | CN102859677B (en) |
| TW (1) | TWI465379B (en) |
| WO (1) | WO2011148633A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI514501B (en) * | 2013-09-17 | 2015-12-21 | Hon Tech Inc | Electronic component moving mechanism and its application of the picking methods and test equipment |
| KR101983895B1 (en) * | 2017-05-29 | 2019-05-29 | 한국알박(주) | Rotational clamping device |
| WO2019037873A1 (en) * | 2017-08-25 | 2019-02-28 | Applied Materials, Inc. | Assembly for lifting or lowering a carrier, apparatus for transportation of a carrier in a vacuum chamber, and method for lifting or lowering a carrier |
| WO2019096427A1 (en) * | 2017-11-20 | 2019-05-23 | Applied Materials, Inc. | Magnetic levitation system, vacuum system, and method of transporting a carrier |
| JP7015182B2 (en) | 2018-02-09 | 2022-02-02 | ナカ工業株式会社 | Ceiling access door |
| JP7425701B2 (en) | 2020-09-16 | 2024-01-31 | 芝浦メカトロニクス株式会社 | Board transfer device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55161718A (en) * | 1979-05-29 | 1980-12-16 | Yooken:Kk | Transfer unit for conveyor line |
| JP2007039157A (en) * | 2005-08-01 | 2007-02-15 | Ulvac Japan Ltd | Conveying device, vacuum treatment device and conveying method |
| WO2009107728A1 (en) * | 2008-02-28 | 2009-09-03 | 株式会社 アルバック | Transfer apparatus, vacuum processing apparatus and transfer method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6259616U (en) * | 1985-09-30 | 1987-04-13 | ||
| JP3517845B2 (en) * | 1992-10-07 | 2004-04-12 | 日本電気硝子株式会社 | Glass tube packing equipment |
| JPH06179504A (en) * | 1992-12-14 | 1994-06-28 | Daifuku Co Ltd | Load conveying/transferring device |
| JPH06338465A (en) * | 1993-05-31 | 1994-12-06 | Mitsubishi Heavy Ind Ltd | Plasma cvd device |
| JP3617860B2 (en) * | 1994-09-16 | 2005-02-09 | 株式会社東芝 | Substrate processing method and substrate processing apparatus |
| JP3068768B2 (en) * | 1995-06-30 | 2000-07-24 | 日立造船株式会社 | Shift table equipment for continuous casting-rolling line |
| JP2963683B2 (en) * | 1998-01-14 | 1999-10-18 | 共和機械株式会社 | Egg transfer device |
| JP4096404B2 (en) * | 1998-04-15 | 2008-06-04 | 神鋼電機株式会社 | Externally installed loadport device in semiconductor manufacturing equipment |
| JP2000286320A (en) * | 1999-03-31 | 2000-10-13 | Shibaura Mechatronics Corp | Substrate transfer apparatus |
| JP2002203885A (en) * | 2000-12-27 | 2002-07-19 | Anelva Corp | Inter-back type apparatus for processing substrate |
| DE102005061563A1 (en) * | 2005-12-22 | 2007-07-19 | Applied Materials Gmbh & Co. Kg | Plant for the treatment of substrates and processes |
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2011
- 2011-05-25 JP JP2012517143A patent/JP5463417B2/en active Active
- 2011-05-25 CN CN201180020937.XA patent/CN102859677B/en active Active
- 2011-05-25 WO PCT/JP2011/002918 patent/WO2011148633A1/en active Application Filing
- 2011-05-25 KR KR1020127028194A patent/KR101477370B1/en active IP Right Grant
- 2011-05-27 TW TW100118753A patent/TWI465379B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55161718A (en) * | 1979-05-29 | 1980-12-16 | Yooken:Kk | Transfer unit for conveyor line |
| JP2007039157A (en) * | 2005-08-01 | 2007-02-15 | Ulvac Japan Ltd | Conveying device, vacuum treatment device and conveying method |
| WO2009107728A1 (en) * | 2008-02-28 | 2009-09-03 | 株式会社 アルバック | Transfer apparatus, vacuum processing apparatus and transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2011148633A1 (en) | 2013-07-25 |
| CN102859677B (en) | 2015-04-01 |
| KR101477370B1 (en) | 2014-12-30 |
| KR20130018806A (en) | 2013-02-25 |
| TWI465379B (en) | 2014-12-21 |
| WO2011148633A1 (en) | 2011-12-01 |
| JP5463417B2 (en) | 2014-04-09 |
| TW201206806A (en) | 2012-02-16 |
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