CN102556665A - Base plate transfer device - Google Patents

Base plate transfer device Download PDF

Info

Publication number
CN102556665A
CN102556665A CN201110385151XA CN201110385151A CN102556665A CN 102556665 A CN102556665 A CN 102556665A CN 201110385151X A CN201110385151X A CN 201110385151XA CN 201110385151 A CN201110385151 A CN 201110385151A CN 102556665 A CN102556665 A CN 102556665A
Authority
CN
China
Prior art keywords
arm
miniature gears
supporting
tooth bar
mobile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201110385151XA
Other languages
Chinese (zh)
Inventor
金孝元
裵光明
郑贤应
金玄东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUTURE INDUSTRIES Co Ltd
Original Assignee
FUTURE INDUSTRIES Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUTURE INDUSTRIES Co Ltd filed Critical FUTURE INDUSTRIES Co Ltd
Publication of CN102556665A publication Critical patent/CN102556665A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/025—Arms extensible telescopic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • B25J9/103—Gears specially adapted therefor, e.g. reduction gears with backlash-preventing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

The invention relates to a base plate transfer device, comprising a bottom rack; an arm mechanism with a plurality of arms; a drive unit for moving one of the arm; a linkage mechanism with a plurality of small gears and a plurality of racks, wherein the small gears are used for conversing the linear movement of the drive unit into the rotary movement to make the arm move in a linkage way, the racks are engaged with the small gears and the rotary movement of the small gears is conversed into the linear movement. According to the invention, the whole size is reduced and simultaneously the loading step and the unloading step of the base plate are performed and the base plate is made to move by relatively long distant. Even though the temperature changes during the process of performing the loading step and the unloading step of the base plate, the base plate is also made to move by precise distance.

Description

The substrate transfer device
Technical field
The present invention relates to a kind of substrate transfer device that is used for transferring the substrate that uses at the manufacturing electronic building brick.
Background technology
Solar cell (Solar Cell), semiconductor element, read out instrument etc. (below, be called " electronic building brick ") needs are through the working procedures manufacturing.Such Fabrication procedure comprises: go up depositing of thin film operations such as deposited conductor, quartz conductor, dielectric at the substrate that is used to make electronic building brick (Substrate); The etching work procedure that carries out for the film with deposition forms predetermined pattern; The matting of removal foreign matter etc. etc.These operations are carried out in the different processes chamber respectively.Minimize for substrate handover time that will be between processing chamber etc. and increase productivity, and, utilized the incorporate substrate board treatment of processing chamber for the ease of the maintenance management processing chamber.This substrate board treatment is divided into centralized and inline type according to the collocation form of processing chamber.
Fig. 1 is the skeleton diagram of centralized substrate board treatment, and Fig. 2 is the skeleton diagram of inline type substrate board treatment.
With reference to Fig. 1, centralized substrate board treatment 100 is to be the structure of a plurality of processing chambers 102 of center configuration to transfer chamber 101.That is, processing chamber 102 is around transferring chamber 101 configurations.
With reference to Fig. 2, the substrate board treatment 100 of inline type is to transfer chamber 101 along long the formation longways of X-direction, and processing chamber 102 separates the prescribed distance configuration along X-direction.In inline type substrate board treatment 100, processing chamber 102 is that baseline configuration is in the both sides (Y direction) of transferring chamber 101 to transfer substrate 101.
In the substrate board treatment 100 of centralized substrate board treatment 100 as shown in Figure 1 like this and inline type as shown in Figure 2, in transferring chamber 101, be provided for transferring the substrate transfer device 103 of substrate (not shown).
Substrate transfer device 103 carry out repeatedly with substrate be loaded into the pairing processing chamber 102 of process flow in, unload carried base board during the end of job in this processing chamber 102, afterwards to the pairing processing chamber 102 cargo-carring operations of next process flow.Substrate transfer device 103 comprises the arm 1031 of supporting substrates for the loading or unloading substrate.Substrate transfer device 103 moves arm 1031 between processing chamber 102 and handover chamber 101, thereby carries out loading operation and unloading operation to substrate.Arm 1031 has sufficiently long length, so that whole base plate can be positioned at processing chamber 102 inside, or whole base plate can be positioned at processing chamber 102 outsides.Therefore, substrate transfer device 103 integral body have sizable size.
With reference to Fig. 1, in the centralized substrate board treatment 100, substrate transfer device 103 be the center rotation with the S. A. so that arm 1031 towards the processing chamber 102 of loading or unloading substrate.Therefore, in the centralized substrate board treatment 100, with processing chamber 102 collisions, transferring chamber 101 needs the formation large-size when preventing substrate transfer device 103 rotation.When the size of transferring chamber 101 became big, arm 1031 also will move than long travel (stroke), so substrate transfer device 103 also should form more large scale.Like this; Not only increase and be used to make substrate transfer device 103 and the manufacturing expense of transferring chamber 101; Also increase substrate transfer device 103 and carry out miles of relative movement substrate in the process of the loading operation of substrate and unloading operation, thus the problem that exists production time to prolong.
With reference to Fig. 2, in the substrate board treatment 100 of inline type, substrate transfer device 100 moves so that arm 1031 is positioned at processing chamber 102 sides that are used for the loading or unloading substrate to X-direction.Then, substrate transfer device 103 is the center rotation with the S. A., thereby makes arm 1031 in being configured in the processing chamber 102 of transferring chamber 101 both sides.Therefore, at the substrate board treatment 100 of inline type, with processing chamber 102 collisions, and can move along X-direction when preventing substrate transfer device 103 rotation, transferring chamber 101 needs the formation large-size.When the size of transferring chamber 101 became big, arm 1031 also will move than long travel (stroke), so substrate transfer device 103 also should form more large scale.Like this; Not only increase and be used to make substrate transfer device 103 and the manufacturing expense of transferring chamber 101; Also increase substrate transfer device 103 and carry out miles of relative movement substrate in the process of the loading operation of substrate and unloading operation, thus the problem that exists production time to prolong.
Summary of the invention
The present invention proposes in order to solve as stated problem, the object of the present invention is to provide a kind of substrate transfer device, when can reduce overall dimensions, for the loading operation of carrying out substrate can move than long travel (Stroke) with the unloading operation.
The substrate transfer device that the present invention relates to can comprise: underframe is provided with the bottom tooth bar; Transfer arm is combined with said bottom tooth bar ingear and moves miniature gears, and is combined in movably on the said underframe; Driver element moves said transfer arm in order to rotate said mobile miniature gears; Bindiny mechanism; Be combined with the connection miniature gears of connection tooth bar mobile and rotation along with moving of said connection tooth bar along with the rotation of said mobile miniature gears; When said transfer arm is mobile highlightedly from said underframe, moves and give prominence to from said transfer arm to the outstanding direction of said transfer arm; And supporting arm, be used for supporting substrates, and be combined with mobile supporting tooth bar along with the rotation of said connection miniature gears.When said bindiny mechanism was mobile highlightedly from said transfer arm, said supporting arm can move to the outstanding direction of said bindiny mechanism from said bindiny mechanism highlightedly.Is that benchmark is given prominence to first direction and the second direction opposite with said first direction in order to make said bindiny mechanism and said supporting arm with said underframe, and said driver element can make said transfer arm move to said first direction and said second direction.
Substrate transfer device according to the present invention can comprise: underframe; Arm mechanism is used for moving substrate, and is included in a plurality of arms (Arm) that between the second place of said underframe, move from the outstanding primary importance of said underframe and overlapped laminated; Driver element moves some in the said arm, makes said arm be arranged in a certain position of the said primary importance or the said second place; And link gear, be combined on the said arm, and some all the other arms that make that move in the said arm through said driver element move with linking.Said link gear can comprise: a plurality of miniature gearss are used for straight-line motion with said driver element and convert to and rotatablely move; And a plurality of tooth bars, with said pinion, convert rotatablely moving of said miniature gears to straight-line motion.Said driver element can move some in the said arm, so that said arm mechanism is a benchmark with said underframe is outstanding to first direction and the second direction opposite with said first direction.
Description of drawings
Fig. 1 is the skeleton diagram of centralized substrate board treatment.
Fig. 2 is the skeleton diagram of the substrate board treatment of inline type.
Fig. 3 and Fig. 4 are the approximate three-dimensional maps of the substrate transfer device that the present invention relates to.
Fig. 5 is the summary side elevation of the substrate transfer device that the present invention relates to.
Fig. 6 is the summary exploded perspective view of the substrate transfer device that the present invention relates to.
Fig. 7 and Fig. 8 are the concept maps that is used to explain the action relationships of the substrate transfer device that the present invention relates to.
Fig. 9 and Figure 10 are the concept maps that is used to explain the action relationships of the auxiliary miniature gears that the present invention relates to.
Figure 11 be the present invention relates to first connect miniature gears approximate three-dimensional map.
Figure 12 is the general principal view of the marriage relation of the guide that the present invention relates to of expression.
Figure 13 is the first play compensation mechanism that the present invention relates to and the approximate three-dimensional map of the second play compensation mechanism.
Figure 14 and Figure 15 are the concept maps that is used to explain the action relationships of the first play compensation mechanism that the present invention relates to and the second play compensation mechanism.
The specific embodiment
Below, the preferred embodiment of the substrate transfer device that present invention will be described in detail with reference to the accompanying relates to.
With reference to Fig. 3 to Fig. 5, the substrate transfer device 1 that the present invention relates to comprises: arm mechanism 2 is used for moving substrate (not shown); Link gear 3 (shown in Fig. 5) is used for moving to interlock each other a plurality of arms (Arm) 21,22,23 that said arm mechanism 2 is had; And driver element 4, be provided for moving the propulsive effort of said arm mechanism 2.Said arm mechanism 2 is combined on the underframe 1a.Said substrate is to use when being used to make electronic building bricks such as solar cell (Solar Cell), semiconductor element, read out instrument.For example, said substrate can be glass (Glass) substrate, metal (Metal) substrate, plastics (Plastic) substrate etc.
Said arm 21,22,23 can move from said underframe 1a through said driver element 4 and said link gear 3 highlightedly.Thus, said arm 21,22,23 can be shared separately and realize being used to carry out the stroke that loads operation and unloading operation.Therefore, the substrate transfer device 1 that the present invention relates to can make said arm 21,22,23 move than long travel (Stroke), so that carry out loading operation and unloading operation to said substrate.Said arm 21,22,23 can move on said underframe 1a through said driver element 4 and said link gear 3 overlappedlyly and range upon range ofly.So the substrate transfer device 1 that the present invention relates to can form the stroke of realizing with said arm 21,22,23 and compare relatively little size.Therefore, when the substrate transfer device 1 that the present invention relates to can reduce overall dimensions, for the loading operation of carrying out substrate can move said arm mechanism 2 than long travel with the unloading operation.
The substrate transfer device 1 that the present invention relates to moves said arm 21,22,23 by said link gear 3 with linking.Said link gear 3 can comprise miniature gears (Pinion Gear) and the tooth bar (Rack Gear) that combines with said arm 21,22,23 respectively.Said miniature gears converts the straight-line motion of said driver element 4 to and rotatablely moves, and said tooth bar converts rotatablely moving of said miniature gears to straight-line motion.Thus; When some in the said arm 21,22,23 carries out straight-line motion through said driver element 4; Said miniature gears converts straight-line motion to and rotatablely moves; And said tooth bar converts said rotatablely moving to straight-line motion, thereby said arm 21,22,23 can link each other and carry out straight-line motion.Like this, said arm 21,22,23 can move with linking and give prominence to from said underframe 1a through said link gear 3, thereby maybe can move overlapped laminated on said underframe 1a through said link gear 3 with linking.Can utilize band (Belt) formula, line (Wire) formula, ball-screw (Ball screw) formula, cylinder (Cylinder) formula in order to move said arm 21,22,23; But the substrate transfer device 1 that the present invention relates to links through the link gear 3 that utilizes miniature gears and tooth bar and moves said arm 21,22,23, thereby can obtain following action effect.
At first, when utilizing belt, there is following problem in order to move said arm 21,22,23.To the deposition procedures of said substrate, etching work procedure etc. is under roughly 80 ℃～180 ℃ high temperature, to carry out.That is, processing chamber (not shown) inside that is used to carry out said deposition procedures, etching work procedure etc. is configured to quite high hot environment, can be set at different temperatures according to said each processing chamber of operation type.So, when the belt that is used for mobile said arm 21,22,23 moves between said processing chamber, along with the said belt of temperature traverse stretches.Therefore; Time of in said processing chamber, being detained according to said processing chamber temperature inside, said arm 21,22,23 etc.; The telescopic level of said belt is different, and according to the telescopic level of said belt, the miles of relative movement of said arm 21,22,23 also changes.Therefore, utilize the arm 21,22,23 of belt to have the problem that can not said substrate be moved constant distance.When utilizing the line formula, also there is following problem, because said line is according to the distortion that temperature traverse shrinks, expansion etc. causes, so can not said substrate be moved constant distance in order to move said arm 21,22,23.Therefore, when utilizing belt or line formula, there is the problem that reduces the said loading operation and the accuracy of unloading operation in order to move said arm 21,22,23.
Different therewith; The substrate transfer device 1 that the present invention relates to has adopted the link gear 3 that utilizes miniature gears and tooth bar; Even so carry out temperature in the process of the loading operation of said substrate and unloading operation is changed, also can said substrate be moved constant distance.Therefore, the substrate transfer device 1 that the present invention relates to can improve the accuracy of said loading operation and unloading operation.
Secondly, when utilizing ball screw type, need on each said arm 21,22,23, combine in the ball-screw, possess the motor that is used to rotate said ball-screw in order to move said arm 21,22,23.That is, need with the cooresponding a plurality of motors of the quantity of said arm 21,22,23.Thus, when Master Cost increases, there is the problem that is difficult to control said motor in the process of carrying out said loading operation and unloading operation.And, when said motor combines with said arm 21,22,23 respectively, increasing the weight of said arm 21,22,23, sagging problem takes place in arm 21,22,23 described in the process of carrying out said loading operation and unloading operation thereby exist.
In contrast; The substrate transfer device 1 that the present invention relates to links through the link gear 3 that utilizes miniature gears and tooth bar and moves said arm 21,22,23; Therefore can utilize a driver element 4 to move said arm 21,22,23; Thereby when fee of material can be reduced, in the process of carrying out said loading operation and unloading operation, can be convenient to control said arm 21,22,23.And the substrate transfer device 1 that the present invention relates to can alleviate the weight of said arm 21,22,23, thereby can prevent at arm 21,22,23 described in the process of carrying out said loading operation and unloading operation sagging problem to take place.
Secondly, when utilizing the cylinder formula, need on each said arm 21,22,23, combine cylinder body in order to move said arm 21,22,23.Thus, when fee of material increases, exist in the problem that is difficult to control said cylinder body in the process of carrying out said loading operation and unloading operation.And, combine with said arm 21,22,23 respectively through said cylinder body, can increase the weight that said arm 21,22,23 has, sagging problem possibly take place in arm 21,22,23 described in the process of carrying out said loading operation and unloading operation thereby exist in.
Different therewith; The substrate transfer device 1 that the present invention relates to links through the link gear 3 that utilizes miniature gears and tooth bar and moves said arm 21,22,23; Therefore can utilize a driver element 4 to move said arm 21,22,23; Thereby when Master Cost can be reduced, in the process of carrying out said loading operation and unloading operation, can be convenient to control said arm 21,22,23.And the substrate transfer device 1 that the present invention relates to can alleviate the weight that said arm 21,22,23 has, thereby can prevent at arm 21,22,23 described in the process of carrying out said loading operation and unloading operation sagging problem to take place.
Specify the preferred embodiment of said arm mechanism 2, said link gear 3 and said driver element 4 with reference to the accompanying drawings.
With reference to Fig. 3 to Fig. 5, said arm mechanism 2 comprises transfer arm 21, bindiny mechanism 22 and supporting arm 23.
Said transfer arm 21 is combined on the said underframe 1a movably.When being benchmark with Fig. 5, said transfer arm 21 is positioned at the upside of said underframe 1a, and said bindiny mechanism 22 is positioned at the upside of said transfer arm 21, and said supporting arm 23 is positioned at the upside of said bindiny mechanism 22.As shown in Figure 4, said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 can be to move from the outstanding mode of said underframe 1a.Said bindiny mechanism 22 can move from the outstanding direction of said underframe 1a to said transfer arm 21 from said transfer arm 21 highlightedly.Said supporting arm 23 can move from the outstanding direction of said underframe 1a to said transfer arm 21 from said bindiny mechanism 22 highlightedly.So said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 can be shared the stroke of realizing being used to carry out said loading operation and unloading operation.Therefore, the substrate transfer device 1 that the present invention relates to is in order to carry out the said loading operation of said substrate and unloading operation, and said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 are moved than long travel.
Shown in Fig. 3 and 5, said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 can overlappedly and range upon range of be positioned on the said underframe 1a.So, to compare with the stroke that said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 are realized, the substrate transfer device 1 that the present invention relates to can form less size.Therefore, when the substrate transfer device 1 that the present invention relates to can reduce overall dimensions, can with the unloading operation said arm mechanism 2 be moved than long travel for the loading operation of carrying out substrate.Thus, can reduce to be provided with in the substrate board treatment (not shown) size of the handover chamber (not shown) of the substrate transfer device 1 that the present invention relates to.Therefore; The substrate transfer device 1 that the present invention relates to not only can reduce the manufacturing expense that is used to make the handover chamber; Can also shorten and carry out, thereby shorten production time the loading operation of said substrate and the miles of relative movement of substrate described in the process that unloads operation.The substrate transfer device 1 that the present invention relates to is all applicable to centralized substrate board treatment (not shown) and inline type substrate board treatment (not shown).
Said transfer arm 21 can move to first direction (the A direction of arrow) and the second direction (the B direction of arrow) opposite with said first direction.
Said transfer arm 21 can move to said first direction (the A direction of arrow) from said underframe 1a highlightedly.When said transfer arm 21 from said underframe 1a when said first direction (the A direction of arrow) moves highlightedly, said bindiny mechanism 22 moves to said first direction (the A direction of arrow) from said transfer arm 21 highlightedly.And said supporting arm 23 moves to said first direction (the A direction of arrow) from said bindiny mechanism 22 highlightedly.That is, along with said transfer arm 21 moves to said first direction (the A direction of arrow), said bindiny mechanism 22 and said supporting arm 23 move to said first direction (the A direction of arrow) from said underframe 1a highlightedly.
Said transfer arm 21 can move to said second direction (the B direction of arrow) from said underframe 1a highlightedly.When said transfer arm 21 from said underframe 1a when said second direction (the B direction of arrow) moves highlightedly, said bindiny mechanism 22 moves to said second direction (the B direction of arrow) from said transfer arm 21 highlightedly.And said supporting arm 23 moves to said second direction (the B direction of arrow) from said bindiny mechanism 22 highlightedly.That is, along with said transfer arm 21 to the moving of said second direction (the B direction of arrow), said bindiny mechanism 22 and said supporting arm 23 move to said second direction (the B direction of arrow) from said underframe 1a highlightedly.
Like this, said bindiny mechanism 22 and said supporting arm 23 can be benchmark with said underframe 1a, and be mobile highlightedly along the arbitrary direction of moving direction in said first direction (the A direction of arrow) and said second direction (the B direction of arrow) of said transfer arm 21.Therefore, when the substrate transfer device 1 that the present invention relates to was applicable to the inline type substrate board treatment, the substrate transfer device 1 that the present invention relates to also needn't rotate can be carried out for loading operation that is configured in the processing chamber of transferring the chamber both sides and unloading operation.So; The inline type substrate board treatment that the substrate transfer device 1 that the present invention relates to is suitable for; Needn't in said handover chamber, guarantee the required space of said substrate transfer device 1 rotation; Thereby further reduce the size of said handover chamber, can also shorten and carry out said loading operation and the required production time of unloading operation.
Said transfer arm 21 integral body can form rectangular plate shape.Said underframe 1a can form identical with the general size of said transfer arm 21, and perhaps the size than said transfer arm 21 is big.Said underframe 1a integral body can form rectangular plate shape.
With reference to Fig. 3 to Fig. 5, said bindiny mechanism 22 is between said transfer arm 21 and said supporting arm 23.Said bindiny mechanism 22 is combined on the said transfer arm 21 movably.In said bindiny mechanism 22, can be combined with said supporting arm 23 with transferring.As shown in Figure 4, said bindiny mechanism 22 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) from said underframe 1a highlightedly.As shown in Figure 5, said bindiny mechanism 22 can move and do, on the said underframe 1a overlappedlyly and range upon range ofly between said transfer arm 21 and said supporting arm 23.
With reference to Fig. 3 to Fig. 5, said bindiny mechanism 22 can comprise a plurality of connecting arms 221,222.Said connecting arm 221,222 can move to interlock through said link gear 3 each other.For example, said bindiny mechanism 22 can comprise first connecting arm 221 and second connecting arm 222.Said first connecting arm 221 is combined on the said transfer arm 21 movably.Said first connecting arm 221 can be through said link gear 3 and along with moving of said transfer arm 21 linked mobile.When said transfer arm 21 was mobile highlightedly from said underframe 1a, said first connecting arm 221 moved to said transfer arm 21 outstanding directions from said transfer arm 21 highlightedly.Said second connecting arm 222 is located between said first connecting arm 221 and the said supporting arm 23.Said second connecting arm 222 combines with said first connecting arm 221 movably.Said second connecting arm 222 can be through said link gear 3 and along with moving of said first connecting arm 221 linked mobile.When said first connecting arm 221 was mobile highlightedly from said transfer arm 21, said second connecting arm 222 moved to said first connecting arm, 221 outstanding directions from said first connecting arm 221 highlightedly.Said supporting arm 23 is combined in said second connecting arm 222 movably.Said supporting arm 23 can be through said link gear 3 and along with moving of said second connecting arm 222 linked mobile.When said second connecting arm 222 was mobile highlightedly from said first connecting arm 221, said supporting arm 23 moved to said second connecting arm, 222 outstanding directions from said second connecting arm 222 highlightedly.
Though not shown, said bindiny mechanism 22 also can comprise a connecting arm 221.At this moment, said connecting arm 221 can combine with said transfer arm 21 towards the one side of said underframe 1a movably.Said connecting arm 221 is combined with said supporting arm 23 movably on the another side of said supporting arm 23.Though not shown, said bindiny mechanism 22 also can comprise the connecting arm 221 more than three.At this moment, said connecting arm 221 can move to interlock through said link gear 3 each other.The connecting arm that in said connecting arm 221, is positioned near said underframe 1a can combine with said transfer arm 21 movably.The connecting arm that in said connecting arm 221, is positioned near said supporting arm 23 can combine with said supporting arm 23 movably.
With reference to Fig. 5 and Fig. 6, said connecting arm 221,222 can comprise two link span 221a, 221b, 222a, 222b respectively.Said link span 221a, 221b, 222a, 222b form respectively along the strip of the moving direction of said transfer arm 21.Be combined with said link gear 3 respectively in that said link span 221a, 221b, 222a, 222b are last.So said link span 221a, 221b, 222a, 222b can move to interlock through said link gear 3 each other.Said link span 221a, 221b, 222a, 222b are separating prescribed distance with the perpendicular direction (C direction of principal axis) of the transfer direction of said transfer arm 21 respectively.Therefore, the weight that said connecting arm 221,222 is had separately can be reduced, thereby said connecting arm 221,222 sag that causes of weight separately can be prevented.
When said connecting arm 221,222 comprises two link span 221a, 221b, 222a, 222b respectively,, correspondingly reduce the supporting power that is used to support said supporting arm 23 though can reduce the weight that said connecting arm 221,222 is had separately.Therefore, the sagging phenomenon of said supporting arm 23 possibly take place.When said supporting arm 23 upper supports had substrate, it is high that sagging possibility takes place said supporting arm 23.Sagging in order to prevent this said supporting arm 23, at least one can comprise the reinforcement feature 22a that is used to strengthen supporting power in said connecting arm 221,222.
Said reinforcement feature 22a is connected with two link span 221a, 221b, 222a, 222b that said connecting arm 221,222 is had separately, thereby can strengthen the supporting power that said connecting arm 221,222 has.For example, when said bindiny mechanism 22 comprised said first connecting arm 221 and said second connecting arm 222, said reinforcement feature 22a can be connected with two link span 221a, the 221b that said first connecting arm 221 has.Therefore, said reinforcement feature 22a can strengthen the supporting power that said first connecting arm 221 has, thereby can strengthen the supporting power that second connecting arm 222 that is used to support said supporting arm 23 has.Though not shown, said reinforcement feature 22a also can only be formed on said second connecting arm 222, also can all be formed on said first connecting arm 221 and said second connecting arm 222.Said reinforcement feature 22a can form the length of the length that is shorter than said connecting arm 221,222 along the moving direction of said transfer arm 21.Said reinforcement feature 22a integral body can form rectangular plate shape.Though not shown, said reinforcement feature 22a also can append and be formed on the said supporting arm 23.
With reference to Fig. 3 to Fig. 5, said supporting arm 23 is combined in the said bindiny mechanism 22 movably.When being benchmark with Fig. 5, said supporting arm 23 is positioned at the upside of said bindiny mechanism 22.As shown in Figure 4, said supporting arm 23 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) from said underframe 1a highlightedly.Said supporting arm 23 can move with said transfer arm 21 and said supporting arm 23 on said underframe 1a overlappedlyly and range upon range ofly.When said bindiny mechanism 22 comprised a plurality of connecting arm 221,222, said supporting arm 23 was combined in the connecting arm that is positioned in the said connecting arm 221,222 near said supporting arm 23 movably.For example, when said bindiny mechanism 22 comprised said first connecting arm 221 and said second connecting arm 222, said supporting arm 23 can combine with said second connecting arm 222 movably.Said supporting arm 23 can move to said first connecting arm, the 221 outstanding directions that move from said second connecting arm 222 highlightedly.
With reference to Fig. 5 and Fig. 6, said supporting arm 23 can comprise two bearing support 23a, 23b.Said bearing support 23a, 23b form rectangular (Bar) shape along the moving direction of said transfer arm 21.At said bearing support 23a, 23b is last can be combined with said link gear 3 respectively.Therefore, said bearing support 23a, 23b can move to interlock through said link gear 3 each other.When said second connecting arm 222 comprises two link span 222a, 222b, at two link span 222a, last said bearing support 23a, the 23b of being combined with respectively movably of 222b.Said bearing support 23a, 23b separate prescribed distance in the direction vertical with the moving direction of said transfer arm 21 (C direction of principal axis) respectively.Therefore, can reduce the weight that said supporting arm 23 has, thereby it is sagging to prevent that the weight of said supporting arm 23 from causing.
Said supporting arm 23 can support said substrate.When being benchmark with Fig. 5, said substrate is supported in the upside of said supporting arm 23.Said supporting arm 23 can comprise the support unit 231 that is used to support said substrate.Shown in the enlarged drawing of Fig. 4, said support unit 231 integral body can form discoid.Said support unit 231 can comprise: groove 2311 is formed on middle body; Areal of support 2312 forms annular by said groove 2311.Said substrate is by said areal of support 2312 contact supportings.Therefore, said supporting arm 23 reduces the area of said support unit 231 and said substrate contacts through said groove 2311, thereby reduces the chance that said substrate is damaged, and can support said substrate through the enough supporting powers of said areal of support 2312 usefulness.Said groove 2311 can form discoid.Said areal of support 2312 can form circular.Said supporting arm 23 also can comprise a plurality of said support units 231.At this moment, said support unit 231 can separate prescribed distance and is provided with a plurality of along the moving direction of said transfer arm 21.
With reference to Fig. 5 to Fig. 8, said link gear 3 can move said arm 21,22,23 with linking each other.Said link gear 3 can combine with said arm mechanism 2.Said link gear 3 comprises a plurality of miniature gearss and a plurality of tooth bar.When some in the said arm 21,22,23 moved through said driver element 4, said miniature gears converted straight-line motion to and rotatablely moves, and said tooth bar converts rotatablely moving of said miniature gears to straight-line motion.Thus, said arm 21,22,23 can move with linking each other.Said miniature gears is a benchmark with the moving direction of said transfer arm 21 respectively, can combine with said arm 21,22,23 with the mode of the centre portion that is positioned at each said arm 21,22,23.
Said link gear 3 can comprise: bottom tooth bar 31 combines with said underframe 1a; Move miniature gears 32, combine with said transfer arm 21; Connect tooth bar 33 and be connected miniature gears 34, combine with said bindiny mechanism 22; And supporting tooth bar 35, combine with said supporting arm 23.
Said bottom tooth bar 31 be located at said underframe 1a on the face of said transfer arm 21.When being benchmark with Fig. 5, said bottom tooth bar 31 be located at said underframe 1a above.Said bottom tooth bar 31 can form the corresponding length of length that has with said underframe 1a along the transfer direction of said transfer arm 21.Said link gear 3 also can comprise a plurality of bottoms tooth bar 31.Said bottom tooth bar 31 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).
Said mobile miniature gears 32 rotatably is combined on the said transfer arm 21.Said mobile miniature gears 32 is combined on the said transfer arm 21 with said bottom tooth bar 31 with meshing.Said mobile miniature gears 32 can rotate through moving with 31 engagements of said bottom tooth bar of said transfer arm 21.Said link gear 3 also can comprise a plurality of said mobile miniature gearss 32.For example, said link gear 2 can comprise two mobile miniature gearss 32.At this moment, said mobile miniature gears 32 rotatably is combined in respectively on the two sides of said transfer arm 21.The two sides of said transfer arm 21 be towards with two sides of the perpendicular direction (the C direction of principal axis is shown in Fig. 6) of the moving direction of said transfer arm 21.Said link gear 3 comprises the said bottom tooth bar 31 with the corresponding quantity of said mobile miniature gears 32 quantity.Said bottom tooth bar 31 be located at said underframe 1a can with said mobile miniature gears 32 position engaged.Said mobile miniature gears 32 can be a benchmark to the moving direction of said transfer arm 21 and with the length of said transfer arm 21, combines with said transfer arm 21 with the mode of the centre portion that is positioned at said transfer arm 21.
Said connection tooth bar 33 combines with said bindiny mechanism 22.Said connection tooth bar 33 can form along the moving direction of said transfer arm 21 to have and the corresponding length of the length of said bindiny mechanism 22.Said link gear 3 also can comprise a plurality of connection tooth bars 33.At this moment, said connection tooth bar 33 is combined in the said bindiny mechanism 22 with the mode that is spaced from each other predetermined distance in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).
Said connection miniature gears 34 rotatably is combined in the said bindiny mechanism 22.Said link gear 3 also can comprise a plurality of said connection miniature gearss 34.At this moment, said connection miniature gears 34 rotatably is combined in respectively on the two sides of said bindiny mechanism 22.The two sides of said bindiny mechanism 22 be towards with two sides of the perpendicular direction (the C direction of principal axis is shown in Fig. 6) of the moving direction of said transfer arm 21.The length that said connection miniature gears 34 can have with said bindiny mechanism 22 to the moving direction of said transfer arm 21 is benchmark, combines with said bindiny mechanism 22 with the mode of the centre portion that is positioned at said bindiny mechanism 22.
When said bindiny mechanism 22 comprised a plurality of connecting arm 221,222, said link gear 3 can comprise respectively a plurality of tooth bar 33 and a plurality of miniature gearss 34 that are connected of being connected that combine with said connecting arm 221,222.For example, when said bindiny mechanism 22 comprised said first connecting arm 221 and said second connecting arm 222, said link gear 3 can comprise that the first connection tooth bar 331, first connects miniature gears 341, second and connects tooth bar 332, the second connection miniature gears 342.
Said first connects tooth bar 331 combines with said first connecting arm 221.Said first connects tooth bar 331 can mesh with said mobile miniature gears 32, and moves along with the rotation of said mobile miniature gears 32.When the said first connection tooth bar 331 moved along with the rotation of said mobile miniature gears 32, said first connecting arm 221 that is combined with the said first connection tooth bar 331 also moved.Said first connect tooth bar 331 be located at said first connecting arm 221 on the face of said transfer arm 21.When being benchmark with Fig. 5, said first connects the bottom surface that tooth bar 331 is located at said first connecting arm 221.Said first connects tooth bar 331 can form, and the moving direction of the said transfer arm 21 in edge has and the corresponding length of the length of said first connecting arm 221.Said link gear 3 can comprise that also a plurality of first connects tooth bar 331.At this moment, the said first connection tooth bar 331 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).When said first connecting arm 221 comprised two link span 221a, 221b, the said first connection tooth bar 331 was located at said link span 221a respectively, 221b is last.Said link gear 3 comprises with said first of the corresponding quantity of said mobile miniature gears 32 quantity and is connected tooth bar 331.Said first connects tooth bar 331 is located at said first connecting arm 221 and said mobile miniature gears 32 position engaged.
Said first connects miniature gears 341 rotatably is combined on said first connecting arm 221.Said first connects miniature gears 341 can rotate along with moving of said first connecting arm 221.Said link gear 3 can comprise that also a plurality of said first connects miniature gears 341.Said link gear 3 can comprise that two first connect miniature gears 341.At this moment, the said first connection miniature gears 341 rotatably is combined in respectively on the two sides of said first connecting arm 221.The two sides of said first connecting arm 221 be towards with two sides of the perpendicular direction (the C direction of principal axis is shown in Fig. 6) of the moving direction of said transfer arm 21.When said first connecting arm 221 comprised two link span 221a, 221b, the said first connection miniature gears 341 was located at said link span 221a respectively, 221b is last.Said first to connect miniature gears 341 can be benchmark with the length that said first connecting arm 221 has to the moving direction of said transfer arm 21, combines with said first connecting arm 221 with the mode of the centre portion that is positioned at said first connecting arm 221.
Said second connects tooth bar 332 combines with said second connecting arm 222.Said second connects tooth bar 332 can be connected miniature gears 341 engagements with said first, and moves along with the rotation of the said first connection miniature gears 341.When the said second connection tooth bar 332 moved along with the rotation of the said first connection miniature gears 341, said second connecting arm 222 that is combined with the said second connection tooth bar 332 also moved.Said second connect tooth bar 332 be located at said second connecting arm 222 on the face of said first connecting arm 221.When being benchmark with Fig. 5, said second connects the bottom surface that tooth bar 332 is located at said second connecting arm 222.Said second connects tooth bar 332 can form, and the moving direction of the said transfer arm 21 in edge has and the corresponding length of the length of said second connecting arm 222.Said link gear 3 can comprise that also a plurality of second connects tooth bar 332.At this moment, the said second connection tooth bar 332 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).When said second connecting arm 222 comprised two link span 222a, 222b, the said second connection tooth bar 332 was located at said link span 222a respectively, 222b is last.Said link gear 3 comprises that being connected said second of the corresponding quantity of miniature gears 341 quantity with said first connects tooth bar 332.Said second connect that tooth bar 332 is located at said second connecting arm 222 be connected miniature gears 332 position engaged with said first.
Said second connects miniature gears 342 rotatably is combined on said second connecting arm 222.Said second connects miniature gears 342 can rotate along with moving of said second connecting arm 222.Said link gear 3 can comprise that also a plurality of said second connects miniature gears 342.Said link gear 3 can comprise that two second connect miniature gears 342.At this moment, the said second connection miniature gears 342 rotatably is combined in respectively on the two sides of said second connecting arm 222.The two sides of said second connecting arm 222 be towards with two sides of the perpendicular direction (the C direction of principal axis is shown in Fig. 6) of the moving direction of said transfer arm 21.When said second connecting arm 222 comprised two link span 222a, 222b, the said second connection miniature gears 342 was located at said link span 222a respectively, 222b is last.Said second to connect miniature gears 342 can be benchmark with the length that said second connecting arm 222 has to the moving direction of said transfer arm 21, combines with said second connecting arm 222 with the mode of the centre portion that is positioned at said second connecting arm 222.In Fig. 5, illustrated; When said transfer arm 21, said first connecting arm 221, said second connecting arm 222 and said supporting arm 23 are overlapped and range upon range of on said underframe 1a; Said mobile miniature gears 32, said first connects miniature gears 341 and the said second connection miniature gears 342 is not positioned at the situation on the same perpendicular line, but said mobile miniature gears 32, said first connects miniature gears 341 and the said second connection miniature gears 342 can be positioned on the same perpendicular line.
With reference to Fig. 5 to Fig. 8, said supporting tooth bar 35 is combined on the said supporting arm 23.Said supporting tooth bar 35 can be connected miniature gears 342 engagements with said second, and moves along with the rotation of the said second connection miniature gears 342.When said supporting tooth bar 35 moved along with the rotation of the said second connection miniature gears 342, the said supporting arm 23 that is combined with said supporting tooth bar 35 also moved.Said supporting tooth bar 35 be located at said supporting arm 23 on the face of said second connecting arm 222.When being benchmark with Fig. 5, said supporting tooth bar 35 is located at the bottom surface of said supporting arm 23.Said supporting tooth bar 35 can form, and the moving direction of the said transfer arm 21 in edge has and the corresponding length of the length of said supporting arm 23.Said linkage structure 3 also can comprise a plurality of supporting tooth bars 35.At this moment, said supporting tooth bar 35 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).When said second supporting arm 23 comprised two bearing support 23a, 23b, said supporting tooth bar 35 was located at said bearing support 23a respectively, 23b is last.Said link gear 3 comprises the said supporting tooth bar 35 that is connected the corresponding quantity of miniature gears 342 quantity with said second.What said supporting tooth bar 35 was located at said supporting arm 23 is connected miniature gears 342 position engaged with said second.
With reference to Fig. 5 to Fig. 8, said link gear 3 can comprise mobile rack 36.Said mobile rack 36 is combined on the said transfer arm 21.Said mobile rack 36 is connected miniature gears 341 engagements with said first.Said first connects miniature gears 341 is connected tooth bar 332 engagements with said mobile rack 36 respectively with said second.Therefore, when said first connecting arm 221 moved, the said first connection miniature gears 341 made the said second connection tooth bar 332 move when rotating along with said mobile rack 36.When the said second connection tooth bar 332 moved along with the rotation of the said first connection miniature gears 341, said second connecting arm 222 that is combined with the said second connection tooth bar 332 also moved.Said mobile rack 36 is located at said transfer arm 21 on the opposing face of the face of said underframe 1a.When being benchmark with Fig. 5, said mobile rack 36 be located at said transfer arm 21 above.Said mobile rack 36 can form along the moving direction of said transfer arm 21 to have and the corresponding length of the length of said transfer arm 21.Said linkage structure 3 also can comprise a plurality of mobile racks 36.At this moment, said mobile rack 36 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).Said link gear 3 comprises the said mobile rack 36 that is connected the corresponding quantity of miniature gears 341 quantity with said first.What said mobile rack 36 was located at said transfer arm 21 is connected miniature gears 341 position engaged with said first.
With reference to Fig. 5 to Fig. 8, said link gear 3 can comprise that the 3rd connects tooth bar 333.The said the 3rd connects tooth bar 333 is combined on said first connecting arm 221.The said the 3rd connects tooth bar 333 is connected miniature gears 342 engagements with said second.Said second connects miniature gears 342 is connected tooth bar 333 and said supporting tooth bar 35 engagements respectively with the said the 3rd.Therefore, when said second connecting arm 222 moved, the said second connection miniature gears 342 moved said supporting tooth bar 35 when rotating along with said the 3rd connection tooth bar 333.When said supporting tooth bar 35 moved along with the rotation of the said second connection miniature gears 342, the said supporting arm 23 that is combined with said supporting tooth bar 35 also moved.The said the 3rd connects tooth bar 333 is located at being provided with of said first connecting arm 221 said first and connects on the opposite another side of the face of tooth bar 331.When being benchmark with Fig. 5, the said the 3rd connect tooth bar 333 be located at said first connecting arm 221 above.The said the 3rd connects tooth bar 333 can form, and the moving direction of the said transfer arm 21 in edge has and the corresponding length of the length of said first connecting arm 221.Said linkage structure 3 can comprise that also a plurality of the 3rd connects tooth bar 333.At this moment, said the 3rd connection tooth bar 333 is spaced from each other the prescribed distance setting in the direction vertical with the moving direction of said transfer arm 21 (the C direction of principal axis is shown in Fig. 6).Said link gear 3 comprises that being connected the said the 3rd of the corresponding quantity of miniature gears 342 quantity with said second connects tooth bar 333.The said the 3rd connect that tooth bar 333 is located at said first connecting arm 221 be connected miniature gears 342 position engaged with said second.
Below, specify the action relationships of said arm mechanism 2 and said link gear 3 with reference to Fig. 5 to Fig. 8.
At first, as shown in Figure 5, the arm 21,22,23 that said arm mechanism 2 is had is in overlapped and range upon range of state on said underframe 1a.In this state, said driver element 4 (shown in Fig. 4) moves some in the said arm 21,22,23 to said first direction (the A direction of arrow).For example, said driver element 4 can move said transfer arm 21 to said first direction (the A direction of arrow).
Secondly, when said transfer arm 21 when said first direction (the A direction of arrow) moves, as shown in Figure 7, said transfer arm 21 moves to said first direction (the A direction of arrow) from said underframe 1a highlightedly.Along with moving of said transfer arm 21, said mobile miniature gears 32 meshes with said bottom tooth bar 31, and tooth bar 31 is rotated along said bottom.When said mobile miniature gears 32 rotates along with said bottom tooth bar 31, be connected tooth bar 331 with said mobile miniature gears 32 ingears said first and move to said first direction (the A direction of arrow).
Secondly, connect tooth bar 331 when said first direction (the A direction of arrow) moves when said first, as shown in Figure 7, said first connecting arm 221 moves to said first direction (the A direction of arrow) from said transfer arm 21 highlightedly.Along with moving of said first connecting arm 221, said first connects miniature gears 341 and said mobile rack 36 engagements, and is rotated along said mobile rack 36.When the said first connection miniature gears 341 rotates along with said mobile rack 36, be connected the said second connection tooth bar 332 of miniature gears 341 ingears with said first and move to said first direction (the A direction of arrow).
Secondly, connect tooth bar 332 when said first direction (the A direction of arrow) moves when said second, as shown in Figure 7, said second connecting arm 222 moves to said first direction (the A direction of arrow) from said first connecting arm 221 highlightedly.Along with moving of said second connecting arm 222, said second connects miniature gears 342 is connected tooth bar 333 engagements with the said the 3rd, and is rotated along said the 3rd connection tooth bar 333.When the said second connection miniature gears 342 rotates along with said the 3rd connection tooth bar 333, be connected the said supporting tooth bar 35 of miniature gears 342 ingears with said second and move to said first direction (the A direction of arrow).
Secondly, when said supporting tooth bar 35 when said first direction (the A direction of arrow) moves, as shown in Figure 7, said supporting arm 23 moves to said first direction (the A direction of arrow) from said second connecting arm 222 highlightedly.As stated, owing to said arm 21,22,23 moves to interlock through said link gear 3 each other, so can be positioned at from said underframe 1a to the outstanding position of said first direction (the A direction of arrow).Said arm 21,22,23 from said underframe 1a under the state that said first direction (the A direction of arrow) moves highlightedly; When said driver element 4 (shown in Fig. 4) when said second direction (the B direction of arrow) moves said transfer arm 21; As shown in Figure 5, said arm 21,22,23 can move on said underframe 1a overlappedlyly and range upon range ofly.And; When said driver element 4 (shown in Fig. 4) when said second direction (the B direction of arrow) is moved further said transfer arm 21; As shown in Figure 8, said arm 21,22,23 can move to said second direction (the B direction of arrow) from said underframe 1a highlightedly.
With reference to Fig. 5, Fig. 9 and Figure 10, at least one can comprise the first auxiliary miniature gears 3a (shown in Fig. 9) and the second auxiliary miniature gears 3b (shown in Fig. 9) in the miniature gears 32,34 that said link gear 3 is had.The said first auxiliary miniature gears 3a and the said second auxiliary miniature gears 3b form with interconnecting.Therefore, the said first auxiliary miniature gears 3a and the said second auxiliary miniature gears 3b together rotate.The first tooth bar 3c (shown in Fig. 9) engagement in the tooth bar 31,33,35 that the said first auxiliary miniature gears 3a and said link gear 3 are had.The second tooth bar 3d (shown in Fig. 9) engagement in the tooth bar 31,33,35 that the said second auxiliary miniature gears 3b and said link gear 3 are had.The said first tooth bar 3c is combined in different arm 21,22,23 with the said second tooth bar 3d.The said first auxiliary miniature gears 3a and said first tooth bar 3c engagement can be along said first tooth bar 3c rotations.The said second auxiliary miniature gears 3b and said second tooth bar 3d engagement can make the said second tooth bar 3d move.
Shown in figure 10, the first diameter D1 that the said first auxiliary miniature gears 3a has is littler than the second diameter D2 that the said second auxiliary miniature gears 3b has.So when the said first auxiliary miniature gears 3a and said second assisted miniature gears 3b to rotate with predetermined angular R, the said second auxiliary miniature gears 3b was than the longer distance L 2 of distance L 1 rotation of the said first auxiliary miniature gears 3a rotation.Therefore, compare along the distance of said first tooth bar 3c rotation with the said first auxiliary miniature gears 3a, the said second auxiliary miniature gears 3b can move the longer distance of the said second tooth bar 3d.So; The substrate transfer device 1 that the present invention relates to can shorten to said first direction (the A direction of arrow) and mobile 21,22,23 o'clock required time of said arm of said second direction (the B direction of arrow), thereby can shorten production time required when carrying out said loading operation with the unloading operation.
When overlapped and range upon range of direction is defined as vertical direction on said underframe 1a with said arm 21,22,23, comprise in the miniature gears 32,34 that said link gear 3 is had that the miniature gears 32,34 of the said first auxiliary miniature gears 3a and the said second auxiliary miniature gears 3b can be arranged on horizontal direction.The said first auxiliary miniature gears 3a and the said second auxiliary miniature gears 3b are spaced from each other predetermined distance in said vertical direction.Be arranged at horizontal direction with the said first auxiliary miniature gears 3a and the said second auxiliary said first tooth bar 3c of miniature gears 3b ingear and the said second tooth bar 3d in the tooth bar 31,33,35 that also can said link gear 3 be had.The miniature gears 32,34 that does not comprise the said first auxiliary miniature gears 3a and the said second auxiliary miniature gears 3b in the miniature gears 32,34 that can said link gear 3 be had; As shown in Figure 5 be arranged at said vertical direction, ingear tooth bar 31,33,35 also is arranged at said vertical direction therewith.
For example, shown in figure 11, said first connects miniature gears 331 can comprise the first auxiliary miniature gears 331a of connection and the second auxiliary miniature gears 331b that connects.The said first auxiliary miniature gears 331a and said second that connects auxiliaryly is connected miniature gears 331b and interconnects.The said first auxiliary miniature gears 331a of connection and said mobile rack 36 mesh.The said second auxiliary miniature gears 331b that connects is connected tooth bar 332 engagements with said second.The said second auxiliary miniature gears 331b diameter that connects assists the diameter that connects miniature gears 331a big than said first.Thus, when first connecting arm 221 that is combined with the said first connection miniature gears 331 moved, the said second auxiliary connection miniature gears 331b can rotate longer distance than the distance that the said first auxiliary connection miniature gears 331a rotates.Therefore; Be connected miniature gears 331 with said first along with the distance of said mobile rack 36 rotations is compared; The said second auxiliary miniature gears 331b that connects makes the said second connection tooth bar 332 move longer distance, thereby can increase the moving velocity of said second connecting arm 222.
The said first auxiliary miniature gears 331a and said second that connects auxiliaryly is connected miniature gears 331b and can be located at said horizontal direction.The said first auxiliary miniature gears 331a and said second that connects auxiliaryly is connected miniature gears 331b and can be spaced from each other predetermined distance in said vertical direction.Said mobile rack 36 is connected tooth bar 332 and can be set as in said horizontal direction and be spaced from each other predetermined distance with said second.Said mobile rack 36 is connected tooth bar 332 and can be set as respectively with the said first auxiliary miniature gears 331a and said second that is connected and assists that to be connected miniature gears 331b ingear part opposed with said second.
With reference to Fig. 4 to Fig. 8, said driver element 4 moves some in the said arm 21,22,23.Said driver element 4 can move some in the said arm 21,22,23, is that benchmark is outstanding to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) so that make said arm mechanism 2 with said underframe 1a.
Said driver element 4 can be combined on the said transfer arm 21.Thus, said driver element 4 can move said transfer arm 21.When said driver element 4 moves said transfer arm 21, mobile miniature gears 32 rotations that combine with said transfer arm 21.Thus, said bindiny mechanism 22 can move with said supporting arm 23 with linking.Though not shown, said driver element 4 also can be combined on said bindiny mechanism 22 or the said supporting arm 23.At this moment, said driver element 4 can move said bindiny mechanism 22 or said supporting arm 23.
Said driver element 4 moves said transfer arm 21 to said first direction (the A direction of arrow) and said second direction (the B direction of arrow).When said driver element 4 when said first direction (the A direction of arrow) moves said transfer arm 21, the mobile miniature gears 32 that is combined in said transfer arm 21 is to right-hand revolution.Thus, said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 move to said first direction (the A direction of arrow).When said driver element 4 when said second direction (the B direction of arrow) moves said transfer arm 21, the mobile miniature gears 32 that is combined with said transfer arm 21 rotates to anticlockwise direction.Thus, said bindiny mechanism 22 and said supporting arm 23 move to said second direction (the B direction of arrow).
Said driver element 4 moves said transfer arm 21 so that said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 are arranged in a certain position of the primary importance and the second place.Said primary importance is that said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 are from the outstanding position of said underframe 1a.For example; Said primary importance be said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 as shown in Figure 7 from said underframe 1a to the outstanding position of said first direction (the A direction of arrow); And as shown in Figure 8, said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 from said underframe 1a to the outstanding position of said second direction (the B direction of arrow).The said second place is said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 overlapping and range upon range of position on said underframe 1a as shown in Figure 5.
With reference to Fig. 4 and Fig. 6, said driver element 4 can be linear electric motors (Linear motor).At this moment, said driver element 4 comprises and is located at the coil mechanism 41 on the said underframe 1a and is combined in the travel mechanism 42 on the said transfer arm 21.Said coil mechanism 41 is fixedly installed on the said underframe 1a.Said travel mechanism 42 is located on the said underframe 1a movably.In said travel mechanism 42, be provided with a plurality of permanent magnets 421.Said permanent magnet 421 is located in the said travel mechanism 42 on the face of said coil mechanism 41.Said permanent magnet 421 can be adjacent to along the moving direction of said transfer arm 21 be provided with.Said travel mechanism 42 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) through the electromagnetic force that acts between said coil mechanism 41 and the said permanent magnet 421.Along with moving of said travel mechanism 42, the transfer arm 21 that is combined in the said travel mechanism 42 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow).
Though not shown, said driver element 4 also can utilize the belt of cylinder formula, the gear type that uses motor, rack-and-pinion etc. that uses hydraulic actuating cylinder or cylinder, the ball screw type of using motor and ball-screw etc., use motor, pulley and belt etc. to wait to move said transfer arm 21.Though not shown, said driver element 4 can comprise straight-line motion (Linear motion) guide rail that is combined on the said underframe 1a and be combined in straight-line motion (Linear motion) piece in the said travel mechanism 42.The straight-line motion piece that is combined in the said travel mechanism 42 is combined in movably on the linear motion guide rail that combines on the said underframe 1a.Therefore, said travel mechanism 42 can carry out straight line through said linear motion guide rail and said straight-line motion piece and moves.
With reference to Fig. 4 and Fig. 6, the substrate transfer device 1 that the present invention relates to also can comprise a plurality of said arm mechanisms 2.Said arm mechanism 2 is combined in respectively on the said underframe 1a movably.Said arm mechanism 2 is combined in the both sides of said driver element 4 respectively.Therefore, said arm mechanism 2 can together move through said driver element 4.On said driver element 4, can be combined with the transfer arm 21 that said arm mechanism 4 has separately.Said transfer arm 21 can be combined in the both sides of said travel mechanism 42 respectively.Therefore, the substrate transfer device 1 that the present invention relates to can obtain following action effect.The first, the substrate transfer device 1 that the present invention relates to, when large substrate, said arm mechanism 2 is shared the said substrate of supporting, thereby can prevent that the said arm mechanism 2 that weight that said substrate has causes is sagging.The second, the substrate transfer device 1 that the present invention relates to moves said arm mechanism 2 through a driver element 4, thereby can reduce Master Cost.The 3rd, the substrate transfer device 1 that the present invention relates to can be controlled said arm mechanism 2 mobile phase same distances easily in the process of carrying out said loading operation and unloading operation.
With reference to Figure 12, the substrate transfer device 1 that the present invention relates to can comprise a plurality of guides 5.
Said guide 5 guides said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 to carry out straight line respectively and moves.Said guide 5 can form along the moving direction of said transfer arm 21, said bindiny mechanism 22 and said supporting arm 23 is long longways.The substrate transfer device 1 that the present invention relates to can comprise first guide 51, second guide 52, the 3rd guide 53 and the 4th guide 54.
Said first guide 51 is between said underframe 1a and said transfer arm 21.Said first guide 51 is combined on the said underframe 1a.Said transfer arm 21 is combined on first guide 51 movably.The said transfer arm 21 of said first guide, 51 guiding carries out straight line and moves.The substrate transfer device 1 that the present invention relates to also can comprise a plurality of said first guides 51.Said first guide 51 can be a linear motion guide rail.
Said second guide 52 is between said transfer arm 21 and said first connecting arm 221.When being benchmark with Figure 12, said second guide 52 is combined in the bottom surface of said first connecting arm 221, and combines movably with the top of said transfer arm 21.Said first connecting arm 221 of said second guide, 52 guiding carries out straight line and moves.When said first connecting arm 221 was mobile highlightedly from said transfer arm 21, said second guide 52 also moved from said transfer arm 21 highlightedly.Thus, said second guide 52 can be strengthened being used to supporting from the supporting power of the first outstanding connecting arm 221 of said transfer arm 21.The substrate transfer device 1 that the present invention relates to also can comprise a plurality of said second guides 52.Said second guide 52 can be a linear motion guide rail.Though not shown, the straight-line motion piece that is combined with said second guide 52 movably also can be set on said transfer arm 21.
Said the 3rd guide 53 is between said first connecting arm 221 and said second connecting arm 222.When being benchmark with Figure 12, said the 3rd guide 53 is combined in the bottom surface of said second connecting arm 222, and combines movably with said first the top of connecting arm 221.Said second connecting arm 222 of said the 3rd guide 53 guiding carries out straight line and moves.When said second connecting arm 222 was mobile highlightedly from said first connecting arm 221, said the 3rd guide 53 also moved from said first connecting arm 221 highlightedly.Thus, said the 3rd guide 53 can be strengthened being used to supporting from the supporting power of the second outstanding connecting arm 222 of said first connecting arm 221.The substrate transfer device 1 that the present invention relates to also can comprise a plurality of said the 3rd guides 53.Said the 3rd guide 53 can be a linear motion guide rail.Though not shown, on said first connecting arm 221, the straight-line motion piece that is combined with said the 3rd guide 53 movably can be set also.
Said the 4th guide 54 is between said second connecting arm 222 and said supporting arm 23.When being benchmark with Figure 12, said the 4th guide 54 is combined in the bottom surface of said supporting arm 23, and combines movably with said second the top of connecting arm 222.The said supporting arm 23 of said the 4th guide 54 guiding carries out straight line and moves.When said supporting arm 23 was mobile highlightedly from said second connecting arm 222, said the 4th guide 54 also moved from said second connecting arm 222 highlightedly.Thus, said the 4th guide 54 can be strengthened being used to supporting from the supporting power of the outstanding hold-down arm 23 of said second connecting arm 222.The substrate transfer device 1 that the present invention relates to also can comprise a plurality of said the 4th guides 54.Said the 4th guide 54 can be a linear motion guide rail.Though not shown, on said second connecting arm 222, the straight-line motion piece that is combined with said the 4th guide 54 movably can be set also.
With reference to Fig. 5, Figure 13 to Figure 15, the substrate transfer device 1 that the present invention relates to can comprise the first play compensation mechanism 6.
When said supporting arm 23 when said bindiny mechanism 22 moves highlightedly, the said first play compensation mechanism 6 can prevent to be connected at said supporting tooth bar 35 and with said supporting tooth bar ingear and produce play (Backlash) between the miniature gears 34.Play (Backlash) is meant the slit that when a pair of gear mesh, produces between the flank of tooth.The smooth interlock rotation of a pair of gear needs the play of regulation, and after said supporting arm 23 moved from said bindiny mechanism 22 highlightedly, play possibly cause said supporting arm 23 to rock because of vibration waits.Therefore, after said supporting arm 23 moved from said bindiny mechanism 22 highlightedly, play possibly become the reason that reduces the said loading operation and the accuracy of unloading operation.The said first play compensation mechanism 6 prevents that said supporting arm 23 from producing play (Backlash) from said bindiny mechanism 22 mobile highlightedly back the connection at said supporting tooth bar 35 and with said supporting tooth bar 35 ingears between the miniature gears 34; Thereby can prevent said supporting arm 23 owing to reasons such as vibration are rocked, can improve the accuracy of said loading operation and unloading operation thus.
When said bindiny mechanism 22 comprised said first connecting arm 221 and said second connecting arm 222, the said first play compensation mechanism 6 can prevent between said supporting tooth bar 35 and the said second connection miniature gears 342, to produce play.When said supporting arm 23 when said second connecting arm 222 moves highlightedly, with said supporting arm 23 from the outstanding direction side in the opposite direction of said second connecting arm 222, said supporting tooth bar 35 and said second connects between the miniature gears 342 possibly produce play.Therefore; The said first play compensation mechanism 6 makes said supporting arm 23 to moving from the outstanding directions in the opposite direction of said second connecting arm 222 with said supporting arm 23, produces play thereby can prevent to connect between the miniature gears 342 at said supporting tooth bar 35 and said second.
With reference to Fig. 5 and Figure 14, the said first play compensation mechanism 6 can comprise first outer cover 61, first moving-member 62, first elastomeric element 63 and first retainer 64.
Said first outer cover 61 is combined in the said bindiny mechanism 22.When said bindiny mechanism 22 comprised said first connecting arm 221 and said second connecting arm 222, said first outer cover 61 can be combined on said second connecting arm 222.Said first outer cover, 61 integral body can form rectangular-shaped.
Said first moving-member 62 combines with said first outer cover 61 movably.One end of said first moving-member 62 and the other end are the outside that benchmark is positioned at said first outer cover 61 with said first outer cover 61.One end of said first moving-member 62 and the part between the other end are inserted in said first outer cover 61.Said first outer cover 61 comprises the through hole (not shown) that is used to insert said first moving-member 62.One end of said first moving-member 62 and the size of the other end are bigger than the through hole that in said first outer cover 61, forms.
One side of said first elastomeric element 63 is by 61 supportings of said first outer cover, and opposite side is by 62 supportings of said first moving-member.Thus, said first moving-member 62 can carry out resilient movement through said first elastomeric element 63.Said first elastomeric element 63 can be a spring.
Said first retainer 64 is combined on the said supporting arm 23.When said supporting arm 23 was mobile highlightedly from said second connecting arm 222, said first retainer 64 moved and contacts near said first moving-member 62 and with said first moving-member 62.In this process, said first retainer 64 can push said first moving-member 62 from said second connecting arm, 222 outstanding directions to said supporting arm 23, thereby compresses said first elastomeric element 63.When said supporting arm 23 from the outstanding mobile ends of said second connecting arm 222 time; Said first elastomeric element 63 is owing to restoring force is stretched, thus with said first moving-member 62 to releasing from said second connecting arm, 222 outstanding directions in the opposite direction with said supporting arm 23.Thus, said first retainer 64 is by 62 pushings of said first moving-member and to moving from said second connecting arm, 222 outstanding directions in the opposite direction with said supporting arm 23.Therefore; When said supporting arm 23 is mobile highlightedly from said second connecting arm 222; The said first play compensation mechanism 6 makes said supporting arm 23 to moving from the outstanding directions in the opposite direction of said second connecting arm 222 with said supporting arm 23, produces play thereby can prevent to connect between the miniature gears 342 at said supporting tooth bar 35 and said second.
With reference to Fig. 5, Figure 14 and Figure 15, said supporting arm 23 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) from said second connecting arm 222 highlightedly.Therefore, the substrate transfer device 1 that the present invention relates to can comprise two first play compensation mechanisms 6,6 '.Arbitrary first play compensation mechanism 6, shown in figure 14, when said supporting arm 23 from said second connecting arm 222 after said first direction (the A direction of arrow) moves highlightedly, said supporting arm 23 is moved prescribed distance to said second direction (the B direction of arrow).Thus, prevent between said supporting tooth bar 35 and the said second connection miniature gears 342, to produce play.Another first play compensation mechanism 6 '; Shown in figure 15; When said supporting arm 23 from said second connecting arm 222 after said second direction (the B direction of arrow) moves highlightedly, said supporting arm 23 is moved prescribed distance to said first direction (the A direction of arrow).Thus, prevent between said supporting tooth bar 35 and the said second connection miniature gears 342, to produce play.
The said first play compensation mechanism 6,6 ' be spaced from each other prescribed distance setting.The said first play compensation mechanism 6,6 ' respectively comprise said first outer cover 61,61 ', said first moving-member 62,62 ', said first elastomeric element 63,63 ' and first retainer 64,64 '.The symmetrical direction of said first moving- member 62,62 of the said first play compensation mechanism 6,6 ' be arranged to make ' and said first retainer 64,64 ' be positioned at.
With reference to Fig. 5, Figure 13 to Figure 15, the substrate transfer device 1 that the present invention relates to can comprise the second play compensation mechanism 7.
When said second connecting arm 222 when said first connecting arm 221 moves highlightedly, the said second play compensation mechanism 7 can prevent to connect tooth bar 332 and be connected with said first said second to produce play (Backlash) between the miniature gears 341.Therefore; After the substrate transfer device 1 that the present invention relates to can prevent that said second connecting arm 222 from moving from said first connecting arm 221 highlightedly; Said second connecting arm 222 is owing to reasons such as vibration are rocked, thereby can improve the accuracy of said loading operation and unloading operation.
When said second connecting arm 222 is mobile highlightedly from said first connecting arm 221; With said second connecting arm 222 from the outstanding direction side in the opposite direction of said first connecting arm 221, said second connects tooth bar 332 and said first connects between the miniature gears 341 and possibly produce play.Therefore; The said second play compensation mechanism 7 makes said second connecting arm 222 to moving from the outstanding directions in the opposite direction of said first connecting arm 221 with said second connecting arm 222, thereby can prevent that connecting tooth bar 332 and said first said second connects between the miniature gears 341 and produce play.
With reference to Fig. 5 and Figure 14, the said second play compensation mechanism 7 can comprise second outer cover 71, second moving-member 72, second elastomeric element 73 and second retainer 74.
Said second outer cover 71 is combined on said second connecting arm 222.Said second outer cover, 71 integral body can form rectangular-shaped.
Said second moving-member 72 combines with said second outer cover 71 movably.One end of said second moving-member 72 and the other end are the outside that benchmark is positioned at said second outer cover 71 with said second outer cover 71.One end of said second moving-member 72 and the part between the other end are inserted in said second outer cover 71.Said second outer cover 71 comprises the through hole (not shown) that is used to insert said second moving-member 72.One end of said second moving-member 72 and the size of the other end are bigger than the through hole that in said second outer cover 71, forms.
One side of said second elastomeric element 73 is by 71 supportings of said second outer cover, and opposite side is by 72 supportings of said second moving-member.Thus, said second moving-member 72 can carry out resilient movement through said second elastomeric element 73.Said second elastomeric element 73 can be a spring.
Said second retainer 74 is combined on said first connecting arm 221.When said second connecting arm 222 was mobile highlightedly from said first connecting arm 221, said second moving-member 72 moved closer to said second retainer 74 and contacts with said second retainer 74.In this process, said second outer cover 71 can push said second elastomeric element 72 from said first connecting arm, 221 outstanding directions to said second connecting arm 222, thereby compresses said second elastomeric element 73.When said second connecting arm 222 from the outstanding mobile ends of said first connecting arm 221 time, said second elastomeric element 73 be stretched owing to restoring force and will said second outer cover 71 to the directions release of giving prominence to from said first connecting arm 221 with said second connecting arm 222 in the opposite direction.Thus, said second connecting arm 222 is to moving with said first connecting arm, 221 outstanding directions in the opposite direction.Therefore; When said second connecting arm 222 is mobile highlightedly from said first connecting arm 221; The said second play compensation mechanism 7 makes said second connecting arm 222 to moving from the outstanding directions in the opposite direction of said first connecting arm 221 with said second connecting arm 222, thereby can prevent that connecting tooth bar 332 and said first said second connects between the miniature gears 341 and produce play.
With reference to Fig. 5, Figure 14 and Figure 15, said second connecting arm 222 can move to said first direction (the A direction of arrow) and said second direction (the B direction of arrow) from said first connecting arm 221 highlightedly.Therefore, the substrate transfer device 1 that the present invention relates to can comprise two second play compensation mechanisms 7,7 '.Arbitrary second play compensation mechanism 7; Shown in figure 14; When said second connecting arm 222 from said first connecting arm 221 after said first direction (the A direction of arrow) moves highlightedly, will said second connecting arm 222 to the mobile prescribed distance of said second direction (the B direction of arrow).Thus, prevent between said second connection tooth bar 332 and the said first connection miniature gears 341, to produce play.Another second play compensation mechanism 7 '; Shown in figure 15; When said second connecting arm 222 from said first connecting arm 221 after said second direction (the B direction of arrow) moves highlightedly, will said second connecting arm 222 to the mobile prescribed distance of said first direction (the A direction of arrow).Thus, prevent between said second connection tooth bar 332 and the said first connection miniature gears 341, to produce play.
The said second play compensation mechanism 7,7 ' be spaced from each other prescribed distance setting.The said second play compensation mechanism 7,7 ' respectively comprise said second outer cover 71,71 ', said second moving-member 72,72 ', said second elastomeric element 73,73 ' and second retainer 74,74 '.The symmetrical direction of said second moving- member 72,72 of the said second play compensation mechanism 7,7 ' be arranged to make ' and said second retainer 74,74 ' be positioned at.
With reference to Fig. 5 and Figure 13 to Figure 15, second outer cover 7 of first outer cover 6 that the said first play compensation mechanism 6 is had and the said second play compensation mechanism 7 ' had ' also can form as one.And second outer cover 7 of first outer cover 6 of the said first play compensation mechanism 6 ' had ' had with the said second play compensation mechanism 7 also can form as one.The situation of the said first play compensation mechanism 6,6 ' and said second play compensation mechanism 7,7 ' on said vertical direction, be set up in parallel has been shown in Figure 14 and Figure 15; But shown in figure 13, the said first play compensation mechanism 6,6 ' and the said second play compensation mechanism 7,7 ' also can on said horizontal direction, be set up in parallel.
As stated, when the present invention can reduce whole size, also can realize substrate carried out and move than long travel when loading operation, carry out the time required when loading operation with the unloading operation thereby shorten when can reduce Master Cost with the unloading operation.
And the present invention has been owing to utilized miniature gears and tooth bar, thus even occurrence temperature changes in carrying out the process of loading operation and unloading operation, also can substrate be moved definite distance, thus improve the accuracy of loading operation and unloading operation.
More than the present invention of explanation is not limited to the above embodiments and accompanying drawing, for person of ordinary skill in the field of the present invention, in the scope that does not break away from technological thought of the present invention, can carry out multiple replacement, distortion and change.

Claims (12)

1. a substrate transfer device is characterized in that, comprising:
Underframe is provided with the bottom tooth bar;
Transfer arm is combined with said bottom tooth bar ingear and moves miniature gears, and is combined in movably on the said underframe;
Driver element moves said transfer arm in order to rotate said mobile miniature gears;
Bindiny mechanism; Be combined with the connection miniature gears of connection tooth bar mobile and rotation along with moving of said connection tooth bar along with the rotation of said mobile miniature gears; When said transfer arm is mobile highlightedly from said underframe, move highlightedly to the outstanding direction of said transfer arm from said transfer arm; And
Supporting arm is used for supporting substrates, and is combined with the mobile supporting tooth bar along with the rotation of said connection miniature gears;
When said bindiny mechanism was mobile highlightedly from said transfer arm, said supporting arm moved to the outstanding direction of said bindiny mechanism from said bindiny mechanism highlightedly,
Is that benchmark is given prominence to first direction and the second direction opposite with said first direction in order to make said bindiny mechanism and said supporting arm with said underframe, and said driver element makes said transfer arm move to said first direction and said second direction.
2. substrate transfer device according to claim 1 is characterized in that,
Said driver element moves said transfer arm, so that said transfer arm, said bindiny mechanism and said supporting arm are arranged in a certain position of the primary importance and the second place,
Said transfer arm, said bindiny mechanism and said supporting arm are outstanding from said underframe when being positioned at said primary importance, and when being positioned at the said second place, overlapped laminated on said underframe.
3. substrate transfer device according to claim 1 is characterized in that,
Said driver element comprises and is located at the coil mechanism on the said underframe and is combined on the said transfer arm and is provided with the travel mechanism of a plurality of permanent magnets,
Said transfer arm along with moving of said travel mechanism, and this travel mechanism moves through the electromagnetic force that acts between said coil mechanism and the said permanent magnet.
4. substrate transfer device according to claim 1 is characterized in that,
Said driver element makes said transfer arm move to said first direction, thereby makes said mobile miniature gears to right-hand revolution, and said transfer arm is moved to said second direction, thereby said mobile miniature gears is rotated to anticlockwise direction;
Said bindiny mechanism along with moving of said connection tooth bar;
Said supporting arm along with moving of said supporting tooth bar.
5. substrate transfer device according to claim 1 is characterized in that,
Said bindiny mechanism comprises: be located at first connecting arm between said transfer arm and the said supporting arm, and be located at second connecting arm between said first connecting arm and the said supporting arm;
On said first connecting arm, be combined with said mobile pinion and along with the rotation of said mobile miniature gears and mobile first be connected tooth bar, and along with moving of said first connecting arm rotation first connect miniature gears;
On said second connecting arm, be combined with and be connected pinion with said first and connect the rotation of miniature gears and mobile second connect tooth bar along with said first, and along with moving of said second connecting arm rotation second connect miniature gears;
Said supporting tooth bar is connected pinion and moves along with the rotation of the said second connection miniature gears with said second.
6. substrate transfer device according to claim 5 is characterized in that,
On said transfer arm, be combined with the mobile rack that is connected pinion with said first,
Said first connects miniature gears comprises: with the said mobile rack ingear first auxiliary miniature gears that is connected, and with said first auxiliary is connected the miniature gears connection and is connected tooth bar ingear second with said second assist the connection miniature gears;
The said second auxiliary diameter that connects miniature gears assists the diameter that connects miniature gears big than said first.
7. substrate transfer device according to claim 1 is characterized in that,
Comprise the first play compensation mechanism, be used to prevent be connected and produce play between the miniature gears at said supporting tooth bar with said supporting tooth bar ingear,
After said supporting arm moved from said bindiny mechanism highlightedly, the said first play compensation mechanism made said supporting arm move to the opposite sense of said supporting arm from the outstanding direction of said bindiny mechanism.
8. substrate transfer device according to claim 7 is characterized in that, the said first play compensation mechanism comprises:
First outer cover is combined in said bindiny mechanism;
First moving-member is combined on said first outer cover movably;
First elastomeric element, a side is supported by said first outer cover, and opposite side is supported by said first moving-member, so that the said first moving-member resilient movement; And
First retainer is combined on the said supporting arm, when said supporting arm is mobile highlightedly from said bindiny mechanism, contacts with said first moving-member, so that said first moving-member is to moving with the outstanding direction in the opposite direction of said supporting arm.
9. substrate transfer device according to claim 1 is characterized in that,
Said bindiny mechanism comprises a plurality of connecting arms that are located between said transfer arm and the said supporting arm,
At least one comprises strengthening part in the said connecting arm, and it is sagging to prevent from the mobile highlightedly supporting arm of said underframe to be used to strengthen supporting power.
10. a substrate transfer device is characterized in that, comprising:
Underframe;
Arm mechanism is used for moving substrate, and is included in a plurality of arms that between the second place on the said underframe, move from the outstanding primary importance of said underframe and overlapped laminated;
Driver element moves some in the said arm, so that said arm is arranged in a certain position of the said primary importance or the said second place; And
Link gear is combined on the said arm, and some all the other arms that make that move in the said arm through said driver element move with linking;
Said link gear comprises: a plurality of miniature gearss are used for straight-line motion with said driver element and convert to and rotatablely move; And a plurality of tooth bars, with said pinion, convert rotatablely moving of said miniature gears to straight-line motion,
Said driver element moves some in the said arm, so that said arm mechanism is a benchmark with said underframe is outstanding to first direction and the second direction opposite with said first direction.
11. substrate transfer device according to claim 10 is characterized in that,
At least one comprises in the said miniature gears: have the first auxiliary miniature gears of first diameter and assist miniature gears with the said first auxiliary miniature gears bonded assembly second,
The said second auxiliary miniature gears has second diameter bigger than said first diameter.
12. substrate transfer device according to claim 10 is characterized in that,
Comprise a plurality of said arm mechanisms,
Said arm mechanism is combined in the both sides of said driver element respectively, and together moves through said driver element.
CN201110385151XA 2010-11-26 2011-11-28 Base plate transfer device Pending CN102556665A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100119118A KR101191897B1 (en) 2010-11-26 2010-11-26 Apparatus for Transferring Substrate
KR10-2010-0119118 2010-11-26

Publications (1)

Publication Number Publication Date
CN102556665A true CN102556665A (en) 2012-07-11

Family

ID=46403564

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110385151XA Pending CN102556665A (en) 2010-11-26 2011-11-28 Base plate transfer device

Country Status (2)

Country Link
KR (1) KR101191897B1 (en)
CN (1) CN102556665A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111515741A (en) * 2020-06-04 2020-08-11 江苏鑫贺伟业机械制造有限公司 Double-station reversing device for high-precision transmission shaft machining

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101537057B1 (en) * 2015-01-14 2015-07-15 (주) 대산엠테크 Symphoresis device of material for engine valve
CN106564753A (en) * 2016-10-29 2017-04-19 安徽旭虹机械设备有限公司 Paint bucket discharging device
KR102317774B1 (en) * 2020-04-21 2021-10-27 아메스산업(주) Transfer Apparatus for Substrate with Gear Member

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669254A (en) * 1992-08-13 1994-03-11 Hitachi Ltd Lead-frame positioning stopper mechanism and wire bonder using the mechanism
CN1279147A (en) * 1999-06-25 2001-01-10 三星电子株式会社 Loading robot with weight compensative balancer
KR20040035394A (en) * 2002-10-22 2004-04-29 주식회사 에스에프에이 Conveyer for transmitting glass
JP2007119111A (en) * 2005-10-25 2007-05-17 Ak System:Kk Transfer device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669254A (en) * 1992-08-13 1994-03-11 Hitachi Ltd Lead-frame positioning stopper mechanism and wire bonder using the mechanism
CN1279147A (en) * 1999-06-25 2001-01-10 三星电子株式会社 Loading robot with weight compensative balancer
KR20040035394A (en) * 2002-10-22 2004-04-29 주식회사 에스에프에이 Conveyer for transmitting glass
JP2007119111A (en) * 2005-10-25 2007-05-17 Ak System:Kk Transfer device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111515741A (en) * 2020-06-04 2020-08-11 江苏鑫贺伟业机械制造有限公司 Double-station reversing device for high-precision transmission shaft machining

Also Published As

Publication number Publication date
KR20120057408A (en) 2012-06-05
KR101191897B1 (en) 2012-10-16

Similar Documents

Publication Publication Date Title
CN102349144B (en) Possess robot and the operation method thereof of end effector
CN102556665A (en) Base plate transfer device
JP5877016B2 (en) Substrate reversing apparatus and substrate processing apparatus
CN105314343A (en) Conveyor trolley for storage device
JP7249142B2 (en) Transport carriers, vapor deposition equipment, and electronic device manufacturing equipment
CN103896000A (en) Automatic-rail-changing shuttle
US20130051957A1 (en) Substrate Processing System and Substrate Transferring Method
CN102862819A (en) Conveying device
TW201021970A (en) Method and apparatus for linear pad conditioning
CN102859677A (en) Traverse device and substrate processing device
CN111564389B (en) Substrate processing system
CN117174627A (en) Compatible wafer buffer device
CN103693433A (en) Substrate temporary storage device
KR20060088286A (en) System for manufacturing multi-layered thin film
KR200463079Y1 (en) Apparatus for Transferring Substrate
KR101587337B1 (en) Lifting apparatus and apparatus for transferring substrate comprising the same
KR101191898B1 (en) Apparatus for Transferring Substrate
CN106062944B (en) Base plate transfer device lifting device and base plate transfer device
CN104057307A (en) Precise indexing and micro positioning numerical control rotary table
KR20120067491A (en) Apparatus for transferring substrate
CN111776645A (en) Multi-station material taking and placing device
JP2006240867A (en) Slewing mechanism of telescopic arm in transfer machine
KR101491925B1 (en) Running Device and Apparatus for Transferring Substrate having the same
KR20150039482A (en) Cable veyor and apparatus for transferring substrate
KR102299106B1 (en) Transfer robot with multi arm

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120711