JP2007119111A - Transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accomplish high efficiency, a high operation ratio and safe conveying treatment by enlargement of lifting freedom of a plate-like material to be treated, reduction of a shock-absorbing deformation amount relative to load and outstanding relaxing of handling weight restriction, stable maintaining of placement attitude and enhancement of predetermined attitude of various handling actions, height, flat surface and position adjustment accuracy. <P>SOLUTION: A parallel lifting lift device 300 is provided on a base part of a rail type conveying/traveling device 100 through a circular rail type rotation device 200. A telescopic flat surface fore-and aft movement device 400 of multi-stage horizontal stage is attached to the lift device 300, a pair of fixed horizontal arms for placement of the plate-like material to be treated is attached to the front horizontal stage 404 and a pair of approachable/leavable movable horizontal arms 501, 502 is attached between them. A plurality of placement units 503, 504 for ridgeline-supporting a lower surface of the plate-like material are provided on upper surfaces of these arms. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a transfer apparatus for receiving a plate-shaped workpiece from a previous process, transferring it to a predetermined processing position, performing the process, and then transferring it to the next process.

In order to automatically perform a predetermined treatment on a plate-like material in a series of continuous processing steps, the plate-like material is transferred while accurately adjusting and maintaining the predetermined posture and height of the material to be treated in each step. A so-called transfer device for loading, transferring and transporting is essential.
For example, a transfer device that receives a plate-like material to be processed from the previous process, transfers it to each predetermined processing position, performs various processing, and passes it to the subsequent process. (1), placing portion plane expansion / contraction operation and lifting / lowering operation for directly transferring a workpiece of a predetermined size to the placing portion with respect to the loader portion in the previous process and the unloader portion in the subsequent process, (2) (3), precise operation functions such as swiveling operation, lifting operation, and back-and-forth operation for transferring the processing material to the processing position are required.

A representative example of the conventional transfer device is provided with a parallel shift link mechanism type lifting device at the center of the base of the rail-type transport traveling device via a rotation vertical axis device for turning, and a pantograph on the upper link shaft support member. Attach the rear pivoting member of the link type planar back-and-forth motion device, and support the rear part of the two horizontal arms for mounting the plate-like workpiece on all the pivoting members of the expansion / contraction link (pantograph) type planar back-and-forth motion device. It is a thing.

As shown in the side view of FIG. 13 and the plan view of FIG. 14, the conventional transfer apparatus described above is a parallel shift link mechanism type lifting device provided on a traveling carriage 0100 in which a clamping guide G is slidably mounted on a traveling rail R. 02 and the rotating vertical axis device 01 for turning on it have a complicated structure and the area occupied by its own height is large. It becomes a high position far away from level 04, and the dead zone is large and the freedom of elevation is narrow.
The parallel shift link mechanism type lifting device 02 connects the upper and lower main links 棹 08 and 09 with the three horizontal main shafts 05, 06 and 07, and the upper and lower auxiliary links な parallel to the main links 棹 08 and 09. 010, 011 is a complex mechanism that is connected to the corresponding upper, middle, lower link shaft support members 012, 013, 014, 015 by one horizontal auxiliary shaft, 016, 017, 018, 019, so The amount of buffer deformation with respect to the load when the plate-shaped workpiece 020 is placed on the horizontal arm 03 is large, and as a result of the forward horizontal displacement of the placement horizontal arm 03, the handling weight of the plate-like workpiece 020 is greatly restricted. Is done. This is because the same problem occurs in the expansion / contraction link type plane longitudinal movement device 030 in which the pair of left and right front and rear link rods 021 and 022 are connected by the vertical main shafts 023, 024 and 025 for approaching and separating. It becomes severe.
The problems caused by the above structure lead to a decrease in the posture and height adjustment accuracy of the workpiece 020 due to the transporting operation, turning operation, elevating operation, back and forth operation, etc. of the transfer device itself, and accurately set to a predetermined value. It is difficult to do and maintain it, and the plate-like workpieces are handled in an unstable manner.

Therefore, the problems of the present invention are as follows.
(1) Lowering the lifting dead zone and increasing the freedom of lifting.
(2) The amount of buffer deformation with respect to the load when the plate-shaped workpiece is placed is extremely small, the handling weight limit of the plate-like workpiece is greatly relaxed, and the horizontal arm posture for placement is stabilized horizontally To maintain.
(3) Improving the posture and height adjustment accuracy of the material to be processed by carrying and transporting operation, turning operation, raising and lowering operation, back and forth operation, etc. of the transfer device itself, and accurately setting it to a predetermined position and posture value To enable various handling operations of the plate-shaped material to be processed in a very stable and accurate manner.
(4) To further increase the plane size configuration of the plate-like workpieces to be handled and ensure a wide range of placement.
(5) Further, when the lower surface of the plate-like material to be processed is supported by the placing piece, it is possible to reliably prevent the trace of the plate-like material to be supported on the flat surface and the support dirt.
(6) In addition, it is possible to constrain the displacement of the front and rear position of the plate-shaped workpiece to be placed by the loading piece by its own weight, and safe and quick placement traveling, horizontal turning movement, horizontal back and forth movement, vertical movement Allow movement.
(7) The placement piece shall secure a margin for adjusting the position of the placement piece and relax the control accuracy of the placement position.
(8) The cross-sectional shape of the movable horizontal arm for mounting is made U-shaped or B-shaped to increase the rigidity of the arm itself and incorporate a moving mechanism for expanding and reducing the mounting frame in the inner space. The mounting frame can be separated and expanded as well as the arm.
(9) If the movable horizontal arm and the mounting piece are made of heat-resistant material and the movable horizontal arm has a U-shaped cross-section, by applying a heat-resistant material lid to the open slit, for example, 200 ° C To be able to access high temperature atmospheres before and after, and to transport high temperature materials.

The present invention has been developed to solve the above problems, and features thereof are as follows (1) to (3).
(1). At the base of the rail-type transport traveling device, a parallel lifting lift device is installed via a circular rail-type swiveling device, and a telescopic planar back-and-forth motion device of a multistage horizontal stage is attached to this, and the foremost horizontal stage In addition, a pair of movable horizontal arms for mounting the plate-like material to be mounted are attached so that they can be approached and separated, and a plurality of placement pieces for supporting the ridgeline of the lower surface of the plate-like material to be processed are mounted on this movable horizontal arm A transfer apparatus characterized by the above.
(2). The transfer device according to (1), wherein at least one pair of mounting pieces is provided in units of horizontal arms, and the mounting pieces can be opposed to and separated from each other in the horizontal arm longitudinal direction.
(3). The transfer device according to (1) or (2), wherein the mounting piece is an upper surface tapered block that supports a ridge line on the lower surface of the plate-shaped workpiece.

The transfer device of the present invention exhibits the following excellent effects.
(1) In the transfer device of the present invention, a parallel lifting lift device is provided at the base of the rail-type transport traveling device via a circular rail-type turning device, and in this frame, that is, directly above the circular rail-type turning device. Since the multi-level horizontal stage telescope type plane back-and-forth motion device is mounted so that it can be moved up and down in parallel, the height occupying area is small and the lower limit of the horizontal arm for mounting is low and far from the traveling floor level. Is small and has a wide degree of freedom.
(2) In addition, the parallel lift device is a mechanism that mounts the last stage of the telescoping flat back-and-forth moving device in a horizontal posture state from the vertical guide provided on the frame and the vertical screw drive shaft at the rear, so it is a telescopic flat surface The amount of buffer deformation against the load when the plate-like workpiece is placed on the horizontal arm for placing the plate-like workpiece on the foremost stage of the back-and-forth motion unit is extremely small, and the horizontal arm posture for placement is stable horizontally. As a result of the maintenance, the handling weight limit of the plate-like material to be processed is greatly relaxed. This means that even if each stage horizontal stage of the telescopic planar back-and-forth motion unit moves back and forth, the stage horizontal stages are connected to each other by a horizontal guide and a sliding guide that grips this, so that the weight restriction mitigation effect Can be maintained.
(3) The effects resulting from the above structure lead to improvements in the posture and height adjustment accuracy of the material to be processed by the transporting operation, turning operation, elevating operation, and back-and-forth operation of the transfer device itself, and accurately. The predetermined position and posture value can be set and maintained, and various handling operations of the plate-like material to be processed can be performed with extremely stable and high accuracy.
(4) In addition, a pair of movable horizontal arms for placing plate-shaped workpieces that can be moved closer to and away from each other are mounted on the front part of the foremost stage. Therefore, the planar size configuration of the plate-like material to be handled is greatly expanded to ensure a wide range of placement.
(5) Furthermore, the mounting tops on the upper surface of these arms support the ridgeline on the lower surface of the plate-like material as an upper surface taper block, so it is possible to reliably prevent traces of support and dirt on the flat surface of the plate-like material. To do.
(6) In addition, the entire area of the top tapered surface of the placing piece is used as a ridge line support surface, and the placing posture of the plate-like material to be treated can be restrained by its own weight, so that it is safe and quick without causing a side slip during handling. This makes it possible to perform proper placement travel conveyance, horizontal turning movement, horizontal back-and-forth movement, and vertical movement.
(7) The upper surface taper of the placement piece also serves as a margin for adjusting the position of the placement piece, and eases the control accuracy of the placement position.

The transfer apparatus of the present invention receives, for example, a plate-like material to be processed such as plate glass from a previous process, and heat-treats, transfer-processes, or process-processes while being placed or delivered to each predetermined processing position. After performing various processes such as the above, it is passed to the subsequent process.
For example, in a manufacturing process line for mask substrates for liquid crystals where various sizes are mixed, a horizontal arm and a placement frame are automatically placed at positions that match each size by a control signal from the host system computer. The specified mask substrate from the previous process is accurately received safely by moving it, put it in a predetermined height and orientation position, for example, a heat treatment furnace having a high temperature atmosphere of around 200 ° C., and a transfer device in which dirt and dust are strictly prohibited It is possible to fully automatically handle the transfer to various processing apparatuses such as the above, and the transfer to the subsequent process after a series of processing processes.

In the present invention, the rail-type transport traveling device transports and travels the workpiece between the pre-process and the post-process between the pre-process and the post-process. For example, two traveling rails and a rack gear are fixedly laid in parallel to the rails, a grip guide and a drive pinion device are provided on the traveling body side, and the grip guide is slidably mounted only along the rail, and the drive pinion A mechanism that prevents the traveling body from being lifted in a low posture without wheels, and that enables accurate traveling and stopping positioning is adopted.

The circular rail-type turning device performs a turning operation for transferring the material to be processed received from the previous process to the processing position and a turning operation for transferring the material to be processed to the subsequent process. A circular rail and a rotary drive mechanism are arranged on the base of the rail-type transport traveling device, a circular rail grip guide and a rotation transmission tool are provided at the bottom of a circular or polygonal rotary table, and the grip guide slides on the circular rail. It can be grabbed and mounted freely, and the rotation transmitting tool is connected and mounted to the rotation drive mechanism to make it more robust and lower in posture.

The parallel lift device accommodates a telescopic planar back-and-forth moving device in a frame for delivering a workpiece to a processing position and moves it up and down in a horizontal posture. A U-shaped frame extending from both sides and rear of the circular rail-type swivel device is provided, and a vertical guide rail and a vertical screw drive shaft device are provided on the U-shaped frame, and the vertical guide rail, the telescoping op Both sides of the last stage and rear guided gripping rail of the flat-type plane longitudinal motion device are slidably mounted, and the vertical screw drive shaft device is mounted on the rear of the last stage so as to be movable up and down horizontally.

Telescope type plane back-and-forth motion device is designed to extend and retract the multistage stage in order to receive the material to be processed from the previous process, deliver the material to be processed to the subsequent process, and deliver the material to be processed to the processing position. To do. The multi-stage stage has a beam plate on both sides, and has a high strength and a combination of the upper stage accommodation type or the lower suspension accommodation type from the last stage stage equipped with a forward / backward drive mechanism, or an appropriate combination thereof. The stacking height is reduced to allow multiple stages to be connected to each other, and the stages are connected to each other by a horizontal guide rail, a guided grip rail that is slidably mounted on the stage, and a rack and pinion type relative movement mechanism. By moving the stage next to the last stage back and forth with a forward / backward drive mechanism, each stage stage can be expanded and contracted in a relatively equal amount in a low overlap state, and the plane can be moved back and forth smoothly without displacement. .

The mounting horizontal arm is a high-rigidity arm with a square or U-shaped cross section, and various sizes of workpieces are directly transferred to the mounting unit for the loader unit in the previous process and the unloader unit in the subsequent process. For this purpose, the mounting portion plane expansion / contraction operation is performed. A pair of movable horizontal arms are attached to the front part of the foremost stage of the telescopic planar back-and-forth motion apparatus, and a plurality of mounting pieces for supporting the ridgeline of the lower surface of the plate-like workpiece are mounted on the movable horizontal arms. At least a pair of mounting pieces is provided for each horizontal arm, the mounting pieces can be opposed to and approached and separated in the longitudinal direction of the arm, and an upper tapered block that supports the ridgeline on the lower surface of the plate-like workpiece. preferable.

FIG. 1 is a schematic side view of the present embodiment.
FIG. 2 is a schematic plan view of FIG.
FIG. 3 is a detailed explanatory diagram of FIG.
FIG. 4 is an explanatory side view of the rail-type transport traveling device 100.
FIG. 5 is an explanatory view of the back as seen from the bottom of the circular rail swivel device 200.
FIG. 6 is an explanatory plan view showing the rotation drive unit of the circular rail turning device 200.
FIG. 7 is an explanatory view of the back surface of the parallel lift device 300.
FIG. 8 is an explanatory plan view of the parallel lifting / lowering lift device 300 and the telescope type plane longitudinal movement device 400.
FIG. 9 is an explanatory side view of a part omitted.
FIG. 10 is an explanatory view of a longitudinal section of a main part of the telescopic planar back-and-forth motion device 400. FIG.
FIG. 11 is an explanatory side view showing an extended state of the telescopic planar back-and-forth motion device 400. FIG.
FIG. 12 is an explanatory plan view showing the mounting device 500 on the telescopic planar back-and-forth motion device 400.

In FIG. 1 and FIG. 2, the transfer apparatus of this example receives the plate-shaped workpiece W from the previous process, transfers it to each predetermined processing position, and after performing various processes, passes it to the subsequent process. Is.
The transfer device of this example is provided with a parallel lifting lift device 300 via a circular rail-type turning device 200 at the base of the rail-type transport traveling device 100, and four stages 401, 402, 403, 404 are provided on this. The telescope type plane back-and-forth movement device 400 is mounted, and has a pair of movable horizontal arms 501 and 502 for placing the plate-like workpiece W. The lower surface of the plate-like workpiece W is attached to these arms 501 and 502. A mounting apparatus 500 equipped with two pairs of mounting pieces 503 and 504 that support ridge lines is mounted on the foremost stage 404.

The rail-type transport traveling device 100 travels the material to be processed between the pre-process and the post-process between the pre-process and the post-process.
3 and 4 shown in detail, the rail-type transport traveling device 100 has two traveling rails 101 and a vertical rack gear 102 fixedly laid in parallel to the rails 101, and a grip guide on the traveling body 103 side. 104 and the drive pinion device 105 are provided, the grip guide 104 is slidably mounted along the rail 101, and the drive pinion 106 is engaged with the vertical rack gear 102 and mounted, whereby the servo motor 108 of the drive pinion device 105 is mounted. The traveling main body 103 is caused to travel with high accuracy through the bevel gear 107 while being prevented from being lifted in a low posture.

The circular rail-type turning device 200 performs a turning operation for transferring the material to be processed received from the previous process to the processing position and a turning operation for transferring the material to be processed to the subsequent process.
3, 5, and 6 shown in detail, a circular rail-type turning device 200 has a circular rail 201 and a rotary drive mechanism 202 arranged on the base of the traveling main body 103 of the rail-type transport traveling device 100, and a turntable A circular rail grip guide 204 and a rotary operation plate 205 are provided at the bottom of 203, and an arc-shaped grip guide 204 is slidably attached to the circular rail 201, and the rotary operation plate 205 is rotated by the rotation drive mechanism 202. It is connected to the servo motor 206 via the drive gear 207 and the rotation direction changing gear mechanism 208 to make it more robust and lower in posture.
In FIG. 5, reference numeral 208 denotes a cable bear for a power supply line and a signal.

The parallel lifting / lowering lift device 300 accommodates the telescopic planar back-and-forth movement device 400 in a frame for delivering the workpiece W to the processing position, and moves it up and down in a horizontal posture.
3, 7, 8, and 9, which are shown in detail, the parallel lifting lift device 300 includes U-shaped frame bodies 301, 302 extending on both sides and a rear portion on the turntable 203 of the circular rail swivel device 200. 303 is provided, and four vertical guide rails 304 are provided on the U-shaped frame bodies 301, 302, and 303, and a vertical screw drive shaft device 305 is disposed in the height direction of the central portion of the rear frame body 302. The rail 304 and guided rails 405 provided on both sides of the last stage 401 of the telescoping opto-type planar back-and-forth motion device 400 are slidably mounted vertically, and the screw shaft 306 of the vertical screw drive shaft device 305 is attached to the last stage 401 It is attached to a screw receiving device 406 provided at the rear portion, and the entire telescoping opto-plane longitudinal movement device 400 is moved up and down while maintaining the horizontal state by rotational driving of the screw shaft 306.
In the vertical screw drive shaft device 305, 307 is a servo motor fixed on the upper beam of the rear frame 302, 308 is a screw shaft end support mounted on the upper beam and lower beam of the rear frame 302, and 309 is a power supply line It is a cable bear dedicated for use and signal.

Telescope type plane back-and-forth motion device 400 extends and retracts the multistage stage back and forth to receive the material to be processed from the previous process, deliver the material to be processed to the subsequent process, and deliver the material to be processed to the processing position. To drive.
3, 8, 9, 10, and 11 shown in detail, the telescopic planar back-and-forth motion device 400 is a multi-stage type that has a U-shaped cross section with a beam plate on both sides of each stage. Then, the four stages 402, 403, 404 are connected to the upper stage from the last stage 401, and a servo motor type screw device 407 for forward and backward drive is mounted on the last stage 401. Are connected to each other by horizontal guide rails 408, 409, 410 and guided gripping rails 411, 412, 413 slidably attached thereto, and rack and pinion type relative movement mechanisms 414, 415.
The rack-and-pinion type relative movement mechanism 414 has a saddle type rack gear 416 fixed to the upper surface side of the stage 401, and a pinion gear 417 meshing with the lower gear portion is pivotally attached to the stage 402 so that the pinion gear 417 A vertical rack gear 418 that meshes with the upper gear portion is fixed to the lower surface side of the stage 403. The rack-and-pinion type relative movement mechanism 415 has a saddle-type rack gear 419 fixed to the upper surface side of the stage 402, and a pinion gear 420 meshing with the lower gear portion is pivotally attached to the stage 403 so that the top of the pinion gear 420 can be rotated. The vertical rack gear 421 is fixed to the lower surface side of the stage 404 so as to mesh with the gear portion. As a result, the stage 402 is moved back and forth by a servo motor type screw device 407, so that the stages 421, 402, 403, and 404 are simultaneously expanded and contracted by an equal amount as shown in FIGS. Maintains the amount and expands and contracts back and forth on the plane.
430 in FIG. 10 and FIG. 11 is a cable bear for a power supply line and a signal line.

The placement apparatus 500 for directly transferring the material to be processed to the processing unit for transferring the processing material of various sizes to the mounting unit directly with respect to the loader unit in the previous process and the unloader unit in the subsequent process. The mounting portion plane expansion / contraction operation is performed.
3 and 12, which are shown in detail, the mounting device 500 is fixedly mounted inside the foremost stage 404, and a pair of movable horizontal arms 501 and 502 for mounting a material to be processed are placed on the upper side with a square section. A high-rigidity arm with a thin slit for moving the placing piece is formed, and two pairs of placing pieces 503 and 504 that support the ridge line of the lower surface of the plate-like workpiece W are slid along these arms 501 and 502 along the arm. Equipped to be movable.
The movable horizontal arms 501 and 502 are supported by a servo motor type arm approach / separation mechanism 507 provided on the foremost stage 404 so that the arm interval can be set to be enlarged or reduced. The placing pieces 503 and 503 enable the opposing pieces to approach and separate by a servo motor type piece approaching and separating mechanism 508 provided on the movable horizontal arms 501 and 502.
The servo motor type arm approach / separation mechanism 507 is attached to the front stage 404 with screw shafts 512, 513 and two pairs of arm guides 514, 515 rotating via a servo motor 510 and a bevel gear 511. The screw guides 516 and 517 of the movable horizontal arms 501 and 502 are screwed together, and the arm guides 514 and 515 are pivotally attached to the guides 518 and 519 of the movable horizontal arms 501 and 502 so as to be slidable.
As a result, the movable horizontal arms 501 and 502 move toward and away from each other by driving the servo motor 510.
The servo motor type top approach / separation mechanism 508 is provided with servo motors 520 and 521 and two screwing direction screw shafts 522 and 523 in the movable horizontal arms 501 and 502, and the two screwing direction screw shafts 522 and 523 are placed thereon. The mounting pieces facing each other are moved toward and away from each other by rotationally driving the screw shafts 503, 503, 504, and 504 in the two screwing directions.
The placement pieces 503, 503, 504, and 504 are upper surface tapered blocks that support the ridge line of the lower surface of the plate-shaped workpiece.
The transfer device of the present example was able to reliably obtain the various excellent effects described above with the above configuration.
As a result, the degree of freedom in raising and lowering the plate-like workpiece W is expanded, the amount of buffer deformation against load is reduced and the handling weight limit is greatly relaxed, the mounting posture is stably maintained, and the predetermined posture and height of various handling operations are achieved.・ The accuracy of plane and position adjustment has been greatly improved, and high efficiency, high availability, and safe transport processing have been realized.

The transfer apparatus of the present invention exhibits the following excellent effects as described above, and there are many effective uses in this kind of industry.
(1) The elevating dead zone is low and the elevating freedom is wide.
(2) In addition, the amount of buffer deformation with respect to the load when the plate-shaped material is placed is extremely small, the handling weight limit of the plate-shaped material is greatly relaxed, and the horizontal arm posture for placement is stabilized horizontally Let it be maintained.
(3) Improve the posture and height adjustment accuracy of the material to be processed by the transporting operation, turning operation, lifting operation, back and forth operation, etc. of the transfer device itself, and accurately setting it to a predetermined position and posture value This makes it possible to perform various handling operations of the plate-shaped material to be processed with extremely stable and high accuracy.
(4) Further, the plane size configuration of the plate-like material to be handled is further expanded to ensure a wide range of mountable areas.
(5) Furthermore, since the placing top supports the ridge line on the lower surface of the plate-like material to be processed, it reliably prevents the support traces and support dirt on the flat surface of the plate-like material to be processed.
(6) In addition, the entire top tapered area of the placing piece is made the range of the ridgeline support surface, and the placement posture of the plate-like processed material can be restrained by its own weight, so that the front and rear position displacement can be constrained. It enables traveling, horizontal turning, horizontal back and forth movement, and vertical movement.
(7) The upper surface taper of the placement piece also serves as a margin for adjusting the position of the placement piece, and eases the control accuracy of the placement position.

It is a schematic side explanatory drawing of a present Example. FIG. 2 is a schematic plan view of FIG. 1. FIG. 2 is a detailed explanatory diagram of FIG. 1. 2 is an explanatory side view of the rail-type transport traveling device 100. FIG. FIG. 3 is an explanatory view of the back as seen from below the circular rail swivel device 200. 4 is an explanatory plan view showing a rotation drive unit of a circular rail turning device 200. FIG. 3 is a rear view of the parallel lift device 300. FIG. FIG. 3 is a plane explanatory view of a parallel lifting / lowering lift device 300 and a telescope type plane longitudinal movement device 400. It is side surface explanatory drawing of 1 part omission of FIG. FIG. 5 is an explanatory view of a longitudinal section of a main part of a telescopic planar back-and-forth motion apparatus 400. FIG. 6 is an explanatory side view showing an extended state of the telescopic planar back-and-forth motion apparatus 400. FIG. 6 is an explanatory plan view showing a mounting device 500 on a telescopic planar back-and-forth motion device 400. It is side sectional explanatory drawing which shows the example of a conventional apparatus. FIG. 14 is an explanatory plan view of FIG. 13.

Explanation of symbols

100-rail transport traveling device
101 Two traveling rails
102 Vertical rack gear
103 Driving body
104 Grasp guide
105 Drive pinion device
106 Drive pinion
107 Bevel gear
108 Servo motor
200 Circular rail swivel
201 circular rail
202 Rotation drive mechanism
203 turntable
204 Grip guide for circular rail
205 Rotary action panel
207 Rotation drive gear
208 Rotation direction change gear mechanism
206 Servo motor
208 Cable bear for power line and signal
300 Parallel lifting device
301, 302, 303 U-shaped frame
304 Vertical guide rail
305 Longitudinal screw drive shaft device
306 Screw shaft
307 servo motor
308 Screw shaft end support
309 Cable bear for power line and signal
400 Telescope type plane back and forth motion device
401, 402, 403, 404 Four-stage stage with special horizontal beam plate
405 Guided rail
406 Screw receiving device
407 Servo motor type screw device
408, 409, 410 Horizontal guide rail
411, 412, 413 Guided grip rail
414, 415 Rack and pinion type relative movement mechanism
416 vertical rack gear
417 竪 Pinion Gear
418 vertical rack gear
419 Vertical rack gear
420 pinion gear
421 vertical rack gear
500 mounting device
501, 502 A pair of movable horizontal arms
503, 504 Two pairs of placement frames
507 Servo motor arm approach / separation mechanism
508 Servo motor type top approach / separation mechanism
510 servo motor
511 bevel gear
512, 513 screw shaft
514, 515 2 pairs of arm guides
516, 517 screw bearing
518, 519 Guided
520, 521 Servo motor
522, 523 2 screw direction screw shaft W

Claims (3)

  A parallel lifting lift device is installed at the base of the rail-type transport traveling device via a circular rail-type swiveling device, and a multi-stage horizontal stage telescope type plane back-and-forth motion device is attached to the front horizontal stage. A pair of movable horizontal arms for placing a material to be processed are mounted so as to be able to approach and separate, and the movable horizontal arm is equipped with a plurality of placement pieces for supporting the ridgeline of the lower surface of the plate-shaped material to be processed. Transfer device. 2. The transfer device according to claim 1, wherein at least one pair of the placement pieces is provided in units of horizontal arms, and the placement pieces are opposed to and approachable from each other in the horizontal arm longitudinal direction. The transfer device according to claim 1 or 2, wherein the placement piece is an upper surface tapered block that supports a ridge line on the lower surface of the plate-shaped workpiece.

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