JP7067437B2 - Transfer device - Google Patents

Transfer device Download PDF

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Publication number
JP7067437B2
JP7067437B2 JP2018217821A JP2018217821A JP7067437B2 JP 7067437 B2 JP7067437 B2 JP 7067437B2 JP 2018217821 A JP2018217821 A JP 2018217821A JP 2018217821 A JP2018217821 A JP 2018217821A JP 7067437 B2 JP7067437 B2 JP 7067437B2
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Prior art keywords
fork
elevating
swivel
transfer device
columns
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JP2020083525A (en
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秀次 茶谷
景祐 城石
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to JP2018217821A priority Critical patent/JP7067437B2/en
Priority to TW108126840A priority patent/TWI805815B/en
Priority to CN201910742374.3A priority patent/CN111204555A/en
Priority to KR1020190130739A priority patent/KR20200060239A/en
Publication of JP2020083525A publication Critical patent/JP2020083525A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Description

本発明は、物品を載置して水平方向に出退移動させるフォーク部と、フォーク部を旋回する旋回部と、フォーク部を昇降する昇降部と、を備える移載装置に関するものである。 The present invention relates to a transfer device including a fork portion on which an article is placed and moved back and forth in the horizontal direction, a swivel portion that swivels the fork portion, and an elevating portion that raises and lowers the fork portion.

上記移載装置としては、例えば、搬送台車により搬送される基板を収容したカセット（物品）を、処理装置であるチャンバに移載する装置がある（例えば、特許文献１参照）。特許文献１の移載装置においては、搬送台車ユニットによって搬送されるカセットを、カセット搬送ユニット（移載装置）が搬送台車ユニットからチャンバの上方に設けられる荷受台に移載する。或いは、チャンバにおいて処理された基板が収容されたカセットを、カセット搬送ユニットが上記荷受台から搬送台車ユニットに移載する。
カセット搬送ユニットは、カセットを載置して水平方向に出退移動させるフォーク部と、当該フォーク部を旋回する旋回部と、フォーク部を昇降する昇降部と、を備える。カセット搬送ユニットは、搬送台車ユニットに向けて伸長させたフォーク部を昇降部によりカセットの下方から上昇させることで、フォーク部にカセットを載置させる。そして、カセット搬送ユニットは、カセットを載置したフォーク部を屈曲させた状態で旋回部により旋回させることで、カセットをチャンバの上方の荷受台まで移載する。 As the transfer device, for example, there is a device for transferring a cassette (article) containing a substrate transported by a transport trolley to a chamber which is a processing device (see, for example, Patent Document 1). In the transfer device of Patent Document 1, the cassette conveyed by the transfer carriage unit is transferred from the transfer carriage unit to the load receiving table provided above the chamber by the cassette transfer unit (transfer device). Alternatively, the cassette transfer unit transfers the cassette containing the substrate processed in the chamber from the load receiving table to the transfer carriage unit.
The cassette transfer unit includes a fork portion on which a cassette is placed and moved back and forth in the horizontal direction, a swivel portion that swivels the fork portion, and an elevating portion that raises and lowers the fork portion. In the cassette transport unit, the cassette is placed on the fork portion by raising the fork portion extended toward the transport carriage unit from below the cassette by the elevating portion. Then, the cassette transfer unit transfers the cassette to the loading platform above the chamber by turning the fork portion on which the cassette is placed by the swivel portion in a bent state.

韓国登録特許第１０－１５１１９６３号公報Korean Registered Patent No. 10-1511963

しかしながら、上記のような従来の移載装置においては、フォーク部より低い位置に昇降部を配置し、さらに昇降部の下方に旋回部を配置する構成であるため、フォーク部の下方或いは近傍に昇降部及び旋回部の設置スペースを確保しなければならず、移載装置全体の低床化が難しいという問題があった。
また、従来の移載装置においては、昇降部がフォーク部の近傍に配置されていることから、フォーク部の出退移動が昇降部により２方向又は３方向に制限されるという問題があった。 However, in the conventional transfer device as described above, since the elevating part is arranged at a position lower than the fork part and the swivel part is further arranged below the elevating part, the elevating part is moved up and down below or near the fork part. There is a problem that it is difficult to lower the floor of the entire transfer device because it is necessary to secure the installation space for the section and the swivel section.
Further, in the conventional transfer device, since the elevating portion is arranged in the vicinity of the fork portion, there is a problem that the moving of the fork portion in and out is restricted in two or three directions by the elevating portion.

そこで、本発明は、物品を載置して水平方向に出退移動させるフォーク部の出退移動が４方向において可能であるとともに、装置全体の低床化が可能な移載装置を提供することを目的とする。 Therefore, the present invention provides a transfer device capable of moving the fork portion to and from the fork portion on which an article is placed and moving in and out in the horizontal direction in four directions and lowering the floor of the entire device. With the goal.

本発明の解決しようとする課題は以上であり、次にこの課題を解決するための手段を説明する。 The problem to be solved by the present invention has been described above, and next, the means for solving this problem will be described.

即ち、本発明の移載装置は、物品を載置して水平方向に出退移動させるフォーク部と、前記フォーク部を旋回する旋回部と、前記フォーク部を昇降する昇降部と、前記旋回部により旋回される前記フォーク部の旋回円より外側に配置される４本の支柱と、を備え、前記昇降部は、前記４本の支柱のそれぞれに設けられて、前記旋回部により旋回される前記フォーク部の旋回円より外側に配置され、前記フォーク部は、前記４本の支柱に支持されるとともに、前記４本の支柱のそれぞれに設けられる前記昇降部により昇降され、前記４本の支柱は、その長手方向の高さが、前記フォーク部が出退移動する水平方向の軌道より低くなるように構成されるものである。
上記構成では、昇降部が旋回部により旋回される前記フォーク部の旋回円より外側に配置されることで、昇降部とフォーク部とが離れた位置に配置されるとともに、昇降部が前記フォーク部の旋回円より外側の位置でフォーク部の昇降を行う。 That is, the transfer device of the present invention has a fork portion on which an article is placed and moved back and forth in the horizontal direction, a swivel portion that swivels the fork portion, an elevating portion that raises and lowers the fork portion, and the swivel portion . The fork portion is provided with four columns arranged outside the swivel circle of the fork portion, and the elevating portion is provided on each of the four columns and swiveled by the swivel portion. The fork portion is arranged outside the swivel circle of the fork portion , the fork portion is supported by the four columns, and is raised and lowered by the elevating portion provided on each of the four columns, and the four columns are raised and lowered. The height in the longitudinal direction thereof is configured to be lower than the horizontal trajectory in which the fork portion moves back and forth .
In the above configuration, the elevating portion is arranged outside the swivel circle of the fork portion that is swiveled by the swivel portion, so that the elevating portion and the fork portion are arranged at separate positions, and the elevating portion is arranged at the fork portion. The fork is raised and lowered at a position outside the turning circle of.

上記構成では、フォーク部の昇降を、４本の支柱のそれぞれに設けられる昇降部によって行う。すなわち、フォーク部の昇降を４軸により行う。 In the above configuration, the fork portion is raised and lowered by the raising and lowering portions provided on each of the four columns. That is, the fork portion is raised and lowered by four axes.

本発明の移載装置は、上記移載装置において、移載装置全体を水平方向に移動させるための走行部を備えるものである。
上記構成では、走行部を走行させることにより、移載装置全体が水平方向に移動する。 The transfer device of the present invention includes a traveling unit for moving the entire transfer device in the horizontal direction in the transfer device.
In the above configuration, the entire transfer device moves in the horizontal direction by traveling the traveling unit.

本発明の移載装置によれば、昇降部が旋回部により旋回される前記フォーク部の旋回円より外側に配置されることで、昇降部とフォーク部とが離れた位置に配置される。そのため、フォーク部の下方に昇降部の設置スペースを確保する必要がなく、移載装置全体の低床化を容易に行うことができる。
また、昇降部とフォーク部とが離れた位置に配置されるため、フォーク部の出退移動が昇降部の配置により制限されることなく、フォーク部を４方向に出退移動させることができる。 According to the transfer device of the present invention, the elevating part and the fork part are arranged at a position separated from each other by arranging the elevating part outside the swirling circle of the fork part swirled by the swivel part. Therefore, it is not necessary to secure an installation space for the elevating part below the fork part, and the floor of the entire transfer device can be easily lowered.
Further, since the elevating portion and the fork portion are arranged at separate positions, the fork portion can be moved back and forth in four directions without being restricted by the arrangement of the elevating portion.

本発明に係る移載装置が設けられる製造設備の平面図である。It is a top view of the manufacturing equipment provided with the transfer apparatus which concerns on this invention. 同移載装置の斜視図であり、（ａ）は、フォーク部の屈伸式アームを屈曲させた場合の斜視図、（ｂ）は、フォーク部の屈伸式アームを伸長させた場合の斜視図である。It is a perspective view of the transfer device, FIG. be. 同移載装置の平面図であり、（ａ）は、フォーク部の屈伸式アームを屈曲させた場合の平面図、（ｂ）は、フォーク部の屈伸式アームを伸長させた場合の平面図である。It is a plan view of the transfer device, FIG. be.

本発明に係る移載装置２０について説明する。
図１に示すように、移載装置２０は、半導体製品或いは液晶表示素子製品を製造する製造設備１０に設けられる装置であり、より詳しくは、半導体製品或いは液晶表示素子製品の仕掛かり品である基板に対して蒸着処理を行う蒸着装置１１に付設される装置である。なお、移載装置２０は、蒸着装置１１に付設される装置であるが、これに限定されるものではなく、蒸着装置１１等の処理装置間、或いは搬送台車と処理装置との間、等で物品の移載を行うために付設される装置であれば、蒸着装置１１以外の装置に付設される装置であっても構わない。
製造設備１０においては、板状体の基板を収容したカセット９０（「物品」の一例）が、台車走行レール１２に沿って走行する搬送台車１３によって、蒸着装置１１近傍まで搬送される。搬送台車１３によって搬送されるカセット９０は、その一方側面或いは両側面が開口した略箱型形状の部材により形成され、その内部に複数の基板を収容可能に構成されている。
搬送台車１３によって搬送されるカセット９０は、移載装置２０によって搬送台車１３から搬出され、蒸着装置１１の上方に設けられる昇降移載機１４の荷受台１５に移載される。昇降移載機１４の荷受台１５に移載されたカセット９０は、昇降移載機１４の係止部１４ａによってその上部が係止され、係止された状態で、荷受台１５の下方に設けられる蒸着装置１１のロードポート１１ａまで下降して移載される。
一方で、蒸着装置１１によって処理された基板を収容するカセット９０は、ロードポート１１ａの上方から下降する昇降移載機１４の係止部１４ａによってその上部が係止され、係止された状態で荷受台１５まで上昇して移載される。荷受台１５に移載されたカセット９０は、移載装置２０によって受け入れられ、搬送台車１３に移載される。 The transfer device 20 according to the present invention will be described.
As shown in FIG. 1, the transfer device 20 is a device provided in a manufacturing facility 10 for manufacturing a semiconductor product or a liquid crystal display element product, and more specifically, a in-process product of the semiconductor product or the liquid crystal display element product. It is an apparatus attached to the vapor deposition apparatus 11 that performs a vapor deposition process on a substrate. The transfer device 20 is a device attached to the vapor deposition device 11, but is not limited to this, and may be between processing devices such as the vapor deposition device 11 or between a transport trolley and the processing device. As long as it is an apparatus attached for transferring articles, it may be an apparatus attached to an apparatus other than the vapor deposition apparatus 11.
In the manufacturing equipment 10, the cassette 90 (an example of the “article”) containing the plate-shaped substrate is conveyed to the vicinity of the vapor deposition apparatus 11 by the transport carriage 13 traveling along the carriage traveling rail 12. The cassette 90 transported by the transport carriage 13 is formed of a substantially box-shaped member having one side surface or both side surfaces open thereof, and is configured to accommodate a plurality of substrates therein.
The cassette 90 transported by the transport trolley 13 is carried out from the transport trolley 13 by the transfer device 20, and is transferred to the load receiving table 15 of the elevating transfer machine 14 provided above the vapor deposition apparatus 11. The upper portion of the cassette 90 transferred to the loading platform 15 of the elevating transfer machine 14 is locked by the locking portion 14a of the elevating transfer machine 14, and the cassette 90 is provided below the loading platform 15 in a locked state. It descends to the load port 11a of the vapor deposition apparatus 11 and is transferred.
On the other hand, the cassette 90 accommodating the substrate processed by the thin-film deposition apparatus 11 is in a locked state in which the upper portion thereof is locked by the locking portion 14a of the elevating transfer machine 14 descending from above the load port 11a. It rises to the consignment table 15 and is transferred. The cassette 90 transferred to the loading platform 15 is received by the transfer device 20 and transferred to the transport carriage 13.

上述のように、移載装置２０は、カセット９０を載置して水平方向に出退移動させるものである。移載装置２０は、搬送台車１３からカセット９０を搬出し、搬出したカセット９０を昇降移載機１４の荷受台１５に移載する。また、移載装置２０は、荷受台１５からカセット９０を受け入れ、受け入れたカセット９０を搬送台車１３に移載する。
図１から図３に示すように、移載装置２０は、カセット９０を載置して水平方向に出退移動させるフォーク部２１と、フォーク部２１を旋回する旋回部２４と、フォーク部２１及び旋回部２４を支持する４本の支柱２６と、フォーク部２１を昇降する昇降部３１と、移載装置２０全体を水平方向に移動させる走行部３４と、から主に構成されている。 As described above, the transfer device 20 mounts the cassette 90 and moves it back and forth in the horizontal direction. The transfer device 20 carries out the cassette 90 from the transport trolley 13, and transfers the carried-out cassette 90 to the load receiving table 15 of the elevating transfer machine 14. Further, the transfer device 20 receives the cassette 90 from the consignment pedestal 15, and transfers the received cassette 90 to the transport trolley 13.
As shown in FIGS. 1 to 3, the transfer device 20 includes a fork portion 21 on which the cassette 90 is placed and moved back and forth in the horizontal direction, a swivel portion 24 that swivels the fork portion 21, a fork portion 21, and the fork portion 21. It is mainly composed of four columns 26 that support the swivel portion 24, an elevating portion 31 that raises and lowers the fork portion 21, and a traveling portion 34 that moves the entire transfer device 20 in the horizontal direction.

フォーク部２１は、その上面にカセット９０を載置するための載置部２２ａを有するフォーク２２と、フォーク２２を水平方向に出退移動させるための屈伸式アーム２３と、屈伸式アーム２３を駆動させる駆動モータ（図示せず）と、から主に構成されている。
フォーク２２は、カセット９０を載置して移載可能な略長方形状の枠体により構成される。フォーク２２は、枠体の上部に載置部２２ａが形成されている。フォーク２２は、駆動モータの駆動により屈伸式アーム２３を屈伸させることによって、搬送台車１３及び荷受台１５に対して出退移動を行う。
屈伸式アーム２３は、屈伸可能な一対のアーム状の部材により構成されている。屈伸式アーム２３は、その先端部にフォーク２２の基端部が取り付けられる。屈伸式アーム２３は、その基端部が旋回部２４に旋回可能に連結されている。屈伸式アーム２３は、駆動モータの駆動により一対のアーム状の部材を伸長させることにより、フォーク２２を前方向に水平に移動させる。屈伸式アーム２３は、駆動モータの駆動により一方のアーム状の部材を屈曲させることにより、フォーク２２を後方向に水平に移動させる。 The fork portion 21 drives a fork 22 having a mounting portion 22a for mounting the cassette 90 on its upper surface, a bending / stretching arm 23 for moving the fork 22 in and out in the horizontal direction, and a bending / stretching arm 23. It is mainly composed of a drive motor (not shown) to be driven.
The fork 22 is composed of a substantially rectangular frame on which the cassette 90 can be placed and transferred. The fork 22 has a mounting portion 22a formed on the upper portion of the frame body. The fork 22 moves back and forth with respect to the transport carriage 13 and the load receiving platform 15 by bending and stretching the bending and stretching arm 23 by driving a drive motor.
The bending / stretching arm 23 is composed of a pair of bending / stretching arm-shaped members. The base end portion of the fork 22 is attached to the tip end portion of the bending / stretching arm 23. The base end portion of the bending / stretching arm 23 is rotatably connected to the swivel portion 24. The bending / stretching arm 23 moves the fork 22 horizontally in the forward direction by extending a pair of arm-shaped members by driving a drive motor. The bending / stretching arm 23 causes the fork 22 to move horizontally in the rear direction by bending one of the arm-shaped members by driving a drive motor.

旋回部２４は、屈伸式アーム２３を支持するための旋回台２５と、旋回台２５を旋回駆動させる旋回駆動モータ（図示せず）と、から主に構成されている。
旋回台２５は、移載装置２０の中心部に設けられ、旋回駆動モータの駆動により旋回軸２５ａを回動させることにより回動する。旋回台２５は、その上部に屈伸式アーム２３の基端部が連結されている。旋回台２５が旋回駆動モータの駆動により回動することで、屈伸式アーム２３が旋回する。
４本の支柱２６は、支柱本体２７と、支柱本体２７を支持する基台２８と、から構成されている。支柱本体２７は角材により形成され、その長手方向の高さが、フォーク２２が出退移動する水平方向の軌道より低くなるように構成されている。すなわち、支柱本体２７は、フォーク２２の出退移動を制限しない（フォーク２２と干渉しない）高さで構成されている。図３（ａ）に示すように、４本の支柱２６は、旋回部２４により旋回されるフォーク部２１の旋回円Ｒより外側に配置されている。すなわち、４本の支柱２６は、屈伸式アーム２３が屈曲した状態でフォーク２２が旋回した際に、フォーク２２の先端及び基端と接触しない位置（フォーク２２の先端及びフォーク２２の基端と干渉しない位置）に配置されている。ここで、フォーク部２１の旋回円Ｒとは、屈伸式アーム２３が屈曲した状態でフォーク２２が旋回した際に、フォーク２２の先端及びフォーク２２の基端が移動することにより形成される円軌道をいう。
図２及び図３に示すように、４本の支柱２６のうち隣り合う支柱２６間には、渡し部材であるヨーク部２９が設けられている。すなわち、４本の支柱２６がヨーク部２９を介して繋げられている。ヨーク部２９は２方向に入れたピン構造（ピン接合）により構成される。ヨーク部２９をピン構造により構成することで、カセット９０の移載時に発生する昇降部３１の昇降ガイド３３や接合部への応力を軽減し、且つ部品誤差、組付け誤差を吸収することができる。
４本の支柱２６は、ヨーク部２９及びヨーク部２９間を支持する支持部材３０を介して、フォーク部２１及び旋回部２４を支持する。 The swivel portion 24 is mainly composed of a swivel base 25 for supporting the bending / extending arm 23 and a swivel drive motor (not shown) for swiveling and driving the swivel base 25.
The swivel base 25 is provided at the center of the transfer device 20, and rotates by rotating the swivel shaft 25a by driving a swivel drive motor. The base end portion of the bending / extending arm 23 is connected to the upper portion of the swivel base 25. When the swivel base 25 is rotated by the drive of the swivel drive motor, the bending / stretching arm 23 is swiveled.
The four columns 26 are composed of a column body 27 and a base 28 that supports the column body 27. The strut body 27 is formed of square lumber, and its height in the longitudinal direction is configured to be lower than the horizontal trajectory in which the fork 22 moves back and forth. That is, the column main body 27 is configured at a height that does not limit the movement of the fork 22 in and out (does not interfere with the fork 22). As shown in FIG. 3A, the four columns 26 are arranged outside the swivel circle R of the fork portion 21 swiveled by the swivel portion 24. That is, the four columns 26 interfere with the tip of the fork 22 and the base end of the fork 22 when the fork 22 turns with the bending and stretching arm 23 bent. It is placed in a position that does not. Here, the swivel circle R of the fork portion 21 is a circular orbit formed by the movement of the tip of the fork 22 and the base end of the fork 22 when the fork 22 is swiveled in a state where the bending / stretching arm 23 is bent. To say.
As shown in FIGS. 2 and 3, a yoke portion 29, which is a transfer member, is provided between adjacent columns 26 among the four columns 26. That is, the four columns 26 are connected via the yoke portion 29. The yoke portion 29 is configured by a pin structure (pin joint) inserted in two directions. By configuring the yoke portion 29 with a pin structure, it is possible to reduce the stress on the elevating guide 33 and the joint portion of the elevating portion 31 that occurs when the cassette 90 is transferred, and to absorb component errors and assembly errors. ..
The four columns 26 support the fork portion 21 and the swivel portion 24 via a support member 30 that supports between the yoke portion 29 and the yoke portion 29.

昇降部３１は、４本の支柱２６のそれぞれに設けられている。すなわち、移載装置２０においては、昇降部３１が、旋回部２４により旋回されるフォーク部２１の旋回円Ｒより外側に設けられている。昇降部３１がフォーク部２１の旋回円Ｒより外側に配置されることで、昇降部３１と、（屈伸式アーム２３の屈曲時の）フォーク部２１と、が離れた位置となる。そのため、フォーク部２１の下方に昇降部３１の設置スペースを確保する必要がなく、フォーク部２１及び旋回部２４を低い位置に配置することができる。すなわち、移載装置２０全体の低床化を容易に行うことができる。
また、昇降部３１は、フォーク部２１から離れた位置に配置され、さらに、フォーク２２が出退移動する高さより低く形成された４本の支柱２６に設けられていることから、フォーク２２の出退移動時にフォーク２２と接触することがない。そのため、フォーク２２の出退移動が昇降部３１の配置により制限されることなく、フォーク２２を４方向に出退移動させることができる。
図２に示すように、昇降部３１は、支柱２６に沿って設けられ昇降軸として機能するネジ軸、及び当該ネジ軸の回転に伴いネジ軸に対して螺合進退動作可能な可動部を有するボールネジ機構３２と、支柱２６に沿って設けられボールネジ機構３２の可動部をガイドする昇降ガイド３３と、から主に構成されている。昇降部３１は、ボールネジ機構３２の可動部がヨーク部２９に連結されている。昇降部３１は、図示しない昇降モータの駆動によりボールネジ機構３２のネジ軸を回転させる。当該ネジ軸の回転によりボールネジ機構３２の可動部がネジ軸に沿って移動する。当該可動部の移動によりヨーク部２９が支柱２６に沿って昇降する。そして、ヨーク部２９が昇降することでフォーク部２１及び旋回部２４が昇降する。
４本の支柱２６に設けられる昇降部３１は、４つのボールネジ機構３２と、４つの昇降モータと、をそれぞれ同期させることで、フォーク部２１を昇降させる。すなわち、移載装置２０においては、４本の支柱２６のそれぞれにフォーク部２１を昇降させるための昇降モータ（昇降駆動部）を設け、４本の支柱２６に設けた４体の昇降モータにより４本の支柱２６に設けた４本のネジ軸を駆動（４軸駆動）させることでフォーク部２１を昇降させる。昇降部３１を４軸駆動とすることで、カセット９０の移載時に、移載側（屈伸式アーム２３が伸長する側、フォーク２２の先端側）の昇降部３１の昇降モータに掛かる負荷を、反移載側（フォーク２２の基端側）の昇降部３１の昇降モータによって補助することができる。そのため、４本の支柱２６に設けられる４体の昇降モータのモータ容量を小さくすることができる。
４本の支柱２６間に設けられるヨーク部２９の下方には、各支柱２６に設けられる昇降部３１における昇降のズレ（各軸のズレ量）を検知する距離計（図示せず）が設けられている。当該距離計が検知したヨーク部２９の昇降距離から各ヨーク部２９の昇降距離のズレを算出することで、ヨーク部２９を昇降させる各昇降部３１における昇降のズレ量を検知する。当該距離計により各昇降部３１における昇降のズレを検知することで、当該昇降のズレが所定のズレ量以上の場合には、昇降部３１によるフォーク部２１の昇降を停止させ、フォーク部２１の昇降時に発生するボールネジ機構３２への過剰な負荷を軽減している。 The elevating portion 31 is provided on each of the four columns 26. That is, in the transfer device 20, the elevating portion 31 is provided outside the swivel circle R of the fork portion 21 swiveled by the swivel portion 24. By arranging the elevating portion 31 outside the turning circle R of the fork portion 21, the elevating portion 31 and the fork portion 21 (when the bending / stretching arm 23 is bent) are separated from each other. Therefore, it is not necessary to secure an installation space for the elevating portion 31 below the fork portion 21, and the fork portion 21 and the swivel portion 24 can be arranged at a low position. That is, the floor of the transfer device 20 as a whole can be easily lowered.
Further, since the elevating portion 31 is arranged at a position away from the fork portion 21, and is further provided on the four columns 26 formed to be lower than the height at which the fork 22 moves back and forth, the fork 22 comes out. It does not come into contact with the fork 22 when moving backward. Therefore, the fork 22 can be moved back and forth in four directions without being restricted by the arrangement of the elevating portion 31.
As shown in FIG. 2, the elevating portion 31 has a screw shaft provided along the support column 26 and functioning as an elevating shaft, and a movable portion capable of screwing forward and backward with respect to the screw shaft as the screw shaft rotates. It is mainly composed of a ball screw mechanism 32 and an elevating guide 33 provided along a support column 26 to guide a movable portion of the ball screw mechanism 32. In the elevating portion 31, the movable portion of the ball screw mechanism 32 is connected to the yoke portion 29. The elevating unit 31 rotates the screw shaft of the ball screw mechanism 32 by driving an elevating motor (not shown). The rotation of the screw shaft causes the movable portion of the ball screw mechanism 32 to move along the screw shaft. The movement of the movable portion causes the yoke portion 29 to move up and down along the support column 26. Then, as the yoke portion 29 moves up and down, the fork portion 21 and the swivel portion 24 move up and down.
The elevating portion 31 provided on the four columns 26 raises and lowers the fork portion 21 by synchronizing the four ball screw mechanisms 32 and the four elevating motors, respectively. That is, in the transfer device 20, an elevating motor (elevating drive unit) for raising and lowering the fork portion 21 is provided on each of the four columns 26, and four elevating motors provided on the four columns 26 are used. The fork portion 21 is moved up and down by driving (four-axis drive) the four screw shafts provided on the book column 26. By driving the elevating part 31 in four axes, the load applied to the elevating motor of the elevating part 31 on the transfer side (the side where the bending / stretching arm 23 extends, the tip side of the fork 22) when the cassette 90 is transferred can be reduced. It can be assisted by the elevating motor of the elevating portion 31 on the non-transfer side (base end side of the fork 22). Therefore, the motor capacity of the four elevating motors provided on the four columns 26 can be reduced.
Below the yoke portion 29 provided between the four columns 26, a rangefinder (not shown) is provided to detect the deviation of the elevation (the amount of deviation of each axis) in the elevating portion 31 provided on each column 26. ing. By calculating the deviation of the elevating distance of each yoke portion 29 from the elevating distance of the yoke portion 29 detected by the range finder, the amount of elevating deviation in each elevating portion 31 that elevates the yoke portion 29 is detected. By detecting the deviation of the ascending / descending part in each elevating part 31 by the range finder, if the deviation of the elevating part is equal to or more than a predetermined amount, the elevating part 31 stops the ascending / descending of the fork part 21 and the fork part 21. The excessive load on the ball screw mechanism 32 generated during ascending / descending is reduced.

図１から図３に示すように、走行部３４は、４本の支柱２６の各基台２８に設けられる走行ガイド３５と、各基台２８の下方に敷設される走行レール３６と、から構成される摺動機構である。走行部３４は、不図示の走行駆動部により移載装置２０全体を水平方向（走行方向）に移動させる。
図１に示すように、走行ガイド３５は、走行レール３６に沿って摺動可能なブロック部材により構成される。
走行レール３６は、平面視で搬送台車１３の停止位置から、蒸着装置１１（荷受台１５）の設置位置に向けて所定の長さで延設されている。
上記不図示の走行駆動部は、例えば、走行レール３６に沿って設けられるラックと、走行ガイド３５に回転可能に設けられ前記ラックに係合するピニオンと、を備え、当該ピニオンの回転により走行ガイド３５を走行レール３６に沿って摺動させるラックアンドピニオン機構により構成される。 As shown in FIGS. 1 to 3, the traveling unit 34 includes a traveling guide 35 provided on each base 28 of the four columns 26, and a traveling rail 36 laid below each base 28. It is a sliding mechanism. The traveling unit 34 moves the entire transfer device 20 in the horizontal direction (traveling direction) by a traveling drive unit (not shown).
As shown in FIG. 1, the traveling guide 35 is composed of a block member slidable along the traveling rail 36.
The traveling rail 36 extends from the stop position of the transport carriage 13 in a plan view to the installation position of the vapor deposition apparatus 11 (load receiving platform 15) by a predetermined length.
The traveling drive unit (not shown) includes, for example, a rack provided along the traveling rail 36 and a pinion rotatably provided on the traveling guide 35 and engaged with the rack, and the traveling guide is provided by rotation of the pinion. It is configured by a rack and pinion mechanism that slides 35 along the traveling rail 36.

次に、移載装置２０によるカセット９０の移載方法について説明する。
図１から図３に示すように、例えば、カセット９０を搬送台車１３から昇降移載機１４の荷受台１５に移載する場合には、まず、４本の支柱２６のそれぞれに設けられる昇降部３１によりフォーク部２１及び旋回部２４を下降させる。この時、４本の支柱２６のそれぞれに設けられる昇降部３１の昇降モータを同期して駆動させ、ボールネジ機構３２の可動部を昇降ガイド３３に沿って下降させる。これにより、４本の支柱２６間を支持する４か所のヨーク部２９、及びヨーク部２９を支持する支持部材３０のそれぞれが略同じ下降量で下降し、ヨーク部２９及び支持部材３０の下降とともに、フォーク部２１及び旋回部２４が下降する。この時、フォーク部２１及び旋回部２４は、４本の支柱２６により囲まれて形成される空間内に沈み込むように下降する。
フォーク部２１が下降すると、フォーク部２１の駆動モータを駆動して屈伸式アーム２３を伸長させ、フォーク２２を、搬送台車１３上に載置されているカセット９０の下方位置まで移動させる。フォーク２２をカセット９０の下方位置まで移動させると、昇降部３１の昇降モータのそれぞれを同期して駆動させ、ボールネジ機構３２の可動部を昇降ガイド３３に沿って上昇させる。これにより、フォーク部２１が上昇してフォーク２２の載置部２２ａにカセット９０が載置される。そして、カセット９０がフォーク２２によって搬送台車１３から持ち上げられる。
カセット９０が搬送台車１３から持ち上げられると、フォーク部２１の駆動モータを駆動して屈伸式アーム２３を屈曲させ、フォーク２２を移載装置２０の中心位置まで移動させる。そして、旋回部２４の旋回駆動モータを駆動して旋回台２５を回動させ、フォーク部２１を昇降移載機１４の荷受台１５の方向に旋回させる。
フォーク部２１を旋回させると、フォーク部２１の駆動モータを駆動して屈伸式アーム２３を伸長させ、フォーク２２を荷受台１５の上方位置まで移動させる。そして、昇降部３１の昇降モータを駆動してフォーク部２１を下降させる。これにより、フォーク２２上のカセット９０は荷受台１５まで下降する。そして、フォーク２２が荷受台１５を通過して下降した際に、カセット９０がフォーク２２から荷受台１５に移載される。 Next, a method of transferring the cassette 90 by the transfer device 20 will be described.
As shown in FIGS. 1 to 3, for example, when the cassette 90 is transferred from the transport carriage 13 to the load receiving platform 15 of the elevating transfer machine 14, first, the elevating portions provided on each of the four columns 26. The fork portion 21 and the swivel portion 24 are lowered by the 31. At this time, the elevating motors of the elevating portions 31 provided on each of the four columns 26 are synchronously driven to lower the movable portion of the ball screw mechanism 32 along the elevating guide 33. As a result, each of the four yoke portions 29 that support between the four columns 26 and the support member 30 that supports the yoke portion 29 descends by substantially the same amount of descent, and the yoke portion 29 and the support member 30 descend. At the same time, the fork portion 21 and the swivel portion 24 are lowered. At this time, the fork portion 21 and the swivel portion 24 descend so as to sink into the space formed by being surrounded by the four columns 26.
When the fork portion 21 descends, the drive motor of the fork portion 21 is driven to extend the bending / stretching arm 23, and the fork 22 is moved to a lower position of the cassette 90 mounted on the transport carriage 13. When the fork 22 is moved to the lower position of the cassette 90, each of the elevating motors of the elevating part 31 is driven synchronously, and the movable part of the ball screw mechanism 32 is raised along the elevating guide 33. As a result, the fork portion 21 rises and the cassette 90 is mounted on the mounting portion 22a of the fork 22. Then, the cassette 90 is lifted from the transport carriage 13 by the fork 22.
When the cassette 90 is lifted from the transport carriage 13, the drive motor of the fork portion 21 is driven to bend the bending / stretching arm 23, and the fork 22 is moved to the center position of the transfer device 20. Then, the swivel drive motor of the swivel portion 24 is driven to rotate the swivel base 25, and the fork portion 21 is swiveled in the direction of the load receiving base 15 of the elevating transfer machine 14.
When the fork portion 21 is turned, the drive motor of the fork portion 21 is driven to extend the bending / stretching arm 23, and the fork 22 is moved to the upper position of the load receiving table 15. Then, the elevating motor of the elevating portion 31 is driven to lower the fork portion 21. As a result, the cassette 90 on the fork 22 descends to the loading platform 15. Then, when the fork 22 passes through the load receiving table 15 and descends, the cassette 90 is transferred from the fork 22 to the load receiving table 15.

以上のように、本発明に係る移載装置２０は、昇降部３１が旋回部２４により旋回されるフォーク部２１の旋回円Ｒより外側に配置されることで、昇降部３１とフォーク部２１とが離れた位置に配置される。そのため、フォーク部２１の下方に昇降部３１の設置スペースを確保する必要がなく、移載装置２０全体の低床化を容易に行うことができる。また、昇降部３１とフォーク部２１とが離れた位置に配置されるため、フォーク部２１の出退移動が昇降部３１の配置により制限されることなく、フォーク部２１を４方向に出退移動させることができる。 As described above, in the transfer device 20 according to the present invention, the elevating portion 31 and the fork portion 21 are arranged by arranging the elevating portion 31 outside the swivel circle R of the fork portion 21 swiveled by the swivel portion 24. Are placed at distant positions. Therefore, it is not necessary to secure an installation space for the elevating portion 31 below the fork portion 21, and the floor of the entire transfer device 20 can be easily lowered. Further, since the elevating portion 31 and the fork portion 21 are arranged at separate positions, the fork portion 21 can be moved back and forth in four directions without being restricted by the arrangement of the elevating portion 31. Can be made to.

なお、本実施の形態においては、移載装置２０により移載される物品はカセット９０に限定されるものではなく、フォーク部２１によって移載可能な物品であれば構わない。 In the present embodiment, the article to be transferred by the transfer device 20 is not limited to the cassette 90, and any article that can be transferred by the fork portion 21 may be used.

２０ 移載装置
２１ フォーク部
２４ 旋回部
２６ 支柱
３１ 昇降部
３４ 走行部
９０ カセット（物品）
Ｒ 旋回円
20 Transfer device 21 Fork part 24 Swivel part 26 Strut 31 Elevating part 34 Traveling part 90 Cassette (article)
R swivel circle

Claims (3)

物品を載置して水平方向に出退移動させるフォーク部と、
前記フォーク部を旋回する旋回部と、
前記フォーク部を昇降する昇降部と、
前記旋回部により旋回される前記フォーク部の旋回円より外側に配置される４本の支柱と、
を備え、
前記昇降部は、前記４本の支柱のそれぞれに設けられて、前記旋回部により旋回される前記フォーク部の旋回円より外側に配置され、
前記フォーク部は、前記４本の支柱に支持されるとともに、前記４本の支柱のそれぞれに設けられる前記昇降部により昇降され、
前記４本の支柱は、その長手方向の高さが、前記フォーク部が出退移動する水平方向の軌道より低くなるように構成されること
を特徴とする移載装置。
A fork part on which items are placed and moved in and out in the horizontal direction,
A swivel portion that swivels the fork portion and
An elevating part that raises and lowers the fork part and
Four columns arranged outside the swivel circle of the fork portion swiveled by the swivel portion, and
Equipped with
The elevating portion is provided on each of the four columns and is arranged outside the swivel circle of the fork portion swiveled by the swivel portion .
The fork portion is supported by the four columns and is raised and lowered by the elevating portion provided on each of the four columns.
The height of the four columns in the longitudinal direction is configured to be lower than the horizontal trajectory in which the fork portion moves back and forth.
A transfer device featuring.
 移載装置全体を水平方向に移動させるための走行部を備えること
を特徴とする請求項１に記載の移載装置。 The transfer device according to claim 1, further comprising a traveling unit for moving the entire transfer device in the horizontal direction . 前記４本の支柱のそれぞれに前記フォーク部を昇降させるための昇降モータを設けること
を特徴とする請求項１又は請求項２に記載の移載装置。 The transfer device according to claim 1 or 2, wherein a lifting motor for raising and lowering the fork portion is provided on each of the four columns .
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KR1020190130739A KR20200060239A (en) 2018-11-21 2019-10-21 Transfer apparatus

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