JP4321631B2 - Transport system, transport method, and transport vehicle - Google Patents

Description

  The present invention relates to a transport system for transferring a load between a transport vehicle and a processing apparatus, and more particularly to a transport system having an interlock communication function.

  In the production lines of semiconductor devices and liquid crystal display devices, the cases of unmanned and automated work in each process and workpiece transfer between processes are increasing as the precision of microfabrication increases and the number of processes increases. In particular, when transferring workpieces between processes, the automated guided vehicle transfers workpieces according to the process while communicating with each processing apparatus.

  For example, in a semiconductor device manufacturing line, an AGV (Automated Guided Vehicle) that is self-propelled by a wheel on a predetermined conveyance path is used as an automatic guided vehicle. The AGV delivers a wafer cassette by projecting an arm and a hand to a semiconductor processing apparatus disposed on both sides of the conveyance path.

  The above-described delivery of the wafer cassette is realized by a computer installed in each of the automatic guided vehicle and the semiconductor processing apparatus based on an instruction from a control system that controls the entire semiconductor device manufacturing line. In realizing this, there are many cases in which optical data communication devices provided in both the automatic guided vehicle and the semiconductor processing device are employed.

  In addition, since wafers and the like that are transferred from the production line of semiconductor devices are expensive and easily broken, it is necessary to safely carry out automatic conveyance so as not to give an impact. For this reason, by utilizing the optical data communication device, an interlock communication system is adopted in which the transfer partner is identified, the status of the other party is consulted and the transfer work is performed after confirming the reply from the other party. ing.

  Here, the transfer operation | movement by the conventional interlock communication is demonstrated.

  FIG. 10 is a timing chart showing the interlock communication by the optical signal when the automatic guided vehicle loads and unloads the wafer cassette on the semiconductor processing apparatus. First, when the automatic guided vehicle arrives in front of the processing device station, the automatic guided vehicle turns on a transfer request signal and transmits it to the semiconductor processing device (S81). Thereby, interlock communication is started. The semiconductor processing apparatus that has received the transfer request signal checks whether or not another wafer cassette already exists in the wafer cassette mounting portion, and if the wafer cassette is not in the mounting portion, the wafer cassette can be received. A transfer permission signal indicating the presence is turned ON and transmitted to the automatic guided vehicle (S82). The interlock is established when the automatic transfer vehicle receives this transfer permission signal. Thereafter, the automatic guided vehicle turns on the transfer operation signal and starts the transfer operation for the first time. The time Ta from the transfer request signal transmission to the start of the transfer operation is, for example, about 5 seconds in the semiconductor device manufacturing line, and becomes a standby time during which the automatic guided vehicle does not operate.

  Eventually, when the transfer operation of the automatic guided vehicle is completed, the automatic guided vehicle turns off the transfer operation signal and simultaneously turns on the transfer end request signal (S83) and transmits it to the semiconductor processing apparatus (S84). . The semiconductor processing apparatus that has received the transfer end request signal confirms that the wafer cassette is present in the mounting section, turns on the transfer end permission signal, and transmits it to the automatic guided vehicle (S85). The automatic guided vehicle that has received the transfer end permission signal turns OFF the transfer end request signal and the transfer request signal (S86). At this time, the interlock is released and the interlock communication ends. The time Tc from when this automatic guided vehicle transmits the transfer end request signal to when it receives the transfer end permission signal is also, for example, about 5 seconds, similar to Ta. During this time, the automatic guided vehicle does not operate, The waiting time is the same as before the transfer operation starts.

  Also, when loading a wafer cassette from the semiconductor processing apparatus station to the automatic guided vehicle, the same procedure is performed, and the same standby is performed before the transfer operation of the automatic guided vehicle is started and after the transfer operation is completed. Time occurs.

  Since this standby time is generated for each processing step in a semiconductor device manufacturing line with a large number of processes, the generation of the standby time reduces the manufacturing efficiency of the entire manufacturing line, and becomes an obstacle to manufacturing cost reduction.

  As a means for solving this problem, the automatic guided vehicle transmits a transfer request signal to the other semiconductor processing device until the automatic guided vehicle arrives in front of the processing unit station, that is, while the automatic guided vehicle is moving. An optical data transmission system for starting communication has been proposed (Patent Document 1). Specifically, in order to realize optical communication during the movement of the automatic guided vehicle, the light emitting area and the light receiving area of each optical communication device installed in both the automatic guided vehicle and the semiconductor processing apparatus of the transfer partner are enlarged. In order to avoid interference between the processing devices due to the enlargement of these areas, the self ID is set.

In other words, this optical data transmission system starts interlock communication without interfering with other semiconductor processing devices before the automatic guided vehicle arrives in front of the other processing unit station, and eliminates waiting time of the automatic guided vehicle. Alternatively, the manufacturing efficiency is improved by shortening.
JP 2000-299364 A

  However, in a semiconductor production line where the number of processes is large and the process becomes complicated, the automatic guided vehicle and the processing equipment station are not facing each other until the automatic guided vehicle arrives in front of the processing equipment station. Therefore, the device arrangement for mutual communication is not always made. Therefore, the interlock is not always established when it arrives in front of the processor station.

  Therefore, there is a case where waiting time of the automatic guided vehicle occurs after the arrival at the processing station before the interlock is established, and the manufacturing time is not effectively shortened as a whole manufacturing process. Occurs.

  In view of the foregoing, the present invention provides a semiconductor manufacturing line that has a large number of processes and complicated processes, and the automatic guided vehicle can be connected to the processing unit station without starting the interlock communication while the automatic guided vehicle is moving. It is an object of the present invention to provide a transport system in which a transfer operation is started immediately after a previous arrival without a waiting time.

In order to achieve the above object, a transfer system according to the present invention is a transfer system for transferring a load between a transfer vehicle and an apparatus, and one of the transfer vehicle and the apparatus is mounted on the load. The transfer mechanism unit that transfers the load by taking out the load from the other side of the transport vehicle and the device or taking out the load from the other side, and requesting permission to start the transfer to the other side A transfer request signal and an end request signal for requesting the transfer end permission to the other party, a transfer permission signal indicating permission for the transfer start permission request and the transfer end permission A communication means for obtaining an end permission signal indicating permission for the request, and before the communication means obtains the transfer permission signal, a transfer operation is performed within a range in which the transfer mechanism section does not enter the counterpart side. Control the transfer mechanism In addition, before the transfer operation of the transfer mechanism unit is completed, and when the transfer mechanism unit leaves the counterpart, the communication unit controls the communication unit so as to issue the end request signal. And a control means .

Thereby, one of the transport vehicle and the apparatus can perform the transfer operation immediately after the transport vehicle is stopped without holding the waiting time until the transfer permission signal is acquired. Therefore, while ensuring the safety of the transferred object and the transport system, the stop time of the transport vehicle is shortened, and accordingly, the manufacturing time is shortened, resulting in a reduction in manufacturing cost.
Further, before the transfer operation of the transfer mechanism unit is completed, one of the transport vehicle and the apparatus transmits an end request signal, and at the same time, the transfer end operation in its own region can be executed. Then, when one of the transport vehicle and the apparatus receives the end permission signal, the transfer operation can be finished already, and the transport vehicle can move immediately after the completion. This leads to the prevention of aging of the processed wafer and the like as much as possible.

  The “range that does not enter the other party” means a range in which no physical interference occurs between devices regardless of what the other party performs, specifically, in the operation space of the other party. It is a range that does not enter.

  Here, the transfer mechanism section includes a shutter that covers the loaded cargo, and the control means may perform control to open the shutter as a transfer operation within a range that does not enter the opponent side. Good.

  Thereby, the damage of the transfer object during the movement of the transport vehicle and immediately after the stop is prevented without increasing the stop time of the transport vehicle.

  Further, the communication means further issues an end request signal requesting the end permission of transfer to the other party, obtains an end permission signal indicating permission for the request, and the control means further includes the transfer means. The communication unit may be controlled so that the communication unit issues the termination request signal when the mechanism unit leaves the other party.

  As a result, one of the transport vehicle and the apparatus can transmit the end request signal, and at the same time, the transfer end operation in its own region can be executed. Then, since the transfer operation is already completed when one of the transport vehicle and the apparatus receives the end permission signal, the transport vehicle can move immediately after the completion. This leads to the prevention of aging of the processed wafer and the like as much as possible.

In order to achieve the above object, a transport method according to the present invention is a transport method for transferring a load between a transport vehicle and an apparatus, and one of the transport methods between the transport vehicle and the apparatus. A communication step for requesting transfer permission from the device to the other device, and performing communication for presenting permission for the request from the other device to the one device, and the permission in the communication step. Among the operations in which the one device transfers a package to or from the other device before the presentation, a transfer operation that executes the pre-transfer operation until the one device enters the other device. After the loading step and the pre-transfer step, and after the load is transferred, the transfer mechanism for transferring the load, which the one device has, is stored in the one device. Between the post-step and the post-transfer step, the transfer When the mechanism has exited from the other device, to the other device from the one device, characterized in that it comprises a termination permission request step of requesting end permission of transfer.

  At this time, in the transfer step, the transfer operation is performed until the one device enters the other device before the permission is presented in the communication step.

Thus, one of the transport vehicle and the apparatus can start the transfer step immediately after the transport vehicle is stopped without holding the waiting time before the transfer permission is presented by the opponent. Therefore, while ensuring the safety of the transferred product and the transport system, the time during which the transport vehicle is stopped is shortened, and accordingly, the manufacturing time is shortened, resulting in a reduction in manufacturing cost.
Further, before the transfer operation of the transfer mechanism unit is completed, one of the transport vehicle and the apparatus transmits an end request signal, and at the same time, the transfer end operation in its own region can be executed. Then, when one of the transport vehicle and the apparatus receives the end permission signal, the transfer operation can be finished already, and the transport vehicle can move immediately after the completion. This leads to the prevention of aging of the processed wafer and the like as much as possible.

  Note that the present invention can be realized not only as a transport system and a transport method, but also as a transport vehicle or a device that performs a characteristic operation of the transport system.

  According to the present invention, after the automatic guided vehicle arrives in front of the processing unit station in a semiconductor manufacturing line where the number of processes is large and the process is complicated, the waiting time of the automatic guided vehicle due to the interlock communication does not occur. The stop time of the transport vehicle before the station is shortened. Therefore, the manufacturing time is shortened, and as a result, the manufacturing cost is reduced, and the practical value of the present invention is extremely high.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram showing an example of the configuration of a transfer system according to the present invention. In this embodiment, the configuration of a wafer cassette transfer system in a semiconductor device manufacturing line is shown. This system includes an automatic guided vehicle 1, a processing device 2, an optical communication 3, a wafer cassette 4, a transported vehicle controller 6, a terminal device 7, a LAN 8, and a transport rail 9.

  The automatic guided vehicle 1 includes a scalar arm 11 and an optical data communication device 5. The automatic guided vehicle 1 communicates with the transport vehicle controller 6 through the optical communication 3 and moves on the transport rail 9.

  The processing device 2 includes a processing device station 21 and an optical data communication device 5.

  The automatic guided vehicle 1 and the processing device 2 perform interlock communication via the optical data communication device 5 and the optical communication 3 respectively.

  The transport vehicle controller 6 gives various instructions to the automatic guided vehicle 1 via the optical communication 10 according to the instructions received from the terminal device 7, the entire production line procedure and the specifications of the automatic guided vehicle 1, and makes various settings. To do.

  The terminal device 7 is a terminal device that accesses the transport vehicle controller 6 via the LAN 8 and gives various instructions to the transport vehicle controller 6 or performs various settings.

  The automatic guided vehicle 1 receives a transfer instruction of the wafer cassette 4 from the transport vehicle controller 6, stops in front of the processing apparatus station 21, and performs wafer-cassette 4 while performing interlock communication with the processing apparatus 2 via the optical communication 3. The transfer operation is started.

  The automatic guided vehicle 1 is an example of a component of the transport system according to the present invention, and its mechanism will be described with reference to a plan view of the automatic guided vehicle 1 shown in FIG. 2 and a front view of the automatic guided vehicle 1 shown in FIG. .

  The automatic guided vehicle 1 includes a scalar arm 11, a shutter 12, an elevating unit 13, a turning table 14, and a transport vehicle control unit 15.

  The turning table 14 includes a distance sensor 141.

  The processing apparatus station 21 includes a target 211 for the distance sensor 141. The distance sensor 141 and the target 211 are operated, and a shift of the stop position of the automatic guided vehicle 1 with respect to the processing apparatus station 21 is detected.

  The turning table has a function of freely turning the scalar arm 11 so that the protruding direction of the scalar arm during the transfer operation becomes the direction of the processing apparatus of the transfer partner.

  The scalar arm 11 includes a first arm 111, a second arm 112, and a hand 113 having a freely swingable article support table 114 provided at the tip of the second arm 112, and is advanced and retracted by a drive mechanism.

  The shutter 12 is for the purpose of protecting the wafer cassette 4 as a transfer object, and is closed while the automatic guided vehicle 1 is moving on the transfer rail 9. The automatic guided vehicle 1 is in front of the processing station 21. It is released when it is stopped.

  When lowering the wafer cassette 4 to the processing apparatus station 21, the elevating unit 13 lowers the entire scalar arm 11 to separate the article support table 114 from the wafer cassette 4. Further, when receiving (or taking out) the wafer cassette 4 from the processing apparatus station 21, the elevating unit 13 raises the entire scalar arm 11 in order to bring the article support table 114 and the wafer cassette 4 into contact with each other.

  Note that the scalar arm 11 may be configured such that the lifting unit 13 is built in the hand 113 and only the article support table 114 is lifted.

  The transport vehicle control unit 15 controls the movements of the scalar arm 11, the shutter 12, the lifting unit 13, and the turning table 14 described above.

  FIG. 4 is a block diagram showing a functional configuration of the transport system according to the present invention shown in FIG.

  This transport system functionally includes a transfer mechanism 31, a transport vehicle control unit 15, and a transport vehicle communication unit 33 in the automatic guided vehicle 1, and a mounting unit 34, a device control unit 35, and a device in the processing device 2. A communication unit 36 and a process unit 37 are provided.

  The transfer mechanism unit 31 is a mechanism unit that transfers a package by inserting (loading) the loaded package into the processing device 2 or taking out the package from the processing device 2 (unloading). 3 includes a scalar arm 11, a shutter 12, an elevating unit 13, and a turning table 14. Under the control of the conveyance vehicle control unit 15, the shutter of the automatic guided vehicle 1 can be opened and closed, and the scalar arm 11 can be expanded and contracted, turned and raised and lowered Execute.

  The transport vehicle communication unit 33 includes the optical data communication device 5 in FIG. 1, transmits an optical signal to the device communication unit 36 according to an instruction from the transport vehicle control unit 15, and receives an optical signal from the device communication unit 36. For example, a transfer permission signal indicating permission for the request is acquired after issuing a transfer request signal for requesting transfer permission to the processing device 2. Or, after issuing an end request signal requesting transfer processing end permission to the processing device 2, an end permission signal indicating permission for the request is acquired.

  The transport vehicle control unit 15 determines the state of the processing device 2 based on the operation state in the transfer mechanism unit 31 and the signal from the transport vehicle communication unit 33, and instructs the transfer mechanism unit 31 to perform the next operation. CPU etc. which instruct | indicate the next transmission / reception to the conveyance vehicle communication part 33, and before the conveyance vehicle communication part 33 acquires a transfer permission signal, it transfers in the range which the transfer mechanism part 31 does not penetrate | invade the processing apparatus 2. The transfer mechanism unit 31 is controlled so as to perform the operation, and the transfer vehicle communication unit 33 is controlled so that the transfer vehicle communication unit 33 issues an end request signal when the transfer mechanism unit 31 leaves the processing device 2. To do.

  The placement unit 34 includes a processing apparatus station 21 and provides a placement space for the wafer cassette 4. Further, the presence / absence information of the wafer cassette 4 in the mounting space is transferred to the apparatus control unit 35.

  The device communication unit 36 includes the optical data communication device 5 in FIG. 1, transmits an optical signal to the transport vehicle communication unit 33 according to an instruction from the device control unit 35, and receives an optical signal from the transport vehicle communication unit 33. The signal is passed to the device control unit 35.

  The apparatus control unit 35 receives the presence / absence information of the wafer cassette 4 in the mounting space from the mounting unit 34, determines the state of the automatic guided vehicle 1 based on a signal from the apparatus communication unit 36, and then transfers the information to the apparatus communication unit 36. Instruct to send and receive. The process unit 37 is instructed to process the wafer cassette 4 that has already been received.

  The process unit 37 executes the process processing of the wafer cassette 4 that has already been received in accordance with an instruction from the apparatus control unit 35.

  Next, the operation of the transport system according to the present embodiment configured as described above will be described.

  FIG. 5 is a flowchart showing a transfer operation procedure of the wafer cassette 4 by this transfer system. Here, the procedure of the transfer operation of the automatic guided vehicle 1 when the wafer cassette 4 is lowered from the automatic guided vehicle 1 to the processing apparatus 2 (hereinafter referred to as cassette loading) is shown.

  First, when the automatic guided vehicle 1 arrives in front of the processing device station 21, it transmits a transfer request signal from the transport vehicle communication unit 33 to the device communication unit 36 (S10). Thereby, interlock communication is started.

  At the same time, the transport vehicle control unit 15 causes the transfer mechanism unit 31 to execute the pre-transfer operation within a range that does not enter the area of the processing device 2 (S20). At this time, the transport vehicle communication unit 33 has not yet received the transfer permission signal from the device communication unit 36.

  In parallel with this pre-transfer operation, the device communication unit 36 receives a transfer request signal transmitted by the carrier communication unit 33. Further, the apparatus control unit 35 causes the mounting unit 34 to check whether or not another wafer cassette 4 is mounted (S110).

  Then, when the apparatus control unit 35 confirms that there is no other wafer cassette 4 in the mounting unit 34, almost simultaneously with the completion of the operation before transfer by the transfer mechanism unit 31 of the automatic guided vehicle 1 described above, A transfer permission signal is transmitted from the apparatus communication unit 36 to the transport vehicle communication unit 33 (S120).

  Thereafter, when the transfer vehicle communication unit 33 receives the transfer permission signal from the device communication unit 36 (S30), an interlock is established between the automatic guided vehicle 1 and the processing device 2.

  After this interlock is established, the automatic guided vehicle 1 executes the transfer main operation that has entered the area of the processing device 2 by the transfer mechanism unit 31 (S40).

  When the transfer main operation is finished, the transport vehicle communication unit 33 immediately transmits a transfer end request signal to the device communication unit 36 when the transfer mechanism unit 31 retreats from the area of the processing device 2. (S50).

  At the same time, the transport vehicle control unit 15 causes the transfer mechanism unit 31 to perform the post-transfer operation within a range that does not enter the area of the processing device 2 (S60). At this time, the carrier communication unit 33 has not yet received the transfer end permission signal from the device communication unit 36.

  In parallel with the post-transfer operation, the device communication unit 36 receives a transfer end request signal transmitted by the carrier communication unit 33. In response to this, the apparatus control unit 35 checks whether or not the wafer cassette 4 to be transferred has been normally placed on the placement unit 34 (S130).

  Then, when the apparatus control unit 35 confirms that the wafer cassette 4 to be transferred has been normally placed on the placement unit 34, almost simultaneously with the completion of the operation after the transfer by the automatic guided vehicle 1 described above, A transfer end permission signal is transmitted from the apparatus communication unit 36 to the transport vehicle communication unit 33 (S140). Here, the transfer end permission signal plays a role of permitting the end after confirming that the transfer on the apparatus side has ended normally.

  Thereafter, when the transport vehicle communication unit 33 receives the transfer end permission signal from the device communication unit 36 (S70), the interlock between the automatic guided vehicle 1 and the processing device 2 is released.

  As described above, since the automatic guided vehicle 1 performs the transfer operation in a range that does not enter the processing device 2 before acquiring the transfer permission signal, the transfer operation is started after acquiring the transfer permission signal. Compared to the case, the transfer time is shortened. Further, since the automatic guided vehicle 1 issues an end request signal when the transfer mechanism unit 31 leaves the processing device 2, it is accompanied by completion of transfer compared to a case where an end request signal is issued after the transfer operation is completed. Processing time is shortened.

  The flowchart of FIG. 6 corresponds to the detailed explanation from the transfer start to the transfer end in the flowchart of FIG. The description of the same points is omitted, and the different operations, that is, the pre-transfer operation, the transfer main operation, and the post-transfer operation are described below.

  First, the pre-transfer operation (S20) when loading a cassette will be described. As described above, the pre-transfer operation is an operation before the interlock is established, and thus is limited to an operation within a range that does not enter the area of the counterpart processing apparatus 2. First, the automatic guided vehicle 1 opens the shutter 12 on the cassette loading side (S201). Next, the turning table 14 is turned in the cassette loading direction (S202). Next, in order to match the height of the placement portion 34 of the processing apparatus 2 with the height of the article support table 114, the scalar arm 11 is raised by the elevating portion 13 (S203). Finally, as a correction operation, the turning table 14 is corrected and turned (S204).

  Here, the above-described correction operation will be described with reference to FIG. In FIG. 7, a position indicated by a broken line is an ideal stop position of the automatic guided vehicle 1. The stopped automatic guided vehicle 1 is inclined with respect to an ideal position as indicated by a solid line, and may also be shifted in the front-rear direction and stopped. The automatic guided vehicle 1 usually has the surface on which the distance sensor 141 is installed facing in the traveling direction. After stopping in front of the processing apparatus station 21, the automatic guided vehicle 1 rotates the turning table 14 by 90 degrees clockwise or 90 degrees counterclockwise depending on the direction in which the processing apparatus station 21 exists. Then, the distance between the distance sensor 141 and its target 211 is measured. The deviation between the actual stop position of the automatic guided vehicle 1 and the ideal stop position is calculated from the measurement result. Based on the calculated value, a corrective turning (turning angle a in the figure) of the turning table 14 is executed so that the article support table 114 that is the tip of the scalar arm can reach the placement target position of the processing device station 21. This is the correction operation when loading the cassette described above. In the correction operation in the case of unloading, which will be described later, the correction turn of the turn table 14 and the on-arm correction turn of the article support table 114 (upper arm turn angle b in the figure) are executed.

  Secondly, the transfer main operation (S40) at the time of loading the cassette in FIG. 6 will be described. Since this transfer operation is an operation after the interlock is established, an operation that has entered the area of the processing apparatus 2 of the other party is executed. First, before the article support table 114 is turned so as to meet the placement pattern of the processing station 21, the first arm 111 and the second arm 112 that are in the area of the automatic guided vehicle 1 are extended to predetermined positions ( S401). Next, the article support table 114 is turned on the arm so as to match the placement pattern of the processing apparatus station 21 (S402). Next, the first arm 111 and the second arm 112 are extended to predetermined positions so that the article support table 114 comes to the placement position of the processing apparatus station 21 (S403). Next, in order to separate the wafer cassette 4 and the article support table 114, the scalar arm 11 is lowered by the elevating unit 13, and the wafer cassette 4 is transferred to the processing apparatus station 21 side (S404). Finally, the first arm 111 and the second arm 112 are returned to the origin position (S405).

  Third, the post-transfer operation (S60) when loading the cassette in FIG. 6 will be described. This post-transfer operation is an operation in which the interlock is established, but can be executed regardless of whether or not the interlock is established because it is an operation after exiting from the area of the processing device 2. First, the turning table 14 is returned to the origin position (S601). Next, the article support table 114 is returned to the origin position (S602). Finally, the shutter 12 is closed (S603).

  The transfer operation when loading the cassette will be described with reference to the timing chart shown in FIG. FIG. 8 is a timing chart showing interlock communication when cassette loading is performed. First, when the automatic guided vehicle 1 arrives in front of the processing device station 21, the interlock communication is started, and the automatic guided vehicle 1 turns on the transfer request signal and transmits the transfer request signal to the processing device 2 (S10). ). The processing apparatus 2 that has received the transfer request signal checks whether or not another wafer cassette already exists in the mounting unit 34 (S110), and if the wafer cassette is not in the mounting unit, the wafer cassette can be received. Then, the transfer permission signal indicating that it is ON is turned on and transmitted to the automatic guided vehicle 1 (S120). Of the time T1 during which S10, S110, and S120 are executed, the automatic guided vehicle 1 executes the above-described pre-transfer operation in parallel without using the time T1 as a standby time (S20).

  Then, the interlock is established after the elapse of time T1. The automatic guided vehicle 1 turns on the transfer main operation signal, and starts the transfer main operation within time T2 (S40).

  Eventually, when the transfer main operation of the automatic guided vehicle 1 is completed, the automatic guided vehicle 1 turns off the transfer operation signal and at the same time turns on the transfer end request signal to the processing device 2. Is transmitted (S50). The processing apparatus 2 that has received the transfer end request signal confirms that the wafer cassette 4 is present in the mounting unit 34 (S130), turns on the transfer end permission signal, and completes transfer to the automatic guided vehicle 1. A permission signal is transmitted (S140). The automatic guided vehicle 1 that has received the transfer end permission signal turns OFF the transfer end request signal and the transfer request signal. Of the time T3 during which steps S130 and S140 are executed, the automatic guided vehicle 1 executes the above-described post-transfer operation in parallel without using the time T3 as a standby time (S60). Then, after the elapse of time T3, the interlock is released.

  In addition, in the above-described operation of turning on the transfer end permission signal and transmitting the transfer end permission signal to the automatic guided vehicle 1 (S140), the transfer end permission signal is not provided and the transfer end permission is not provided. Instead of turning on the signal, the transfer permission signal may be turned off. In this case, the automatic guided vehicle 1 receives the change of the transfer permission signal from ON to OFF, and turns OFF the transfer end request signal and the transfer request signal.

  In the conventional transfer operation, as shown in FIG. 10, the pre-transfer operation, the transfer main operation, and the post-transfer operation are all executed at time T2, and the time T2 is shorter than that in the present embodiment. become longer. On the other hand, the times T1 and T3 are the communication time necessary for establishing the interlock and the communication time necessary for releasing the interlock, respectively.

  According to the embodiment of the present invention, the automatic guided vehicle 1 executes the pre-transfer operation during the time T1, performs the transfer main operation during the time T2, and operates after the transfer during the time T3. Since the waiting time of the automatic guided vehicle 1 disappears and the time T2 is shortened, the stop time required for the entire transfer operation can be shortened.

  FIG. 9 is a detailed flowchart of the transfer operation of the automatic guided vehicle 1 when the automatic guided vehicle 1 receives or removes the wafer cassette 4 from the processing apparatus 2 (hereinafter referred to as cassette unloading). That is, the flowchart of FIG. 9 corresponds to the detailed description from the transfer start to the transfer end in the flowchart of FIG. The description of the same points is omitted, and the different operations, that is, the pre-transfer operation, the transfer main operation, and the post-transfer operation are described below.

  First, the pre-transfer operation (S20) at the time of cassette unloading will be described. As described above, the pre-transfer operation is an operation before the interlock is established, and thus is limited to an operation within a range that does not enter the area of the counterpart processing apparatus 2.

  First, the shutter 12 on the cassette unloading side is opened (S211). Next, the turning table 14 is turned in the cassette unloading direction (S212). Next, the article support table 114 is turned on the arm so as to match the placement pattern of the processing apparatus station 21 (S213). Next, as the correction operation, the turning table 14 is corrected and rotated, and the article support table 114 is corrected and rotated on the arm (S214). Since the correction operation has been described in the transfer operation when loading the cassette, the description is omitted here.

  Second, the transfer main operation (S40) during cassette unloading will be described. Since this transfer operation is an operation after the interlock is established, an operation that has entered the area of the processing apparatus 2 of the other party is executed. First, the first arm 111 and the second arm 112 are extended to predetermined positions so that the article support table 114 comes to the mounting position of the processing apparatus station 21 (S411). Next, the scalar arm 11 is raised by the elevating unit 13, and the wafer cassette 4 on the placement unit 34 of the processing apparatus 2 is scooped by the article support table 114. (S412). Next, the first arm 111 and the second arm 112 are contracted to a position where the article support table 114 turns on the arm (S413). Next, the article support table 114 is turned on the arm (S414). Finally, the scalar arm 11 is returned to the origin position (S415).

  Third, the post-transfer operation (S60) during cassette unloading will be described. This post-transfer operation is an operation in which the interlock is established, but can be executed regardless of whether or not the interlock is established because it is an operation after exiting from the area of the processing device 2. First, the turning table 14 is returned to the origin position (S611). Next, the scalar arm 11 is lowered by the elevating unit 13 (S612). Finally, the shutter 12 is closed (S613).

  The timing chart showing the transfer operation at the time of cassette unloading is the same as the timing chart showing the transfer operation at the time of cassette loading shown in FIG.

  As described above, according to the embodiment of the present invention, even when the cassette is unloaded, the operation before the transfer is executed simultaneously with the transmission of the transfer request signal as in the cassette loading, and the transfer book is immediately after the interlock is established. The operation is executed, and the post-transfer operation is executed simultaneously with the transmission of the transfer end request signal. Therefore, the waiting time of the automatic guided vehicle 1 does not occur, and the stop time required for the entire transfer operation can be shortened.

  As described above, according to the transport system in the present embodiment, after the automatic guided vehicle arrives in front of the processing apparatus station of the transfer partner, (1) until the interlock is established, the shutter opening operation, Perform the pre-transfer operation within the range that does not enter the area of the other processing device, such as table turning operation, scalar arm lifting operation, correction turning operation, etc. (2) Immediately after the interlock is established, the expansion and contraction of the scalar arm Performing a transfer main operation that has entered the area of the other processing device, such as an operation, a turning operation on the arm, and a scalar arm raising / lowering operation, and (3) an article support table and a turning table until the interlock is released. Performs post-transfer operations within the range that does not enter the area of the other processing device, such as home return operation, scalar arm lifting operation, shutter closing operation, etc. From Rukoto, reduces the downtime with the standby time of the automatic guided vehicle can be reduced, as a result, been attempted to shorten the manufacturing time, reduction in production cost can be realized.

  Although the transport system according to the present invention has been described based on the embodiment, the present invention is not limited to this embodiment.

  For example, in the present embodiment, the transfer object is a wafer cassette, but the present invention is not limited to such a transport system in the semiconductor device manufacturing process, and a liquid crystal having a large glass as a transfer object. Any transfer system may be used as long as it is a system for transferring a transfer object using an automatic guided vehicle using interlock communication, such as a display production line.

  In this embodiment, the interlock communication means is optical data communication. However, the present invention is not limited to such optical data communication, and is wireless communication using an RF band or infrared rays. Also good.

  Further, in this embodiment, the automatic guided vehicle has a scalar arm, but the present invention is not limited to a transport system in which a transfer operation is performed mainly by such an automatic guided vehicle. The transferred processing apparatus may include a transfer mechanism such as a scalar arm, and may be a transfer system that performs a transfer operation by interlock communication. That is, the main body that performs the transfer operation in a range that does not enter the opponent side before acquiring the transfer permission signal may be a processing device instead of the automatic guided vehicle. Furthermore, the main body that issues an end request signal when the transfer mechanism unit leaves the other party may be a processing device instead of the automatic guided vehicle.

  Moreover, in this Embodiment, although the conveyance system was comprised from the automatic guided vehicle and the processing apparatus, it may be comprised from an automatic guided vehicle and an automatic guided vehicle, and it replaces with an automatic guided vehicle from an automatic guided vehicle. It may be configured.

  In the present embodiment, the interlock communication is started after the automatic guided vehicle arrives in front of the processing unit station. However, the present invention starts from before the automatic guided vehicle arrives in front of the processing unit station. The system which starts interlock communication may be sufficient. However, in this case, the transfer main operation should naturally be performed after the automatic guided vehicle is stopped, and the pre-transfer operation that may be performed during the movement of the automatic guided vehicle is It must be limited to operations that do not damage the automated guided vehicle.

  INDUSTRIAL APPLICABILITY The present invention can be used, for example, as a transport system, an automatic guided vehicle, and a processing apparatus having an interlock function in a production line for semiconductor devices, liquid crystal displays, and the like.

It is a figure which shows an example of a structure of the conveyance system which concerns on this invention. It is a top view of the automatic guided vehicle in embodiment of this invention. It is a front view of the automatic guided vehicle in embodiment of this invention. It is a block diagram which shows the function structure of the conveyance system in embodiment of this invention. It is a flowchart which shows the process sequence of the conveyance system in embodiment of this invention. It is a detailed flowchart which shows the transfer operation | movement of the automatic guided vehicle 1 at the time of wafer loading. It is a figure explaining the correction | amendment operation | movement shown by the flowchart of FIG. 6 and FIG. It is a timing chart explaining the interlock communication at the time of cassette loading. It is a detailed flowchart which shows the transfer operation | movement of the automatic guided vehicle 1 at the time of cassette unloading. It is a timing chart explaining the interlock communication in the conventional conveyance system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Automatic guided vehicle 2 Processing apparatus 3, 10 Optical communication 4 Wafer cassette 5 Optical data communication apparatus 6 Transport vehicle controller 7 Terminal apparatus 8 LAN
DESCRIPTION OF SYMBOLS 9 Transfer rail 11 Scalar arm 12 Shutter 13 Elevating part 14 Turning table 15 Conveyance vehicle control part 21 Processing apparatus station 31 Transfer mechanism part 33 Conveyance vehicle communication part 34 Mounting part 35 Apparatus control part 36 Device communication part 37 Process part 111 First arm 112 Second arm 113 Hand 114 Article support table 141 Distance sensor 211 Target

Claims (4)

A transfer system for transferring a load between a transfer vehicle and an apparatus,
One of the transport vehicle and the device is
A transfer mechanism for transferring the load by inserting the load on the other side of the transport vehicle and the device, or by taking the load from the other side; and
Issue a transfer request signal for requesting transfer start permission to the other party and an end request signal for requesting transfer end permission to the other party, and grant permission for the transfer start permission request. A communication means for acquiring a transfer permission signal indicating and an end permission signal indicating permission for the transfer permission request ;
Before the communication means obtains the transfer permission signal, the transfer mechanism is controlled so that the transfer mechanism performs a transfer operation within a range that does not enter the counterpart , and the transfer Control means for controlling the communication means so that the communication means issues the end request signal when the transfer mechanism part has left the counterpart side before the transfer operation of the mechanism part ends. Conveying system characterized by The transfer mechanism unit includes a shutter that covers the loaded luggage,
The transport system according to claim 1, wherein the control unit performs control to open the shutter as a transfer operation within a range that does not enter the counterpart side. A transport method for transferring luggage between a transport vehicle and an apparatus,
Communication between the transport vehicle and the device that requests transfer permission from one device to the other device and presents permission for the request from the other device to the one device A communication step for performing
Before the permitted in the communication step are presented, among the operations the one device to transfer the cargo to and from the other device, transfer the one device until entering to the other device A transfer step for performing the pre-loading operation ;
After the step before transfer, and after the load is transferred, the post-transfer step of storing the transfer mechanism part for transferring the load, which the one device has, in the one device;
An end permission requesting step for requesting the end of transfer from the one device to the other device when the transfer mechanism part has left the other device during the post-transfer step; A conveying method comprising : A transport vehicle that transfers packages to and from a partner device,
A transfer mechanism for transferring the load by inserting the loaded load into the counterpart device or by removing the load from the counterpart device;
A transfer request signal for requesting transfer start permission from the counterpart device and an end request signal for requesting transfer end permission from the counterpart side are issued, and permission for the transfer start permission request is granted. A communication means for acquiring from the counterpart device an end permission signal indicating permission for a transfer permission signal and an end permission request for the transfer ;
Before the communication means obtains the transfer permission signal, the transfer mechanism is controlled so that the transfer mechanism performs a transfer operation within a range that does not enter the counterpart device, and the transfer Control means for controlling the communication means so that the communication means issues the end request signal when the transfer mechanism part has left the counterpart side before the transfer operation of the mechanism part ends. A transport vehicle characterized by

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