KR101477370B1 - Traverse device and substrate processing device - Google Patents

Abstract

And to provide a traverse device capable of reducing the number of parts by simplifying the configuration and shortening the moving time of the substrate, and a vacuum processing apparatus equipped with the same. The transport tray 17 is moved between the forward route R1 and the return route R2 as the holding base 32 for holding the transport tray 17 is rotated by the parallel link mechanism 40. [ Therefore, the two-axis movement operation of the lift mechanism and the slide mechanism as in the conventional art becomes unnecessary, and the movement of the transport tray 17 can be realized by the single drive unit 50 driving the parallel link mechanism 40. [ That is, the configuration of the traverse device 30 can be simplified, and the number of components can be reduced. This can save money and reduce maintenance frequency. Further, by the movement of the holding base 32 by the rotation, the moving time can be shortened as compared with the conventional traverse apparatus.

Description

[0001] TRAVERSE DEVICE AND SUBSTRATE PROCESSING DEVICE [0002]

The present invention relates to a device for moving a substrate held in a vertical frame, and a traverse device for transferring a substrate in one transport path to another transport path and a substrate processing apparatus equipped with the same.

The transfer apparatus mounted on the vacuum processing apparatus described in Patent Document 1 carries a transfer tray for vertically holding the substrate to be processed. The traverse device provided in the conveyance device holds both sides of the tray along the conveyance direction of the tray and holds the substrate to be processed between two conveyance paths provided parallel to the bottom of each treatment chamber Move the transport tray.

The traverse device has a tray stage on which the transport tray is placed, a lift mechanism for moving the tray stage up and down, and a slide mechanism for moving the lift mechanism in the horizontal direction. Driving sources (motors M1 and M2) of the lift mechanism and the slide mechanism are respectively provided (see, for example, paragraphs [0032] and [0033] in FIGS. 2 and 3 of Patent Document 1).

International Publication No. 2009/107728 pamphlet

However, the above-described traverse device moves the conveyance tray by the two-axis mechanism of the lift mechanism and the slide mechanism, and further, since the drive source is provided, the mechanism is complicated. If the apparatus is complicated, the number of parts increases and the cost becomes high.

In addition, since the traverse device moves the conveyance tray by three operations, i.e., a lift by a lift mechanism, a horizontal movement by a slide mechanism, and a lift by a lift mechanism, there is a problem that the operation time is long.

It is therefore an object of the present invention to provide a traverse apparatus capable of reducing the number of components by reducing the number of components and shortening the moving time of the substrate, and a vacuum processing apparatus equipped with the traverse apparatus.

In order to achieve the above object, a traverse apparatus according to an embodiment of the present invention includes a tray transfer mechanism and a driving unit.

The tray transfer mechanism has a holding base for holding the tray holding the substrate in a standing state. And the holding base is rotated so as to maintain the posture of the tray held in the holding base.

The drive unit drives the tray transfer mechanism so that a path of movement of the tray held in the holding base is formed between the first transfer path and the second transfer path for transferring the tray.

In the present invention, the tray is moved between the first and second transport paths by rotating the storage base for storing the tray by the tray transfer mechanism. Therefore, movement of the lift mechanism and the slide mechanism in the conventional manner to the two axes is unnecessary, and the movement of the tray can be realized by one drive section that drives the tray transfer mechanism. That is, the configuration of the traverse device can be simplified, and the number of parts can be reduced. Further, the moving time of the storage base can be shortened compared to the conventional traverse apparatus by moving the storage base by rotation of the tray transfer mechanism.

The traverse device may further include an engaging member provided on the storage base and engaged with the engaging portion of the tray to support the tray. As a result, the posture of the tray can be stabilized when the tray is moved.

The traverse device may further include a power transmitting mechanism for transmitting power from the tray transfer mechanism to the engaging member. In the present invention, since the driving source for driving the engaging member is not necessary, the configuration of the traverse device can be simplified. As the power transmission mechanism, for example, a cam mechanism can be used.

Wherein the engaging member has an engaging end portion that is a portion engaged with the engaging portion of the tray and the engaging member is connected to a position near the upper end portion of the holding base so that the engaging end portion is positioned higher than the upper end of the holding base . That is, since the size of the holding base can be suppressed to be small (or the height can be reduced), the size and weight of the traverse device can be reduced.

The holding base may have a longitudinal portion and a protruding portion. And the engaging member is rotatably connected to the longitudinal portion. The projecting portion includes a support portion on which the tray is placed and supports the tray from below, and is installed so as to protrude horizontally from a lower portion of the longitudinal portion. In this case, the holding base may be provided on a center line which is the same distance from the first and second conveying paths with respect to the direction parallel to the first and second conveying paths, So that the rotation center is disposed.

For example, when the height positions of the first and second transport paths are substantially equal, the present invention is particularly effective. That is, in the present invention, the arrangement of the traverse device can be made closest to the first and second transport paths when viewed in the transport direction by the first and second transport paths of the tray. As a result, the overall structure including the first and second transport paths and the traverse device can be miniaturized, and the movement path of the rotation of the tray can be formed without interfering with the transportation of the tray.

The tray transfer mechanism may have a fixed base and a crankshaft driven by the driving portion and connected between the fixed base and the holding base.

A substrate processing apparatus according to the present invention includes a processing chamber, first and second transport paths, and the traverse device.

The treatment chamber is for treating the substrate.

The first and second transport paths are provided in the processing chamber by transporting the tray holding the substrate in a standing state.

In the present invention, the tray is moved between the first and second conveyance paths provided in the processing chamber by rotating the holding base for holding the tray by the tray transfer mechanism. Therefore, movement of the lift mechanism and the slide mechanism in the conventional manner to the two axes is unnecessary, and the movement of the tray can be realized by one drive section that drives the tray transfer mechanism. That is, the configuration of the traverse device can be simplified, and the number of parts can be reduced. In addition, the movement time of the tray transfer mechanism can be shortened by the rotation of the tray transfer mechanism.

The treatment chamber can maintain a vacuum state in the treatment chamber, and the driving portion of the traverse device can have a motor disposed outside the treatment chamber. Conventionally, in order to dispose the motor of the slide mechanism outside the vacuum processing chamber, bellows were required to maintain the vacuum in the processing chamber. In addition, when the motor of the lift mechanism is disposed outside the process chamber as in the prior art, a mechanism for sealing around the rotation axis of the motor was required. Thus, since the present invention does not require a linear drive mechanism such as a slide mechanism, a bellows is not required even if the motor of the drive portion is located outside the processing chamber. In the present invention, a seal mechanism around the rotation axis of the motor is sufficient .

As described above, according to the present invention, since the number of parts can be reduced by simplifying the structure, the cost can be suppressed and the moving time of the substrate can be shortened.

1 is a perspective view schematically showing a vacuum processing apparatus as a substrate processing apparatus equipped with a traverse apparatus.
FIG. 2 is a perspective view showing one traverse apparatus among a pair of traverse apparatuses. FIG.
Fig. 3 is a view of the traverse device shown in an enlarged scale near the upper crankshaft, and is a view seen in the Y-axis direction.
4 is a front view of the power transmission mechanism.
Fig. 5 is a schematic view for explaining the operation of the traverse device, and is a view seen in the X-axis direction.
6 is a view for explaining the rotation locus of the support portion of the holding base.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a perspective view schematically showing a vacuum processing apparatus 10 as a substrate processing apparatus equipped with a traverse apparatus 30. As shown in Fig. The vacuum processing apparatus 10 has a plurality of processing chambers 11 to 15. 1, the vacuum processing apparatus 10 includes a detachable chamber 11, a load lock chamber (hereinafter referred to as an "LL chamber 12"), a first processing chamber 13, a second processing chamber 14, And the transport chamber 15 are connected through the gate valve 16, respectively.

The vacuum processing apparatus 10 is provided with a first conveying path extending from the attaching / detaching chamber 11 to the conveying chamber 15 (hereinafter referred to simply as a "forward path R1") and a conveying chamber 15, (Hereinafter referred to simply as a return path R2) extending toward the first conveying path 11 is provided. The forward path R1 and the return path R2 in this embodiment are parallel to each other.

For each of the forward route R1 and the return route R2, a plurality of transport trays 17 are transported by roller transport. For example, is conveyed along the forward path R1 and the return path R2 while being supported by the lower surface of the conveyance tray 17 by the conveyance roller 19 that rotationally drives the Y axis direction as the rotation axis. Each of the transport trays 17 is formed in a rectangular box shape surrounding the outer frame of the substrate S (hereinafter simply referred to as "substrate"). In place of the conveying roller 19, the conveying tray 17 can be conveyed by the rack and pinion mechanism. In this case, a lock is provided in the lower part of the conveyance tray 17, and a plurality of pinions interlocking with the lock can be provided along the respective conveying paths R1 and R2. Further, guide rollers, not shown, for rotationally driving the Z-axis direction as a rotation axis can be provided along each of the transport paths R1 and R2, regardless of whether the transport is performed by the roller conveyance or the rack and pinion mechanism.

Convex portions 17a are provided as the engaging portions on both the left and right sides of the conveyance tray 17 (forward and backward in the conveying direction). Each convex portion 17a is used for locking the conveyance tray 17 by the traverse device 30 as will be described later in the conveyance step of conveyance tray 17. A tray magnet 21 is provided above each of the transport trays 17. A holding device 22 magnetically acting on the tray magnet 21 of the transport tray 17 is provided in each of the first treatment chamber 13, the second treatment chamber 14 and the transport chamber 15. The tray magnets 21 of the conveyance tray 17 act on the holding magnets 23 of the respective holding devices 22 in the conveying process of the conveyance tray 17, And is restrained in a non-contact manner above each conveying path.

5 (A) to 5 (E), the holding device 22 has a holding magnet 23 provided at the lower portion thereof, and the holding magnet 23 can be moved up and down by the elevating and lowering driving portion . Two holding magnets 23 are provided at a pitch coinciding with the pitch of the forward path R1 and the return path R2 with respect to the Y axis direction.

In this embodiment, the transport direction of the transport tray 17 in the forward path R1 is referred to as the X-axis direction. The direction perpendicular to the horizontal plane is the Z axis direction, the direction perpendicular to the X axis direction and the Z axis direction, and the direction parallel to the forward path R1 and the return path R2 is referred to as the Y axis direction.

The attaching / detaching chamber 11 attaches and holds the unprocessed substrate S to the transfer tray 17, and transfers the substrate S to the LL chamber 12 in a standing state. The attaching and detaching chamber 11 removes the processed substrate S held in the carrying tray 17 from the carrying tray 17 and takes it out of the vacuum processing apparatus 10. [ The attaching / detaching chamber 11 is attached / detached to / from the substrate S under atmospheric pressure.

The LL seal 12 is moved to the conveyance tray 17 by bringing the conveyance tray 17 along the forward path R1 from the attaching / detaching chamber 11 and then depressurizing the room, To the first processing chamber (13) along the forward path (R1). The LL chamber 12 reduces the pressure in the chamber and brings the conveyance tray 17 from the first processing chamber 13 into the room along the return path R2 and then releases the room to the atmosphere, The transfer tray 17 is taken out to the attaching / detaching chamber 11 along the return path R2.

The first processing chamber 13 is configured to carry the transport tray 17 along the forward route R1 from the LL chamber 12 and to move the transport tray 17 by magnetic action by the holding device 22. [ And is restrained on the forward path R1. The first processing chamber 13 is configured to release the restraint by the holding device 22 after applying a film forming process or a heating process to the substrate S stored in the transfer tray 17, (17) to the second processing chamber (14) along the forward path (R1).

The first processing chamber 13 is configured to carry the transporting tray 17 along the return path R2 from the second processing chamber 14 and to move the transporting tray 17 17 on the return path R2. The first processing chamber 13 is configured to release the restraint by the holding device 22 after applying a film forming process or a heating process to the substrate S stored in the transfer tray 17, (17) to the LL chamber (12) along the return path (R2). The first processing chamber 13 carries out the carrying-in and carrying-out of the carrying tray 17 under reduced pressure.

The second processing chamber 14 also performs processing such as film forming processing and heating processing on the substrate S. In the second treatment chamber 14, the operation of using the holding device 22 and the carrying-in and carrying-out of the carrier tray 17 are the same as those in the first treatment chamber 13. The second processing chamber 14 carries the substrate S from the first processing chamber 13 along the forward path R 1 and also takes out the substrate S to the transfer chamber 15. The second processing chamber 14 also transports the substrate S from the transport chamber 15 along the return path R2 and further transports the substrate S to the first processing chamber 15. [

A pair of traverse devices 30 are mounted on both sides (the front side and the rear side in the transport direction) in the X axis direction in the transport chamber 15. The transporting chamber 15 transports the transporting tray 17 along the forward route R1 from the second processing chamber 14 and moves the transporting tray 17 by magnetic action by the storage unit 22. [ And once restrained on the forward path R1. The transport chamber 15 is configured to move the transport tray 17 from the forward route R1 to the return route R2 by using the traverse device 30 while releasing the magnetic restraint of the transport tray on the forward route R1 Return. The transport chamber 15 transports the transport tray 17 moved to the return path R2 to the second process chamber 14 along the return path R2.

The transport chamber 15 transports the transport tray 17 from the forward route R1 to the return route R2 under reduced pressure. The transport chamber 15 locks the transport tray 17 by the locking function of the traverse device 30 while the transport tray 17 is transported from the forward route R1 to the return route R2.

Fig. 2 is a perspective view showing one traverse device among a pair of traverse devices 30. Fig. A pair of traverse devices 30 respectively hold both sides of the transport tray 17 by using the above-described storage base. Both traverse devices 30 have the same function and structure (shape, for example, symmetrical in the X-axis direction).

2, the traverse device 30 includes a tray holding member 32 including a holding unit 32 capable of holding a driving unit 50 and a conveying tray 17 holding the substrate S, And a parallel link mechanism 40 as a transfer mechanism (transfer mechanism).

The parallel link mechanism 40 is driven by driving of the driving unit 50. For example, the parallel link mechanism 40 includes a fixed base 31 formed vertically in the longitudinal direction and a crankshaft (not shown) rotatably connected between the fixed base 31 and the holding base 32 36 and 37 and a longitudinally shaped holding base 32 connected to these crankshafts 36 and 37. The drive unit 50 has a gear box 35 connected to the output shaft 34 of the motor 33 and the output shaft 34 of the motor 33 through a coupling (not shown). A partition wall of the transfer chamber for isolating the atmosphere from the vacuum is disposed on the way of the output shaft 34 of the motor 33. That is, the motor 33 is disposed on the atmosphere side.

The gear box 35 is provided in the fixed base 31 and transmits the driving force of the motor 33 to the crankshaft 37 at the lower side at a predetermined rotational speed and controls the gear 33 The rotational movement force around the Y axis is converted into the rotational movement force around the X axis.

An auxiliary link 44 connecting the two crankshafts 36 and 37 is provided on one side of the holding base 32 in order to stabilize the operation of the parallel link mechanism 40. [ The auxiliary link 44 is rotatably connected to shaft portions 36a and 37a integrally formed with the crankshafts 36 and 37, respectively. The auxiliary link 44 can be rotatably connected to an end of the crankshaft 36 and 37 near the fixed base 31. [

The holding base 32 holds the conveying tray 17 in a standing state. The holding base 32 is formed in an L shape in the longitudinal direction and has a longitudinal section 32a and a protruding section 32b provided so as to protrude in the horizontal direction (Y axis direction) from the lower part of the longitudinal section 32a The conveyance tray 17 is mounted on the supporting portion 32c, Then, as will be described later, the hook member 38 as the engaging member is engaged with the convex portion 17a of the conveyance tray 17 described above. The bottom of the transport tray 17 is supported by the support portion 32c and the hook member 38 is engaged with the projection 17a so that the rotation of the storage base 32 is simultaneously transmitted to the transport tray 17. [ The posture of the seat 17 can be stabilized.

When the traverse device 30 is in the standby state (the state shown in Figs. 5A and 5E), the supporting portion 32c of the holding base 32 is moved in the direction of the forward path R1 (The lower end of the transport tray 17).

At the upper end of the holding base 32, a hook member 38 is rotatably connected to the rotating shaft 39 as a center. The hook member 38 has a notch provided on the upper engaging end portion 38a, and the notch engages with the convex portion 17a. The hook member 38 operates using the power of the parallel link mechanism 40, as will be described later.

3 is a view of the traverse device 30 shown in an enlarged view near the upper crankshaft 36, and is a view seen in the Y-axis direction. A power transmitting mechanism 45 for transmitting the power of the parallel link mechanism 40 to the hook member 38 is provided on the fixed base 31 side of the holding base 32. [ 2, the illustration of the power transmission mechanism 45 is omitted. 4 is a front view of the power transmission mechanism 45. Fig.

The power transmission mechanism 45 is mainly constituted by a cam mechanism. The cam mechanism has a cam (41) fixed to the crankshaft (36) and a cam follower (42) operated by the cam (41). One end of the link lever 43 is connected to the cam follower 42 and the other end of the link lever 43 is connected to a connection shaft 48 connected to the hook member 38. The connection shaft 48 Is connected to an end portion on the side opposite to the engaging end portion 38a of the hook member 38 and is inserted into a long hole (not shown) provided in the holding base 32. [ The connecting shaft 48 is connected to the link lever 43 on the rear side of the holding base 32 (the side on which the power transmitting mechanism 45 is disposed).

4, a spring 46 is connected between the lower portion of the hook member 38 and the spring receiving portion 47 provided in the holding base 32. As shown in Fig. In Fig. 2, such a spring 46 and a spring receiving portion 47 are omitted. When the hook member 38 is operated to engage with the convex portion 17a of the conveyance tray 17 (in the case of the state shown in Figs. 5 (B) to 5 (D)), (For example, a force in a direction in which the spring 46 is reduced) is always applied.

The link lever 43 is lowered when the cam follower 42 is moved on the convex portion 41a of the cam 41 by the tension of the spring 46, A, the engagement between the hook member 38 and the convex portion 17a of the conveyance tray 17 is released. That is, the timing at which the cam follower 42 runs on the convex portion 41a of the cam 41 is the timing when the traverse device 30 is in the standby state (that is, when the holding base 32 is in the standby position (The timing of the cam 41) is designed so as to coincide with the timing (the timing shown in Figs. 5 (A) and 5 (E)).

The operation of the traverse apparatus 30 configured as described above will be described. 5 is a schematic view for explaining the operation, and is a view seen in the X-axis direction. 6 is a view for explaining the rotation locus of the support portion 32c of the holding base 32. Fig. Incidentally, the illustration of the auxiliary link 44 is omitted in Figs. 5 and 6.

5 (A), as described above, the traverse device 30 is in the standby state and the holding base 32 is in the standby position. In this state, as described above, the hook member 38 is not on the conveying paths R1 and R2 and is retracted. The rotation angle position of the support portion 32c of the holding base 32 at the standby position is set to 0 deg. At this time, the holding magnet 23 of the holding device 22 is already lowered, so that the upper portion of the carrying tray 17 is held in a noncontact manner, and the posture is stabilized.

The holding base 32 rotates in the clockwise direction in Figs. 5 and 6 by the operation of the parallel link mechanism 40 as shown in Fig. 5 (B) The carrier tray 17 is brought into contact with the support portion 32c and placed thereon. At this time, the hook member 38 is rotated by the action of the power transmitting mechanism 45 (see Figs. 3 and 4), and the engaging end portion 38a of the hook member 38 is engaged with the convex portion (17a). The notch of the engaging end portion 38a of the hook member 38 is engaged with the convex portion 17a and locked, The holding base 32 rotates while keeping the carrying tray 17 in a state. The holding magnet 23 of the holding device 22 is lifted and the holding is canceled in a noncontact manner.

The holding base 32 rotates clockwise as shown in Fig. 5 (C), and the supporting portion 32c of the holding base 32 passes through the 180 [deg.] Rotation position (see Fig. 6). As shown in Fig. 5 (D), the noncontact storage and maintenance of the holding device 22 is started until the support portion 32c reaches the rotation position of 270 degrees. When the support portion 32c reaches the rotation position of 270 degrees, the conveyance tray 17 is placed on the return path R2. After the support portion 32c passes through the rotation position of 270 DEG, the hook member 38 starts to rotate by the action of the power transmission mechanism 45, and the locked state by the hook member 38 is released.

The traverse device 30 is capable of rotating the holding base 32 by the action of the parallel link mechanism 40 while maintaining the posture of the carrying tray 17 held in the holding base 32 The transfer tray 17 is moved from the forward path R1 to the return path R2. That is, a movement path of the transport tray 17 is formed between the forward path R1 and the return path R2.

The retention base 32 is returned to the standby position by rotating the retaining base 32 in the clockwise direction behind the state shown in Fig. 5 (D) as shown in Fig. 5 (E) 38).

As described above, in the present embodiment, the transporting tray 17 is rotated by the parallel link mechanism 40 so that the transporting tray 17 is moved in the forward and backward directions R1, (R2). Therefore, movement of the lift mechanism and the slide mechanism in the conventional manner to the two axes becomes unnecessary, and movement of the carrier tray 17 can be realized by one drive section 50 that drives the parallel link mechanism 40 . That is, the configuration of the traverse device 30 can be simplified, and the number of parts can be reduced. As a result, the cost can be reduced, and the frequency of maintenance can also be reduced. Further, by the rotational movement of the parallel link mechanism 40, the moving time can be shortened as compared with the conventional traverse apparatus.

In the present embodiment, the power transmission mechanism 45 is used to operate the hook member 38. [ In other words, since a separate driving source for driving the hook member 38 is not necessary, the configuration of the traverse device 30 can be simplified.

Here, in order to stabilize the posture of the conveyance tray 17 at the time of rotation of the retaining base 32, the movement of the retaining device 22 may be performed without using the hook member 38, You can think about following the movement. However, if the structure of the holding device 22 is configured to be rotatable, dust may be generated from the holding device 22, Adversely affecting the treatment. Therefore, it is preferable that the structure above the transport tray 17 is extremely simple, and a hook member 38 is provided for stabilizing the posture of the transport tray 17. [

The hook member 38 is connected to a position near the upper end of the holding base 32 such that the engaging end 38a of the hook member 38 is positioned above the upper end of the holding base 32 . This makes it possible to reduce the size (or the height) of the holding base 32, for example, as compared with the conventional traverse apparatus, thereby realizing downsizing and weight reduction of the traverse apparatus 30. [

6, rotation of the support portion 32c of the holding base 32 is performed on the center line C that is the same distance from the forward path R1 and the return path R2 with respect to the Y-axis direction, as shown in Fig. 6 The parallel link mechanism 40 rotates the holding base 32 so that the center axis O is disposed. For example, this allows the arrangement of the traverse device 30 to approach the conveying paths R1 and R2 most when viewed in the X-axis direction. As a result, the entire structure including each of the transporting paths R1 and R2 and the traverse device 30 is miniaturized, and the movement path of the rotation of the transporting tray 17 is formed without obstructing the transporting of the transporting tray 17 can do.

In addition, the rotation center axis O of the support portion 32c of the holding base 32 is parallel to the forward path R1 and the return path R2. In this case, when the holding base 32 rotates, the volume of the three-dimensional object formed from the locus drawn by the substrate S held by the holding base 32 becomes the smallest, ) And the traverse device 30 can be minimized.

In the present embodiment, the motor 33 is disposed outside the transport chamber. Conventionally, in order to arrange the slide motor of the slide mechanism outside the vacuum processing chamber, it is necessary to provide a bellows on the output shaft of the slide motor in order to maintain the vacuum in the vacuum processing chamber. Further, when a lift motor of the lift mechanism is disposed outside the vacuum processing chamber as in the prior art, a mechanism for sealing the periphery of the rotation shaft 39 of the motor 33, such as a magnetic seal, is required. On the other hand, in the present embodiment, no linear drive mechanism such as a slide mechanism is required. Therefore, even if the motor 33 is positioned outside the transport chamber, no bellows is required and only a seal mechanism around the rotation axis of the lift motor is sufficient.

[Other Embodiments]

The embodiments relating to the present invention are not limited to the embodiments described above, but various other embodiments are realized.

The arrangement and configuration of the drive section 50, the gear box 35, the crankshaft 36, the power transmission mechanism 45, the cam mechanism, the hook member 38, and the like can be appropriately changed. For example, the following changes are possible.

The upper crankshaft 36 of the two crankshafts 36 and 37 may be the drive shaft and the lower crankshaft 37 may be the driven shaft.

Alternatively, two drive units 50 may be provided, and such drive unit 50 may drive the crankshafts 36 and 37 in synchronization with each other. In this case, the auxiliary link 44 is unnecessary.

The hook member 38 may be configured such that the height position of the rotation shaft 39 of the hook member 38 is positioned above the engagement end 38a of the hook member 38. [

In the above embodiment, the parallel link mechanism is taken as an example of the tray transfer mechanism, but another mechanism may be used. For example, instead of the crankshaft 36 shown in Fig. 2, a guide member for guiding rotational movement of the holding base 32 can be provided. In this case, a rotating body such as a roller is connected to the holding base 32 so that the roller is rotatably supported on the guide member such as a rail member (a curved line along the movement path of the holding base) Can be connected. In this case as well, the arrangement and configuration of the drive unit 50, the gear box 35, and the like can be appropriately changed as described above.

A support member for supporting the movement of the cam follower 42 of the cam mechanism is provided and the support member can be resiliently mounted on the holding base 32. [ For example, in this case, the cam follower 42 is rotatably connected to a part of the support member, and the rotation shaft 39 connected to the holding base 32 is connected to another portion of the support member. The support member can be rotated (pivoted) about its rotation axis, and the link lever 43 or the bar member is connected to the support member. With this configuration, the support member can move the cam follower 42 along the shape of the cam 41 by the elastic force, and the hook member 38 can be operated.

The present invention is not limited to the mode in which the power transmitting mechanism 45 operates the hook member 38 as in the above embodiment and the hook member 38 is driven as shown in Figs.5A to 5E The driving unit may be installed separately from the driving unit 50.

The shape of the fixing base 31, the holding base 32, the hook member 38, and the like can be appropriately changed.

In the above embodiment, the hook member 38 is provided. However, the hook member 38 may not be provided if the holding base 32 is capable of holding the side surface of the carrier tray 17, for example.

There may be a difference in height positions where the forward path R1 and the return path R2 are disposed, respectively. In this case, the center of rotation of the support portion 32c of the storage base 32 may not be on the center line C in Fig.

S: substrate
R1: Return route (return route)
R2: Return (return path)
C: Center line
O: center of rotation
17: Transport tray
30: Traverse device
31: Fixed base
32: Storage base
32a:
32b:
32c:
36, 37: Crankshaft
38: hook member
38a: engagement end
40: parallel link mechanism
45: Power transmission mechanism
50:

Claims (8)

A tray holding mechanism provided with a holding base for holding a tray for holding a substrate in a standing state and configured to rotate the holding base while maintaining the posture of the tray held in the holding base Mechanism)
A drive unit for driving the tray transfer mechanism so that a movement path of the tray held in the holding base is formed between the first transfer path and the second transfer path for transferring the tray,
An engaging member provided on the holding base and engaged with an engaging portion of the tray to support the tray;
And,
The tray transfer mechanism includes:
A fixed base,
And a crankshaft driven by the driving unit and connected between the fixed base and the holding base,
Wherein the engaging member has an engaging end portion that is a portion engaged with the engaging portion of the tray,
The engaging member is connected to a position near the upper end of the holding base such that the engaging end is positioned higher than the upper end of the holding base
Traverse device.
The method according to claim 1,
And a power transmitting mechanism for transmitting power from the tray transfer mechanism to the engaging member
Traverse device.
The method according to claim 1,
The holding base
A longitudinally extending portion to which the engaging member is rotatably connected,
And a support portion for supporting the tray from below, wherein the tray is mounted on the tray, and a protrusion provided to project horizontally from a lower portion of the longitudinal portion,
Wherein the holding base is provided on a center line which is the same distance from the first and second conveying paths with respect to the direction in which the first and second conveying paths are arranged, Driven
Traverse device.
3. The method of claim 2,
The power transmission mechanism includes:
A link lever which is connected to the engaging member via a connecting shaft and which operates the engaging member,
A cam fixed to the crankshaft,
Having a cam follower operated by said cam and installed in said link lever
Traverse device.
A tray holding mechanism provided with a holding base for holding a tray for holding a substrate in a standing state and configured to rotate the holding base while maintaining the posture of the tray held in the holding base Mechanism)
A drive unit for driving the tray transfer mechanism so that a path of movement of the tray held in the holding base is formed between the first transfer path and the second transfer path for transferring the tray,
An engaging member provided on the holding base and engaging with an engaging portion of the tray to support the tray;
And a power transmitting mechanism for transmitting power from the tray transfer mechanism to the engaging member
And,
The tray transfer mechanism includes:
A fixed base,
And a crankshaft driven by the driving unit and connected between the fixed base and the holding base,
The power transmission mechanism includes:
A link lever which is connected to the engaging member via a connecting shaft and which operates the engaging member,
A cam fixed to the crankshaft,
Having a cam follower operated by said cam and installed in said link lever
Traverse device.
A processing chamber for processing the substrate,
And a second conveying path and a second conveying path provided in the processing chamber,
A tray transfer mechanism provided with a holding base for holding the tray in a standing state and provided so as to rotate the holding base while maintaining the posture of the tray held in the holding base; And a drive unit for driving the tray transfer mechanism so that a path of movement of the tray held in the holding base between the second transfer path is formed,
And a traverse device provided on the holding base and having an engaging member engaged with an engaging portion of the tray to support the tray,
And,
The tray transfer mechanism includes:
A fixed base,
And a crankshaft driven by the driving unit and connected between the fixed base and the holding base,
Wherein the engaging member has an engaging end portion that is a portion engaged with the engaging portion of the tray,
The engaging member is connected to a position near the upper end of the holding base such that the engaging end is positioned higher than the upper end of the holding base
/ RTI >
The method according to claim 6,
The treatment chamber is capable of maintaining a vacuum state in the treatment chamber,
Wherein the driving unit of the traverse device has a motor disposed outside the process chamber
/ RTI > delete

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