KR20190052875A - Cassette supplying system - Google Patents

Abstract

Disclosed is a cassette supply system. According to one embodiment of the present invention, the cassette supply system comprises a cassette supply unit disposed in an upper area of a deposition device provided in a clean room and supplying a cassette through a cassette access part provided on an upper part of the deposition device; and the cassette supply unit comprises a cassette station part disposed on an upper part of the deposition device and forming a place in which a cassette supplied to the deposition device is mounted, and a cassette gripping and lifting and lowering module having a gripping part for gripping the cassette and a foldable multi-joint arm connected to the gripping part capable of being driven by multiple axes by folding at least one area and gripping for lifting and lowering the cassette to supply the cassette to the deposition device.

Description

[0001] Cassette supplying system [0002]

The present invention relates to a cassette supply system, and more particularly, to a cassette supply system that has a compact and efficient operation structure, so that a tact time of the apparatus can be remarkably reduced, And more particularly, to a cassette supplying system capable of efficiently supplying a cassette even when the cassette is not in use.

An organic light emitting display (OLED), which is one of the flat panel display devices, is a cemented carbide thin film display device which realizes a color image by self-emission of an organic substance and has a simple structure and high optical efficiency. Has attracted attention as a display device.

The organic light emitting display OLED includes an anode, a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least a light emitting layer and may further include a hole injecting layer, a hole transporting layer, an electron transporting layer, and an electron injecting layer in addition to the light emitting layer.

The organic electroluminescent display device can be divided into a polymer organic electroluminescent device and a low molecular weight organic electroluminescent device depending on an organic film, particularly a material forming the light emitting layer.

In order to realize a full color, a light emitting layer must be patterned. In this case, a direct patterning method using FMM (Fine Metal Mask, hereinafter referred to as a mask), a method using LITI (Laser Induced Thermal Imaging) A method using a color filter may be applied.

When a large-size OLED is manufactured by applying a mask method, a so-called horizontal type upward deposition method in which a substrate and a patterned mask are horizontally disposed in a chamber and then is deposited can be applied.

The horizontal type upward deposition method is a method of aligning a substrate and a mask horizontally arranged with respect to a bottom surface, aligning them together, and depositing an organic material on a large substrate in a horizontal state.

However, as the size of the OLED increases, the size and weight of the mask are becoming larger and larger. In this case, since the mask is deflected in the direction of gravity, it is difficult to closely adhere the mask to the substrate. There is a difficult problem.

Therefore, techniques for depositing a substrate and a mask in a vertical direction and then cementing the substrate and a mask for depositing the organic material are studied, and Applicants have already filed a number of these techniques, some of them being registered and being applied.

On the other hand, it is necessary to supply the mask to the evaporator regardless of the horizontal and vertical equations described above, so that the corresponding process through the mask, for example, the deposition process with respect to the substrate, can proceed.

At this time, although masks may be supplied one by one to the evaporator, a plurality of masks are accommodated in a cassette for efficiency of the process, and the cassettes themselves are supplied to the evaporator. A so-called cassette supply system is constructed in a clean room to supply a cassette containing a plurality of masks to the evaporator.

The cassette supplying system for supplying the cassette may be installed in the ceiling area of the clean room in consideration of the fact that the evaporator for supplying the mask and performing the deposition process on the substrate is installed on the floor of the clean room, The cassette is supplied to the evaporator disposed in the lower area of the system. Of course, the work for ejecting empty cassettes is also performed.

In the case of constructing such a cassette supply system in the ceiling area of the clean room, which is the upper part of the evaporator, a method of simply using orthogonal axes in combination may be considered. The orthogonal axis of the dual combination is a widely used method in that it can be easily implemented in the horizontal or vertical direction.

However, when a structure for supplying cassettes by simply combining orthogonal axes is implemented, there is a problem that the tact time of the equipment operation is increased due to the structural limitations.

In addition, since the orthogonal axial structure of the dual combination must secure a certain amount or more of the rising and falling distances for driving in the vertical direction, it may be difficult to apply the structure to the building floor of each clean room. There is a problem in that there is a high possibility that an interference problem with the lower equipment of the upper equipment is likely to occur.

Korea Patent Office Application No. 10-2005-0011334

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a cassette which can effectively reduce the tact time of a device operation by having a compact and efficient operation structure, So that it can be applied to the building floor of the clean room without any difficulty, and there is no interference with the lower equipment such as the evaporator, thereby providing a cassette supply system that can provide convenience in construction of the upper equipment .

According to an aspect of the present invention, there is provided a cassette supply unit for supplying a cassette through a cassette access portion disposed in an upper region of an evaporator provided in a clean room, the cassette supply unit including: A cassette station unit disposed at an upper portion of the evaporator and forming a place where the cassette supplied to the evaporator is seated; And a folding type multi-joint arm connected to the gripping portion and at least one area folded and driven to be driven by multiple shafts, wherein the cassette is gripped by the cassette to supply the cassette to the evaporator, And a cassette gripping and elevating module for driving the cassette holding mechanism.

The cassette holding and lowering module includes: an upper body part; And a lower body portion having the grip portion and connected to the upper body portion so as to be rotatable relative to the upper body portion. The foldable multi-joint arm may be disposed between the upper body portion and the lower body portion, And the lower body portion.

The foldable multi-joint arm includes: a first link arm having one end rotatably coupled to the upper body; And a second link arm having one end linked to the first link arm and the other end rotatably coupled to the lower body, and the foldable multi-joint arm may be a multiaxial articulated robot.

The cassette gripping up and down module may further include a rotary servo provided between the upper body part and the foldable articulated arm and generating power for rotationally driving the lower body with respect to the upper body part.

The cassette supply unit may further include an up / down support module for interacting with the cassette grip / elevation / descent module to support the up / down operation of the cassette grip / elevation / descent module.

The upward / downward support module is a one-step orthogonal axis robot, and the cassette gripping and elevating / lowering module may be connected from one side.

The upward / downward support module includes: an orthogonal rail disposed up and down along a height direction; And a rail block coupled to the orthogonal rail, the rail block being moved along the longitudinal direction of the orthogonal rail and connected to the cassette gripping up / down module at one side.

Wherein the cassette station part includes: a base plate on which an access port through which the cassette is inserted and ejected is formed; A plurality of vertical frames disposed crosswise to the base plate to form a partial wall for the base plate; And a cassette seating support disposed within the vertical frame, the cassette seating support having an edge region of the cassette mounted thereon.

A conveyance truck unit disposed on a ceiling of the clean room for conveying the cassette; And a cassette handling unit for handling the cassette from either one of the conveyance truck unit and the cassette supply unit to the other and loading or unloading the cassette to the conveyance truck unit or the cassette supply unit.

The cassette handling unit includes: a cassette handler for contacting the cassette and handling the cassette; And a transport platform for supporting the cassette handler away from the ground.

The cassette handler includes a handler body; A handler arm portion provided to be capable of rotating or translating relative to the handler main body and drawing the cassette into or out of the conveyance truck unit or the cassette station portion; And a handler body transfer unit coupled to the transfer platform and transferring the handler body toward the transfer truck unit.

The handler main body transfer part may include a pair of LM guide parts disposed on the upper surface of the carrying platform and spaced from each other to guide a straight movement or a backward movement of the handler main body.

And a buffer station unit disposed adjacent to the cassette handling unit and temporarily storing the cassette by receiving the cassette in the process of transporting the cassette to the conveyance truck unit or the cassette supply unit.

The buffer station unit may include a seating table coupled to an upper surface of the buffer station unit to support the cassette.

The deposition apparatus performs a deposition process of an organic light emitting display (OLED) through a mask, and the cassette may be a mask cassette on which a plurality of masks are stacked.

According to the present invention, since a compact and efficient operation structure is provided, it is possible to significantly reduce the tact time of the equipment operation, and to provide an operation capable of effectively supplying the cassette even with a minimum rising / Therefore, it is possible to apply the present invention to the building floor of the clean room without any difficulty, and there is no interference with the lower equipment such as the evaporator, thereby providing convenience in construction of the upper equipment.

1 is a schematic plan configuration diagram of a cassette supply system according to an embodiment of the present invention.
2 is a perspective view of a cassette supply unit, a cassette handling unit and a buffer station part.
3 is a perspective view of the cassette handling unit shown in Fig.
Figure 4 is a side view of Figure 3;
5 is a front view of the buffer station;
6 is a front view of the cassette supply unit shown in Fig.
Fig. 7 is a perspective view of Fig. 6 with the cassette holding up and down module removed.
8 is a view showing a structure of a cassette seating support bar.
FIG. 9 is an enlarged view of the cassette gripping and elevating / lowering module shown in FIG. 6 and the cassette.
FIG. 10 and FIG. 11 are operation diagrams of the steps of FIG.
Figs. 12 to 14 are diagrams showing a process of supplying a cassette to the evaporator by the operation of the cassette supply unit. Fig.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

2 is a perspective view of a cassette supply unit, a cassette handling unit, and a buffer station unit, and Fig. 3 is a perspective view of the cassette handling unit shown in Fig. 2, 6 is a front view of the cassette supply unit shown in Fig. 2, and Fig. 7 is a perspective view of the buffer station unit shown in Fig. 6 with the cassette gripping and lifting module removed, Fig. Fig. 9 is an enlarged view of the cassette gripping and elevating / lowering module shown in Fig. 6, and Fig. 10 and Fig. 11 are operation steps of Fig. 9, Figs. 12 to 14 are diagrams showing a process of supplying a cassette to the evaporator by the operation of the cassette supply unit. Fig.

Referring to these drawings, referring first to FIG. 1, since the cassette supply system according to the present embodiment has a compact and efficient operation structure, it is possible to remarkably reduce the tact time of equipment operation, It is possible to effectively operate the cassette 3 only with the minimum ascending / descending distance. Therefore, it is possible to apply the present invention to the building floor of the clean room without any difficulty and also to prevent the interference with the lower equipment such as the evaporator 1 So that it is possible to provide convenience in construction of the upper equipment.

The cassette supply system according to an embodiment of the present invention which can provide such an effect is provided with an upper area of a clean room where the evaporator 1 is provided, that is, a conveyance truck unit 100 installed on the ceiling for conveying the cassette 3 A cassette supply unit 300 disposed in an upper area of the evaporator 1 for supplying (or extracting) the cassette 3 through a cassette entrance part 2 provided at the upper part of the evaporator 1, It is possible to handle or transport the cassette 3 to either side of either the carriage unit 100 or the cassette supply unit 300 to load or unload the cassette 3 to the carriage carriage unit 100 or the cassette supply unit 300 And a cassette handling unit 200 for loading cassettes. 2 and 6) are applied to the cassette supply unit 300 different from the conventional one, it is possible to apply the present invention without any difficulty to the building height of the clean room, So that it is possible to provide convenience in the construction of the upper equipment.

In addition, the cassette supply system according to the embodiment of the present invention is disposed adjacent to the cassette handling unit 200, and in the process of conveying the cassette 3 to the conveyance carriage unit 100 or the cassette supply unit 300, And a buffer station unit 400 for receiving the cassette 3 and temporarily storing the cassette 3.

If the buffer station unit 400 is provided as in the present embodiment, there is an advantage in that the processing of the volume of cargo can be smoothly proceeded. Of course, it is preferable that the buffer station unit 400 is provided in the cassette supply system as in the present embodiment. However, the buffer station unit 400 is not necessarily provided, The scope is not limited.

Hereinafter, the conveyance truck unit 100, the cassette handling unit 200, the buffer station unit 400, and the cassette supply unit 300 will be described in order. However, prior to the description thereof, the evaporator 1 and the cassette 3 will be briefly described first.

The evaporator 1 applied to the cassette supply system according to the present embodiment performs a deposition process of an organic light emitting display (OLED) through a mask (not shown) accommodated in the cassette 3 . However, the scope of the present invention is not limited to these matters.

In the upper region of the evaporator 1, a cassette entrance / exit portion 2 through which the cassette 3 enters and exits is formed. A door for opening and closing the cassette entrance / exit part 2 is coupled to the cassette entrance / exit part 2, and the door is automatically opened / closed when the cassette 3 enters and exits. That is, when the cassette 3 is loaded, and automatically closed when the cassette 3 is taken out.

The cassette 3 is a box-like structure in which a plurality of masks are stacked. A plurality of masks can be arranged in one cassette 3. [

In order to prevent the masks from colliding with each other, a plurality of slots 3a (see Fig. 5) are provided in the cassette 3 to support the masks while isolating them one by one. The slots 3a may be disposed at the same position on opposite inner sidewalls of the cassette 3.

1, the conveyance truck unit 100 moves orbitally along a running rail (not shown) installed in a ceiling in the clean room, transfers the cassette 3 to a destination, and then moves the cassette 3 to a predetermined position It plays a role.

The cassette 3 applied to the cassette supply system according to the present embodiment may be a high-weight cassette 3 having a high weight, for example, 300 kg or more, in which a large number of large OLED masks are accommodated. In order to stably transfer the cassette 3 to a destination, an OHS (Over Head Shuttle) type conveyance truck unit 100 can be applied.

In the OHS-type conveyance truck unit 100, four traveling wheels are simultaneously mounted on a running rail, and the vehicle body is less vibrated than the OHT type. Therefore, even if the cassette 3 is loaded with a high load, stable traveling is possible and the traveling speed restriction due to vibration is small.

However, the scope of the present invention is not limited thereto. That is, the conveyance truck unit 100 may be an OHT (Overhead Hoist Transport) type conveyance truck unit 100 according to the size and weight of the object to be transported.

Next, when the cassette 3 reaches the upper region of the evaporator 1 by the conveyance truck unit 100, the cassette 3 is unloaded from the conveyance truck unit 100 and is supplied to the evaporator 1, The cassette handling unit 200 and the cassette supply unit 300 take charge thereof. Of course, the handling unit 200 and the cassette supply unit 300 are also responsible for transferring the empty cassette provided from the evaporator 1 side to the conveyance unit 100 again.

The cassette handling unit 200 will be described first with reference to Figs. 2 to 4. Fig. The cassette handling unit 200 includes a cassette handler 210 for handling the cassette 3 and a transportation platform 220 for supporting the cassette handler 210 from above the ground to be separated from the upper part of the clean room.

The transport platform 220 is connected to the ceiling frame bar B installed on the ceiling of the clean room with four vertical frames 312 provided in the edge region of the transport platform 220, .

The cassette handler 210 includes a handler body 211 and a handler body 211 which are rotatably and translationally movable with respect to the handler body 211 so as to move the cassette 3 in or out of the conveyance truck unit 100 or the cassette supply unit 300 A handler arm unit 216 and a handler main body transfer unit 217 for transferring the handler main body 211 toward or away from the conveyance unit 100. [

The handler body 211 includes a handler body upper portion 212 to which the handler arm portion 216 is coupled, a handler body lower portion 213 movably coupled to the handler body transfer portion 217, And a lifting and lowering portion 215 for lifting and lowering the lower portion 213 of the handler main body. The ascending / descending section 215 may be constituted by a hydraulic cylinder or a voice coil motor for realizing linear motion.

The handler arm portion 216 is rotatably engaged with the handler body 211. The handler arm portion 216 includes a turntable 216a rotatably coupled to the handler body upper portion 212 in a clockwise or counterclockwise direction, A pair of first arms 216b rotatably driven to be close to or spaced apart from each other, and a pair of first arms 216b linked to the other ends of the pair of first arms 216b, And a fork portion 216d which is coupled to an end portion of the pair of second arms 216c and the pair of second arms 216c to support the lower portion of the cassette 3 in contact therewith.

The operation of the fork portion 216d will be briefly described below. When the pair of first arms 216b are rotated in a clockwise or counterclockwise direction so as to be close to each other, the pair of second arms 216c linked to the first arm 216b interlock with the first arm 216b, The fork portion 216d is advanced. Conversely, when the other ends of the pair of first arms 216b are rotated apart from each other, the fork portion 216d is moved backward.

The handler main body transfer unit 217 may be a pair of LM guide units 217 which are spaced apart from each other on the upper surface of the transfer platform 220 in the present embodiment. The LM guide unit may include a drive motor (not shown in detail in FIG. 3) and a plurality of LM blocks 217a horizontally moving on the LM guide in a ball screw manner.

The plurality of LM blocks 217a are respectively coupled to handler brackets 214 provided on both sides of the handler body lower portion 213. [ As the plurality of LM blocks 217a horizontally move on the LM guide 217b, the handler body 211 can be moved toward or away from the conveying carriage unit 100. [

In the present embodiment, the LM guide portion 217 is applied with a guide in which a driving motor and a ball screw are combined. However, the scope of the present invention is not limited thereto, and other types of LM guides driven by a belt type or a linear motor may be applied, and all of these items should be within the scope of the present invention.

The cassette handling unit 200 unloads the cassette 3 loaded on the conveyance truck unit 100 and loads the cassette 3 into the cassette supply unit 300 or conversely releases the cassette 3 from the cassette supply unit 300 And can be loaded into the conveyance truck unit 100.

1, 2 and 5, the buffer station unit 400 is configured so that the cassette 3 unloaded from the conveyance truck unit 100 or the cassette supply unit 300 is moved to the cassette handling unit (not shown) 200) to be temporarily stored. As described above, if the buffer station unit 400 is provided, there is an advantage in that the processing of the volume of cargo can be smoothly performed, but it is not necessarily applied. However, it is assumed that the buffer station unit 400 is applied to the cassette supply system according to the present embodiment.

The buffer station unit 400 is a place for temporarily storing the cassette 3 in the process of conveying the cassette 3 to the conveyance truck unit 100 or the cassette supply unit 300. The buffer station unit 400 reserves the cassette 3 when transport delay of the conveyance truck unit 100 or temporary maintenance of the specific equipment is required, thereby preventing the entire mask deposition process from being stopped.

The buffer station unit 400 is provided so that four vertical frames 312 are coupled to the ceiling frame bar B installed on the ceiling like the transportation platform 220 of the cassette handling unit 200 to be supported apart from the ground. A mounting table 410 is provided inside the buffer station unit 400 to allow the cassette 3 to be seated and supported.

1 and 2, in this embodiment, the buffer station unit 400 can be disposed on the opposite side of the cassette supply unit 300 with the cassette 3 transport unit 200 interposed therebetween. However, the scope of rights of the present invention is not limited to such an arrangement structure. In other words, the buffer station unit 400 may be disposed at any position adjacent to the cassette handling unit 200 out of the arrangement structure of FIGS. 1 and 2.

On the other hand, the cassette supply unit 300 supplies the cassette 3 loaded on the inside by the cassette handler 210 to the evaporator 1 through the cassette entrance part 2 provided on the upper part of the evaporator 1, And the empty cassette 3, which is not provided with the empty cassette 3, from the evaporator 1.

6 to 14, the cassette supply unit 300 includes a cassette station part 310 forming a place where the cassette 3 is seated, a cassette station part 310 mounted on the cassette station part 310, And a cassette holding unit 320 which is provided on the cassette station unit 310 and which is connected to the cassette holding unit 320. The cassette holding unit 320 includes a cassette holding unit 310, And a lifting and lowering support module 330 for supporting the lifting and lowering operation of the cassette holding lifting and lowering module 320 in cooperation with the cassette holding lifting and lowering module 320.

The cassette station unit 310 is a place where the cassette 3 transported from the cassette handling unit 200 is seated and supplied to the upper portion of the evaporator 1 again.

The cassette station unit 310 includes a base plate 311 on which an access port 311a for receiving the cassette 3 to be vertically moved is formed and a base plate 311 and a ceiling frame bar B installed on the ceiling, A plurality of vertical frames 312 coupled to both ends of the vertical frame 312 to support the base plate 311 in a spaced relation from the ground, (313).

In this embodiment, the cassette station part 310 is provided with four vertical frames 312 in its edge region. And the vertical frames 312 are provided with four cassette seating supports 314 forming a rectangular configuration.

The cassette 3 which is drawn into the cassette station portion 310 by the handler arm portion 216 of the cassette handling unit 200 can be seated on the cassette seating support 314 as shown in Fig. The cassette 3 mounted on the cassette seating support 314 can be gripped and lifted and lowered by the cassette holding and lowering module 320 and can be taken in and out through the access port 311a of the base plate 311. [

Meanwhile, the cassette holding and lowering module 320 grasps the cassette 3 and serves to raise and lower the cassette 3 by interaction with the lifting and lowering support module 330.

The cassette holding and lowering module 320 may include an upper body portion 321 and a lower body portion 322 which are relatively rotatable relative to each other.

On one side of the upper body portion 321, a detachable coupling portion 321a is detachably coupled to the lifting / lowering support module 330. Since the attaching and detaching portion 321a of the upper body portion 321 is coupled to the lifting and lowering support module 330, the cassette holding and lowering module 320 can be moved up and down together during operation of the lifting and lowering support module 330 have.

The lower body portion 322 is provided with a grip portion 322a for gripping the cassette 3 substantially. The grip portion 322a can be selectively gripped by the grip bracket 3b provided in the upper region of the cassette 3. [

Since four holding brackets 3b are provided at different positions on the cassette 3 as shown in FIG. 8, four holding brackets 322a are provided corresponding to the holding brackets 3b. Of course, such matters are only one example, and the scope of the present invention can not be limited to these numbers.

The grip portion 322a can be selectively gripped by the grip bracket 3b while being operated by a grip portion driving portion (not shown) provided inside the lower body portion 322. [ The grip portion driving portion can be applied to, for example, a linear motor, a cylinder, an actuator, a combination of a motor and a ball screw, and a detailed illustration is omitted for the sake of convenience.

A rotary servo 323 may be provided between the upper body part 321 and the lower body part 322. The rotary servo 323 serves to generate power for rotating the lower body 322 with respect to the upper body 321.

The rotary servo 323 allows the cassette station part 310 to raise and lower the cassette 3 due to the interference of the cassette seating support 314 and to move the cassette 3 on the side of the cassette access part 2 of the evaporator 1, 2, the cassette 3 can be aligned and lifted and lowered.

The cassette grasping and lifting module 320 having such a structure is provided with a foldable multi-joint arm 324 which is connected to the grasping portion 322a and at least one region is folded and driven to be driven by multiple axes.

The foldable multi-joint arm 324 is a multiaxial articulated robot disposed between the upper body portion 321 and the lower body portion 322 and connected to the upper body portion 321 and the lower body portion 322. Accordingly, the upper body portion 321 and the lower body portion 322 may approach each other as shown in FIG. 9 or may be spaced apart as shown in FIGS. 10 and 11 even within a limited height.

In other words, when the folding type multi-joint arm 324 different from the previous one is applied to the cassette holding and lifting module 320 as in the present embodiment, it is possible to apply the present invention to the floor of the clean room without any difficulty, There is no interference with the facility, so it is possible to provide convenience in construction of the upper facility. That is, unlike the simple orthogonal axis, the foldable multi-joint arm 324 is folded as shown in FIG. 9 when not in use, and can be unfolded as shown in FIGS. 10 and 11 only when used. Therefore, it is possible to apply even if the floor height of the clean room is somewhat low.

The foldable multi-joint arm 324 includes a first link arm 325 having one end rotatably coupled to the upper body 321, one end linked to the first link arm 325, And a second link arm 326 rotatably coupled to the first link arm 322.

The lifting and lowering support module 330 is provided in the cassette station part 310 and is connected to the cassette holding and lowering module 320 and interacts with the cassette holding and lowering module 320 to move the cassette holding and lowering module 320 Up and down operation.

In this embodiment, the up-and-down support module 330 is applied as a single-stage orthogonal axis robot. The upward / downward support module 330 includes an orthogonal rail 331 vertically disposed along the height direction of the cassette station part 310 and a vertical rail 332 coupled to the orthogonal rail 331, As shown in FIG.

Since the attaching and detaching portion 321a of the upper body portion 321 constituting the cassette holding up and down module 320 is connected to the rail block 332 of the ascending and descending support module 330, 320 can be moved up and down. In particular, since the lifting and lowering support module 330 is provided symmetrically on both sides of the cassette station part 310, the lifting and lowering operation of the cassette holding and lowering module 320 can be stably guided.

Hereinafter, a series of processes of supplying the cassette 3 to the evaporator 1 will be briefly described with reference to Figs. 12 to 14. Fig.

First, the conveyance truck unit 100 on which the cassette 3 is mounted is moved along a track rail installed on the ceiling of the clean room and is disposed at a position adjacent to the conveyance platform 220.

Next, the door (not shown) of the conveyance truck unit 100 is opened and the cassette handler 210 approaches the conveyance truck unit 100 by the handler body conveyance unit 217 of the cassette handling unit 200, The fork portion 216d of the arm portion 216 unloads the cassette 3 from the conveyance carriage unit 100. [

Next, the cassette handler 210 seats the cassette 3 on the cassette seating support 314 of the cassette station portion 310. At this time, the handler main body 211 returns to its original position by the handler main body transfer unit 217, and the handler arm unit 216 is moved up / down with respect to the handler main body 211 by the turntable 216a and the ascending / Up and down and rotate to handle the cassette 3.

Thereafter, the grip portion 322a of the cassette gripping and elevating / lowering module 320 is operated and gripped by the gripping bracket 3b of the cassette 3 (see FIG. 12).

Then, the folding type multi-joint arm 324 is operated as shown in FIG. That is, the folding type multi-joint arm 324 which is arranged in a folded state as shown in FIG. 12 is operated and unfolded. Then, the folding type multi-joint arm 324 is operated and the cassette 3 can be lowered as far as it is unfolded. At this time, the cassette 3 is in a state of being disposed in the elevating and descending entrance / exit port 311a formed in the base plate 311. [

Then, the cassette holding and lowering module 320 is lowered as a whole by the interaction of the cassette holding and lowering module 320 and the ascending and descending support module 330 as shown in FIG. 13 to FIG. 14, 3 can be introduced into the cassette entrance portion 2 of the evaporator 1. [

As a result, the first descent advances by the multi-axis driving method of the folding type multi-joint arm 324, and the second descending advances by the one-step orthogonal axis method, so that even if the space is narrow In particular, even if there is a somewhat restrictive condition in the building floor of a clean room, it can be installed with sufficient function.

For reference, the empty cassette in the evaporator 1 can be transferred to the upper equipment through the operations in the above-described reverse order.

According to the present embodiment having the structure and function as described above, since the operation structure is compact and efficient, the tact time of the equipment operation can be remarkably reduced, and at the same time, It is possible to effectively operate the cassette 3 so that it can be applied to the building floor of the clean room without any difficulty and there is no interference with the lower equipment such as the evaporator 1, It is possible to provide convenience.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore intended that such modifications or alterations be within the scope of the claims appended hereto.

1: evaporator 2: cassette entrance part
3: Cassette 3a: Slot
3b: gripping bracket 100: conveying truck unit
200: cassette handling unit 210: cassette handler
211: Handler body 214: Handler bracket
215: ascending / descending portion 216: handler arm portion
217: handler main body feeding unit 300: cassette feeding unit
310: cassette station part 311: base plate
311a: ascending and descending access port 312: vertical frame
313: Horizontal frame 314: Cassette seating support
320: cassette holding up / down module 321: upper body part
321a: detachable coupling portion 322: lower body portion
323: Rotary servo 324: Folding type multi-joint arm
325: first link arm 326: second link arm
330: up / down support module 331: orthogonal rail
332: Rail block 400: Buffer station part

Claims (15)

And a cassette supply unit disposed in an upper area of the evaporator provided in the clean room for supplying a cassette through a cassette access part provided on the evaporator,
Wherein the cassette supply unit includes:
A cassette station unit disposed at an upper portion of the evaporator and forming a place where the cassette supplied to the evaporator is seated; And
And a folding type multi-joint arm which is connected to the gripping portion and at least one region is folded and driven to be driven by multiple shafts, wherein the cassette is gripped by the cassette to supply the cassette to the evaporator, And a cassette holding mechanism for moving the cassette holding unit. The method according to claim 1,
The cassette gripping-up / down-
An upper body portion; And
And a lower body portion having the grip portion and connected to the upper body portion so as to be relatively rotatable,
Wherein the foldable multi-joint arm is disposed between the upper body part and the lower body part and connected to the upper body part and the lower body part. 3. The method of claim 2,
The foldable multi-
A first link arm having one end rotatably coupled to the upper body portion; And
A second link arm having one end linked to the first link arm and the other end rotatably coupled to the lower body portion,
Wherein the folding type multi-joint arm is a multiaxial articulated robot. 3. The method of claim 2,
The cassette gripping-up / down-
Further comprising a rotary servo provided between the upper body and the foldable multi-joint arm for generating power to rotate the lower body with respect to the upper body. The method according to claim 1,
Wherein the cassette supply unit includes:
Further comprising a lifting / lowering support module for supporting the lifting / lowering operation of the cassette holding / lowering module in cooperation with the cassette holding / lowering module. 6. The method of claim 5,
Wherein the upward / downward support module is a one-step orthogonal axis robot, and the cassette gripping and elevating / lowering module is connected from one side. The method according to claim 6,
The upward / downward support module includes:
An orthogonal rail disposed up and down along a height direction; And
And a rail block coupled to the orthogonal rail and moved along the longitudinal direction of the orthogonal rail and connected to the cassette gripping up / down module at one side thereof. The method according to claim 1,
The cassette station unit includes:
A base plate on which an access port through which the cassette is inserted and ejected is formed;
A plurality of vertical frames disposed crosswise to the base plate to form a partial wall for the base plate; And
And a cassette seating support which is disposed in the vertical frame and in which an edge region of the cassette is seated and supported. The method according to claim 1,
A conveyance truck unit disposed on a ceiling of the clean room for conveying the cassette; And
Further comprising a cassette handling unit for handling the cassette from either one of the conveyance truck unit and the cassette supply unit to the other side to load or unload the cassette to the conveyance truck unit or the cassette supply unit Supply system. 10. The method of claim 9,
The cassette handling unit includes:
A cassette handler in contact with the cassette to handle the cassette; And
And a transport platform for supporting the cassette handler away from the ground. 11. The method of claim 10,
Wherein the cassette handler comprises:
A handler body;
A handler arm portion provided to be capable of rotating or translating relative to the handler main body and drawing the cassette into or out of the conveyance truck unit or the cassette station portion; And
And a handler main body transferring unit coupled to the transfer platform for transferring the handler main body to the transfer caravan unit. 12. The method of claim 11,
The handler body transfer portion
And a pair of LM guide parts disposed on the top surface of the transport platform and spaced apart from each other and guiding the linear movement or the backward movement of the handler main body. 10. The method of claim 9,
Further comprising a buffer station unit disposed adjacent to the cassette handling unit for temporarily storing the cassette in the process of conveying the cassette to the conveyance truck unit or the cassette supply unit, Supply system. 14. The method of claim 13,
The buffer station unit,
And a seating table coupled to an upper surface of the buffer station unit for seating and supporting the cassette. The method according to claim 1,
Wherein the deposition apparatus performs a deposition process of an organic light emitting display (OLED) through a mask, wherein the cassette is a mask cassette on which a plurality of masks are stacked.

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