KR101576547B1 - Cassette supplying system - Google Patents

Abstract

A cassette feeding system is disclosed. A cassette supply system according to an embodiment of the present invention includes a process chamber in which an upper portion is provided with a cassette entrance port through which a cassette is loaded or unloaded, a cassette transfer unit for transferring the cassette, And a cassette transfer unit for transferring the cassette from one side to the other side between the cassette transfer unit and the process chamber.

Description

[0001] Cassette supplying system [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette supply system, and more particularly, to a cassette supply system that utilizes space existing in an upper area of a process chamber to economize space by supplying cassettes to a process chamber.

An organic light emitting display (OLED), which is one of the flat panel display devices, is a cemented carbide type display device which realizes a color image by self-emission of an organic substance. In view of its simple structure and high light efficiency, Has attracted attention as a promising display device.

The organic light emitting display OLED includes an anode, a cathode, and organic layers interposed between the anode and the cathode. Here, the organic layers include at least a light emitting layer and may further include a hole injecting layer, a hole transporting layer, an electron transporting layer, and an electron injecting layer in addition to the light emitting layer.

The organic electroluminescent display device can be divided into a polymer organic electroluminescent device and a low molecular weight organic electroluminescent device depending on an organic film, particularly a material forming the light emitting layer.

In order to realize a full color, a light emitting layer must be patterned. In this case, a direct patterning method using FMM (Fine Metal Mask, hereinafter referred to as a mask), a method using LITI (Laser Induced Thermal Imaging) A method using a color filter may be applied.

When a large-size OLED is manufactured by applying a mask method, a so-called horizontal type upward deposition method in which a substrate and a patterned mask are horizontally disposed in a chamber and then is deposited can be applied.

The horizontal upward deposition method is a method of aligning a substrate horizontally arranged on a bottom surface of a chamber and a mask and then coalescing them, and depositing an organic material on a large substrate in a horizontal state.

However, as the size of the OLED increases, the size and weight of the mask are becoming larger and larger. In this case, since the mask is deflected in the direction of gravity, it is difficult to closely adhere the mask to the substrate. There is a difficult problem.

Therefore, techniques for depositing a substrate and a mask in a vertical direction and then cementing the substrate and a mask for depositing the organic material are studied, and Applicants have already filed a number of these techniques, some of them being registered and being applied.

On the other hand, it is necessary to supply a mask into the chamber regardless of the horizontal and vertical form described above, so that the corresponding process through the mask, for example, the deposition process for the substrate, can proceed.

At this time, the mask may be supplied alone, but may be supplied in a cassette state while being loaded in the cassette, and a cassette handling apparatus is used for supplying the cassette.

However, the conventional cassette handling devices are not economical in terms of space utilization, and the layout of the periphery of the process chamber may become complicated, which may make it difficult to implement automation.

In fact, considering that the upper region of the process chamber is an unused space that is not used differently, it is expected that various problems that have been caused in the past can be solved by constructing a cassette supply system utilizing such a space. Development is required.

Korean Patent Publication No. 10-2006-0090111 (Semus Co., Ltd.), 2006.08.10 ..

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide an apparatus and a method for manufacturing a semiconductor device, which can economically utilize a space by supplying a cassette to a process chamber utilizing a space existing in an upper region of the process chamber, Accordingly, it is possible to provide a cassette supply system that can automate construction and shorten the tack time.

According to an aspect of the present invention, there is provided a process chamber comprising: a process chamber in which an upper region is provided with a cassette entrance through which a cassette is loaded or unloaded; A cassette transfer unit for transferring the cassette; And a cassette delivery system disposed adjacent to the cassette transfer unit and disposed above the process chamber and configured to transfer the cassette from one side to the other side between the cassette transfer unit and the process chamber have.

The cassette transfer unit comprising: a handling robot for handling the cassette for transferring the cassette; And a movement module connected to the handling robot and relatively moving the handling robot in the first axial direction with respect to the cassette transfer unit.

The mobile module includes: an EL block to which the handling robot is coupled; An LM guide for guiding the movement of the LM block; And an EL block driving unit for moving the EL block.

The handling robot includes: a main body module supported by the moving module; An arm module rotatably coupled to the main body module with a second axis direction intersecting the first axis direction as a rotation axis; A grip module rotatably coupled to the arm module with the second axial direction as a rotating shaft center, the grip module holding the cassette; And a horizontal holding module connected to the main body module and the gripping module, for holding the grip module horizontally when the arm module is rotated.

The main body module includes: a lower main body coupled to the moving module; An upper main body portion disposed on the lower main body portion and relatively rotatable about the lower main body portion with a third axis direction intersecting the first axis direction and the second axis direction as a rotation axis; And a rotation driving part supported on the lower main body part and connected to the upper main body part for rotating the upper main body part.

The arm module includes: a rotation arm rotatably coupled to a rotation center shaft for the arm provided on the main body module; And an arm driving unit connected to the pivoting arm and rotating the pivoting arm.

The arm module may further include a balance weight coupled to the pivot arm and disposed on the opposite side of the pivot arm with respect to the pivot axis of the arm.

The gripping module may include: a pivoting central shaft for rotation which is rotatably coupled to the pivoting arm; And a hand portion connected to the pivot center shaft for the hand.

The hand unit includes: a hand unit body coupled to the rotation center shaft of the hand; And a second arm which is disposed on a lower side of the hand unit body and is relatively rotatable about a third axis direction intersecting the first axis direction and the second axis direction with respect to the hand unit body as a rotation axis, chapter; And a rotation driving part for the grip part, which is supported by the hand part body and is connected to the grip part to rotate the grip part.

The gripping portion may include a gripper selectively gripping a gripping bracket provided on an upper surface of the cassette; And a gripper driving unit for driving the gripper so that the gripper is gripped or released from the gripping bracket.

The horizontal holding module may include: a first sprocket coupled to the rotation center shaft for the arm; A second sprocket coupled to the pivot shaft for the hand; And a connection portion connected to the first sprocket and the second sprocket.

The connecting portion includes a first chain engaged with the first sprocket; A second chain engaged with the second sprocket; And a connecting rod connecting the first chain and the second chain.

Wherein the conveying unit comprises: a conveying carriage in which the cassette is loaded; And a running rail for guiding the movement of the conveyance truck.

Wherein the transport bogie comprises: a cassette supporting portion for supporting the cassette; And a door portion for opening and closing relative to the cassette support portion so that an upper region of the cassette loaded therein is exposed.

And a buffer station disposed adjacent to the cassette transfer unit, wherein the cassette is temporarily loaded by the cassette transfer unit.

According to the present invention, a cassette transfer unit disposed above a process chamber transfers a cassette loaded in a cassette transfer unit to a process chamber, thereby utilizing a space existing in an upper region of the process chamber, Can be simplified, and the automation can be easily constructed thereby shortening the tact time.

1 is a view showing a cassette supply system according to an embodiment of the present invention.
2 is a front view of Fig.
3 is a plan view of Fig.
Fig. 4 is a plan view showing the inside of the conveyance truck of Fig. 1 exposed. Fig.
FIG. 5 is a view showing a state in which the handling robot of FIG. 1 grips the cassette.
Fig. 6 is an enlarged view of a grip module portion holding the cassette of Fig. 5;
Fig. 7 is a view showing a state in which the handling robot of Fig. 1 brings the cassette into the process chamber. Fig.
Fig. 8 is a view showing a state in which the handling robot of Fig. 1 loads the cassette onto the buffer station; Fig.
Fig. 9 is a view showing the horizontal holding module of Fig. 1. Fig.
10 is a view showing a state in which the pivot arm is rotated in the clockwise direction in Fig.
11 is an operational state diagram schematically showing the operation of the cassette supply system of Fig.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

1 is a front view of Fig. 1, Fig. 3 is a plan view of Fig. 1, and Fig. 4 is a side view of the cassette supply system according to the embodiment of the present invention, Fig. 5 is a view showing a state in which the handling robot of Fig. 1 grasps the cassette, Fig. 6 is an enlarged view of a grip module holding the cassette of Fig. 5, Fig. 8 is a view showing a state in which the handling robot of Fig. 1 loads the cassette into the buffer station, Fig. 9 is a view showing the horizontal holding module of Fig. 1, 10 is a view showing a state in which the pivot arm is rotated clockwise in Fig.

1 to 10, the cassette supply system according to the present embodiment includes a process chamber 100 in which a cassette entrance (not shown) in which a cassette C is carried in or out is provided in an upper region, A cassette transfer unit 200 for transferring a cassette C and a cassette transfer unit 200 disposed adjacent to the cassette transfer unit 200 and disposed on the upper side of the process chamber 100 for transferring the cassette C between the cassette transfer unit 200 and the process chamber 100 And a cassette transfer unit 300 for transferring the cassette C from one side to the other side.

The cassette supply system according to the present embodiment further includes a buffer station 400 disposed adjacent to the cassette transfer unit 300 and in which the cassette C is temporarily loaded by the cassette transfer unit 300. [

A support frame F for supporting the cassette transfer unit 200 and the cassette transfer unit 300 is disposed in an upper area of the process chamber 100 and a support frame F is provided for supporting the cassette C A hole (H) is provided.

In the present embodiment, the process chamber 100 includes a vapor deposition process chamber (not shown) for carrying out a deposition process of an organic light emitting display (OLED) through a mask (not shown) (100).

However, the scope of the present invention is not limited thereto. Thus, the process chamber 100 may be a chamber for deposition of flat panel display elements other than OLEDs, i.e. LCDs and PDPs. In addition, the process chamber 100 may be a vacuum chamber of various types in which a mask can be used in addition to the vapor deposition process chamber 100.

In the upper region of the process chamber 100, a cassette access portion (not shown) through which the cassette C is inserted and removed is formed. A door (not shown) for opening and closing the cassette access portion is coupled to the cassette access portion, and the door is automatically opened and closed when the cassette C is moved in and out.

The cassette C is a kind of box in which a plurality of masks are stacked. A plurality of masks may be arranged in one cassette C. A plurality of slots (not shown) are provided in the cassette C so as to prevent the masks from colliding with each other or overlapping each other. The slots may be disposed with the same position on opposite inner wall in the cassette C.

The cassette transfer unit 200 transfers the cassette C. The cassette transporting unit 200 includes a transporting carriage 210 on which a cassette C is loaded and a travel rail 220 for guiding movement of the transporting carriage 210.

The transport truck 210 moves along the travel rail 220 to transport the cassette C to a desired destination.

In this embodiment, the transporting carriage 210 may be configured in the form of an OHS (Over Head Shuttle) for stably transporting a cassette C of a heavy weight for a large OLED.

Therefore, the traveling carriage 210 according to the present embodiment is provided with four traveling wheels W and a traveling wheel driving unit (not shown) for driving the traveling wheels W. In the conveying truck 210 according to the present embodiment, four traveling wheels W are simultaneously mounted on the traveling rail 220 and operated, so that the vehicle body is less vibrated than the OHT type. Therefore, the conveyance truck 210 according to the present embodiment is advantageous in that stable running is possible even when a cassette C of a heavy weight is loaded, and the traveling speed restriction due to vibration is also small.

On the other hand, the conveyance truck 210 is provided with a cassette supporting portion 211 for supporting the cassette C and a door portion 212 for opening and closing relative to the cassette supporting portion 211 so that the upper region of the cassette C is exposed .

In this embodiment, the opening and closing door portions 212 are provided as a pair and disposed symmetrically with each other. Further, the transfer truck 210 further includes a door driving unit (not shown) for moving the opening and closing door unit 212.

On the other hand, when the conveyance carriage 210 on which the cassette C is loaded is brought close to the cassette conveyance unit 300, the cassette conveyance unit 300 disposed on the upper side of the process chamber 100 is conveyed to the conveyance carriage 210 The cassette C is unloaded and transferred to the process chamber 100.

The cassette transfer unit 300 includes a handling robot 310 for handling the cassette C for transferring the cassette C and a handling robot 310 connected to the handling robot 310 for transferring the handling robot 310 to the cassette transfer unit 200. [ And a movement module 320 for moving the first module 300 in the first axis direction.

The movement module 320 includes an EL block 321 to which the handling robot 310 is coupled, an ELM guide 322 to guide the movement of the EL block 321, an EL block driver 322 to move the EL block 321, (Not shown).

The EL block driving unit includes a moving nut (not shown) coupled to the EL block 321, a ball screw (not shown) engaged with the moving nut, and a servo motor (not shown)

The handling robot 310 handles the cassette C for delivery of the cassette C. [ The handling robot 310 includes a main body module 330 supported by the moving module 320 and a main body module 330 rotatably coupled to the main body module 330 with a second axis direction intersecting the first axis direction as a rotating axis A grip module 350 rotatably coupled to the arm module 340 with a second axis direction as a rotating shaft and holding the cassette C; a main module 330 and a grip module And a horizontal holding module 360 connected to the arm module 350 to maintain the horizontal position of the grip module 350 when the arm module 340 rotates.

The main body module 330 is coupled to the LMB block 321 and is supported by the movement module 320. The main body module 330 includes a lower main body portion 331 coupled to the moving module 320 and a second main body portion 331 disposed on the upper side of the lower main body portion 331 and having a first axial direction and a second axial direction An upper main body portion 332 which is relatively rotatable with a third axis direction intersecting the axial direction as a rotation axis and a second main body portion 332 which is supported by the lower main body portion 331 and is connected to the upper main body portion 332, And a rotation driving unit 333 for rotating the upper main body unit.

In this embodiment, the lower main body portion 331 is coupled to the EL block 321 of the movement module 320.

The upper main body portion 332 is disposed on the upper side of the lower main body portion 331 and is relatively rotatable with respect to the lower main body portion 331 with the third axial direction as the rotary shaft center. The upper main body portion 332 may be rotated relative to the lower main body portion 331 to move the holding module 350 to the position of the buffer station 400.

The main body module 330 further includes an arm rotation center shaft 334 which is fixedly coupled to the upper body 332 and serves as a rotation axis of the arm module 340.

The rotation driving part 333 for the upper main body part is supported by the lower main body part 331 and connected to the upper main body part 332 to rotate the upper main body part 332. In this embodiment, the rotary drive part 333 for the upper main body part includes a rotary servo motor (not shown) supported by the lower main body part 331.

On the other hand, the arm module 340 is rotatably coupled to the main body module 330 with the second axis direction intersecting the first axis direction as a rotation axis. The arm module 340 includes a pivot arm 341 rotatably coupled to a pivot center shaft 334 for an arm and an arm driving unit connected to the pivot arm 341 to rotate the pivot arm 341 ).

The pivot arm 341 is rotatably coupled to the pivot center shaft 334 for the arm fixedly coupled to the upper main body 332. [ The arm driving unit (not shown) is connected to the pivot arm 341 to rotate the pivot arm 341. In this embodiment, the arm driving unit includes a servo motor (not shown) coupled to the upper main body 332 and connected to the pivot arm 341 to rotate the pivot arm 341.

The arm module 340 further includes a balance weight 343 coupled to the pivot arm 341 and disposed on the opposite side of the pivot arm 341 with respect to the pivot center axis 334 for the arm. The counterweight 343 is disposed on the opposite side of the pivot arm 341 with respect to the pivot center shaft 334 for the arm, thereby facilitating the rotation of the pivot arm 341.

On the other hand, the grip module 350 is rotatably coupled to the arm module 340 with the second axis direction as a rotating axis, and grips the cassette C. The gripping module 350 includes a hand turning center shaft 351 rotatably coupled to the turning arm 341 and a hand portion 352 connected to the hand turning center shaft 351.

The hand unit 352 includes a hand unit body 353 coupled to the hand turning center shaft 351 and a hand unit body 353 disposed below the hand unit body 353, A grip portion 354 which is relatively rotatable with respect to the rotary shaft 35 and grips the cassette C and which is supported by the hand portion body 353 and connected to the grip portion 354 to rotate the grip portion 354, And a rotation drive unit 356.

The gripping portion 354 grips the cassette C. The gripper 354 includes a gripper G for selectively gripping the gripping bracket CB provided on the upper surface of the cassette C and a gripper G for gripping the gripping bracket CB And a gripper driving unit (not shown) for driving the gripper G so as to be gripped or released.

In this embodiment, since four gripping brackets CB are provided at different positions on the upper surface of the cassette C, four grippers G are also provided corresponding to the gripping brackets CB. Of course, such matters are only one example, and the scope of the present invention can not be limited to these numbers.

The gripper G is connected to a gripper drive unit (not shown) provided inside the gripper unit 354. Although not shown in the gripper driving part, the gripper driving part can be applied to a configuration such as a combination of a linear motor, a cylinder, an actuator, a motor and a ball screw.

The gripper G is connected to and disconnected from the gripping bracket CB by relatively moving the gripper G relative to the gripping bracket CB regardless of the configuration of the gripper driving unit.

Further, the gripping portion 354 is rotated relative to the hand portion body 353 by rotational drive for gripping portion. So that the cassette C can be rotated upon loading the cassette C into the buffer station 400 or unloading the cassette C from the buffer station 400.

The cassette C rotated by the rotation of the upper main body portion 332 can be aligned with the buffer station 400 through the rotation of the grip portion 354 when the cassette C is loaded on the buffer station 400 have.

The rotary drive part 356 for the grip part is supported by the hand part body 353 and connected to the grip part 354 to rotate the grip part 354. [ In this embodiment, the rotary drive part 356 for the grip part includes a rotary servo motor (not shown) supported by the hand part body 353.

The horizontal holding module 360 is connected to the main body module 330 and the gripping module 350 and maintains the horizontal position of the gripping module 350 when the arm module 340 rotates. In this embodiment, the horizontal holding module 360 is accommodated inside the pivot arm 341.

The horizontal holding module 360 includes a first sprocket 361 coupled to the arm turning center shaft 334, a second sprocket 362 coupled to the hand turning center shaft 351, And a connection portion 363 connected to the second sprocket 361 and the second sprocket 362.

In this embodiment, the connecting portion 363 includes a first chain 364 engaged with the first sprocket 361, a second chain 365 engaged with the second sprocket, a second chain 364 coupled with the first chain 364, And a connecting rod 366 connecting the chain 365.

The first sprocket 361 is fixedly coupled to the pivot center shaft 334 for the arm. Therefore, the first sprocket 361 has the effect of relative movement in which the first sprocket 361 is rotated in the opposite direction in the rotating direction of the pivot arm 341 when the pivot arm 341 rotates.

Therefore, when the pivot arm 341 is rotated in the clockwise direction as shown in Fig. 10 in the state shown in Fig. 9, the first sprocket 361 is rotated counterclockwise by the pivot angle of the pivot arm 341 The second sprocket 362 connected to the first sprocket 361 through the connecting portion 363 is rotated counterclockwise in the direction opposite to the rotating direction of the rotating arm 341, It rotates by an angle.

Here, since the second sprocket 362 is fixedly coupled to the hand turning center shaft 351 and the hand turning center shaft 351 is rotatably coupled to the turning arm 341, the turning arm 341 Is rotated counterclockwise by the rotation angle of the pivot arm 341 in the clockwise direction as shown in Fig. 10 in the state shown in Fig.

At this time, since the gripping module 350 is coupled to the hand turning center shaft 351, when the turning arm 341 rotates clockwise as shown in Fig. 9 in the state shown in Fig. 9, The gripping module 350 is rotated counterclockwise by the rotation angle of the rotation arm 341 together with the rotation center shaft 351. [

10, the gripping module 350 is rotated in the counterclockwise direction as shown in FIG. 9, so that the gripping module 350 is rotated in the counterclockwise direction when the swinging arm 341 rotates Always keep level.

In the case of the connecting portion 363 of the present embodiment, the first chain 364 and the second chain 365 are not connected to each other through the connecting rod 366, It is possible to prevent the grip module 350 from being held in a horizontal state due to sagging of the chain.

The operation of the cassette supply system according to the present embodiment will be described with reference to FIG. 11 is an operational state diagram schematically showing the operation of the cassette supply system of Fig.

First, when the transporting truck 210 arrives adjacent to the cassette transporting unit 300, the handling robot 310 approaches the transporting truck 210 by the transporting module 320.

Thereafter, after the cassette C is gripped by the gripping module 350, the pivoting arm 341 is rotated to unload the cassette C from the transporting carriage 210 (Fig. 11 (a)).

Next, the handling robot 310 is moved in the direction away from the conveying carriage 210 by the moving module 320 (Fig. 11 (b)).

The rotating arm 341 is rotated so that the cassette C is carried into the process chamber 100 (Figure 11 (c)).

Meanwhile, the process of taking out the cassette C from the inside of the process chamber 100 proceeds in the opposite direction to the above-mentioned operation, so that the description is omitted.

The cassette supply system according to the present embodiment having such a structure and operation is configured such that the cassette transfer unit 300 disposed on the upper side of the process chamber 100 transfers the cassette C loaded in the cassette transfer unit 200 to the process chamber 100. [ The layout of the periphery of the process chamber 100 can be simplified by utilizing the space existing in the upper region of the process chamber 100, thereby facilitating the automation construction and shortening the tack time .

Although the present invention has been described in detail with reference to the above drawings, the scope of the scope of the present invention is not limited to the above-described drawings and description.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: Process chamber 200: Cassette transfer unit
210: feed carriage 211: cassette support
212: opening / closing door part 220: running rail
300: cassette transfer unit 310: handling robot
320: Moving module 321:
322: LM Guide 330: Body Module
331: lower main body part 332: upper main body part
333: rotation drive part for upper body part 334: rotation center axis for arm
340: arm module 341: pivot arm
343: balance weight 350: gripping module
351: Hand turning center shaft 352: Hand part
353: Hand unit body 354:
356: Rotation driving part for gripping part 360: Horizontal holding module
361: first sprocket 362: second sprocket
363: connection part 364: first chain
365: second chain 366: connecting rod
400: buffer station C: cassette
CB: Bracket for gripping F: Support frame
H: Through ball G: Gripper

Claims (15)

A process chamber in which a cassette entry / exit port through which the cassette is loaded or unloaded is provided in the upper region;
A cassette transfer unit for transferring the cassette; And
A cassette transfer unit positioned adjacent to the cassette transfer unit and disposed above the process chamber and transferring the cassette from one side to the other side between the cassette transfer unit and the process chamber,
The cassette transfer unit includes:
A handling robot for handling the cassette for transferring the cassette; And
And a movement module connected to the handling robot and relatively moving the handling robot in the first axial direction with respect to the cassette transfer unit,
The handling robot includes:
A body module supported by the moving module;
An arm module rotatably coupled to the main body module with a second axis direction intersecting the first axis direction as a rotation axis;
A grip module rotatably coupled to the arm module with the second axial direction as a rotating shaft center, the grip module holding the cassette; And
And a horizontal holding module connected to the main body module and the gripping module, the horizontal holding module holding the grip module when the arm module is rotated. delete The method according to claim 1,
The mobile module comprises:
An EL block to which the handling robot is coupled;
An LM guide for guiding the movement of the LM block; And
And an EL block driving unit for moving the EL block. delete The method according to claim 1,
The main body module includes:
A lower main body coupled to the moving module;
An upper main body portion disposed on the lower main body portion and relatively rotatable about the lower main body portion with a third axis direction intersecting the first axis direction and the second axis direction as a rotation axis; And
And a rotation driving part supported on the lower main body part and connected to the upper main body part for rotating the upper main body part. The method according to claim 1,
The arm module includes:
A rotation arm rotatably coupled to a rotation center shaft for the arm provided on the main body module; And
And an arm driving unit connected to the pivoting arm and rotating the pivoting arm. The method according to claim 6,
The arm module includes:
And a balance weight coupled to the pivot arm and disposed on the opposite side of the pivot arm with respect to the pivot axis for the arm. The method according to claim 6,
The holding module includes:
A pivotal central shaft for rotation which is rotatably coupled to the pivotal arm; And
And a hand portion connected to the hand turning center shaft. 9. The method of claim 8,
The hand unit includes:
A hand body coupled to the hand turning center shaft;
And a second arm which is disposed on a lower side of the hand unit body and is relatively rotatable about a third axis direction intersecting the first axis direction and the second axis direction with respect to the hand unit body as a rotation axis, chapter; And
And a rotation driving part for holding the grip part, which is supported by the hand part body and is connected to the grip part to rotate the grip part. 10. The method of claim 9,
The gripping portion includes:
A gripper which is selectively gripped by a holding bracket provided on an upper surface of the cassette; And
And a gripper driving unit for driving the gripper so that the gripper is gripped or released from the gripping bracket. 9. The method of claim 8,
The horizontal holding module includes:
A first sprocket coupled to the pivot shaft for the arm;
A second sprocket coupled to the pivot shaft for the hand; And
And a connection portion connected to the first sprocket and the second sprocket. 12. The method of claim 11,
The connecting portion
A first chain engaged with the first sprocket;
A second chain engaged with the second sprocket; And
And a connecting rod connecting the first chain and the second chain. The method according to claim 1,
The transfer unit
A conveyance truck on which the cassette is loaded; And
And a running rail for guiding the movement of the conveyance truck. 14. The method of claim 13,
The conveyance truck
A cassette supporting portion for supporting the cassette; And
And an opening / closing door portion that is moved relative to the cassette supporting portion so that an upper region of the cassette loaded therein is exposed. The method according to claim 1,
Further comprising a buffer station disposed adjacent to the cassette delivery unit and wherein the cassette is temporarily loaded by the cassette delivery unit.

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