JP2000340631A - Truck for wafer transfer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a truck for transferring wafers, which can prevent wafers from getting dirty to the utmost, when the truck is used for transferring the wafers between various wafer treating processes and can also be used for transferring wafer holders of different specifications. SOLUTION: A truck for transfer of wafers is provided with a housing space section 3 for housing wafer holders, a plurality of in-holding space holding mechanism sections 31 and 41 which movably hold the wafer holders in the section 3, and a holding mechanism 11 for transfer which holds wafer holders movable in the space section 3 and can be moved to the outside of the section 3. The wafer holders are transferred between treatment apparatus installed at different treating processes and the housing space section 3 by transferring the wafer holder under the cooperation between the holding mechanism 11 and an arbitrary one of the holding mechanism 31 and 41.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a wafer transport cart used for transporting wafers in a clean room.

[0002]

2. Description of the Related Art In a semiconductor device manufacturing process, for example, in a wafer process, processing equipment for performing predetermined processing on a wafer is installed in a clean room in order to avoid contamination. The transfer of the wafer in the clean room is performed, for example, by storing the wafer in a wafer holder such as a wafer cassette and transferring the wafer between various processing apparatuses. Conventionally, for example, in a wafer transfer system having a diameter of 200 mm, a transfer system using automated transfer means such as a ceiling transfer monorail, a floor transfer unmanned vehicle, and an unmanned vehicle with a floor transfer robot arm has been constructed. Was.

[0003]

However, if an automated transfer system as described above is constructed along with an increase in the diameter of a wafer such as a wafer having a diameter of 300 mm, for example, the size of the transfer equipment and the capital investment will increase. There were disadvantages such as an increase in the amount. Conventionally, a wafer cassette for holding a wafer is, for example, an open type cassette for transporting a wafer exposed to the atmosphere in a clean room, and a closed type cassette for transporting a wafer in a sealed state depending on the work content. Therefore, dedicated transfer means are required for each of the wafer cassettes having different specifications, and the transfer system is fixed and has less flexibility. On the other hand, in order to shorten the life cycle of a product and immediately respond to demand, it is easier to respond by human-centered transport than by automated transport means. For this reason, the transfer of wafers using a cart by human power has come to be performed. However, when transporting wafers using a trolley, the wafers are transferred by humans, so dust from humans has a great effect on the quality of semiconductor devices. It was remarkable in the course of progress. For example, in the related art, the loading and unloading of a wafer into and from a processing apparatus that performs a predetermined process on the wafer is performed, for example, because the worker performs the wafer in units of wafer cassettes. It was likely.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned disadvantages, and it is possible to minimize the contamination of a wafer when carrying a wafer between various processes using a cart. An object of the present invention is to provide a wafer transport cart that can be used for transporting wafer holders having different specifications and that can easily and inexpensively construct a wafer transport system.

[0005]

SUMMARY OF THE INVENTION The present invention relates to a wafer carrier for carrying a wafer holder for accommodating and holding a wafer between predetermined processing steps, comprising a storage space for accommodating the wafer holder. A plurality of holding means in the storage space for independently and movably holding the wafer holder in the storage space; and holding the wafer holder movable in the storage space and movable out of the storage space. Transferring means for transferring the wafer holder by cooperation of the holding means for transfer and any holding means in the storage space among the plurality of holding means in the storage space, and The holder is transferred between the processing device installed in each of the processing steps and the storage space.

The transfer holding means can transfer a plurality of types of wafer holders having different specifications between the storage space and the processing apparatus.

The wafer holder comprises a plurality of wafer holders each having a different holding part, and the transfer holding means comprises a plurality of holding members capable of holding the respective holders of the plurality of wafer holders. It has a holding arm part having an arm.

The wafer holder comprises a first wafer holder for accommodating and holding the wafer in a sealed state, and a second wafer holder for accommodating and holding the wafer in an exposed state to the atmosphere. The held portions of the first and second wafer holders are provided at different positions.

The holding arm portion of the transfer holding means has first and second holding arms for holding the held portions of the first and second wafer holders.

[0010] The transfer holding means includes a slide mechanism for sliding the holding arm portion in and out of the doorway of the storage space portion, and moving the holding arm portion up and down within the storage space portion by a predetermined amount. An elevating mechanism for raising and lowering in the direction, wherein the holding means in the storage space includes first and second movable members capable of mounting and holding the wafer holder and the first movable member in the storage space. A sliding mechanism that slides in the entry / exit direction within the unit; and an elevating mechanism that moves the second movable member in the elevating direction within the storage space.

The present invention also relates to a transfer operation of the wafer holder between the holding arm portion of the transfer holding means and the first or second movable member, wherein the transfer operation of the wafer holding tool is performed by the first and second movable members. This is performed by a combination of the sliding operation and the elevating operation with the second movable member.

[0012] In the wafer transport cart of the present invention, the wafer is transported between the processing apparatuses in a state where the wafer holder holding and storing the wafer is held by a plurality of holding means in the storage space in the storage space. The operation is performed by the worker moving the wafer transfer cart in the state of being stored in the storage space. When the wafer transport trolley is moved to one processing apparatus, the wafer transport trolley is transferred to any transfer holding means held by any of the wafer holders held by the plurality of storage space holding means in the storage space, The transfer holding means transfers the selected wafer holder to the processing apparatus.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing an embodiment of a wafer transport cart according to the present invention, in which (a) is a front view and (b) is a side view. As shown in FIG. 1, a carriage 1 for wafer transfer according to the present embodiment includes a storage space section 3 surrounded by a case 2 and a transfer holding mechanism section 11.
, A first storage space holding mechanism 31 and a second storage space holding mechanism 41.

The storage space 3 is a space for storing a wafer holder for storing and holding a wafer described later.
Since it is surrounded by the case 2 of the wafer carrier 1, dust and the like from the outside hardly enter the storage space 3. On one side surface of the storage space 3, an entrance 5 for opening the wafer holder out of the storage space 3 to the outside and charging the wafer holder into the storage space 3 is opened.

A plurality of (four) wheels 70 are rotatably provided below the case 2 of the wafer transport trolley 1 so that the wafer transport trolley 1 can be manually moved. These wheels 70 are formed of a relatively soft material such as a urethane-based material, for example, and reduce the vibration applied to the wafer carrier 1.

FIGS. 2A and 2B show the structure of the transfer holding mechanism 11, wherein FIG. 2A is a top view and FIG. 2B is a side view. As shown in FIG. 2, the transfer holding mechanism 1
1 is an arm elevating frame 15 and a holding arm 12
The arm raising / lowering frame 15 is held along four linear guides 8 so as to be movable in the directions of arrows B1 and B2. In addition, the arm 15
Is screwed and connected to a ball screw 16 provided parallel to the linear guide 8 and rotatably. The ball screw 16 is connected to a drive motor 17 via a transmission mechanism (not shown). The ball screw 16 is driven to rotate by a drive motor 17, and the arm elevating frame 15 moves up and down in the directions of arrows B1 and B2.

The holding arm 12 is held by a linear guide 20 so as to be movable in the directions of arrows A1 and A2 with respect to the arm elevating frame 15. The holding arm section 12 is connected to the drive motor 18 by a transmission means such as a rack and a pinion, and slides in the substantially horizontal directions indicated by arrows A1 and A2 by the rotation of the drive motor 18.

The holding arm section 12 has first and second holding arms 13 and 14 for holding a wafer holder. The first holding arm 13 includes the holding arm unit 1.
The two forks 13a extend in a substantially horizontal direction with respect to the two frames, and have two forks 13a parallel to each other at the ends. The second holding arm 14 is composed of two arms parallel to each other, and as shown in FIG.
Are located on both sides.

FIGS. 3 and 4 show wafer holders 61 and 62 of different specifications, respectively, by the holding arm 12.
(A) is a front view, and (b) is a side view. The wafer holder 61 shown in FIG. 3 has a holder 62 on the upper surface. The first holding arm 13 with respect to the neck portion 61b of the holder portion 62
Is inserted between the two forks 13a, and the first holding arm 13 is raised.
Is held by the two forks 13a.

The wafer holder 65 shown in FIG. 4 is provided with grooves 65a along which the two second holding arms 14 fit along both sides of the bottom. The second holding arm 14 is positioned at the bottom of the wafer holder 65 and the second holding arm 1
The wafer holder 65 is held by the second holding arm 14 by sliding the wafer holder 4 with respect to the wafer holder 65.

The above-mentioned wafer holder 61 has, for example, a type having an opening / closing lid (not shown), capable of accommodating a wafer therein and closing the opening / closing lid to convey the wafer in a sealed state. Can be. Further, as the wafer holder 65, for example, a so-called open cassette, which accommodates and holds wafers in a state where the wafers are exposed to a clean room atmosphere, can be used.

FIGS. 5A and 5B are views showing the structure of the first storage space holding mechanism 31, where FIG. 5A is a top view and FIG.
Is a side view. As shown in FIG. 5, the first storage space holding mechanism 31 includes a movable plate 32 on which the wafer holders 61 and 6 are placed and held, and an arrow C that is substantially horizontal.
Linear guide 3 movably held in directions 1 and C2
3 and a drive motor 34 for driving the movable plate 32. The movable plate 32 and the drive motor 34 are connected by, for example, a transmission mechanism including a rack and a pinion. The movable plate 32 is driven in the directions of arrows C1 and C2 by the rotational drive of the drive motor 34.

FIGS. 6A and 6B show the structure of the second storage space holding mechanism 41. FIG. 6A is a top view and FIG.
Is a side view. As shown in FIG. 6, the second storage space holding mechanism 41 includes a movable plate 42 for placing and holding the wafer holders 61 and 6 and a linear plate for holding the movable plate 42 movably in the directions of arrows D1 and D2. A guide 47 and a ball screw 46 rotatably provided in parallel with the linear guide 47
And a drive motor 44 that rotationally drives the ball screw 46.

The movable plate 42 is threadably connected to a ball screw 46, and moves up and down in the directions of arrows D1 and D2 as the ball screw 46 rotates. The ball screw 46 is
Connected to a drive motor 44 via a belt 45,
It is driven by the rotational drive of the drive motor 44.

Next, an example of the operation of the wafer transporting cart 1 having the above configuration will be described with reference to FIGS.
In the wafer processing process, there is a process that requires handling the wafer under relatively high cleanliness, and a process that performs processing under relatively low cleanliness and can transfer the wafer while it is exposed to the atmosphere of the clean room And exists.
Therefore, in a process requiring a high degree of cleanliness, for example, a wafer holder 61 capable of transporting the above-mentioned wafer in a sealed state is used. In a process in which the wafer may be exposed to a clean room atmosphere, for example, a wafer holder 65 such as the above-described open cassette is used.

Storing Operation First, the storing operation of the wafer holder 61 (or 65) existing in the processing apparatus for processing a wafer into the wafer transport carriage 1 will be described. For example, an operator pushes and moves the wafer transport trolley 1, and the wafer holder 61 (or 6) to be stored in the wafer transport trolley 1.
5) Move to the existing processing device. Next, as shown in FIG. 7, the holding arm 12 is driven to slide in the direction of arrow A1, and is projected from the storage space 3 through the entrance 5 so that the holding arm 12 is located at the unload port of the processing apparatus. The wafer holder 61 (or 65) is slid with respect to the holder 61 (or 65) to be held by the holding arm 13 or 14. Next, the holding arm unit 12 is slid in the direction of arrow A <b> 2, and the held wafer holder 61 (or 65) is stored in the storage space 3.

Transfer operation to the first movable plate 32 The wafer holder 61 (or 65) is moved to the first movable plate 32.
When the upper part is to be transferred, as shown in FIG. 8, the first movable plate 32 is slid in the direction of arrow C <b> 1 and the first movable plate 32 is moved to a predetermined position on the entrance 5 side in the storage space 3. Move to the position. The holding arm unit 12 is located above the first movable plate 32 that has moved to a predetermined position on the entrance 5 side, and lowers the arm elevating frame 15 in the direction of arrow B1.

When the holding arm 12 reaches a predetermined position by the lowering of the arm raising / lowering frame 15, the wafer holder 61 (or 65) held by the holding arm 12 is placed on the first movable plate 32. Is done. From this state, the holding arm unit 12 is slid in the direction opposite to the entrance 5, that is, in the direction of the arrow A <b> 2, and further, the arm elevating frame 15 is raised to the original position, and the first movable plate 32 is brought into the entrance. When the wafer holder 61 is slid to the terminal position on the opposite side, the transfer of the wafer holder 61 (or 65) to the first movable plate 32 is completed, as shown in FIG.

Transfer operation to the second movable plate 42 The wafer holder 61 (or 65) is moved to the second movable plate 42.
In the case of transfer to the wafer holder, as shown in FIG. 10, the second movable plate 42 is raised in the direction of the arrow D1, and the wafer holder 61 (or 65) held by the holding arm unit 12 located above. Is placed on the second movable plate 42. From this state, the holding arm 12 is slid to the end position on the opposite side of the entrance 5 to reach the state shown in FIG. By lowering the second movable plate 42 on which the wafer holder 61 (or 65) is placed and held to the original position, the transfer of the wafer holder 61 (or 65) to the second movable plate 42 is completed. .

Ejection Operation Next, the wafer holder 61 held on the first or second movable plate 32, 42 and stored in the storage space 3.
The operation of discharging (or 65) and transferring it to the load port of the processing apparatus will be described.

Discharge Operation from First Movable Plate 32 The wafer holder 61 (or 65) placed and held on the first movable plate 32 is inserted through the entrance 5 into the storage space 3.
When the wafer is discharged from the processing apparatus and transferred to the load port of the processing apparatus, as shown in FIG. 11, the first movable plate 32 holding the wafer holder 61 (or 65) is terminated at the entrance 5 side. Slide to position. In the arm raising / lowering frame 15 at the original position, the holding arm 12 is slid to the end position opposite to the entrance 5, and the arm raising / lowering frame 15 is lowered to hold the holding arm 13 of the holding arm 12 or 14 is the first movable plate 32
The wafer holder 61 (or 65) held at the position shown in FIG.

From this state, the holding arm 12 is slid in the direction of the arrow A1 on the entrance 5 side, and the wafer holder 61 (or 65) is transferred from the first movable plate 32 to the holding arm 12. Wafer holder 61 (or 6)
5) is moved to the entrance 5 by moving the holding arm 12 to which the transferred wafer 5 is transferred, and the holding arm 12 is slid out of the storage space 3 through the entrance 5 so that the wafer holder 6 is moved.
The transfer to the load port of the 1 (or 65) processing device is performed.

Discharge Operation from Second Movable Plate 42 The wafer holder 61 (or 65) placed and held on the second movable plate 42 is inserted through the entrance 5 into the storage space 3.
When the wafer is discharged from the processing apparatus and transferred to the load port of the processing apparatus, first, the holding arm 12 is slid to the end position on the opposite side to the entrance 5 to retract, and as shown in FIG. The second movable plate 42 holding the holding tool 61 (or 65) is raised to the position of the entrance 5 so as to be in the state shown in FIG.

From this state, the holding arm portion 12 is slid toward the entrance 5 to transfer the wafer holder 61 (or 65) from the second movable plate 42 to the holding arm portion 12, and the second movable plate 42 is terminated. Lower to the position. The holding arm 12 holding the wafer holder 61 (or 65) is slid out of the storage space 3 through the entrance 5 to allow the wafer holder 61 (or 65) to be connected to the load port of the processing apparatus. Transfer is performed.

As described above, according to the present embodiment, the wafer transporting trolley 1 is moved manually between the processing apparatuses only, and the space between the processing apparatus and the storage space 3 of the wafer transporting trolley 1 is maintained. The transfer of the wafer holders 61 and 65 is automatically performed. For this reason, for example, even if the diameter of the wafer increases and the weight of the wafer holders 61 and 65 increases, a wafer transfer system centering on human power can be simply and inexpensively constructed. Further, during the transfer of the wafer transfer cart 1 by the operator, the wafer holders 61 and 65 are not used.
Are stored in the storage space portion 3 so that the influence of dust from humans is suppressed, and the transfer of the wafer holders 61 and 65 to and from the processing apparatus is automated, so that Dust contamination can be minimized.

In the carriage 1 for carrying a wafer according to the present embodiment, a plurality of movable plates 32 and 42
Is provided, and the transfer holding mechanism 11 is provided with the movable plate 3.
Since any one of the wafer holders 61 and 65 held by the wafer holders 2 and 42 can be transferred, the wafer transport cart 1 can be used simultaneously for transporting wafers having different processing stages and processing steps. it can. Further, since the holding arm portion 12 of the wafer carrier 1 according to the present embodiment has the holding arms 13 and 14 capable of holding the wafer holders 61 and 65 of different specifications, the wafers of different specifications are used. It can be shared by the holders 61 and 65, and the versatility of the wafer transport cart 1 is high. In other words, by using the wafer transport cart 1 for both the process in which the wafer needs to be transported in a sealed state and the process in which the wafer can be transported while being exposed to the atmosphere of the clean room, the wafer transport cart 1 is used. It is possible to reduce the number of introduced devices.

[0037]

According to the present invention, a wafer carrier can be used commonly for carrying wafer holders of different specifications. For example, it is possible to cope with a case where the wafer can be transported while being exposed to the atmosphere in the clean room and a case where the wafer has to be transported in a sealed state. Further, according to the present invention, since the transfer of the wafer holder between the wafer transport trolley and each processing apparatus can be automated, the operator of the wafer transport trolley receives the wafer holder when the wafer holder is transferred. In addition, it is possible to prevent wafer contamination due to dust generation as much as possible, and to quickly transfer the wafer holder.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing one embodiment of a wafer transport cart of the present invention.

FIG. 2 is a configuration diagram illustrating a configuration of a transfer holding mechanism unit 11;

FIG. 3 is a view showing a state in which a first wafer holder is held by a holding arm unit 12;

FIG. 4 is a view showing a state where a second wafer holder is held by a holding arm unit 12;

FIG. 5 is a configuration diagram showing a configuration of a first storage space holding mechanism unit 31;

FIG. 6 is a configuration diagram showing a configuration of a second storage space holding mechanism section 41.

FIG. 7 is a view for explaining an operation of transferring the wafer holder from the processing apparatus to the storage space.

FIG. 8 is a diagram for explaining an operation of transferring a wafer holder from a holding arm unit to a first movable plate.

FIG. 9 is a diagram illustrating an operation subsequent to FIG. 8;

FIG. 10 is a diagram for explaining an operation of transferring a wafer holder from a holding arm unit to a second movable plate.

FIG. 11 is a view for explaining an operation of transferring the wafer holder from the first movable plate to the holding arm.

FIG. 12 is a view for explaining an operation of transferring a wafer holder from a second movable plate to a holding arm unit.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Wafer carrying cart, 2 ... Case, 3 ... Storage space part, 11 ... Transfer holding mechanism part, 31 ... First storage space holding mechanism part, 41 ... Second storage space holding mechanism part.

Claims (7)

[Claims] 1. A wafer carrier for carrying a wafer holder for accommodating and holding a wafer between predetermined processing steps, comprising: a storage space for accommodating the wafer holder; and a storage space for accommodating the wafer holder. A plurality of holding means in the storage space for independently and movably holding in the unit; and a transfer holding means for holding the wafer holder movable in the storage space and movable out of the storage space. The transfer of the wafer holder is performed by cooperation of the transfer holding means and the holding means in the storage space among the plurality of storage space holding means, and the wafer holding tool is transferred to each of the processing steps. A wafer transport trolley for transferring between the installed processing apparatus and the storage space. 2. The trolley according to claim 1, wherein the transfer holding means is capable of transferring a plurality of types of wafer holders having different specifications between the storage space and the processing apparatus. . 3. The wafer holder comprises a plurality of wafer holders each having a different held part, and the transfer holding means comprises a plurality of wafer holders each capable of holding each held part of the plurality of wafer holders. 3. The carriage for transporting wafers according to claim 2, further comprising: a holding arm portion having the holding arm. 4. A first wafer holder for holding and holding the wafer in a sealed state, and a second wafer holder for holding and holding the wafer in an atmosphere.
3. The carrier according to claim 2, wherein the held portions of the first and second wafer holders are provided at different positions. 4. 5. The transfer arm according to claim 4, wherein the holding arm portion of the transfer holding means includes first and second holding arms for holding the held portions of the first and second wafer holders. The cart for transporting wafers according to the above. 6. The transfer holding means includes: a slide mechanism for sliding the holding arm in a direction in which the holding arm is moved in and out of an entrance of the storage space, and a predetermined movement of the holding arm in the storage space. An elevating mechanism for elevating in the elevating direction, wherein the holding means in the storage space includes a first and a second movable member capable of mounting and holding the wafer holder and the first movable member. 4. The carriage according to claim 3, further comprising: a slide mechanism that slides in the storage space in the entry / exit direction; and a lifting mechanism that moves the second movable member in the storage space in the vertical direction. 5. 7. A transfer operation of said wafer holder between said holding arm portion of said transfer holding means and said first or second movable member is performed by said holding arm portion and said first and second movable members. 7. The wafer transfer cart according to claim 6, wherein the carriage is performed by a combination of a sliding operation and a lifting operation with a member.