TWI313056B - Semiconductor device and image display apparatus - Google Patents

Semiconductor device and image display apparatus Download PDF

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Publication number
TWI313056B
TWI313056B TW095107527A TW95107527A TWI313056B TW I313056 B TWI313056 B TW I313056B TW 095107527 A TW095107527 A TW 095107527A TW 95107527 A TW95107527 A TW 95107527A TW I313056 B TWI313056 B TW I313056B
Authority
TW
Taiwan
Prior art keywords
region
impurity region
impurity
channel
semiconductor layer
Prior art date
Application number
TW095107527A
Other languages
English (en)
Chinese (zh)
Other versions
TW200701446A (en
Inventor
Yoshihiko Toyoda
Naoki Nakagawa
Taro Yoshino
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200701446A publication Critical patent/TW200701446A/zh
Application granted granted Critical
Publication of TWI313056B publication Critical patent/TWI313056B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • H10D30/6719—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions having significant overlap between the lightly-doped drains and the gate electrodes, e.g. gate-overlapped LDD [GOLDD] TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • H10D30/6717—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions the source and the drain regions being asymmetrical
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
    • H10D30/6721—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions having lightly-doped extensions consisting of multiple lightly doped zones or having non-homogeneous dopant distributions, e.g. graded LDD

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
TW095107527A 2005-03-24 2006-03-07 Semiconductor device and image display apparatus TWI313056B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005086674A JP2006269808A (ja) 2005-03-24 2005-03-24 半導体装置および画像表示装置

Publications (2)

Publication Number Publication Date
TW200701446A TW200701446A (en) 2007-01-01
TWI313056B true TWI313056B (en) 2009-08-01

Family

ID=37015739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095107527A TWI313056B (en) 2005-03-24 2006-03-07 Semiconductor device and image display apparatus

Country Status (5)

Country Link
US (1) US7612378B2 (https=)
JP (1) JP2006269808A (https=)
KR (1) KR100727714B1 (https=)
CN (1) CN100495730C (https=)
TW (1) TWI313056B (https=)

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US8067772B2 (en) * 2006-12-05 2011-11-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP5041255B2 (ja) * 2007-04-18 2012-10-03 三菱電機株式会社 半導体薄膜の製造方法
US20100327353A1 (en) * 2008-01-29 2010-12-30 Atsushi Shoji Semiconductor device and method for manufacturing the same
KR101274706B1 (ko) * 2008-05-16 2013-06-12 엘지디스플레이 주식회사 액정표시장치 및 그 제조방법
KR101634411B1 (ko) 2008-10-31 2016-06-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 구동 회로, 표시 장치 및 전자 장치
EP2457256B1 (en) 2009-07-18 2020-06-17 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing semiconductor device
JP5811556B2 (ja) * 2011-03-18 2015-11-11 セイコーエプソン株式会社 半導体装置の製造方法
KR102022051B1 (ko) 2012-11-14 2019-09-18 삼성디스플레이 주식회사 박막트랜지스터 및 이를 포함하는 유기발광 화소
JP2015125997A (ja) 2013-12-25 2015-07-06 キヤノン株式会社 撮像装置、撮像システム、および、撮像装置の製造方法。
JP6523197B2 (ja) 2016-03-18 2019-05-29 東芝メモリ株式会社 不揮発性半導体記憶装置およびその製造方法
JP7117974B2 (ja) * 2018-10-30 2022-08-15 キヤノン株式会社 表示装置および電子機器
CN109785795A (zh) * 2019-03-11 2019-05-21 中国计量大学 一种采用ldd结构的硅基oled微显示器件驱动电路
WO2022091348A1 (ja) * 2020-10-30 2022-05-05 シャープ株式会社 表示装置および表示装置の製造方法
US20240234532A1 (en) * 2021-12-27 2024-07-11 Boe Technology Group Co., Ltd. Thin film transistor, manufacturing method for the same, and display substrate
CN115411114A (zh) * 2022-08-30 2022-11-29 深圳市华星光电半导体显示技术有限公司 显示面板及其制作方法、显示装置
CN115985944A (zh) * 2022-12-22 2023-04-18 武汉华星光电半导体显示技术有限公司 显示面板
CN119381387B (zh) * 2024-12-26 2025-05-16 浙江创芯集成电路有限公司 半导体ldd扩展宽度测试结构及其形成方法、计算方法

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Also Published As

Publication number Publication date
US7612378B2 (en) 2009-11-03
KR100727714B1 (ko) 2007-06-13
CN100495730C (zh) 2009-06-03
JP2006269808A (ja) 2006-10-05
US20060214229A1 (en) 2006-09-28
KR20060103185A (ko) 2006-09-28
TW200701446A (en) 2007-01-01
CN1838433A (zh) 2006-09-27

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