TWI309993B - - Google Patents
Download PDFInfo
- Publication number
- TWI309993B TWI309993B TW093101838A TW93101838A TWI309993B TW I309993 B TWI309993 B TW I309993B TW 093101838 A TW093101838 A TW 093101838A TW 93101838 A TW93101838 A TW 93101838A TW I309993 B TWI309993 B TW I309993B
- Authority
- TW
- Taiwan
- Prior art keywords
- adsorption
- vacuum
- pad
- substrate
- liquid crystal
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract description 131
- 239000000463 material Substances 0.000 claims abstract description 30
- 230000002093 peripheral effect Effects 0.000 claims abstract description 14
- 238000007599 discharging Methods 0.000 claims abstract description 5
- 238000001179 sorption measurement Methods 0.000 claims description 172
- 239000011347 resin Substances 0.000 claims description 17
- 229920005989 resin Polymers 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 229920000742 Cotton Polymers 0.000 claims 1
- 239000006071 cream Substances 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 97
- 239000011521 glass Substances 0.000 description 57
- 125000006850 spacer group Chemical group 0.000 description 28
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 239000007789 gas Substances 0.000 description 7
- 230000003014 reinforcing effect Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006355 external stress Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 241001474374 Blennius Species 0.000 description 1
- 241001629697 Panicum turgidum Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 235000015110 jellies Nutrition 0.000 description 1
- 239000008274 jelly Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 229920001897 terpolymer Polymers 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
- B25B11/007—Vacuum work holders portable, e.g. handheld
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H3/00—Separating articles from piles
- B65H3/08—Separating articles from piles using pneumatic force
- B65H3/0808—Suction grippers
- B65H3/0883—Construction of suction grippers or their holding devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/30—End effector
- Y10S901/40—Vacuum or mangetic
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Valves And Accessory Devices For Braking Systems (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003020620 | 2003-01-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200505626A TW200505626A (en) | 2005-02-16 |
| TWI309993B true TWI309993B (enExample) | 2009-05-21 |
Family
ID=32820631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093101838A TW200505626A (en) | 2003-01-29 | 2004-01-28 | Vacuum suction head |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US7726715B2 (enExample) |
| EP (1) | EP1593465B1 (enExample) |
| JP (1) | JP4468893B2 (enExample) |
| KR (1) | KR101019469B1 (enExample) |
| CN (1) | CN100396454C (enExample) |
| AT (1) | ATE454960T1 (enExample) |
| DE (1) | DE602004025084D1 (enExample) |
| TW (1) | TW200505626A (enExample) |
| WO (1) | WO2004067234A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI381908B (zh) * | 2011-01-21 | 2013-01-11 | Chime Ball Technology Co Ltd | Suction device |
Families Citing this family (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100628276B1 (ko) * | 2004-11-05 | 2006-09-27 | 엘지.필립스 엘시디 주식회사 | 스크라이브 장비 및 이를 구비한 기판의 절단장치 및이것을 이용한 기판의 절단방법 |
| ITTO20060124A1 (it) * | 2006-02-22 | 2007-08-23 | Famatec S P A | Organo di presa per la movimentazione di manufatti in ceramica cruda |
| JP4857983B2 (ja) * | 2006-07-19 | 2012-01-18 | 横河電機株式会社 | 移送システム |
| DE102006058299A1 (de) * | 2006-12-11 | 2008-06-12 | Robert Bosch Gmbh | Handhabungswerkzeug für Bauelemente, insbesondere elektronische Bauelemente |
| KR101223056B1 (ko) | 2007-04-26 | 2013-01-17 | 어뎁트 테크놀로지, 인코포레이티드 | 진공 그립핑 장치 |
| US8028850B2 (en) * | 2007-09-22 | 2011-10-04 | Israel Harry Zimmerman | Self-anchoring beverage container with directional release and attachment capability |
| ATE521504T1 (de) * | 2007-11-27 | 2011-09-15 | Pilkington Italia Spa | Verglasung |
| JP5185668B2 (ja) * | 2008-03-26 | 2013-04-17 | 東京医研株式会社 | 止血装置 |
| JP5350818B2 (ja) * | 2009-01-27 | 2013-11-27 | 株式会社ディスコ | 研削装置 |
| TWI437672B (zh) | 2011-12-16 | 2014-05-11 | 利用氣體充壓以抑制載板翹曲的載板固定方法 | |
| JP5982679B2 (ja) * | 2012-08-17 | 2016-08-31 | アピックヤマダ株式会社 | 半導体製造装置用吸着ヘッドおよびその製造方法 |
| US8757418B2 (en) | 2012-11-01 | 2014-06-24 | Israel Harry Zimmerman | Self-anchoring low-profile container anchor with directional release and attachment capability |
| JP6171316B2 (ja) * | 2012-11-30 | 2017-08-02 | 大日本印刷株式会社 | 剥離装置および剥離方法 |
| EP2935058A1 (en) * | 2012-12-21 | 2015-10-28 | Short Brothers Plc | Suction cup |
| KR101355860B1 (ko) * | 2013-02-22 | 2014-01-28 | 에스케이하이닉스 주식회사 | 가이드 일체형 진공 흡반 |
| CN103192402B (zh) * | 2013-04-14 | 2014-12-10 | 苏州科技学院 | 一种压电超声振动吸附拾取器 |
| KR101477631B1 (ko) * | 2013-04-30 | 2014-12-31 | (주)엠프리시젼 | 흡착 패드 및 그 제조 방법 |
| JP6186256B2 (ja) * | 2013-11-20 | 2017-08-23 | 株式会社ディスコ | 加工装置 |
| KR101469688B1 (ko) | 2014-03-21 | 2014-12-05 | 한국뉴매틱(주) | 진공 시스템용 체크-밸브 어셈블리 |
| JP6335672B2 (ja) * | 2014-06-17 | 2018-05-30 | 株式会社ディスコ | 搬送装置 |
| CN104199218B (zh) * | 2014-08-18 | 2017-07-25 | 深圳市华星光电技术有限公司 | 液晶滴注装置 |
| SE538811C2 (sv) * | 2015-04-22 | 2016-12-13 | Lundin Christer | Leak preventing appliance and method for preventing liquid from leaking out of a damaged tank |
| KR102300081B1 (ko) * | 2015-04-27 | 2021-09-08 | 삼성디스플레이 주식회사 | 합착 장치 및 이를 이용한 곡면 표시 장치의 제조 방법 |
| US9814332B2 (en) | 2015-06-29 | 2017-11-14 | Israel Harry Zimmerman | Anchoring device with directional release and attachment capability and protection against inadvertent release |
| DE102015213818A1 (de) * | 2015-07-22 | 2017-01-26 | Asys Automatisierungssysteme Gmbh | Vorrichtung zur Handhabung von flachen Substraten |
| EP4219094B1 (en) | 2015-09-08 | 2024-11-06 | Berkshire Grey Operating Company, Inc. | Systems for providing vacuum control in an articulated arm end effector |
| FR3049940B1 (fr) * | 2016-04-06 | 2018-04-13 | Saint- Gobain Glass France | Dispositif de support pour feuille de verre notamment dans une installation de lavage |
| NL2018243B1 (en) | 2017-01-27 | 2018-08-07 | Suss Microtec Lithography Gmbh | Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector |
| US20200346312A1 (en) * | 2017-09-07 | 2020-11-05 | Shinkoh Co., Ltd. | Fixture |
| KR102540860B1 (ko) * | 2018-05-29 | 2023-06-07 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
| CN110544661A (zh) * | 2018-05-29 | 2019-12-06 | 普因特工程有限公司 | 微led转印头及利用其的微led转印系统 |
| KR102540859B1 (ko) * | 2018-05-29 | 2023-06-07 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템 |
| CN108942999A (zh) * | 2018-09-01 | 2018-12-07 | 亚米拉自动化技术(苏州)有限公司 | 一种新型型材组合式海绵吸盘 |
| CN109733873B (zh) * | 2018-12-13 | 2020-03-31 | 西安交通大学 | 一种负压辅助的仿生干粘附拾取结构及制备工艺 |
| CN109533960B (zh) * | 2018-12-13 | 2020-05-15 | 西安交通大学 | 一种基于壁虎仿生结构辅助的真空吸附结构及制作方法 |
| KR20200095909A (ko) * | 2019-02-01 | 2020-08-11 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 |
| WO2020172114A1 (en) * | 2019-02-18 | 2020-08-27 | Material Handling Systems, Inc. | Dual-material vacuum cup for a vacuum-based end effector |
| CN110323175B (zh) * | 2019-04-16 | 2023-01-06 | 深圳市正鸿泰科技有限公司 | 一种具有吸力调节功能的便捷型芯片分拣设备 |
| CN109968272B (zh) * | 2019-04-22 | 2020-12-08 | 湖州达立智能设备制造有限公司 | 一种用于曲面led显示屏的气吸装置 |
| KR20210007327A (ko) * | 2019-07-11 | 2021-01-20 | 미래에이티 주식회사 | 플렉시블 회로기판 공정용 흡착 장치 |
| EP4010152A1 (en) | 2019-08-08 | 2022-06-15 | Berkshire Grey Operating Company, Inc. | Systems and methods for providing, in programmable motion devices, compliant end effectors with noise mitigation |
| MX2022008857A (es) | 2020-01-17 | 2022-11-10 | Mat Handling Systems Inc | Efecto extremo a base de vacio con copa de vacio extensible. |
| EP4100219B1 (en) | 2020-02-05 | 2025-04-09 | Berkshire Grey Operating Company, Inc. | End-effector and programmable motion device |
| CN111584416A (zh) * | 2020-04-30 | 2020-08-25 | 南通通富微电子有限公司 | 一种晶圆搬运装置及晶圆减薄设备 |
| EP3909723A1 (en) * | 2020-05-13 | 2021-11-17 | Joulin Cemma | Vacuum gripper device with foam layer secured by magnetic attraction |
| KR20230041717A (ko) * | 2020-07-27 | 2023-03-24 | 니폰 덴키 가라스 가부시키가이샤 | 흡착 패드 |
| CN112026398A (zh) * | 2020-08-04 | 2020-12-04 | 爱瞰(北京)影像科技有限公司 | 全自动翻页案卷书刊扫描机器人 |
| FR3115847B1 (fr) * | 2020-10-29 | 2023-01-13 | Airbus Helicopters | Outil de préhension et robot muni dudit outil |
| US11551964B2 (en) * | 2020-11-17 | 2023-01-10 | Western Digital Technologies, Inc. | Semiconductor wafer transfer arm |
| CA3201277A1 (en) * | 2020-11-19 | 2022-05-27 | Berkshire Grey Orerating Company, Inc. | Systems and methods for object processing using grippers for objects with low pose authority |
| CN114609496B (zh) * | 2020-12-07 | 2025-08-26 | 创意电子股份有限公司 | 测试设备、其元件搬运装置及测试设备的测试方法 |
| US11542980B2 (en) | 2020-12-30 | 2023-01-03 | Israel Harry Zimmerman | Universal quick-release anchor member |
| US11255482B1 (en) | 2020-12-30 | 2022-02-22 | Israel Harry Zimmerman | Quick-release anchoring apparatus with acceleration damping |
| US11415266B2 (en) | 2020-12-30 | 2022-08-16 | Israel Harry Zimmerman | Quick-release anchoring apparatus with self-mounted anchor member |
| JP7624699B2 (ja) * | 2021-01-06 | 2025-01-31 | 学校法人 名城大学 | 吸着装置 |
| US12071973B2 (en) | 2022-01-14 | 2024-08-27 | Harry Zimmerman | Universal quick-release vacuum connector |
| US20230228373A1 (en) * | 2022-01-14 | 2023-07-20 | Mighty Ventures, Inc. | Handheld electronic device case with quick-release anchoring capability |
| US11522988B2 (en) | 2021-04-09 | 2022-12-06 | Mighty Ventures, Inc. | Object holder with quick-release anchoring capability |
| US11525475B2 (en) | 2021-03-03 | 2022-12-13 | Mighty Ventures, Inc. | Object holder with quick-release anchoring capability |
| US12133601B2 (en) | 2021-09-21 | 2024-11-05 | Israel Harry Zimmerman | Quick-release anchoring apparatus with acceleration damping |
| JP2024537166A (ja) * | 2021-10-07 | 2024-10-10 | ラム リサーチ コーポレーション | 湾曲ウエハ用のエンドエフェクタパッド設計 |
| JP2023117079A (ja) * | 2022-02-10 | 2023-08-23 | リンテック株式会社 | 保持装置および保持方法、並びに、シート貼付装置およびシート貼付方法 |
| US11988242B2 (en) | 2022-03-25 | 2024-05-21 | Mighty Ventures, Inc. | Valve-actuated suction apparatus |
| DE102022107301A1 (de) * | 2022-03-28 | 2023-09-28 | Bundesdruckerei Gmbh | Sauggreifer zum Handhaben von Folien |
| US12078257B2 (en) | 2022-10-03 | 2024-09-03 | Harry Zimmerman | Valve-actuated suction apparatus |
| EP4446053A1 (en) * | 2023-04-11 | 2024-10-16 | Carl Zeiss Vision International GmbH | Blank contacting element, vacuum blocking piece and method for manufacturing a spectacle lens |
| US12352384B2 (en) | 2023-06-14 | 2025-07-08 | Israel Harry Zimmerman | Lockable valve-actuated suction apparatus |
| US12442407B2 (en) | 2024-03-21 | 2025-10-14 | Israel Harry Zimmerman | Quick release suction mounting apparatus with longitudinally stable, laterally compliant suction control valve seat |
| KR102720471B1 (ko) * | 2024-05-28 | 2024-10-22 | (주)브이텍 | 진공 시스템용 흡착-컵 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2221238A (en) * | 1939-08-31 | 1940-11-12 | Johnson Silvie Lloyd | Suction cup |
| US2850279A (en) * | 1954-03-29 | 1958-09-02 | Miehle Goss Dexter Inc | Sheet separator |
| US3272549A (en) * | 1965-01-13 | 1966-09-13 | Gen Electric | Materials handling device |
| FR2299759A1 (fr) * | 1974-10-22 | 1976-08-27 | Lgt Lab Gen Telecomm | Dispositif correcteur de phase differentielle et emetteur de television comportant un tel dispositif |
| GB1530462A (en) | 1975-04-01 | 1978-11-01 | Nat Res Dev | Application of liquid to a surface |
| JPS5347275U (enExample) * | 1976-09-27 | 1978-04-21 | ||
| JPS56126595A (en) | 1980-02-28 | 1981-10-03 | Keiichi Isotani | Method and device for releasing holding in holder utilizing sucker |
| US4600229A (en) * | 1984-08-03 | 1986-07-15 | Oten Peter D | Vacuum cup |
| SE8502048D0 (sv) * | 1985-04-26 | 1985-04-26 | Astra Tech Ab | Vakuumfixerad hallare for medicinskt bruk |
| DE3710994A1 (de) * | 1987-04-01 | 1988-10-13 | Heidelberger Druckmasch Ag | Saugkopf mit hubsaugern |
| JPS644585U (enExample) | 1987-06-26 | 1989-01-12 | ||
| IT1222456B (it) * | 1987-08-06 | 1990-09-05 | Enzo Scaglia | Sollevatore a ventosa |
| US5013075A (en) * | 1988-01-11 | 1991-05-07 | Littell Edmund R | Vacuum cup construction |
| US4978269A (en) * | 1989-03-02 | 1990-12-18 | Toter, Inc. | Vacuum controlled lifting apparatus |
| CN2053203U (zh) * | 1989-04-04 | 1990-02-21 | 沈阳重型机器厂 | 真空吸头 |
| GB9008764D0 (en) * | 1990-04-19 | 1990-06-13 | Egnell Ameda Ltd | A resilient suction cup |
| DE4026244C2 (de) * | 1990-08-18 | 1996-02-08 | Ant Nachrichtentech | Substratträger |
| JP2524586Y2 (ja) * | 1990-09-06 | 1997-02-05 | エスエムシー株式会社 | 吸着用パッド |
| US5133524A (en) * | 1991-02-11 | 1992-07-28 | Liu Bao Shen | Suction cup device |
| JPH0674286A (ja) | 1992-08-24 | 1994-03-15 | Bridgestone Corp | 防振装置 |
| US5336158A (en) * | 1992-11-12 | 1994-08-09 | Huggins Freddie L | Pneumatic vacuum vibrator apparatus |
| JP2950722B2 (ja) | 1994-03-25 | 1999-09-20 | セントラル硝子株式会社 | 吸着パッド |
| US5511752A (en) * | 1994-06-02 | 1996-04-30 | Trethewey; Brig E. A. | Suction cup with valve |
| JPH08122941A (ja) | 1994-10-21 | 1996-05-17 | Toppan Printing Co Ltd | 真空吸着盤 |
| JPH08197470A (ja) | 1995-01-18 | 1996-08-06 | Toyota Auto Body Co Ltd | 真空吸着カップ |
| DE29512750U1 (de) * | 1995-01-20 | 1996-05-23 | J. Schmalz GmbH, 72293 Glatten | Hebevorrichtung |
| JPH09174475A (ja) | 1995-12-27 | 1997-07-08 | Naohito Nakagawa | すぐ取れる吸盤 |
| JP3393534B2 (ja) * | 1997-05-16 | 2003-04-07 | タツモ株式会社 | 処理液供給ノズルシステム |
| JPH11267986A (ja) | 1998-03-23 | 1999-10-05 | Murata Mfg Co Ltd | シート吸着板 |
| US6135522A (en) * | 1999-05-26 | 2000-10-24 | Advanced Semiconductors Engineering, Inc. | Sucker for transferring packaged semiconductor device |
| US6502808B1 (en) * | 1999-09-30 | 2003-01-07 | The Boeing Company | Vacuum cup with precision hard stop |
| DE10009108A1 (de) * | 2000-02-26 | 2001-09-06 | Schmalz J Gmbh | Vakuumhandhabungsgerät |
| JP4547649B2 (ja) * | 2000-07-31 | 2010-09-22 | Smc株式会社 | 吸着用パッド |
-
2004
- 2004-01-28 EP EP04705888A patent/EP1593465B1/en not_active Expired - Lifetime
- 2004-01-28 DE DE602004025084T patent/DE602004025084D1/de not_active Expired - Lifetime
- 2004-01-28 TW TW093101838A patent/TW200505626A/zh not_active IP Right Cessation
- 2004-01-28 CN CNB2004800030764A patent/CN100396454C/zh not_active Expired - Fee Related
- 2004-01-28 AT AT04705888T patent/ATE454960T1/de not_active IP Right Cessation
- 2004-01-28 WO PCT/JP2004/000785 patent/WO2004067234A1/ja not_active Ceased
- 2004-01-28 JP JP2005504733A patent/JP4468893B2/ja not_active Expired - Fee Related
- 2004-01-28 KR KR1020057012939A patent/KR101019469B1/ko not_active Expired - Fee Related
- 2004-01-28 US US10/543,726 patent/US7726715B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI381908B (zh) * | 2011-01-21 | 2013-01-11 | Chime Ball Technology Co Ltd | Suction device |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE454960T1 (de) | 2010-01-15 |
| DE602004025084D1 (de) | 2010-03-04 |
| TW200505626A (en) | 2005-02-16 |
| EP1593465A4 (en) | 2008-07-23 |
| CN1744970A (zh) | 2006-03-08 |
| EP1593465A1 (en) | 2005-11-09 |
| JP4468893B2 (ja) | 2010-05-26 |
| WO2004067234A1 (ja) | 2004-08-12 |
| US20060232085A1 (en) | 2006-10-19 |
| EP1593465B1 (en) | 2010-01-13 |
| HK1088276A1 (zh) | 2006-11-03 |
| US7726715B2 (en) | 2010-06-01 |
| JPWO2004067234A1 (ja) | 2006-05-18 |
| CN100396454C (zh) | 2008-06-25 |
| KR101019469B1 (ko) | 2011-03-07 |
| KR20050101172A (ko) | 2005-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI309993B (enExample) | ||
| CN106653671B (zh) | 一种吸盘及其吸附方法 | |
| JP2010103332A (ja) | 真空吸着装置 | |
| JPH0766093A (ja) | 半導体ウエーハの貼り合わせ方法およびその装置 | |
| JP2004207644A (ja) | 静電チャック及びこれを用いた貼合わせ基板製造装置 | |
| CN109891570A (zh) | 静电卡盘及其制造方法 | |
| JP2015176934A (ja) | 静電チャッククリーナ、クリーニング方法、および露光装置 | |
| JP4797027B2 (ja) | 基板体の貼着装置及び基板体の取り扱い方法 | |
| JP6154173B2 (ja) | 真空吸着装置及び吸着プレート | |
| JP2012009720A (ja) | ウェハホルダおよび露光装置 | |
| CN110391155A (zh) | 附着基板的方法和用于附着基板的设备 | |
| JP3769618B2 (ja) | 真空吸着装置 | |
| KR20180002859A (ko) | 기판유지장치, 기판유지부재 및 기판유지방법 | |
| JP3817613B2 (ja) | 真空吸着装置 | |
| CN107210253A (zh) | 基板移载系统 | |
| JPH10128633A (ja) | 真空吸着装置 | |
| JP7629701B2 (ja) | 保持装置 | |
| JP2019217561A (ja) | チャックテーブル、研削装置および研削品の製造方法 | |
| KR102592339B1 (ko) | 다공성 필터가 구비되는 정전척의 제조 방법 | |
| JPH0823025A (ja) | ウェハチャック及びそのチャック部の製造方法 | |
| US12318879B2 (en) | Pressurizing suction-attachment table and pressurizing device equipped with the same | |
| HK1088276B (en) | Vacuum suction head | |
| JP2012059748A (ja) | 基板用の保持治具 | |
| JP2007168025A (ja) | 保持テーブル、被保持物品の処理装置、及び半導体ウェーハの処理装置 | |
| JPH05218183A (ja) | 半導体ウエハ用真空チャックステージ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |