CN100396454C - 真空吸头 - Google Patents

真空吸头 Download PDF

Info

Publication number
CN100396454C
CN100396454C CNB2004800030764A CN200480003076A CN100396454C CN 100396454 C CN100396454 C CN 100396454C CN B2004800030764 A CNB2004800030764 A CN B2004800030764A CN 200480003076 A CN200480003076 A CN 200480003076A CN 100396454 C CN100396454 C CN 100396454C
Authority
CN
China
Prior art keywords
pad
vacuum
vacuum suction
suction
liquid crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004800030764A
Other languages
English (en)
Chinese (zh)
Other versions
CN1744970A (zh
Inventor
长泽茂树
高松生芳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN1744970A publication Critical patent/CN1744970A/zh
Application granted granted Critical
Publication of CN100396454C publication Critical patent/CN100396454C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H3/00—Separating articles from piles
    • B65H3/08—Separating articles from piles using pneumatic force
    • B65H3/0808—Suction grippers
    • B65H3/0883—Construction of suction grippers or their holding devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector
    • Y10S901/40—Vacuum or mangetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Liquid Crystal (AREA)
CNB2004800030764A 2003-01-29 2004-01-28 真空吸头 Expired - Fee Related CN100396454C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003020620 2003-01-29
JP020620/2003 2003-01-29

Publications (2)

Publication Number Publication Date
CN1744970A CN1744970A (zh) 2006-03-08
CN100396454C true CN100396454C (zh) 2008-06-25

Family

ID=32820631

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800030764A Expired - Fee Related CN100396454C (zh) 2003-01-29 2004-01-28 真空吸头

Country Status (9)

Country Link
US (1) US7726715B2 (enExample)
EP (1) EP1593465B1 (enExample)
JP (1) JP4468893B2 (enExample)
KR (1) KR101019469B1 (enExample)
CN (1) CN100396454C (enExample)
AT (1) ATE454960T1 (enExample)
DE (1) DE602004025084D1 (enExample)
TW (1) TW200505626A (enExample)
WO (1) WO2004067234A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253290A1 (de) * 2022-03-28 2023-10-04 Bundesdruckerei GmbH Sauggreifer zum handhaben von folien

Families Citing this family (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100628276B1 (ko) * 2004-11-05 2006-09-27 엘지.필립스 엘시디 주식회사 스크라이브 장비 및 이를 구비한 기판의 절단장치 및이것을 이용한 기판의 절단방법
ITTO20060124A1 (it) * 2006-02-22 2007-08-23 Famatec S P A Organo di presa per la movimentazione di manufatti in ceramica cruda
JP4857983B2 (ja) * 2006-07-19 2012-01-18 横河電機株式会社 移送システム
DE102006058299A1 (de) * 2006-12-11 2008-06-12 Robert Bosch Gmbh Handhabungswerkzeug für Bauelemente, insbesondere elektronische Bauelemente
KR101223056B1 (ko) 2007-04-26 2013-01-17 어뎁트 테크놀로지, 인코포레이티드 진공 그립핑 장치
US8028850B2 (en) * 2007-09-22 2011-10-04 Israel Harry Zimmerman Self-anchoring beverage container with directional release and attachment capability
ATE521504T1 (de) * 2007-11-27 2011-09-15 Pilkington Italia Spa Verglasung
JP5185668B2 (ja) * 2008-03-26 2013-04-17 東京医研株式会社 止血装置
JP5350818B2 (ja) * 2009-01-27 2013-11-27 株式会社ディスコ 研削装置
TWI381908B (zh) * 2011-01-21 2013-01-11 Chime Ball Technology Co Ltd Suction device
TWI437672B (zh) 2011-12-16 2014-05-11 利用氣體充壓以抑制載板翹曲的載板固定方法
JP5982679B2 (ja) * 2012-08-17 2016-08-31 アピックヤマダ株式会社 半導体製造装置用吸着ヘッドおよびその製造方法
US8757418B2 (en) 2012-11-01 2014-06-24 Israel Harry Zimmerman Self-anchoring low-profile container anchor with directional release and attachment capability
JP6171316B2 (ja) * 2012-11-30 2017-08-02 大日本印刷株式会社 剥離装置および剥離方法
EP2935058A1 (en) * 2012-12-21 2015-10-28 Short Brothers Plc Suction cup
KR101355860B1 (ko) * 2013-02-22 2014-01-28 에스케이하이닉스 주식회사 가이드 일체형 진공 흡반
CN103192402B (zh) * 2013-04-14 2014-12-10 苏州科技学院 一种压电超声振动吸附拾取器
KR101477631B1 (ko) * 2013-04-30 2014-12-31 (주)엠프리시젼 흡착 패드 및 그 제조 방법
JP6186256B2 (ja) * 2013-11-20 2017-08-23 株式会社ディスコ 加工装置
KR101469688B1 (ko) 2014-03-21 2014-12-05 한국뉴매틱(주) 진공 시스템용 체크-밸브 어셈블리
JP6335672B2 (ja) * 2014-06-17 2018-05-30 株式会社ディスコ 搬送装置
CN104199218B (zh) * 2014-08-18 2017-07-25 深圳市华星光电技术有限公司 液晶滴注装置
SE538811C2 (sv) * 2015-04-22 2016-12-13 Lundin Christer Leak preventing appliance and method for preventing liquid from leaking out of a damaged tank
KR102300081B1 (ko) * 2015-04-27 2021-09-08 삼성디스플레이 주식회사 합착 장치 및 이를 이용한 곡면 표시 장치의 제조 방법
US9814332B2 (en) 2015-06-29 2017-11-14 Israel Harry Zimmerman Anchoring device with directional release and attachment capability and protection against inadvertent release
DE102015213818A1 (de) * 2015-07-22 2017-01-26 Asys Automatisierungssysteme Gmbh Vorrichtung zur Handhabung von flachen Substraten
EP4219094B1 (en) 2015-09-08 2024-11-06 Berkshire Grey Operating Company, Inc. Systems for providing vacuum control in an articulated arm end effector
FR3049940B1 (fr) * 2016-04-06 2018-04-13 Saint- Gobain Glass France Dispositif de support pour feuille de verre notamment dans une installation de lavage
NL2018243B1 (en) 2017-01-27 2018-08-07 Suss Microtec Lithography Gmbh Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector
US20200346312A1 (en) * 2017-09-07 2020-11-05 Shinkoh Co., Ltd. Fixture
KR102540860B1 (ko) * 2018-05-29 2023-06-07 (주)포인트엔지니어링 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템
CN110544661A (zh) * 2018-05-29 2019-12-06 普因特工程有限公司 微led转印头及利用其的微led转印系统
KR102540859B1 (ko) * 2018-05-29 2023-06-07 (주)포인트엔지니어링 마이크로 led 전사헤드 및 이를 이용한 마이크로 led 전사 시스템
CN108942999A (zh) * 2018-09-01 2018-12-07 亚米拉自动化技术（苏州）有限公司 一种新型型材组合式海绵吸盘
CN109733873B (zh) * 2018-12-13 2020-03-31 西安交通大学 一种负压辅助的仿生干粘附拾取结构及制备工艺
CN109533960B (zh) * 2018-12-13 2020-05-15 西安交通大学 一种基于壁虎仿生结构辅助的真空吸附结构及制作方法
KR20200095909A (ko) * 2019-02-01 2020-08-11 (주)포인트엔지니어링 마이크로 led 전사헤드
WO2020172114A1 (en) * 2019-02-18 2020-08-27 Material Handling Systems, Inc. Dual-material vacuum cup for a vacuum-based end effector
CN110323175B (zh) * 2019-04-16 2023-01-06 深圳市正鸿泰科技有限公司 一种具有吸力调节功能的便捷型芯片分拣设备
CN109968272B (zh) * 2019-04-22 2020-12-08 湖州达立智能设备制造有限公司 一种用于曲面led显示屏的气吸装置
KR20210007327A (ko) * 2019-07-11 2021-01-20 미래에이티 주식회사 플렉시블 회로기판 공정용 흡착 장치
EP4010152A1 (en) 2019-08-08 2022-06-15 Berkshire Grey Operating Company, Inc. Systems and methods for providing, in programmable motion devices, compliant end effectors with noise mitigation
MX2022008857A (es) 2020-01-17 2022-11-10 Mat Handling Systems Inc Efecto extremo a base de vacio con copa de vacio extensible.
EP4100219B1 (en) 2020-02-05 2025-04-09 Berkshire Grey Operating Company, Inc. End-effector and programmable motion device
CN111584416A (zh) * 2020-04-30 2020-08-25 南通通富微电子有限公司 一种晶圆搬运装置及晶圆减薄设备
EP3909723A1 (en) * 2020-05-13 2021-11-17 Joulin Cemma Vacuum gripper device with foam layer secured by magnetic attraction
KR20230041717A (ko) * 2020-07-27 2023-03-24 니폰 덴키 가라스 가부시키가이샤 흡착 패드
CN112026398A (zh) * 2020-08-04 2020-12-04 爱瞰(北京)影像科技有限公司 全自动翻页案卷书刊扫描机器人
FR3115847B1 (fr) * 2020-10-29 2023-01-13 Airbus Helicopters Outil de préhension et robot muni dudit outil
US11551964B2 (en) * 2020-11-17 2023-01-10 Western Digital Technologies, Inc. Semiconductor wafer transfer arm
CA3201277A1 (en) * 2020-11-19 2022-05-27 Berkshire Grey Orerating Company, Inc. Systems and methods for object processing using grippers for objects with low pose authority
CN114609496B (zh) * 2020-12-07 2025-08-26 创意电子股份有限公司 测试设备、其元件搬运装置及测试设备的测试方法
US11542980B2 (en) 2020-12-30 2023-01-03 Israel Harry Zimmerman Universal quick-release anchor member
US11255482B1 (en) 2020-12-30 2022-02-22 Israel Harry Zimmerman Quick-release anchoring apparatus with acceleration damping
US11415266B2 (en) 2020-12-30 2022-08-16 Israel Harry Zimmerman Quick-release anchoring apparatus with self-mounted anchor member
JP7624699B2 (ja) * 2021-01-06 2025-01-31 学校法人 名城大学 吸着装置
US12071973B2 (en) 2022-01-14 2024-08-27 Harry Zimmerman Universal quick-release vacuum connector
US20230228373A1 (en) * 2022-01-14 2023-07-20 Mighty Ventures, Inc. Handheld electronic device case with quick-release anchoring capability
US11522988B2 (en) 2021-04-09 2022-12-06 Mighty Ventures, Inc. Object holder with quick-release anchoring capability
US11525475B2 (en) 2021-03-03 2022-12-13 Mighty Ventures, Inc. Object holder with quick-release anchoring capability
US12133601B2 (en) 2021-09-21 2024-11-05 Israel Harry Zimmerman Quick-release anchoring apparatus with acceleration damping
JP2024537166A (ja) * 2021-10-07 2024-10-10 ラム リサーチ コーポレーション 湾曲ウエハ用のエンドエフェクタパッド設計
JP2023117079A (ja) * 2022-02-10 2023-08-23 リンテック株式会社 保持装置および保持方法、並びに、シート貼付装置およびシート貼付方法
US11988242B2 (en) 2022-03-25 2024-05-21 Mighty Ventures, Inc. Valve-actuated suction apparatus
US12078257B2 (en) 2022-10-03 2024-09-03 Harry Zimmerman Valve-actuated suction apparatus
EP4446053A1 (en) * 2023-04-11 2024-10-16 Carl Zeiss Vision International GmbH Blank contacting element, vacuum blocking piece and method for manufacturing a spectacle lens
US12352384B2 (en) 2023-06-14 2025-07-08 Israel Harry Zimmerman Lockable valve-actuated suction apparatus
US12442407B2 (en) 2024-03-21 2025-10-14 Israel Harry Zimmerman Quick release suction mounting apparatus with longitudinally stable, laterally compliant suction control valve seat
KR102720471B1 (ko) * 2024-05-28 2024-10-22 (주)브이텍 진공 시스템용 흡착-컵

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347275U (enExample) * 1976-09-27 1978-04-21
CN2053203U (zh) * 1989-04-04 1990-02-21 沈阳重型机器厂 真空吸头
CN1016768B (zh) * 1987-04-01 1992-05-27 海德堡印刷机械股份公司 带提升吸头的吸纸器
JPH07267410A (ja) * 1994-03-25 1995-10-17 Central Glass Co Ltd 吸着パッド
JPH09174475A (ja) * 1995-12-27 1997-07-08 Naohito Nakagawa すぐ取れる吸盤

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2221238A (en) * 1939-08-31 1940-11-12 Johnson Silvie Lloyd Suction cup
US2850279A (en) * 1954-03-29 1958-09-02 Miehle Goss Dexter Inc Sheet separator
US3272549A (en) * 1965-01-13 1966-09-13 Gen Electric Materials handling device
FR2299759A1 (fr) * 1974-10-22 1976-08-27 Lgt Lab Gen Telecomm Dispositif correcteur de phase differentielle et emetteur de television comportant un tel dispositif
GB1530462A (en) 1975-04-01 1978-11-01 Nat Res Dev Application of liquid to a surface
JPS56126595A (en) 1980-02-28 1981-10-03 Keiichi Isotani Method and device for releasing holding in holder utilizing sucker
US4600229A (en) * 1984-08-03 1986-07-15 Oten Peter D Vacuum cup
SE8502048D0 (sv) * 1985-04-26 1985-04-26 Astra Tech Ab Vakuumfixerad hallare for medicinskt bruk
JPS644585U (enExample) 1987-06-26 1989-01-12
IT1222456B (it) * 1987-08-06 1990-09-05 Enzo Scaglia Sollevatore a ventosa
US5013075A (en) * 1988-01-11 1991-05-07 Littell Edmund R Vacuum cup construction
US4978269A (en) * 1989-03-02 1990-12-18 Toter, Inc. Vacuum controlled lifting apparatus
GB9008764D0 (en) * 1990-04-19 1990-06-13 Egnell Ameda Ltd A resilient suction cup
DE4026244C2 (de) * 1990-08-18 1996-02-08 Ant Nachrichtentech Substratträger
JP2524586Y2 (ja) * 1990-09-06 1997-02-05 エスエムシー株式会社 吸着用パッド
US5133524A (en) * 1991-02-11 1992-07-28 Liu Bao Shen Suction cup device
JPH0674286A (ja) 1992-08-24 1994-03-15 Bridgestone Corp 防振装置
US5336158A (en) * 1992-11-12 1994-08-09 Huggins Freddie L Pneumatic vacuum vibrator apparatus
US5511752A (en) * 1994-06-02 1996-04-30 Trethewey; Brig E. A. Suction cup with valve
JPH08122941A (ja) 1994-10-21 1996-05-17 Toppan Printing Co Ltd 真空吸着盤
JPH08197470A (ja) 1995-01-18 1996-08-06 Toyota Auto Body Co Ltd 真空吸着カップ
DE29512750U1 (de) * 1995-01-20 1996-05-23 J. Schmalz GmbH, 72293 Glatten Hebevorrichtung
JP3393534B2 (ja) * 1997-05-16 2003-04-07 タツモ株式会社 処理液供給ノズルシステム
JPH11267986A (ja) 1998-03-23 1999-10-05 Murata Mfg Co Ltd シート吸着板
US6135522A (en) * 1999-05-26 2000-10-24 Advanced Semiconductors Engineering, Inc. Sucker for transferring packaged semiconductor device
US6502808B1 (en) * 1999-09-30 2003-01-07 The Boeing Company Vacuum cup with precision hard stop
DE10009108A1 (de) * 2000-02-26 2001-09-06 Schmalz J Gmbh Vakuumhandhabungsgerät
JP4547649B2 (ja) * 2000-07-31 2010-09-22 Ｓｍｃ株式会社 吸着用パッド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5347275U (enExample) * 1976-09-27 1978-04-21
CN1016768B (zh) * 1987-04-01 1992-05-27 海德堡印刷机械股份公司 带提升吸头的吸纸器
CN2053203U (zh) * 1989-04-04 1990-02-21 沈阳重型机器厂 真空吸头
JPH07267410A (ja) * 1994-03-25 1995-10-17 Central Glass Co Ltd 吸着パッド
JPH09174475A (ja) * 1995-12-27 1997-07-08 Naohito Nakagawa すぐ取れる吸盤

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4253290A1 (de) * 2022-03-28 2023-10-04 Bundesdruckerei GmbH Sauggreifer zum handhaben von folien

Also Published As

Publication number Publication date
ATE454960T1 (de) 2010-01-15
DE602004025084D1 (de) 2010-03-04
TW200505626A (en) 2005-02-16
EP1593465A4 (en) 2008-07-23
CN1744970A (zh) 2006-03-08
EP1593465A1 (en) 2005-11-09
JP4468893B2 (ja) 2010-05-26
WO2004067234A1 (ja) 2004-08-12
US20060232085A1 (en) 2006-10-19
EP1593465B1 (en) 2010-01-13
HK1088276A1 (zh) 2006-11-03
US7726715B2 (en) 2010-06-01
JPWO2004067234A1 (ja) 2006-05-18
KR101019469B1 (ko) 2011-03-07
KR20050101172A (ko) 2005-10-20
TWI309993B (enExample) 2009-05-21

Similar Documents

Publication Publication Date Title
CN100396454C (zh) 真空吸头
JP4724562B2 (ja) 真空吸着ヘッド、その真空吸着ヘッドを用いた真空吸着装置及びテーブル
CN101794726B (zh) 工件台及使用该工件台的曝光装置
JP4268091B2 (ja) 部品保持具
CN103531511A (zh) 吸盘及使用该吸盘的承片台和硅片吸附方法
JP6340693B2 (ja) 基板の保持装置及び密着露光装置並びに近接露光装置
CN106653671B (zh) 一种吸盘及其吸附方法
JPH08195428A (ja) 真空吸着装置
CN110391155B (zh) 附着基板的方法和用于附着基板的设备
JP4797027B2 (ja) 基板体の貼着装置及び基板体の取り扱い方法
JP6376871B2 (ja) 密着露光装置
CN104516209B (zh) 一种集成电路设备上用的承载固定装置
CN101809718A (zh) 黏着材的黏着方法及黏着装置
JP3769618B2 (ja) 真空吸着装置
KR100718017B1 (ko) 진공척
JP3817613B2 (ja) 真空吸着装置
HK1088276B (en) Vacuum suction head
JP4173170B2 (ja) フィルムマウント用コレットおよびフィルムマウント方法
KR100366264B1 (ko) 로봇 블레이드
JP2002090758A (ja) 液晶表示パネル製造装置及び方法
KR102102312B1 (ko) 점착 장치 및 점착 방법
TW202446570A (zh) 用於翹曲面板之真空桌
JP2010036974A (ja) 保持治具

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 1088276

Country of ref document: HK

C14 Grant of patent or utility model
GR01 Patent grant
REG Reference to a national code

Ref country code: HK

Ref legal event code: GR

Ref document number: 1088276

Country of ref document: HK

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080625

Termination date: 20210128