TWI289895B - A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide - Google Patents

A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide Download PDF

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Publication number
TWI289895B
TWI289895B TW092116498A TW92116498A TWI289895B TW I289895 B TWI289895 B TW I289895B TW 092116498 A TW092116498 A TW 092116498A TW 92116498 A TW92116498 A TW 92116498A TW I289895 B TWI289895 B TW I289895B
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Taiwan
Prior art keywords
oxide layer
buried oxide
recess
layer
trench
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TW092116498A
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English (en)
Chinese (zh)
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TW200400564A (en
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Witold P Maszara
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Advanced Micro Devices Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/76281—Lateral isolation by selective oxidation of silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H10D30/0323—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon comprising monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6744—Monocrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thin Film Transistor (AREA)
  • Element Separation (AREA)
TW092116498A 2002-06-25 2003-06-18 A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide TWI289895B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/178,542 US6680240B1 (en) 2002-06-25 2002-06-25 Silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide

Publications (2)

Publication Number Publication Date
TW200400564A TW200400564A (en) 2004-01-01
TWI289895B true TWI289895B (en) 2007-11-11

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TW092116498A TWI289895B (en) 2002-06-25 2003-06-18 A silicon-on-insulator device with strained device film and method for making the same with partial replacement of isolation oxide

Country Status (8)

Country Link
US (1) US6680240B1 (enExample)
EP (1) EP1516362A2 (enExample)
JP (1) JP4452883B2 (enExample)
KR (1) KR100996725B1 (enExample)
CN (1) CN1333454C (enExample)
AU (1) AU2003238916A1 (enExample)
TW (1) TWI289895B (enExample)
WO (1) WO2004001798A2 (enExample)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7227176B2 (en) 1998-04-10 2007-06-05 Massachusetts Institute Of Technology Etch stop layer system
US6573126B2 (en) * 2000-08-16 2003-06-03 Massachusetts Institute Of Technology Process for producing semiconductor article using graded epitaxial growth
US6940089B2 (en) * 2001-04-04 2005-09-06 Massachusetts Institute Of Technology Semiconductor device structure
WO2003079415A2 (en) * 2002-03-14 2003-09-25 Amberwave Systems Corporation Methods for fabricating strained layers on semiconductor substrates
US20030227057A1 (en) * 2002-06-07 2003-12-11 Lochtefeld Anthony J. Strained-semiconductor-on-insulator device structures
US6995430B2 (en) * 2002-06-07 2006-02-07 Amberwave Systems Corporation Strained-semiconductor-on-insulator device structures
US7307273B2 (en) * 2002-06-07 2007-12-11 Amberwave Systems Corporation Control of strain in device layers by selective relaxation
US7335545B2 (en) * 2002-06-07 2008-02-26 Amberwave Systems Corporation Control of strain in device layers by prevention of relaxation
US7074623B2 (en) * 2002-06-07 2006-07-11 Amberwave Systems Corporation Methods of forming strained-semiconductor-on-insulator finFET device structures
US7358121B2 (en) * 2002-08-23 2008-04-15 Intel Corporation Tri-gate devices and methods of fabrication
US6946373B2 (en) * 2002-11-20 2005-09-20 International Business Machines Corporation Relaxed, low-defect SGOI for strained Si CMOS applications
FR2847715B1 (fr) * 2002-11-25 2005-03-11 Commissariat Energie Atomique Circuit integre comportant des sous-ensembles connectes en serie
US6717216B1 (en) * 2002-12-12 2004-04-06 International Business Machines Corporation SOI based field effect transistor having a compressive film in undercut area under the channel and a method of making the device
US7157774B2 (en) * 2003-01-31 2007-01-02 Taiwan Semiconductor Manufacturing Co., Ltd. Strained silicon-on-insulator transistors with mesa isolation
US6870179B2 (en) * 2003-03-31 2005-03-22 Intel Corporation Increasing stress-enhanced drive current in a MOS transistor
US7081395B2 (en) * 2003-05-23 2006-07-25 Taiwan Semiconductor Manufacturing Co., Ltd. Silicon strain engineering accomplished via use of specific shallow trench isolation fill materials
US6909151B2 (en) * 2003-06-27 2005-06-21 Intel Corporation Nonplanar device with stress incorporation layer and method of fabrication
US7456476B2 (en) * 2003-06-27 2008-11-25 Intel Corporation Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication
US7105390B2 (en) * 2003-12-30 2006-09-12 Intel Corporation Nonplanar transistors with metal gate electrodes
US7268058B2 (en) * 2004-01-16 2007-09-11 Intel Corporation Tri-gate transistors and methods to fabricate same
US20050186722A1 (en) * 2004-02-25 2005-08-25 Kuan-Lun Cheng Method and structure for CMOS device with stress relaxed by ion implantation of carbon or oxygen containing ions
US7154118B2 (en) * 2004-03-31 2006-12-26 Intel Corporation Bulk non-planar transistor having strained enhanced mobility and methods of fabrication
US20050266632A1 (en) * 2004-05-26 2005-12-01 Yun-Hsiu Chen Integrated circuit with strained and non-strained transistors, and method of forming thereof
US7579280B2 (en) * 2004-06-01 2009-08-25 Intel Corporation Method of patterning a film
US7042009B2 (en) * 2004-06-30 2006-05-09 Intel Corporation High mobility tri-gate devices and methods of fabrication
US6991998B2 (en) * 2004-07-02 2006-01-31 International Business Machines Corporation Ultra-thin, high quality strained silicon-on-insulator formed by elastic strain transfer
US7348284B2 (en) 2004-08-10 2008-03-25 Intel Corporation Non-planar pMOS structure with a strained channel region and an integrated strained CMOS flow
US7135372B2 (en) * 2004-09-09 2006-11-14 Taiwan Semiconductor Manufacturing Company, Ltd. Strained silicon device manufacturing method
US7071064B2 (en) * 2004-09-23 2006-07-04 Intel Corporation U-gate transistors and methods of fabrication
US7332439B2 (en) * 2004-09-29 2008-02-19 Intel Corporation Metal gate transistors with epitaxial source and drain regions
US7422946B2 (en) * 2004-09-29 2008-09-09 Intel Corporation Independently accessed double-gate and tri-gate transistors in same process flow
US7361958B2 (en) * 2004-09-30 2008-04-22 Intel Corporation Nonplanar transistors with metal gate electrodes
JP4603845B2 (ja) * 2004-10-12 2010-12-22 Ｏｋｉセミコンダクタ株式会社 半導体装置の製造方法
US20060086977A1 (en) 2004-10-25 2006-04-27 Uday Shah Nonplanar device with thinned lower body portion and method of fabrication
US7306997B2 (en) * 2004-11-10 2007-12-11 Advanced Micro Devices, Inc. Strained fully depleted silicon on insulator semiconductor device and manufacturing method therefor
US7393733B2 (en) * 2004-12-01 2008-07-01 Amberwave Systems Corporation Methods of forming hybrid fin field-effect transistor structures
US20060113603A1 (en) * 2004-12-01 2006-06-01 Amberwave Systems Corporation Hybrid semiconductor-on-insulator structures and related methods
US7193279B2 (en) * 2005-01-18 2007-03-20 Intel Corporation Non-planar MOS structure with a strained channel region
US7518196B2 (en) 2005-02-23 2009-04-14 Intel Corporation Field effect transistor with narrow bandgap source and drain regions and method of fabrication
US20060202266A1 (en) * 2005-03-14 2006-09-14 Marko Radosavljevic Field effect transistor with metal source/drain regions
US7563701B2 (en) * 2005-03-31 2009-07-21 Intel Corporation Self-aligned contacts for transistors
US7858481B2 (en) 2005-06-15 2010-12-28 Intel Corporation Method for fabricating transistor with thinned channel
US7547637B2 (en) * 2005-06-21 2009-06-16 Intel Corporation Methods for patterning a semiconductor film
US7279375B2 (en) * 2005-06-30 2007-10-09 Intel Corporation Block contact architectures for nanoscale channel transistors
US7402875B2 (en) * 2005-08-17 2008-07-22 Intel Corporation Lateral undercut of metal gate in SOI device
US20070090416A1 (en) * 2005-09-28 2007-04-26 Doyle Brian S CMOS devices with a single work function gate electrode and method of fabrication
US7479421B2 (en) 2005-09-28 2009-01-20 Intel Corporation Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby
US20070090408A1 (en) * 2005-09-29 2007-04-26 Amlan Majumdar Narrow-body multiple-gate FET with dominant body transistor for high performance
US7759739B2 (en) * 2005-10-27 2010-07-20 International Business Machines Corporation Transistor with dielectric stressor elements
GB2445511B (en) * 2005-10-31 2009-04-08 Advanced Micro Devices Inc An embedded strain layer in thin soi transistors and a method of forming the same
DE102005052055B3 (de) 2005-10-31 2007-04-26 Advanced Micro Devices, Inc., Sunnyvale Eingebettete Verformungsschicht in dünnen SOI-Transistoren und Verfahren zur Herstellung desselben
US7485503B2 (en) 2005-11-30 2009-02-03 Intel Corporation Dielectric interface for group III-V semiconductor device
US7396711B2 (en) * 2005-12-27 2008-07-08 Intel Corporation Method of fabricating a multi-cornered film
US7449373B2 (en) * 2006-03-31 2008-11-11 Intel Corporation Method of ion implanting for tri-gate devices
US7670928B2 (en) * 2006-06-14 2010-03-02 Intel Corporation Ultra-thin oxide bonding for S1 to S1 dual orientation bonding
US7544594B2 (en) * 2006-06-28 2009-06-09 Intel Corporation Method of forming a transistor having gate protection and transistor formed according to the method
US8143646B2 (en) 2006-08-02 2012-03-27 Intel Corporation Stacking fault and twin blocking barrier for integrating III-V on Si
KR100835413B1 (ko) * 2006-12-05 2008-06-04 동부일렉트로닉스 주식회사 반도체 소자의 미세 비아홀 형성방법
US20080157225A1 (en) * 2006-12-29 2008-07-03 Suman Datta SRAM and logic transistors with variable height multi-gate transistor architecture
US8558278B2 (en) * 2007-01-16 2013-10-15 Taiwan Semiconductor Manufacturing Company, Ltd. Strained transistor with optimized drive current and method of forming
KR101052868B1 (ko) * 2008-02-29 2011-07-29 주식회사 하이닉스반도체 Ｓｏｉ 소자 및 그의 제조방법
US7943961B2 (en) * 2008-03-13 2011-05-17 Taiwan Semiconductor Manufacturing Company, Ltd. Strain bars in stressed layers of MOS devices
US8362566B2 (en) 2008-06-23 2013-01-29 Intel Corporation Stress in trigate devices using complimentary gate fill materials
US20100019322A1 (en) * 2008-07-23 2010-01-28 International Business Machines Corporation Semiconductor device and method of manufacturing
US7808051B2 (en) * 2008-09-29 2010-10-05 Taiwan Semiconductor Manufacturing Company, Ltd. Standard cell without OD space effect in Y-direction
CN102024706B (zh) * 2009-09-22 2012-06-20 中芯国际集成电路制造(上海)有限公司 用于制造半导体器件的方法
US8258031B2 (en) * 2010-06-15 2012-09-04 International Business Machines Corporation Fabrication of a vertical heterojunction tunnel-FET
US9406798B2 (en) * 2010-08-27 2016-08-02 Acorn Technologies, Inc. Strained semiconductor using elastic edge relaxation of a stressor combined with buried insulating layer
JP6005364B2 (ja) * 2012-02-06 2016-10-12 ラピスセミコンダクタ株式会社 半導体装置の製造方法及び半導体装置
US9515181B2 (en) 2014-08-06 2016-12-06 Qualcomm Incorporated Semiconductor device with self-aligned back side features
JP6559745B2 (ja) 2017-08-23 2019-08-14 株式会社東芝 半導体デバイス検査装置、半導体デバイス検査方法、そのプログラム、半導体装置およびその製造方法
JP2018032877A (ja) * 2017-11-29 2018-03-01 ラピスセミコンダクタ株式会社 半導体装置
JP2019125747A (ja) 2018-01-18 2019-07-25 株式会社東芝 半導体装置およびその製造方法
KR102396978B1 (ko) * 2018-11-16 2022-05-11 삼성전자주식회사 반도체 장치

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4604162A (en) * 1983-06-13 1986-08-05 Ncr Corporation Formation and planarization of silicon-on-insulator structures
US5270265A (en) * 1992-09-01 1993-12-14 Harris Corporation Stress relief technique of removing oxide from surface of trench-patterned semiconductor-on-insulator structure
US5561302A (en) 1994-09-26 1996-10-01 Motorola, Inc. Enhanced mobility MOSFET device and method
US5811283A (en) * 1996-08-13 1998-09-22 United Microelectronics Corporation Silicon on insulator (SOI) dram cell structure and process
US6211039B1 (en) 1996-11-12 2001-04-03 Micron Technology, Inc. Silicon-on-insulator islands and method for their formation
US6045625A (en) * 1996-12-06 2000-04-04 Texas Instruments Incorporated Buried oxide with a thermal expansion matching layer for SOI
GB2327146A (en) * 1997-07-10 1999-01-13 Ericsson Telefon Ab L M Thermal insulation of integrated circuit components
JP3676910B2 (ja) * 1997-07-30 2005-07-27 インターナショナル・ビジネス・マシーンズ・コーポレーション 半導体装置及び半導体アイランドの形成方法
US6054343A (en) * 1998-01-26 2000-04-25 Texas Instruments Incorporated Nitride trench fill process for increasing shallow trench isolation (STI) robustness
JP2000294623A (ja) * 1999-04-02 2000-10-20 Fuji Electric Co Ltd 誘電体分離基板の製造方法
JP2000332099A (ja) * 1999-05-21 2000-11-30 Matsushita Electronics Industry Corp 半導体装置およびその製造方法
US6245600B1 (en) * 1999-07-01 2001-06-12 International Business Machines Corporation Method and structure for SOI wafers to avoid electrostatic discharge
US6573565B2 (en) * 1999-07-28 2003-06-03 International Business Machines Corporation Method and structure for providing improved thermal conduction for silicon semiconductor devices
US6426252B1 (en) * 1999-10-25 2002-07-30 International Business Machines Corporation Silicon-on-insulator vertical array DRAM cell with self-aligned buried strap
US20020046985A1 (en) * 2000-03-24 2002-04-25 Daneman Michael J. Process for creating an electrically isolated electrode on a sidewall of a cavity in a base
US6403482B1 (en) * 2000-06-28 2002-06-11 International Business Machines Corporation Self-aligned junction isolation
TW501227B (en) * 2000-08-11 2002-09-01 Samsung Electronics Co Ltd SOI MOSFET having body contact for preventing floating body effect and method of fabricating the same
DE10040464A1 (de) * 2000-08-18 2002-02-28 Infineon Technologies Ag Grabenkondensator und Verfahren zu seiner Herstellung
JP2002076336A (ja) * 2000-09-01 2002-03-15 Mitsubishi Electric Corp 半導体装置およびｓｏｉ基板
GB0022329D0 (en) * 2000-09-12 2000-10-25 Mitel Semiconductor Ltd Semiconductor device
DE10054109C2 (de) * 2000-10-31 2003-07-10 Advanced Micro Devices Inc Verfahren zum Bilden eines Substratkontakts in einem Feldeffekttransistor, der über einer vergrabenen Isolierschicht gebildet ist
US6506620B1 (en) * 2000-11-27 2003-01-14 Microscan Systems Incorporated Process for manufacturing micromechanical and microoptomechanical structures with backside metalization
US6524929B1 (en) * 2001-02-26 2003-02-25 Advanced Micro Devices, Inc. Method for shallow trench isolation using passivation material for trench bottom liner

Also Published As

Publication number Publication date
WO2004001798A2 (en) 2003-12-31
CN1659696A (zh) 2005-08-24
TW200400564A (en) 2004-01-01
JP4452883B2 (ja) 2010-04-21
KR20050013248A (ko) 2005-02-03
WO2004001798A3 (en) 2004-07-29
EP1516362A2 (en) 2005-03-23
KR100996725B1 (ko) 2010-11-25
JP2005531144A (ja) 2005-10-13
AU2003238916A8 (en) 2004-01-06
US20040018668A1 (en) 2004-01-29
AU2003238916A1 (en) 2004-01-06
US6680240B1 (en) 2004-01-20
CN1333454C (zh) 2007-08-22

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