TWI258460B - Aluminum nitride ceramics, a member used for the manufacture of semiconductors, and method for producing an aluminum nitride sintered body - Google Patents

Aluminum nitride ceramics, a member used for the manufacture of semiconductors, and method for producing an aluminum nitride sintered body Download PDF

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Publication number
TWI258460B
TWI258460B TW092126953A TW92126953A TWI258460B TW I258460 B TWI258460 B TW I258460B TW 092126953 A TW092126953 A TW 092126953A TW 92126953 A TW92126953 A TW 92126953A TW I258460 B TWI258460 B TW I258460B
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Taiwan
Prior art keywords
phase
aluminum nitride
aluminum
oxide
less
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TW092126953A
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English (en)
Chinese (zh)
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TW200413269A (en
Inventor
Naomi Teratani
Yuji Katsuda
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Ngk Insulators Ltd
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Publication of TW200413269A publication Critical patent/TW200413269A/zh
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    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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TW092126953A 2002-11-14 2003-09-30 Aluminum nitride ceramics, a member used for the manufacture of semiconductors, and method for producing an aluminum nitride sintered body TWI258460B (en)

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Application Number Priority Date Filing Date Title
JP2002330707 2002-11-14
JP2003324312A JP4386695B2 (ja) 2002-11-14 2003-09-17 窒化アルミニウム焼結体の製造方法

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TW200413269A TW200413269A (en) 2004-08-01
TWI258460B true TWI258460B (en) 2006-07-21

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US (1) US7148166B2 (enExample)
EP (1) EP1420004B1 (enExample)
JP (1) JP4386695B2 (enExample)
KR (1) KR100569643B1 (enExample)
DE (1) DE60335594D1 (enExample)
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4424659B2 (ja) * 2003-02-28 2010-03-03 日本碍子株式会社 窒化アルミニウム質材料および半導体製造装置用部材
JP2006273587A (ja) * 2005-03-25 2006-10-12 Ngk Insulators Ltd 窒化アルミニウム質セラミックス、半導体製造部材及び窒化アルミニウム質セラミックスの製造方法
JP5062959B2 (ja) * 2005-03-25 2012-10-31 日本碍子株式会社 セラミックス部材及びその製造方法
AU2006266579B2 (en) 2005-06-30 2009-10-22 Lg Electronics Inc. Method and apparatus for encoding and decoding an audio signal
JP4740002B2 (ja) * 2006-03-20 2011-08-03 日本碍子株式会社 窒化アルミニウム焼結体、半導体製造装置用部材、及び窒化アルミニウム焼結体の製造方法
JP4590368B2 (ja) * 2006-03-24 2010-12-01 日本碍子株式会社 静電チャックの製造方法
WO2011155319A1 (ja) 2010-06-08 2011-12-15 電気化学工業株式会社 回路基板用窒化アルミニウム基板及びその製造方法
US8945729B1 (en) * 2010-09-22 2015-02-03 Skyworks Solutions, Inc. Thermal barrier coating material with RF absorption capabilities at elevated temperatures
CN103332935B (zh) * 2013-06-20 2014-12-10 绥中伊菲人工晶体科技有限公司 一种氮化铝复合陶瓷
KR101690753B1 (ko) * 2015-07-28 2017-01-10 강릉원주대학교산학협력단 반도체 초고온 박막공정을 위한 저열전도도 특성을 갖는 질화알루미늄 히터용 샤프트 및 이의 제조방법
KR102339550B1 (ko) * 2017-06-30 2021-12-17 주식회사 미코세라믹스 질화 알루미늄 소결체 및 이를 포함하는 반도체 제조 장치용 부재
KR101797232B1 (ko) * 2017-07-10 2017-11-13 주식회사 케이에스엠컴포넌트 정전척
DE102018133377A1 (de) * 2018-12-21 2020-06-25 RF360 Europe GmbH Piezoelektrisches Material und piezoelektrische Vorrichtung
JP2020158375A (ja) * 2019-03-28 2020-10-01 京セラ株式会社 窒化アルミニウム基板、電子装置及び電子モジュール
JP7441070B2 (ja) * 2020-02-18 2024-02-29 京セラ株式会社 窒化アルミニウム基板、電子装置及び電子モジュール

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6478902A (en) * 1987-06-26 1989-03-24 Bridgestone Corp Low noise tire wheel
JP3457495B2 (ja) * 1996-03-29 2003-10-20 日本碍子株式会社 窒化アルミニウム焼結体、金属埋設品、電子機能材料および静電チャック
JP3370532B2 (ja) 1996-11-26 2003-01-27 京セラ株式会社 静電チャック
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
JP3663306B2 (ja) * 1998-11-02 2005-06-22 京セラ株式会社 窒化アルミニウム質焼結体およびそれを用いた静電チャック
JP2000226261A (ja) * 1999-02-08 2000-08-15 Fuji Electric Co Ltd 窒化アルミニウム焼結体およびその製造方法
JP2001064079A (ja) * 1999-08-25 2001-03-13 Sumitomo Electric Ind Ltd 窒化アルミニウム焼結体及びその製造方法
US6607836B2 (en) * 2000-10-23 2003-08-19 Ngk Insulators, Ltd. Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors
TWI243158B (en) * 2000-12-21 2005-11-11 Ngk Insulators Ltd Aluminum nitride sintered bodies
JP4243943B2 (ja) 2002-04-22 2009-03-25 日本碍子株式会社 窒化アルミニウム材料および半導体製造用部材

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EP1420004B1 (en) 2011-01-05
TW200413269A (en) 2004-08-01
US7148166B2 (en) 2006-12-12
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