DE60335594D1 - Eine Aluminiumnitridkeramik und ein Bauteil für die Herstellung von Halbleitern - Google Patents

Eine Aluminiumnitridkeramik und ein Bauteil für die Herstellung von Halbleitern

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Publication number
DE60335594D1
DE60335594D1 DE60335594T DE60335594T DE60335594D1 DE 60335594 D1 DE60335594 D1 DE 60335594D1 DE 60335594 T DE60335594 T DE 60335594T DE 60335594 T DE60335594 T DE 60335594T DE 60335594 D1 DE60335594 D1 DE 60335594D1
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Germany
Prior art keywords
semiconductors
production
component
aluminum nitride
nitride ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60335594T
Other languages
German (de)
English (en)
Inventor
Naomi Teratani
Yuji Katsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
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Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
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Publication of DE60335594D1 publication Critical patent/DE60335594D1/de
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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    • C04B35/62605—Treating the starting powders individually or as mixtures
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DE60335594T 2002-11-14 2003-11-13 Eine Aluminiumnitridkeramik und ein Bauteil für die Herstellung von Halbleitern Expired - Lifetime DE60335594D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002330707 2002-11-14
JP2003324312A JP4386695B2 (ja) 2002-11-14 2003-09-17 窒化アルミニウム焼結体の製造方法

Publications (1)

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DE60335594D1 true DE60335594D1 (de) 2011-02-17

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DE60335594T Expired - Lifetime DE60335594D1 (de) 2002-11-14 2003-11-13 Eine Aluminiumnitridkeramik und ein Bauteil für die Herstellung von Halbleitern

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KR100569643B1 (ko) 2006-04-11
TWI258460B (en) 2006-07-21
JP2004175656A (ja) 2004-06-24
EP1420004A2 (en) 2004-05-19
EP1420004B1 (en) 2011-01-05
TW200413269A (en) 2004-08-01
US7148166B2 (en) 2006-12-12
KR20040042856A (ko) 2004-05-20
EP1420004A3 (en) 2006-05-17
JP4386695B2 (ja) 2009-12-16

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