TWD175854S - 電漿處理裝置用保護環 - Google Patents

電漿處理裝置用保護環

Info

Publication number
TWD175854S
TWD175854S TW104305550F TW104305550F TWD175854S TW D175854 S TWD175854 S TW D175854S TW 104305550 F TW104305550 F TW 104305550F TW 104305550 F TW104305550 F TW 104305550F TW D175854 S TWD175854 S TW D175854S
Authority
TW
Taiwan
Prior art keywords
processing equipment
plasma processing
protective rings
protective ring
article
Prior art date
Application number
TW104305550F
Other languages
English (en)
Chinese (zh)
Inventor
Susumu Tauchi
Takashi Uemura
Kohei Sato
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of TWD175854S publication Critical patent/TWD175854S/zh

Links

TW104305550F 2015-06-12 2015-10-06 電漿處理裝置用保護環 TWD175854S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2015-13037F JP1546800S (enrdf_load_stackoverflow) 2015-06-12 2015-06-12

Publications (1)

Publication Number Publication Date
TWD175854S true TWD175854S (zh) 2016-05-21

Family

ID=55539624

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104305550F TWD175854S (zh) 2015-06-12 2015-10-06 電漿處理裝置用保護環

Country Status (3)

Country Link
US (1) USD770992S1 (enrdf_load_stackoverflow)
JP (1) JP1546800S (enrdf_load_stackoverflow)
TW (1) TWD175854S (enrdf_load_stackoverflow)

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Also Published As

Publication number Publication date
USD770992S1 (en) 2016-11-08
JP1546800S (enrdf_load_stackoverflow) 2016-03-28

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