TWD193612S - Protective ring for plasma processing equipment - Google Patents

Protective ring for plasma processing equipment

Info

Publication number
TWD193612S
TWD193612S TW107300615F TW107300615F TWD193612S TW D193612 S TWD193612 S TW D193612S TW 107300615 F TW107300615 F TW 107300615F TW 107300615 F TW107300615 F TW 107300615F TW D193612 S TWD193612 S TW D193612S
Authority
TW
Taiwan
Prior art keywords
view
plasma processing
protective ring
processing equipment
dimensional
Prior art date
Application number
TW107300615F
Other languages
English (en)
Inventor
磯崎真一
森政士
横川賢悅
荒瀬高男
酒井洋輔
Original Assignee
日商日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立全球先端科技股份有限公司 filed Critical 日商日立全球先端科技股份有限公司
Publication of TWD193612S publication Critical patent/TWD193612S/zh

Links

Abstract

【物品用途】;本設計的物品是電漿處理裝置用保護環，為一種在半導體製造時所使用的電漿處理裝置，用來保護試料台不會受電漿破壞的保護環。;【設計說明】;表現在「從正面、底面、右側面觀看之立體圖」、右側視圖、左側視圖、俯視圖、仰視圖、「表示正面、底面、右側面的A-A線部分斷開之立體剖面圖」的細線，皆為用來呈現立體表面的形狀。

Description

電漿處理裝置用保護環
本設計的物品是電漿處理裝置用保護環，為一種在半導體製造時所使用的電漿處理裝置，用來保護試料台不會受電漿破壞的保護環。
表現在「從正面、底面、右側面觀看之立體圖」、右側視圖、左側視圖、俯視圖、仰視圖、「表示正面、底面、右側面的A-A線部分斷開之立體剖面圖」的細線，皆為用來呈現立體表面的形狀。
TW107300615F 2017-08-31 2018-01-31 Protective ring for plasma processing equipment TWD193612S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-018891 2017-02-03
JPD2017-18891F JP1598998S (zh) 2017-08-31 2017-08-31

Publications (1)

Publication Number Publication Date
TWD193612S true TWD193612S (zh) 2018-10-21

Family

ID=61274643

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107300615F TWD193612S (zh) 2017-08-31 2018-01-31 Protective ring for plasma processing equipment

Country Status (3)

Country Link
US (1) USD870314S1 (zh)
JP (1) JP1598998S (zh)
TW (1) TWD193612S (zh)

Families Citing this family (14)

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Publication number Priority date Publication date Assignee Title
USD855203S1 (en) * 2015-03-13 2019-07-30 Hamamatsu Photonics K.K. Lid for a culture vessel
USD831842S1 (en) * 2015-03-13 2018-10-23 Hamamatsu Photonics K.K. Lid for a culture vessel
USD891923S1 (en) * 2017-11-12 2020-08-04 Yun Lin Container lid
USD891382S1 (en) * 2019-02-08 2020-07-28 Applied Materials, Inc. Process shield for a substrate processing chamber
JP1646366S (zh) * 2019-03-19 2019-11-25
JP1659287S (zh) 2019-10-18 2020-05-11
USD952464S1 (en) * 2020-02-04 2022-05-24 Wilson Sporting Goods Co. Tennis ball container overcap
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap
US11996315B2 (en) 2020-11-18 2024-05-28 Applied Materials, Inc. Thin substrate handling via edge clamping
USD1038049S1 (en) * 2020-11-18 2024-08-06 Applied Materials, Inc. Cover ring for use in semiconductor processing chamber
JP1704964S (ja) * 2021-04-19 2022-01-14 プラズマ処理装置用サセプタリング
JP1700629S (zh) * 2021-04-26 2021-11-29
USD1049067S1 (en) * 2022-04-04 2024-10-29 Applied Materials, Inc. Ring for an anti-rotation process kit for a substrate processing chamber
JP1768140S (ja) 2022-09-30 2024-04-12 容器用の蓋

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD257949S (en) * 1976-01-21 1981-01-20 Strom Torsten E T Connector ring
USD259346S (en) * 1978-10-04 1981-05-26 Harrelson Rubber Company Sealing disc for tire retreading
US4579354A (en) * 1984-12-05 1986-04-01 Vassallo Research And Development Corporation Gasket
USD335177S (en) * 1991-09-30 1993-04-27 Jones Timothy B Specimen cup holder with breakaway handle
USD514671S1 (en) * 2004-09-07 2006-02-07 S&B Technical Products, Inc. Pipe gasket
USD647227S1 (en) * 2009-08-03 2011-10-18 Eveready Battery Company, Inc. Lighting device
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD737497S1 (en) * 2014-02-24 2015-08-25 Paul Burgess Quick change lens gasket
JP1546800S (zh) * 2015-06-12 2016-03-28
JP1545407S (zh) * 2015-06-16 2016-03-14
JP1545406S (zh) 2015-06-16 2016-03-14
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
JP1584241S (zh) * 2017-01-31 2017-08-21
JP1584906S (zh) * 2017-01-31 2017-08-28
JP1586945S (zh) * 2017-03-31 2020-09-28

Also Published As

Publication number Publication date
USD870314S1 (en) 2019-12-17
JP1598998S (zh) 2018-03-05

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