TW528775B - High dielectric constant flexible polyimide film and process of preparation - Google Patents

High dielectric constant flexible polyimide film and process of preparation Download PDF

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Publication number
TW528775B
TW528775B TW87109894A TW87109894A TW528775B TW 528775 B TW528775 B TW 528775B TW 87109894 A TW87109894 A TW 87109894A TW 87109894 A TW87109894 A TW 87109894A TW 528775 B TW528775 B TW 528775B
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Taiwan
Prior art keywords
dielectric constant
ceramic magnetic
magnetic filler
film
polyimide
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TW87109894A
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English (en)
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Yueh-Ling Lee
Gary Min
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Du Pont
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/34Layered products comprising a layer of synthetic resin comprising polyamides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/24Acids; Salts thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L79/00Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
    • C08L79/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08L79/08Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/0353Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
    • H05K1/0373Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00Coating on the layer surface
    • B32B2255/20Inorganic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/204Di-electric
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2379/00Other polymers having nitrogen, with or without oxygen or carbon only, in the main chain
    • B32B2379/08Polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/16Capacitors
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2300/00Characterised by the use of unspecified polymers
    • C08J2300/22Thermoplastic resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/16Applications used for films
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0346Organic insulating material consisting of one material containing N
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0209Inorganic, non-metallic particles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/0929Conductive planes
    • H05K2201/09309Core having two or more power planes; Capacitive laminate of two power planes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/28Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852Adhesive compositions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/28Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y10T428/2852Adhesive compositions
    • Y10T428/2896Adhesive compositions including nitrogen containing condensation polymer [e.g., polyurethane, polyisocyanate, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31721Of polyimide

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  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
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  • Laminated Bodies (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
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Description

峨775
發明説明( Ψ 遊 發明背景 本發明係有關於一種撓性高介 (讀先閱讀背面之注意事項再填寫本頁) 人铷乃古人不 思吊數氷酿亞胺薄膜,複 其可用於電子電路及電 薄膜層印刷電路,繞性電路,半導體封裝及埋置 告習用去輕電容器係裝在印刷電路板之表面上,並連接至 非近集成電路之電源及接地面。就具有大量集成電路之血 型印刷電路板而言,一般需要相對 /、 w耵大里心去耦電客器來提 、包流需求及降低系統嗓音。然而,此等電容器有其缺 ·=:因馬彼等將占據相當大的印刷電路板表面空間,增加 焊接點之數量,而因此降低系統之可靠度。 g 經濟部中央標準局員工消費合作社印t 最近,已發展出新式電容器設計,稱爲埋置薄膜電容 為,其可產生充足旁路電容,由印刷電路板全體共用。例 如,美國專利5,162,977號(1992年11月1〇日頒予1^111.旧等 人)揭示一種印刷電路板,其包括嵌入之高電容功率分佈 芯,該芯係由信號接地面與電源面,藉由具有高介電常數 之介電芯元件隔開所組成。此埋置電容結構不僅提供電磁 干擾(Ε ΜI)抑制,而且可自印刷電路板除去高達9 8 %之分 立旁路電容器。美國專利5,162,977號所揭示的介電芯元件 係由玻璃布浸滿環氧樹脂,而環氧樹脂中加具高介電常數 之鐵電陶資粉所組成。然而,此種玻璃纖維浸滿環氧街月匕 之系統提供之電容密度雖可高達2000微微法拉/平方叶 (Picofarads/in2),但其並不足以應付大多數集成電路之 湧入電流需求。 -4 本纸張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 528775 A7 B7 五、 發明説明( 2 f 本發明提供-種呈薄膜,複合或液體型之撓性高介電常 數聚醯亞胺,其在印刷電路板或半導體封裝中作爲嵌2高 電容功率分佈芯之介電芯組件使用時,由於可得之介電常 數更高及所用之薄膜結構更薄,故可提供更高之電二:面 密度,達200,000微微法拉/平方吋。具有此等電徵之 印刷電路板對相聯之印刷電路板組件一般不需要額外i去 耦,因此可免用裝在印刷電路板外部之去耦電容器。 發明概述 本發明提供一種高介電常數撓性聚醯亞胺薄膜,其包含 單一層之黏著性熱塑性聚醯亞胺薄膜,其中分散著4_85; 里% (以薄膜重f爲準)之鐵電陶磁塡料;其中聚醯亞胺薄 膜之介電常數爲4-60。 本發明也提供一種高介電常數聚醯亞胺液體,其包含工至 3 0重量%熱塑性或熱固性聚醯胺酸溶於丨〇至9 5重量%惰性 有機溶劑’其中分散著4-90重量%鐵電陶磁填料:且具介 電常數爲4-300。 經漓部中央標準局員工消費合作社印1ί (請先閱讀背面之注意事項再填寫本育)
、1T 本發明進一步提供一種高介電常數撓性多層聚醯亞胺薄 膜,其包含中間熱塑性或熱固性聚醯亞胺薄膜層,其—面 或兩面具有薄層之熱塑性聚醯亞胺薄膜,且至少一聚鱗亞 胺層中分散有4-85重量%(以薄膜層重量爲準)之鐵電陶磁 填料;其中多層聚酿亞胺薄膜之介電常數爲4-60。 本發明進一步提供一種印刷電路板,其包括嵌入高電容 功率分佈芯,該芯包含: (a)導電接地面層: 5 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 528775 五 、發明説明( 3 A7 B7 -------— (b )導電電源面層:及 高係配置於該接地面層與該電源面層間之撓性 ^ "牛,其包含早一層之黏著性熱塑性聚醯亞胺蘇 ,或多層聚醯亞胺薄膜,該多層聚醯亞胺薄膜包含—中間 =性或熱固性聚酿亞胺薄膜層,其_面或兩面^ ^ :“鉍亞胺薄膜,且至少-層聚醯亞胺薄膜層 :刀政有心85重量%(以薄膜層重量爲準)之鐵電陶磁塡 料’及其中薄膜之介電常數爲4-60。 發明之詳細説明 本發明係有關於一種撓性高介電常數聚醯亞胺薄膜,其 係由單層之黏著性熱塑性聚醯亞胺薄膜,或薄膜之一面或 兩面粘$黏著性熱塑性聚酸亞胺薄膜層並含有高介電常數 鐵電陶磁填料或填料混合物之多層聚醯亞胺薄膜所構成。 黏著性熱塑性聚醯亞胺薄膜層可提供對各種金屬基質如 電容器接地及電源面之附著力,並提供更平滑表面以增加 有效電容面積。 本發明所用之黏著性熱塑性聚驢亞胺薄膜包括環氧化 物’丙烯酸,聚氨基甲酸酯及聚醯亞胺薄膜。特佳者爲熱 可溶封,熱塑性,無規或嵌段聚醯亞胺,其含有6 〇至9 8莫 耳% ’較佳7 0至9 5莫耳。/〇由4,4,_氧苯二酸二酐及具以下化 學式之芳族醚二胺所衍生之重複醯亞胺單元
HnN
-6- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閱讀背面之注意事項再填寫本頁} 經濟部中央標率局員工消費合作社印製
A 528775 A7 B7 五、發明説明(4 及2至4 0莫耳%,較佳2至2 5莫耳〇/ + ^ a ^ -TL 夭吁/。由四價芳族羧酸二酐及 具以下化學式之二價脂族或苦放一 飞万狹—胺所衍生之額外重複酿 亞胺單元
on CN πο^/R、OMC^ VMMO (讀先閱讀背面之注意事項再填寫本頁j % 其中R爲芳族四價有機基及Rl爲含有至少2個麵子 或脂族二胺之二價基,二胺之二個氨基各附於 之= 別碳原子。 情卷 < 個 代表性芳族醚二胺包括: i,2_雙(4-氨基苯氧基)苯 I 3 -雙(4 -氨基苯氧基)苯 12-雙(3-氨基苯氧基)苯 1 3 -雙(3·氨基苯氧基)苯 le(4 -氨基苯氧基)-3-(3_氨基苯氧基)苯 1,4 -雙(4 -氣基苯氧基)苯 14-雙(3·氨基苯氧基)苯 1-(4-氨基苯氧基)-4-(3_氨基苯氧基)苯 此等額外醯亞胺單元可自與先前定義之4,4,_氧苯二酸一 纤及芳族醚二胺相同或不同之二酐及二胺衍生。 表紙張尺度適用中國國家標準(CNS ) A4規格(2丨0X297公釐) -訂 經滴部中央標準局員工消費合作社印掣 528775 A7 B7 五、發明説明(5 ) 特佳之二酐及二胺包括下列·· 苯均四酸二酐: 4,4 ’ -氧苯二酸二酐: 3,3’,4,4’-二苯甲酮四羧酸二酐: 2,2’,3,3’ -二苯甲酮四羧酸二酐: 3,3 ’,4,4 ’ -聯苯四羧酸二酐: 2,2 ’,3,3 · ·聯苯四羧酸二酐: 2.2 -雙(3,4 -二羧基苯基)六氟丙烷二酐: 雙(3,4-二羧基苯基)颯二酐; 雙(3,4-二羧基苯基)硫化二酐: 雙(2,3 -二羧基苯基)甲烷二酐; 雙(3,4 -二羧基苯基)甲烷二酐; 1.1- 雙(2,3 -二羧基苯基)乙烷二酐: 1.1- 雙(2,3 -二羧基苯基)丙烷二酐: 2,2_雙(3,4 -二羧基苯基)丙烷二酐: 間-伸苯基雙(苯偏三酸)二酐: 六亞甲二胺: 七亞甲二胺: 3.3 -二甲基五亞甲二胺: 經濟部中央標率局員_x消費合竹社印策 (請先閱讀背面之注意事項再填寫本頁) 3 -甲基六亞甲二胺: 3 -甲基七亞甲二胺: 2,5 -二甲基六亞甲二胺: 八亞甲二胺: 九亞甲二胺: 1,1,6,6 -四甲基六亞甲二胺: _1_§_1_ 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 公釐) 528775 A7 B7 五、發明説明(6 ) 2,2,5,5 -四甲基六亞甲二胺: 4,4 -二甲基七亞甲二胺: 十亞甲二胺: 間-冬—胺; 4,4’ -二氨基二苯甲酮: 4 _氨基苯基-3 -氨基甲酸酯; 間-氨基苯醯基-對·氨基醯替苯胺; 4,4 ’ - —基二木基酸; 3,4’-二氨基二苯基醚: 雙(4·氨基苯基)甲烷: 1,1 -雙(4 -氨基苯基)乙烷: 2.2- 雙(4-氨基苯基)丙烷: 4,4 ’ -二氣基二木基亞諷; 3,3’-二氨基二苯甲酮: 1,3 -雙(4 -氣基苯氧基)苯; 2,2’ -二氨基二苯甲酮: 1.2- 雙(4-氨基苯氧基)苯: 1,3 -雙(4 -氣基苯氧基)苯: 經滴部中央標率局員工消費合作社印製 (讀先閱讀背面之注意事項再填寫本頁) 4,4、二氨基苯醯替苯胺; 4,4’-雙(4-氨基苯氧基)苯基醚: 2,2 ’ -雙(4 -氨基苯基)六氟丙烷: 2,2’ -雙(4_氨基苯基)·1,3·二氯-1,1,3,3 -四氟丙烷: 4,4f -二氨基二苯基諷: 1,12 -二氨基十二烷:及 -9- 本纸張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 528775 A7 B7 經漓部中央標準局員工消費合作社印繁 五、發明説明(7 ) 1,1 3 -二氨基十三'j:兔。 用於本發明之適當黏著性熱塑性聚醯亞胺已揭示於美國 專利5,298,3;5 1號(I"4年3月29日頒予雄n等人), 其揭示内客併於此以供參考。 用於本發明之特佳黏著性聚醯亞胺含有7 〇至9 5莫耳% 4,4’-氧苯二酸二酐,5至3〇莫耳%苯均四酸二酐及1〇〇莫 耳%1,〕-雙(4-氨基苯氧基)苯,及8〇至95莫耳%1,3-雙 (4 -氨基苯氧基)苯’ 5至20莫耳%六亞甲二胺及1〇〇莫耳% 4,4’-氧苯二酸二酐^ 由j,*? , 4,4 -聯苯基四幾酸二肝(BpDA ),苯均四酸二奸 (PMD A )及4,4 ’ _二氨基二苯基醚衍生之熱塑性聚醯亞胺也 可用作爲爲聚_亞胺薄膜黏著性層。BPDA比PMDA之範圍 爲0.3 : 0.7,以55/45 BPDA/PMDA共聚物薄膜爲較佳。 可用於本發明之鐵電陶磁填料之較佳實例包括具粒度自 0· 10至1 0微米及具高介電常數自1〇〇至3〇 〇〇〇之微粒鐵電 陶磁粉末。 陶磁填料之特定實例包括BaTi〇3,SrTi〇3,Mg2Tic^,
Bi2(Ti03)3,PbTi〇3,NiTi03,CaTi03,ZnTi03,
Zn2Ti04,BaSn03,Bi(Sn03)3,CaSn03,pbSn03, MgSn03,SrSnO;,ZnSn03,BaZrO;,CaZr〇3,PbZr03,
MgZn〇3, SrZr〇3及ZnZr〇3。密實多結晶陶磁,如鈦酸鋇及 錘酸鉛,用於本發明特佳。 總介電常數之改進係藉併入其量爲4 - 8 5重量%,較佳2 〇 至7 5重量%(以薄膜組合物之總重爲準)之陶磁填料而得。 陶磁填料在4重量%以下不會提供必要的介電常數,而陶磁 -10- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) (請先閱讀背面之注意事項再填寫本頁) 、-口 528775 Α7 Β7 五、發明説明(8 ) '一·' -- 填料含量在8 5重量%以卜目,丨見太_ 上/、】易使浔膜機械性皙降級。含有 2 0至6 5重量%陶磁塡料— (讀先閱讀背面之注意事項再填寫本頁} 、十尤其疋可提供介電常數1 0至2 7 I鈦酸鋇一之薄膜可獲得特別好的結果。 陶磁粉末填料可個別俅〜 _ 使用而獲仔艮好效果。然而,當彼 寺以適當組合使用時,介雷赍* 1私吊數 < 改進可達到甚至更大程 度。 例如’鈇酸鋇係-種商業產品,可獲得各種等級,其特 ,馬介電常數自約100至30,_。鈦酸鋇之介電常數,如所 热知,在居里點時達到最大。不用1〇〇 %之單一鈦酸鋇,可 用具不同居里點之鈦酸鹽之組合來維持以溫度爲函數之恆 定介電性能。 陶磁填料如鈦酸鋇與導電皮/芯微粒填料之混合物也可 用以提高介電常數。此等導電皮/芯填料包括Zelec@ Ecp 3005-XC,市面上可自杜邦公司購得。Zelec@ Ec:p 3〇〇5_ XC係一種經摻雜銻之氧化錫塗覆之矽氧粒子填料,含有 6.5/。綈,〇50粒度爲〇7微米。5至80重量%鈥酸鋇與5至 15重量% Zelec® ECp 3〇〇5-XC之混合物可提供具有介電常 數5至6 0之薄膜,其具良好伸長率及黏著性質。 經滴部中央標準局員工消費合作社印餐 爲獲得良好薄膜完整性及甚至更高介電常數,陶磁填料 也可在分散於聚醯亞胺基質之前,先以聚醯亞胺塗覆表 面。聚酸亞胺基質可爲先前所述熱塑性聚醯亞胺,或如由 苯均四酸二酐與4,4,-二氨基二苯基醚反應製備之熱固性聚 驢亞胺。填料之聚醯亞胺表面可提供物理及化學黏合部 位,例如,-N Η2,- 0 ( C 0 )2,以使聚醯亞胺基質黏合於 -11 -
丁 - I I 528775 A7 B7 經濟部中央標率局員Η消費合作衽印聚 五、發明説明(9 G料得到更佳之薄膜機械性質。此外,經聚醯亞胺塗覆 之:料可在磁_料表面提供均勾聚合物塗層,防止填料 视=〈而形成聚合物-填料網絡,因此提高介電常數及可能 之W料最大3 !水準。在典型實例中,經7重量。/❶聚醯胺 (&由苯均四I —酐及4,4 二氨基二苯基醚衍生者)塗覆之鈦 酉欠鎖%料’其使用之最大含量爲7 5重量%,而未塗覆之鈦 酸鎖填料’其使用之最大填料含量爲60重量%。介電常數 相應地由未塗覆鈦酸鋇之丨3增高至經聚醯亞胺塗層之鈦酸 鋇之3 5。 、聚醯亞胺表面塗層可含有1至99重量,較佳3至40重量% •^經塗覆陶磁填料,如鈦酸鋇,而提供具有介電常數3至 之薄膜氷®益亞胺表面塗層之厚度自10毫微米至20毫 微米,較佳自3〇〇毫微米至3微米。 I醞亞胺表面塗層包括由苯均四酸二酐(pMDA )與4,*,· 二氨基二苯基醚:4,4、氧苯二酸二酐(〇DpA),苯均四酸 2酐(PMDA)與丨,3-雙(4-氨基苯氧基)苯:及3,3,,4,4,_聯 苯四羧鉍二酐(BPDA),苯均四酸二酐(pMDA)與4,4,·二 氨基二苯基醚所形成之聚醯亞胺。 經聚醯亞胺塗覆之陶磁填料可單獨使用或與未塗覆陶磁 ,料混合使用。40至60重量%未塗覆鈦酸鋇與6〇至4〇重 f %經7重量%聚醯亞胺塗覆之鈦酸鋇所形成之混合物可提 供最小填料凝聚,並提高聚醯亞胺薄膜之介電常數自2〇至 35 〇 高介電常數聚醯亞胺薄膜或複合物可藉將表面已塗覆聚 -------- 衣-------II (讀先閱讀背面之注意事項再填寫本頁)
528775 A7 B7 經滴部中央標準局員工消費合作社印製 五、發明説明(10) 醯胺酸之陶磁填料,不必使用聚醯亞胺基質,熔體擠壓/ 或壓縮成薄片或三維度複合物而製備。 塗覆在陶磁填料表面之聚醯胺酸可爲黏著性熱塑性或熱 固性聚醯胺酸,如〇DP A/ PMDA/丨,%雙(4_氨基苯氧基) 苯:ODP A /六亞甲二胺/】,3_雙(心氨基苯氧基)苯; BPDA/PMDA /44-二氨基二苯基醚;及 pMDA/4 4•二 氨基二苯基醚。陶磁填料可爲先前所述任何一種,尤其是 鈦酸鋇。以典型實例言之,由表面塗覆8至40重量%聚醯 胺酸t鈦酸鋇填料製備之熱壓縮聚醯亞胺,據測量,具有 介電常數爲15至!7〇。 ' 问介電常數陶磁填料之併入聚醯亞胺薄膜中係如下進 行:將陶磁塡料粉碎或粒度自〇1〇至1〇微米之粒子,將粒 子和聚醯胺酸前驅聚合物之溶液混合及將所得混合物用^ 知落劑模鑄造扶術鑄造成薄膜形狀。 本發明<鬲介電常數聚醯亞胺薄膜可形成爲單一層或多 層構造。除非所製得之薄膜含有至少4重量%,較佳至少 2 〇重量❶/° (以單層或多層聚醯亞胺薄膜總重爲準)之陶磁壚 料,否則介電常數得不到明顯的改良。 ” a作馬形成多層構造之方式,可使用的有擠壓-層合方法, 熱壓縮f法,溶液塗覆法及共擠壓法。這些都是可用於开, 成夕層薄膜之方法之典型,但非全部之實例。 —爲提高—多層聚醯亞胺薄膜—中間熱塑性或熱固性聚醯 胺g,薄Λ塑性黏著性聚醯亞胺外層所組成者—之介電常 數,高介電常數陶磁填料必須併入多層結構之至少一= 本紙張尺度適用中公釐)-^ I 11 衣 11, n I n ϋ、π - - (請先閲讀背面之注意事項再填寫本頁} 528775 經滴部中决標準局負工消費合作社印$1 Α7 Β7 五、發明説明(11 ) 4 0至7 5重量0/〇之陶磁填料可併入中間聚醯亞胺層以提供多 層結構介電常數自6至24。陶磁填料也可併入外薄黏著性 聚醯亞胺層中以進一步提高介電常數。然而,併入薄黏著 性聚酿亞胺層及中間聚醯亞胺之陶磁填料濃度必須加以調 整以使最終多層聚臨:亞胺薄膜之物理性質及黏著剥離強度 最大化。一般可將20至50重量%之陶磁填料併入外黏著性 聚醯亞胺層之每一層中。 多層薄膜結構之總厚度爲自5至125微米。中間聚醯亞胺 層之厚度爲自5至120微米,而外黏著性聚醯亞胺層之厚度 則爲5至6 0微米。 多層結構的中間聚醯亞胺層可爲先前所述類型之熱塑性 聚醯亞胺,或熱固性聚醯亞胺如Kapt〇n®一由苯均四酸二酐 與4,4 -二氨基二苯基醚衍生而得,市面上可自杜邦公司購 得。 聚醯亞胺共聚物薄膜,如由3,3,,4,4,-聯苯四羧酸二酐 (BPDA),苯均四酸二酐(PMDA)及4,4,_二氨基二苯基 醚,含有5 5 /45莫耳比BPDA/PmDA所衍生者;以及3〇 至50莫耳%〇卩〇八,50至70莫耳%卩]^人,60至80莫耳% 對-苯二胺及2 〇至4 〇莫耳%4,4,-二氨基二苯基醚所衍生之 共聚酿亞胺薄膜都可用作爲中間聚醯亞胺層。 知薄膜形成多層構造而非單層構造之優點爲陶磁填料會 在單層薄膜之表面上形成不規則性,故當薄膜和銅箔疊置 形成電容器時,空氣會陷在介面中至一定程度而降低總介 電常數。此種非所欲現象可藉將薄膜形成由中間聚醯亞胺 -14- 本紙張尺度通用宁國國家標準(CNS ) A4規格(210χ297公釐 (請先閱讀背面之注意事項再填寫本頁) ,11 )28775 五、發明説明(12 A7 B7 經濟部中央標準局員工消費合作社印製 二人=,奢性聚酿亞胺薄外層所組成的多層構造而排 2。在此種,層構造中,由於陶磁填料粒子之過高含量而 現在反面之可能不良影響,可藉由含有陶磁填料粒 表:二外Γ著性聚酿亞胺層而實質消除。所得更平滑的 表面可增加有效電容面積。 、本發介電常數撓性_亞料膜可料電子電路界r多用途上。例如,聚"亞胺薄膜可用: ^寸时封农及印刷線路板封裝之埋置薄膜電容器。 半導體封裝料時,聚醯亞胺薄膜基質之總電容 兩求較印刷電路板用途所需者高出很多(>⑽倍)。電容密 ’又與’I包:數直接成正比,而與基質之厚度成反比。電容 之增強可藉提高介電常數或降低經陶磁填充之介電層之厚度而達成。 :已發現,Μ陶磁填充之熱塑性聚酸亞胺液體可藉習用方 _旋塗賣塗,幕塗等薄之直接施塗於導體面。薄層之 阿)丨屯¥數聚醯胺酸液體接著可藉熱及/或化學及/或光 處:里丁以烘乾及硬化而成薄聚醯亞胺層。由於能形成厚度 2 5微米之薄聚醯亞胺層,故使用聚醯胺酸液體將使電 奋2使用相同楱料含量水準之自立聚醯亞胺薄膜增加1 〇倍 =夕。此外,使用聚醯胺酸液體較之自立聚醯亞胺薄膜可 知更呵重里陶磁填料含量(高達9〇重量,因爲對薄 膜f理完整性較無須限制。以典型實例言之,使㈤含有9〇 重量%陶磁填料之聚醯胺酸液體可得17〇之高介電常數。 本發明現將參照以下工作實例及比較實例更明確加以説
(讀先閱讀背面之注意事項再填寫本頁) 訂 f 528775 A7 B7 13 五、發明説明( 明。然而,本發明無論如何不受以下實例限制。 使用以下標準ASTM試驗方法測量實例中所述之薄膜性 質: 介電常數(MHz) —ASTM No· D-150 伸長率(%) —ASTM No. D-882 剥離強度(psi) — ASTM No. D-5109 抗張強度(Kpsi) —ASTM No. D-882 模量(Kpsi) —ASTM No· D-882 電容(Pfarads/in2) —ASTM No. D-150 J 黾強度(V / 〇nil) — ASTM No. D-149 實例1至9 (比較實例1 C ) 實例1至9將說明本發明單層黏著性熱塑性聚醯亞胺薄膜 以鈥酸鋇填料用量由1 5增加至7 3重量% (以薄膜總重爲準) 爲函數之介電常數之增加。30至63重量%之最適量鈦酸鋇 填料提供之介電常數高達10至27,而與不含鈦酸鋇填料之 實例1 C比較,仍維持良好薄膜伸長率及抗張強度。 (請先閱讀背面之注意事項再填寫本頁) 苯· 經满部中央標準局員工消費合作社印掣 表I ΈΜ 早層 BaTiO, 介電常數 伸長率 剝離強废 號碼 薄膜* iwt.%、 (%) (ml 1C KJ 0 3.8 48.9 13 1 KJ 15 4.7 32.2 12.8 2 KJ 30 9.8 19.2 12.6 3 KJ 40 11.7 12.6 12.3 -16- 本紙張尺廣读用中固_____ ____ 平 个 ί r ,1 一 - 发 % 9 2 528775 A7 B7 五、發明説明( 14 4 KJ 50 15.2 8.4 10.6 5 KJ 56 17.3 4.7 9.8 6 KJ 63 26.6 3.0 8.7 7 KJ 73 32.0 2.5 7.2 8 LJ 50 9.6 5.7 6.8 9 LJ 60 12.3 4.5 6.5 *KJ : Kapton® KJ 係 —種熱塑性共聚醯亞胺薄膜, 由70至
*LJ 95莫耳%4,4、氧苯二酸二酐,5至3〇莫耳%苯均四 酸二酐及100莫耳。/。丨,3 ·雙(4 _氨基苯氧基)苯所衍 生,市面上可自杜邦公司購得 Kapton® LJ係一種熱塑性共聚醯亞胺薄膜,由8〇至 95莫耳/〇l,j -雙(4 -氨基苯氧基)苯,5至2〇莫耳% 六亞甲二胺及100莫耳%4,4,_氧苯二酸二酐所衍 生 (請先閱讀背面之注意事項再填寫本頁) 經满部中央標準局負工消費合作社印製 f例1 0 實例將説明一種高介電常數聚醯亞胺薄膜,其係由7〇 至95莫耳%4,4’-氧苯二酸二酐,5至3〇莫耳%笨均四酸二 酐及100莫耳%1,3_雙(4_氨基苯氧基)苯,含切重量% PbSn03陶磁填料所衍生之熱塑性共聚酿亞胺薄膜單層所级0 成,具有介電常數約U.3 (1廳,RT)及伸長率爲12、 % 0 . 實例1 1 實例U將説明-種本發明之高介電常數單層聚驢亞胺薄 -17 t紙張尺度剌巾關家標準(CNS ) A4規格(21〇^97^5" 528775 A7 B7 五、發明説明(15 ) 膜,其係由含有7 2重量%陶磁填料混合物一由5 0重量%未 塗覆鈦酸鋇粒子及5 0重量%經7重量%聚醯亞胺塗覆之鈦酸 鋇粒子所形成一之Kapton® K J熱塑性聚醯亞胺所組成。 聚醯亞胺薄膜之機械及電氣性質列示於表11。
表II 機械性質 厚度 伸長率 抗張強度 模量 (mil) (%} (Kpsi) (Kpsi) 機器縱向 2.13 12.3 18.5 620 機器橫向 2.11 11.7 18.8 680 電氣性質 介電 功耗 電容 介電強度 常數 因數 fpfarads/in2) rv/min 在lKHz,RT下測量 33.4 0.004 3360 2500 在lMHz,RT下測量 jjA 0.018 2990 2500 實例1 2 經滴部中央標準局員工消費合竹社印製 (讀先閱讀背面之注意事項再填寫本頁) 實例1 2將説明一種厚度2密爾(Mils)之本發明高介電常 數多層聚醯亞胺薄膜,其係藉將含有5 0重量%鈦酸鋇之中 間1.5密爾厚Kapton® HA聚醯亞胺層與各含45重量%鈦酸 鋇之外0.25密爾厚Kapton® KJ聚醯亞胺黏著性層共擠壓而 製備。 共擠壓多層聚醯亞胺薄膜之機械及電氣性質列示於表 III。 18- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 528775 A7 B7 五、發明説明(16 )
表III 機械性質 厚度 伸長率 抗張強度 模量 imil) (%) fKpsi) (Kpsi) 機器縱向 1.96 8.7 16.6 658 機器橫向 1.99 5.8 17.1 703 電氣性質 介電 功耗 電容 介電強度 常數 因數 ipfarads/in2) (V/mil) 在lKHz,RT下測量 8.4 0.004 850 2600 在lMHz,RT下測量 8.0 0.015 700 2600 (請先閲讀背面之注意事項再填寫本頁) 斧 ί 丁 "口 實例1 3至2 1 實例1 3至2 1將説明含有單一填料或填料混合物之本發明 高介電常數多層聚醯亞胺薄膜。實例1 3至1 5,1 9及2 0爲2 密爾厚度高介電常數多層聚醯亞胺薄膜,其中間熱固性聚 醯亞胺層具厚度爲1.7密爾,而其外熱塑性黏著性聚醯亞胺 層各具厚度爲0.15密爾,且中間層或中間及外層兩者含有 不同量之欽酸鋇。 經滴部中央標準局員工消費合作社印製 實例1 6至1 8爲類似2密爾厚度多層聚醯亞胺薄膜,其中 間熱固性聚醯亞胺層含有5 0重量%鈦酸鋇與1 5重量%經 Zelec® ECP 3 005XC塗覆之矽氧粒子之混合物,而其外黏 著性熱塑性聚醯亞胺層則含有0至5 0重量%鈦酸鋇。 實例2 1爲1.3密爾厚度多層聚醯亞胺薄膜,其係由0.80密 爾熱固性聚醯亞胺層及0.50密爾黏合於一面且兩層皆含有 _-19- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) 528775 A7 B7 五、發明説明(17 ) 鈦酸鋇之熱塑性黏著性聚醯亞胺層所組成。 表IV摘列多層薄膜之介電常數及伸長率。 表IV 實例 多層薄膜* BaTiO, 介電常數 伸長率 號碼 厚度(mil) iWt.%) ilMHz· RT) (%) 13 0.15KJ/1.7HA/0.15KJ 0/50/0 7.6 11.2 14 0.15KJ/1.7HA/0.15KJ 30/50/30 8.9 6.6 15 0.15KJ/1.7HA/0.15KJ 30/63/30 14.3 4.7 ιυ 0.15KJ/1.7HA/0.15KJ 0/50+15Z**/0 8.5 11.7 17 0.15KJ/1.7HA/0.15KJ 30/50+15Z**/30 12.4 9.8 18 0.15KJ/1.7HA/0.15KJ 50/50+15Z**/50 13.8 7.6 19 0.15KJ/1.7HA/0.15KJ 40/50/40 11.1 5.8 20 0.15KJ/1.7HA/0.15KJ 50/50/50 12.7 5.3 21 0.80HA/0.50KJ 50/30 9.3 9.5 *ΗΑ :Kapton® HA 係一 種聚醯亞胺薄膜,由苯均四酸二 (請先閱讀背面之注意事項再填寫本頁) 及4,4 ’ -二氨基二苯基醚所衍生,市面上可自杜邦公 司購得。 * *Z : Zelec® ECP 3005XC係一種具分子篩結構之經摻雜 經濟部中央標準局員工消費合作社印製 銻之氧化錫塗覆之矽氧殼塡料,市面上可自杜邦公 司購得。 實例2 2至2 7 實例2 2至2 7將説明含有1 5重量%聚醯胺酸一由4,4 ’ -氧 20- 本紙張尺度適用中國國家標準(CNS ) A4規格(210X 297公釐) 528775 A7 __ ----------—-— __ 五、發明説明(18 ) 笨二酸二酐,苯均四酸二酐及1,3 -雙(4 -氨基苯氧基)苯溶 於二甲基乙醯胺所衍生一之液體熱塑性聚醯胺酸之製備, 以液體聚醯胺酸塗覆陶磁鈦酸鋇填料粒子及將經塗覆之鈦 酸鋇粒子熱壓縮模製而成層合於銅箔之高介電常數聚醯亞 胺複合物。 聚醯胺酸係由1,3 -雙(4 -氨基苯氧基)苯(20.0克)於2 0分 鐘内一邊攪拌一邊溶于25毫升外I:淀而製備。將18克苯均四 酸二酐及4克4,4 ·-氧苯二酸二酐之固體混合物,以一次一 克,於總共2小時内加至該溶液中。最後的〇.8〇克固體混合 物部份,係以每1 5至2 0分0.2克之速度緩慢加入。該1 5重 量%聚酷亞胺酸溶液之最後黏度爲自1 〇 〇至2 〇 〇 〇泊。 將不同量之鈦酸鋇粒子分別與156毫升份之吡啶與二曱基 乙醯胺之混合物摻合3分鐘。然後將3 0毫升之吡啶-二甲基 乙醯胺漿體於.1小時内加至1 〇〇克之1 5重量%聚醯胺酸液 體,並一邊攪拌。將丙酮與甲醇之混合物(1〇〇克)加入,並 將混合物攪拌1 〇分鐘。將混合物過濾,用丙酮-甲醇洗滌 固體產物,並於6 0。〇下眞空烘乾(但未完全醯亞胺化)。將 經濟部中央標率局員工消費合作社印製 -------- ' 水------1T (讀先閱讀背面之注意事項再填寫本頁) 所得表面面塗覆聚醯胺酸之鈦酸鋇填料研磨至粒度小於i 〇 微米。 將銅箔層放在具厚度7至125微米之Kapton® Η聚醯亞胺 薄膜隔離物旁邊。將經聚醯胺酸表面塗層之鈦酸鋇填料粒 子放在薄膜隔離物中央。 將複合物放在金屬板中間並自280。(:至420。〇下層合5至4 小時’較佳在350。〇下3 0分鐘,以使聚醯胺酸完全聚醯胺 -------- - 21 - 本紙張尺度 528775 A7 B7 五、發明説明(19 ) 經滴部中央標準局員工消費合作社印製 酸硬化而成聚醯亞胺。 複合物之介電常數及剝離強度列示 於表V。 表V 實例 BaTiO, 介電常數 剝離強度 號碼 ·%) QMHz. RT) ipsi) 22 60 15 12 23 70 25 9 24 80 44 6 25 85 51 5 26 87 ! 78 3 27 92 164 2 實例28至34 實例2 8至3 4將説明本發明高介電常數單層熱塑性或熱固 性聚si亞胺薄膜之製備 ,其法係將實例2 2至2 7製備並含有 達9 1重量。/。鈦酸鋇粒子之聚醯胺酸液體塗覆成薄層並使其 硬化而成最終聚醯亞胺薄膜。結果列示於表V I 〇 表VI 實例 單層 BaTi03 厚度 介電常數 號碼 薄膜* (Weight.%) ^Micrometers) (MHz. RT、 28 HA 80 3.7 63 29 HA 91 3.1 137 30 KJ 78 9.1 65 31 KJ 85 7.3 89 I ' I i n I m I' ^ m im n ϋ— n m (請先閲讀背面之注意事項再填寫本頁) -22- 本紙張尺度適用中國國家標準(CNS ) A4規格(2〗0'乂297公釐) 528775 A7 B7 五、發明説明(20 ) 32 LJ 75 6.8 53 ο η LJ 80 8.0 60 34 JP 87 3.2 96 JP : Kapton® JP 是 一種聚 驢亞胺薄膜, 由5 5莫耳% 3,3 ’,4,4、聯苯四羧酸二酐,4 5莫耳%苯均四酸二 酐及100莫耳%4,4·-二氨基二苯醚所衍生。 獲得極薄之聚醯亞胺薄膜,其含有高量鈦酸鋇且介電常 數自53至137。 (讀先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合竹社印繁 -- 本紙張尺度適用中國國家標準(CNS ) Α4規格(210X297公釐)

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  1. 528775 第087109894號申請專利案 中文申請專利範圍修正本(91年6月) A B c D /年 ί ^y-1 六、申請專利範圍 1. 一種高介電常數撓性.聚醯亞胺薄膜,包含單層之黏著性熱 塑性聚醯亞胺薄膜,其中以薄膜之重量為準分散有4至85 重量%之鐵電陶磁填料,其中該聚醯亞胺薄膜之介電常數 為自4至60,該陶磁填料額外包括導電皮/芯微粒填料, 其中陶磁填料包含鈦酸鋇,且該黏著性熱塑性聚醯亞胺薄 膜包含共聚醯亞胺,其含有60至9 8莫耳%由4,4^氧苯二酸 二酐及具以下化學式之芳族醚二胺衍生之重複醯亞胺單元 η7·ν 〇-
    ΝΗ- 及2至40莫耳%具以下化學式之額外重複醯亞胺單元 〇 II 〇 II Μ R N~R' C C. II π 〇〇 其中R為芳族四價基及R1為含有至少二個碳原子之芳族 或脂族二胺之二價基,及二胺之二個氨基各附於二價基 之個別碳原子。 2.根據申請專利範圍第1項之高介電常數撓性聚醯亞胺薄 膜,其中陶磁填料係自以下所組成之族群中所選出: 本纸張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 528775 ABCD 申請專利範圍 BaTi〇3,SrTi〇3,Mg2Ti〇4,Bi2(Ti〇3)3,PbTi〇3, NiTi〇3 J CaTi〇3 5 ZnTi〇3 > Zn2Ti〇4 , BaSn03 ^ Bi(Sn03)3,CaSn〇3,pbSn〇3,MgSn〇3,SrSn〇3, ZnSn〇3,BaZr〇3,CaZr〇3,PbZn〇3,MgZn03,SrZr〇3 及 ZnZr03 〇 3·根據申請專利範圍第2項之高介電常數撓性聚醯亞胺薄 膜’其中陶磁填料之粒度自〇.10至10微米及介電常數自 100 至 30,〇〇〇 〇 4·根據申請專利範圍第丨項之高介電常數撓性聚醯亞胺薄 膜’其中陶磁填料之存在量為2〇至65重量%,且薄膜之 介電常數為自1〇至27。 5·根據申請專利範圍第丨項之高介電常數撓性聚醯亞胺薄 膜’其中陶磁填料包含陶磁填料之混合物。 6·根據申請專利範圍第丨項之高介電常數撓性聚醯亞胺薄 膜’其中陶磁填料表面塗覆熱塑性或熱固性聚醯亞胺。 7·根據申請專利範圍第6項之高介電常數撓性聚醯亞胺薄 膜’其中經表面塗覆之陶磁填料包含表面以衍生自苯均 四酸二酐及4,4’-二氨基二苯基醚之熱固性聚醯亞胺塗覆 之欽fee鎖。 8·根據申凊專利範圍第6項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含表面以衍生自4,4,_ 氧苯二酸二酐,苯均四酸二酐及、、雙”·氨基苯氧基) 苯之熱塑性聚醯亞胺塗覆之鈦酸鋇。 9·根據申請專利範圍第6項之高介電常數撓性聚醯亞胺薄 -2 - 528775 A8 、申請專利範圍 膜’其中經表面塗覆之陶磁填料包含表面以衍生自 ,4,4··聯苯四幾酸二纤,苯均四酸二奸及a〆,·二氨 基二苯基瞇之熱固性聚醯亞胺塗覆之鈦酸鋇。 10·根據申請專利範圍第1項之高介電常數撓性聚醯亞胺薄 膜,其中黏著性熱塑性聚醯亞胺薄膜係包含7〇至95莫耳 竓4,4 -氧豕一酸二肝,5至30莫耳%苯均四酸二肝及1〇〇 莫耳%1,3-雙(4-氨基苯氧基)苯之共聚物。 裝 11·根據申請專利範圍第i項之高介電常數撓性聚醯亞胺薄 膜,其中黏著性熱塑性聚醯亞胺薄膜係包含8 〇至9 5莫耳 、%1,3·雙(4-氨基苯氧基)苯,5至2〇莫耳%六亞甲二胺及 丄❽❹莫耳%々〆1-氧苯二酸二酐之共聚物。 線 12· —種高介電常數撓性多層聚醯亞胺薄膜,包含中間熱塑 性或熱固性聚醯亞胺薄膜層,其一面或二面具黏著性熱 塑性聚醯亞胺薄膜層且至少一層聚醯亞胺層中分散以薄 膜重量為準4至85重量%之鐵電陶磁填料,其中該多層聚 酿亞胺薄膜之介電常數為自4至60,該陶磁填料額外包 括導電皮/芯微粒填料,其中陶磁填料包含鈦酸鋇,且 該黏著性熱塑性聚醯亞胺薄膜包含共聚醯亞胺,其含有 60至98莫耳%由4,4’ -氧苯二酸二纤及具以下化學式之芳 族醚二胺衍生之重複醯亞胺單元
    -3- 528775 8 8 8 8 ABCD 申請專利範圍 及2至4 0莫耳%具以下化學式之額外重複醯亞胺單元 〇〇 II II /c、八 Nv R N-R C C μ丨4 〇 〇 其中R為芳族四價基及R1為含有至少二個碳原子之芳族 或脂族一胺之二價基,及二胺之二個氨基各附於二價基 之個別碳原子。 13·根據申請專利範圍第1 2項之高介電常數撓性多層聚醯亞 胺薄膜,其中陶磁填料係自以下所組成之族群中所選 出:BaTi〇3 , SrTi03,Mg2Ti04,Bi2(Ti03)3,PbTi03, NiTi03,CaTi03,ZnTi03,Zn2Ti04,BaSn03, Bi(Sn03)3,CaSn03,PbSn03,MgSn03,SrSn03, ZnSn03,BaZr03,CaZr03,PbZn03,MgZn03,SrZrO: 及:^nZr03 o 14· 請專利範圍第12項之高介電常數撓性多層聚醯亞 中陶磁填料包含陶磁填料之混合物。 ..Ά'丨 15·板.争請專利範圍第1 2項之高介電常數撓性聚酿亞胺薄 膜,其中陶磁填料表面塗覆熱塑性或熱固性聚醯亞胺。 16·根據申請專利範圍第1 5項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含表面以衍生自苯均 4 本纸張尺度適用中國國家標準(CNS) A4規格(210X297公釐) 528775 ABCD 六、申請專利範圍 四酸二Sf及4,4,-二氨基二苯基醚之熱固性聚醯亞胺塗覆 之鈥酸鋇。 17·根據申請專利範圍第丨5項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含表面以衍生自4,4,_ 氧苯二酸二酐,苯均四酸二酐及^弘雙。-氨基苯氧基) 苯之熱塑性聚醯亞胺塗覆之鈦酸鋇。 18. 根據申請專利範圍第丨5項之高介電常數撓性聚醯亞胺薄 膜’其中經表面塗覆之陶磁填料包含表面以衍生自 3,3、4,4’-聯苯四羧酸二酐,苯均四酸二酐及4,4、二氣 基二苯基趟之熱固性聚醯亞胺塗覆之鈦酸鋇。 19. 根據申請專利範圍第丨2項之高介電常數撓性多層聚醯亞 胺薄膜’其中陶磁填料包含表面塗覆聚醯亞胺之陶磁填 料與未塗覆填料之混合物。 20·根據申請專利範圍第丨9項之高介電常數撓性多層聚醯亞 胺薄膜’其中陶磁填料包含經聚醯亞胺塗覆之鈇酸鋇與 未塗覆之鈦酸鋇之混合物。 21·根據申請專利範圍第丨2項之高介電常數撓性多層聚醯亞 胺薄膜’其中中間聚醯亞胺薄膜層含有4〇至75重量%之 陶磁填料’而黏著性熱塑性聚醯亞胺薄膜層則含有2 0至 5 0重量%之陶磁填料。 22·根據申請專利範圍第12項之高介電常數撓性多層聚醯亞 胺薄膜,其中中間聚醯亞胺薄膜層之厚度自5至12〇微 米,而黏著性熱塑性薄膜層之厚度則自5至60微米。 23.根據申請專利範圍第12項之高介電常數撓性多層聚醯亞
    528775 A8
    胺薄膜’包含自苯均四酸二酐與4,4,-二氨基二苯基醚衍 生之中間熱固性聚醯亞胺層,及自4,4,_苯二酸二酐,苯 均四酸一奸及1,3_雙(4_氨基苯氧基)苯衍生之外部熱塑 性黏著性聚醯亞胺層。 裝 24· —種高介電常數聚醯亞胺液體,包含溶于丨❹至%重量% •if性有機溶劑中之!至30重量%熱塑性或熱固性聚醯胺 酸,其中分散4至90重量%之鐵電陶磁填料且其介電常數 為4至300,其中該陶磁填料辱外包括導電皮/芯微粒填 料,其中陶磁填料包含鈦酸鋇,且該黏著性熱塑性聚醯 亞胺薄膜包含共聚醯亞胺,其含有6〇至98莫耳%由4,4、 氧苯二酸二酐及具以下化學式之芳族醚二胺衍生之重複 醯亞胺單元 Γ
    NJH, 訂 線 及2至40莫耳%具以下化學式之額外重複醯亞胺單元 〇 〇 η II /C、 /C、 N、,R、 c c . II Π Ο Ο -6 - 528775 A8 C8 D8 、申請專利範圍 其中R為芳族四價基及R1為含有至少二個碳原子之芳族 或脂族二胺之二價基,及二胺之二個氨基各附於二價基 之個別碳原子。 25. 根據申請專利範圍第24項之高介電常數聚醯亞胺液體, 其中陶磁填料係自以下所組成之族群中選出:BaTi03, SrTi03,Mg2Ti04,Bi2(Ti03)3,PbTi03,NiTi03, CaTi03,ZnTi03,Zn2Ti04,BaSn03,Bi(Sn03)3, CaSn03 ,PbSn03 ,MgSn03 ,SrSn03 ,ZnSn03 , BaZr03,CaZr03,PbZn03,MgZn03,SrZr03 及 ZnZr〇3 0 26. 根據申請專利範圍第24項之高介電常數聚醯亞胺液體, 其中陶磁填料表面塗覆熱塑性或熱固性聚醯胺。 27. 根據申請專利範圍第24項之高介電常數聚醯亞胺液體, 其中陶磁填料包含經聚醯亞胺塗覆表面之陶磁填料與未 塗覆之陶磁填料之混合物。 28. —種高介電常數撓性聚醯亞胺薄膜,包含單層熱固性聚 醯亞胺,其中以薄膜之重量為準分散4至85重量%之表面 經熱塑性或熱固性聚醯亞胺塗覆之陶磁填料,其中該聚 醯亞胺薄膜之介電常數為4至60,該陶磁填料額外包括 導電皮/芯微粒填料,其中陶磁填料包含鈦酸鋇,且該 黏著性熱塑性聚醯亞胺薄膜包含共聚醯亞胺,其含有60 至98莫耳%由4,4·-氧苯二酸二酐及具以下化學式之芳族 醚二胺衍生之重複醯亞胺單元 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐) 裝 玎 線 528775 A8 一 B8 C8
    及2至40莫耳%具以下化學式之額外重複醯亞胺單元 〇 〇 II II N R N-R N ^ N / C C . II li 〇 〇 八中11為^•族四價基及R為含有至少二個碳原子之芳族 或脂族二胺之二價基,及二胺之二個氨基各附於二價基 之個別碳原子。 29. 根據申請專利範圍第2 8項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含表面以衍生自苯均 四酸二酐及4,4,_二氨基二苯基醚之熱固性聚醯亞胺塗覆 之鈦酸鋇。 30. 根據申請專利範圍第28項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含表面以衍生自4,4,_ 氧苯二酸二酐,苯均四酸二酐及1,3_雙(4氨基苯氧基) 苯之熱塑性聚醯亞胺塗覆之鈦酸鋇。 31. 根據申請專利範圍第28項之高介電常數撓性聚醯亞胺薄 -8-
    528775 A8 B8 C8 D8
    膜,其中經表面塗覆之陶磁填料包含以衍生自3,3,,4,4,_ 聯苯四羧酸二酐及4,4,-二氨基二苯基醚之熱固性聚醯亞 胺塗覆之鈦酸鋇。 32.根據申請專利範圍第2 8項之高介電常數撓性聚醯亞胺薄 膜,其中經表面塗覆之陶磁填料包含經熱塑性或熱固性 聚醯亞胺塗覆之陶磁填料及未塗覆之陶磁填料。 33· —種製備高介電常數聚醯亞胺複合物之方法,包含將表 面經聚醯亞胺塗覆之陶磁填料於溫度28〇 t至42〇充下壓 縮模製或溶體擠壓5至4小時,其中複合物之介電常數為 1 5至170,該陶磁填料額外包括導電皮/芯微粒填料, 其中陶磁填料包含鈦酸鋇,且該黏著性熱塑性聚醯亞胺 薄膜包含共聚醯亞胺,其含有60至98莫耳%由4,4,-氧苯 二酸二酐及具以下化學式之芳族醚二胺衍生之重複醯亞 胺單元
    及2至40莫耳%具以下化學式之額外重複醯亞胺單元 〇〇 II II 八八 n、,R、严R. C C -9- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公爱) A8 528775 BCD 々、申請專利範圍 其中R為芳族四價基及R1為含有至少二個碳原子之芳族 或脂族二胺之二價基,及二胺之二個氨基各附於二價基 之個別碳原子。 34. 根據申請專利範圍第3 3項之方法,其中表面經聚醯亞胺 塗覆之陶磁填料包含表面以衍生自4,4、氧苯二酸二酐, 苯均四酸二酐及1,3-雙(4-氨基苯氧基)苯之熱塑性聚醯 亞胺塗覆之鈦酸鋇。 35. —種高介電常數聚醯亞胺複金物,其係根據申請專利範 圍第33項之方法製備並層合於銅箔層。 ^紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐)
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