TW501939B - Composition and method for rendering halogen-containing gas harmless - Google Patents

Composition and method for rendering halogen-containing gas harmless Download PDF

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Publication number
TW501939B
TW501939B TW90112833A TW90112833A TW501939B TW 501939 B TW501939 B TW 501939B TW 90112833 A TW90112833 A TW 90112833A TW 90112833 A TW90112833 A TW 90112833A TW 501939 B TW501939 B TW 501939B
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TW
Taiwan
Prior art keywords
halogen
gas
pesticide
based gas
patent application
Prior art date
Application number
TW90112833A
Other languages
English (en)
Chinese (zh)
Inventor
Yuji Hayasaka
Hitoshi Atobe
Yoshio Furuse
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Application granted granted Critical
Publication of TW501939B publication Critical patent/TW501939B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/18—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/76—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36
    • B01J23/78—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper combined with metals, oxides or hydroxides provided for in groups B01J23/02 - B01J23/36 with alkali- or alkaline earth metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/112—Metals or metal compounds not provided for in B01D2253/104 or B01D2253/106
    • B01D2253/1124—Metal oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/25—Coated, impregnated or composite adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/306—Surface area, e.g. BET-specific surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20738—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/202—Single element halogens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Semiconductors (AREA)
TW90112833A 2000-05-26 2001-05-25 Composition and method for rendering halogen-containing gas harmless TW501939B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000156236A JP3840877B2 (ja) 2000-05-26 2000-05-26 ハロゲン系ガスの除害剤、除害方法及びその用途

Publications (1)

Publication Number Publication Date
TW501939B true TW501939B (en) 2002-09-11

Family

ID=18661053

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90112833A TW501939B (en) 2000-05-26 2001-05-25 Composition and method for rendering halogen-containing gas harmless

Country Status (2)

Country Link
JP (1) JP3840877B2 (ja)
TW (1) TW501939B (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11753698B2 (en) 2020-09-25 2023-09-12 Carbon Technology Holdings, LLC Bio-reduction of metal ores integrated with biomass pyrolysis
US11851723B2 (en) 2021-02-18 2023-12-26 Carbon Technology Holdings, LLC Carbon-negative metallurgical products
US11879107B2 (en) 2011-04-15 2024-01-23 Carbon Technology Holdings, LLC High-carbon biogenic reagents and uses thereof
US11932814B2 (en) 2021-04-27 2024-03-19 Carbon Technology Holdings, LLC Biocarbon blends with optimized fixed carbon content, and methods for making and using the same
US11987763B2 (en) 2021-07-09 2024-05-21 Carbon Technology Holdings, LLC Processes for producing biocarbon pellets with high fixed-carbon content and optimized reactivity, and biocarbon pellets obtained therefrom

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3871127B2 (ja) 2002-11-29 2007-01-24 関東電化工業株式会社 ベントガスの除害方法及びその処理剤
JP2005046746A (ja) * 2003-07-29 2005-02-24 Japan Organo Co Ltd ガス分離装置
JP4179377B2 (ja) * 2004-12-15 2008-11-12 新東工業株式会社 脱臭機能付き集塵機
GB0520468D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Fluorine abatement
JP5499816B2 (ja) * 2010-03-24 2014-05-21 宇部興産株式会社 ハロゲン系ガスの除去方法
JP2013086088A (ja) * 2011-10-24 2013-05-13 Taiyo Nippon Sanso Corp ハロゲン化物粒子を含むガスの除害方法
JP2015112545A (ja) * 2013-12-12 2015-06-22 宇部興産株式会社 ガスの処理装置及びガスの処理カートリッジ
JP6252153B2 (ja) * 2013-12-12 2017-12-27 宇部興産株式会社 ガスの処理装置及びガスの処理カートリッジ
JP2015112544A (ja) * 2013-12-12 2015-06-22 宇部興産株式会社 ガスの処理装置及びガスの処理カートリッジ
JP2020031135A (ja) * 2018-08-22 2020-02-27 株式会社ディスコ シリコンウェーハの加工方法及びプラズマエッチングシステム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161618A (ja) * 1984-08-30 1986-03-29 Takeda Chem Ind Ltd 有害ガス吸着剤
JPH0564654A (ja) * 1991-01-24 1993-03-19 Sakai Chem Ind Co Ltd 脱臭方法
JPH06198128A (ja) * 1993-12-01 1994-07-19 Ebara Res Co Ltd ハロゲン系化合物を含有する排ガスの処理方法
JPH07308538A (ja) * 1994-03-24 1995-11-28 Japan Pionics Co Ltd 有害ガスの浄化剤
JPH09202652A (ja) * 1995-11-24 1997-08-05 Olympus Optical Co Ltd 屈折率分布型光学素子の製造方法
KR100650110B1 (ko) * 1999-07-09 2006-11-24 토다 고교 가부시끼가이샤 다이옥신 함유 배출 가스의 처리방법 및 다이옥신 발생을억제하기 위한 복합 촉매 조성물

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11879107B2 (en) 2011-04-15 2024-01-23 Carbon Technology Holdings, LLC High-carbon biogenic reagents and uses thereof
US11891582B2 (en) 2011-04-15 2024-02-06 Carbon Technology Holdings, LLC High-carbon biogenic reagents and uses thereof
US11959038B2 (en) 2011-04-15 2024-04-16 Carbon Technology Holdings, LLC High-carbon biogenic reagents and uses thereof
US11965139B2 (en) 2011-04-15 2024-04-23 Carbon Technology Holdings, LLC Systems and apparatus for production of high-carbon biogenic reagents
US11753698B2 (en) 2020-09-25 2023-09-12 Carbon Technology Holdings, LLC Bio-reduction of metal ores integrated with biomass pyrolysis
US11851723B2 (en) 2021-02-18 2023-12-26 Carbon Technology Holdings, LLC Carbon-negative metallurgical products
US11932814B2 (en) 2021-04-27 2024-03-19 Carbon Technology Holdings, LLC Biocarbon blends with optimized fixed carbon content, and methods for making and using the same
US11987763B2 (en) 2021-07-09 2024-05-21 Carbon Technology Holdings, LLC Processes for producing biocarbon pellets with high fixed-carbon content and optimized reactivity, and biocarbon pellets obtained therefrom

Also Published As

Publication number Publication date
JP3840877B2 (ja) 2006-11-01
JP2001338910A (ja) 2001-12-07

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