TW283790B - - Google Patents

Info

Publication number
TW283790B
TW283790B TW084113481A TW84113481A TW283790B TW 283790 B TW283790 B TW 283790B TW 084113481 A TW084113481 A TW 084113481A TW 84113481 A TW84113481 A TW 84113481A TW 283790 B TW283790 B TW 283790B
Authority
TW
Taiwan
Application number
TW084113481A
Other languages
Chinese (zh)
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of TW283790B publication Critical patent/TW283790B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
  • Ceramic Capacitors (AREA)
TW084113481A 1994-08-01 1995-12-18 TW283790B (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/283,441 US5585300A (en) 1994-08-01 1994-08-01 Method of making conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes

Publications (1)

Publication Number Publication Date
TW283790B true TW283790B (fr) 1996-08-21

Family

ID=23086089

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113481A TW283790B (fr) 1994-08-01 1995-12-18

Country Status (6)

Country Link
US (3) US5585300A (fr)
EP (1) EP0697720B1 (fr)
JP (1) JPH08116032A (fr)
KR (1) KR100341555B1 (fr)
DE (1) DE69529368T2 (fr)
TW (1) TW283790B (fr)

Families Citing this family (163)

* Cited by examiner, † Cited by third party
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EP0697720B1 (fr) 2003-01-15
DE69529368D1 (de) 2003-02-20
US5793057A (en) 1998-08-11
KR960009197A (ko) 1996-03-22
JPH08116032A (ja) 1996-05-07
EP0697720A1 (fr) 1996-02-21
DE69529368T2 (de) 2003-09-04
US5585300A (en) 1996-12-17
US5665628A (en) 1997-09-09
KR100341555B1 (ko) 2003-03-12

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