TW200727335A - Method for forming resist pattern, and method for manufacturing semiconductor device - Google Patents

Method for forming resist pattern, and method for manufacturing semiconductor device

Info

Publication number
TW200727335A
TW200727335A TW095105127A TW95105127A TW200727335A TW 200727335 A TW200727335 A TW 200727335A TW 095105127 A TW095105127 A TW 095105127A TW 95105127 A TW95105127 A TW 95105127A TW 200727335 A TW200727335 A TW 200727335A
Authority
TW
Taiwan
Prior art keywords
resist film
light
optical system
substrate
outer edge
Prior art date
Application number
TW095105127A
Other languages
English (en)
Chinese (zh)
Other versions
TWI296128B (enExample
Inventor
Daisuke Kawamura
Tsuyoshi Shibata
Shinichi Ito
Original Assignee
Toshiba Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Kk filed Critical Toshiba Kk
Publication of TW200727335A publication Critical patent/TW200727335A/zh
Application granted granted Critical
Publication of TWI296128B publication Critical patent/TWI296128B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/7045—Hybrid exposures, i.e. multiple exposures of the same area using different types of exposure apparatus, e.g. combining projection, proximity, direct write, interferometric, UV, x-ray or particle beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW095105127A 2005-02-24 2006-02-15 Method for forming resist pattern, and method for manufacturing semiconductor device TW200727335A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005049394A JP4634822B2 (ja) 2005-02-24 2005-02-24 レジストパターン形成方法および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
TW200727335A true TW200727335A (en) 2007-07-16
TWI296128B TWI296128B (enExample) 2008-04-21

Family

ID=36932307

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095105127A TW200727335A (en) 2005-02-24 2006-02-15 Method for forming resist pattern, and method for manufacturing semiconductor device

Country Status (4)

Country Link
US (1) US20060194155A1 (enExample)
JP (1) JP4634822B2 (enExample)
CN (1) CN100474119C (enExample)
TW (1) TW200727335A (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142181A (ja) * 2005-11-18 2007-06-07 Toshiba Corp 基板処理方法及びリンス装置
JP2007194484A (ja) * 2006-01-20 2007-08-02 Toshiba Corp 液浸露光方法
JP2007266074A (ja) * 2006-03-27 2007-10-11 Toshiba Corp 半導体装置の製造方法及び液浸リソグラフィーシステム
JP4357514B2 (ja) * 2006-09-29 2009-11-04 株式会社東芝 液浸露光方法
JP4923936B2 (ja) * 2006-10-13 2012-04-25 東京エレクトロン株式会社 塗布、現像装置及び塗布、現像方法
JP4813333B2 (ja) * 2006-11-21 2011-11-09 東京エレクトロン株式会社 膜形成方法、膜形成装置、パターン形成方法およびコンピュータ読取可能な記憶媒体
JP4331199B2 (ja) 2006-11-29 2009-09-16 東京エレクトロン株式会社 液浸露光用塗布膜形成装置および塗布膜形成方法
JP2008153450A (ja) 2006-12-18 2008-07-03 Tokyo Electron Ltd 塗布膜処理方法および塗布膜処理装置
JP4922858B2 (ja) * 2007-07-30 2012-04-25 株式会社東芝 パターン形成方法及び洗浄装置
JP2009130031A (ja) * 2007-11-21 2009-06-11 Fujitsu Microelectronics Ltd 半導体装置の製造方法
JP5133730B2 (ja) * 2008-02-19 2013-01-30 セイコーインスツル株式会社 圧電振動片の製造方法
JP2009295716A (ja) 2008-06-04 2009-12-17 Toshiba Corp 半導体装置の製造方法及び基板処理装置
JP2011082369A (ja) * 2009-10-08 2011-04-21 Toshiba Corp 半導体装置の製造方法及び製造システム
CN102455593B (zh) * 2010-10-25 2013-10-09 京东方科技集团股份有限公司 光刻胶图案的形成方法和阵列基板的制造方法
JP6456238B2 (ja) * 2015-05-14 2019-01-23 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
CN109164677B (zh) * 2018-09-05 2021-12-07 京东方科技集团股份有限公司 光刻方法、柔性基板的制备方法以及光刻胶烘干装置
CN110391135B (zh) * 2019-08-08 2022-02-08 武汉新芯集成电路制造有限公司 去除光刻胶残留的方法及半导体器件的制造方法
CN113658854B (zh) * 2021-10-21 2022-01-28 绍兴中芯集成电路制造股份有限公司 光刻方法和半导体器件的制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4007047A (en) * 1974-06-06 1977-02-08 International Business Machines Corporation Modified processing of positive photoresists
JPH10335216A (ja) * 1997-05-30 1998-12-18 Dainippon Screen Mfg Co Ltd 基板処理方法
JP3337020B2 (ja) * 2000-02-04 2002-10-21 日本電気株式会社 半導体装置の製造方法
US6689519B2 (en) * 2000-05-04 2004-02-10 Kla-Tencor Technologies Corp. Methods and systems for lithography process control
JP3943828B2 (ja) * 2000-12-08 2007-07-11 東京エレクトロン株式会社 塗布、現像装置及びパターン形成方法
KR100964772B1 (ko) * 2002-03-29 2010-06-23 호야 가부시키가이샤 포토마스크 블랭크의 제조 방법 및 제조 장치와, 불필요한 막 제거 장치
JP3894104B2 (ja) * 2002-11-15 2007-03-14 東京エレクトロン株式会社 現像方法及び現像装置及び現像液再生装置
US20050202351A1 (en) * 2004-03-09 2005-09-15 Houlihan Francis M. Process of imaging a deep ultraviolet photoresist with a top coating and materials thereof
JP4220423B2 (ja) * 2004-03-24 2009-02-04 株式会社東芝 レジストパターン形成方法
JP4521219B2 (ja) * 2004-04-19 2010-08-11 株式会社東芝 描画パターンの生成方法、レジストパターンの形成方法、及び露光装置の制御方法
US7244665B2 (en) * 2004-04-29 2007-07-17 Micron Technology, Inc. Wafer edge ring structures and methods of formation
JP2005353763A (ja) * 2004-06-09 2005-12-22 Matsushita Electric Ind Co Ltd 露光装置及びパターン形成方法
JP4271109B2 (ja) * 2004-09-10 2009-06-03 東京エレクトロン株式会社 塗布、現像装置、レジストパターン形成方法、露光装置及び洗浄装置

Also Published As

Publication number Publication date
JP2006235230A (ja) 2006-09-07
CN100474119C (zh) 2009-04-01
US20060194155A1 (en) 2006-08-31
TWI296128B (enExample) 2008-04-21
CN1825209A (zh) 2006-08-30
JP4634822B2 (ja) 2011-02-16

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MM4A Annulment or lapse of patent due to non-payment of fees