JP4357514B2 - 液浸露光方法 - Google Patents
液浸露光方法 Download PDFInfo
- Publication number
- JP4357514B2 JP4357514B2 JP2006268074A JP2006268074A JP4357514B2 JP 4357514 B2 JP4357514 B2 JP 4357514B2 JP 2006268074 A JP2006268074 A JP 2006268074A JP 2006268074 A JP2006268074 A JP 2006268074A JP 4357514 B2 JP4357514 B2 JP 4357514B2
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- substrate
- immersion
- defects
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/42—Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of the same original
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
Description
図1は、本発明の一実施形態に係わる液浸露光方法に使用した液浸露光装置の概略構成を示す図である。
先に説明した第1の実施形態では、ゾーン0,1,2を基板中心から等距離の境界線で定めて決定したが、必ずしもこれに限るものではない。第2の実施形態では、ゾーンの決定の仕方について説明する。
なお、本発明は上述した各実施形態に限定されるものではない。実施形態に用いたレジスト膜、反射防止膜、液浸保護膜の材料や膜厚などは、仕様に応じて適宜変更可能である。また、実施形態では、レジスト膜の上に液浸保護膜を形成したが、レジスト膜が十分な疎水性を有するものであれば液浸保護膜を省略することも可能である。さらに、反射防止膜も省略することが可能である。
12…レチクル
13…投影レンズ系
14…試料ステージ
15…フェンス
17…サポート板
20…半導体基板(被処理基板)
31…半導体ウェハ
32…チップ
33…欠陥
36…1回露光領域
37…多重露光領域
Claims (4)
- 被処理基板上にレジスト膜又はレジスト膜とその上に形成された液浸保護膜からなるレジスト層を形成する工程と、
前記基板上のレジスト層と露光装置の光学系との間に局所的に液体を介在させた状態で、前記基板と露光用マスクを相対的に移動させつつ液浸露光を行い、且つ液浸露光により生じる欠陥数に基づき露光領域を区分し、区分した露光領域毎に欠陥数が多いほど回数を多くするように多重露光回数を決定し、決定した多重露光回数で各露光領域の露光を行う工程と、
前記露光された被処理基板に現像処理を施すことにより、前記レジスト膜からなるレジストパターンを形成する工程と、
を含むことを特徴とする液浸露光方法。 - 前記多重露光の回数が多い露光領域に対する1回当たりの露光時の露光量は、前記多重露光の回数が少ない露光領域に対する1回当たりの露光時の露光量よりも少ないことを特徴とする請求項1記載の液浸露光方法。
- 前記多重露光の回数が多い露光領域に対する総露光量は、前記多重露光の回数が少ない露光領域に対する総露光量と同一であることを特徴とする請求項2記載の液浸露光方法。
- 前記多重露光の回数が少ない露光領域に対する露光回数は1回であることを特徴とする請求項1記載の液浸露光方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006268074A JP4357514B2 (ja) | 2006-09-29 | 2006-09-29 | 液浸露光方法 |
US11/861,376 US7907250B2 (en) | 2006-09-29 | 2007-09-26 | Immersion lithography method |
TW096135792A TW200836244A (en) | 2006-09-29 | 2007-09-26 | Immersion lithography method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006268074A JP4357514B2 (ja) | 2006-09-29 | 2006-09-29 | 液浸露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008091424A JP2008091424A (ja) | 2008-04-17 |
JP4357514B2 true JP4357514B2 (ja) | 2009-11-04 |
Family
ID=39260782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006268074A Expired - Fee Related JP4357514B2 (ja) | 2006-09-29 | 2006-09-29 | 液浸露光方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7907250B2 (ja) |
JP (1) | JP4357514B2 (ja) |
TW (1) | TW200836244A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10065672B2 (en) | 2013-09-19 | 2018-09-04 | Hitachi Automotive Systems, Ltd. | Electronic control device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100963036B1 (ko) * | 2007-10-17 | 2010-06-14 | 주식회사 엘지화학 | 회절 격자를 이용한 레이저 간섭 리소그래피 방법 |
EP2221669A3 (en) * | 2009-02-19 | 2011-02-09 | ASML Netherlands B.V. | A lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
EP2264529A3 (en) * | 2009-06-16 | 2011-02-09 | ASML Netherlands B.V. | A lithographic apparatus, a method of controlling the apparatus and a method of manufacturing a device using a lithographic apparatus |
US9568828B2 (en) * | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
US10261422B2 (en) * | 2014-08-07 | 2019-04-16 | Asml Netherlands B.V. | Lithography apparatus and method of manufacturing a device |
JP6456238B2 (ja) * | 2015-05-14 | 2019-01-23 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US10627721B2 (en) | 2015-10-01 | 2020-04-21 | Asml Netherlands B.V. | Lithography apparatus, and a method of manufacturing a device |
CN111458976B (zh) * | 2020-05-19 | 2021-09-07 | 中国科学院光电技术研究所 | 一种制作三维旋转对称微结构的一体化成型方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3472009B2 (ja) * | 1995-03-20 | 2003-12-02 | 富士通株式会社 | 露光データ作成装置、露光データ作成方法及び荷電粒子ビーム露光装置 |
JP3747566B2 (ja) | 1997-04-23 | 2006-02-22 | 株式会社ニコン | 液浸型露光装置 |
US6534242B2 (en) * | 1997-11-06 | 2003-03-18 | Canon Kabushiki Kaisha | Multiple exposure device formation |
JP4077951B2 (ja) * | 1998-01-14 | 2008-04-23 | 株式会社ルネサステクノロジ | 欠陥解析方法、記録媒体及び工程管理方法 |
US6351304B1 (en) * | 1999-06-04 | 2002-02-26 | Canon Kabushiki Kaisha | Multiple exposure method |
JP3501688B2 (ja) * | 1999-07-01 | 2004-03-02 | キヤノン株式会社 | 露光方法、露光装置、およびデバイス製造方法 |
US6266144B1 (en) * | 1999-08-26 | 2001-07-24 | Taiwan Semiconductor Manufacturing Company | Stepper and scanner new exposure sequence with intra-field correction |
US20040121246A1 (en) * | 2002-09-20 | 2004-06-24 | Brown David R. | Lithography process to reduce seam lines in an array of microelements produced from a sub-mask and a sub-mask for use thereof |
JP4352874B2 (ja) * | 2002-12-10 | 2009-10-28 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
KR20050085235A (ko) * | 2002-12-10 | 2005-08-29 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
JP4352930B2 (ja) | 2003-02-26 | 2009-10-28 | 株式会社ニコン | 露光装置、露光方法及びデバイス製造方法 |
US7125652B2 (en) * | 2003-12-03 | 2006-10-24 | Advanced Micro Devices, Inc. | Immersion lithographic process using a conforming immersion medium |
JP4521219B2 (ja) * | 2004-04-19 | 2010-08-11 | 株式会社東芝 | 描画パターンの生成方法、レジストパターンの形成方法、及び露光装置の制御方法 |
JP4625673B2 (ja) * | 2004-10-15 | 2011-02-02 | 株式会社東芝 | 露光方法及び露光装置 |
DE102004050642B4 (de) * | 2004-10-18 | 2007-04-12 | Infineon Technologies Ag | Verfahren zur Überwachung von Parametern eines Belichtungsgerätes für die Immersionslithographie und Belichtungsgerät für die Immersionslithographie |
JP4634822B2 (ja) * | 2005-02-24 | 2011-02-16 | 株式会社東芝 | レジストパターン形成方法および半導体装置の製造方法 |
US7501227B2 (en) * | 2005-08-31 | 2009-03-10 | Taiwan Semiconductor Manufacturing Company | System and method for photolithography in semiconductor manufacturing |
US7676077B2 (en) * | 2005-11-18 | 2010-03-09 | Kla-Tencor Technologies Corp. | Methods and systems for utilizing design data in combination with inspection data |
US7782442B2 (en) * | 2005-12-06 | 2010-08-24 | Nikon Corporation | Exposure apparatus, exposure method, projection optical system and device producing method |
JP2007194484A (ja) * | 2006-01-20 | 2007-08-02 | Toshiba Corp | 液浸露光方法 |
-
2006
- 2006-09-29 JP JP2006268074A patent/JP4357514B2/ja not_active Expired - Fee Related
-
2007
- 2007-09-26 US US11/861,376 patent/US7907250B2/en not_active Expired - Fee Related
- 2007-09-26 TW TW096135792A patent/TW200836244A/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10065672B2 (en) | 2013-09-19 | 2018-09-04 | Hitachi Automotive Systems, Ltd. | Electronic control device |
US10435060B2 (en) | 2013-09-19 | 2019-10-08 | Hitachi Automotive Systems, Ltd. | Electronic control device |
US11312408B2 (en) | 2013-09-19 | 2022-04-26 | Hitachi Astemo, Ltd. | Electronic control device |
Also Published As
Publication number | Publication date |
---|---|
JP2008091424A (ja) | 2008-04-17 |
US7907250B2 (en) | 2011-03-15 |
US20080079919A1 (en) | 2008-04-03 |
TW200836244A (en) | 2008-09-01 |
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